CN108278641A - A kind of semiconductor microwave generator connection structure - Google Patents
A kind of semiconductor microwave generator connection structure Download PDFInfo
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- CN108278641A CN108278641A CN201711482345.5A CN201711482345A CN108278641A CN 108278641 A CN108278641 A CN 108278641A CN 201711482345 A CN201711482345 A CN 201711482345A CN 108278641 A CN108278641 A CN 108278641A
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- resonant cavity
- microwave generator
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 62
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 46
- 239000010453 quartz Substances 0.000 claims abstract description 44
- 230000008878 coupling Effects 0.000 claims abstract description 42
- 238000010168 coupling process Methods 0.000 claims abstract description 42
- 238000005859 coupling reaction Methods 0.000 claims abstract description 42
- 239000000498 cooling water Substances 0.000 claims abstract description 33
- 239000004020 conductor Substances 0.000 claims abstract description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910000831 Steel Inorganic materials 0.000 claims description 24
- 239000010959 steel Substances 0.000 claims description 24
- 230000002000 scavenging effect Effects 0.000 claims description 19
- 229910001220 stainless steel Inorganic materials 0.000 claims description 19
- 239000010935 stainless steel Substances 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 17
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 239000010949 copper Substances 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 16
- 239000012212 insulator Substances 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 10
- VMQPMGHYRISRHO-UHFFFAOYSA-N benzvalene Chemical group C1=CC2C3C1C32 VMQPMGHYRISRHO-UHFFFAOYSA-N 0.000 claims description 9
- 239000012495 reaction gas Substances 0.000 claims description 9
- 239000013589 supplement Substances 0.000 claims description 9
- 238000010926 purge Methods 0.000 claims description 8
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- 230000008859 change Effects 0.000 abstract description 5
- 206010019133 Hangover Diseases 0.000 abstract description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 abstract description 3
- 239000005864 Sulphur Substances 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 34
- 230000005540 biological transmission Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000010411 cooking Methods 0.000 description 8
- 238000013461 design Methods 0.000 description 7
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- 238000009413 insulation Methods 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
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- 238000006731 degradation reaction Methods 0.000 description 3
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- 230000008054 signal transmission Effects 0.000 description 3
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- 239000004642 Polyimide Substances 0.000 description 2
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- 239000005350 fused silica glass Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
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- 238000003199 nucleic acid amplification method Methods 0.000 description 2
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24C—DOMESTIC STOVES OR RANGES ; DETAILS OF DOMESTIC STOVES OR RANGES, OF GENERAL APPLICATION
- F24C7/00—Stoves or ranges heated by electric energy
- F24C7/06—Arrangement or mounting of electric heating elements
- F24C7/067—Arrangement or mounting of electric heating elements on ranges
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/6402—Aspects relating to the microwave cavity
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/72—Radiators or antennas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2206/00—Aspects relating to heating by electric, magnetic, or electromagnetic fields covered by group H05B6/00
- H05B2206/04—Heating using microwaves
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention discloses a kind of semiconductor microwave generator connection structures,Its structure includes resonant cavity,Cavity antenna,Waveguide,Antenna,Semiconductor microwave generator,Power interface,The present invention is that there is a pedestal at resonant cavity center compared with traditional resonant cavity,The thickness of coupling coil is big,Resonant cavity internal diameter is smaller,Coupling coil is designed using the cavity and concentric conductor provides the high plasma of stability,The signal-to-noise ratio of microwave is more than 2000,Show almost without the wave noise from microwave source,Substantially improve the tolerance that plasma changes operating condition,Improve the resonant frequency,Its internal quartz discharge tube is connected with cooling water outlet and inlet,Just there is very slight corrosion after having used 30d in discharge tube,The peak hangover degree in sulphur channel is also reduced,Therefore,Discharge tube need not be replaced often,It is monthly only needed to change when generally contiguous operation primary,Not only having realized not influences while equipment is run but also effectively improves service life.
Description
Technical field
The present invention is a kind of semiconductor microwave generator connection structure, belongs to household electrical appliance micro-wave oven field.
