CN108061639B - Large dynamic range and high precision phase difference method wavefront measuring instrument combined with adaptive optics technology - Google Patents
Large dynamic range and high precision phase difference method wavefront measuring instrument combined with adaptive optics technology Download PDFInfo
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Abstract
The invention discloses a large dynamic range and high precision phase difference wavefront measuring instrument combining with self-adaptive optics technology, which consists of a light source laser, a parallel light collimation system, a light beam conjugation-matching system, a wavefront corrector, a phase difference wavefront sensor and a high performance computing and processing system, wherein the wavefront measuring instrument comprises: a plurality of groups of accurately known phase difference information are introduced into the phase difference wavefront sensor by using the wavefront corrector to form multi-channel phase difference wavefront distortion constraint, so that the aberration detection range and sensitivity of the traditional phase difference method are remarkably improved; the wavefront corrector, the phase difference wavefront sensor and the high-performance calculation processing system are utilized to form an adaptive optics wavefront aberration closed-loop correction-measurement system, the corrected residual aberration is continuously detected, so that the distorted light wave after phase compensation gradually and finally approaches to an ideal optical plane light wave, and the correction value of the wavefront corrector is the accurate numerical value of the wavefront aberration to be detected.
Description
Technical field
The invention belongs to adaptive optics and field of optical detection, and in particular to a kind of combining adaptive optical technology it is big
Dynamic range, high-precision phase position difference method wavefront measurement instrument.
Background technique
Optical detection based on wavefront measurement technology is an important development direction in contemporary optics.19th-century 60
The invention of age laser provides good coherent illumination source for wavefront measurement technology, and electronic technology and computer skill
The rapid development of art, but promote the multi-disciplinary new technology such as light, mechanical, electrical can integrated application in wavefront measurement, greatly expand
The realization rate and application range of wavefront measurement technology.As a kind of untouchable measurement method, wavefront measurement technology is wide
It is general to apply in the fields such as Physical Experiment, optical device and system detection, Beam diagnostics and adaptive optics.Comparative maturity at present
Wavefront measuring method is broadly divided into four kinds: interferometry, slope measurement method, curvature measurement method and the inverting based on ionization meter
Method, the corresponding Wavefront sensor of these technologies have respective advantage and disadvantage.
Interferometry is a kind of Direct Phase measurement method, it is by the way that distorted wavefront to be measured and standard flat light wave advance
Row compares, so that wavefront measurement data are obtained, exemplary device such as Michelson, Mach-Zehnder interferometer etc..Interferometer tool
There are high spatial sample rate, high measurement accuracy, is widely used in the fields such as optical detection, the measurement of flow field optical chromatography, mesh
The companies such as preceding Wyko, Zygo and Precision-optical Engineering have released the interferometer product of commercialization,
But structure is complicated for interferometry Wavefront measuring apparatus, and external shock, temperature change etc. can bring large error to measurement result, limit
Its application in engineering adverse circumstances is made；On the other hand, interferometry is by interference fringe picture record Wave-front phase letter
Breath, and interference fringe extracts and processes that method is more complex, is unsuitable for the wave-front optical aberration measurement of acute variation at any time, and work as
When aberration scale to be measured is larger, interference fringe is overstocked, which to will lead to phase measurement, to calculate, and people develop infrared interference thus
Instrument and visible optical interferometer are respectively applied to the environment of Larger Dynamic range and high-precision wave-front optical aberration measurement, but due to measuring wavelength
Physical limit, they cannot all be provided simultaneously with the ability of Larger Dynamic range and high-precision aberration measurement.It is surveyed for conventional interference
The deficiency of amount method, Huang is of heap of stone etc. to propose a kind of free form surface Technology of Precision Measurement (the Lei Huang of SPGD combination interferometry
etc.Adaptive interferometric null testing for unknown freeform optics
Metrology, Opt.Letters, 2016.41 (23): 5539~5542.), this method can improve interferometry to a certain extent
To the measurement range of geometric curved surfaces aberration, but when in aberration to be measured including more high-frequency components, SPDG searching algorithm is difficult to
Realize effective convergence of initial hot spot, interferometry measurement process will be unable to continue；Furthermore based on the measuring technique of interferometry
It is only applicable to point target measurement object at present, the aberration measurement for extending target cannot be applied to.
