CN108593648B - 3D microstructure observation device and observation method thereof - Google Patents
3D microstructure observation device and observation method thereof Download PDFInfo
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- 238000005459 micromachining Methods 0.000 description 2
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
The invention relates to a 3D microstructure observation device, which comprises a microscope body, wherein the microscope body comprises an observation component, a focusing component, an objective table and an objective table adjusting component capable of driving the table to move. The device also comprises a control circuit board and a position adjusting mechanism for driving the glass slide carrying the microstructure to rotate, wherein the position adjusting mechanism is arranged on the objective table and comprises a support component for fixing the glass slide and a driving component for driving the support component to rotate relative to the objective table, and the driving component is electrically connected with the control circuit board. The invention also relates to an observation method of the 3D microstructure observation device, the distribution area of the microstructure is firstly marked, then the microstructure is determined by searching the mark by utilizing the microscope body, then fine adjustment is carried out to realize observation, the position adjustment mechanism drives the glass slide to rotate, further images of different angle positions of the microstructure are obtained, and finally the 3D image of the microstructure is obtained.
Description
Technical Field
The invention relates to the technical field of microstructure detection, in particular to a 3D microstructure observation device and an observation method of the 3D microstructure observation device.
Background
In recent years, with the development of various micromachining technologies, a femtosecond laser two-photon micromachining technology has been rapidly developed and applied in various fields. The microstructure size is generally in the range of 1-1000 μm, and the specific morphology and size of the microstructure cannot be observed by naked eyes. It is often necessary to observe or detect the microstructure using various limiting techniques prior to preparing the microstructure. The main current method of observing microstructure is to use both conventional and scanning electron microscopes. The traditional common optical microscope has low cost and is simple and easy to operate. However, when the microstructure is observed, only one two-dimensional plane of the microstructure can be observed, and the microstructure cannot be observed at multiple angles. The micro-machined three-dimensional pattern is complex, and a plane image cannot accurately show the specific three-dimensional shape of the microstructure often. Therefore, observation of 3D micro-fabricated products using a general optical microscope has a great limitation. The scanning electron microscope can realize the comprehensive observation of the three-dimensional shape of the microstructure and accurately measure the size of the microstructure. However, the electronic scanning microscope is expensive, the operation process is complex, and the electronic scanning microscope can be observed only by plating gold on the sample to be measured when in use, which greatly increases the cost of sample observation, damages the original properties and morphology of the sample, and is generally only used in the technical field of profession.
The Chinese patent publication No. CN104655626B (application No. 20151083666. X) discloses a device for observing a three-dimensional structure under a microscope, wherein three moving platforms and rotating units are arranged on the device, and when the device is used, a sample to be measured is driven to rotate 360 degrees by rotating treatment, so that the shape and the size of the structure are observed in all directions. The device has a plurality of components and complicated construction steps. In addition, the device is independent of a microscope, is difficult to carry integrally with the microscope, is difficult to be used as a product for mass production, and has relatively high use popularity. In addition, when the device is used, the rotating shaft easily shields the light source of the microscope, and the requirement on the placement position of the microstructure is high. In addition, when the sample rotates below the rotating shaft, the microstructure of the back of the sample cannot be observed, and the sample is detached and then reversely fixed on the rotating shaft in the rotating process. Meanwhile, if the adhesive tape is detached and residual adhesive is left on the sample, the observation of the microstructure of the subsequent sample is inevitably influenced, so that the error occurs in the observation result.
Disclosure of Invention
The first technical problem to be solved by the invention is to provide a 3D microstructure observing device which can make full use of a microscope body structure, can be directly arranged on the microscope body to realize the three-dimensional observation of the microstructure, and can be integrally arranged with the microscope body to realize mass production, carrying and operation more easily.
The second technical problem to be solved by the invention is to provide an observation method capable of automatically completing microstructure observation and having high observation speed.