Background technology
Micro-wave oven is a kind of modernization cooking kitchen range with microwave heating of food, and microwave is a kind of electromagnetic wave.Micro-wave oven by
The part such as power supply, magnetron, control circuit and cooking cavity forms, and power supply provides about 4000 volts of high pressures, magnetron to magnetron
Under power supply excitation, microwave is continuously generated, using Wave guide system, is coupled in cooking cavity, near the entrance of cooking cavity,
There are one rotatable blenders, because blender is the metal of fan-shaped, have all directions to microwave after rotating
Reflection, so microwave energy can be evenly distributed in cooking cavity, to heat food, the power bracket one of micro-wave oven
As be 500~1000 watts, micro-wave oven is the cooking apparatus for absorbing microwave energy in microwave field using food and making conducting self-heating,
Microwave electric field is set up in microwave cavity in the microwave that micro-wave oven microwave generator generates, and certain measure is taken to keep this micro-
Wave electric field is evenly distributed as much as possible in furnace chamber, and food is put into the microwave electric field, by control centre control its cooking time and
Microwave electric field intensity with the development of technology, occurs replacing magnetic control using semiconductor to carry out various cooking process
Pipe generates the semiconductor microwave oven of microwave, uses semiconductor microwave generator to replace magnetron and generate to meet to cook and requires width
The microwave signal of degree, semiconductor microwave generator can be a kind of transistor, high-power, be electron tube, and microwave energy is by micro-
What wave producer generated, semiconductor microwave generator includes two parts of microwave tube and microwave tube power supply, wherein microwave tube power supply
The effect of (abbreviation power supply or microwave source) is that common AC energy is become direct current energy, is that item is created in the work of microwave tube
Part, microwave tube are the cores of microwave generator, and direct current energy is transformed into microwave energy by it can provide stable continuous wave microwave work(
Rate, for oil and foodstuffs, agricultural byproducts processing, pharmaceutical products, the vulcanization of rubber, ceramics, sintering, chemical products processing and high-tech
Etc. application fields.
For the prior art during carrying out microwave signal transmission, the design of conventional resonance chamber is in coupling coil and same spindle guide
The transmission plasma of line is excessively unstable so that the big resonant frequency of fluctuation noise of microwave source is relatively low, seriously affects equipment
Operation, when equipment usage time is long, the discharge tube of intra resonant cavity is easy to be corroded so that the service life of discharge tube reduces
20-30, therefore, the efficiency of semiconductor microwave generator also degradation causes use cost to increase.
Invention content
In view of the deficienciess of the prior art, it is an object of the present invention to provide a kind of semiconductor microwave generator connection structure,
To solve the prior art during carrying out microwave signal transmission, the design of conventional resonance chamber is in coupling coil and concentric conductor
Transmission plasma it is excessively unstable so that the big resonant frequency of fluctuation noise of microwave source is relatively low, seriously affect equipment fortune
Row, when equipment usage time is long, the discharge tube of intra resonant cavity is easy to be corroded so that the service life of discharge tube reduces
20-30, therefore, the efficiency of semiconductor microwave generator also degradation, the problem of causing use cost to increase.
To achieve the goals above, the present invention is to realize by the following technical solutions：A kind of semiconductor microwave generation
Device connection structure, structure include resonant cavity, cavity antenna, waveguide, antenna, semiconductor microwave generator, power interface,
One end of the waveguide is connected with resonant cavity by cavity antenna, the resonant cavity by equipped with hinge be mounted on microwave
It is fixedly connected in stove and using screw, the other end of the waveguide is equipped with semiconductor microwave generator, the resonant cavity day
Line is connect with antenna using signal by waveguide, and the power interface is welded on the lower end appearance of semiconductor microwave generator
Face, the semiconductor microwave generator is by energy follower, cooling fin, chassis, threaded hole, generator body, coupling ring, magnetic
Steel, fin, filament, draws cable, radiator, anode cavities, annular magnetic steel, fan-shaped copper cylinder composition at anode, and the energy is defeated
The front for going out device is welded with power interface, and bottom end and generator body, the chassis of the energy follower are integrated, institute
The both ends for stating chassis are respectively uniformly provided with more than two threaded holes, and the generator body is internally provided with more than two heat dissipations
Piece is matched with radiator, and the coupling ring is halved together with the inside of antenna and is connected with energy follower, the energy output
Device is internally provided with magnet steel, anode, fin, filament, and the magnet steel is mounted on the connection of coupling ring and energy follower upper port
Locate it to match with anode, the cooling fin is used with filament with the fin that the junction of radiator is installed and is electrically connected, described to draw
Go out the right end that cable nesting is fixed on energy follower, the coupling ring is mounted on the positive upper end of annular magnetic steel and is electrically connected with filament
It connects, the outer surface of the filament is equipped with anode cavities and is electrically connected with anode by fan-shaped copper cylinder, and the resonant cavity includes blowing
Scavenging outflux, supplement gas entrance, reaction gas entrance, stainless steel plate, fixator, sealing ring, cooling water inlet, resonant cavity master
Body, cooling water outlet, pedestal, resonant cavity flag, discharge pond, scavenging entrance, scavenging outlet, center conductor, coaxial insulator,
Coupling coil, mounting disc, O-ring, gasket, heat block, quartz discharge tube, gas connection, capillary column interface, quartz sleeve
Pipe, the purge stream outlet, supplement gas entrance, reaction gas entrance sequentially pass through in horizontal linear and are mounted on quartz in heat block
On discharge tube, the stainless steel plate is internally provided with gasket, and the heat block is mechanically connected by stainless steel plate and fixator
In the left end of resonant cavity body outer surface, fixator one end corresponding with stainless steel plate is through in resonance cavity main body
Portion is simultaneously interference fitted with sealing ring, and the inside of the resonance cavity main body is respectively equipped with cooling water inlet, cooling water outlet, pedestal,
The inside center of the resonant cavity is surrounded with quartz discharge tube and is connected with the quartz socket tube of cooling water outlet, the cooling water outlet
Outlet end be connected to discharge pond, the scavenging entrance is mutually communicated by discharging pond and scavenging outlet, and the quartz socket tube leads to
Overcoupling coil is electrically connected to cavity antenna with coaxial insulator by center conductor respectively and is matched with waveguide, the row
It puts pond, center conductor and coaxial insulator to be connected in mounting disc, the connection of the quartz discharge tube and quartz socket tube
Place is equipped with O-ring, and the quartz discharge tube is internally provided with gas connection and is mechanically connected with capillary column interface.
