CN108493766A - A kind of novel arc VCSEL light emitting arrays, production method, control system and control method - Google Patents
A kind of novel arc VCSEL light emitting arrays, production method, control system and control method Download PDFInfo
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- CN108493766A CN108493766A CN201810118042.3A CN201810118042A CN108493766A CN 108493766 A CN108493766 A CN 108493766A CN 201810118042 A CN201810118042 A CN 201810118042A CN 108493766 A CN108493766 A CN 108493766A
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- light emitting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
The present invention relates to a kind of novel arc VCSEL light emitting arrays, production method, control system and control method, this method to include：Point by point scanning processing is carried out to the electrode layer on the VCSEL array cell surface in curved surface arc substrate using laser beam；A kind of system is further related to, which includes：Novel arc VCSEL light emitting arrays, microlens array, logic control circuit.A kind of control method is further related to, this method includes：Logic control circuit controls the sequence of light of luminescence unit in novel VCSEL light emitting arrays according to the luminous instruction received；According to sequence of light, the different reflection angle of each micro-reflector is respectively set, so as to be in the angle of departure of predetermined angle on the direction of each transmitter unit is sent out in novel arc VCSEL light emitting arrays light and horizontal plane.Novel arc VCSEL light emitting arrays through the invention, the fluorescent lifetime that specified luminescence unit may be implemented is respectively individually controllable, substantially increases the service efficiency of VCSEL array unit.
Description
Technical field
The invention belongs to VCSEL light emitting arrays field more particularly to a kind of novel arc VCSEL light emitting arrays, making sides
Method, control system and control method.
Background technology
Vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, i.e. VCSEL) is
Revolutionary light emitting devices in very promising Novel Optoelectronic Device and optic communication.As its name suggests, edge emitting laser
Device is along being parallel to substrate surface, be emitted perpendicular to the direction of cleavage surface, and surface-emitting laser its light direction is perpendicular to lining
The common structure of bottom surface, existing VCSEL array unit is made of speculum, active area and metal contact layer.It is mainly tied
Structure is divided into two parts：Center is active area, it has two kinds of structures of bulk heterojunction and Quantum Well.Active area is up and down high reflectance
The distribution Bragg reflector (DBR) of Effects of GaAs/AlGaAs Quantum Wells.DBR speculums by optical thickness be λ/4 high refractive index layer and
Low-index layer alternating growth forms.VCSEL devices are often fabricated to round, rectangular and loop configuration, respectively in substrate and p-DBR
Outer surface make metal contact layer, and a round light-emitting window is made on p-DBR or n-DBR, VCSEL can form highly dense
Spend two-dimensional array (two-way laser array that dense arrangement can be made), that is, VCSEL array unit currently on the market.
But for a VCSEL array unit, electrode is generally by the way of vapor deposition.This process makes on the same face
All VCSEL luminescence units all have the same electrode.Therefore, their fluorescent lifetime is consistent.If necessary to realize
The fluorescent lifetime of specified luminescence unit is respectively individually controllable, then needs all luminescence units all to have independent electrode, make in this way
The service efficiency for obtaining VCSEL array unit is greatly reduced.
Invention content
The technical problem to be solved by the present invention is to：Existing VCSEL array unit all has the same electrode, leads to it
Fluorescent lifetime and laser emitting direction be consistent.Fluorescent lifetime if necessary to realize specified luminescence unit is respectively independent
Controllably, then need all luminescence units that all there is independent electrode, so that the service efficiency of VCSEL array unit substantially drops
It is low.
To solve technical problem above, the present invention provides a kind of production method of novel arc VCSEL light emitting arrays,
It is characterized in that the production method includes：
The electrode layer on the VCSEL array cell surface in curved surface arc substrate is swept point by point using laser beam
Processing is retouched, novel arc VCSEL light emitting arrays are obtained.
Beneficial effects of the present invention：By above-mentioned production method, by the electrode layer on VCSEL array cell surface carry out by
Spot scan is processed, and can be removed some no electrodes, can be obtained novel arc VCSEL light emitting arrays in this way.
