CN108705329B - Precision workbench based on two-degree-of-freedom piezoelectric actuator and corresponding piezoelectric actuator - Google Patents
Precision workbench based on two-degree-of-freedom piezoelectric actuator and corresponding piezoelectric actuator Download PDFInfo
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- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 210000004907 gland Anatomy 0.000 claims abstract description 16
- 230000006835 compression Effects 0.000 claims abstract description 12
- 238000007906 compression Methods 0.000 claims abstract description 12
- 238000005452 bending Methods 0.000 claims abstract description 10
- 238000010586 diagram Methods 0.000 description 6
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
一种基于二自由度压电作动器的精密工作台，本申请工作台面的两侧各有一个侧板，所述工作台面两侧的侧板下方各有一个滚子滑轨，滚子滑轨的槽内放有滚子，滚子滑轨两端弯折部与侧板外壁相连，固定套筒固定在工作台面底部，固定套筒内有压力传感器，压力调节螺钉穿过工作台面抵住压力传感器后端，振子顶部有固定轴，固定轴通过键安装在过固定套筒底部的插孔内，振子的四个弯折端的下方有对应的驱动足，压紧螺钉穿过压盖将成对的压电陶瓷片固定安装在对应振子的弯折端的斜面上。本申请工作台基于二自由度压电作动器，单个压电作动器即可输出二自由度驱动力，并且移动台只需一个，结构简单紧凑，具有非常好的应用前景。
A precision workbench based on a two-degree-of-freedom piezoelectric actuator. There is a side plate on both sides of the workbench in this application, and there is a roller slide rail under the side plates on both sides of the workbench. Rollers are placed in the groove of the rail, and the bending parts at both ends of the roller slide rail are connected with the outer wall of the side plate. The fixing sleeve is fixed at the bottom of the worktable. There is a pressure sensor in the fixed sleeve. At the rear end of the pressure sensor, there is a fixed shaft on the top of the vibrator. The fixed shaft is installed in the socket at the bottom of the fixed sleeve through a key. There are corresponding driving feet under the four bent ends of the vibrator. The compression screws pass through the gland to form a pair. The piezoelectric ceramic sheet is fixedly installed on the inclined surface corresponding to the bending end of the vibrator. The workbench of this application is based on a two-degree-of-freedom piezoelectric actuator. A single piezoelectric actuator can output a two-degree-of-freedom driving force, and only one mobile platform is required. The structure is simple and compact, and has a very good application prospect.
Description
技术领域technical field
本发明涉及加工工作台领域，特别是涉及基于二自由度压电作动器的精密工作台及对应压电作动器。The invention relates to the field of processing workbenches, in particular to a precision workbench based on a two-degree-of-freedom piezoelectric actuator and the corresponding piezoelectric actuator.
背景技术Background technique
随着生产力的提高，如今的产品越来越往小型化、智能化、集成化方向发展，而这也是为机械加工出的一道难题。而机械加工中必不可少的就是零件的定位，由于传统的电磁电机必需加上减速器方可应用在定位台上，而这大大限制了定位台成本的降低。近年来，压电作动器在精密定位方面得到了应用，由于其断电自锁的特点以及可达纳米级的微小步距，使得压电作动器无需减速器即可直接应用到定位台上。虽然压电作动器步距极小，但是现有的压电作动器驱动的定位台需要各个自由度都配备一个压电作动器和一个移动台，这无疑增加了定位台的体积重量和成本。With the improvement of productivity, today's products are becoming more and more miniaturized, intelligent, and integrated, and this is also a difficult problem for mechanical processing. The essential thing in machining is the positioning of the parts. Because the traditional electromagnetic motor must be added with a reducer before it can be used on the positioning table, this greatly limits the reduction of the cost of the positioning table. In recent years, piezoelectric actuators have been applied in precision positioning. Due to their power-off self-locking characteristics and micro-step distances up to nanometers, piezoelectric actuators can be directly applied to positioning platforms without reducers. superior. Although the step distance of the piezoelectric actuator is extremely small, the existing piezoelectric actuator-driven positioning table needs to be equipped with a piezoelectric actuator and a moving table for each degree of freedom, which undoubtedly increases the volume and weight of the positioning table and cost.
