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CN108225618A - Wide-temperature-zone high-precision temperature calibration device - Google Patents

Wide-temperature-zone high-precision temperature calibration device Download PDF

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Publication number
CN108225618A
CN108225618A CN201810306104.3A CN201810306104A CN108225618A CN 108225618 A CN108225618 A CN 108225618A CN 201810306104 A CN201810306104 A CN 201810306104A CN 108225618 A CN108225618 A CN 108225618A
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CN
China
Prior art keywords
temperature
warm area
caliberating device
thermometer
precision
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Pending
Application number
CN201810306104.3A
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Chinese (zh)
Inventor
高波
陈燕燕
张海洋
罗二仓
潘长钊
宋耀楠
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Technical Institute of Physics and Chemistry of CAS
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Technical Institute of Physics and Chemistry of CAS
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Application filed by Technical Institute of Physics and Chemistry of CAS filed Critical Technical Institute of Physics and Chemistry of CAS
Priority to CN201810306104.3A priority Critical patent/CN108225618A/en
Publication of CN108225618A publication Critical patent/CN108225618A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00Testing or calibrating of thermometers
    • G01K15/005Calibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)

Abstract

The invention relates to a high-precision temperature calibration device for a wide temperature area, which comprises: a thermal switch canister; a pressure chamber located inside the thermal switch canister; the refrigerator provides cold energy to reduce the internal temperature of the pressure chamber to a target temperature; the method is characterized in that: a resonant cavity is arranged in the pressure chamber, a plurality of cylindrical bosses with hollow bulges are arranged on the side surface of the resonant cavity, and a thermometer is arranged on the surface of the cylindrical bosses. The invention adopts an advanced constant-pressure gas refractive index temperature measurement method, can realize high-precision measurement of thermodynamic temperature in a wide temperature region of 5K-300K, especially in an extremely low temperature region of 5K-25K, and can finish calibration of a reference-grade thermometer and a standard-grade thermometer.