The exemplary device of slope measurement method is Hartmann wave front sensor (Hartmann-Shark wavefront
Sensor, HS-WFS), it is made of microlens array and centroid detection device, the basic principle is that will by microlens array
Wavefront division to be measured assumes that the light wave in sampling unit is approximately plane light wave at several sampling units, these samplings are single
The light wave of member converges to the centroid detection device positioned at focal plane by each independent lenticule respectively, forms discrete hartmann diaphragm
Spot image, the inclination of wave front in each sub-aperture will cause facula mass center in the offset in horizontal and vertical direction, and corresponding sampling is single
The light wave of member can be obtained by wavefront to be measured using sub-aperture wavefront slope combination restoration algorithm in the wavefront slope of both direction
Aberration.Hartmann wave front sensor is widely used to adaptive optical with its higher measurement real-time, suitable measurement accuracy
, mirror surface detection, laser parameter measurement, human eye aberration measurement, beam path alignment etc..But Hartmann wave front sensor passes through micro-
Lens array carries out discrete sampling to corrugated to be measured, and space sampling frequency is usually lower, is appropriate only for geometrical aberration detection at present,
It is difficult to apply to high-precision and discontinuous wave-front optical aberration measurement.
Curvature wavefront sensor was proposed that measurement process is by acquiring light wave warp to be measured by Roddier in 1988 earliest
Light distribution on two equidistant-defocus faces of lens convergence, and corrugated to be measured is obtained by solving corresponding Poisson's equation
Phase distribution, basic thought derives from geometric optics, if there are phase distortions, i.e. Wave-front phase each point curvature on corrugated to be measured
Difference, then difference will be present in the light distribution on two defocus faces, and a defocus face somewhere light intensity increases, another defocus faces
Answering the light intensity of position will weaken.Curvature wavefront sensor has been used in astronomical telescope adaptive optics system at present, excellent
Point is that structure is simple, real-time is good, but to the low measurement accuracy of high spatial frequency aberration, can not be applied to high-precision wavefront
Aberration measurement.
Phase difference method (Phase Diversity, PD) belongs to ionization meter inversion technique, earliest by Gonsalves and
Chidlaw was put forward for the first time in 1979, and pointed out that it can be not only used for the wave of point-sourcre imaging system in subsequent research
Preceding detection can also be applied to Wavefront detecting and the image restoration of expansion target system, thus by grinding extensively both at home and abroad
Study carefully and pay close attention to (Wang Xin etc., phase change method Brief on Development [J] optical technology, 2009,35 (3): 454~460).Phase difference
The essence of wavefront measurement technology be acquire simultaneously incident light wave two width or several there are the far field images of phase difference, utilizing
Known phase difference to wavefront distortion constrain in the case where, by the light distribution of these images be calculated wavefront phase information and
Unknown object image.Phase difference Wavefront sensor compare Detection Techniques before conventional wave advantage include optical texture it is simple, to device
Part is suitable for point target and extension target aberration measurement etc. without particular/special requirement, and can be used for continuous aberration and splice to hope
The remote discontinuous aberration detection such as mirror and sparse aperture telescope (etc.A phase diversity
experiment to measure piston misalignment of the segmented primary mirror of
The Keck II telescope [C] .Proc.SPIE, 1998,3356:190~201).Due to phase difference wavefront sensing methods
The far-field spot image of acquisition includes more high-frequency information, therefore has very high detectivity and precision, but conventional phase
Poor method is iterated operation (Yu Xuegang, phase as known phase different information only with the defocus aberration for being easy to obtain in optical path
Potential difference wave front detector designs [M] Postgraduate School, Chinese Academy of Sciences master thesis .2008；Chinese patent, one kind being based on phase
The human eye difference measuring system of potential difference, Xuan Li etc., publication number: CN20205027561U, 2011.11；Chinese patent, one kind are based on
The phase difference Wavefront sensor of combined prism, Luo Qun etc., application number: 201210027766.X, 2012.02；Chinese patent, it is a kind of
Phase difference wavefront measurement imaging device based on differential optical, Bao Hua etc., publication number: ZL201210180083.8,2012.04),
Not nearly enough to the constraint of optimization algorithm abundant, if aberration scale to be measured is larger, algorithm easily falls into office in solution procedure
Portion's optimal solution can not even restrain, therefore phase difference Wavefront sensor technology currently in use can't realize Larger Dynamic model
It encloses and high-precision wave-front optical aberration measurement.
