CN108176389A - SF6The adsorbent on-line regeneration method of purifying processing device - Google Patents
SF6The adsorbent on-line regeneration method of purifying processing device Download PDFInfo
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- CN108176389A CN108176389A CN201810044592.5A CN201810044592A CN108176389A CN 108176389 A CN108176389 A CN 108176389A CN 201810044592 A CN201810044592 A CN 201810044592A CN 108176389 A CN108176389 A CN 108176389A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/345—Regenerating or reactivating using a particular desorbing compound or mixture
- B01J20/3458—Regenerating or reactivating using a particular desorbing compound or mixture in the gas phase
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/3483—Regenerating or reactivating by thermal treatment not covered by groups B01J20/3441 - B01J20/3475, e.g. by heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
- B01D2259/4009—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating using hot gas
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Abstract
A kind of SF6The adsorbent on-line regeneration method of purifying processing device, including step：Intercept nitrogen inlet duct road, SF6Admission line, first, second, third and fourth, five, six, seven pipelines；Each pipeline, heating unit and adsorption tower are docked as required；Installation valve, pressure reducing valve, filter and vacuum pump on corresponding pipeline；Normal purified treatment is carried out, gas is discharged to the external world through alkali liquid tank offgas outlet；When adsorbent adsorption capacity declines or loses processing capacity; the present invention carries out the adsorbent in adsorption tower by way of to be evenly heated heating heating Posterior circle to inert nitrogen; then it vacuumizes again; realize online decompression hot reactivation; ensure that adsorption tower cavity inner temperature is uniformly distributed; realize that heating tube and adsorbent are completely isolated; prevent the security risks hidden danger such as operation is careless, temperature-controlling system cannot be protected in time; it thoroughly solves to influence the airtight sex chromosome mosaicism of device because of handling; the adsorbent reactivation period is greatly improved, realizes that sorbent circulation reuses.
Description
Technical field
The present invention relates to a kind of SF6Purifying processing device is especially a kind of SF6The adsorbent of purifying processing device is online
Regeneration method.
Background technology
As the increasing and power grid enterprises of state control greenhouse gas emission dynamics are to SF6(sulfur hexafluoride) gas returns
Receive the attention that processing cycle recycles work, SF6The demand of purifying processing device increases sharply.The device adsorption tower is in SF6Only
Change in processing procedure and play the role of adsorbing contaminant, but the adsorbent in its inner cavity will appear saturation after long-term purified treatment and show
As adsorption capacity is caused to decline or even lose processing capacity.
The recycling of adsorbent can be realized by regeneration, reduces processing cost.Decompression or heating are conducive to adsorb
Following two regeneration methods are commonly used in the desorption of matter or the regeneration of adsorbent at present：
1. taking out adsorbent, it is packed into after being vacuumized in vacuum drying chamber and heats, its impurity adsorbed is precipitated.But the method
Loading and unloading amount is larger, easily influences the air-tightness of purifying processing device, and the regeneration period is long.
2. heating tube is inserted directly into adsorption tower, to being vacuumized again after adsorbent heat temperature raising.The method can solve
The problem of influencing purifying processing device air-tightness because of handling, the regeneration period can be shortened to a certain extent.But due to heating tube
It is in direct contact with adsorbent and adsorbent heat conductivility itself is poor, when on-line regeneration, be heated evenly and be difficult to ensure that, easily burnt
Coke adsorbent micropore.Meanwhile other pressure vessels and pipeline with pressure are additionally provided in purifying processing device, when operation, easily causes heating
Pipe, adsorbent damage or even SF6Gas is decomposed by electric arc generates a large amount of toxic, pernicious gases, and there are certain security risks.
Invention content
The technical problem to be solved by the present invention is to provide a kind of SF6The adsorbent on-line regeneration method of purifying processing device,
It is not only able to the air-tightness for ensureing purifying processing device, shortens the adsorbent reactivation period, and can avoid heating tube, adsorbent
Damage, it is ensured that the temperature in adsorption tower cavity is uniformly distributed, and ensures safe to use, realizes the cycling and reutilization of adsorbent.
