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CN108490092A - A kind of gas detecting system - Google Patents

A kind of gas detecting system Download PDF

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Publication number
CN108490092A
CN108490092A CN201810260550.5A CN201810260550A CN108490092A CN 108490092 A CN108490092 A CN 108490092A CN 201810260550 A CN201810260550 A CN 201810260550A CN 108490092 A CN108490092 A CN 108490092A
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China
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gas
outlet
bulk acoustic
sample
connect
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CN201810260550.5A
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Chinese (zh)
Inventor
段学欣
胡继洲
庞慰
屈贺幂
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Tianjin University
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Tianjin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The present invention provides a kind of gas detecting systems, including:Sample feeding mouth 101;Quantity tube 103 is connected to the sample feeding mouth 101 by gas circuit pipe;For carrying out sample amounts;Carrier gas subsystem is connect with the entrance of the quantity tube 103, for the sample after quantifying to be loaded into the entrance with the thermal desorption unit 116 of the outlet connection of the quantity tube 103;Wherein, the thermal desorption unit 116 is for being gasified and being enriched with to sample;Chromatographic column 105 is connect with the outlet of thermal desorption unit 116, is detached for the gas after the thermal desorption unit 116 is gasified and is enriched with;Bulk acoustic resonance device 109 is connect with the outlet of the chromatographic column 105, for detection to be identified to gas.By upper, a kind of gas detecting system of micromation of the application is advantageously implemented the detection easily to gas.

Description

A kind of gas detecting system
Technical field
The present invention relates to field of gas detection, and more particularly to a kind of gas detecting system.
Background technology
Volatile organic compounds are detected, the detection of disease marker and environmental contaminants are such as directed to, to some Major disease, which includes the early detection of diabetes, kidney failure etc. and the supervision of environmental pollution and prevention, vital effect. The detection method of traditional gas is mostly the large-sized analytic instrument based on laboratory, such as gas chromatograph-mass spectrometer, these instruments Although the ingredient and content of mixed gas can be detected accurately, these procedures are complicated, and time-consuming, equipment instrument It is huge to cannot achieve in-situ monitor.Since the volume of the detector portion of traditional gas chromatograph is excessive, entire gas is constrained The miniaturization of body analysis system, in recent years, the micromation work for gas chromatograph detector portion are carrying out always. But substantive progress is not obtained also at present.
Therefore, the detection easily to gas is advantageously implemented there is an urgent need for a kind of gas detecting system of micromation at present.
Invention content
In view of this, the application provides a kind of gas detecting system, it is advantageously implemented micromation and easily carries out gas inspection It surveys.
The application provides a kind of gas detecting system, including:
Sample feeding mouth 101;
Quantity tube 103 is connected to the sample feeding mouth by gas circuit pipe;For carrying out sample amounts;
Carrier gas subsystem is connect with the entrance of the quantity tube 103, for by quantify after sample be loaded into it is described fixed The entrance of the thermal desorption unit 116 of the outlet connection of buret 103;Wherein, the thermal desorption unit 116 be used for sample into Promoting the circulation of qi and enrichment;
Chromatographic column 105 is connect with the outlet of thermal desorption unit 116, for the thermal desorption unit 116 gasification and Gas after enrichment is detached;
Bulk acoustic resonance device 109 is connect with the outlet of the chromatographic column 105, for detection to be identified to gas.
By upper, the gas detecting system of the application carries out gas separation by chromatographic column and passes through bulk acoustic wave resonator The recognition detection for carrying out gas easily to gas is detected with realizing, and the application also sets up quantity tube, can be to sample introduction Sample shunted, excessively block gas circuit pipe and chromatographic column to avoid sample.
Preferably, the system also includes:
Two six-way valves 104 have the first to the 6th port;
The first end implication of two six-way valves 104 is connected to the sample feeding mouth 101, second end implication is connected to Shunting outlet 112, third and the 6th port qi leel are not connected to the quantity tube outlet end and arrival end gas, the 4th port gas connects Pass to the thermal desorption unit 103, fifth port gas is connected to the carrier gas subsystem;
The state that two six-way valves 104 described in the stage are quantified in sample input is:The first, six ports, second and third port, It is logical that conductance is distinguished in fourth, fifth port;The state of two six-way valves 104 described in the separation detection stage is:First and second port, Three, four ports, the five, the six ports difference conductance are logical.
