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CN108163821A - The preparation method of spherical titanium nitride - Google Patents

The preparation method of spherical titanium nitride Download PDF

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CN108163821A
CN108163821A CN201810089384.7A CN201810089384A CN108163821A CN 108163821 A CN108163821 A CN 108163821A CN 201810089384 A CN201810089384 A CN 201810089384A CN 108163821 A CN108163821 A CN 108163821A
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titanium nitride
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nitrogen
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CN108163821B (en
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赖奇
廖先杰
张树立
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Panzhihua University
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    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/076Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/70Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/03Particle morphology depicted by an image obtained by SEM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/30Particle morphology extending in three dimensions
    • C01P2004/32Spheres

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Abstract

本发明涉及球形氮化钛的制备方法,具体涉及利用射频等离子体粉末生产设备制备球形氮化钛的方法。本发明解决的技术问题是提供一种球化率高的球形氮化钛的制备方法。本发明方法采用射频等离子体设备为反应装置,以氢化钛粉为原料,以氮气为反应气体,一步制备得到氮化钛粉末,其工艺流程短、反应时间极短,大大提高了生产效率,获得的产品无杂质污染,制备工艺简单,对原料要求较低,为实现球形氮化钛粉末的工业化生产奠定了基础。采用本发明方法制备得到的球形氮化钛粉末,球化率和氮化率都很高。制备原料不需要大量的破碎,其产物粒径小。

The invention relates to a preparation method of spherical titanium nitride, in particular to a method for preparing spherical titanium nitride by using radio frequency plasma powder production equipment. The technical problem solved by the invention is to provide a method for preparing spherical titanium nitride with high spheroidization rate. The method of the present invention adopts radio frequency plasma equipment as a reaction device, uses titanium hydride powder as a raw material, and uses nitrogen as a reaction gas to prepare titanium nitride powder in one step. The process flow is short and the reaction time is extremely short, which greatly improves production efficiency and obtains The product has no impurity pollution, simple preparation process, and low requirements for raw materials, which lays the foundation for the industrial production of spherical titanium nitride powder. The spherical titanium nitride powder prepared by the method of the invention has high spheroidization rate and nitriding rate. The preparation of raw materials does not require a lot of crushing, and the particle size of the product is small.

Description

球形氮化钛的制备方法Preparation method of spherical titanium nitride

技术领域technical field

本发明涉及球形氮化钛的制备方法,具体涉及利用射频等离子体粉末生产设备制备球形氮化钛的方法。The invention relates to a preparation method of spherical titanium nitride, in particular to a method for preparing spherical titanium nitride by using radio frequency plasma powder production equipment.

背景技术Background technique

金属化合物TiN具有许多优良的物理及化学性能,它抗腐蚀性、抗磨损性及抗氧化性都非常优良,具有较高的熔点(3205℃)和硬度1990(×9.8N/mm2)。TiN沉积在首饰和灯具上既可以达到美观效果,又能增强耐磨性能,是代替目前广泛使用的WC的潜在材料,可以大大降低材料应用的成本。TiN化合物具有较高的生物兼容性,在临床医学和口腔医学方面也具有很高的应用价值。此外TiN也可用作制造坩埚、切削刀具、添加剂等。TiN粉末的应用广度和深度与它所拥有的优异性能极不相称,有待人们研究开发,可以预示,氮化钛粉末将会成为世纪新材料。The metal compound TiN has many excellent physical and chemical properties. It has excellent corrosion resistance, wear resistance and oxidation resistance, and has a high melting point (3205°C) and a hardness of 1990 (×9.8N/mm 2 ). TiN deposition on jewelry and lamps can not only achieve aesthetic effect, but also enhance wear resistance. It is a potential material to replace WC, which is widely used at present, and can greatly reduce the cost of material application. TiN compounds have high biocompatibility, and also have high application value in clinical medicine and stomatology. In addition, TiN can also be used to make crucibles, cutting tools, additives, etc. The breadth and depth of application of TiN powder are not commensurate with its excellent properties. It needs to be researched and developed by people. It can be predicted that titanium nitride powder will become a new material of the century.