Summary of the invention
Technical problem solved by the invention is: all can not be simultaneously for current existing various wave-front optical aberration measurement technologies
The deficiency for realizing Larger Dynamic range and high-precision wave-front optical aberration measurement, is put forward for the first time a kind of adaptive optical technique combination phase difference
The novel wavefront measurement instrument of Wavefront sensor, the closed-loop corrected-measuring system and multichannel phase constructed through the invention are poor
Constrained procedure can realize Larger Dynamic range, high-precision wave-front optical aberration measurement to point light source system and extension target simultaneously.
The present invention solve above-mentioned technical problem the technical solution adopted is that: a kind of Larger Dynamic of combining adaptive optical technology
Range, high-precision phase position difference method wavefront measurement instrument, including light source laser, directional light colimated light system, the first spectroscope, to test sample
Product, light beam conjugation-matching system, the second spectroscope, wave-front corrector, phase difference Wavefront sensor and high-performance calculation processing system
System；Light source laser issues illuminating bundle, and directional light colimated light system collimates illuminating bundle for parallel light wave, and parallel light wave is through the
Sample to be tested is illuminated after the reflection of one spectroscope, and sample to be tested is reflected back the distortion light wave comprising aberration to be measured, and distortion light wave is through the
One spectroscope enters light beam conjugation-matching system, and light beam conjugation-matching system makes wave-front corrector, phase difference Wavefront sensor
It is in optical conjugate position with sample to be tested, the light wave that distorts enters wave-front corrector through the second spectroscope, and wave-front corrector is to abnormal
Darkening wave introduces accurately known phase difference φkAnd the second spectroscope is reflexed to, the second spectroscope is again by modulated distortion
Light wave reflection to phase difference Wavefront sensor, high-performance calculation processing system utilizes the far field light of phase difference Wavefront sensor acquisition
The known phase difference Δ φ that spot image and wave-front corrector introducekDistorted wavefront phase distribution is calculated, solution procedure uses
Optimization algorithm is iterated calculating to formula (1) and (2), and wave-front corrector is driven to carry out phase compensation to distortion light wave,
Distortion light wave after iteration correction will gradually and finally approach perfect optics plane light wave, the school of wave-front corrector load at this time
Positive quantity is the numerical quantities of wave front aberration to be measured；
Formula (1) is optimization objective function to be solved, and K is the far field for the known phase difference modulated by wave-front corrector
Light spot image totalframes, DkIt is kth frame far-field spot image, HkIt is acquisition far-field spot image DkWhen corresponding optical delivery letter
Number；φ is distortion phase of light wave to be measured distribution, Δ φ in formula (2)kIt is and DkCorresponding kth frame known phase is poor, and FFT () is
Fast Fourier Transform (FFT).
It is dynamic, different can to provide multiple groups for phase difference Wavefront sensor for wave-front corrector in technical solution of the present invention
The accurately known phase difference of spatial frequency and scale size, compare conventional phase difference wave, preceding measuring technique rely solely on it is fixed,
Low order defocus aberration constrains wavefront distortion to be asked, and the present invention can be solved effectively in Larger Dynamic range wave-front optical aberration measurement
The convergence problem of optimization algorithm, to greatly improve the investigative range and success rate of phase difference wavefront measurement technology.
Wave-front corrector, phase difference Wavefront sensor and high-performance calculation processing system are constituted in technical solution of the present invention
Adaptive optics closed loop correction system can complete the residual aberration after phase compensation to distortion light wave and carry out multiple closed loop school
N- iteration measurement, compared to the single measurement approach of measuring technique before other conventional waves, the present invention not only can be in measurement process
Collected far-field spot signal noise ratio (snr) of image is stepped up, but also measurement process can be reduced, the precision of intermediate result is wanted
It asks, the light wave that need to only distort gradually approaches perfect optics plane light wave, so that it may realize high-precision wave-front optical aberration measurement.