发明内容Contents of the invention
为了解决上述存在的问题，本发明提供基于二自由度压电作动器的精密工作台及对应压电作动器，该工作台基于二自由度压电作动器，其可以很好的解决以上问题，单个压电作动器即可输出二自由度驱动力，并且移动台只需一个，结构简单紧凑，具有非常好的应用前景，为达此目的，本发明提供基于二自由度压电作动器的精密工作台及对应压电作动器，包括工作台面、滚子滑轨固定螺钉、滚子滑轨和二自由度压电作动器，所述二自由度压电作动器包括振子、驱动足、压盖、固定套筒、压电陶瓷片、压紧螺钉、固定轴、键、套筒固定螺钉、压力传感器和压力调节螺钉，所述工作台面的两侧各有一个侧板，所述工作台面两侧的侧板下方各有一个滚子滑轨，所述滚子滑轨的槽内放有滚子，所述滚子滑轨两端弯折部通过滚子滑轨固定螺钉与侧板外壁相连，所述固定套筒通过套筒固定螺钉固定在工作台面底部，所述固定套筒内有压力传感器，所述压力调节螺钉穿过工作台面抵住压力传感器后端，所述振子顶部有固定轴，所述固定轴通键安装在过固定套筒底部的插孔内，所述振子为十字，所述振子的端部弯折，所述振子的四个弯折端的下方有对应的驱动足，所述压紧螺钉穿过压盖将成对的压电陶瓷片固定安装在对应振子的弯折端的斜面上。In order to solve the above existing problems, the present invention provides a precision workbench based on a two-degree-of-freedom piezoelectric actuator and a corresponding piezoelectric actuator. The workbench is based on a two-degree-of-freedom piezoelectric actuator, which can well solve For the above problems, a single piezoelectric actuator can output the two-degree-of-freedom driving force, and only one mobile station is needed, the structure is simple and compact, and it has very good application prospects. The precision workbench of the actuator and the corresponding piezoelectric actuator, including the worktable, the fixing screw of the roller slide rail, the roller slide rail and the piezoelectric actuator with two degrees of freedom, the piezoelectric actuator with two degrees of freedom It includes a vibrator, a driving foot, a gland, a fixing sleeve, a piezoelectric ceramic sheet, a compression screw, a fixing shaft, a key, a fixing screw of the sleeve, a pressure sensor and a pressure adjusting screw. There is a roller slide rail under the side plates on both sides of the worktable, rollers are placed in the groove of the roller slide rail, and the bending parts at both ends of the roller slide rail pass through the roller slide rail The fixing screw is connected with the outer wall of the side plate, and the fixing sleeve is fixed on the bottom of the worktable through the sleeve fixing screw. There is a pressure sensor in the fixing sleeve, and the pressure adjusting screw passes through the worktable to resist the rear end of the pressure sensor. There is a fixed shaft on the top of the vibrator, and the fixed shaft is installed through a key in the socket at the bottom of the fixed sleeve. The vibrator is a cross, the ends of the vibrator are bent, and the four bent ends of the vibrator are There is a corresponding driving foot below, and the compression screw passes through the gland to fix the pair of piezoelectric ceramic sheets on the inclined surface of the bending end of the corresponding vibrator.
本发明的进一步改进，每个滚子滑轨有至少2排滚子，考虑实际运动稳定性最好使用两排或两排以上的滚子。As a further improvement of the present invention, each roller slide rail has at least 2 rows of rollers, and it is better to use two or more rows of rollers in consideration of actual motion stability.
本发明的进一步改进，所述振子的弯折端的斜面为45°，为了达到最好效果最好采用45°斜面。As a further improvement of the present invention, the slope at the bent end of the vibrator is 45°, and it is best to use a 45° slope to achieve the best effect.
本发明的进一步改进，所述压力传感器采用纽扣式压力传感器，压力传感器主要采用纽扣式压力传感器。As a further improvement of the present invention, the pressure sensor is a button-type pressure sensor, and the pressure sensor is mainly a button-type pressure sensor.
