CN108700222B

CN108700222B - Closing or locking device for a vacuum chamber

Info

Publication number: CN108700222B
Application number: CN201680072581.7A
Authority: CN
Inventors: U·奥尔登多夫; C·克莱森
Original assignee: Applied Materials Inc
Current assignee: Applied Materials Inc
Priority date: 2015-12-10
Filing date: 2016-12-02
Publication date: 2021-05-11
Anticipated expiration: 2036-12-02
Also published as: DE102015016081A1; WO2017097672A1; KR20180082587A; US20180339816A1; CN108700222A; JP2019502064A; KR102089267B1

Abstract

The present invention relates to a closing or locking device for a vacuum chamber (12), comprising: a shield (16) that can be arranged on the vacuum chamber (12) and surrounds the opening (14) of the vacuum chamber (12); a frame (15), the frame (15) being supported in such a way that the frame (15) is movable relative to the apron (16), and a closing cover (18) being movably arranged on the frame (15), wherein the closing cover (18) closes the opening (14) in a sealing manner against the apron (16) in a closed position (28); at least one magnet arrangement (30), the at least one magnet arrangement (30) being used to generate a closing force (C) acting between the apron (16) and the closing cover (18), the magnet arrangement (30) being engaged with the apron (16) and the closing cover (18).

Description

Closing or locking device for a vacuum chamber

Technical Field

The invention relates to a closing or locking device for a vacuum chamber, having a cover plate which can be arranged on the vacuum chamber and surrounds an opening of the vacuum chamber, and having a closing cover which closes the opening in a sealing manner against the cover plate in the closed position. In addition, the invention relates to a method of sealing an opening of a vacuum chamber by means of such a closing or locking device.

Background

Closing and locking devices for vacuum chambers are sufficiently known from the recent background art. In this connection, for example, WO 2005/121621 a1 describes a locking device of this type for a locking opening arranged in a wall between a first container and a second container, as well as a locking device arranged in the interior space of the first container and a skirt assigned to the locking device. The flange-like cover plate surrounding the opening is provided with a circumferential seal against which the closure device is pressed in a sealing manner.

In order to satisfy the required tightness, in particular to satisfy the high vacuum conditions within the vacuum chamber, it is desirable that the blocking device presses as evenly as possible in the circumferential direction in the regions which are arranged in a distributed manner around the opening. From a constructional and manufacturing technical point of view, it is particularly difficult to apply a uniform and homogeneous pressing force over the entire seal in the case of dimensions of the closure element or closure cover in the range of a few decimetres or a few metres, while the seal diameter of the seal is a few millimetres.

At e.g. 0.5m²To 5m²The compression of the sealing ring to achieve a stroke of about 0.5mm to 2mm on the surface of the closure lid in the range of (a) or higher has been shown to be extremely expensive in terms of construction and technical manufacturing. In addition, direct contact between the cover plate and the closure lid, which is usually made of metal, must be absolutely avoided for reasons relating to the required clean room conditions and for reasons relating to the particle-free environment of the vacuum chamber required in connection therewith.

In addition, in sealing the closing or locking device (normally sealing between the seal and the closing cover), any possible shearing movement between the seal and the metal part eventually resting on the seal must be absolutely avoided or kept to a minimum, also for the sake of meeting the required clean space conditions and for the reason of being free of particle contamination.

In addition, the fact is that the seals, which are usually made of elastomeric material (for example, made of rubber), may be subjected to ageing processes and the elastic properties of the seals may change as the closure or locking device continues to be used. Furthermore, it is contemplated that the vacuum chamber is operated at different vacuum or pressure levels. If the closing or locking device seals the interior space of the vacuum chamber from the atmosphere or another ambient pressure, for example from the differential pressure of an adjacent vacuum chamber, the contact pressure on the seal may vary depending on the respective prevailing pressure in the vacuum chamber and may result in relative movement between the seal and the metal parts of the closing or locking device.

In this respect, it is an object of the invention to provide an improved closing or locking device for a vacuum chamber, by means of which a particularly uniform and as far as possible completely vertical pressing force can be exerted on the seal when closing the vacuum chamber. In particular, the aim is to avoid any shear movement or friction (usually rubber elastic) on the seal between the apron and the closing cover, or to reduce it to an absolutely required minimum. With this device, a particularly low level of particle contamination and a high level of purity in the region of the vacuum chamber should be able to be achieved. Furthermore, the closure device or locking device should be characterized by a relatively low weight and by an easy and good manageability of its individual components in terms of manufacturing, assembly and long-term operation.

Disclosure of Invention

This object is solved by a closing or locking device according to independent patent claim 1. Advantageous embodiments are the subject matter of the dependent patent claims, respectively.

In this aspect, a closing or locking device for a vacuum chamber is provided. The closing or locking device has a shield which surrounds the opening of the vacuum chamber and can be arranged on the vacuum chamber or already arranged on the vacuum chamber or, where applicable, already integrated into the vacuum chamber or connected to the chamber wall. The shield is typically formed in a flange shape. The shield may protrude outwardly from the wall of the vacuum chamber and have or be formed with a contact surface extending through the opening of the vacuum chamber approximately perpendicular to the insertion direction.

Furthermore, the closing or locking device has a frame which is mounted in a movable manner on the protective plate. In turn, the closing cover is arranged in a movable manner. The closure lid can be brought to the apron and into a closed position in which the closure lid closes the opening of the apron in a sealing manner. In particular a frame movably mounted to the apron between an open position and a contact position. In the open position, the frame and a shield arranged on the frame release the opening of the vacuum chamber so that substrates to be handled in the vacuum chamber can be introduced into and removed from the vacuum chamber.

In the contact position, the frame is in mechanical contact with the sheeting. The closing cover, which is movably mounted on the frame, can in this contact position bear against the apron in a relatively loose manner, typically against a seal surrounding the opening of the apron, but without exerting a significant force on the seal. It is also conceivable that the closing cover of the frame on the panel in the contact position is contactless with respect to the panel or with respect to the sealing elements which are usually arranged on the panel.