Further, the cavity antenna be internally provided with benzvalene form insulating layer, grounding shell, round loop electrode, inner wire,
Signal output, built-in sensors.
Further, the inside of the grounding shell by be equipped with benzvalene form insulating layer be mechanically connected inner wire, it is described in lead
The signal output that body is electrically connected by round loop electrode is connect with antenna using signal by waveguide, the grounding shell it is interior
Wall is equipped with built-in sensors.
Further, the antenna is connected with frequency regulating system, and the frequency regulating system is equipped with filter, amplification
Device, attenuator, isolator.
Further, the signal end of the filter is electrically connected to the signal end of amplifier and is electrically connected to by attenuator
Isolator.
Further, the cooling water inlet, cooling water outlet, the cooling system for discharging pond composition resonant cavity.
Further, the resonance cavity main body is that piece of stainless steel and tubular unit are combined into, and quartz socket tube is clipped in resonance
Between the two halves of chamber, flow is circulating.
Further, the quartz discharge tube is the polyimide coating of 1.0mm internal diameter * 1.25mm outer diameter * 42mm long
Fused quartz tube.
Further, the extraction cable by being equipped with core wire, core insulation, the first semiconductor layer, absolutely except interior successively
Edge layer, the second semiconductor layer, metal screen layer, yarn packet protective layer.
Further, the inner homogeneous installation of first semiconductor layer is there are three core wire and around triangle knot
Structure, is equipped with the first semiconductor layer between the core insulation and insulating layer, the outer surface of the insulating layer is fitted with the successively
Two semiconductor layers, metal screen layer, yarn packet protective layer.
Advantageous effect
A kind of semiconductor microwave generator connection structure of the present invention, traditional built-in Resonator design is outer by the present invention
Set formula, semiconductor microwave generator is connect by waveguide with resonant cavity, resonant cavity by equipped with cavity antenna and antenna
Realize that signal connection, resonant cavity are connected and fixed by hinge and micro-wave oven, the microwave transmission between resonant cavity and waveguide is logical
The same shaft member completion of 22mm long, 25 Ω are crossed, it is the diameter in a polytetrafluoroethylene (PTFE) sleeve for being pressed into a diameter of 9.3mm
For the copper rod of 5.3mm, the coupling coil 117 of resonant cavity 1 is connected in one end of copper pipe, and the other end connects cavity antenna, resonant cavity
Antenna 2 is the cylinder of a 30mm long * 25mm diameter, its one end is hemispherical and the other end is taper, and tapered end thereof is carved with
Screw thread is simultaneously spun in the same shaft member of copper rod, and waveguide is a rectangular hot pressing workpiece, inside dimension 95mm*45mm,
Wall thickness 3mm, when being worked, the space of the magnet steel that is equipped in semiconductor microwave generator between the anode and the cathode forms perseverance
The high-intensity magnetic field of fixed vertical direction, cathode, which is divided into when directly-heated type and indirect-heating are heated, can emit enough electronics, to maintain magnetic
Keyholed back plate electric current required when working, anode are used for receiving the electronics from cathode, and generally use electric conductivity, air-tightness are good
Oxygen-free copper be made, when the electronics of emission of cathode is accelerated by electric field force effect to anode flow, also by the magnetic of vertical direction
Field action, under the collective effect of the two power, electronics makees high speed rotation, while circumferentially rail around the central axes of cathode
Mark flies to anode, these electronics are transferred under the action of by waveguide in resonant cavity, and when resonant cavity can be vibrated, and shake
It swings frequency constantly to increase, when frequency reaches 2450MHz, just forms microwave and radio frequency delivery outlet is coupled to by antenna, be transferred to and add
In hot cell, the energy follower inside semiconductor microwave generator is generated microwave energy conveying in interacting space
To the device that goes of load, the effect of energy output device be it is lossless, no breakdown by microwave, ensure that the vacuum of pipe is close
Envelope, while also to accomplish convenient for being connected with external system, in its one coupling ring of placement, when the magnetic flux change across anchor ring
When, high frequency induction current will be generated on ring, to guide to high frequency power outside ring, coupling ring area is bigger, and coupling is stronger, defeated
Go out antenna to be connected on anode vanes by pole shoe hole, antenna is generally done into strips or pole is alternatively cone, entire antenna
It is sealed by output window, output window is often made of the glass of low loss characteristic or ceramics, it is not necessary to ensure that microwave energy is loss-free
By often being reduced with forced air cooling since dielectric loss is produced with the output window with good vacuum-tightness, high power tube
Raw heat, interference-free in transmission process in order to make, the built-in sensors being equipped with inside it avoid microwave signal from benzvalene form
Insulator leaks, and then improves the anti-interference of the cavity antenna, improve efficiency of transmission, by equipped with resonant cavity with
Semiconductor microwave generator is designed as external, between be attached by waveguide, and resonant cavity is directly solid by hinge
It is scheduled on the inside of micro-wave oven, which is curved cavity, is that there is a pedestal at resonant cavity center compared with traditional resonant cavity,
The thickness of coupling coil is big, and resonant cavity internal diameter is smaller, designs coupling coil using the cavity and concentric conductor provides stability
The signal-to-noise ratio of high plasma, microwave is more than 2000, shows, almost without the wave noise from microwave source, to substantially improve
The tolerance that plasma changes operating condition, improves the resonant frequency, and internal quartz discharge tube is passed in and out with cooling water
Mouth is connected, and very slight corrosion just occurs after having used 30d in discharge tube, and the peak hangover degree in sulphur channel is also reduced, therefore,
Discharge tube need not be replaced often, and when generally contiguous operation monthly only needs to change primary, and both having realized not influences the same of equipment operation
When again effective improve service life.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon：
Fig. 1 is a kind of structural schematic diagram of semiconductor microwave generator connection structure of the present invention.