The technical solution of the present invention is to provide a kind of SF6The adsorbent on-line regeneration method of purifying processing device, packet
Include following steps：
(1) interception nitrogen inlet duct road, SF6Admission line, first pipe, second pipe, third pipeline, the 4th pipeline,
5th pipeline, the 6th pipeline and the 7th pipeline；
(2) by nitrogen inlet duct road and SF6The outlet of admission line while the inlet communication with first pipe, first pipe
Outlet and heating unit inlet communication, the outlet of heating unit and the inlet communication of third pipeline, third pipeline and second
The outlet of pipeline while the inlet communication with adsorption tower, the outlet of adsorption tower and the inlet communication of the 4th pipeline, the 4th pipeline
Outlet simultaneously with the five, the six, inlet communication of seven pipelines；
(3) hand-operated valve S1, SF are installed on nitrogen inlet duct road6Hand-operated valve S10 is installed on admission line, first pipe
Front and rear installs pressure reducing valve and hand-operated valve S2 respectively, the import of second pipe between pressure reducing valve and hand-operated valve S2, and
It is connected with first pipe, hand-operated valve S3 on second pipe is installed, hand-operated valve S4 on third pipeline is installed, hand is installed on the 5th pipeline
Valve S7, filter and hand-operated valve S8 are moved, hand-operated valve S9 and vacuum pump on the 6th pipeline are installed, hand-operated valve S5 is installed on the 7th pipeline
It is located at input end with two position three-way valve S6, hand-operated valve S5；
(4) by the outlet of the 6th pipeline and the outlet of the 7th pipeline, and make import and the two position three-way valve of alkali liquid tank
The gas outlet connection of S6, the offgas outlet of alkali liquid tank are communicated with the external world；
(5) normal purified treatment is carried out
Hand-operated valve S1, S2, S4, S9, S5 and two position three-way valve S6 are closed, by SF6Purifying processing device processing unit delays
Rush tank outlet access SF6The import of admission line, and SF is inserted into the outlet of the 5th pipeline6The power unit of purifying processing device
Entrance, adjusting pressure reducing valve makes SF6Gas pressure is decompressed to 0.6MPa, under pressure, SF6Gas successively through hand-operated valve S10,
Pressure reducing valve, hand-operated valve S3 enter in adsorption tower, after adsorption tower pressure-variable adsorption, then successively the outlet through adsorption tower, hand-operated valve S7,
Filter and hand-operated valve S8 enter power unit, finally, pump it to cryogenic unit by the compressor of power unit and are purified
Processing；
(6) when the adsorption capacity of adsorbent in adsorption tower declines or when losing processing capacity, be first shut off hand-operated valve S10,
S3, S7, S8, S9 open hand-operated valve S1, S2, S4, S5 and S6, and the nitrogen cylinder that purity is 99.999% then is accessed nitrogen
Admission line opens cylinder valve, and adjusting pressure reducing valve makes the gas pressure of nitrogen be decompressed to 1MPa, under pressure, nitrogen
Enter heating unit through hand-operated valve S1, pressure reducing valve, hand-operated valve S2 successively, carry out heat exchange, the nitrogen that temperature is 200 DEG C is from heating
The outlet outflow of unit, enters in adsorption tower through hand-operated valve S4, and then enters alkali liquid tank from hand-operated valve S5, two position three-way valve S6
It is inside neutralized, is finally discharged to the external world from alkali liquid tank offgas outlet；
(7) after mean temperature everywhere reaches 180 DEG C when adsorption tower inner cavity, heating unit is closed, makes adsorption tower inner cavity
Pressure is down to atmospheric pressure, then closes hand-operated valve S1, S2, S4, S5 successively again；
(8) switch two position three-way valve S6, make the outlet of vacuum pump and the inlet communication of alkali liquid tank, open hand-operated valve S9 and true
Sky pump vacuumizes adsorption tower, when pressure reaches 50Pa, closes hand-operated valve S9 and vacuum pump, opens hand-operated valve S5 and cuts
Two position three-way valve S6 is changed, makes the outlet of adsorption tower and the inlet communication of alkali liquid tank；
(9) cooled down by the way of nitrogen is passed through to adsorption tower to it, after reaching room temperature, can used.