The cover will be closed by moving relative to the frame from the contact position of the frame already in the contact position with the apron to effect sealing of the opening and thus the vacuum chamber.

Furthermore, the closing or locking device has at least one adjustable and/or controllable magnet device or a controllable magnet device operatively connected to the cover and the closing cover. Configured to generate a closing force (C) acting between the apron and the closing cover. By means of the adjustable magnet arrangement, the level and direction of the closing force acting between the apron and the closing cover can be changed. Depending on the particular implementation of the magnet arrangement, both attractive and repulsive forces may be applied to the closing lid to selectively open or close the opening of the vacuum chamber by the closing lid depending on the vacuum chamber and the pressure level prevailing in the environment of the vacuum chamber.

Thereby, the closing cover can be subjected to a relatively low level of lifting force or a relatively short or small movement relative to the frame. Such small or short movements can be carried out separately and can therefore be controlled or managed particularly well by the magnet arrangement. In particular, by this, a defined and particularly uniform deformation of the elastic seal between the closure cover and the cover plate can be achieved.

In another embodiment, the closure lid has a horizontal top surface. Furthermore, the closing cover can slide on the frame in a direction parallel to the surface normal (N) of the top surface. Typically, the closure cover is movably mounted to the frame between a parked position (U) and a closed position (S). The closure cover is usually movably arranged in translation or linearly on the frame. By the closure cover being movably mounted to the frame, substantially perpendicular to the top surface of the frame and also perpendicular to the horizontal plane of the frame, the closure cover may exert a uniform pressing force across the extension of the seal and thus a uniform compression of the seal under the influence of the magnet arrangement.

In particular, it is proposed that the closing cover is moved by the magnet arrangement only in a direction relative to the surface normal of the frame, with the frame in the contact position and the closing cover starting from a rest position on the frame. In this way any shearing forces or relative movements along the seal friction between the closure lid and the seal can be avoided to a considerable extent. When closing the closing or locking device, this means that when transferring the closing cover from a resting position on the frame to a closed position compressing the seal, the seal is solely or mainly only subjected to directed compression perpendicular to the horizontal plane of the closing cover or perpendicular to the horizontal plane of the seal. By the above-described guidance of the closing cover on the frame, friction or squeezing of the seal in the transverse direction can be significantly avoided.

In another embodiment, the closure cover is connected to the frame by at least one restoring element. The restoring element is configured to exert a restoring force on the closing cover, the restoring force pointing in a direction opposite to a closing force that can be generated by the magnet arrangement.

During the sealed closure of the closure or locking device, the magnet arrangement acting between the protective plate and the closure cover counteracts the restoring force of the at least one restoring element. This has the advantage that the magnet arrangement only needs to generate a force acting in a single direction, i.e. the closing direction.

The magnet arrangement is thus designed to generate a closing force which is greater than the restoring force acting on the closing cover. In particular, the closing force exerted by the magnet means on the closing cover is greater than the sum of the restoring forces of all the restoring elements used to mount the closing cover to the frame. That is, the magnet device acts against the restoring force of all the restoring elements to seal the opening. Since the closing force is greater than the sum of all restoring forces, this moves the closing cover into the closed position when the magnet arrangement is activated.

In contrast, for opening the vacuum chamber, it is proposed to reduce at least the closing force generated by the magnet arrangement to a predetermined extent such that the effective closing force is lower than the sum of all restoring forces of all restoring elements. As a result, the closure cover is set into the resting position on the frame via at least one, usually via a plurality of restoring elements, with a correspondingly low closing force or a complete lack of closing force of the magnet arrangement. In this case, the closure cover is in a loose contact position with the sealing element of the panel, or such that there may be at least one gap between the closure cover and the sealing element on the panel, such that with the frame in the contact position, the closure cover in the resting position is not in contact with the panel or the sealing element provided on the panel.

In a further embodiment, it is further proposed that the at least one restoring element is an elastic restoring element. In this respect, the restoring element is elastically deformable and provides the required restoring force on the basis of its elasticity. In particular, the elastic restoring element can be designed as a single piece in the form of a single part which, apart from its elastic deformation, is not subject to any relative movement between the frame or the closing cover. The one-piece design of the restoring element and its elastic deformability have proven to be advantageous for complying with the requirements of particle-free contamination. In particular, due to the elastic deformability of the at least one return element, friction between the return element and other parts of the closing or locking device is prevented.

According to a further embodiment, the at least one restoring element has at least one restoring spring. For example, the restoring spring can be designed in the form of a leaf spring. For example, the return spring may extend between opposing limbs (lamb) of the frame. The return spring may be connected to the closing cover substantially centrally between the limbs of the frame. By means of this, it is possible to realize that the closing cover is mounted to the frame in a centered or center-facing manner, which may have a favorable effect on the linear slidability of the frame.

According to another embodiment, the closing cover is arranged on the frame by a plurality of restoring elements spaced apart from each other. It has proven to be advantageous for a plurality of equally acting restoring elements and/or a plurality of restoring springs to be arranged in a distributed manner on the surface of the frame, i.e. across the surface of the closing cover. In this way, a uniform and as determined as possible restoring force can be provided across the surface of the frame or across the surface of the closing cover.

According to another embodiment of this embodiment, the sum of all restoring forces exerted by all restoring elements on the closing cover is greater than the weight force of the closing cover. For example, such an arrangement of the revert member enables horizontal, and thus oblique, alignment of the shield, and loading of the vacuum chamber from above. If the sum of all restoring forces applicable to the closing lid is greater than the weight of the closing lid, the closing lid can also be pulled upwards by the restoring element against its own weight into a resting position on the carrier. Such a restoring force arrangement has proven to be advantageous for flexible use of the closing or locking device, and in particular for various geometric alignments of the closing or locking device.

According to a further embodiment, the frame is arranged between the mentioned open position and the mentioned contact position on the apron or on the vacuum chamber in a rotating or slidable manner. In the open position, the frame and a closure cover arranged on the frame release the opening of the vacuum chamber.