本发明提供一种基于二自由度压电作动器的精密工作台的二自由度压电作动器，所述二自由度压电作动器包括振子、驱动足、压盖、固定套筒、压电陶瓷片、压紧螺钉、固定轴、键、套筒固定螺钉、压力传感器和压力调节螺钉，所述固定套筒通过套筒固定螺钉固定在工作台面底部，所述固定套筒内有压力传感器，所述压力调节螺钉穿过工作台面抵住压力传感器后端，所述振子顶部有固定轴，所述固定轴通键安装在过固定套筒底部的插孔内，所述振子为十字，所述振子的端部弯折，所述振子的四个弯折端的下方有对应的驱动足，所述压紧螺钉穿过压盖将成对的压电陶瓷片固定安装在对应振子的弯折端的斜面上。The invention provides a two-degree-of-freedom piezoelectric actuator based on a two-degree-of-freedom piezoelectric actuator for a precision workbench. The two-degree-of-freedom piezoelectric actuator includes a vibrator, a driving foot, a gland, and a fixing sleeve , piezoelectric ceramic sheet, compression screw, fixed shaft, key, sleeve fixing screw, pressure sensor and pressure adjustment screw, the fixing sleeve is fixed on the bottom of the worktable through the sleeve fixing screw, and the fixing sleeve has For a pressure sensor, the pressure adjusting screw passes through the worktable to resist the rear end of the pressure sensor. There is a fixed shaft on the top of the vibrator, and the fixed shaft is installed in the socket at the bottom of the fixed sleeve through a key. The vibrator is a cross , the end of the vibrator is bent, and there are corresponding driving feet under the four bent ends of the vibrator, and the pressing screw passes through the gland to fix the pair of piezoelectric ceramic sheets on the corresponding bent ends of the vibrator. on the slope of the end.
本发明压电作动器的进一步改进，所述振子的弯折端的斜面为45°，为了达到最好效果最好采用45°斜面。As a further improvement of the piezoelectric actuator of the present invention, the slope at the bent end of the vibrator is 45°, and it is best to use a 45° slope in order to achieve the best effect.
本发明压电作动器的进一步改进，所述压力传感器采用纽扣式压力传感器。As a further improvement of the piezoelectric actuator of the present invention, the pressure sensor adopts a button-type pressure sensor.
本发明基于二自由度压电作动器的精密工作台及对应压电作动器，其采用二自由度压电作动器，工作时压力调节螺钉调节好压力后，给四对压电陶瓷片通高频正弦电压，弹性体作为基极。x方向给两对压电陶瓷片分别通Ux1sin（wt+A）和Ux1sin（wt+B）电压，y方向分别通Uy1sin（wt+C）和Uy1sin（wt+D）电压。A相位超前和滞后B相位控制x方向前进和后退，相位差控制速度大小，超前或滞后90°时速度最大，相位差为0时空振，速度为0。Y方向同理，从而实现工作台的移动，单个压电作动器即可输出二自由度驱动力，并且移动台只需一个，结构简单紧凑。The present invention is based on a two-degree-of-freedom piezoelectric actuator precision workbench and the corresponding piezoelectric actuator, which uses a two-degree-of-freedom piezoelectric actuator. After the pressure is adjusted by the pressure adjustment screw during work, four pairs of piezoelectric ceramics The high-frequency sinusoidal voltage is passed through the chip, and the elastic body is used as the base. In the x direction, the voltages of Ux1sin (wt+A) and Ux1sin (wt+B) are applied to the two pairs of piezoelectric ceramic sheets, and the voltages of Uy1sin (wt+C) and Uy1sin (wt+D) are respectively applied in the y direction. Phase A leads and lags B phase to control forward and backward in the x direction, and the phase difference controls the speed. The speed is the highest when the lead or lag is 90°, and the space vibration is 0 when the phase difference is 0. The Y direction is the same, so as to realize the movement of the worktable, a single piezoelectric actuator can output the two-degree-of-freedom driving force, and only one mobile table is required, and the structure is simple and compact.