SF of the present invention6The adsorbent on-line regeneration method of purifying processing device, wherein, the heating unit has two
Group is arranged in parallel one on the other, and every group of heating unit includes cool-bag, heating tube and several axially staggered be arranged on
Partition board in cool-bag inner cavity, heating tube are stretched into cool-bag inner cavity, and pass through flange mounted on cool-bag head, and two
By flange serial communication, the tail portion of each cool-bag is respectively mounted that there are one thermocouple, the guarantors on top for the tail portion of a cool-bag
Position is equipped with safety valve among warm container, and the cool-bag of lower part is equipped with the second platinum resistance, lower part at head region
Cool-bag bottom stent is installed, heating tube, thermocouple and the second platinum resistance are electrically connected with the controller.
SF of the present invention6The adsorbent on-line regeneration method of purifying processing device, wherein, the side wall of the adsorption tower
On be sequentially arranged with three the first platinum resistance from top to bottom, these three first platinum resistance are electrically connected with the controller.
SF of the present invention6The adsorbent on-line regeneration method of purifying processing device, wherein, it is filled on the 6th pipeline
There are hot-swappable fans, the hot-swappable fans are between hand-operated valve S9 and vacuum pump.
SF of the present invention6The adsorbent on-line regeneration method of purifying processing device, wherein, it is filled on the 6th pipeline
There is inflation solenoid valve V1, solenoid valve V1 is between hot-swappable fans and vacuum pump for inflation.
SF of the present invention6The adsorbent on-line regeneration method of purifying processing device, wherein, it is filled on the third pipeline
There are flowmeter L1 and first pressure gauge P1, second pressure gauge P2 is housed on the 4th pipeline, the 6th pipeline is equipped with vacuum
Z1 is counted, the vacuum meter Z1 is located between hot-swappable fans and inflation solenoid valve V1.
After more than structure, compared with prior art, SF of the present invention6The adsorbent on-line regeneration side of purifying processing device
Method has the following advantages：Unlike the prior art, when the adsorption capacity of the invention in adsorbent declines or loses processing capacity,
Can adsorbent on-line regeneration operation immediately be switched to, so as to save original a large amount of loading and unloadings to adsorbent, ensure that purification
The air-tightness of processing unit substantially reduces the regeneration period of adsorbent；Since the heating tube in heating unit with adsorbent is
Spaced apart from each other, the two is not directly contacted with, therefore avoids the damage of heating tube and adsorbent；It can ensure that by the flowing of nitrogen
Temperature in adsorption tower cavity is uniformly distributed, and has ensured safe to use, realizes the cycling and reutilization of adsorbent.
Description of the drawings
Fig. 1 is using SF of the present invention6The adsorbent on-line regeneration method of purifying processing device links together each pipeline
When structure diagram；
Fig. 2 is the section view enlarged structure schematic diagram of heating unit in Fig. 1；
Fig. 3 is the section view enlarged structure schematic diagram of adsorption tower in Fig. 1.