In particular, the sliding guide is suitable for space-saving embodiments and for the arrangement of the closing or locking device in the region of the substrate treatment process station. In contrast to the rotatably mounted closing lid, the region outside the opening of the vacuum chamber, that is to say within the extension of the opening, can be used for arranging further components of the process station without having to remain free as in the case of the rotatably mounted closing lid.

The closure cover may be mounted to the guide in a non-contacting manner by means of one or more magnetic bearings. Thereby, a non-contacting and thus low-wear and low-maintenance sliding of the closure cover relative to the apron can be achieved. Unlike the rolling bearing guide of the closure cover, no wear occurs in the case of the closure cover being mounted on the basis of magnetic bearings. Thus, the desired clean space conditions and the desired particle contamination free in the area of the closing or locking means can be easily maintained.

Similar to the magnet arrangement provided for the closing or locking means, the magnetic bearings intended for the guide may each have an electromagnetic actuator and thus a magnetically interacting counterpart, as well as a distance measuring device and a control circuit, so that the closing cover is mounted in an almost freely suspended manner at a predetermined distance from the guide and is movable along the guide by means of one or more magnetic bearings.

According to another embodiment, the closure cover can be transferred from the rest position to the sealed closed position relative to the frame by means of a magnet arrangement with the frame in the contact position. In the contact position, the frame abuts the shield or the vacuum chamber. Thereby, the closing lid covers substantially the entire opening. Closing the lid seals the opening, however, it is still not airtight. In this respect, an air gap may also be present between the closure cover and the seal which is usually arranged on the skirt.

Only when the magnet arrangement is activated and by means of a sliding movement of the closure cover (controlled and managed by the magnet arrangement) perpendicular to the horizontal plane of the closure cover or to the horizontal plane of the carrier and thus also generally perpendicular to the horizontal plane of the opening, it is possible to compress the seal between the apron and the closure cover as uniformly as possible in the desired manner.

In another embodiment, at least one spacer is disposed between the frame and the apron. In the frame contact position on the sheeting, there is at least one spacer between the sides of the frame and the sheeting facing each other. Typically, a plurality of spacers are provided across the extension of the apron. Via one or more spacers, the frame supports itself on the apron when the contact position is reached. The geometric design and arrangement of at least one, and preferably a plurality of, spacers define the contact location of the frame on the apron.

The at least one spacer or the plurality of spacers extends perpendicular to the horizontal plane of the frame or to the horizontal plane of the sheeting and is at least just as large as the adjustment range of the closing cover between the resting position and the closed position on the frame plus the sum of the thickness of the closing cover. Based on the spacers measured in this way, it is therefore ensured that the closing cover arranged on the side of the frame facing the sheeting, for example with the sheeting or a seal provided on the sheeting, does not come into contact if the frame in the rest position and the closing cover on the frame are transferred from the open to the contact position.

In this way premature contact or sliding along the closure cover at the region of the seal due to a rotating or sliding movement of the frame can be prevented.

According to an embodiment, the magnet arrangement has at least one electromagnetic actuator arranged on one of the closure cover and the shield and at least one counterpart arranged on the other of the closure cover and the shield, the counterpart magnetically interacting with the electromagnetic actuator. For example, the electromagnetic actuator may be arranged on or embedded in the cover plate, while the counterpart may be arranged on the closure cover. It is therefore also conceivable for the fitting to be integrated into the closure lid or for the entire closure lid to act as a fitting.

The fitting or closing cover is designed to be ferromagnetic or permanent magnetic to interact magnetically with an electromagnetic actuator supplied with a corresponding control current. In the closed position of the closing cover on the panel, in which the closing cover completely covers the cross section of the opening of the vacuum chamber, the electromagnetic actuator and the counterpart assigned to the electromagnetic actuator can be covered at least in sections, for example, such that a sufficient closing or opening force can be generated.

It is generally envisaged that the electromagnetic actuator of the magnet arrangement is arranged on the closure lid, and the counterpart magnetically interacting with the electromagnetic actuator is arranged on or formed on the apron.

Furthermore, whether the electromagnetic actuator is arranged on the closure lid or on the apron, at least one further permanent magnet may still be arranged on each component on which the electromagnetic actuator is arranged, which further permanent magnet may provide further support for the force generated by the electromagnetic actuator. Thereby, for example, the closing cover can be kept closed without electrical power, so that the coil of the actuator can be supplied with a comparatively low current strength. Thereby, heat losses of the coil and problems associated therewith with cooling or thermal expansion may be reduced or even eliminated.

According to another embodiment, an elastically compressible seal closing the opening may be arranged on the closing cover or on the apron in an intermediate space between the closing cover and the mutually facing sides of the apron in the closed position of the closing cover. The seal may for example be arranged on the shield. For this purpose, the shield may have a groove surrounding the opening of the vacuum chamber, in which groove a circumferential seal is arranged. In the uncompressed initial state, the thickness or diameter of the sealing section is greater than the depth of the groove accommodating the seal, so that a part of the seal protrudes slightly at least from the side of the shield facing the closure cover, i.e. from the contact surface formed by the shield. By means of this embodiment, the closure cover can finally rest in a sealing manner on the seal without the metal parts of the apron and the closure cover touching each other.

The sides of the closing cover and the shield facing each other are usually designed as a level of a contact surface at least in sections, which in the closed position extends substantially perpendicular to a direction (z) dictated by the geometry of the opening of the vacuum chamber or to the closing direction of the closing force generated by the action of the magnet arrangement.

The seals are typically made of an elastomer and have an elasticity and/or compressibility suitable for the respective intended purpose. By distance-based adjustment of the closing force of the magnet arrangement, it is also conceivable to use different seals in terms of their elastic or mechanical properties, each for a different application of the closing or locking device. By means of the distance-based adjustment of the closing force, the closing or locking means can be adapted to different or varying elastic properties of the provided seal. The seal can be designed as an O-ring seal, i.e. as a circumferential sealing ring which is closed in the circumferential direction.