随着对TiN研究的不断深入,制备TiN粉末的方法也越来越多。传统的TiN粉末制备方法,如:金属钛粉氮化法、二氧化钛碳热还原氮化法、气相法等得到的TiN粉末形状不规则,流动性较差,使用性能大打折扣,而且氮化率不高,氮化时间较长,粒径范围较宽,能源消耗大。到目前为止,还没有行之有效而且含盖以上问题的解决办法。With the continuous deepening of research on TiN, there are more and more methods for preparing TiN powder. Traditional TiN powder preparation methods, such as: metal titanium powder nitriding method, titanium dioxide carbothermal reduction nitriding method, gas phase method, etc., obtain TiN powder with irregular shape, poor fluidity, greatly reduced performance, and low nitriding rate. High, the nitriding time is longer, the particle size range is wider, and the energy consumption is large. So far, there is no effective solution that covers the above problems.

与非球形的氮化钛粉末相比,球形氮化钛的机械性能在各个方向都是一样的,在粉末冶金和3D打印中更容易获得性能优异的产品。因此,急需一种制备工艺简单,球化率高球形氮化钛的制备方法。Compared with non-spherical titanium nitride powder, the mechanical properties of spherical titanium nitride are the same in all directions, and it is easier to obtain products with excellent performance in powder metallurgy and 3D printing. Therefore, there is an urgent need for a method for preparing spherical titanium nitride with simple preparation process and high spheroidization rate.

专利200410072553.4公开了一种反应等离子喷涂纳米晶氮化钛粉末的方法,采用等离子喷枪来进行喷涂,具体包括的主要步骤是:钛粉装入送粉器,送入混合离子气体、向反应室中通氮气,送钛粉粉末进入焰流,向盛水的容器中喷涂和收集,采用该方法,能够得到直径为30~100nm的氮化钛粉末颗粒,但是,该方法需要纯钛粉为原料,先期需要制备不同粒径的钛粉末颗粒,再来进行氮化。制备工艺复杂,设备要求高。更重要的是,纯钛粉在空气中易氧化,形成钛氧化物。这对于氮化来说是不利的。另外,纯钛粉的自燃危险要大很多,生产的安全要求更高。送钛粉粉末进入焰流,向盛水的容器中喷涂和收集过程中,其能量损失大。且得到的氮化钛球形度不好,球化率需要进一步的提高。Patent 200410072553.4 discloses a method for reactive plasma spraying nanocrystalline titanium nitride powder, using a plasma spray gun for spraying, specifically including the main steps: titanium powder into the powder feeder, into the mixed ion gas, into the reaction chamber Nitrogen is passed through, titanium powder is sent into the flame flow, sprayed and collected in a container containing water, and titanium nitride powder particles with a diameter of 30-100nm can be obtained by using this method. However, this method requires pure titanium powder as a raw material. In the early stage, it is necessary to prepare titanium powder particles of different particle sizes, and then carry out nitriding. The preparation process is complicated and the equipment requirements are high. More importantly, pure titanium powder is easily oxidized in air to form titanium oxide. This is disadvantageous for nitriding. In addition, the danger of spontaneous combustion of pure titanium powder is much greater, and the safety requirements for production are higher. Sending titanium powder into the flame flow, spraying and collecting in the water container, the energy loss is large. Moreover, the sphericity of the obtained titanium nitride is not good, and the spheroidization rate needs to be further improved.

发明内容Contents of the invention

针对以上缺陷,本发明解决的技术问题是提供一种制备工艺简单,球化率高的球形氮化钛的制备方法。In view of the above defects, the technical problem to be solved by the present invention is to provide a method for preparing spherical titanium nitride with simple preparation process and high spheroidization rate.