Specific embodiment
With reference to the accompanying drawings and detailed description to SF of the present invention6The adsorbent on-line regeneration method of purifying processing device
It is described in further detail：
As shown in Figures 1 to 3, in this embodiment, SF of the present invention6The adsorbent on-line regeneration of purifying processing device
Method includes the following steps：
(1) interception nitrogen inlet duct road 10, SF6Admission line 11, first pipe 13, second pipe 14, third pipeline 15,
4th pipeline 16, the 5th pipeline 17, the 6th pipeline 18 and the 7th pipeline 19；
(2) by nitrogen inlet duct road 10 and SF6The outlet of admission line 11 while the inlet communication with first pipe 13, the
The outlet of one pipeline 13 and the inlet communication of heating unit 25, the outlet of heating unit 25 and the inlet communication of third pipeline 15,
The outlet of third pipeline 15 and second pipe 14 while the inlet communication with adsorption tower 24, the outlet of adsorption tower 24 and the 4th pipeline
16 inlet communication, the outlet of the 4th pipeline 16 connect simultaneously with the import of the 5th pipeline 17, the 6th pipeline 18, the 7th pipeline 19
It is logical；
(3) hand-operated valve S1, SF are installed on nitrogen inlet duct road 106Hand-operated valve S10, the first pipe are installed on admission line 11
The front and rear in road 13 installs pressure reducing valve 12 and hand-operated valve S2 respectively, the import of second pipe 14 be located at pressure reducing valve 12 with manually
It between valve S2, and is connected with first pipe 13, hand-operated valve S3 on second pipe 14 is installed, hand-operated valve is installed on third pipeline 15
S4, installation hand-operated valve S7, filter 22 and hand-operated valve S8 on the 5th pipeline 17, installation hand-operated valve S9 and vacuum on the 6th pipeline 18
21 are pumped, hand-operated valve S5 and two position three-way valve S6 is installed on the 7th pipeline 19, hand-operated valve S5 is located at input end；
(4) by the outlet of the 6th pipeline 18 and the outlet of the 7th pipeline 19, and make the import of alkali liquid tank 20 and two
The gas outlet connection of triple valve S6, the offgas outlet of alkali liquid tank 20 are communicated with the external world；
(5) normal purified treatment is carried out
Hand-operated valve S1, S2, S4, S9, S5 and two position three-way valve S6 are closed, by SF6Purifying processing device processing unit delays
Rush tank outlet access SF6The import of admission line 11, and SF is inserted into the outlet of the 5th pipeline 176The power of purifying processing device
Unit entrance, adjusting pressure reducing valve 12 makes SF6Gas pressure is decompressed to 0.6MPa, under pressure, SF6Gas is successively through manual
Valve S10, pressure reducing valve 12, hand-operated valve S3 enter in adsorption tower 24, after adsorption tower pressure-variable adsorption, then going out through adsorption tower successively
Mouth, hand-operated valve S7, filter 22 and hand-operated valve S8 enter power unit, finally, depth are pumped it to by the compressor of power unit
Cold unit carries out purification processes；
(6) when the adsorption capacity of adsorbent in adsorption tower 24 declines or loses processing capacity, it is first shut off hand-operated valve
S10, S3, S7, S8, S9 open hand-operated valve S1, S2, S4, S5 and S6, then access the nitrogen cylinder that purity is 99.999%
Cylinder valve is opened in nitrogen inlet duct road 10, and adjusting pressure reducing valve 12 makes the gas pressure of nitrogen be decompressed to 1MPa, is acted in pressure
Under, nitrogen enters heating unit 25 through hand-operated valve S1, pressure reducing valve 12, hand-operated valve S2 successively, carries out heat exchange, and temperature is 200 DEG C
Nitrogen flowed out from the outlet of heating unit 25, enter in adsorption tower 24 through hand-operated valve S4, and then from hand-operated valve S5, two three
Port valve S6, which enters in alkali liquid tank 20, to be neutralized, and is finally discharged to the external world from 20 offgas outlet of alkali liquid tank；
(7) after mean temperature everywhere reaches 180 DEG C when 24 inner cavity of adsorption tower, heating unit is closed, makes adsorption tower inner cavity
Pressure be down to atmospheric pressure, then close hand-operated valve S1, S2, S4, S5 successively again；
(8) switch two position three-way valve S6, make the outlet of vacuum pump 21 and the inlet communication of alkali liquid tank 20, open hand-operated valve S9
Adsorption tower 24 is vacuumized with vacuum pump 21, when pressure reaches 50Pa, hand-operated valve S9 and vacuum pump 21 is closed, opens hand
Dynamic valve S5 and switching two position three-way valve S6, makes the outlet of adsorption tower 24 and the inlet communication of alkali liquid tank 20；
(9) cooled down by the way of nitrogen is passed through to adsorption tower 24 to it, after reaching room temperature, can used.