The principle of the present invention is:
(1) wave-front corrector provides dynamic multiple groups, different space frequency and scale size for phase difference Wavefront sensor
Accurately known phase difference, according to the mathematical principle of optimization algorithm using multichannel known phase difference to wavefront distortion
Constraint is more abundant, and the solution ability of phase difference algorithm is stronger, to effectively solve in Larger Dynamic range wave-front optical aberration measurement feelings
The convergence problem of phase difference method under condition.
(2) wave-front corrector, phase difference Wavefront sensor and high-performance calculation processing system constitute adaptive optics closed loop
Correction-measuring system, phase difference Wavefront sensor continues the residual aberration after adaptive optics correction in iterative process
Measurement, on the basis of residual aberration is gradually reduced, distortion light wave finally will approach perfect optics plane light wave, to obtain height
Precision wavefront aberration measurement.
(3) adaptive optics it is closed-loop corrected-measurement process in, wave-front corrector will persistently add up to distortion light wave to be measured
Phase compensation, when the distortion light wave after correction approaches perfect optics plane light wave, wave-front corrector load correcting value be
For the exact value of wave front aberration to be measured.
The present invention has the following advantages compared with prior art:
(1) optical texture simple and stable of the present invention, does not need additional auxiliary device, and high-performance calculation processing system is direct
Far-field spot image and known phase difference information inverting distorted wavefront phase distribution using acquisition；
(2) present invention uses closed-loop corrected-measuring system and multichannel phase difference constrained procedure, passes through a set of measuring device
Larger Dynamic range, high-precision wave-front optical aberration measurement can be realized simultaneously to point light source system and extension target；
(3) after the high-acruracy survey of the invention that can not only obtain distorted wavefront is as a result, can also in real time aberration correction be monitored
Far-field spot intensity distribution, pass through the reliability in far field and Near-field Data comprehensive descision aberration measurement result.
Above-mentioned advantage possessed by the present invention provides a kind of novel Larger Dynamic range, high-precision for contemporary optics detection
Wave-front optical aberration measurement technology is spent, there is significant practical value.
Detailed description of the invention
Fig. 1 is a kind of Larger Dynamic range of combining adaptive optical technology proposed by the present invention, high-precision phase position difference method wave
Preceding wavefront aberrometer light channel structure figure；
Fig. 2 is a kind of Larger Dynamic range of combining adaptive optical technology proposed by the present invention, high-precision phase position difference method wave
Preceding measuring instrument work flow diagram；
Fig. 3 is that the present invention utilizes the portion that wave-front corrector is that phase difference Wavefront sensor introduces accurately known phase information
Divide high-order corrugated schematic diagram；
Fig. 4 is the experimental result using apparatus of the present invention measuring wavefront aberrations, wherein Fig. 4 (a) is to pass through wave-front corrector
The known distorted wavefront to be measured of load, Fig. 4 (b) and Fig. 4 (c) are one group of known phase difference of phase difference Wavefront sensor acquisition
Far-field spot image, Fig. 4 (d) is measurement result of the apparatus of the present invention to known distortion aberration, Fig. 4 (e) be measurement result with
Residual error (rms < 18.0nm) between known distorted wavefront, Fig. 4 (f) are the far fields completed after phasing to distorted wavefront
Light spot image.
Specific embodiment
With reference to the accompanying drawing and specific embodiment further illustrates the present invention.