By upper, by the way that six-way valve is arranged, in its different state, the connection of different structures may be implemented, for example, on The connection of the first state stated, injection port, quantity tube and shunting outlet, so as to realize the sample introduction of sample and quantify;On Second of the state stated, carrier gas subsystem, quantity tube, thermal desorption unit connection, so that gas enters thermal desorption coupon Member carries out gasification enrichment.
The application also provides a kind of gas detecting system, including:
Sample feeding mouth 501;
Two-position three-way valve 502;Wherein, the import of the two-position three-way valve is connect with the sample feeding mouth;
Carrier gas subsystem 503, the outlet with the two-position three-way valve connect;
Thermal desorption unit 504, entrance are connect with the carrier gas subsystem;
Chromatographic column 505, entrance are connect with the outlet of the thermal desorption unit;
Bulk acoustic resonance device 506 is connect with the outlet of the chromatographic column.
By upper, the gas detecting system of the application carries out gas separation by chromatographic column and passes through bulk acoustic wave resonator The recognition detection for carrying out gas easily to gas is detected with realizing.
Preferably, the bulk acoustic resonance device includes:
Support plate 95 is respectively provided with air inlet cavity 9521 and outlet cavity 9522, air inlet with 95 tow sides of support plate Cavity 9521 and outlet cavity 9522 are respectively arranged with air inlet 951 and gas outlet 956 far from 95 one end of support plate;Support plate 95 It is upper that there are several through-holes 954 to be connected to two cavity;
It is provided with bulk acoustic wave resonator array 953 in support plate 95 in air inlet cavity 951.
By upper, above-mentioned cavity is set, is conducive to the contact for increasing gas and the bulk acoustic wave resonator, is conducive to better Carry out gas detection.The support plate is set, is conducive to resonator being arranged in an array manner, in the support plate It is provided with venthole, is conducive to passing through for gas.
Preferably, it in the bulk acoustic wave resonator array, is modified on different bulk acoustic wave resonators different with absorption The polymer of the tested gas of type.
By upper, by being modified with different polymer to different bulk acoustic wave resonators, be conducive to not dividing in chromatographic column From mixed gas in different gases recognition detection.
Preferably, the carrier gas subsystem includes:
Nitrogen cylinder 106, pressure-control valve and the pressure gauge 107 and current meter 108 of gas connection successively.
By upper, the pressure that can control the carrier gas of the output of nitrogen cylinder 6 by the way that pressure-control valve and pressure gauge is arranged, by setting The flow velocity of carrier gas can be controlled by setting current meter.
Preferably, the system also includes:
It is connect the signal amplifier 113 that the signal for outputting it is amplified with the bulk acoustic resonance device 109, The analysis being connect with its signal and display device 114.
By upper, the data-signal that the signal amplifier detects bulk acoustic resonance device 109 is set and is amplified;If Analysis and display device are set, data are analyzed and are shown.
Preferably, the system also includes:
The photoionization detector 111 being connected to 956 gas of gas outlet of bulk acoustic resonance device 109.
Preferably, the system further includes:
Temperature control and the digital display 110 of temperature control are carried out to 105 place environment of chromatographic column.
By upper, the temperature control and digital display are set, temperature can be detected by control, preferably to realize to gas Detection.
Preferably, sample introduction is provided in the gas circuit that the sample feeding mouth 101 is connect with two 104 first ports of six-way valve Pump.
By upper, by the way that sampling pump is arranged, be conducive to the sample introduction for preferably carrying out sample.
In conclusion a kind of gas detecting system provided by the present application, can easily realize the separation to mixed gas With detection.Whole system has a micromation, simplicity, and recognition efficiency is high and and the features such as semiconductor technology compatibility.And the application Bulk acoustic resonance device may be arranged as the bulk acoustic wave resonator of array type, be modified on different bulk acoustic wave resonators Have the function of adsorbing the polymer of different types of tested gas, so as to realize to traditional single gas chromatographic column The qualitative, quantitative recognition detection of the binary mixture of the peak position overlapping of None- identified.