附图说明Description of drawings
图1为本发明整体示意图；Fig. 1 is the overall schematic diagram of the present invention;
图2为本发明局部结构示意图；Fig. 2 is the partial structure schematic diagram of the present invention;
图3为本发明内部结构示意图；Fig. 3 is a schematic diagram of the internal structure of the present invention;
图4为本发明工作原理示意图；Fig. 4 is a schematic diagram of the working principle of the present invention;
图5为本发明椭圆轨迹示意图；Fig. 5 is the schematic diagram of ellipse trajectory of the present invention;
图6为本发明椭圆轨迹仿真图一；Fig. 6 is the ellipse trajectory emulation figure one of the present invention;
图7为本发明椭圆轨迹仿真图二；Fig. 7 is ellipse trajectory emulation figure two of the present invention;
图8为本发明椭圆轨迹仿真图三；Fig. 8 is the ellipse trajectory emulation figure three of the present invention;
图9为本发明椭圆轨迹仿真图四；Fig. 9 is the ellipse trajectory emulation figure four of the present invention;
图10为本发明椭圆轨迹仿真图五；Fig. 10 is the emulation figure five of the ellipse trajectory of the present invention;
图11为本发明椭圆轨迹仿真图六；Fig. 11 is the simulation figure six of ellipse trajectory of the present invention;
图12为本发明椭圆轨迹仿真图七；Fig. 12 is the emulation figure seven of the ellipse trajectory of the present invention;
图13为本发明椭圆轨迹仿真图八；Fig. 13 is the ellipse trajectory emulation figure eight of the present invention;
图示说明：Graphical description:
1，工作台面2，滚子滑轨固定螺钉3，滚子滑轨4，振子5，驱动足6，压盖7，固定套筒8，压电陶瓷片9，压紧螺钉10，固定轴11，键12，套筒固定螺钉13，压力传感器14，压力调节螺钉。1. Working surface 2, roller slide fixing screw 3, roller slide 4, vibrator 5, driving foot 6, gland 7, fixing sleeve 8, piezoelectric ceramic sheet 9, compression screw 10, fixing shaft 11 , Key 12, sleeve set screw 13, pressure sensor 14, pressure adjustment screw.
具体实施方式Detailed ways
下面结合附图与具体实施方式对本发明作进一步详细描述：Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
本发明基于二自由度压电作动器的精密工作台及对应压电作动器，该工作台基于二自由度压电作动器，其可以很好的解决以上问题，单个压电作动器即可输出二自由度驱动力，并且移动台只需一个，结构简单紧凑，具有非常好的应用前景。The present invention is based on a two-degree-of-freedom piezoelectric actuator precision workbench and the corresponding piezoelectric actuator. The workbench is based on a two-degree-of-freedom piezoelectric actuator, which can well solve the above problems. A single piezoelectric actuator The two-degree-of-freedom driving force can be output by only one device, and only one mobile station is needed, the structure is simple and compact, and it has a very good application prospect.
作为本发明工作台一种实施例，本发明提供一种基于二自由度压电作动器的精密工作台，包括工作台面1、滚子滑轨固定螺钉2、滚子滑轨3和二自由度压电作动器，所述二自由度压电作动器包括振子4、驱动足5、压盖6、固定套筒7、压电陶瓷片8、压紧螺钉9、固定轴10、键11、套筒固定螺钉12、压力传感器13和压力调节螺钉14，所述工作台面1的两侧各有一个侧板，所述工作台面1两侧的侧板下方各有一个滚子滑轨3，所述滚子滑轨3的槽内放有滚子，所述滚子滑轨3两端弯折部通过滚子滑轨固定螺钉2与侧板外壁相连，所述固定套筒7通过套筒固定螺钉12固定在工作台面1底部，所述固定套筒7内有压力传感器13，所述压力调节螺钉14穿过工作台面1抵住压力传感器13后端，所述振子4顶部有固定轴10，所述固定轴10通键11安装在过固定套筒7底部的插孔内，所述固定轴可以在固定套筒的插孔内轴向滑动，但周向固定，所述振子4为十字，所述振子4的端部弯折，所述振子4的四个弯折端的下方有对应的驱动足5，所述压紧螺钉9穿过压盖6将成对的压电陶瓷片8固定安装在对应振子4的弯折端的斜面上。As an embodiment of the workbench of the present invention, the present invention provides a precision workbench based on a two-degree-of-freedom piezoelectric actuator, including a workbench 1, a roller slide rail fixing screw 2, a roller slide rail 3 and a two-degree-of-freedom piezoelectric actuator. The two-degree-of-freedom piezoelectric actuator includes a vibrator 4, a driving foot 5, a gland 6, a fixed sleeve 7, a piezoelectric ceramic sheet 8, a compression screw 9, a fixed shaft 10, a key 11. Sleeve fixing screw 12, pressure sensor 13 and pressure adjusting screw 14, there is a side plate on both sides of the worktable 1, and a roller slide rail 3 is respectively installed under the side plates on both sides of the worktable 1 , rollers are placed in the groove of the roller slide 3, and the bending parts at both ends of the roller slide 3 are connected with the outer wall of the side plate through the roller slide fixing screw 2, and the fixing sleeve 7 is passed through the sleeve The barrel fixing screw 12 is fixed on the bottom of the worktable 1, the fixed sleeve 7 has a pressure sensor 13 inside, the pressure adjusting screw 14 passes through the worktable 1 and resists the rear end of the pressure sensor 13, and the top of the vibrator 4 has a fixed shaft 10. The fixed shaft 10 is installed through the key 11 in the socket at the bottom of the fixed sleeve 7. The fixed shaft can slide axially in the socket of the fixed sleeve, but is fixed in the circumferential direction. The vibrator 4 is Cross, the end of the vibrator 4 is bent, and there are corresponding driving feet 5 under the four bent ends of the vibrator 4, and the compression screw 9 passes through the gland 6 to fix the pair of piezoelectric ceramic sheets 8 It is installed on the slope corresponding to the bent end of the vibrator 4 .