As shown in Figure 1, a kind of Larger Dynamic range of combining adaptive optical technology of the present invention, high-precision phase position difference method wavefront
Measuring instrument, by light source laser 1, directional light colimated light system 2, the first spectroscope 3, sample to be tested 4, light beam conjugation-matching system
5, the second spectroscope 6, wave-front corrector 7, phase difference Wavefront sensor 8 and high-performance calculation processing system 9 form.Wherein light source
Laser 1 issues illuminating bundle, and directional light colimated light system 2 is collimated for parallel light wave, the reflection of the first spectroscope 3 by illuminating bundle
Parallel light wave illuminates sample to be tested 4, and sample to be tested 4 is reflected back the distortion light wave comprising aberration to be measured, and the light wave that distorts is through first point
Light microscopic 3 enters light beam conjugation-matching system 5, and light beam conjugation-matching system 5 ensures wave-front corrector 7, phase difference wavefront sensing
Device 8 and sample to be tested 4 are in optical conjugate position, and distortion light wave enters wave-front corrector 7, wavefront correction through the second spectroscope 6
Device 7 introduces the accurately known phase difference information of multiple groups in distortion light wave, constitutes multichannel phase difference wavefront distortion constraint, the
Two spectroscopes 6 are acquired by modulated distortion light wave reflection to phase difference Wavefront sensor 8, and by phase difference Wavefront sensor 8
Corresponding far-field spot image, high-performance calculation processing system 9 utilize multiple groups far-field spot image and known phase difference information meter
Calculation obtains distorted wavefront phase distribution, and 7 pairs of distortion light waves of wave-front corrector is then driven to carry out phase compensation；Hereafter phase difference wave
Front sensor 8 resurveys the far-field spot image of the residual aberration after wavefront correction, and high-performance calculation processing system 9 repeats
Complete subsequent phase compensation work, the above process constitute adaptive optics wave front aberration it is closed-loop corrected-measuring system, through iteration school
Distortion light wave after just finally will approach perfect optics plane light wave, and the correcting value of wave-front corrector 7 is wavefront to be measured at this time
The exact value of aberration.
Measuring instrument workflow is as shown in Fig. 2, high-performance calculation processing system 9 is being distorted using control wave-front corrector 7
The accurately known phase difference information of multiple groups is introduced in light wave, and is controlled phase difference Wavefront sensor 8 and acquired corresponding far field light
Spot image；Mathematical process is iterated operation to formula (1) and (2) using optimization algorithm, obtains height after calculated result
The control control 7 pairs of distortion light waves of wave-front corrector of performance calculation processing system 9 carry out phase compensation；Far-field spot after correction
When meeting evaluation index, system exits workflow, otherwise re-executes above-mentioned closed loop correction process.
Formula (1) is optimization objective function to be solved, and K is the remote of the known phase difference modulated by wave-front corrector 7
Field light spot image totalframes, DkIt is kth frame far-field spot image, HkIt is acquisition far-field spot image DkWhen corresponding optical delivery
Function；φ is distortion phase of light wave to be measured distribution, Δ φ in formula (2)kIt is and DkCorresponding kth frame known phase is poor, FFT ()
For Fast Fourier Transform (FFT)；
Fig. 4 is the experimental result using apparatus of the present invention measuring wavefront aberrations, wherein Fig. 4 (a) is to pass through wave-front corrector
The known distorted wavefront to be measured of load, Fig. 4 (b) and Fig. 4 (c) are one group of known phase difference of phase difference Wavefront sensor acquisition
Far-field spot image, Fig. 4 (d) is measurement result of the apparatus of the present invention to known distortion aberration, Fig. 4 (e) be measurement result with
Residual error (rms < 18.0nm) between known distorted wavefront, Fig. 4 (f) are the far fields completed after phasing to distorted wavefront
Light spot image, far-field spot has been approached diffraction limit Airy disk at this time, can demonstrate again that distorted wavefront after phase compensation
Approach perfect optics plane light wave；It is greater than 5um, measurement accuracy by the measurement range corrugated rms of experimental verification apparatus of the present invention
Corrugated rms is better than 20nm.
In short, the present invention constructs the closed loop school that a kind of adaptive optical technique and phase difference Wavefront sensor combine
N- measuring system, and use multichannel phase difference constrained procedure effectively improves the detection model of conventional phase difference Wavefront detecting technology
It encloses and sensitivity；Larger Dynamic range and high-precision wave-front optical aberration measurement, optics can be realized simultaneously by a set of measuring device
Simple and stable structure, does not need additional auxiliary device, and measurement object is suitable for point light source system and extends the wavefront picture of target
Difference measurements；While obtaining high-acruracy survey result, after correction can also being monitored in real time by phase difference Wavefront sensor
Far-field spot intensity distribution passes through the reliability in far field and Near-field Data comprehensive descision aberration measurement result.The present invention is to optics
Primary mirror processing, the detection of detection field, especially large-aperture optical telescope are of great significance.