Heating unit 25 after it reaches technological requirement, makes the absorption in adsorption tower 24 for heating inert nitrogen
Agent thermally equivalent heats up, to disengage adsorbate.Alkali liquid tank 20 is used to neutralize the impurity parsed by adsorbent in adsorption tower cavity,
Realize the pollution-free zero-emission of regenerative process.
In order to preferably be heated to nitrogen, heating unit 25 is set as two groups, on this two groups of heating units 25 1
Once it is arranged in parallel.Every group of heating unit 25 includes cool-bag 251, heating tube 253 and several axially staggered settings
Partition board 252 in 251 inner cavity of cool-bag.Partition board 252 can make nitrogen undulate flow through the inner cavity of cool-bag 251, increase
Add heat exchange efficiency.Heating tube 253 is stretched into 251 inner cavity of cool-bag, and is passed through flange and be mounted on 251 head of cool-bag, when
It is easy to disassemble when clearing up the inner cavity of cool-bag 251, the replacement in favor of maintaining and to heating tube 253；Two
By flange serial communication, the tail portion of each cool-bag 251 is respectively mounted there are one thermocouple 26 for the tail portion of cool-bag 251, and two
A thermocouple 26 for acquiring the temperature signal in 251 cavity of cool-bag and carrying out overtemperature alarm, cut off immediately by temperature anomaly
The power supply of heating tube 253 effectively extends the service life of heating tube 253；Position is equipped with safety among the cool-bag on top
Valve 28, the cool-bag of lower part are equipped with the second platinum resistance 27,251 bottom of the cool-bag installation of lower part at head region
There is stent 254, it is easy to support；Heating tube 253,26 and second platinum resistance 27 of thermocouple are electrically connected with the controller.Second platinum electricity
Resistance 27 passes to controller for acquiring the temperature signal in cool-bag 251 in real time, convenient for automatically adjusting heating tube 253
Output power, the nitrogen temperature of outflow is made uniformly to reach 200 DEG C of setting value.
It is changed between hand-operated valve S9 and vacuum pump 21 equipped with hot-swappable fans 23, the hot-swappable fans 23 on 6th pipeline 18
Hot-air fan 23 is for cooling down to high temperature nitrogen, to protect vacuum pump 21.Inflation solenoid valve V1 is also equipped on 6th pipeline 18,
Solenoid valve V1 is inflated between hot-swappable fans 23 and vacuum pump 21.Inflating the effect of solenoid valve V1 is：(up to electric shape during work
State), inflating port is blocked and (sealed up), while vacuum pump 21 is made to be connected with adsorption tower 24, by its inner cavity by the valve rod movement in valve
Gas is extracted out；When not working (i.e. power failure state), valve rod sets back under the action of the spring, will be in vacuum pump 21 and adsorption tower 24
Chamber separates, and inflating port of the ambient atmosphere through inflation solenoid valve V1 enters in vacuum pump 21, makes pressure equilibrium in pump, prevents vacuum
Pump 21 returns oil to adsorption tower 24.
Three the first platinum resistance 29 are sequentially arranged on the side wall of adsorption tower 24 from top to bottom, these three first platinum resistance 29 are
It is electrically connected with the controller.First platinum resistance 29 is used to acquire the temperature signal of upper, middle and lower position in 24 cavity of adsorption tower in real time,
And pass to controller, convenient for judging the thermally equivalent situation of adsorbent, after average value reaches 180 DEG C of setting value, close plus
Hot cell 25.
Flowmeter L1 and first pressure gauge P1 on third pipeline 15 are installed, second pressure gauge is housed on the 4th pipeline 16
P2, the 6th pipeline 18 are equipped with vacuum meter Z1, and vacuum meter Z1 is located between hot-swappable fans 23 and inflation solenoid valve V1.