The technical scheme adopted by the invention for solving the first technical problem is as follows: the 3D microstructure observation device comprises a microscope body, wherein the microscope body comprises an observation component, a focusing component, an objective table and an objective table adjusting component capable of driving the objective table to move forwards and backwards and leftwards and rightwards;
The method is characterized in that: the device also comprises a control circuit board and a position adjusting mechanism for driving the glass slide carrying the microstructure to rotate, wherein the position adjusting mechanism is arranged on the objective table;
The position adjusting mechanism comprises a supporting component for fixing the glass slide and a driving component for driving the supporting component to rotate relative to the objective table, and the driving component is electrically connected with the control circuit board;
The observation assembly is electrically connected with the control circuit board.
Simple structure and working process are stable, supporting component includes first support piece and second support piece, the one end of first support piece is rotated and is connected on the objective table, the one end of second support piece is rotated and is connected the other end at first support piece, drive component with the other end drive of second support piece is connected, drive component drive second support piece's second end back-and-forth movement, and then make first support piece, second support piece rotate relative the objective table, be provided with the mounting that is used for fixed slide glass on the upper surface of first support piece or second support piece, be provided with the printing opacity district corresponding to the fixed region of slide glass on first support piece and/or the second support piece.
Preferably, the first supporting piece comprises first supporting arms respectively arranged at the left side and the right side of the objective table, and one ends of the two first supporting arms are both connected to the objective table in a rotating way;
The second support piece comprises second support arms which are respectively arranged on two sides of the objective table, one end of each second support arm is connected with the other end of one first support arm, the other ends of the two second support arms are connected through a rod body, and the driving assembly drives the other end of one second support arm.
The driving assembly comprises a rack, a driving wheel, a gear and a motor, wherein the motor is electrically connected with the control circuit board, the rack is arranged on the object stage along the front-rear direction corresponding to the second supporting piece, the gear is connected to the driving end of the motor, the driving wheel is rotatably connected to the other end of the second supporting piece, and the driving wheel is meshed with the gear and the rack.
In another preferred scheme, the support assembly comprises two support plates and two clamps, the two support plates are respectively arranged in an upward extending mode from the left side and the right side of the object stage, one clamp is connected to the inner side face of each support plate in a rotating mode, and the glass slide can be fixedly clamped between the two clamps.
The structure is simpler, and each clip is rotationally connected to the supporting plate through a rotating shaft;
the driving assembly comprises a driving motor, a driving wheel and a driven wheel, the driving motor is electrically connected with the control circuit board, the driving wheel is connected to the driving end of the driving motor, the driven wheel is fixedly sleeved on the rotating shaft, and the driven wheel is meshed with the driving wheel.
The object stage adjusting assembly comprises an X-direction driving assembly for driving the object stage to move left and right and a Y-direction driving assembly for driving the object stage to move back and forth for facilitating automatic adjustment;
the X-direction driving device further comprises a first driver for driving the X-direction driving assembly to act and a second driver for driving the Y-direction driving assembly to act, and the first driver and the second driver are respectively and electrically connected with the control circuit board.
Preferably, the focusing assembly comprises a coarse focusing helix and a fine focusing helix;
the device also comprises a coarse adjustment driver for driving the coarse focusing screw and a fine adjustment driver for driving the fine focusing screw, wherein the coarse adjustment driver and the fine adjustment driver are respectively and electrically connected with the control circuit board.