Although the sealing element is preferably arranged in a groove of the protective plate and the closure cover interacting therewith is not designed with a sealing element, the opposite embodiment is also conceivable, wherein the sealing element is arranged on the inner side of the closure cover, in particular in the groove of the closure cover, and wherein the protective plate is designed without a sealing element.

According to a further embodiment, the closing or locking device has at least one distance measuring device for measuring the distance between the closing cover and the protective plate. By means of the distance measuring device, it is possible to measure the distance between the closure cover and the shield at least at certain points in the direction of the closure force generated by the magnet device. If the closure cover rests above the seal on the cover plate, the distance between the closure cover and the cover plate is a measure for the currently prevailing compression or elastic deformation of the seal provided between the cover plate and the closure cover. Thus, the degree of elastic deformation of the seal may be measured by a distance measuring device.

Furthermore, it is provided for the closing or locking device that the magnet device can be adjusted by the distance measuring device as a function of the distance measured between the cover plate and the closing cover. By means of the distance-based adjustment of the magnet arrangement provided in this respect, different closing forces can be generated depending on the proximity distance, so that, for example, a seal provided between the cover plate and the closing cover can be compressed to a desired extent. By the distance measuring device provided in this respect and the counter-coupling with the at least one magnet device, various different states of the closing or locking device can be detected.

For example, by means of a distance measuring device, it can be measured whether and to what extent the cover plate and the closure cover are in sealing contact with one another. If the distance should be substantially higher than the maximum value provided for a suitable sealing, the closing force is for example incremented by the adjustable magnet arrangement until the distance falls below a maximum allowable maximum distance.

In the opposite case, it is also conceivable that in the event of detection or measurement of too small a distance between the cover plate and the closure cover, direct contact between the cover plate and the closure cover, which is usually made of metal, must be feared. In particular, this must be absolutely avoided for reasons of the required particle-free contamination in the surroundings of the vacuum chamber. In this case, the closing force level may be decremented until the minimum permissible distance between the closing cover and the shield is exceeded.

Thus, by distance-based adjustment and control of the magnet arrangement, it is also possible to respond to different or temporally varying pressure levels within the vacuum chamber. The closing or opening force itself may already be present on the closing lid by the pressure difference between the interior space of the vacuum chamber and the surroundings, or by the pressure difference on the sides of the closing lid or beyond the closing lid. By means of the adjustable distance-based magnet arrangement, varying pressure differences on opposite sides of the closing cover can be compensated for.

Furthermore, according to another embodiment, at least one electronic control circuit is provided, coupled with the distance measuring device and the at least one magnet device and configured to maintain and/or set a predetermined distance between the shield and the closure lid. The control circuit usually has a setpoint device by means of which the distance signal generated by the distance sensor can be compared with a predetermined target value. By comparing the target value and the current value, a controller downstream of the setpoint device may generate a control signal to control the magnet device, in particular to control the electromagnetic actuator.

Each control signal that may be generated by the controller may be supplied to the electromagnetic actuator, typically via an amplifier. The active and automatic adjustment of the closing force can be achieved by means of an electronic control circuit. In this way, a dynamic and situation dependent response to any sudden or continuous change in operational or environmental conditions (e.g. a change in the pressure difference between the interior space of the vacuum chamber and the ambient environment) may be performed. By means of a control circuit coupling the distance measuring device and the magnet device to one another, the required distance between the protective plate and the closing cover and thus also the required pressing force of the closing cover and the compression of the seal provided between the protective plate and the closing cover associated therewith take place and are maintained in a controlled manner.

According to another embodiment, for example, a plurality of magnet devices (each provided with its own distance measuring device) are arranged in a distributed manner across the extension of the opening and the extension of the flange-like shield. By providing a plurality of magnet arrangements arranged in a distributed manner across the extension of the opening, a particularly uniform pressing and closing force can be set between the shield and the closing cover. Furthermore, with this it is possible to compensate in a system-controlled manner for any deformations or manufacturing inaccuracies of the apron and/or the closing cover.

Each of the distance measuring devices respectively coupled with the magnet device is capable of (so to speak) self-adequately maintaining and setting a predetermined distance between the shield and the closure lid at the location of the corresponding distance measuring device or magnet device. Thereby, pressure-related and inevitably very small deformations of the closing cover (which would cause uneven pressing or closing forces of the seal) can be compensated in an effective manner and uneven gap sizes with respect to varying distances between the closing cover and the shield across the extension of the opening can be counteracted.

Any load-related or manufacturing-related deformations or component tolerances can be compensated in a system-controlled manner. By means of a plurality of magnet devices, each provided with its own distance measuring device, the extension across the opening or the extension across the protective plate can generate different closing forces and contact pressures at a local level, so that uniform compression of the seal is thus achieved as far as possible and can be set in a controlled manner, which brings about the tightness required for the closing or locking device. Within the scope of practical application, this embodiment is particularly advantageous, i.e. in particular if at least one of the closing cover and the apron is not designed to be absolutely rigid and/or subject to local load-related deformations.

Such effects can be eliminated and compensated in a system-controlled manner by a plurality of magnet devices, each provided with its own distance measuring device, respectively. Even relatively large component tolerances or mechanical deformations can be accepted for constructing the closure lid and/or the apron, so that for even relatively large-scale embodiments of the closure lid and the apron, a relatively complex construction with a relatively low weight can be provided.

According to a further embodiment of the closing or locking device, it is proposed that the magnet devices arranged in a distributed manner across the extension of the opening of the vacuum chamber, or across the extension of the shield, or across the extension of the closing cover, are each coupled with their own control circuit. Thereby, each of the magnet arrangements can set and adjust the current distance or gap size between the closure cover and the shield in their respective positions independently of each other.

Thus, the processing of the distance signals obtained from the respective distance measuring devices can be performed at a local level in the region of the magnet device and the control circuit. In this way, any data and signal lines can be minimized, which may prove particularly advantageous for applications in the vacuum field.