Fig. 2 is the surface structure schematic diagram of semiconductor microwave generator of the present invention.
Fig. 3 is the internal view of semiconductor microwave generator of the present invention.
Fig. 4 is the structural schematic diagram of anode of the present invention and filament installation.
Fig. 5 is the internal cross section figure of resonant cavity of the present invention.
Fig. 6 is the mirror-image structure schematic diagram of Fig. 2 of the present invention.
Fig. 7 is the sectional view of cavity antenna of the present invention.
Fig. 8 is the operation principle circuit diagram that semiconductor microwave generator of the present invention is connect with micro-wave oven.
Fig. 9 is the frequency regulating system flow diagram of inventive antenna.
Figure 10 is the internal structure schematic diagram that the present invention draws cable.
In figure：Resonant cavity -1, cavity antenna -2, waveguide -3, antenna -4, semiconductor microwave generator -5, power supply connect
Mouthfuls -6, energy follower -501, cooling fin -502, chassis -503, threaded hole -504, generator body -505, coupling ring -506,
Magnet steel -507, fin -509, filament -5010, draws cable -5011, radiator -5012, anode cavities -5013, ring at anode -508
Shape magnet steel -5014, fan-shaped copper cylinder -5015, purge stream outlet -101, supplement gas entrance -102, reaction gas entrance -103,
Stainless steel plate -104, fixator -105, sealing ring -106, cooling water inlet -107, resonance cavity main body -108, cooling water outlet -
109, pedestal -110, resonant cavity flag -111, discharge pond -112, scavenging entrance -113, scavenging outlet -114, center conductor -
115, coaxial insulator -116, coupling coil -117, mounting disc -118, O-ring -119, gasket -120, heat block -121, stone
English discharge tube -122, gas connection -123, capillary column interface -124, quartz socket tube -125, benzvalene form insulating layer -201, ground connection are outer
Shell -202, round loop electrode -203, inner wire -204, signal output -205, built-in sensors -206, filter -401, amplification
Device -402, attenuator -403, isolator -404, core wire -50111, core insulation -50112, the first semiconductor layer -50113,
Insulating layer -50114, the second semiconductor layer -50115, metal screen layer -50116, yarn packet protective layer -50117.
Specific implementation mode
To make the technical means, the creative features, the aims and the efficiencies achieved by the present invention be easy to understand, with reference to
Specific implementation mode, the present invention is further explained.