The technical scheme adopted by the invention for solving the first technical problem is as follows: an observation method of a 3D microstructure observation device is characterized in that: the method comprises the following steps:
s1, marking a distribution area of a microstructure on a glass slide, wherein a notch is formed in the mark so as to leave a lateral observation area of the microstructure;
s2, the position adjusting mechanism works and adjusts the placing angle of the glass slide relative to the objective table;
s3, rotating the coarse focusing screw in the focusing assembly, collecting an observation image by the observation assembly, and transmitting the collected observation image to the control circuit board;
S4, the control circuit board analyzes whether a marked image exists in the observed image, and if not, S5 is carried out; if yes, S6 is carried out;
s5, the objective table adjusting component works to drive the glass slide carrying the microstructure to move left and right and/or back and forth until a marked image exists in the observation image acquired by the observation component;
S6, the objective table adjusting component works to drive the glass slide carrying the microstructure to perform annular micro-distance movement, meanwhile, the observing component collects observing images and transmits the collected observing images to the control circuit board, and the control circuit board analyzes fuzzy images with the microstructure in the observing images;
S7, rotating the fine focusing spiral in the focusing assembly until an observed image transmitted from the observation assembly to the control circuit board has an image with clear microstructure;
S8, storing the clear image of the microstructure and the placing angle of the glass slide relative to the objective table;
s9, circularly carrying out S2, S3, S6, S7 and S8 until microstructure images of the glass slide at all placement angles relative to the stage are acquired.
Compared with the prior art, the invention has the advantages that: according to the 3D microstructure observation device, the adjustment function of the microscope body structure is fully utilized, and the movement of the objective table relative to the observation component in the three-dimensional direction in the observation process is realized by utilizing the microscope body structure. According to the invention, the position adjusting mechanism for driving the glass slide carrying the microstructure to rotate is additionally arranged on the object stage on the basis of the microscope body, so that the observation of the microstructure multi-angle image on the glass slide can be completed by matching with the position adjustment of the microscope body on the object stage under the action of the position adjusting mechanism, and further the observation of the 3D image of the microstructure is realized, the structure is simpler, and the adjusting step is simple. In addition, because the position adjusting mechanism is very simple and can be installed or directly made on the objective table, the microscope with the structure is convenient for mass production, and compared with the existing electron scanning microscope, the cost is greatly reduced. Meanwhile, the position adjusting mechanism can be integrally carried with the microscope body, so that occupied space is not additionally increased, the position adjusting mechanism is convenient to carry, is suitable for being integrally carried to a using place with the microscope body, and is more convenient to use.
Drawings
Fig. 1 is a perspective view of a 3D microstructure observation apparatus according to a first embodiment of the invention.
Fig. 2 is a perspective view of a 3D microstructure observation apparatus according to a second embodiment of the invention.
Detailed Description
The invention is described in further detail below with reference to the embodiments of the drawings.
Example 1
As shown in fig. 1, the 3D microstructure observation apparatus in the present embodiment includes a microscope body and a position adjustment mechanism.
The microscope body adopts various common microscopes in the prior art, namely the microscope body comprises an observation component, a focusing component, an objective table 3 and an objective table adjusting component.
Wherein the viewing assembly comprises an eyepiece 11, an objective 12, a light source 13, a light source adjuster, etc. The observation assembly in this embodiment adopts an electronic observation assembly, and information collected by the objective lens 12 can be transmitted outwards through a set data interface. Correspondingly, a control circuit board can be arranged in the microscope body or outside the microscope body and is in communication connection with a data interface of the objective 12, so that an image observed by the objective 12 can be obtained. Of course, the control circuit board can also be replaced by a computer.
The focusing assembly comprises a coarse focusing spiral 21 and a fine focusing spiral 22, and the focusing assembly can adjust the height of the objective lens 12 relative to the objective table 3, so that the objective lens 12 can acquire clear images. In this embodiment, in order to realize automatic adjustment of the coarse focusing screw 21 and the fine focusing screw 22, a coarse adjustment driver 81 for driving the coarse focusing screw 21 and a fine adjustment driver 82 for driving the fine focusing screw 22 are additionally provided. The coarse actuator 81 in this embodiment includes a coarse motor 811 and a coarse gear 812 connected to the drive end of the coarse motor 811, the coarse gear 812 being meshed with the coarse spiral 21. The rough adjusting motor 811 is fixedly installed on the base of the microscope body corresponding to the position of the rough focusing screw 21. The fine actuator 82 in this embodiment includes a fine motor 821 and a fine gear 822 connected to the driving end of the fine motor 821, the fine gear 822 being engaged with the fine focusing screw 22. The fine-tuning motor 821 is fixedly installed on the base of the microscope body corresponding to the position of the fine-focusing screw 22. The coarse adjustment motor 811 and the fine adjustment motor 821 are electrically connected with the control circuit board, and when in operation, the coarse adjustment motor 811 and the fine adjustment motor 821 are controlled by the control circuit board, so as to realize adjustment of the focal length of the objective lens 12.