According to a further embodiment, the magnet devices arranged in a distributed manner across the extension of the opening and/or the distance measuring devices assigned to the magnet devices are coupled to a central control system. The central control system may be provided instead of the local control circuit or in addition to the respective magnet arrangement and the associated control circuit assigned to the distance sensor. By means of a central control system, which is coupled to all control circuits of all magnet arrangements, for example by means of a data connection, a synchronous control of the control circuits can be carried out in a particularly simple manner.

For example, the central control system can be coupled to the setpoint devices of the individual control circuits, respectively, so that the distance to be maintained between the shield and the closure cover can be transmitted simultaneously to all control circuits by the central control system. By means of the central control system, the user of the closing device or locking device obtains a particularly easy-to-operate operating element with which the distance to be maintained between the closing cover and the protective plate or the corresponding gap size can be set simultaneously or simultaneously for all control circuits and magnet arrangements.

For each of the various embodiments of the closure device or locking device, a wide variety of distance measuring devices may be provided. For example, the distance measuring device may have one or more distance sensors based on optical, magnetic or capacitive measurement principles. In particular, the sensors used are based on the inductive measuring principle or on eddy currents. The distance sensor is in particular arranged in close proximity to the magnet arrangement, in particular directly close to the electromagnetic actuator or a counterpart of the magnet arrangement, so that a higher degree of co-location (co-location) can be achieved as far as possible. The direct adjacent or even overlaying arrangement of the distance measuring device and the magnet device contributes to an improved accuracy of the measurement and control. The distance sensor can in particular be arranged on the protective plate and thus measure the distance, in particular the size of the gap between the protective plate and the closure cover. The distance sensor arranged on the apron is in particular configured to measure in a precise manner the distance to a defined reference surface or reference point of the closing cover, typically with an accuracy in the sub-millimeter or micrometer range.

Drawings

Other objects, features and advantageous embodiments of the present invention will be explained in the following description of exemplary embodiments, considered in conjunction with the accompanying drawings. In the drawings:

fig. 1 is a simplified schematic view of a closing or locking device with a frame supporting a closing cover in a contact position and a closing cover in a rest position on the frame;

FIG. 2 is a perspective representation of a closure or locking device with an open closure lid;

FIG. 3 is the closure or locking device according to FIG. 2 in a closed position;

FIG. 4 is another embodiment of a closing or locking device wherein the slidable frame is mounted to the apron or vacuum chamber in an open position;

FIG. 5 is the closing or locking device according to FIG. 4 with the frame and with the closing lid in the closed position;

FIG. 6 is a cross-section of the closure or locking device according to FIG. 2 in an open position;

FIG. 7 is a representation according to FIG. 6, however, with the frame in the contact position and the closure cover in the rest position on the frame; and

fig. 8 is a representation according to fig. 7, however, with the closing cover in a closed position relative to the frame.

Detailed Description

A closing and locking device 10, shown in cross-section in fig. 1, is provided, the closing and locking device 10 being for arrangement at an opening 14 of a vacuum chamber 12. The closing and locking device 10 has a shield 16, which is generally attached to the wall 11 of the vacuum chamber 12, schematically indicated in fig. 1. The shield 16 may be arranged flush with the opening 14 of the vacuum chamber 12 on the wall 11, or arranged to be an integral part of the vacuum chamber 12. In this regard, the shield 16 may also have an opening 14, and the opening of the shield 16 may generally coincide with the opening of the vacuum chamber 12.

As is evident from fig. 2, 3 and 6 to 8, the rather horizontal closing cover 18 in this embodiment is slidably mounted to the frame 15 by a plurality of restoring elements 82. A comparison of fig. 7 and 8 thus yields the slidability and the deflection of the restoring element 82. For example, the frame 15 is itself rotatably mounted to the apron 16. In fig. 2 and 3, a corresponding swivel or hinge axis 80 is shown. In the embodiment of fig. 4 and 5, the frame 15 is linearly mounted to the apron 16 in a sliding manner.

The side 19 of the closure cover facing the apron 16, i.e. the inside top surface 81, is substantially horizontal. In the rest position U of the closure cover 18 relative to the frame 15 as shown in fig. 7 and with the frame 15 in the contact position K on the apron 16, the top surface 81 is aligned substantially parallel to the horizontal plane of the seal 22, the seal 22 being located in the groove 20 on the side 17 of the apron 16 facing the closure cover 18.

In the closed position 28 shown in fig. 8, the closure lid 18 seals the opening 14 in an airtight and vacuum-tight manner. Furthermore, the protective plate 16 and the closure cover 18 are provided with at least one magnet arrangement 30, by means of which a closing force (C) can be exerted on the closure cover 18.

The apron 16 may have a flange-like geometry and, in particular, a seal 22 on the side 17 facing the closing cover 18 and acting as a contact surface, the seal 22 extending around the opening 14, typically in the region of the opening boundary of the apron 16. In the present disclosure, a seal 22 made of a resilient and deformable material is disposed in the surrounding groove 20 of the apron 16. However, the seal 22 can also be arranged in a corresponding groove of the closure cover 18 or in an intermediate space 25 between the closure cover 18 and the apron 16.

Upon reaching the closed position S shown in fig. 8, the seal 22 is deformed between the closure cover 18 and the apron 16 and is compressed such that the opening 14 is sealed in an airtight manner.

By means of the magnet arrangement 30, a closing force (C) acting on the closing cover 18 can be exerted in the insertion direction or in the closing direction (z). The closing force (C) is generally aligned perpendicular to the horizontal plane (x, y) or to the contact surface or to the side 17 of the apron 16. The closing cover 18 also has a side 19 facing the apron 16, which side 19 also serves as a contact surface. The

sides

17, 19 face each other in a closed position 28 in which the apron 18 and the closing cover 19 are aligned parallel to each other, at least in certain sections.

The respective contact surfaces of the

side portions

17, 19 corresponding to each other extend in the x-y plane.

In the present disclosure, the magnet device 30 has: at least one electromagnetic actuator 32, the at least one electromagnetic actuator 32 being disposed on the apron 16; and a fitting 34, said fitting 34 being arranged on the closing lid 18, said fitting 34 magnetically interacting with said electromagnetic actuator 32. The fitting 34 is designed as a permanent magnet or as a ferromagnetic part, the fitting 34 being arranged on the closure cover 18 or embedded in the closure cover 18. It is also conceivable that the closing cover 18 itself comprises a permanent or ferromagnetic material (at least in certain sections or at least in certain areas), or that the closing cover 18 itself is made entirely of such a material.