Description

A kind of width warm area high-precision temperature caliberating device
Technical field
The present invention relates to a kind of caliberating device, more particularly to a kind of wide warm area high-precision temperature caliberating device.
Background technology
Thermodynamic temperature is the most basic parameter in calorifics field, is one of seven base units of the International System of Units, macroscopically For weighing the cold and hot degree of object, the microcosmic upper severe degree for being used for characterizing object molecular thermalmotion.Thermometer extensively should For in front line science research, Scientific research equipment development, national defense safety guarantee and hi-tech development, passing through Cucumber property The rule varied with temperature measures, for example, common rhodium iron thermometer and cernox thermometers, room temperature to low temperature under low temperature The platinum resistance thermometer in area etc. depends on measurement of the resistance with temperature characterisitic relationship into trip temperature.To meet above-mentioned field development Needs, the accurate thermodynamic temperature that measures is particularly important.
Before actual use, it needs that thermometer calibrate to obtain its standard uncertainty in specific range of temperatures U, so as to the credibility of the accurate evaluation measured temperature during use is subsequently measured.Thermometer can be divided into three categories, benchmark Thermometer (u < 1mK), standard thermometer (u < 3mK) and application layer thermometer.Currently, in below 25K warm areas, China is only marked Standard apparatus can only demarcate application layer thermometer, be generally designated precision in 5mK-100mK, can not meet domestic high-precision Thermometric there is an urgent need for;And the standard thermometer in standard set-up needs to be sent to external standard apparatus every the several years to be demarcated, non- It is autonomous controllable;In addition, also there is the problems such as calibration temperature range is narrow, the temperature control time is short, precision is poor in conventional temperature caliberating device, High accuracy thermometric demand has been seriously affected, has become and restricts front line science research, Scientific research equipment development, national defense safety guarantee and height One of bottleneck of the fields such as development of new techniques fast development.
To sum up, for meet domestic high precision measuring temperature there is an urgent need for, need based on benchmark thermometric new method and efficient constant temperature system, A kind of wide warm area (5K-300K) high-precision temperature calibration system is established, realizes a variety of temperature such as reference thermometer, standard thermometer Spend the calibration of meter.
Invention content
Present invention aim to address conventional temperature meter calibration systems, and temperature fluctuation is larger, and stable temperature control is weaker, it is difficult to Realize high-precision, the staking-out work of the thermometer of high accuracy.
The present invention provides a kind of wide warm area high-precision temperature caliberating device, including:One thermal switch gold cylinder;One pressure chamber, It is located at the inside of the thermal switch gold cylinder;Refrigeration machine, the internal temperature that providing cold makes the pressure chamber are reduced to target temperature Degree;Resonator is set in the pressure chamber, the cylindrical type for setting several protrusions hollow in the side surface of the resonator is convex Platform places thermometer on surface.
Wherein, zero level flange, composite evacuated cover, level-one flange, hollow out protective shield of radiation, two level flange and thermal switch gold cylinder group It is combined into the pressure chamber and the resonator provides stable high-vacuum insulation environment.
Wherein, the resonator includes episphere and lower semisphere, and episphere is provided with microwave antenna, is set on lower semisphere It is equipped with lower microwave antenna.
Wherein, the humorous spherical cavity is used including but not limited to geometries such as torispherical, cylinder or polyhedrons.
Wherein, the humorous spherical cavity material is including but not limited to oxygen-free high conductivity type copper or stainless steel and other metal materials or blue treasured The superconductors such as the nonmetallic materials such as stone, organic glass, tempered glass or copper oxygen compound, iron (nickel) base;Either by metal The compound material that material, nonmetallic materials, superconductor are composed.
Wherein, microwave antenna emits microwave by the Network Analyzer that the port of export connects to intra resonant cavity.
Wherein, the thermal switch gold cylinder include thermal switch working gas, the thermal switch working gas including but not limited to Helium -3, helium -4 can also be other environmentally friendly working medium such as neon, nitrogen, argon gas in high-temperature region.
Wherein, further comprise at least one heating plate.
Wherein, the temperature is calculated as the reference levels such as rhodium iron thermometer or Cernox thermometers thermometer or normal temperature Meter.
Wherein, described device includes at least one set of gas circuit.
The present invention solves the calibration work that most of temperature calibration system can not carry out reference thermometer and standard thermometer The confinement problems such as work.Based on Continuous pressure-controlled air inflation refractive index benchmark temp measuring method and special composite design is used, a kind of wide temperature is provided Area's high-precision temperature caliberating device realizes the high-precision calibrating of all kinds of thermometers in 5K-300K warm areas.
Description of the drawings
Fig. 1 is the wide warm area high-precision temperature caliberating device schematic diagram of the present invention.
Specific embodiment
For the ease of understanding the present invention, the case study on implementation of the present invention is illustrated below in conjunction with the accompanying drawings, art technology Personnel should be appreciated that following explanations only to facilitate being explained to invention, and not as the specific restriction to its range.