Embodiment 1
- Fig. 9 is please referred to Fig.1, the present invention provides a kind of semiconductor microwave generator connection structure, and structure includes resonant cavity
1, cavity antenna 2, waveguide 3, antenna 4, semiconductor microwave generator 5, power interface 6, one end of the waveguide 3 pass through
Cavity antenna 2 is connected with resonant cavity 1, the resonant cavity 1 by equipped with hinge be mounted in micro-wave oven and using screw it is solid
Fixed connection, the other end of the waveguide 3 are equipped with semiconductor microwave generator 5, and the cavity antenna 2 passes through waveguide 3
It is connect using signal with antenna 4, the power interface 6 is welded on the lower end outer surface of semiconductor microwave generator 5, described partly to lead
Body microwave generator 5 is by energy follower 501, cooling fin 502, chassis 503, threaded hole 504, generator body 505, coupling ring
506, magnet steel 507, anode 508, fin 509, filament 5010, extraction cable 5011, radiator 5012, anode cavities 5013, annular
Magnet steel 5014, fan-shaped copper cylinder 5015 form, and the front of the energy follower 501 is welded with power interface 6, the energy
The bottom end of follower 501 is integrated with generator body 505, chassis 503, and the both ends on the chassis 503 are each uniformly to be set
There are two above threaded hole 504, the generator body 505 is internally provided with more than two cooling fins 502 and radiator
5012 match, and the inside of the coupling ring 506 and antenna 4 is halved together and is connected with energy follower 501, the energy output
Device 501 is internally provided with magnet steel 507, anode 508, fin 509, filament 5010, the magnet steel 507 be mounted on coupling ring 506 with
It is matched with anode 508 for the junction of 501 upper port of energy follower, the connection of the cooling fin 502 and radiator 5012
Locate the fin 509 installed with filament 5010 using being electrically connected, extraction 5011 nesting of cable is fixed on energy follower 501
Right end, the coupling ring 506 are mounted on the positive upper end of annular magnetic steel 5014 and are electrically connected with filament 5010, the filament 5010
Outer surface is equipped with anode cavities 5013 and is electrically connected with anode 508 by fan-shaped copper cylinder 5015, and the resonant cavity 1 includes purging
Air stream outlet 101, supplement gas entrance 102, reaction gas entrance 103, stainless steel plate 104, fixator 105, sealing ring 106, cooling
Water inlet 107, resonance cavity main body 108, cooling water outlet 109, pedestal 110, resonant cavity flag 111, discharge pond 112, scavenging
Entrance 113, scavenging outlet 114, center conductor 115, coaxial insulator 116, coupling coil 117, mounting disc 118, O-ring 119,
Gasket 120, heat block 121, quartz discharge tube 122, gas connection 123, capillary column interface 124, quartz socket tube 125, institute
State purge stream outlet 101, supplement gas entrance 102, reaction gas entrance 103 are sequentially passed through in horizontal linear in the peace of heat block 121
On quartz discharge tube 122, the stainless steel plate 104 is internally provided with gasket 120, and the heat block 121 is by stainless
Steel plate 104 is mechanically connected to the left end of 108 outer surface of resonance cavity main body, the fixator 105 and stainless steel plate with fixator 105
104 corresponding one end are interference fitted through the inside of resonance cavity main body 108 and with sealing ring 106, the resonance cavity main body
108 inside is respectively equipped with cooling water inlet 107, cooling water outlet 109, pedestal 110, the inside center ring of the resonant cavity 1
It is wound with quartz discharge tube 122 and is connected with the quartz socket tube 125 of cooling water outlet 109, the outlet end of the cooling water outlet 109 connects
It is connected to discharge pond 112, the scavenging entrance 113 is mutually communicated by discharging pond 112 with scavenging outlet 114, the quartz socket tube
125 are electrically connected to cavity antenna 2 and waveguide by center conductor 115 and coaxial insulator 116 respectively by coupling coil 117
Pipe 3 matches, and the discharge pond 112, center conductor 115 are connected with coaxial insulator 116 in mounting disc 118, institute
It states quartz discharge tube 122 and the junction of quartz socket tube 125 is equipped with O-ring 119, the quartz discharge tube 122 is internally provided with
Gas connection 123 is simultaneously mechanically connected with capillary column interface 124, and the cavity antenna 2 is internally provided with benzvalene form insulating layer
201, grounding shell 202, round loop electrode 203, inner wire 204, signal output 205, built-in sensors 206, outside the ground connection
The inside of shell 202 is mechanically connected inner wire 204 by being equipped with benzvalene form insulating layer 201, and the inner wire 204 passes through round loop electrode
The signal output 205 of 203 electrical connections is connect with antenna 4 using signal by waveguide 3, the inner wall of the grounding shell 202
Built-in sensors 206 are installed, the antenna 4 is connected with frequency regulating system, and the frequency regulating system is equipped with filter
401, amplifier 402, attenuator 403, isolator 404, the signal end of the filter 401 are electrically connected to the letter of amplifier 402
It number holds and is electrically connected to isolator 403 by attenuator 404, the cooling water inlet 107, cooling water outlet 109, discharge pond
112 constitute the cooling system of resonant cavity, and the resonance cavity main body 108 is that piece of stainless steel and tubular unit are combined into, quartz sleeve
Pipe 125 is clipped between the two halves of resonant cavity, and flow is circulating, and the quartz discharge tube 122 is outside 1.0mm internal diameter * 1.25mm
The fused quartz tube of the polyimide coating of diameter * 42mm long.