By supplying or applying power to the coil 33 of the electromagnetic actuator 32, an attractive or repulsive force can be applied to the closure lid 18. The closing force (C) generated by the magnet arrangement 30 can be varied according to existing requirements by adjusting the current intensity or changing the control signal.

Furthermore, the closing or locking device 10 optionally has a distance measuring device 40, by means of which distance measuring device 40 the distance 41 between the closing cover 18 and the protective plate 16, in particular the distance between the

sides

19, 17 of the closing cover 18 and the protective plate 16 facing each other, can be measured in a determinable and quantitative manner. In the present disclosure, the distance measuring device 40 has a distance sensor 42 arranged on the protective plate 16, which distance sensor 42 measures a distance 41 between the protective plate 16 and the closing cover 18 in the closing direction (z). Thereby, by means of the distance measuring device 40, depending on the distance, the magnet device 30, in particular the closing force (C) generated by the magnet device, can be adjusted. In particular, it is proposed that the distance 41 between the closure cover 18 and the protective plate 16 can be set to a predetermined extent in a precise manner by distance-based adjustment of the magnet arrangement 30.

For the distance-based adjustment, in particular, a control circuit 45 is provided, which control circuit 45 couples the magnet device 30 with the distance measuring device 40. The control circuit 45 has a setpoint device 44, which setpoint device 44 is connected to the distance sensor 42 on a data/technical level. The setpoint device 44 receives the distance signals provided by the distance sensor 42 and compares them with predefined or variably specified target values from the central control system. The actual value and the target value are compared to each other in the setpoint device 44.

The resulting comparison signal is then supplied to the controller 46, and the controller 46 generates a control signal that is provided for controlling the electromagnetic actuator 32. A control signal, which may be generated by controller 46, may be provided to electromagnetic actuator 32 via amplifier 48.

The amplified control signal that can be supplied to the coil 33 of the electromagnetic actuator 32 is calculated and determined such that the predetermined distance 41 between the apron 16 and the closing cover 18 is maintained, and the force generated by the magnet arrangement 30 can be dynamically adapted to maintain the distance 41 in the deviation of the required distance.

All electronic components of the control circuit, i.e. the amplifier 48, the controller 46, the setpoint device 44 and, where applicable, the distance sensor 42, may be housed together on a single PCB, e.g. in the form of an integrated control circuit. In this respect, the space required by the corresponding electronic unit and the wiring work associated therewith can be minimized.

The electromagnetic actuator 32 typically has a ferromagnetic core, e.g., an iron core, in addition to the coil 30 to which an electrical signal may be applied. The electromagnetic actuator 32 may be designed as an electromagnet, however, for example, also as a lorentz or voice coil actuator in various different ways. The latter may generate not only an attractive force but also a repulsive force between the electromagnetic actuator and the counterpart, as compared to the electromagnet.

For reasons relating to vacuum compatibility, the groove 31 intended to hold the electromagnetic actuator 32 or its coil 33 must be covered and/or sealed to face the mating piece 34. The cover 21 provided for this purpose is usually made of a magnetically permeable material or of a non-magnetic or only weakly magnetic material. The cover 21 can almost act as a closure for the groove 31 and can be designed in this way. The cover 21 is arranged in a sealing manner above the groove 31 or in the groove 31 by means of a separate seal not explicitly shown in the present disclosure. In particular, the cover 21 can be integrated in a flush manner into the side 17 facing the fitting 34, i.e. into the contact surface of the apron 16 or the closing cover 18. For clarity of illustration, the cover 21 in FIG. 1 is shown only on the right side of the apron 16. Each of the magnet arrangements 30 arranged in a distributed manner across the extension of the opening 14 can be adjusted according to the distance 41 mainly in their range between the apron 16 and the closing cover 18, so that a distance 41 can be set across the entire outer extension of the opening 14 which is maintained the same or within a slight tolerance.

As also shown in fig. 1, between the

side parts

17, 19 of the apron 16 and the closing cover 18 facing each other there is at least one spacer 24, the spacer 21 serving as an end stop for the frame 15.

In the uncompressed state of the seal 22, as shown in fig. 7, the seal 22 protrudes at least slightly from the side 17 of the apron 16.

In the rest position U of the closure cover 18 relative to the frame 15 and the contact position K of the frame 15 relative to the apron 16 shown in fig. 7, there is an air gap between the closure cover 18 and the apron 16 or between the closure cover 18 and the seal 22. It can also be provided that the closure cover 18 in the rest position U abuts against the seal 22 without being compressed and therefore the abutment is performed in a relatively loose manner.

Upon activation of the magnet arrangement 30, the closure lid 18 undergoes a translational movement compressing the seal 22 in accordance with the closure force C acting on the closure lid 18, compared to the illustration according to fig. 1, in which the components of the magnet arrangement are only schematically shown in fig. 6-8. The compressed seal 22' is indicated in fig. 8. In this embodiment, the closing force C interacts with the gravitational force G of the closing lid 18. The closing force C opposes the restoring force R of the individual restoring elements 82. As is apparent from fig. 3, the restoring element 82 is designed in the present disclosure as a leaf spring 83.

The frame 15 is designed as a circumferentially closed frame. The frame has two longitudinally extending

limbs

85, 86, the

limbs

85, 86 running substantially parallel and being connected to one another at the longitudinal ends via

head sections

87, 88 on the end sides. Approximately in the center between the

head sections

87, 88, a connecting bridge 89 is provided, which connecting bridge 89 connects both

limbs

85, 86 again on a structural level and in this respect increases the stability and rigidity of the frame 15. The leaf springs 83 are arranged in pairs. The opposite ends of the leaf spring 82 are arranged on

opposite limbs

85, 86. The leaf spring 83 is connected to the closing cover 18 approximately centrally between the

limbs

85, 86. Thus, the deflection of the closing cover 18 perpendicular to the horizontal plane of the frame 15, i.e. parallel to the surface normal N of the closing cover 18, produced by the magnet arrangement 30 overcomes the restoring force R produced by the restoring spring 83.