本发明球形氮化钛的制备方法,采用射频等离子体设备制备得到,具体包括如下步骤:The preparation method of spherical titanium nitride of the present invention is prepared by radio frequency plasma equipment, and specifically comprises the following steps:

a、起弧:以氩气为电离气体起弧,同时将氮气从射频等离子体设备的保护气体入口处通入;控制射频等离子设备的工作电压为5~15kV,功率为30~200kW;a. Arcing: Argon is used as the ionized gas to start the arc, and nitrogen is introduced from the protective gas inlet of the radio frequency plasma equipment at the same time; the working voltage of the radio frequency plasma equipment is controlled to be 5-15kV, and the power is 30-200kW;

b、送料:待弧稳定后,控制通入的氩气和氮气的流量比为1:20~10:1,然后由送料装置送入氢化钛粉,得到球形氮化钛。b. Feeding: After the arc is stabilized, the flow ratio of argon gas and nitrogen gas is controlled to be 1:20-10:1, and then titanium hydride powder is fed by the feeding device to obtain spherical titanium nitride.

优选的,a步骤中,待弧稳定后,将电离气体变为氩气和氮气的混合气体。Preferably, in step a, after the arc is stabilized, the ionized gas is changed to a mixed gas of argon and nitrogen.

优选的,所述氩气和氮气的混合气体中,氩气和氮气的体积比为1:5~10:1。Preferably, in the mixed gas of argon and nitrogen, the volume ratio of argon and nitrogen is 1:5˜10:1.

进一步优选的,所述氩气和氮气的混合气体中,优选氩气和氮气的体积比为1:2~3:1。Further preferably, in the mixed gas of argon and nitrogen, preferably, the volume ratio of argon and nitrogen is 1:2˜3:1.

优选的,b步骤中,氢化钛粉的粒径为10~400μm。Preferably, in step b, the particle size of the titanium hydride powder is 10-400 μm.

进一步优选的,所述氢化钛粉采用振动进料,其振幅为10~80%。Further preferably, the titanium hydride powder is fed by vibration with an amplitude of 10-80%.

与现有技术相比,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明采用射频等离子体设备为反应装置,以氢化钛粉为原料,以氮气为反应气体,一步制备得到氮化钛粉末,其工艺流程短、反应时间极短,大大提高了生产效率,获得的产品无杂质污染,制备工艺简单,对原料要求较低,为实现球形氮化钛粉末的工业化生产奠定了基础。The present invention uses radio frequency plasma equipment as the reaction device, uses titanium hydride powder as the raw material, and nitrogen as the reaction gas to prepare titanium nitride powder in one step. The process flow is short and the reaction time is extremely short, which greatly improves the production efficiency and obtains The product has no impurity pollution, simple preparation process and low requirements on raw materials, which lays a foundation for realizing the industrialized production of spherical titanium nitride powder.

采用本发明方法制备得到的球形氮化钛粉末,球化率和氮化率都很高。制备原料不需要大量的破碎,其产物粒径小。The spherical titanium nitride powder prepared by the method of the invention has high spheroidization rate and nitriding rate. The preparation of raw materials does not require a lot of crushing, and the particle size of the product is small.

本发明不仅适用于球形氮化钛粉的制备,也适用于球形氮化锆粉和其它氮化球粉的制备。The invention is not only applicable to the preparation of spherical titanium nitride powder, but also applicable to the preparation of spherical zirconium nitride powder and other nitride spherical powders.

附图说明Description of drawings

图1为本发明制备的氮化钛的XRD图。Figure 1 is an XRD pattern of titanium nitride prepared in the present invention.

图2为本发明制备的氮化钛的SEM图。Fig. 2 is an SEM image of titanium nitride prepared in the present invention.