The present invention provides a kind of wide warm area high-precision temperature caliberating device, Fig. 1 is the device of the invention schematic diagram.Such as figure Shown in 1, the temperature calibration device includes:It is high accuracy number multimeter 1, Network Analyzer 2, high precision DC power supply 3, high-precision Spend digital pressure gauge 4, the first four-way valve 5, the first pump group 6, the first valve 7, the second pump group 8, high-purity helium 9, zero level flange 10, Composite evacuated cover 11, level-one flange 12, hollow out protective shield of radiation 13, two level flange 14, thermal switch gold cylinder 15, microwave antenna 16, pressure Power cabin 17, standard thermometer 18, microwave resonance spherical cavity 19, the first heating plate 20, the second heating plate 21, two level cold head 22, two level Flexibility is thermally connected 23, level-one cold head 24, level-one flexibility is thermally connected 25, high-purity helium 26, the second valve 27, third pump group 28, the Two four-way valves 29, third valve 30, high accuracy number pressure gauge 31, refrigeration machine 32, control pressurer system 33.
Refrigeration machine 32 makes it to provide reliable cold inside the pressure chamber 17 and microwave resonance spherical cavity 19 tested Internal temperature is reduced to target temperature;Zero level flange 10, composite evacuated cover 11, level-one flange 12, hollow out protective shield of radiation 13, two level Flange 14 and thermal switch gold cylinder 15 are combined as pressure chamber 17 and microwave resonance spherical cavity 19 provides stable high-vacuum insulation environment;With First heating plate 20 provides stable heating source with the high precision DC power supply 3 that the second heating plate 21 is connected for experiment, ensures control Effective progress of temperature;The high accuracy number multimeter being connected with the thermometer to be marked that standard thermometer 18 and surrounding are evenly arranged 1, the data acquisition of high accuracy is provided for calibration experiment;The gas circuit for being connected with high-purity helium 9 being connected with thermal switch gold cylinder 15 with And the high accuracy number pressure gauge 4 convenient for real-time monitoring tubular road internal pressure, what is be connected with pressure chamber 17 is connected with high-purity helium 26 Gas circuit and real-time monitoring tubular road internal pressure high accuracy number pressure gauge 31, provided for internal system pure and steady Fixed, pressure controllable tolerance conveying;The second mating pump group 8 and third pump group 28 and independent pumping are compound with each section gas circuit 6 cooperating of the first pump group of 11 inner vacuum of vacuum (-tight) housing, ensures the conveying and extraction of gas, and good work is provided for system Environment.
In case study on implementation as shown in Figure 1, refrigeration machine 32 for the pulse type refrigeration machine of low vibration, passes through level-one flexible thermal Connection 25 and two level flexibility are thermally connected 23 and effectively solve the mechanical oscillation of refrigeration machine inherently;Refrigeration machine 32 at least one Grade 22 two cold heads of cold head 24 and two level cold head, wherein level-one cold head 24 are located at the lower section of zero level flange, the level-one cold head 24 25 are thermally connected by level-one flexibility with level-one flange 12 to be connected;Two level cold head 22 is located at the lower section of level-one flange 12, the two level Cold head 22 is thermally connected 23 by two level flexibility and is connected with two level flange 21.Flexibility is thermally connected 25 and 23 using including but not limited to straight Linear structure designs, and has efficient heat-transfer character, the intrinsic vibration for the refrigeration machine that can substantially decay;Main purpose is to reduce pressure The temperature fluctuation in cabin 17 improves temperature-controlled precision.
In case study on implementation as shown in Figure 1, microwave resonance spherical cavity 19 uses torispherical structure, and microwave resonance spherical cavity 19 includes There are upper and lower two hemispheres, there is threaded hole in the outer edge of the upper and lower hemisphere, after the upper and lower hemispheres being passed through to overlap by bolt Corresponding threaded hole is attached, and the upper and lower hemispheres of resonator are closed together.In the side surface of the resonator, processing is set The hollow cylindrical type boss of several equally distributed protrusions has been put, standard thermometer 18 is placed inside cylindrical type boss.It is micro- The episphere of wave resonance spherical cavity 19 is provided with microwave antenna, is provided with lower microwave antenna on lower semisphere, in microwave resonance spherical cavity Lower two parts set the interface with upper and lower microwave antenna 16 and are attached thereto respectively, so that microwave antenna 16 is connected by the port of export Network Analyzer 2 to 19 internal emission microwave of microwave resonance spherical cavity, microwave cavity 19 is obtained in vacuum by microwave signal Resonant frequency under state and inflated condition has higher precision than measuring absolute pressure, and then obtains high-precision gas folding Penetrate rate and thermodynamic temperature;19 surface of microwave resonance spherical cavity, which is provided with inside trepanning and pressure chamber 17, keeps unicom, inside and outside guarantee Pressure is consistent, solves the problem on deformation of microwave cavity 19 in the deflated condition, reduces imperfection to temperature survey standard The influence of exactness.
In case study on implementation as shown in Figure 1, two groups of gas circuits are respectively arranged with, it is independent to the first of 17 inner inflatable of pressure chamber Gas circuit and the second independent gas circuit inflated to thermal switch gold cylinder 15.First independent gas circuit includes the second four way valve 29, second Valve 27, high-pure helium gas cylinder 26, high accuracy number pressure gauge 31, third valve 30, control pressurer system 33 and third pump group 28.Second independent gas circuit includes the first four way valve 5, the first valve 7, high-pure helium gas cylinder 9 etc., wherein the first four way valve 5 One end 5-1 is connected by the first valve 7 with high-pure helium gas cylinder 9, and other end 5-2 is connect with high accuracy number pressure gauge, realization pair The accurate control of aeration quantity, in addition third port of export 5-3 be connected with the second pump group 8, realization thermal switch gold cylinder 15 when not filling helium High vacuum state.In addition, by present inside 33 calibration system of control pressurer system a pressure it is highly stable and Controllable state.First pump group 6 is connected with composite evacuated cover 11, is constantly in the state of unlatching, maintains 15 He of thermal switch gold cylinder The high vacuum environment of confined space between composite evacuated cover 11.