As can be clearly seen from fig. 6 and 7, a plurality of spacers 24 are arranged in a distributed manner across the extension of the opening 14 on the side 17 of the apron 16 facing the closing cover 18. The spacer 24 is typically made of plastic, in particular of a high temperature resistant plastic, for example made of Polyetheretherketone (PEEK), which has only a slight or inconspicuous tendency to outgas even under vacuum conditions.

In the contact position K of the frame 15 on the sheeting 16, the frame 15 rests on the spacers 24, so that the underside of the frame 15 faces the opening 14. Thus, the spacer 24 forms one type of end stop for the rotational movement of the frame 15. Corresponding to the arrangement of the spacers 24 on the cover plate 16, on the outer edge of the closing cover 18, there is provided a respective recess 23, the respective recess 23 and the spacer 24 penetrating together when the contact position K is present. The recess 23 allows the opening 14 to be covered to a large extent by the closing cover 18 without hindering the frame support arranged as close as possible to the opening 14 or the frame 15 from resting on the apron 16.

As is clear from fig. 7, it is shown here that in the contact position of the frame 15 and the rest position U of the closing cover 18, there is a defined gap between the closing cover 18 and the seal 22. By activating the magnet arrangement 30, the closure cover 18 is pulled towards the apron 16 by the closure force C. Thus, the restoring element 82 is deflected towards the shield 16. These restoring elements 82 provide a restoring force R which acts permanently on the closing cover 18. In the event of a reduction of the closing force or deactivation of the magnet arrangement 30, the restoring element 82 and the restoring spring 83 cause the closing cover 18 to disengage from the sealing closed position S, as shown in fig. 8, thereby compressing the seal 22, returning again to the rest position U.

It is advantageous in this respect to mount the closing cover 18 movably to the frame 15, whereby a relatively high closing force can be exerted on the closing cover 18. Since the closing cover 18 is movably mounted on the frame 15, these forces are not transmitted to the frame 15 anyway. Thus, the hinge 90 formed by the rotational path 80 need not be able to absorb any closing force generated by the magnet arrangement 30. The mechanical stress on the frame 15 is mainly caused only by the restoring force R transmitted to the frame 15 from the deflected restoring element 82 between the closing cover 18 in the closed position S and the frame. Once the closure cover 18 is in the closed position S shown in fig. 8, the increase in closure frame force C has little or no mechanical impact on the frame 15.

In fig. 4 and 5, an alternative embodiment of the invention is shown. In contrast to the embodiments according to fig. 2, 3 and 6, the frame 15 is slidably mounted on the apron 16 and to the vacuum chamber 12. Fig. 4 shows the frame 15 with the closing cover 18 arranged thereon in the open position, while fig. 5 shows the frame 15 and the closing cover 18 in the contact position K or the closed position S. The frame 15 is slidably mounted above and below or on opposing

head sections

87, 88 along extending

guides

62, 64.

The

guides

62, 64, which are designed as linear sliding guides, extend parallel to the horizontal plane of the frame 15 and/or of the apron 16 of the closing cover 18. Due to the closing movement of the closing cover 18, the

guides

62, 64 are arranged at a sufficient distance from the apron 16 to allow a contactless sliding of the closing cover 18 against the apron 16, in particular against a sealing element 22 provided on the apron 16, the sealing element 22 protruding at least slightly from the level of the apron 16.

The linear guides 62, 64 may be designed as non-contact guides. A plurality of magnetic bearings 60 may be arranged in the region of the

guides

62, 64.

Similar to the magnet arrangement 30, the individual magnetic bearings 60 may each have a distance sensor (not separately shown in the present disclosure), a control circuit, and an electromagnetic actuator 61, via which the electromagnetic actuator 61 is controllable, the electromagnetic actuator 61 magnetically interacting with the counterpart 63. In this way, the desired suspension of the closure cover 18 on the

guides

62, 64 can be achieved. The non-contact mounting of the closure cover 18 on the

guides

62, 64 is particularly advantageous for avoiding contamination and wear in the area of the vacuum chamber 12.

In this case, a plurality of electromagnetic actuators 61 are provided along the guide 62, the plurality of electromagnetic actuators 61 being sequentially engaged with fitting members 63 arranged on the frame 15 in the case of sliding the frame 15.

Thus, both of the reversed arrangements are equally within the scope of the present invention. For example, one or more actuators 62 can be arranged on the frame 15 or on the closing cover 18, while the counterpart 63 interacting magnetically therewith is arranged in a stationary manner on

linear guides

62, 64 designed as guide rails.

In fig. 4, the frame 15 and the closing cover 18 are shown in an open position O, in which the closing cover 18 is located outside the area of the opening 14 of the apron 16.

Thus, mounting the closure cover 18 to the frame 15 has the effect of providing support for one type of parallel displacement of the closure cover 18 from the rest position U to the closed position S, so that relative movement of the closure cover 18 and the seal 22 does not occur within the plane (X, Y) of the closure cover as much as possible. This shearing motion can potentially lead to wear of the seal 22 and at least slight contamination of the environment surrounding the vacuum chamber 12.

The contactless mounting of the closing cover 18 to the

guides

62, 64 is effected via a frame 15 designed in a sliding manner and connected to the closing cover 18. One of the components of the respective magnetic bearing 60, i.e. the component of the electromagnetic actuator 61 and the counterpart 63, is arranged in a fixed manner on the

guides

62, 64, while the other component of the actuating guide 61 and the other component of the counterpart 63 are arranged on the frame 15. For example, a linear motor 68 is provided to translate the closure cover 18 and the frame 15 along the

guides

62, 64, by means of which guides 62, 64 the closure cover 18 can be moved against the apron 16 between the open position O and the contact position K.