具体实施方式Detailed ways

本发明球形氮化钛的制备方法,采用射频等离子体设备制备得到,具体包括如下步骤:The preparation method of spherical titanium nitride of the present invention is prepared by radio frequency plasma equipment, and specifically comprises the following steps:

a、起弧:以氩气为电离气体起弧,同时将氮气从射频等离子体设备的保护气体入口处通入;控制射频等离子设备的工作电压为5~15kV,功率为30~200kW;a. Arcing: Argon is used as the ionized gas to start the arc, and nitrogen is introduced from the protective gas inlet of the radio frequency plasma equipment at the same time; the working voltage of the radio frequency plasma equipment is controlled to be 5-15kV, and the power is 30-200kW;

b、送料:待弧稳定后,控制通入的氩气和氮气的流量比为1:20~10:1,然后由送料装置送入氢化钛粉,在等离子体炬中氢化钛粉脱氢、球化的同时直接氮化,得到半熔态的氮化钛;b. Feeding: After the arc is stabilized, the flow ratio of argon gas and nitrogen gas is controlled to be 1:20-10:1, and then the titanium hydride powder is fed by the feeding device, and the titanium hydride powder is dehydrogenated in the plasma torch. Direct nitriding while spheroidizing to obtain semi-molten titanium nitride;

c、球化:半熔态的氮化钛在表面张力的作用下,冷却凝固成球形。c. Spheroidization: Under the action of surface tension, the semi-molten titanium nitride is cooled and solidified into a spherical shape.

射频等离子体粉末球化技术为现有的技术,其原理是在高频电源作用下,惰性气体被电离,形成稳定的高温惰性气体等离子体;而形状不规则的原料经送料装置送入等离子体炬中,在高温等离子体中吸收大量的热,表面迅速熔化,并以极高的速度进入反应器,在惰性气氛下快速冷却,在表面张力的作用,冷却凝固成球形粉末。而本发明通过控制射频等离子体设备的电压、功率以及通入特定种类的气体和特定的气体流量等参数,实现在等离子体炬中氢化钛粉脱氢、球化的同时直接氮化,得到球形氮化钛。其反应原理为:The radio frequency plasma powder spheroidization technology is an existing technology. The principle is that under the action of a high frequency power supply, the inert gas is ionized to form a stable high temperature inert gas plasma; and the raw materials with irregular shapes are sent into the plasma through the feeding device. In the torch, a large amount of heat is absorbed in the high-temperature plasma, and the surface is rapidly melted, and enters the reactor at a very high speed, and is rapidly cooled in an inert atmosphere. Under the action of surface tension, it is cooled and solidified into a spherical powder. However, the present invention realizes direct nitriding while dehydrogenating and spheroidizing titanium hydride powder in the plasma torch by controlling the voltage and power of the radio-frequency plasma equipment, and introducing specific types of gas and specific gas flow rates to obtain a spherical shape. Titanium nitride. Its reaction principle is:

TiH2=Ti+H2 TiH 2 =Ti+H 2

2Ti+N2=2TiN2Ti+N 2 =2TiN

本发明方法,上述两步反应均在通入氩气和氮气的射频等离子高温场条件下一步进行。首先,氩气从射频等离子体设备中心通入,即电离气体入口处通入,而氮气从射频等离子体设备边缘通入,即保护气体入口处通入。这样氩气流易于产生等离子流,将氢化钛物料进行高温分解。氮气从射频等离子体粉末生产设备边缘通入可使氮化反应更加完全。该方法获得的氮化钛球化率和氮化率较高,球化和氮化同时进行,大大提高了生产效率。In the method of the present invention, the above two-step reactions are all carried out in the next step under the condition of a high-temperature radio frequency plasma field fed with argon and nitrogen. First, the argon gas is introduced from the center of the radio frequency plasma equipment, that is, the ionized gas inlet, and the nitrogen gas is passed from the edge of the radio frequency plasma equipment, that is, the shielding gas inlet. In this way, the argon flow is easy to generate a plasma flow, and the titanium hydride material is pyrolyzed. Nitrogen is introduced from the edge of the RF plasma powder production equipment to make the nitriding reaction more complete. The titanium nitride spheroidization rate and nitriding rate obtained by the method are high, and the spheroidization and nitriding are carried out simultaneously, which greatly improves the production efficiency.