The present invention by traditional built-in Resonator design be external, semiconductor microwave generator 5 by waveguide 3 with
Resonant cavity 1 connects, resonant cavity 1 by equipped with cavity antenna 2 and antenna 4 realize that signal is connect, resonant cavity 1 by hinge and
Micro-wave oven is connected and fixed, and the microwave transmission between resonant cavity 1 and waveguide 3 is completed by the same shaft member of 22mm long, 25 Ω,
It is the copper rod of a diameter of 5.3mm in a polytetrafluoroethylene (PTFE) sleeve for being pressed into a diameter of 9.3mm, the coupling of resonant cavity 1
Coil 117 is connected in one end of copper pipe, and the other end connects cavity antenna 2, and cavity antenna 2 is a 30mm long * 25mm diameter
Cylinder, its one end is hemispherical and the other end is taper, and tapered end thereof is carved with screw thread and is spun in the same shaft member of copper rod, wave
Conduit 3 is a rectangular hot pressing workpiece, inside dimension 95mm*45mm, wall thickness 3mm, when being worked, semiconductor
The space of the magnet steel 507 being equipped in microwave generator 5 between the anode and the cathode forms the high-intensity magnetic field of constant vertical direction.It is cloudy
Pole, which is divided into when directly-heated type and indirect-heating are heated, can emit enough electronics, required electric current when maintaining magnetron to work.Sun
Pole is used for receiving the electronics from cathode, and the good oxygen-free copper of generally use electric conductivity, air-tightness is made, and works as emission of cathode
Electronics when being accelerated to anode flow by electric field force effect, also by the magnetic fields of vertical direction, in the common of the two power
Under effect, electronics makees high speed rotation around the central axes of cathode, while circumferentially anode is flown in track, these electronics are logical
It crosses under the action of waveguide 3 and is transferred in resonant cavity 1, when resonant cavity can be vibrated, and frequency of oscillation constantly increases, and works as frequency
When reaching 2450MHz, just forms microwave and radio frequency delivery outlet is coupled to by antenna, be transferred to heating interior, sent out in semiconductor microwave
Energy follower 501 inside raw device 5 is that generated microwave energy in interacting space is transported to the device that load is gone, energy
Amount output device effect be it is lossless, it is no breakdown by microwave, ensure the vacuum sealing of pipe, while also to accomplish to be convenient for
It is connected with external system, placing a coupling ring 506 at it will generate when across the magnetic flux change of anchor ring on ring
High frequency induction current, to guide to high frequency power outside ring, 506 area of coupling ring is bigger, and coupling is stronger, and output antenna 4 passes through pole
Boots hole is connected on 508 fin 509 of anode, and antenna 4 is generally done into strips or pole is alternatively cone, and entire antenna 4 is defeated
Exit window seals, and output window is often made of the glass of low loss characteristic or ceramics, it is not necessary to ensure that microwave energy is loss-free to pass through
It is often reduced due to caused by dielectric loss with forced air cooling with the output window with good vacuum-tightness, high power tube
Heat, interference-free in transmission process in order to make, the built-in sensors 206 being equipped with inside it avoid microwave signal exhausted from benzvalene form
Edge 201 leaks, and then improves the anti-interference of the cavity antenna 2, improves efficiency of transmission.
Embodiment 2
Please refer to Fig.1-Figure 10, the extraction cable 5011 by being equipped with core wire 50111, core insulation except interior successively
50112, the first semiconductor layer 50113, insulating layer 50114, the second semiconductor layer 50115, metal screen layer 50116, yarn packet are protected
Sheath 50117, the inner homogeneous installation of first semiconductor layer 50113 is there are three core wire 50111 and around triangle
Structure is equipped with the first semiconductor layer 50113, the insulating layer between the core insulation 50112 and insulating layer 50114
50114 outer surface is fitted with the second semiconductor layer 50115, metal screen layer 50116, yarn packet protective layer 50117 successively.
Core insulation 50112, the first semiconductor layer 50113, the insulating layer being equipped with by the way that cable 5011 will be drawn
50114, the second semiconductor layer 50115, metal screen layer 50116, yarn packet protective layer 50117 can effectively avoid equipment by ring around
The influence in border, insulating layer 50114 is interfered under the duplicate protection of core insulation 50112 in can effectively transmitting, anti-interference
Property it is strong, make its draw cable 5011 have transmission performance stabilization, the high advantage of reliability.
Anode 508 of the present invention is one of main composition of semiconductor microwave generator 5, it is constituted together with cathode
The space of electronics and high-frequency electromagnetic field interactions.Under the action of stationary magnetic field and steady electric field, electronics is complete in this space
Being converted at energy for task.The anode of magnetron except with as the anode of common diode collect electronics in addition to, also to high-frequency electrical
The frequency of oscillation in magnetic field plays conclusive effect.