Further, it is described using laser beam to the electricity on the VCSEL array cell surface in curved surface arc substrate
Pole layer carries out point by point scanning processing：
The laser beam emitted using the laser light source of fs pulsewidths is successively after condenser lens and laser scanning galvanometer
It penetrates on the VCSEL array cell surface, and point by point scanning is carried out to the electrode layer on the VCSEL array cell surface,
It is ablated off no electrode layer on the VCSEL array cell surface, obtains the novel arc VCSEL light emitting arrays.
The invention further relates to a kind of novel arc VCSEL light emitting arrays, the novel arc VCSEL light emitting arrays are using such as
What the upper production method obtained.
Beneficial effects of the present invention：Novel arc VCSEL light emitting arrays are by by the electricity on VCSEL array cell surface
Pole layer carries out point by point scanning processing, can remove what some no electrodes obtained, such novel arc VCSEL light-emitting arrays
Row, the fluorescent lifetime that specified luminescence unit may be implemented is respectively individually controllable, substantially increases the use effect of VCSEL array unit
Rate.
The invention further relates to a kind of control systems based on novel arc VCSEL light emitting arrays, which is characterized in that the control
System includes：Novel arc VCSEL light emitting arrays, microlens array, logic control circuit as described above；
The microlens array is set on the edge of the novel arc VCSEL light emitting arrays, and by the lenticule
Array arrangement at cambered surface reference plane and the substrate cambered surface of the novel arc VCSEL light emitting arrays it is concentric；
The electrode of each luminescence unit in the novel arc VCSEL light emitting arrays respectively with the logic control circuit
Connection.
Beneficial effects of the present invention：By using novel arc VCSEL light emitting arrays, can allow will not wash away electrode layer
The electrode of luminescence unit is drawn, and is connected by logic control circuit, can be independently controlled each luminescence unit and shine in an orderly manner.
Further, the microlens array includes：Multiple lenticules.
Further, each micro-reflector respectively with each luminescence unit in the novel arc VCSEL light emitting arrays
It corresponds, wherein the reflection angle different by the way that each micro-reflector is arranged, the light and horizontal plane that each transmitter unit is sent out
It is in the angle of departure of predetermined angle in vertical direction.
Further, the novel VCSEL light emitting arrays connect with the reflection mirror array including：
The novel arc VCSEL light emitting arrays are connect by adhering glass with the microlens array.
The invention further relates to a kind of control method based on novel arc VCSEL light emitting arrays, which includes：
Logic control circuit controls shining for luminescence unit in novel VCSEL light emitting arrays according to the luminous instruction received
Sequentially；
According to the sequence of light, the different reflection angle of each micro-reflector is respectively set, so that the novel arc
It is in the angle of departure of predetermined angle on the direction for the light and horizontal plane that each transmitter unit is sent out in VCSEL light emitting arrays.
Beneficial effects of the present invention：By using novel arc VCSEL light emitting arrays, can allow will not wash away electrode layer
The electrode of luminescence unit is drawn, and is connected by logic control circuit, can be independently controlled each luminescence unit and shine in an orderly manner.
Description of the drawings
Fig. 1 is a kind of schematic diagram of novel arc VCSEL light emitting arrays in the embodiment of the present invention 1；
Fig. 2 is the position view of the novel arc VCSEL light emitting arrays and microlens array of the embodiment of the present invention 4；
Fig. 3 is a kind of flow chart of control method based on novel arc VCSEL light emitting arrays of the embodiment of the present invention 8.
Specific implementation mode
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the present invention.
As shown in Figure 1, an embodiment of the present invention provides a kind of production method of novel arc VCSEL light emitting arrays, the system
Include as method：
The electrode layer on the VCSEL array cell surface in curved surface arc substrate is swept point by point using laser beam
Processing is retouched, novel arc VCSEL light emitting arrays are obtained.
It is understood that being by the electricity on the VCSEL array cell surface in curved surface arc substrate in the present embodiment 1
Pole layer carries out point by point scanning processing, and the electrode layer for going electricity extra obtains novel arc VCSEL light emitting arrays as shown in Figure 1.One
As, use micron dimension VCSEL chips, compositing chip array.By taking vertical and horizontal each 100 cellular arrays as an example, then 10,000 are shared
A luminescence unit.Selective add, is carried out to the metal contact layer of luminescence unit on chip using femtosecond laser parallel micromachining technology
Work.Black portions are the metal contact layer of luminescence unit, i.e. its electrode in Fig. 1.Micro- add, is carried out to the VSECL arrays integrated
Work, the segment electrode layer (leaving extension) for washing away part luminescence unit at interval.