为了提高球化率,优选的,a步骤中,以氩气为电离气体起弧,得到氩弧,待氩弧稳定后,将电离气体变为氩气和氮气的混合气体,此时,将会形成氩气氮气弧。等离子体炬中的氮气电离作为反应热源的同时又作为反应物,与钛粉在高温下反应直接得到球形氮化钛粉末,不仅可节约反应能源消耗,还能提高产品纯度和球化率。In order to improve the spheroidization rate, preferably, in step a, use argon as the ionized gas to start the arc to obtain an argon arc. After the argon arc is stabilized, change the ionized gas into a mixed gas of argon and nitrogen. At this time, the An arc of argon and nitrogen is formed. Nitrogen ionization in the plasma torch acts as a reaction heat source and as a reactant at the same time, reacting with titanium powder at high temperature to directly obtain spherical titanium nitride powder, which can not only save reaction energy consumption, but also improve product purity and spheroidization rate.

更优选的,所述氩气和氮气的混合气体中,氩气和氮气的体积比为1:5~10:1,更优选的,氩气和氮气的体积比为1:2~3:1。电离气体为混合气体时,仍需控制通入的总的氩气和总的氮气的流量比为1:20~10:1。本发明中,无论氮气还是氩气,流量的单位均采用m3/h。More preferably, in the mixed gas of argon and nitrogen, the volume ratio of argon to nitrogen is 1:5 to 10:1, more preferably, the volume ratio of argon to nitrogen is 1:2 to 3:1 . When the ionized gas is a mixed gas, it is still necessary to control the flow ratio of the total argon gas and the total nitrogen gas to be 1:20-10:1. In the present invention, regardless of nitrogen or argon, the flow unit is m 3 /h.

常用的氢化钛粉的粒径均适用于本发明,优选的,b步骤中,氢化钛粉的粒径为40~100μm。The particle size of commonly used titanium hydride powder is suitable for the present invention. Preferably, in step b, the particle size of titanium hydride powder is 40-100 μm.

作为优选方案,所述氢化钛粉采用振动进料,其振幅为10~80%,这样可以使得氢化钛粉的反应更加完全,提高氮化率。As a preferred solution, the titanium hydride powder is fed by vibration with an amplitude of 10-80%, which can make the reaction of the titanium hydride powder more complete and increase the nitriding rate.

下面结合实施例对本发明的具体实施方式做进一步的描述,并不因此将本发明限制在所述的实施例范围之中。The specific implementation of the present invention will be further described below in conjunction with the examples, and the present invention is not limited to the scope of the examples.

实施例1Example 1

采用射频等离子体粉末生产设备生产球形氮化钛粉末。设置射频等离子体粉末生产设备的进料装置的振幅为20%,工作电压10.5kV,功率48kW。“边气”(即保护气体入口)通入氮气,“中气”(即电离气体入口)先通入氩气起弧,待弧稳定后再通入氩气和氮气的混和气,控制氮气流量与氩气流量比率为2:1,送料反应5min收料,制备得到球形氮化钛粉末。其XRD图谱见图1,SEM图谱见图2。球化率达到80%,氮化率为83%。Spherical titanium nitride powder is produced by radio frequency plasma powder production equipment. The amplitude of the feeding device of the radio frequency plasma powder production equipment is set at 20%, the operating voltage is 10.5kV, and the power is 48kW. "Side gas" (that is, the protective gas inlet) is fed with nitrogen, and "middle gas" (that is, the ionized gas inlet) is first fed with argon to start the arc, and then the mixed gas of argon and nitrogen is fed into the arc after the arc is stable to control the nitrogen flow The ratio of the flow rate to the argon gas is 2:1, and the material is fed and reacted for 5 minutes to receive the material, and the spherical titanium nitride powder is prepared. Its XRD spectrum is shown in Figure 1, and its SEM spectrum is shown in Figure 2. The spheroidization rate reaches 80%, and the nitriding rate is 83%.

