CN108225702B - A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics - Google Patents
A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics Download PDFInfo
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- CN108225702B CN108225702B CN201711355481.8A CN201711355481A CN108225702B CN 108225702 B CN108225702 B CN 108225702B CN 201711355481 A CN201711355481 A CN 201711355481A CN 108225702 B CN108225702 B CN 108225702B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/022—Vibration control arrangements, e.g. for generating random vibrations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of triple axle Piezoelectric Ceramics Excitation devices for the test of MEMS micro-structure dynamic characteristics, including sleeve, piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and elastic supporting member for supporting optical member and MEMS micro-structure；It is equipped with annular roof plate and bottom plate at sleeve both ends, micro-structure is located on top plate by elastic supporting member for supporting optical member；The uniformly distributed guiding axis between top plate and bottom plate, lower connection block are equipped with guiding support arm and are passed through by sleeve wall and covered on guiding axis, are respectively equipped with locking device on guiding support arm；Spherical groove is respectively equipped on upper coupling block and lower connection block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim pushes into sleeve lining by bulb plunger.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate simultaneously, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology fields, in particular to a kind of to be used for MEMS micro-structure dynamic characteristics
The triple axle Piezoelectric Ceramics Excitation device of test.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of three axis for the test of MEMS micro-structure dynamic characteristics
Formula Piezoelectric Ceramics Excitation device, the device can be more flexible to the different size of pretightning force of piezoelectric ceramics application is stacked, together
When keep pretightning force measured value obtained more accurate, compensation can be made to stack the tune of two working surface parallelism error of piezoelectric ceramics
Section process becomes more smooth and smooth, substantially reduces the shearing force stacked between each layer of piezoelectric ceramics, convenient for test MEMS
The dynamic characteristic parameter of micro-structure.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics, including sleeve, are covering
It is equipped in cylinder and stacks piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block,
Elastic supporting member for supporting optical member and MEMS micro-structure are equipped with above sleeve, it is characterized in that:
It is respectively equipped with annular roof plate and bottom plate in sleeve upper and lower end, the MEMS micro-structure is installed by elastic supporting member for supporting optical member
On annular roof plate；It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, along circle in sleeve wall
Circumferential direction, which is evenly equipped with, is evenly equipped with guiding support arm and every with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
A guiding support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis, and guiding axis is located on each guiding support arm
Place is respectively equipped with locking device, for lower connection block to be fixed on guiding axis；
Spherical groove is respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is less than two
The radius of curvature of spherical groove is simultaneously clamped between two spherical grooves, makes to form one between upper and lower coupling block by steel ball
Adjust gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member；
It is uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end is pushed into respectively along circle
Circumferential direction is evenly arranged in the rectangular recess of sleeve lining, flat for assisting mobile base compensation to stack two working surface of piezoelectric ceramics
The adjusting of row degree error.
As further preferred, the U-shaped gap is quite and mutually equidistant along circumference direction with rectangular recess quantity
Arranged for interval.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support chips are constituted, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of cylindrical tabletting, avoid
MEMS micro-structure is fallen off because colloid cracks.
As further preferred, the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three pillars.
As further preferred, the guiding axis is three.
As further preferred, the locking device is to be fixed by screws in lower connection block bottom surface and cover on guiding axis
Axis fixed ring, axis fixed ring side be equipped be open and be fixed on guiding axis by lock-screw.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
The beneficial effects of the present invention are:
1, due to being respectively equipped with spherical groove on the opposite face of upper coupling block and lower connection block, the radius of steel ball is less than two
The radius of curvature of a spherical groove is simultaneously clamped between two spherical grooves, then forms point contact between steel ball and upper coupling block,
Also point contact is formed between steel ball and lower connection block；When the parallelism error for needing compensation to stack two working surface of piezoelectric ceramics comes
When adjusting mobile base, upper coupling block can be rotated using the contact point with steel ball as center of rotation, and adjustment process is smooth, flat
It is sliding, be not in the problem of steel ball is stuck, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
2, due to being uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve lining；The parallel of two working surface of piezoelectric ceramics is stacked when needing to compensate
Error is spent upper coupling block can be realized not by the cooperation of spring and steel ball in bulb plunger when adjusting mobile base
Swing on equidirectional, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and each guiding support arm is respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through hand
Dynamic adjusting lower connection block drives upper coupling block mobile to realize, adjustment process is simple, flexible.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is that the present invention removes the top view after top cover.