In case study on implementation as shown in Figure 1, when in running order, one side refrigeration machine 32 starts, to level-one cold head 24 Cold is transmitted rapidly with two level cold head 22, it is made to cool down in a short time and reaches the temperature of setting;Meanwhile pass through thermal switch gold cylinder The second independent gas circuit where 15 inputs a certain amount of helium, i.e. thermal switch is opened, and passes through the first independent gas circuit where pressure chamber 17 A certain amount of helium is filled with to the inside of pressure chamber 17, keeps extraordinary thermal conductivity.Two gas circuits can make pressure chamber 17 and inside The temperature of spherical cavity 19 reduces rapidly, this kind of method can make system temperature reduction reach operating temperature in a short time.Meanwhile heat Switch is in the state opened, and is applied by high precision DC power supply 3 to the first heating plate 20 and the second heating plate 21 smaller Electric current, coordinate temperature measuring thermometer and high accuracy number multimeter 1 and Multi-point temperature-controlled algorithm that the high-precision of the warm area can be realized Spend temperature control.By gas thermal switch different working modes, rational multipoint heating temperature control and high heat insulating construction design, so as to for Pressure chamber 17 and its internal microwave resonance spherical cavity 19 provide the superelevation temperature-controlled precision being continuously adjusted between 5K-300K.So as to logical Crossing data collecting system can realize in 5K-300K warm areas to high-precision thermometers such as reference thermometer, standard thermometers Quick and precisely demarcate.
The high-precision temperature calibration device of wide warm area of the present invention, includes microwave resonance system, control pressurer system with And temperature control system.Thermometric is carried out using Continuous pressure-controlled air inflation refractive index temp measuring method.Thermal switch gold cylinder is filled with by helium to carry out The thermal switch of heat conduction is opened and mating heating plate, and high precision DC power supply is realized for a long time, high-precision, high stability width The temperature of warm area particularly very low temperature region is controlled, it can be achieved that reference thermometer, the calibration of standard thermometer.
Microwave resonance spherical cavity in the thermometer calibration system, shape are torispherical or spherical shape, and the spherical cavity is provided with The open-celled structure of microwave antenna interface and unicom pressure chamber, position are not limited to position shown in FIG. 1.Any angle and Including orientation arrangement all covers.Top setting is machined with cylindrical type boss, and inside can arrange rhodium iron thermometer, Cernox temperature Reference levels thermometer, standard thermometer and other thermometers such as meter, can realize the temperature such as reference thermometer, standard thermometer The staking-out work of meter.
Microwave resonance spherical cavity 19 uses torispherical structure, in x, the greatest radius R of tri- axis direction of y, zmaxIt is most short radius Rmin1~1.01 times, the second major radius RmidIt is most short radius Rmin1~1.01 times, most short radius RminCan be 1cm~25cm Between arbitrary value.It should be noted that other such as cylindrical or polyhedron geometries also can be used in microwave resonance spherical cavity.
19 material of microwave resonance spherical cavity is including but not limited to oxygen-free high conductivity type copper, stainless steel and other metal materials, sapphire, organic The superconductors such as the nonmetallic materials such as glass, tempered glass, copper oxygen compound, iron (nickel) base;And by metal material, nonmetallic The compound material that material, superconductor are composed.
A certain amount of helium is inputted by 15 corresponding gas circuit of thermal switch gold cylinder, i.e. thermal switch is opened, right by pressure chamber 17 The gas circuit answered is filled with a certain amount of helium to the inside of pressure chamber 17, keeps extraordinary thermal conductivity.Two gas circuits can make pressure chamber 9 with And the temperature of internal spherical cavity 16 reduces rapidly, this kind of method can make system temperature reduction reach operating temperature in a short time.
Thermal switch working gas can also be neon, nitrogen, argon gas etc. in high-temperature region including but not limited to helium -3, helium -4 Other environmental protection working medium;According to warm area difference, air pressure can change in the range of 0~10MPa.
Refrigeration machine level-one cold head and level-one flange, lead between two level cold head and two level flange in the thermometer calibration system It crosses specific flexible be thermally connected to be connected, flexible be thermally connected can be used including but not limited to linear structure type.It is described The position of heating plate is not limited to position shown in FIG. 1 in thermometer calibration system, can be arranged in other positions, and quantity can be with It it is 1 or multiple.
The present invention uses advanced Continuous pressure-controlled air inflation refractive index temp measuring method, can realize in 5K~300K wide warm areas, especially It is the high-acruracy survey in the very low temperature region thermodynamic temperature of 5K~25K, can completes to reference level thermometer and standard level temperature Spend the calibration of meter.By high vacuum compound design, has efficient heat-insulating property, it can be achieved that the control being continuously adjusted in wide warm area Warm environment.
It is understood that although the present invention has been disclosed in the preferred embodiments as above, above-described embodiment not to Limit the present invention.For any those skilled in the art, without departing from the scope of the technical proposal of the invention, Many possible changes and modifications are all made to technical solution of the present invention using the technology contents of the disclosure above or are revised as With the equivalent embodiment of variation.Therefore, every content without departing from technical solution of the present invention, technical spirit pair according to the present invention Any simple modifications, equivalents, and modifications made for any of the above embodiments still fall within the range of technical solution of the present invention protection It is interior.