其中,球化率采用扫描电镜进行形貌观察球化数量获得。氮化率采用能谱仪测定样品表面并结合X射线衍射仪分析结果获得。Among them, the spheroidization rate is obtained by observing the spheroidization number by scanning electron microscope. The nitriding rate is obtained by measuring the surface of the sample with an energy spectrometer and combining with the analysis results of an X-ray diffractometer.

实施例2Example 2

采用射频等离子体粉末生产设备生产球形氮化钛粉末。设置射频等离子体粉末生产设备的进料装置的振幅为22%,工作电压11.5kV,功率55kW。“边气”(即保护气体入口)通入氮气,“中气”(即电离气体入口)通入氩气起弧,氮气流量与氩气流量比率为1:1。待弧稳定后送入氢化钛,送料反应5min收料,测得氮化钛粉末质量为27g。其XRD图谱与图1类似,SEM图谱与图2类似。球化率达到82%,氮化率为76%。Spherical titanium nitride powder is produced by radio frequency plasma powder production equipment. The amplitude of the feeding device of the radio frequency plasma powder production equipment is set at 22%, the operating voltage is 11.5kV, and the power is 55kW. The "edge gas" (that is, the protective gas inlet) is fed with nitrogen, and the "middle gas" (that is, the ionized gas inlet) is fed with argon to start the arc. The ratio of nitrogen flow to argon flow is 1:1. After the arc is stabilized, titanium hydride is fed in, and the feeding reaction takes 5 minutes to collect. The mass of titanium nitride powder is measured to be 27g. Its XRD pattern is similar to Figure 1, and its SEM pattern is similar to Figure 2. The spheroidization rate reaches 82%, and the nitriding rate is 76%.

实施例3Example 3

采用射频等离子体粉末生产设备生产球形氮化钛粉末。设置射频等离子体粉末生产设备的进料装置的振幅为24%,工作电压8kV,功率40kW。“边气”(即保护气体入口)通入氮气,“中气”(即电离气体入口)先通入氩气起弧,待弧稳定后再通入氩气和氮气的混和气,氮气流量与氩气流量比率为3:2,送料反应5min收料,测得氮化钛粉末质量为28g。其XRD图谱与图1类似,SEM图谱与图2类似。球化率达到88%,氮化率为78%。Spherical titanium nitride powder is produced by radio frequency plasma powder production equipment. The amplitude of the feeding device of the radio frequency plasma powder production equipment is set at 24%, the operating voltage is 8kV, and the power is 40kW. "Side gas" (i.e. the inlet of protective gas) is fed with nitrogen, "middle gas" (i.e. the inlet of ionized gas) is firstly fed with argon gas to start the arc, and then the mixed gas of argon and nitrogen is fed in after the arc is stable. The flow rate of nitrogen gas is the same as that of The flow ratio of argon gas is 3:2, and the feeding reaction takes 5 minutes to receive the material, and the measured mass of titanium nitride powder is 28g. Its XRD pattern is similar to Figure 1, and its SEM pattern is similar to Figure 2. The spheroidization rate reaches 88%, and the nitriding rate is 78%.