作为本发明工作台一种具体实施例，本发明提供如图1-4所示的一种基于二自由度压电作动器的精密工作台，包括工作台面1、滚子滑轨固定螺钉2、滚子滑轨3和二自由度压电作动器，所述二自由度压电作动器包括振子4、驱动足5、压盖6、固定套筒7、压电陶瓷片8、压紧螺钉9、固定轴10、键11、套筒固定螺钉12、压力传感器13和压力调节螺钉14，所述工作台面1的两侧各有一个侧板，所述工作台面1两侧的侧板下方各有一个滚子滑轨3，所述滚子滑轨3的槽内放有滚子，每个滚子滑轨3有至少2排滚子，考虑实际运动稳定性最好使用两排或两排以上的滚子，所述滚子滑轨3两端弯折部通过滚子滑轨固定螺钉2与侧板外壁相连，所述固定套筒7通过套筒固定螺钉12固定在工作台面1底部，所述固定套筒7内有压力传感器13，所述压力传感器采用纽扣式压力传感器，压力传感器主要采用纽扣式压力传感器，所述压力调节螺钉14穿过工作台面1抵住压力传感器13后端，所述振子4顶部有固定轴10，所述固定轴10通键11安装在过固定套筒7底部的插孔内，所述固定轴可以在固定套筒的插孔内轴向滑动，但周向固定，所述振子4为十字，所述振子4的端部弯折，所述振子4的四个弯折端的下方有对应的驱动足5，所述压紧螺钉9穿过压盖6将成对的压电陶瓷片8固定安装在对应振子4的弯折端的斜面上，所述振子4的弯折端的斜面为45°，为了达到最好效果最好采用45°斜面。As a specific embodiment of the workbench of the present invention, the present invention provides a precision workbench based on a two-degree-of-freedom piezoelectric actuator as shown in Figures 1-4, including a workbench 1 and a roller slide fixing screw 2 , a roller slide rail 3 and a two-degree-of-freedom piezoelectric actuator, the two-degree-of-freedom piezoelectric actuator includes a vibrator 4, a driving foot 5, a gland 6, a fixing sleeve 7, a piezoelectric ceramic sheet 8, a pressure Tightening screw 9, fixed shaft 10, key 11, sleeve fixing screw 12, pressure sensor 13 and pressure adjustment screw 14, each side plate is arranged on both sides of described work surface 1, and the side plate on both sides of described work surface 1 There is a roller slide rail 3 at the bottom, rollers are placed in the grooves of the roller slide rail 3, and each roller slide rail 3 has at least 2 rows of rollers. Considering the actual motion stability, it is better to use two rows or There are more than two rows of rollers, the bending parts at both ends of the roller slide rail 3 are connected to the outer wall of the side plate through the roller slide rail fixing screws 2, and the fixing sleeve 7 is fixed on the working table 1 through the sleeve fixing screws 12 At the bottom, there is a pressure sensor 13 inside the fixed sleeve 7, the pressure sensor is a button-type pressure sensor, the pressure sensor is mainly a button-type pressure sensor, and the pressure adjustment screw 14 passes through the work surface 1 to withstand the pressure sensor 13 end, the top of the vibrator 4 has a fixed shaft 10, the fixed shaft 10 is installed in the socket through the bottom of the fixed sleeve 7 through a key 11, and the fixed shaft can slide axially in the socket of the fixed sleeve, But the circumferential direction is fixed, the vibrator 4 is a cross, the end of the vibrator 4 is bent, there are corresponding driving feet 5 under the four bent ends of the vibrator 4, and the compression screw 9 passes through the gland 6 Fix the paired piezoelectric ceramic sheets 8 on the inclined surface corresponding to the bent end of the vibrator 4. The inclined surface of the bent end of the vibrator 4 is 45°. In order to achieve the best effect, it is best to use a 45° inclined surface.