Its structure and principle, which are all this technology personnel, can be learnt by technical manual or be known by routine experiment method,
Problems solved by the invention is the prior art during carrying out microwave signal transmission, and the design of conventional resonance chamber is in coupling line
Circle is excessively unstable with the transmission plasma of concentric conductor so that the big resonant frequency of fluctuation noise of microwave source is relatively low, sternly
Ghost image rings equipment operation, and when equipment usage time is long, the discharge tube of intra resonant cavity is easy to be corroded so that discharge tube
Service life reduces 20-30, and therefore, the efficiency of semiconductor microwave generator also degradation causes use cost to increase, the present invention
By being combined with each other for above-mentioned component, by equipped with resonant cavity be designed as external with semiconductor microwave generator, between
It is attached by waveguide, and resonant cavity is directly fixed on the inside of micro-wave oven by hinge, which is curved cavity,
It is that there is a pedestal at resonant cavity center compared with traditional resonant cavity, the thickness of coupling coil is big, and resonant cavity internal diameter is smaller, uses
The cavity designs coupling coil and concentric conductor provides the high plasma of stability, and the signal-to-noise ratio of microwave is more than 2000, table
It is bright to substantially improve the tolerance that plasma changes operating condition almost without the wave noise from microwave source, it improves
The resonant frequency, internal quartz discharge tube are connected with cooling water outlet and inlet, and discharge tube just occurs very after having used 30d
The peak hangover degree of slight corrosion, sulphur channel is also reduced, and therefore, discharge tube need not be replaced often, when generally contiguous operation
It monthly only needs to change once, not only having realized not influences while equipment is run but also effectively improve service life, described in detail below：
The semiconductor microwave generator 5 is by energy follower 501, cooling fin 502, chassis 503, threaded hole 504, generation
Device shell 505, coupling ring 506, magnet steel 507, anode 508, fin 509, filament 5010, draw cable 5011, radiator 5012,
Anode cavities 5013, annular magnetic steel 5014, fan-shaped copper cylinder 5015 form, and the front of the energy follower 501 is welded with electricity
Source interface 6, bottom end and generator body 505, the chassis 503 of the energy follower 501 are integrated, the chassis
503 both ends are respectively uniformly provided with more than two threaded holes 504, and being internally provided with for the generator body 505 is more than two
Cooling fin 502 is matched with radiator 5012, the inside of the coupling ring 506 and antenna 4 be halved together and with energy follower 501
Conducting, the energy follower 501 are internally provided with magnet steel 507, anode 508, fin 509, filament 5010, the magnet steel 507
Mounted on coupling ring 506 and the junction of 501 upper port of energy follower, it is matched with anode 508, the cooling fin 502 with
For the fin 509 of the junction installation of radiator 5012 with filament 5010 using being electrically connected, the extraction cable 5011 is nested fixed
In the right end of energy follower 501, the coupling ring 506 is mounted on the positive upper end of annular magnetic steel 5014 and is electrically connected with filament 5010
It connects, the outer surface of the filament 5010 is equipped with anode cavities 5013 and is electrically connected with anode 508 by fan-shaped copper cylinder 5015, institute
It includes purge stream outlet 101, supplement gas entrance 102, reaction gas entrance 103, stainless steel plate 104, fixator to state resonant cavity 1
105, sealing ring 106, cooling water inlet 107, resonance cavity main body 108, cooling water outlet 109, pedestal 110, resonant cavity flag
111, discharge pond 112, scavenging entrance 113, scavenging outlet 114, center conductor 115, coaxial insulator 116, coupling coil 117,
Mounting disc 118, O-ring 119, gasket 120, heat block 121, quartz discharge tube 122, gas connection 123, capillary column interface
124, quartz socket tube 125, purge stream outlet 101, supplement gas entrance 102, reaction gas entrance 103 in horizontal linear successively
It is mounted on quartz discharge tube 122 through heat block 121, the stainless steel plate 104 is internally provided with gasket 120, described
Heat block 121 is mechanically connected to the left end of 108 outer surface of resonance cavity main body by stainless steel plate 104 and fixator 105, described solid
The one end corresponding with stainless steel plate 104 of device 105 is determined through the inside of resonance cavity main body 108 and is matched with 106 interference of sealing ring
It closes, the inside of the resonance cavity main body 108 is respectively equipped with cooling water inlet 107, cooling water outlet 109, pedestal 110, described humorous
The inside center of chamber 1 of shaking is surrounded with and quartz discharge tube 122 and is connected with the quartz socket tube 125 of cooling water outlet 109, the cooling water
The outlet end of outlet 109 is connected to discharge pond 112, and the scavenging entrance 113 exports 114 mutually by discharging pond 112 and scavenging
Perforation, the quartz socket tube 125 are electrically connected to by center conductor 115 and coaxial insulator 116 respectively by coupling coil 117
Cavity antenna 2 is matched with waveguide 3, and the discharge pond 112, center conductor 115 are connected with coaxial insulator 116
In mounting disc 118, the quartz discharge tube 122 and the junction of quartz socket tube 125 are equipped with O-ring 119, the quartz discharge
Pipe 122 is internally provided with gas connection 123 and is mechanically connected with capillary column interface 124.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill
For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from the present invention spirit or
In the case of essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action
Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state
Bright restriction, it is intended that including all changes that come within the meaning and range of equivalency of the claims in the present invention