Above-mentioned production method is crossed, the electrode layer on VCSEL array cell surface is subjected to point by point scanning processing, can be removed
Some no electrodes can obtain novel arc VCSEL light emitting arrays in this way.
Optionally, use laser beam to the VCSEL array list in curved surface arc substrate described in another embodiment 2
Electrode layer on first surface carries out point by point scanning processing：
The laser beam emitted using the laser light source of fs pulsewidths is successively after condenser lens and laser scanning galvanometer
It penetrates on the VCSEL array cell surface, and point by point scanning is carried out to the electrode layer on the VCSEL array cell surface,
It is ablated off no electrode layer on the VCSEL array cell surface, obtains the novel arc VCSEL light emitting arrays.
It is the life due to curved surface to single luminescence unit it is understood that being to use arc substrate in the present embodiment 2
The influence very little of production process, it is almost negligible to disregard.Therefore, micro reflector array can need not be used using arc substrate, directly
The diverging cone angle output for realizing given angle is connect, keeps entire array arc-shaped using arc substrate, using the method in embodiment 1
Remove electrode layer extra on VCSEL array cell surface, such novel arc VCSEL light emitting arrays may be implemented to specify
The fluorescent lifetime of luminescence unit is respectively individually controllable, substantially increases the service efficiency of VCSEL array unit.
A kind of novel arc VCSEL light emitting arrays are further related in the embodiment of the present invention 3, the novel arc VCSEL shines
What array was obtained using production method as described above.
It is understood that novel arc VCSEL light emitting arrays in the embodiment of the present invention 3 using above-described embodiment 1 or
What the method for person's embodiment 2 made.
Novel arc VCSEL light emitting arrays are by by the electricity on VCSEL array cell surface in the embodiment of the present invention 3
Pole layer carries out point by point scanning processing, can remove what some no electrodes obtained, such novel arc VCSEL light-emitting arrays
Row, the fluorescent lifetime that specified luminescence unit may be implemented is respectively individually controllable, substantially increases the use effect of VCSEL array unit
Rate.
A kind of control system based on novel arc VCSEL light emitting arrays is further related in the embodiment of the present invention 4, the control system
System includes：Novel arc VCSEL light emitting arrays, microlens array, logic control circuit as described above；
The microlens array is set on the edge of the novel arc VCSEL light emitting arrays, and by the lenticule
Array arrangement at cambered surface reference plane and the substrate cambered surface of the novel arc VCSEL light emitting arrays it is concentric；
The electrode of each luminescence unit in the novel arc VCSEL light emitting arrays respectively with the logic control circuit
Connection.
It is understood that as shown in Fig. 2, being at the edge of novel arc VCSEL light emitting arrays in the embodiment of the present invention 4
Upper setting microlens array directly collimates each luminescence unit exported from VCSEL luminescence chips, passes through each luminous list in this way
The electrode of member is connect with logic control circuit respectively, can independently control each luminescence unit luminous (10 ° of angle left sides in an orderly manner
Right light).
Optionally, the microlens array described in another embodiment 5 includes：Multiple lenticules.
Optionally, in another embodiment 6 each micro-reflector respectively in the novel arc VCSEL light emitting arrays
Each luminescence unit corresponds, wherein the reflection angle different by the way that each micro-reflector is arranged, each transmitter unit are sent out
Light and horizontal plane direction on be in predetermined angle the angle of departure.
It is understood that predetermined angle is more than 0 ° less than 90 ° in the present embodiment 6.
Optionally, the novel VCSEL light emitting arrays described in another embodiment 7 connect with the reflection mirror array including：
The novel arc VCSEL light emitting arrays are connect by adhering glass with the microlens array.