作为本发明压电作动器一种实施例，本发明提供基于二自由度压电作动器的精密工作台的二自由度压电作动器，所述二自由度压电作动器包括振子4、驱动足5、压盖6、固定套筒7、压电陶瓷片8、压紧螺钉9、固定轴10、键11、套筒固定螺钉12、压力传感器13和压力调节螺钉14，所述固定套筒7通过套筒固定螺钉12固定在工作台面1底部，所述固定套筒7内有压力传感器13，所述压力传感器采用纽扣式压力传感器，所述压力调节螺钉14穿过工作台面1抵住压力传感器13后端，所述振子4顶部有固定轴10，所述固定轴10通过键11安装在过固定套筒7底部的插孔内，所述固定轴可以在固定套筒的插孔内轴向滑动，但周向固定，所述振子4为十字，所述振子4的端部弯折，所述振子4的四个弯折端的下方有对应的驱动足5，所述压紧螺钉9穿过压盖6将成对的压电陶瓷片8固定安装在对应振子4的弯折端的斜面上，所述振子4的弯折端的斜面为45°，为了达到最好效果最好采用45°斜面。As an embodiment of the piezoelectric actuator of the present invention, the present invention provides a two-degree-of-freedom piezoelectric actuator based on a precision workbench of a two-degree-of-freedom piezoelectric actuator. The two-degree-of-freedom piezoelectric actuator includes Vibrator 4, driving foot 5, gland 6, fixed sleeve 7, piezoelectric ceramic sheet 8, compression screw 9, fixed shaft 10, key 11, sleeve fixing screw 12, pressure sensor 13 and pressure adjustment screw 14, all The fixing sleeve 7 is fixed on the bottom of the worktable 1 through the sleeve fixing screw 12. There is a pressure sensor 13 inside the fixing sleeve 7. The pressure sensor adopts a button-type pressure sensor, and the pressure adjustment screw 14 passes through the worktable. 1 against the rear end of the pressure sensor 13, the top of the vibrator 4 has a fixed shaft 10, the fixed shaft 10 is installed in the socket at the bottom of the fixed sleeve 7 through the key 11, and the fixed shaft can be placed in the fixed sleeve The socket slides axially, but is fixed in the circumferential direction. The vibrator 4 is a cross, and the ends of the vibrator 4 are bent. There are corresponding driving feet 5 under the four bent ends of the vibrator 4 . The tightening screw 9 passes through the gland 6 to fix the pair of piezoelectric ceramic sheets 8 on the slope of the bending end of the corresponding vibrator 4. The slope of the bending end of the vibrator 4 is 45°. In order to achieve the best effect, it is best to use 45° bevel.
工作原理如下：压力调节螺钉调节好压力后，给四对压电陶瓷片通高频正弦电压，弹性体作为基极。x方向给两对压电陶瓷片分别通Ux1sin（wt+A）和Ux1sin（wt+B）电压，y方向分别通Uy1sin（wt+C）和Uy1sin（wt+D）电压。A相位超前和滞后B相位控制x方向前进和后退，相位差大小控制速度，超前或滞后90°时速度最大，相位差为0时空振，速度为0。Y方向同理，工作轨迹如图5所示，工作仿真图如图6-13所示。The working principle is as follows: After the pressure is adjusted by the pressure adjusting screw, a high-frequency sinusoidal voltage is applied to the four pairs of piezoelectric ceramic sheets, and the elastic body is used as the base. In the x direction, the voltages of Ux1sin (wt+A) and Ux1sin (wt+B) are applied to the two pairs of piezoelectric ceramic sheets, and the voltages of Uy1sin (wt+C) and Uy1sin (wt+D) are respectively applied in the y direction. Phase A leads and phase B lags behind to control forward and backward in the x direction. The phase difference controls the speed. When the phase difference is 90° ahead or behind, the speed is the highest. When the phase difference is 0, the space vibration and the speed are 0. The same is true for the Y direction, the working trajectory is shown in Figure 5, and the working simulation diagram is shown in Figure 6-13.
以上所述，仅是本发明的较佳实施例而已，并非是对本发明作任何其他形式的限制，而依据本发明的技术实质所作的任何修改或等同变化，仍属于本发明所要求保护的范围。The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any other form, and any modification or equivalent change made according to the technical essence of the present invention still belongs to the scope of protection required by the present invention .
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