It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (5)
1. a kind of semiconductor microwave generator connection structure, structure includes resonant cavity (1), cavity antenna (2), waveguide
(3), one end of antenna (4), semiconductor microwave generator (5), power interface (6), the waveguide (3) passes through cavity antenna
(2) be connected with resonant cavity (1), the resonant cavity (1) by equipped with hinge be mounted in micro-wave oven and adopt the company of being screwed
It connects, the other end of the waveguide (3) is equipped with semiconductor microwave generator (5), and the cavity antenna (2) passes through waveguide
(3) it is connect using signal with antenna (4), the power interface (6) is welded on the lower end appearance of semiconductor microwave generator (5)
Face, it is characterised in that：
The semiconductor microwave generator (5) is by energy follower (501), cooling fin (502), chassis (503), threaded hole
(504), generator body (505), coupling ring (506), magnet steel (507), anode (508), fin (509), filament (5010), draw
Go out cable (5011), radiator (5012), anode cavities (5013), annular magnetic steel (5014), fan-shaped copper cylinder (5015) composition,
The front of the energy follower (501) is welded with power interface (6), the bottom end of the energy follower (501) and generator
Shell (505), chassis (503) are integrated, and the both ends of the chassis (503) are respectively uniformly provided with more than two threaded holes
(504), the more than two cooling fins (502) that are internally provided with of the generator body (505) are matched with radiator (5012),
The inside of the coupling ring (506) and antenna (4) is halved together and is connected with energy follower (501), the energy follower
(501) be internally provided with magnet steel (507), anode (508), fin (509), filament (5010), the magnet steel (507) is mounted on coupling
It is matched with anode (508) for cyclization (506) and the junction of energy follower (501) upper port, the cooling fin (502) with
The fin (509) of the junction installation of radiator (5012) is used with filament (5010) to be electrically connected, the extraction cable (5011)
Nesting is fixed on the right end of energy follower (501), and the coupling ring (506) is mounted on the positive upper end of annular magnetic steel (5014) simultaneously
It is electrically connected with filament (5010), the outer surface of the filament (5010) is equipped with anode cavities (5013) and passes through fan-shaped copper cylinder
(5015) it is electrically connected with anode (508)；
The resonant cavity (1) includes purge stream outlet (101), supplement gas entrance (102), reaction gas entrance (103), stainless steel
Plate (104), fixator (105), sealing ring (106), cooling water inlet (107), resonance cavity main body (108), cooling water outlet
(109), pedestal (110), resonant cavity flag (111), discharge pond (112), scavenging entrance (113), scavenging outlet (114), in
Heart conductor (115), coaxial insulator (116), coupling coil (117), mounting disc (118), O-ring (119), gasket (120),
Heat block (121), quartz discharge tube (122), gas connection (123), capillary column interface (124), quartz socket tube (125), institute
State that purge stream outlet (101), supplement gas entrance (102), reaction gas entrance (103) sequentially passes through in horizontal linear in heat block
(121) it is mounted on quartz discharge tube (122), the stainless steel plate (104) is internally provided with gasket (120), the heating
Block (121) is mechanically connected to the left end of resonance cavity main body (108) outer surface, institute by stainless steel plate (104) and fixator (105)
Fixator (105) one end corresponding with stainless steel plate (104) is stated through the inside of resonance cavity main body (108) and and sealing ring
(106) it is interference fitted, the inside of the resonance cavity main body (108) is respectively equipped with cooling water inlet (107), cooling water outlet
(109), the inside center of pedestal (110), the resonant cavity (1) is surrounded with quartz discharge tube (122) and is connected with cooling water outlet
(109) outlet end of quartz socket tube (125), the cooling water outlet (109) is connected to discharge pond (112), and the scavenging enters
Mouth (113) is mutually communicated by discharging pond (112) and scavenging outlet (114), and the quartz socket tube (125) passes through coupling coil
(117) cavity antenna (2) and waveguide (3) phase are electrically connected to by center conductor (115) and coaxial insulator (116) respectively
Cooperation, the discharge pond (112), center conductor (115) and coaxial insulator (116) are connected in mounting disc (118),
The quartz discharge tube (122) and the junction of quartz socket tube (125) are equipped with O-ring (119), the quartz discharge tube (122)
Be internally provided with gas connection (123) and with capillary column interface (124) be mechanically connected.
2. a kind of semiconductor microwave generator connection structure according to claim 1, it is characterised in that：The resonant cavity day
Line (2) to be internally provided with benzvalene form insulating layer (201), grounding shell (202), round loop electrode (203), inner wire (204), signal defeated
Export (205), built-in sensors (206).
3. a kind of semiconductor microwave generator connection structure according to claim 2, it is characterised in that：The grounding shell
(202) inside is mechanically connected inner wire (204) by being equipped with benzvalene form insulating layer (201), and the inner wire (204) passes through annulus
The signal output (205) of electrode (203) electrical connection is connect with antenna (4) using signal by waveguide (3), outside the ground connection
The inner wall of shell (202) is equipped with built-in sensors (206).
4. a kind of semiconductor microwave generator connection structure according to claim 1, it is characterised in that：The antenna (4)
Be connected with frequency regulating system, the frequency regulating system be equipped with filter (401), amplifier (402), attenuator (403), every
From device (404).
5. a kind of semiconductor microwave generator connection structure according to claim 4, it is characterised in that：The filter
(401) signal end is electrically connected to the signal end of amplifier (402) and is electrically connected to isolator (403) by attenuator (404).
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