Description of the drawings
Fig. 1 is the structural schematic diagram of gas detecting system provided by the embodiments of the present application;
Fig. 2, which is surface modification provided by the embodiments of the present application, has the bulk acoustic wave resonator of different polymer to carry out gas The demonstration schematic diagram of identification;
Fig. 3 is showing for the bulk acoustic wave resonator response variation provided by the embodiments of the present application in the case where changing corresponding chromatographic condition It is intended to;
Fig. 4 is the structural schematic diagram of the cavity provided by the embodiments of the present application being set to except the bulk acoustic wave resonator;
Fig. 5 is the structural schematic diagram of gas detecting system provided by the embodiments of the present application.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained belong to what the present invention protected Range.
Embodiment one
As shown in Figure 1 be a kind of gas detecting system provided by the present application, for detect volatile organic compounds (for example, Existing alkane in liquid form under room temperature;Aromatic compound related with environmental pollution;The alcohol contained in characteristics of contaminated respiratory droplets gas Class and aldehydes;The fragrance that fruit, crops distribute in different stages of growth;Gas marker of some major diseases etc.).Specifically Including:
It is sequentially connected in series the sample feeding mouth 101 of gas connection, the first end of 102, two six-way valves 104 of sampling pump by pipeline Mouth (being the ports A as shown in the figure).
The second port (being the ports B as shown in the figure) of two six-way valves 104 is connected to shunting outlet 12.
The third port (as shown in the figure is C-terminal mouth) of two six-way valves 104, the 6th port (as shown in the figure is the ports F) point Outlet end and the arrival end of quantity tube 103 are not connected to by pipeline gas.
Nitrogen cylinder 106, pressure-control valve and pressure gauge 107, the current meter 108, two of gas connection are sequentially connected in series by pipeline The fifth port (being the ports E as shown in the figure) of position six-way valve 104.
The 4th port (being the ports D as shown in the figure) that two six-way valves 104 of gas connection are sequentially connected in series by pipeline is used for Thermal desorption unit 116, the chromatographic column 105 for being detached under test gas, the bulk acoustic wave for being gasified to sample and being enriched with are humorous Shake device 109, photoionization detector 111.And
What the signal successively for carrying out signal acquisition to bulk acoustic resonance device 109 connected:Time switch 115, by institute State signal amplifier 113, analysis and display device 114 that the signal of the output of bulk acoustic resonance device 109 is amplified.Described point Analysis and display device 114 can be connected with the microcontroller of display or be connected with aobvious for carrying out data analysis and display The host computer of display screen or other can be used for the device of data analysis and display.The time switch 115 for control according to The time of setting is detected gas.
Temperature control and the digital display 110 that temperature control is carried out to 105 place environment of chromatographic column, by the chromatographic column 105 temperature carries out control and is able to preferably realize the separation to gas.It is provided with optimal when 90 DEG C of temperature.
Wherein, two of above-mentioned two six-way valves 4 are respectively:First state:The ports A-F, the ports C-B, the ports D-E difference Conducting;Second state:The ports A-B, the ports C-D, the ports E-F are respectively turned on.To:
Two six-way valves 104 in the first state when:Realize 102, two sample feeding mouth 101, sampling pump six-way valves 104 The ports the A ports-F-ports quantity tube 103-C port-B-shunting outlet 112 successively gas be connected to.To realize the sample introduction of sample And shunting is quantitative.Wherein, the time of holding under this state is 2 minutes best.
Two six-way valves 104 in the second condition when:The ports the E ports-F-of-two six-way valves of carrier gas subsystem 4 are quantitative The ports pipe 103-C port-D-thermal desorption unit 116- chromatographic column 105- bulk acoustic resonance device 109- photoionization detectors 111 gas connections successively.To realize separation and detection to gas.
Illustrate the application to be clearer, describes in detail below to above-mentioned section components:
Quantity tube 103 retains proper amount of sample, extra sample is exported by shunting for being quantified to sample 112 discharges.Split ratio is 1:It is best when 10.
The nitrogen cylinder 106, pressure-control valve and pressure gauge 107 and current meter 108 constitute carrier gas subsystem.Nitrogen cylinder There is high pressure nitrogen (can in liquid form be stored in nitrogen cylinder 106), the nitrogen of release is as carrier gas in 106;Pass through Pressure-control valve and pressure gauge 7, which is arranged, can control the pressure of output carrier gas, preferably be set as 15psi pressure;Pass through setting Current meter 108 can control the flow velocity of output carrier gas, preferably be set as 5ml/min flow velocitys.