The stage adjustment assembly includes an X-direction drive assembly 61 for driving the stage 3 to move left and right, and a Y-direction drive assembly 62 for driving the stage 3 to move back and forth. The X-direction driving unit 61 and the Y-direction driving unit 62 are conventional mechanisms in the prior art, and typically, the X-direction driving unit 61 and the Y-direction driving unit 62 are each provided with an adjusting wheel on the outside of the stage 3, and the operation of the corresponding adjusting wheels can realize the operation of the X-direction driving unit 61 and the Y-direction driving unit 62. In the present embodiment, in order to realize automatic operation of the X-direction driving unit 61 and the Y-direction driving unit 62, a first driver 71 for driving the X-direction driving unit 61 to operate and a second driver 72 for driving the Y-direction driving unit 62 to operate are provided, and the first driver 71 and the second driver 72 are electrically connected to the control circuit board, respectively. The first driver 71 in this embodiment includes a first motor 711 and a first gear 712 connected to a driving end of the first motor 711, and the second driver 72 includes a second motor 722 and a second gear 722 connected to a driving end of the second motor 722, where the first motor 711 and the second motor 722 are electrically connected to a control circuit board, respectively, the first gear 712 is engaged with an adjusting wheel corresponding to the X-direction driving assembly 61, and the second gear 722 is engaged with an adjusting wheel corresponding to the Y-direction driving assembly 62. When the motor is installed, a mounting plate is extended from the stage 3, and the first motor 711 and the second motor 722 are fixedly installed on the mounting plate. When the device works, the control circuit board controls the first motor 711 and the second motor 722 to work, so that the X-direction driving assembly 61 and the Y-direction driving assembly 62 are driven to work, and accordingly movement adjustment of the object stage 3 in the left-right direction and the front-back direction is achieved.
The position adjustment mechanism may be mounted on a fixed plate, and further on the stage 3 via the fixed plate. The position adjustment mechanism may be directly attached to the stage 3 for use.
The position adjusting mechanism in this embodiment includes a support assembly 4 for fixing a slide glass and a driving assembly 5 for driving the support assembly 4 to rotate relative to the stage 3, where the driving assembly 5 is electrically connected to the control circuit board, and the driving assembly 5 drives the support assembly 4 to rotate under the control of the control circuit board.
Wherein the support assembly 4 comprises a first support and a second support. The first supporting members comprise first supporting arms 41 which are arranged at the left side and the right side of the object stage 3 at intervals, and one ends of the two first supporting arms 41 are rotatably connected to the object stage 3. Specifically, a mounting block 411 may be mounted on the stage 3 at a rotational mounting position corresponding to the first support arms 41, and each of the first support arms 41 is rotatably connected to one of the mounting blocks 411 by a rotation shaft. And the length direction of the first support arm 41 extends in the front-rear direction of the stage 3. The second support members comprise second support arms 42 arranged at two sides of the stage 3 at intervals, one end of each second support arm 42 is connected to the other end of one first support arm 41, and the other ends of the two second support arms 42 are connected through a rod body 43, so that the two support arms can synchronously move.