Claims (10)

1. a kind of width warm area high-precision temperature caliberating device, including:One thermal switch gold cylinder;One pressure chamber is located at the heat The inside of the golden cylinder of switch;Refrigeration machine, the internal temperature that providing cold makes the pressure chamber are reduced to target temperature;Its feature exists In:Resonator is set in the pressure chamber, the cylindrical type for setting several protrusions hollow in the side surface of the resonator is convex Platform places thermometer on surface.
2. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:It is zero level flange, composite evacuated Cover, level-one flange, hollow out protective shield of radiation, two level flange and thermal switch gold cylinder are combined as the pressure chamber and the resonator provides Stable high-vacuum insulation environment.
3. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:The microwave cavity includes There are episphere and lower semisphere, episphere is provided with microwave antenna, lower microwave antenna is provided on lower semisphere.
4. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:The resonator uses quasi- ball The geometries such as shape, cylinder or polyhedron.
5. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:The resonance cavity material is height It leads the nonmetallic materials such as oxygen-free copper or stainless steel and other metal materials or sapphire, organic glass, tempered glass or copper oxidation is closed The superconductors such as object, iron (nickel) base;The composite material being either composed of metal material, nonmetallic materials, superconductor Material.
6. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:Microwave antenna passes through the port of export The Network Analyzer of connection emits microwave to intra resonant cavity.
7. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:The thermal switch gold cylinder includes Thermal switch working gas, the thermal switch working gas including but not limited to helium -3, helium -4, can also be in high-temperature region neon, Other environmentally friendly working medium such as nitrogen, argon gas.
8. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:Further comprise at least one Heating plate.
9. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:The temperature is calculated as rhodium iron temperature Reference levels thermometer or the standard thermometer such as degree meter or cernox thermometers.
10. width warm area high-precision temperature caliberating device as described in claim 1, it is characterised in that:Described device is included at least One group of gas circuit.
CN201810306104.3A 2018-04-08 2018-04-08 Wide-temperature-zone high-precision temperature calibration device Pending CN108225618A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110567608A (en) * 2019-08-16 2019-12-13 北京交通大学 Fiber grating sensor calibration device based on liquid nitrogen conduction cooling
CN112362195A (en) * 2020-12-04 2021-02-12 中国科学院力学研究所 Static calibrating device of thermal current
CN113049145A (en) * 2021-03-29 2021-06-29 中国空气动力研究与发展中心设备设计与测试技术研究所 Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system
CN113049144A (en) * 2021-03-29 2021-06-29 中国空气动力研究与发展中心设备设计与测试技术研究所 Heat insulation cavity for temperature measurement system to perform full-system-width low-temperature comprehensive calibration equipment

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CN107764428A (en) * 2017-01-23 2018-03-06 中国科学院理化技术研究所 Constant pressure temperature measurement reference device
CN208206347U (en) * 2018-04-08 2018-12-07 中国科学院理化技术研究所 Wide-temperature-zone high-precision temperature calibration device

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GB201212800D0 (en) * 2012-07-19 2012-09-05 Oxford Instr Nanotechnology Tools Ltd Cryogenic cooloing apparatus and method
CN103257001A (en) * 2013-04-10 2013-08-21 中国科学院理化技术研究所 Three-phase point reproduction device with refrigerator as cold source
CN204695146U (en) * 2015-05-19 2015-10-07 合肥天鹅制冷科技有限公司 For pressure chamber high accuracy temperature control device
CN106644173A (en) * 2017-01-23 2017-05-10 中国科学院理化技术研究所 International temperature comparing device using refrigerator as cold source
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CN208206347U (en) * 2018-04-08 2018-12-07 中国科学院理化技术研究所 Wide-temperature-zone high-precision temperature calibration device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110567608A (en) * 2019-08-16 2019-12-13 北京交通大学 Fiber grating sensor calibration device based on liquid nitrogen conduction cooling
CN110567608B (en) * 2019-08-16 2021-08-10 北京交通大学 Fiber grating sensor calibration device based on liquid nitrogen conduction cooling
CN112362195A (en) * 2020-12-04 2021-02-12 中国科学院力学研究所 Static calibrating device of thermal current
CN113049145A (en) * 2021-03-29 2021-06-29 中国空气动力研究与发展中心设备设计与测试技术研究所 Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system
CN113049144A (en) * 2021-03-29 2021-06-29 中国空气动力研究与发展中心设备设计与测试技术研究所 Heat insulation cavity for temperature measurement system to perform full-system-width low-temperature comprehensive calibration equipment
CN113049144B (en) * 2021-03-29 2024-04-09 中国空气动力研究与发展中心设备设计与测试技术研究所 Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system

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