实施例4Example 4

采用射频等离子体粉末生产设备生产球形氮化钛粉末。设置射频等离子体粉末生产设备的进料装置的振幅为10%,工作电压15kV,功率200kW。“边气”(即保护气体入口)通入氮气,“中气”(即电离气体入口)先通入氩气起弧,待弧稳定后再通入氩气和氮气的混和气,氮气流量与氩气流量比率为3:20,送料反应5min收料,测得氮化钛粉末质量为19g。其XRD图谱与图1类似,SEM图谱与图2类似。球化率达到91%,氮化率为56%。Spherical titanium nitride powder is produced by radio frequency plasma powder production equipment. The amplitude of the feeding device of the radio frequency plasma powder production equipment is set to be 10%, the working voltage is 15kV, and the power is 200kW. "Side gas" (i.e. the inlet of protective gas) is fed with nitrogen, "middle gas" (i.e. the inlet of ionized gas) is firstly fed with argon gas to start the arc, and then the mixed gas of argon and nitrogen is fed in after the arc is stable. The flow rate of nitrogen gas is the same as that of The flow ratio of argon gas was 3:20, and the feeding reaction was 5 minutes to receive the material. The mass of titanium nitride powder was measured to be 19g. Its XRD pattern is similar to Figure 1, and its SEM pattern is similar to Figure 2. The spheroidization rate reaches 91%, and the nitriding rate is 56%.

实施例5Example 5

采用射频等离子体粉末生产设备生产球形氮化钛粉末。设置射频等离子体粉末生产设备的进料装置的振幅为80%,工作电压12kV,功率60kW。“边气”(即保护气体入口)通入氮气,“中气”(即电离气体入口)先通入氩气起弧,待弧稳定后再通入氩气和氮气的混和气,氮气流量与氩气流量比率为9:10,送料反应5min收料,测得氮化钛粉末质量为42g。其XRD图谱与图1类似,SEM图谱与图2类似。球化率达到81%,氮化率为68%。Spherical titanium nitride powder is produced by radio frequency plasma powder production equipment. The amplitude of the feeding device of the radio frequency plasma powder production equipment is set at 80%, the operating voltage is 12kV, and the power is 60kW. "Side gas" (i.e. the inlet of protective gas) is fed with nitrogen, "middle gas" (i.e. the inlet of ionized gas) is firstly fed with argon gas to start the arc, and then the mixed gas of argon and nitrogen is fed in after the arc is stable. The flow rate of nitrogen gas is the same as that of The flow ratio of argon gas is 9:10, and the feeding reaction takes 5 minutes to receive the material. The mass of titanium nitride powder is measured to be 42g. Its XRD pattern is similar to Figure 1, and its SEM pattern is similar to Figure 2. The spheroidization rate reaches 81%, and the nitriding rate is 68%.

Claims (6)

1. the preparation method of spherical titanium nitride, it is characterised in that:Be prepared using radio frequency plasma equipment, specifically include as Lower step:
A, the starting the arc:Using argon gas as the ionized gas starting the arc, while by nitrogen at the gas atmosphere inlet of radio frequency plasma equipment It is passed through;The operating voltage for controlling radio frequency plasma equipment is 5~15kV, and power is 30~200kW;
B, feeding:After arc stabilization, it is 1 to control the flow-rate ratio of the argon gas being passed through and nitrogen:20~10:1, then by feed device Hydride powder is sent into, obtains spherical titanium nitride.
2. the preparation method of spherical shape titanium nitride according to claim 1, it is characterised in that:In a steps, after arc stabilization, Ionized gas is become to the mixed gas of argon gas and nitrogen.
3. the preparation method of spherical shape titanium nitride according to claim 2, it is characterised in that:The mixing of the argon gas and nitrogen In gas, the volume ratio of argon gas and nitrogen is 1:5~10:1.
4. the preparation method of spherical shape titanium nitride according to claim 3, it is characterised in that:The mixing of the argon gas and nitrogen In gas, preferably the volume ratio of argon gas and nitrogen is 1:2~3:1.
5. according to the preparation method of Claims 1 to 4 any one of them spherical shape titanium nitride, it is characterised in that:In b step, hydrogen The grain size for changing titanium valve is 10~400 μm.
6. according to the preparation method of Claims 1 to 5 any one of them spherical shape titanium nitride, it is characterised in that:The titantium hydride Powder is fed using vibration, and amplitude is 10~80%.
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