In order to facilitate the installation of the rod body 43 and the driving assembly 5, a fixing assembly is installed at the end of the other end of the second supporting arm 42, the fixing assembly comprises mounting plates 32 oppositely arranged at two sides of the other end of the second supporting arm 42, and a connecting rod 33 connected between the lower ends of the two mounting plates 32, the rod body 43 is inserted into the other end of the second supporting arm 42 and penetrates through the two mounting plates 32, an installation groove for installing a driving wheel 52 described below is reserved at the other end of the second supporting arm 42, and the rod body 43 also penetrates through the driving wheel 52 described below, so that the driving wheel 52 rotates relative to the second supporting arm 42 by taking the rod body 43 as a rotating shaft. The motor 54, described below, is fixedly mounted to one of the mounting plates 32 and moves with the mounting plate 32. In order to provide guidance for the direction of the second support arm 42, a guide slot 31 into which a connecting rod is inserted is provided below the rack 51, and the distance of the guide slot 31 matches the stroke of the other end of the second support arm 42.
The driving assembly 5 drives the other end of one second supporting arm 42, and can further drive the second end of the second supporting member to move back and forth, so that the first supporting member and the second supporting member can rotate relative to the stage 3 while relatively moving with the connection point between the other end of the first supporting arm 41 and one end of the second supporting arm 42 as a fulcrum. A fixing member 44 for fixing the slide is provided on the upper surface of the first support or the second support. The fixing piece 44 in this embodiment is connected to the upper surface of the first support arm 41, and the fixing piece 44 is L-shaped, so that a slot capable of being clamped into a slide glass is formed between the fixing piece 44 and the first support arm 41, and two ends of the slide glass are respectively clamped on the fixing pieces 44 on the two first support arms 41, so that the slide glass is fixed on the support assembly 4.
Because the interval sets up between two first support arms 41, two second support arms 42, and the slide glass is fixed between two first support arms 41 simultaneously, then two first support arms 41, the position between two second support arms 42 have formed the slide glass and have the printing opacity district, and the light of light source 13 can shine on the slide glass in the microscope body, and then realizes observing.
The driving assembly 5 includes a rack 51, a driving wheel 52, a gear 53 and a motor 54, wherein the motor 54 may be fixedly installed on the rod body 43 between the two second supporting arms 42, and the motor 54 is electrically connected with the control circuit board, and the motor 54 operates under the control of the control circuit board. The racks 51 in this embodiment include two racks 51, each rack 51 is disposed on the stage 3 along the front-back direction and is matched with the walking path of the other end of one second support arm 42, the gear 53 is connected to the driving end of the motor 54, the other end of each second support arm 42 is rotationally connected to a driving wheel 52, the driving wheel 52 is meshed with the gear 53 and the racks 51, and then the driving wheel 52 is driven to rotate by the motor 54 to further drive the gear 53 to rotate, so that the driving wheel 52 moves back and forth on the rack 51, and the front-back driving of the other end of the second drive arm is realized, so that the rotation of the first drive arm relative to the plane of the stage 3 can be realized, and images with different angles of the microstructure on the glass slide can be observed through the objective 12. By adjusting the placement position of the glass slide, for example, the glass slide can be placed in a front upward direction and a reverse direction relative to the objective lens 12, the glass slide can be placed in a front downward direction and a forward direction, and the glass slide can be placed in a front downward direction and a reverse direction, so that the microstructure 3D shape can be comprehensively observed through multi-angle observation of the microstructure under different placement positions of the glass slide.
The 3D microstructure observation device provided by the invention does not additionally increase the storage volume of the microscope body, is convenient to carry, and can be carried to any required place for use without additionally carrying other parts. In addition, the 3D microstructure observation device is few in additional components on the existing microscope body, simple and easy to realize, low in manufacturing cost, applicable to mass production in factories and capable of automatically performing reconstruction and structural transformation.
