CN108609864A - A kind of plated film heat insulation reflecting quartz heat shielding and preparation method thereof - Google Patents
A kind of plated film heat insulation reflecting quartz heat shielding and preparation method thereof Download PDFInfo
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- CN108609864A CN108609864A CN201611139837.XA CN201611139837A CN108609864A CN 108609864 A CN108609864 A CN 108609864A CN 201611139837 A CN201611139837 A CN 201611139837A CN 108609864 A CN108609864 A CN 108609864A
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- quartz
- heat shielding
- silver
- heat insulation
- plated
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3605—Coatings of the type glass/metal/inorganic compound
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3686—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used for ovens
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Laminated Bodies (AREA)
Abstract
A kind of plated film heat insulation reflecting quartz heat shielding disclosed by the invention, including quartz substrate and quartz substrate inner surface plate the one layer of silver film set, and silver film fitting completely is provided with quartz lining.The invention also discloses the preparation methods of above-mentioned plated film heat insulation reflecting quartz heat shielding, including step：Quartz substrate is made；Silver-plated process is carried out to the inner surface of quartz substrate；The quartz of molten condition is layed on silver film and is cooled down to get the quartzy heat shielding of the present invention.A kind of preparation method of plated film heat insulation reflecting quartz heat shielding of the present invention will be made quartz substrate and then carry out silver-plated process to its inner surface after high purity quartz high-temperature fusion, the quartz of molten condition is layed on silver film again and obtains the quartzy heat shielding of the present invention after cooling, the quartz heat shielding is two-sided reflective structure, the reflective surface that substrate is constituted with silverskin primarily serves heat-blocking action, the reflective surface that liner is constituted with silverskin primarily serves reflex, to effectively increase temperature gradient, crystal growth speed is improved.
Description
Technical field
The invention belongs to monocrystalline manufacturing equipment technical fields, and in particular to a kind of plated film heat insulation reflecting quartz heat shielding also relates to
And a kind of preparation method of plated film heat insulation reflecting quartz heat shielding.
Background technology
In vertical pulling method produces silicon single crystal technique, simplified process is in the silica crucible that first raw material is fitted into single crystal growing furnace,
By furnace body it is closed after be passed through protection gas, by heater by expect block be heated to 1400 DEG C or so fusing, by seeding, shouldering, turn
Crystal pulling process is completed in the operations such as shoulder, isometrical, ending, finally closes heater blowing out.Since equal diameter is grown in entire monocrystalline system
Institute's having time accounting is about 40% or so during standby, thus promoted the equal diameter speed of growth to promoted vertical pulling method monocrystalline production capacity,
It is particularly important to reduce pulling of crystals manufacturing cost.
The speed and vertical pulling method monocrystal thermal-field temperature gradient relation of equal diameter growth are close, and temperature of thermal field gradient is bigger, reason
Faster by first-class growth in thickness speed, temperature of thermal field gradient is smaller, and theoretically the equal diameter speed of growth is slower, vertical pulling method monocrystalline at
Can heat more than crystal boundary face be taken away the speed for directly affecting the growth of monocrystalline equal diameter in time, if this partial heat can not be by
It takes away in time, the equal diameter speed of growth will reduce, otherwise the equal diameter speed of growth increases.
Invention content
The purpose of the present invention is to provide a kind of plated film heat insulation reflecting quartz heat shieldings, can effectively increase temperature gradient, carry
High crystal growth speed.
The present invention also aims to provide a kind of preparation method of plated film heat insulation reflecting quartz heat shielding.
A kind of technical solution of the present invention is：A kind of plated film heat insulation reflecting quartz heat shielding, including quartz substrate with
And quartz substrate inner surface plates the one layer of silver film set, silver film fitting completely is provided with quartz lining, quartz substrate and quartz
Graphite heat shielding liner shape is adapted in the shape and single crystal growing furnace of liner.
The features of the present invention also characterized in that
The thickness of quartz substrate and quartz lining is 3mm-5mm.
The thickness of silver film is 0.03mm-0.06mm.
Another technical solution of the present invention is：The preparation side of plated film heat insulation reflecting quartz heat shielding as described above
Method includes the following steps：
Transparent quartz substrate is made in quartz sand by the first step after high-temperature fusion；
Second step forms one layer of silverskin to the inner surface in quartz substrate after the inner surface progress silver-plated process of quartz substrate
Layer；
Third walks, and will be layed on silver film after quartz sand high temperature melt to molten condition, and quartz lining is formed after cooling.
The features of the present invention also characterized in that
Quartz lining in cooling procedure, when occurring bubble between quartz lining and silver film, uses it in the third step
Vacuumize process is carried out to remove bubble removing.
The beneficial effects of the invention are as follows：A kind of preparation method of plated film heat insulation reflecting quartz heat shielding of the present invention is by high-purity stone
Quartz substrate is respectively prepared after English high-temperature fusion, silver-plated process then is carried out to its inner surface, then the quartz of molten condition is laid with
The plated film heat insulation reflecting quartz heat shielding of the present invention is obtained after cooling on silver film, which is two-sided reflective structure, base
The reflective surface that bottom is constituted with silverskin primarily serves heat-blocking action, and the reflective surface that liner is constituted with silverskin primarily serves reflex,
To effectively increase temperature gradient, improve crystal growth speed, and due to silver film is wrapped in quartz material can be to avoid
Silver metal elements diffusion out pollutes raw material and graphite heat shielding under high temperature.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of plated film heat insulation reflecting quartz heat shielding of the present invention.