As shown in figure 3, further relating to a kind of controlling party based on novel arc VCSEL light emitting arrays in the embodiment of the present invention 8
Method, the control method include：
S11, logic control circuit control luminescence unit in novel VCSEL light emitting arrays according to the luminous instruction received
Sequence of light；
The different reflection angle of each micro-reflector is respectively set according to the sequence of light in S12, so that described novel
It is in the transmitting of predetermined angle on the direction for the light and horizontal plane that each transmitter unit is sent out in arc VCSEL light emitting arrays
Angle.
It is understood that the control method in 8 through the embodiment of the present invention, using novel arc VCSEL light emitting arrays,
The electrode for the luminescence unit for not washing away electrode layer can be allowed to draw, connected by logic control circuit, can be independently controlled every
A luminescence unit shines in an orderly manner.
In the present specification, a schematic expression of the above terms does not necessarily refer to the same embodiment or example.
Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples with suitable
Mode combines.In addition, without conflicting with each other, those skilled in the art can be by difference described in this specification
The feature of embodiment or example and different embodiments or examples is combined.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of production method of novel arc VCSEL light emitting arrays, which is characterized in that the production method includes：
Point by point scanning is carried out using laser beam to the electrode layer on the VCSEL array cell surface in curved surface arc substrate to add
Work obtains novel arc VCSEL light emitting arrays.
2. the production method of novel arc VCSEL light emitting arrays according to claim 1, which is characterized in that the use
Laser beam carries out point by point scanning processing to the electrode layer on the VCSEL array cell surface in curved surface arc substrate：
The laser beam emitted using the laser light source of fs pulsewidths is penetrated after condenser lens and laser scanning galvanometer successively
On the VCSEL array cell surface, and point by point scanning, ablation are carried out to the electrode layer on the VCSEL array cell surface
Fall no electrode layer on the VCSEL array cell surface, obtains the novel arc VCSEL light emitting arrays.
3. a kind of novel arc VCSEL light emitting arrays, which is characterized in that the novel arc VCSEL light emitting arrays are used as weighed
Profit requires the production method described in 1 or 2 to obtain.
4. a kind of control system based on novel arc VCSEL light emitting arrays, which is characterized in that the control system includes：Such as power
Profit requires novel arc VCSEL light emitting arrays, microlens array, logic control circuit described in 3；
The microlens array is set on the edge of the novel arc VCSEL light emitting arrays, and by the microlens array
The cambered surface reference plane being arranged into and the substrate cambered surface of the novel arc VCSEL light emitting arrays are concentric；
The electrode of each luminescence unit in the novel arc VCSEL light emitting arrays connects with the logic control circuit respectively
It connects.
5. control system according to claim 4, which is characterized in that the microlens array includes：Multiple lenticules.
6. control system according to claim 5, which is characterized in that each micro-reflector respectively with the novel arc
Each luminescence unit in VCSEL light emitting arrays corresponds, wherein the reflection angle different by the way that each micro-reflector is arranged,
The light that each transmitter unit is sent out and the angle of departure on horizontal plane direction being in predetermined angle.
7. according to any control systems of claim 4-6, which is characterized in that the novel VCSEL light emitting arrays and institute
Stating reflection mirror array connection includes：
The novel arc VCSEL light emitting arrays are connect by adhering glass with the microlens array.
8. a kind of control method based on novel arc VCSEL light emitting arrays, which is characterized in that the control method includes：
It is suitable that logic control circuit according to the luminous instruction received controls shining for luminescence unit in novel VCSEL light emitting arrays
Sequence；
According to the sequence of light, the different reflection angle of each micro-reflector is respectively set, so that the novel arc VCSEL
It is in the angle of departure of predetermined angle on the direction for the light and horizontal plane that each transmitter unit is sent out in light emitting array.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810118042.3A CN108493766A (en) | 2018-02-06 | 2018-02-06 | A kind of novel arc VCSEL light emitting arrays, production method, control system and control method |
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| CN201810118042.3A CN108493766A (en) | 2018-02-06 | 2018-02-06 | A kind of novel arc VCSEL light emitting arrays, production method, control system and control method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112729273A (en) * | 2019-10-14 | 2021-04-30 | 通用电气公司 | Vehicle navigation system |
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| CN112729273B (en) * | 2019-10-14 | 2024-06-04 | 通用电气公司 | Carrier navigation system |
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