The photoionization detector 111 is used to calibrate the concentration of under test gas.For example, the sample of different sample sizes is by sample Product injection port 101 enter, and by the impetus of carrier gas stream arrive at photoionization detector 111 after, resonance can be obtained Device responds the linear relationship curve with gas concentration (being measured by photoionization detector), to realize to detection gas concentration Calibration.
Gas after the bulk acoustic resonance device 109 is used to detach chromatographic column 105 is further detected, to obtain Data detection signal.Wherein, in order to be conducive to increase the contact of gas and the bulk acoustic wave resonator, be conducive to preferably carry out Gas detection, as shown in figure 4,109 structure of bulk acoustic resonance device is as follows comprising:
Support plate 95 is respectively provided with air inlet cavity 9521 and outlet cavity 9522, air inlet with 95 tow sides of support plate Cavity 9521 and outlet cavity 9522 are respectively arranged with air inlet 951 and gas outlet 956 far from 95 one end of support plate.And support plate On 95 there are several through-holes 954 to be connected to two cavity.Wherein, two cavity can be coaxially with the tubular cavity of diameter, and Vertical support plate 95 is arranged.
It is provided with bulk acoustic wave resonator array 953 in support plate 95 in air inlet cavity 9521, wherein different body sound The polymer for having the function of adsorbing different types of tested gas is modified on wave resonator, to be advantageously implemented to separation Column has not been able to the detection of the mixed gas of separation.Also, the set of frequency of the bulk acoustic resonance device detects when being 1.21GHz Effect is best.
Wherein, the case where modification in order to detect bulk acoustic wave resonator, a characterization device can be also set, including:Fourier turns Infrared spectrum analysis instrument is changed, for characterizing whether polymer is successfully modified on bulk acoustic wave resonator surface;And it is former Sub- force microscope, the form and film thickness of the thin polymer film for characterizing bulk acoustic wave resonator surface modification.
Wherein, the testing principle of bulk acoustic resonance device is:When the under test gas warp after 105 chromatographic isolation of chromatographic column Gas circuit arrives at the resonator sensitive zones surface of bulk acoustic resonance device 109, and the resonant frequency of device will be caused to have to a certain degree Decline, decline degree and gas concentration be positively correlated (quantitative judge), the time flowed through according to gas it is different to gas into Row qualitatively identification, to realize the further detection to volatile organic compounds.
As shown in figure 5, for another gas detecting system provided by the present application, including:
Sample feeding mouth 501;
Two-position three-way valve 502;Wherein, the import of the two-position three-way valve is connect with the sample feeding mouth;
Carrier gas subsystem 503, the outlet with the two-position three-way valve connect;
Thermal desorption unit 504, entrance are connect with the carrier gas subsystem;
Chromatographic column 505, entrance are connect with the outlet of the thermal desorption unit;
Bulk acoustic resonance device 506, is arranged a cavity outside bulk acoustic resonance device, the air inlet of the cavity with it is described The outlet of chromatographic column connects.
Photoionization detector 507 is connect with the gas outlet of abovementioned cavity.
The sample introduction of the gas detecting system is that shunting sample introduction does not remove two compared with gas detecting system above-mentioned Except triple valve, the structure of other all parts and effect are identical as gas detecting system above-mentioned, therefore, no longer superfluous herein It states.
In order to better illustrate the technical solution of the application, now by the operation principle explanation of the gas detecting system of the application As follows (by taking the gas detecting system of Fig. 1 as an example):
Two six-way valves 104 are rotated (rotating clockwise 60 degree) and are under first state, then will by the first stage Sample to be tested (for realize higher efficiency gas separation and detection, will under room temperature for liquid each 105 microlitres of test agent successively Mixing is used as sample to be tested) carry out sample introduction.Specifically, sample to be tested is at the uniform velocity squeezed into sample feeding using head space micro-sampling pin Mouth 101, sample to be tested enter quantity tube 103 under the driving of sampling pump 102, and sample to be tested is gasified simultaneously in quantity tube 103 It is enriched with, which is 2 minutes.
Two six-way valves 104 are rotated (60 degree of convolution counterclockwise) and are under the second state so that is fixed by second stage Buret 103 is communicated between carrier gas subsystem and the gas circuit of chromatographic column 5.Under the driving of the carrier gas of carrier gas subsystem output, Sample of the quantity tube 103 after quantitative is sent into thermal desorption unit and carries out gasification enrichment, the gas after gasification enrichment enters chromatography The separation of gas is carried out in column 105.This time is set as 10 minutes.