The present invention carries out the adsorbent in adsorption tower by way of heating Posterior circle to inert nitrogen
Even heat temperature raising, then again vacuumizes it, realizes online decompression hot reactivation, can effectively realize that adsorption tower cavity inner temperature is equal
Even distribution realizes that heating tube is completely isolated with adsorbent, and having prevented staff's careless manipulation, temperature-controlling system cannot protect in time
Etc. security risks hidden danger, thoroughly solve because handling influence the airtight sex chromosome mosaicism of device, substantially increase the adsorbent reactivation period, realize
The recycling of adsorbent.
In this embodiment, the hot-swappable fans 23, inflation solenoid valve V1, vacuum pump 21, alkali liquid tank 20, two
Position three-way valve S6, thermocouple 26, controller, the second platinum resistance 27 and the first platinum resistance 29 are commercial product.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
It encloses and is defined, under the premise of design spirit of the present invention is not departed from, those of ordinary skill in the art are to the technical side of the present invention
The various modifications and improvement that case is made, should all fall within the scope of protection of the present invention.
Claims (6)
1. a kind of SF6The adsorbent on-line regeneration method of purifying processing device, which is characterized in that include the following steps：
(1) nitrogen inlet duct road (10), SF are intercepted6Admission line (11), first pipe (13), second pipe (14), third pipeline
(15), the 4th pipeline (16), the 5th pipeline (17), the 6th pipeline (18) and the 7th pipeline (19)；
(2) by nitrogen inlet duct road (10) and SF6The outlet of admission line (11) while the inlet communication with first pipe (13),
The outlet of first pipe (13) and the inlet communication of heating unit (25), outlet and the third pipeline (15) of heating unit (25)
Inlet communication, the outlet of third pipeline (15) and second pipe (14) while the inlet communication with adsorption tower (24), adsorption tower
(24) outlet and the inlet communication of the 4th pipeline (16), the outlet of the 4th pipeline (16) simultaneously with the five, the six, seven pipelines into
Mouth connection；
(3) hand-operated valve S1, SF are installed on nitrogen inlet duct road (10)6Hand-operated valve S10, the first pipe are installed on admission line (11)
The front and rear in road (13) installs pressure reducing valve (12) and hand-operated valve S2 respectively, and the import of second pipe (14) is located at pressure reducing valve
(12) it between hand-operated valve S2, and is connected with first pipe (13), hand-operated valve S3, third pipeline is installed on second pipe (14)
(15) hand-operated valve S4 on is installed, hand-operated valve S7, filter (22) and hand-operated valve S8, the 6th pipeline are installed on the 5th pipeline (17)
(18) hand-operated valve S9 and vacuum pump (21) on are installed, hand-operated valve S5 and two position three-way valve S6 is installed on the 7th pipeline (19), manually
Valve S5 is located at input end；
(4) by the outlet of the 6th pipeline (18) and the outlet of the 7th pipeline (19), and make the import and two of alkali liquid tank (20)
The gas outlet connection of position three-way valve S6, the offgas outlet of alkali liquid tank (20) are communicated with the external world；
(5) normal purified treatment is carried out
Hand-operated valve S1, S2, S4, S9, S5 and two position three-way valve S6 are closed, by SF6The surge tank of purifying processing device processing unit goes out
Mouth access SF6The import of admission line (11), and SF is inserted into the outlet of the 5th pipeline (17)6The power list of purifying processing device
First entrance, adjusting pressure reducing valve (12) makes SF6Gas pressure is decompressed to 0.6MPa, under pressure, SF6Gas is successively through manual
Valve S10, pressure reducing valve (12), hand-operated valve S3 enter in adsorption tower (24), after adsorption tower pressure-variable adsorption, then successively through adsorption tower
Outlet, hand-operated valve S7, filter (22) and hand-operated valve S8 enter power unit, finally, are taken out by the compressor of power unit
Purification processes are carried out to cryogenic unit；