In figure, 1. quartz substrates, 2. quartz linings, 3. silver films.
Specific implementation mode
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
The structure of plated film heat insulation reflecting quartz heat shielding provided by the invention a kind of as shown in Figure 1, including quartz substrate 1 and
1 inner surface of quartz substrate plates the one layer of silver film 3 set, and the fitting completely of silver film 3 is provided with quartz lining 2, quartz substrate 1 and stone
Graphite heat shielding liner shape is adapted in the shape and single crystal growing furnace of English liner 2.
Example, the thickness of quartz substrate 1 and quartz lining 2 is 3mm-5mm.The thickness of silver film 3 is 0.03mm-
0.06mm。
The present invention also provides a kind of preparation methods of plated film heat insulation reflecting quartz heat shielding as described above, including following step
Suddenly：
Transparent quartz substrate 1 is made in quartz sand by the first step after high-temperature fusion；
Second step forms one layer of silver to the inner surface in quartz substrate 1 after the inner surface progress silver-plated process of quartz substrate 1
Film layer 3；
Third walks, and will be layed on silver film 3 after quartz sand high temperature melt to molten condition, and quartz lining is formed after cooling
2。
Preferably, quartz lining 2 in cooling procedure, can go out between quartz lining 2 and silver film 3 sometimes in the third step
Existing bubble carries out vacuumize process to remove bubble removing, due to gas when avoiding using between quartz lining 2 and silver film 3 at this time
The presence of bubble causes under the condition of high temperature quartz lining 2 since expanded by heating is burst.
In use, the plated film heat insulation reflecting quartz heat shielding of the present invention is mounted on ordinary graphite heat shielding liner in single crystal growing furnace
Lower part is two-sided reflective structure since plated film heat insulation reflecting quartz heat shielding has silver film 3, the quartz heat shielding in inside,
Quartz substrate 1 and heat-blocking action is primarily served with 3 surface of silver film of its homonymy, the temperature for completely cutting off heater and molten silicon interface
Degree, quartz lining 2 and primarily serves the heat that reflection silicon rod releases with 3 surface of silver film of its homonymy, to by heat every
From, be reflected at the top of single crystal growing furnace and silicon single crystal rod on, effectively increase temperature gradient, rate of crystalline growth can be made to carry by measuring
Rise 5mm/h；In being wrapped in by quartz material due to silver film 3, raw material will not be polluted because high temperature leads to silver metal elements diffusion
And graphite heat shielding.
Claims (5)
1. a kind of plated film heat insulation reflecting quartz heat shielding, which is characterized in that including quartz substrate (1) and quartz substrate (1) interior table
The one layer of silver film (3) set is plated in face, and the silver film (3) fitting completely is provided with quartz lining (2), the quartz substrate (1)
It is adapted with graphite heat shielding liner shape in the shape and single crystal growing furnace of quartz lining (2).
2. a kind of plated film heat insulation reflecting quartz heat shielding as described in claim 1, which is characterized in that the quartz substrate (1) and
The thickness of quartz lining (2) is 3mm-5mm.
3. a kind of plated film heat insulation reflecting quartz heat shielding as described in claim 1, which is characterized in that the thickness of the silver film (3)
Degree is 0.03mm-0.06mm.
4. a kind of preparation method of plated film heat insulation reflecting quartz heat shielding as described in any one of claims 1-3, which is characterized in that
Include the following steps：
Transparent quartz substrate (1) is made in quartz sand by the first step after high-temperature fusion；
Second step, to the inner surface shape in the quartz substrate (1) after the inner surface progress silver-plated process of the quartz substrate (1)
At one layer of silver film (3)；
Third walks, and will be layed in after quartz sand high temperature melt to molten condition on the silver film (3), is formed in quartz after cooling
It serves as a contrast (2).
5. a kind of preparation method of plated film heat insulation reflecting quartz heat shielding as claimed in claim 4, which is characterized in that walked in third
Middle quartz lining (2) in cooling procedure, when there is bubble between quartz lining (2) and silver film (3), with it take out true
It manages to remove bubble removing in vacancy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611139837.XA CN108609864B (en) | 2016-12-12 | 2016-12-12 | Film-coated heat-insulation reflective quartz heat shield and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611139837.XA CN108609864B (en) | 2016-12-12 | 2016-12-12 | Film-coated heat-insulation reflective quartz heat shield and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108609864A true CN108609864A (en) | 2018-10-02 |
| CN108609864B CN108609864B (en) | 2022-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201611139837.XA Active CN108609864B (en) | 2016-12-12 | 2016-12-12 | Film-coated heat-insulation reflective quartz heat shield and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111022168A (en) * | 2019-12-27 | 2020-04-17 | 东风汽车集团有限公司 | Oxygen sensor heat insulation protection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111022168A (en) * | 2019-12-27 | 2020-04-17 | 东风汽车集团有限公司 | Oxygen sensor heat insulation protection device |
| CN111022168B (en) * | 2019-12-27 | 2020-12-25 | 东风汽车集团有限公司 | Oxygen sensor heat insulation protection device |
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| Publication number | Publication date |
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| CN108609864B (en) | 2022-01-14 |
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