In addition, the observation method of the 3D microstructure observation device specifically comprises the following steps:
S1, marking a distribution area of a microstructure on a glass slide, namely marking a rectangular frame around the distribution area of the microstructure in the embodiment, and respectively providing notches on four sides of the rectangular frame, so that in the process that the glass slide rotates along with a position adjusting mechanism, the objective 12 can observe the side surface of the microstructure conveniently, namely the notches leave a lateral observation area of the microstructure;
The slide bearing the microstructure and marked with the microstructure distribution area is then placed on the position adjustment mechanism, in this embodiment, the slide is placed on the fixing members 44 of the two first support arms 41, so that the slide is placed on the position adjustment mechanism, and in this embodiment, the initial observation position is: the first support arm 41 and the second support arm 42 are in a horizontal state, namely, the included angle between the first support arm 41 and the second support arm 42 is 180 degrees;
S2, the position adjusting mechanism works to adjust the placing angle of the glass slide relative to the objective table 3; the slide glass is initially in a horizontal state, then in the working process, the motor 54 drives the gear 53 to rotate, the gear 53 drives the driving wheel 52 to rotate, the driving wheel 52 moves backwards relative to the rack 51, and the slide glass is driven to observe once when the slide glass rotates to a new angle, until the clamping angle between the first support arm 41 and the second support arm 42 becomes 90 degrees, namely the slide glass is in a vertical state;
s3, during observation, the control circuit board controls the coarse adjustment motor 811 to work so as to drive the coarse focusing screw 21 in the focusing assembly to rotate, and meanwhile, the observation assembly collects observation images and transmits the collected observation images to the control circuit board;
S4, when the glass slide at the initial position is observed, the control circuit board analyzes whether a marked image exists in the observed image, and if not, S5 is carried out; if yes, S6 is carried out;
S5, the control circuit board controls the first motor 711 and the second motor 722 to work, so as to control the objective table adjusting assembly to work, and drive the glass slide carrying the microstructure to move left and right and/or back and forth until a marked image exists in an observation image acquired by the observation assembly; through S4 and S5, the approximate distribution area of the microstructure can be quickly found, the observation speed is higher, and in the rotation process of the follow-up slide, as the control circuit board controls the rotation of the motor 54, the accurate working data of the motor 54 can be obtained, the moving distance of the slide can be calculated and obtained, the moving data of the objective table 3 can be accurately regulated, so that the objective 12 can conveniently and quickly find the distribution area of the microstructure, the distribution area of the microstructure does not need to be found every time, and the observation speed is greatly improved;
S6, a control circuit board controls a first motor 711 and a second motor 722 to work, controls an objective table adjusting component to work, drives a glass slide carrying a microstructure to perform annular micro-distance movement, in the embodiment, drives the glass slide to perform rectangular micro-distance movement, simultaneously an observation component collects observation images, the collected observation images are transmitted to the control circuit board, and the control circuit board analyzes a fuzzy image with the microstructure in the observation images;
S7, the control circuit board controls the fine adjustment motor 821 to work, and further controls the fine focusing screw 22 in the focusing assembly to rotate until the observed image transmitted from the observation assembly to the control circuit board has an image with clear microstructure;
S8, storing the clear image of the microstructure and the placing angle of the glass slide relative to the objective table 3;
S9, circularly performing S2, S3, S6, S7 and S8 until microstructure images of the glass slide at all placement angles relative to the stage 3 are acquired.
In the foregoing process, a structural image of the microstructure on the glass slide within a 90 ° change angle can be obtained, in order to obtain a 3D image of the microstructure, the glass slide can be placed in a front direction and forward, a front direction and reverse, a front direction and forward, a front direction and reverse with respect to the objective lens 12, then the glass slide is turned 90 ° clockwise or counterclockwise along a plane of the glass slide, and then the foregoing placement manner is adopted to obtain images of the microstructure at multiple angles by adopting the foregoing observation method, and then all observation images of the microstructure are processed by a control circuit board or a computer, so as to obtain a 3D form and specific dimensional parameters of the microstructure.