Fig. 5 is the schematic perspective view of lower connection block.
Fig. 6 is the schematic perspective view of elastic supporting member for supporting optical member.
Fig. 7 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101. rectangular recess, 102.U type gap, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure,
5. micro-structure mounting plate, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets, 9. bulb plungers,
10. stack piezoelectric ceramics, 11. pressure sensors, 12. guiding axis, coupling block on 13., 1301. spherical grooves, 14. steel balls, 15.
Lower connection block, 1501. spherical grooves, 1502. guiding support arms, 16. axle sleeves, 17. axis fixed rings, 18. lock-screws.
Specific embodiment
As shown in FIG. 1 to FIG. 7, a kind of triple axle piezoelectricity for the test of MEMS micro-structure dynamic characteristics of the present invention
Ceramic exciting bank, including a cannulated sleeve 1, in sleeve 1 be equipped with stack piezoelectric ceramics 10, pressure sensor 11 and by
The mobile base that upper coupling block 13, steel ball 14 and lower connection block 15 are constituted is equipped with elastic supporting member for supporting optical member 6 and MEMS on sleeve 1
Micro-structure 4.
Pass through screw respectively with bottom surface on sleeve 1 and be fixed with annular roof plate 2 and bottom plate 3, the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is constituted in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of tabletting 601 avoids MEMS micro-structure 4 from falling off because of colloid cracking.Three supports of the elastic supporting member for supporting optical member 6
Piece 602 is fixed on above annular roof plate 2 by three pillars 7 using screw support, and on the same axis with sleeve 1.MEMS
Micro-structure 4 is cemented at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
The upper coupling block 13 and lower connection block 15 are cylindrical shape, in the opposite of upper coupling block 13 and lower connection block 15
Mutual corresponding spherical groove 1301 and spherical groove 1501 are respectively equipped on face at center, the radius of the steel ball 14 is less than two
The radius of curvature of a spherical groove is simultaneously clamped between spherical groove 1501 and spherical groove 1301, makes upper connection by steel ball 14
An adjustment gap is formed between block 13 and lower connection block 15, the size in the adjustment gap is 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
12, it is along the circumferential direction evenly equipped in sleeve wall and one-to-one three U-shaped gap 102 of guiding axis.Outside lower connection block 15
Edge circumference uniform distribution is there are three guiding support arm 1502 and each guiding support arm 1502 is passed through and led to by corresponding U-shaped gap 102 respectively
It crosses clearance fit to be sleeved on guiding axis 12, the through-hole through guiding axis is respectively equipped on each guiding support arm 1502 and logical
Axle sleeve 16 is installed in hole respectively.
It is located at guiding axis 12 on each guiding support arm 1502 and is respectively equipped with locking device, for consolidates lower connection block 15
It is scheduled on guiding axis 12.The locking device is to be fixed by screws in 15 bottom surface of lower connection block and cover the axis on guiding axis 12
Fixed ring 17 is equipped in 17 side of axis fixed ring and is open and is fixed on guiding axis 12 by lock-screw 18.
It is uniformly connected with bulb plunger 9 in upper 13 outer marginal circumference of coupling block, the bulb plunger 9 is three and passes through respectively
It is threaded in three mounting holes for being distributed in 13 outer rim of coupling block, the steel ball of 9 outer end of bulb plunger pushes into edge respectively
Circumferencial direction is evenly arranged in three rectangular recess 101 of 1 inner wall of sleeve, for assisting mobile base compensation to stack piezoelectric ceramics 10
The adjusting of two working surface parallelism errors.The U-shaped gap 102 is with 101 quantity of rectangular recess quite and along 1 circumference side of sleeve
It is arranged to mutual equidistant interval, the center of circle folded by the center line of each U-shaped gap 102 and adjacent 101 center line of rectangular recess
Angle is 60 degree.