Part of that present invention that are not described in detail belong to the well-known technology of those skilled in the art.
Claims (4)
1. a kind of Larger Dynamic range of combining adaptive optical technology, high-precision phase position difference method wavefront measurement instrument, it is characterised in that:
Including light source laser (1), directional light colimated light system (2), the first spectroscope (3), sample to be tested (4), light beam conjugation-matching system
System (5), the second spectroscope (6), wave-front corrector (7), phase difference Wavefront sensor (8) and high-performance calculation processing system (9)；
Light source laser (1) issues illuminating bundle, and directional light colimated light system (2) collimates illuminating bundle for parallel light wave, parallel light wave
Sample to be tested (4) are illuminated after the first spectroscope (3) reflection, sample to be tested (4) is reflected back the distortion light wave comprising aberration to be measured,
Distortion light wave enters light beam conjugation-matching system (5) through the first spectroscope (3), and light beam conjugation-matching system (5) makes wavefront school
Positive device (7), phase difference Wavefront sensor (8) and sample to be tested (4) are in optical conjugate position, and the light wave that distorts is through the second spectroscope
(6) enter wave-front corrector (7), wave-front corrector (7) introduces accurately known phase difference φ to distortion light wavekAnd it reflexes to
Second spectroscope (6), the second spectroscope (6) is again by modulated distortion light wave reflection to phase difference Wavefront sensor (8), Gao Xing
It can far-field spot image and wave-front corrector (7) introducing of the calculation processing system (9) using phase difference Wavefront sensor (8) acquisition
Known phase difference Δ φk, be calculated distorted wavefront phase distribution, solution procedure using optimization algorithm to formula (1) and
(2) it is iterated calculating, and wave-front corrector (7) is driven to carry out phase compensation to distortion light wave, the distortion after iteration correction
Light wave will gradually and finally approach perfect optics plane light wave, and the correcting value of wave-front corrector (7) load at this time is wave to be measured
The exact value of preceding aberration；
Formula (1) is optimization objective function to be solved, and K is the far field for the known phase difference modulated by wave-front corrector (7)
Light spot image totalframes, DkIt is kth frame far-field spot image；φ is distortion phase of light wave to be measured distribution, Δ φ in formula (2)kBe with
DkCorresponding kth frame known phase is poor, and FFT () is Fast Fourier Transform (FFT).
2. a kind of Larger Dynamic range of combining adaptive optical technology according to claim 1, high-precision phase position difference method wave
Preceding measuring instrument, it is characterised in that: it is dynamic, different that wave-front corrector (7) can provide multiple groups for phase difference Wavefront sensor (8)
The accurately known phase difference information of spatial frequency and scale size constitutes multichannel phase difference wavefront distortion constraint, significantly mentions
The investigative range and sensitivity of high conventional phase difference method effectively solve the phase difference in Larger Dynamic range wave-front optical aberration measurement
The convergence problem of Wavefront detecting technology.
3. a kind of Larger Dynamic range of combining adaptive optical technology according to claim 1, high-precision phase position difference method wave
Preceding measuring instrument, it is characterised in that: wave-front corrector (7), phase difference Wavefront sensor (8) and high-performance calculation processing system (9)
Constitute adaptive optics wave front aberration it is closed-loop corrected-measuring system, phase difference Wavefront sensor is to adaptive optical in measurement process
School just after residual aberration carry out continuing detection put down so that distortion light wave after phase compensation finally will approach perfect optics
Face light wave, the correcting value of wave-front corrector (7) is the exact value of wave front aberration to be measured at this time.
4. a kind of Larger Dynamic range of combining adaptive optical technology according to claim 1, high-precision phase position difference method wave
Preceding measuring instrument, it is characterised in that: wave-front corrector (7) is LCD space light modulator, piezoelectric ceramics distorting lens or MEMS deformation
Mirror.
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| CN115307876B (en) * | 2022-08-04 | 2023-04-18 | 长沙思木锐信息技术有限公司 | Near-far field common-path optical detection system, construction method and imaging method |
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