The under test gas exported by chromatographic column 105 continues to be loaded into bulk acoustic resonance device 109 by carrier gas, humorous by bulk acoustic wave The device 109 that shakes is detected the variation of its resonant frequency, and is amplified the resonant frequency signal of detection by signal amplifier 113 After be supplied to analysis and display device 114 to carry out data analysis and display.
Wherein, for some mixed gas, (obtained peak position overlapping), the present invention when being difficult to chromatographic isolation by chromatographic column It then may be implemented further to detect.It is specifically described below:
The present invention by modifying different polymer on the different bulk acoustic wave resonators in bulk acoustic wave resonator array, To realize to the not discretely identification of the different gases in mixed gas after chromatographic column 105.Specifically, for example, in order to Gas detach, different mixing proportion 1,2 is difficult to two kinds of chromatographic columns and carries out qualitative and quantitative identification, by the body sound in array Wave resonator modifies polymer A and polymer B respectively, wherein sound of the bulk acoustic wave resonator of polymer A modifications to gas 1 Bigger, the bulk acoustic wave resonator of polymer B modification is answered just can the response bigger of gas 2 based on this orthogonality Realize the differentiation of mixed gas.
By upper, in above-mentioned second stage, when mixing under test gas after the separation of gas chromatographic column 5, not by complete area Timesharing when chromatographic isolation complete by chromatographic column (i.e. not) then can be through after the mixing under test gas arrives at bulk acoustic resonance device 109 Bulk acoustic wave resonator array makees further recognition detection.There is the bulk acoustic wave of different polymer humorous as shown in Fig. 2, being surface modification The schematic diagram that gas is identified in the device that shakes, wherein 21 indicate not obtaining the mixed gas of separation, 22 expressions are modified with different The bulk acoustic wave resonator array of polymer, 23 indicate the result of detection.
It is worth noting that, although bulk acoustic wave resonator can serve as gas-chromatography as highly sensitive mass sensor The detector of instrument, but it when chromatographic condition changes, the stability for responding variation still needs to prove.Therefore, the application also sets this Following experiment is set.The application by change the sample injection volume of gas chromatograph in the gas analysis system, gas circuit flow velocity with And chromatogram column temperature, while the variation for monitoring the resonant frequency of bulk acoustic wave resonator is film modified and gas absorption to obtain Information faces color according under the detection device of example one, sample to be tested and the chromatographic condition that orderly changes to bulk acoustic wave resonator Response variation when spectral condition changes is monitored, to assess resonator as the adaptability of gas chromatography detector.Such as Fig. 3 institutes Show, the testing result of response variation when changing in face of chromatographic condition for bulk acoustic wave resonator.Wherein, a is to work as sample injection volume Asynchronously correspond to the testing result obtained;The testing result obtained is corresponded to when b is gas circuit flow velocity difference;C is the column when chromatographic column The testing result obtained is corresponded to when warm different.Concrete analysis is as follows:When linearly increasing sample injection volume in an experiment, find by The response signal that bulk acoustic wave resonator measures is also linearly increasing therewith;When sequence increases gas circuit flow velocity, it is tested the reservation of gas Time can reduce successively, this is because after flow velocity increases, it is tested that under test gas can quickly arrive at bulk acoustic resonance device surface It measures;When gradually increasing post case temperature, it will also be seen that signal spectrogram is shunk to negative direction of the x-axis, i.e., the guarantor of tested gas The time is stayed to reduce, this is because the increase of post case temperature, can lead to distribution coefficient of the under test gas between gas phase and stationary phase Reduce, therefore tested gas flows faster in gas circuit, retention time reduces.The above rule is examined with conventional gas-phase chromatograph Surveying device, the rule that response changes is identical, and therefore, bulk acoustic wave resonator is as gas chromatography detector as chromatographic condition changes Adaptability is good.It can be used as the detector of gas chromatography system.