When work, the lock-screw 18 in each axis fixed ring 17 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base as composed by upper coupling block 13, steel ball 14 and lower connection block 15 and applies pretightning force to piezoelectric ceramics 10 is stacked,
The preload force data measured by pressure sensor 11 is monitored simultaneously to screw each after the size of pretightning force reaches setting value
Lock-screw 18 in axis fixed ring 17, lower connection block 15 is fixed on guiding axis 12.Then, it is being stacked using external power supply
Apply pulse signal or swept-frequency signal between two electrodes of piezoelectric ceramics 10, is realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10
Excitation to MEMS micro-structure 4, while being rung using the vibration of the contactless vibration detecting device detection MEMS micro-structure 4 of external optical
It answers, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Finally, when completing the excitation to MEMS micro-structure 4
Afterwards, unclamping the lock-screw 18 in each axis fixed ring 17 unclamps axis fixed ring 17, manually adjusts lower connection block 15 to moving down
It is dynamic, then coupling block 13 is manually adjusted by U-shaped gap 102 and is moved down, make to stack 10 top installation set 8 of piezoelectric ceramics and bullet
Property supporting element 6 separates, and avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (8)
1. a kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics, including sleeve, in sleeve
Interior be equipped with stacks piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, is covering
Cylinder is equipped with elastic supporting member for supporting optical member and MEMS micro-structure above, it is characterized in that:
It is respectively equipped with annular roof plate and bottom plate in sleeve upper and lower end, the MEMS micro-structure is mounted on ring by elastic supporting member for supporting optical member
On shape top plate；It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is circumferentially square in sleeve wall
To being evenly equipped with, U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each lead correspondingly with guiding axis
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively to support arm, guiding axis is located on each guiding support arm and is punished
Not She You locking device, for lower connection block to be fixed on guiding axis；
Spherical groove, less than two spherical surfaces of radius of the steel ball are respectively equipped on upper coupling block and the opposite face of lower connection block
The radius of curvature of groove is simultaneously clamped between two spherical grooves, makes to form an adjustment between upper and lower coupling block by steel ball
Gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensor
Between elastic supporting member for supporting optical member；
It is uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end pushes into circumferentially side respectively
Into the rectangular recess for being evenly arranged on sleeve lining, for assisting mobile base compensation to stack the two working surface depth of parallelism of piezoelectric ceramics
The adjusting of error.
2. a kind of triple axle Piezoelectric Ceramics Excitation dress for the test of MEMS micro-structure dynamic characteristics according to claim 1
It sets, it is characterized in that: the U-shaped gap and rectangular recess quantity quite and along the mutual equidistant interval in circumference direction are arranged.
3. a kind of triple axle Piezoelectric Ceramics Excitation dress for the test of MEMS micro-structure dynamic characteristics according to claim 1
Set, it is characterized in that: the elastic supporting member for supporting optical member be by a cylindrical tabletting and circumference uniform distribution tabletting outer rim three support chips
It constitutes, the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, avoid MEMS micro-structure because colloid is opened
It splits and falls off.
4. a kind of triple axle Piezoelectric Ceramics Excitation dress for the test of MEMS micro-structure dynamic characteristics according to claim 3
It sets, it is characterized in that: the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three pillars.
5. a kind of triple axle piezoelectric ceramics for the test of MEMS micro-structure dynamic characteristics according to claim 1 or 2 swashs
Device is encouraged, it is characterized in that: the guiding axis is three.
6. a kind of triple axle Piezoelectric Ceramics Excitation dress for the test of MEMS micro-structure dynamic characteristics according to claim 5
It sets, it is characterized in that: the locking device is to be fixed by screws in lower connection block bottom surface and cover the axis fixed ring on guiding axis,
It is equipped in axis fixed ring side and is open and is fixed on guiding axis by lock-screw.
7. a kind of triple axle piezoelectric ceramics for the test of MEMS micro-structure dynamic characteristics described according to claim 1 or 3 or 4
Exciting bank, it is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set,
For avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and resilient support
The problem of part poor contact.
8. a kind of triple axle Piezoelectric Ceramics Excitation dress for the test of MEMS micro-structure dynamic characteristics according to claim 6
It sets, it is characterized in that: being respectively provided with the through-hole across guiding axis on each guiding support arm and being installed with respectively in through-hole
Axle sleeve.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711355481.8A CN108225702B (en) | 2017-12-16 | 2017-12-16 | A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics |
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| CN201711355481.8A CN108225702B (en) | 2017-12-16 | 2017-12-16 | A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics |
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| MEMS微构件动态特性测试的激励技术和方法;王晓东 等;《测试技术学报》;20080531;第22卷(第5期);第377-386页 |
| 基于压电陶瓷的MEMS测试用的多载荷加载台的研制;施阳和 等;《中国陶瓷》;20070831;第43卷(第8期);第34-35、13页 |
| 基于激波的MEMS微结构底座冲击激励方法研究;佘东生 等;《仪器仪表学报》;20150831;第36卷(第8期);第1892-1900页 |
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