Example two
As shown in fig. 2, the present embodiment differs from the first embodiment only in that: the support assembly 4 includes two support plates 44 and two clips 45, the two support plates 44 extend upwards from the left and right sides of the stage 3, each of the clips 45 is rotatably connected to the inner side of each of the support plates 44, and each of the clips 45 is rotatably connected to the support plate 44 through a rotation shaft. The microstructured slide can be fixedly clamped between two clamps 45.
The driving assembly 5 comprises a driving motor 55, a driving wheel 56 and a driven wheel 57, and the driving motor 55 is electrically connected with the control circuit board. The driving wheel 56 is connected to the driving end of the driving motor 55, the driven wheel 57 is fixedly sleeved on the rotating shaft, and the driven wheel 57 is meshed with the driving wheel 56. In operation, the drive motor 55 drives one of the clips 45 to rotate, respectively, thereby driving the microstructure-bearing slide to rotate 360 ° relative to the stage 3.
Specifically, when the observation is performed, the initial position of the slide glass clamped on the clamp 45 is in the horizontal position, after the blurred image of the microstructure is obtained under the operation of the objective table adjusting component and the coarse focusing screw 21, the objective table 3 is not required to be adjusted, and in the rotation process of the slide glass, the images of all angles of the microstructure can be obtained only by adjusting the coarse focusing screw 21 and the fine focusing screw 22. Then the slide glass is turned 90 degrees clockwise or anticlockwise along the plane of the slide glass, and then the slide glass is clamped on the clamp 45 for 360-degree observation, so that the 3D form and specific size parameters of the microstructure can be finally calculated and obtained.
The position adjusting mechanism in the embodiment is simpler, and the observation process is simpler.
Claims (8)
1. An observation method of a 3D microstructure observation device, wherein the 3D microstructure observation device comprises a microscope body, and the microscope body comprises an observation component, a focusing component, an objective table (3) and an objective table adjusting component capable of driving the objective table (3) to move;
The method is characterized in that: the device also comprises a control circuit board and a position adjusting mechanism for driving the glass slide carrying the microstructure to rotate, wherein the position adjusting mechanism is arranged on the objective table (3);
the position adjusting mechanism comprises a supporting component (4) for fixing the glass slide and a driving component (5) for driving the supporting component (4) to rotate relative to the objective table (3), and the driving component (5) is electrically connected with the control circuit board;
The observation assembly is electrically connected with the control circuit board;
The observation method of the 3D microstructure observation device comprises the following steps of:
s1, marking a distribution area of a microstructure on a glass slide, wherein a notch is formed in the mark so as to leave a lateral observation area of the microstructure;
S2, the position adjusting mechanism works and adjusts the placing angle of the glass slide relative to the objective table (3);
s3, rotating a coarse focusing spiral (21) in the focusing assembly, simultaneously acquiring an observation image by the observation assembly, and transmitting the acquired observation image to the control circuit board;
S4, the control circuit board analyzes whether a marked image exists in the observed image, and if not, S5 is carried out; if yes, S6 is carried out;
s5, the objective table adjusting component works to drive the glass slide carrying the microstructure to move left and right and/or back and forth until a marked image exists in the observation image acquired by the observation component;
S6, the objective table adjusting component works to drive the glass slide carrying the microstructure to perform annular micro-distance movement, meanwhile, the observing component collects observing images and transmits the collected observing images to the control circuit board, and the control circuit board analyzes fuzzy images with the microstructure in the observing images;
S7, rotating a fine focusing spiral (22) in the focusing assembly until an observed image transmitted from the observation assembly to the control circuit board has an image with clear microstructure;
S8, storing the clear image of the microstructure and the placing angle of the glass slide relative to the objective table (3);
s9, circularly carrying out S2, S3, S6, S7 and S8 until microstructure images of the glass slide at all placement angles relative to the objective table (3) are obtained;
All the observation images of the microstructure are processed through a control circuit board or a computer, and then the 3D form and specific size parameters of the microstructure are obtained.