In conclusion a kind of gas detecting system provided by the present application, by using bulk acoustic resonance device and gas phase color The gas detection for being implemented in combination with micromation of spectrum column.Whole system has a micromation, simplicity, recognition efficiency it is high and with partly lead The features such as body technology is compatible with.The separation and detection of mixed gas had both may be implemented in this detecting system.And the bulk acoustic wave of the application When resonating device is set as the bulk acoustic wave resonator of array type, it can be modified on different bulk acoustic wave resonators with absorption not The polymer of the function of the tested gas of same type can not accomplish traditional single gas chromatographic column so as to realize The qualitative, quantitative recognition detection of the binary mixture of peak position overlapping.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.

Claims (10)

1. a kind of gas detecting system, which is characterized in that including:
Sample feeding mouth 101;
Quantity tube 103 is connected to the sample feeding mouth 101 by gas circuit pipe;For carrying out sample amounts;
Carrier gas subsystem is connect with the entrance of the quantity tube 103, for the sample after quantifying to be loaded into and the quantity tube The entrance of the thermal desorption unit 116 of 103 outlet connection;Wherein, the thermal desorption unit 116 is used for sample into promoting the circulation of qi Change and is enriched with;
Chromatographic column 105 is connect with the outlet of thermal desorption unit 116, for gasifying to the thermal desorption unit 116 and being enriched with Gas afterwards is detached;
Bulk acoustic resonance device 109 is connect with the outlet of the chromatographic column 105, for detection to be identified to gas.
2. system according to claim 1, which is characterized in that further include:
Two six-way valves 104 have the first to the 6th port;
The first end implication of two six-way valves 104 is connected to the sample feeding mouth 101, second end implication is connected to shunting It exports 112, third and the 6th port qi leel is not connected to the quantity tube outlet end and arrival end gas, the 4th port gas is connected to The thermal desorption unit 103, fifth port gas are connected to the carrier gas subsystem;
The state that two six-way valves 104 described in the stage are quantified in sample input is:The first, six ports, second and third port, the 4th, It is logical that conductance is distinguished in five ports;The state of two six-way valves 104 described in the separation detection stage is:First and second port, third and fourth Port, the five, the six ports difference conductance are logical.
3. a kind of gas detecting system, which is characterized in that including:
Sample feeding mouth 501;
Two-position three-way valve 502;Wherein, the import of the two-position three-way valve is connect with the sample feeding mouth;
Carrier gas subsystem 503, the outlet with the two-position three-way valve connect;
Thermal desorption unit 504, entrance are connect with the carrier gas subsystem;
Chromatographic column 505, entrance are connect with the outlet of the thermal desorption unit;
Bulk acoustic resonance device 506 is connect with the outlet of the chromatographic column.
4. according to claim 1-3 any one of them systems, which is characterized in that the bulk acoustic resonance device includes:
Support plate 95 is respectively provided with air inlet cavity 9521 and outlet cavity 9522, air inlet cavity with 95 tow sides of support plate 9521 and outlet cavity 9522 be respectively arranged with air inlet 951 and gas outlet 956 far from 95 one end of support plate;Have in support plate 95 There are several through-holes 954 to be connected to two cavity;
It is provided with bulk acoustic wave resonator array 953 in support plate 95 in air inlet cavity 951.
5. system according to claim 4, which is characterized in that in the bulk acoustic wave resonator array, different bulk acoustic waves It is modified on resonator with the polymer for adsorbing different types of tested gas.
6. according to claim 1-3 any one of them systems, which is characterized in that the carrier gas subsystem includes:
Nitrogen cylinder 106, pressure-control valve and the pressure gauge 107 and current meter 108 of gas connection successively.
7. according to claim 1-3 any one of them systems, which is characterized in that further include:
It is connect the signal amplifier 113 that the signal for outputting it is amplified with the bulk acoustic resonance device 109, with it The analysis of signal connection and display device 114.
8. according to claim 1-3 any one of them systems, which is characterized in that further include:
The photoionization detector 111 being connected to 956 gas of gas outlet of bulk acoustic resonance device 109.
9. according to claim 1-3 any one of them systems, which is characterized in that further include:
Temperature control and the digital display 110 of temperature control are carried out to 105 place environment of chromatographic column.
10. system according to claim 2, which is characterized in that the sample feeding mouth 101 and two six-way valves 104 It is provided with sampling pump in the gas circuit of Single port connection.
CN201810260550.5A 2018-03-27 2018-03-27 A kind of gas detecting system Pending CN108490092A (en)

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