List of reference numerals

10 closure and locking device

11 wall

12 vacuum chamber

14 opening

15 frame

16 guard board

17 side part

18 closure lid

19 side part

20 grooves

21 cover member

22 seal

23 recess

24 spacer

25 intermediate space

30 magnet device

31 groove

32 electromagnetic actuator

33 coil

34 mating member

40 distance measuring device

41 distance

42 distance sensor

44 setpoint device

45 control circuit

46 controller

48 amplifier

60 magnetic bearing

61 electromagnetic actuator

62 guide

63 mating parts

64 guide member

68 Linear motor

80 shaft

81 top surface

82 restoring element

83 restoring spring

85 limbs

86 limbs

87 head section

88 head section

89 connecting bridge part

90 hinge

Claims

1. Closing or locking device for a vacuum chamber (12), comprising:

-a shield (16) arrangeable on the vacuum chamber (12) and enclosing an opening (14) of the vacuum chamber (12);

-a frame (15), which frame (15) is supported in such a way that the frame (15) is movable relative to the apron (16), and a closing cover (18) is movably arranged on the frame (15), wherein the closing cover (18) closes the opening (14) in a sealing manner against the apron (16) in a closed position (28);

-at least one magnet arrangement (30), the at least one magnet arrangement (30) being used for generating a closing force (C) acting between the apron (16) and the closing cover (18), the magnet arrangement (30) being engaged with the apron (16) and the closing cover (18),

wherein in the contact position (K) of the frame (15) at the sides (17, 19) of the frame (15) and the apron (16) facing each other at least one spacer (24) is arranged, wherein the dimension of the at least one spacer (24) perpendicular to the horizontal plane of the frame (15) is at least as large as the sum of the adjustment range of the closing cover (18) on the frame (15) between the resting position (U) and the closing position (S) plus the thickness of the closing cover (18).

2. A closing or locking device according to claim 1, wherein a plurality of magnet devices (30) are arranged in a distributed manner across the extension of the opening (14), each magnet device (30) being provided with its own distance measuring device (40).

3. Closing or locking device according to claim 1 or 2, wherein the closing member can be mounted in a contactless manner by means of one or more magnetic bearings onto guides, wherein the guides extend parallel to the plane of the apron (16), the frame (15) and/or the closing cover (18).

4. Closing or locking device according to claim 1 or 2, wherein the closing cover (18) has a horizontal top surface (81), and wherein the closing cover (18) is slidable on the frame (15) in a direction parallel to a surface normal (N) of the top surface (81).

5. Closing or locking device according to claim 1 or 2, wherein the closing cover (18) is connected to the frame (15) via at least one restoring element (82), and wherein the restoring element is configured to apply a restoring force (R) directed opposite to the closing force (C) onto the closing cover (18).

6. Closing or locking device according to claim 5, wherein the at least one restoring element (82) has at least one restoring spring (83).

7. Closing or locking device according to claim 1 or 2, wherein the closing cover (18) is arranged via a plurality of restoring elements (82) on the frame, the plurality of restoring elements (82) being spaced apart from each other, and wherein the sum of all restoring forces (R) from all restoring elements (82) acting on the closing cover (18) is greater than the gravitational force (G) of the closing cover (18).

8. Closing or locking device according to claim 3, wherein the closing cover (18) is arranged via a plurality of restoring elements (82) on the frame, the plurality of restoring elements (82) being spaced apart from each other, and wherein the sum of all restoring forces (R) from all restoring elements (82) acting on the closing cover (18) is greater than the weight force (G) of the closing cover (18).

9. Closing or locking device according to claim 1 or 2, wherein the frame (15) is arranged expandable or slidable on the apron (16) or on the vacuum chamber (12) between an open position (O) and a contact position (K),

-wherein in the open position (O) the frame (15) and the closing cover (18) arranged on the frame (15) release the opening (14) and

-wherein in the contact position the frame (15) abuts the apron (16) or the vacuum chamber (12) and the closing cover (18) covers substantially the entire opening (14).

10. Closing or locking device according to claim 3, wherein the frame (15) is arranged expandable or slidable on the apron (16) or on the vacuum chamber (12) between an open position (O) and a contact position (K),

11. Closure or locking device according to claim 9, wherein the closure cover (18) is transferable from a rest position (U) to a sealed closed position (S) with respect to the frame (15) by means of the magnet device (30) with the frame (15) in the contact position (K).

12. Closing or locking device according to claim 1 or 2, wherein the magnet device (30) has at least one electromagnetic actuator (32) and at least one counterpart (34), the at least one electromagnetic actuator (32) being arranged on one of the closing cover (18) and the apron (16), the at least one counterpart (34) being arranged on the other of the closing cover (18) and the apron (16), the at least one counterpart (34) magnetically interacting with the electromagnetic actuator (32).

13. Closing or locking device according to claim 1 or 2, wherein in the closed position (28) of the closing cover (18) an elastically compressible sealing member (20) is arranged on the closing cover (18) or on the apron (16) in an intermediate space (25) between the sides (17, 19) of the closing cover (18) and the apron (16) facing each other, the elastically compressible sealing member (20) surrounding the opening (14).

14. The closing or locking device of claim 1 or 2, further having:

-at least one distance measuring device (40), the at least one distance measuring device (40) being used for measuring a distance (41) between the closing cover (18) and the apron (16),

-wherein the magnet means (30) are adjustable according to the distance (41) between the apron (16) and the closing cover (18) measured by the distance measuring means (40).

15. A closure or locking device as claimed in claim 3, further having:

16. The closure or locking device of claim 14, further comprising: at least one electronic control circuit (45), said at least one electronic control circuit (45) being coupled with said distance measurement device (40) and with said magnet device (30) and being configured to perform at least one of maintaining and setting a predetermined distance (41) between said apron (16) and said closing cover (18).

17. Closing or locking device for a vacuum chamber (12), comprising:

wherein the closing member can be mounted in a contactless manner by means of one or more magnetic bearings to a guide, wherein the guide extends parallel to the plane of the cover plate (16), the frame (15) and/or the closing cover (18).