2. The observation method of a 3D microstructure observation apparatus according to claim 1, wherein: the support assembly (4) comprises a first support and a second support, one end of the first support is rotationally connected to the objective table (3), one end of the second support is rotationally connected to the other end of the first support, the driving assembly (5) is in driving connection with the other end of the second support, the driving assembly (5) drives the second end of the second support to move back and forth, the first support and the second support are further enabled to rotate relative to the objective table (3), a fixing piece for fixing a slide glass is arranged on the upper surface of the first support or the second support, and a light transmission area is arranged on a fixing area corresponding to the slide glass on the first support and/or the second support.
3. The observation method of a 3D microstructure observation apparatus according to claim 2, wherein: the first supporting piece comprises first supporting arms (41) which are respectively arranged at the left side and the right side of the objective table (3), and one ends of the two first supporting arms (41) are both connected to the objective table (3) in a rotating way;
The second support piece comprises second support arms (42) which are respectively arranged on two sides of the object stage (3), one end of each second support arm (42) is connected with the other end of one first support arm (41), the other ends of the two second support arms (42) are connected through a rod body (43), and the driving assembly (5) drives the other end of one second support arm (42).
4. A method of observing a 3D microstructure observation apparatus according to claim 2 or 3, wherein: the driving assembly (5) comprises a rack (51), a driving wheel (52), a gear (53) and a motor (54), wherein the motor (54) is electrically connected with the control circuit board, the rack (51) is arranged on the object stage (3) along the front-back direction corresponding to the second supporting piece, the gear (53) is connected to the driving end of the motor (54), the driving wheel (52) is rotationally connected to the other end of the second supporting piece, and the driving wheel (52) is meshed with the gear (53) and the rack (51).
5. The observation method of a 3D microstructure observation apparatus according to claim 1, wherein: the support assembly (4) comprises two support plates and two clamps (45), the two support plates are respectively arranged in an upward extending mode from the left side and the right side of the object stage (3), one clamp (45) is connected to the inner side face of each support plate in a rotating mode, and the glass slide can be clamped between the two clamps (45) in a fixed mode.
6. The observation method of the 3D microstructure observation apparatus according to claim 5, wherein: each clip (45) is rotatably connected to the support plate through a rotating shaft;
The driving assembly (5) comprises a driving motor (55), a driving wheel (56) and a driven wheel (57), the driving motor (55) is electrically connected with the control circuit board, the driving wheel (56) is connected to the driving end of the driving motor (55), the driven wheel (57) is fixedly sleeved on the rotating shaft, and the driven wheel (57) is meshed with the driving wheel (56).
7. The observation method of a 3D microstructure observation apparatus according to claim 1, wherein: the object stage adjusting assembly comprises an X-direction driving assembly (61) for driving the object stage (3) to move left and right and a Y-direction driving assembly (62) for driving the object stage (3) to move back and forth;
The X-direction driving device further comprises a first driver (71) for driving the X-direction driving assembly (61) to act and a second driver (72) for driving the Y-direction driving assembly (62) to act, and the first driver (71) and the second driver (72) are respectively and electrically connected with the control circuit board.
8. The observation method of a 3D microstructure observation apparatus according to claim 1, wherein: the focusing assembly comprises a coarse focusing spiral (21) and a fine focusing spiral (22);
the device further comprises a coarse adjustment driver (81) for driving the coarse focusing spiral (21) and a fine adjustment driver (82) for driving the fine focusing spiral (22), wherein the coarse adjustment driver (81) and the fine adjustment driver (82) are respectively electrically connected with the control circuit board.
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| CN110780440B (en) * | 2019-11-12 | 2021-08-24 | 四川沃文特生物技术有限公司 | Photographic microscope and method for rapidly photographing by using same |
| CN112945956B (en) * | 2021-02-04 | 2023-06-27 | 广东小天才科技有限公司 | Slide loading detection method and device, terminal equipment and storage medium |
| CN113702385B (en) * | 2021-07-28 | 2023-06-30 | 南京工程学院 | Angle-adjustable objective table and use method thereof |
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