(6) when the adsorption capacity of adsorption tower (24) interior adsorbent declines or when losing processing capacity, be first shut off hand-operated valve S10,
S3, S7, S8, S9 open hand-operated valve S1, S2, S4, S5 and S6, and the nitrogen cylinder that purity is 99.999% then is accessed nitrogen
Admission line (10) opens cylinder valve, and adjusting pressure reducing valve (12) makes the gas pressure of nitrogen be decompressed to 1MPa, is acted in pressure
Under, nitrogen enters heating unit (25) through hand-operated valve S1, pressure reducing valve (12), hand-operated valve S2 successively, carries out heat exchange, and temperature is
200 DEG C of nitrogen is flowed out from the outlet of heating unit (25), is entered in adsorption tower (24) through hand-operated valve S4, and then from hand-operated valve
S5, two position three-way valve S6, which enter in alkali liquid tank (20), to be neutralized, and finally from alkali liquid tank (20), offgas outlet is discharged to the external world；
(7) after mean temperature everywhere reaches 180 DEG C when adsorption tower (24) inner cavity, heating unit is closed, makes adsorption tower inner cavity
Pressure is down to atmospheric pressure, then closes hand-operated valve S1, S2, S4, S5 successively again；
(8) switch two position three-way valve S6, make the outlet of vacuum pump (21) and the inlet communication of alkali liquid tank (20), open hand-operated valve S9
Adsorption tower (24) is vacuumized with vacuum pump (21), when pressure reaches 50Pa, closes hand-operated valve S9 and vacuum pump (21),
Hand-operated valve S5 and switching two position three-way valve S6 are opened, makes the outlet of adsorption tower (24) and the inlet communication of alkali liquid tank (20)；
(9) cooled down by the way of nitrogen is passed through to adsorption tower (24) to it, after reaching room temperature, can used.
2. SF according to claim 16The adsorbent on-line regeneration method of purifying processing device, it is characterised in that：It is described to add
Hot cell (25) has two groups, is arranged in parallel one on the other, and every group of heating unit (25) includes cool-bag (251), heating tube
(253) and several axially staggered partition boards (252) being arranged in cool-bag (251) inner cavity, heating tube (253) stretch into guarantor
In warm container (251) inner cavity, and pass through flange mounted on cool-bag (251) head, the tail portion of two cool-bags (251) leads to
Cross flange serial communication, the tail portion of each cool-bag (251) is respectively mounted there are one thermocouple (26), among the cool-bag on top
Position is equipped with safety valve (28), and the cool-bag of lower part is equipped with the second platinum resistance (27) at head region, lower part
Cool-bag (251) bottom is equipped with stent (254), heating tube (253), thermocouple (26) and the second platinum resistance (27) with control
Device electrical connection processed.
3. SF according to claim 26The adsorbent on-line regeneration method of purifying processing device, it is characterised in that：The suction
Three the first platinum resistance (29) are sequentially arranged on the side wall of attached tower (24) from top to bottom, these three first platinum resistance (29) with control
Device electrical connection processed.
4. SF according to any one of claims 1 to 36The adsorbent on-line regeneration method of purifying processing device, feature exist
In：Equipped with hot-swappable fans (23) on 6th pipeline (18), the hot-swappable fans (23) are positioned at hand-operated valve S9 and vacuum pump (21)
Between.
5. SF according to claim 46The adsorbent on-line regeneration method of purifying processing device, it is characterised in that：Described
Equipped with inflation solenoid valve V1 on six pipelines (18), the inflation solenoid valve V1 be located at hot-swappable fans (23) and vacuum pump (21) it
Between.
6. SF according to claim 56The adsorbent on-line regeneration method of purifying processing device, it is characterised in that：Described
Flowmeter L1 and first pressure gauge P1 on three pipelines (15) is housed, second pressure gauge P2, institute are housed on the 4th pipeline (16)
The 6th pipeline (18) is stated equipped with vacuum meter Z1, the vacuum meter Z1 is located between hot-swappable fans (23) and inflation solenoid valve V1.
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