CN1079989C

CN1079989C - Process for producing semiconductor article

Info

Publication number: CN1079989C
Application number: CN97122707A
Authority: CN
Inventors: 坂口清文; 米原隆夫
Original assignee: Canon Inc
Current assignee: Canon Inc
Priority date: 1996-11-15
Filing date: 1997-11-14
Publication date: 2002-02-27
Anticipated expiration: 2017-11-14
Also published as: ATE212476T1; CN1183635A; EP0843344B1; TW483162B; DE69710031D1; US5966620A; SG65697A1; ES2171252T3; KR19980042471A; KR100279332B1; CA2221100C; AU722796B2; DE69710031T2; CA2221100A1; AU4518297A; EP0843344A1; MY124554A

Abstract

A novel process for producing a semiconductor article is disclosed which comprises the steps of preparing a first substrate constituted of a silicon substrate, a nonporous semiconductor layer formed on the silicon substrate, and an ion implantation layer formed in at least one of the silicon substrate and the nonporous semiconductor layer; bonding the first substrate to a second substrate to obtain a multiple layer structure with the nonporous semiconductor layer placed inside; separating the multiple layer structure at the ion implantation layer; and removing the ion implantation layer remaining on the separated second substrate.

Description

Make the technology of semiconductor product

The present invention relates to the manufacturing process of semiconductor product, this technology is suitable for making the semiconductor device as semiconductor integrated circuit, solar cell, semiconductor laser or light-emitting diode etc.Be particularly related to the manufacturing process that comprises the semiconductor product of the step of semiconductor growth layer to the substrate.

Semiconductor product is often referred to semiconductor wafer, Semiconductor substrate and various semiconductor device, and comprises device that utilizes semiconductor region to make semiconductor device and the device that is used as the prefabricated component of making semiconductor device.

This based semiconductor device of being considered is included in the semiconductor layer that is provided with on the insulator.

The technology that forms the monocrystalline silicon semiconductor layer on insulator is called silicon-on-insulator (SOI) technology, and this technology is well-known.Now carried out various researchs and explored the noticeable advantage of SOI, SOI can not obtain with the body Si substrate of making conventional Si integrated circuit.The advantage of SOI technology comprises:

1. be easy to dielectric isolation, can increase integrated level;

2. good radiation resistance;

3. minimizing floating capacitance improves the operating rate of device;

4. save trap and formed step;

5. prevented latch-up; And

6. make and utilize the full depletion field effect transistor of thin film technique manufacturing to become possibility.At 63 volumes of Journalof Crystal Growth, No.3 has at large discussed the advantage of SOI technology as special topic in the article " monocrystalline silicon on the on-monocrystalline insulator " that pp429-590 (1983) G.W.Cullen edits.

The report (IEEE SOI conference 1994) of many SOI technology about the substrate that is used to provide the high operation speed that can realize MOSFET and low power consumption is disclosed in recent years.If compare,, use the process for fabrication of semiconductor device of soi structure to reduce effectively owing to carried out the device isolation step of simplifying very much with the technology of on body Si wafer, making device.Therefore, if make the routine techniques of MOSFET or IC, particularly with regard to wafer cost and technology cost, use the SOI technology can reduce the manufacturing cost of semiconductor device, the remarkable characteristic of let alone this semiconductor device significantly from body Si substrate.

Suppose to improve driving power, exhaust MOSFET entirely and get a good chance of obtaining high operation speed and low power consumption.In general, the threshold voltage of MOSFET (Vth) is by the function decision of the impurity concentration of its channel part, and for exhausting (FD) MOSFET entirely, the characteristic of depletion layer is subjected to the soi film thickness effect.Therefore, the thickness of strict control soi film, so that improve the rate of finished products of making LSI.

Simultaneously, particularly with regard to high operation speed and luminous with regard to, the device that forms on compound semiconductor demonstrates outstanding characteristic, this is that silicon device is incomparable.This device is that epitaxial growth forms on the compound semiconductor substrate that GaAs or similar compounds are made at present.Yet the compound semiconductor substrate cost is very high and mechanical performance is strong inadequately, so be unsuitable for producing wafer.

Therefore, now studied and carry out heterogenous junction epitaxy growth formation compound substrate on the Si wafer, this substrate is cheap, mechanical strength is high and be suitable for producing wafer.

Just noticeable about the research that forms the SOI substrate at the seventies.At first, concern is to carry out epitaxial growth to make the technology of monocrystalline silicon (SOS: silicon on sapphire), promptly isolate (FIPOS) and oxonium ion injection technique manufacturing soi structure fully by porous silica on Sapphire Substrate.The FIPOS method may further comprise the steps: inject (Imai et al., J.CrystalGrowth, Vol.63,547 (1983)) or epitaxial growth and composition by proton/ion, form the N type Si layer of isolating on the P type single crystalline Si substrate; Only P type silicon Si substrate is grown in the porous substrate by anodization in HF solution; Cover the Si island from the surface; By accelerated oxidation dielectric isolation is carried out on N type Si island then.Yet also there is a problem in this technology, limits the Si district that isolates before the technology of making device, has limited the degree of freedom of designs.

The oxonium ion injection method also is called the SIMOX method, is proposed first by K.Izumi.Use this technology, the oxygen ion concentration rank that is injected in the Si wafer is 10 ¹⁷-10 ¹⁸/ cm ², in the atmosphere of argon gas/oxygen, under about 1,320 ℃ high temperature, the Si wafer is annealed then.As a result, the oxonium ion of injection and Si atom chemical combination produce silicon oxide layer, and the degree of depth of gathering is corresponding to the projected range (Rp) of injecting ion.In the case, the top of injecting the Si oxide layer become amorphous state by oxonium ion again crystallization produce single crystal Si layer.And surperficial Si layer demonstrates up to 10 ⁵/ cm ²Ratio of defects, present technical development is by selecting about 4 * 10 ¹⁷/ cm ²The oxygen charge velocity, ratio of defects can be dropped to about 10 ²/ cm ²Yet if the film quality of the degree of crystallinity of surperficial Si layer and Si oxide layer remains on required rank respectively, the allowed band that energy injects and ion injects is restricted so, therefore surperficial Si layer and the Si oxide (BOX that buries; The oxide of burying) film thickness can only be got limited numerical value.In other words, sacrificial oxidation or epitaxially grown technology have the requisite technology of desired thickness for forming.Conversely, owing to the intrinsic transoid effect of this technology, produced the problem of membrane thickness unevenness.

Report that also SIMOX can produce defective Si zoneofoxidation in the Si oxide layer, be called pipe (pipes).One of possible cause that causes this phenomenon is to enter in the layer in ion injection period as the foreign matter of dust etc.Because the leakage current between active layer and the following substrate makes the device that is produced in the area under control demonstrate characteristic and descends.

The SIMOX technology is used a large amount of ions, the amount that its amount is used in the conventional semiconductor technology, and therefore, if use custom-designed device, ion implantation technology needs for a long time.Because ion implantation technology is generally by the ion beam raster scan of the electric current with predetermined flow velocity or by disperseing ion beam to carry out, so the growth wafer needs for a long time.In addition, when at high temperature growing wafer, temperature distributing disproportionation is even in the wafer can make performance degradation (slip) problem become more serious.Because the SIMOX technological requirement is used up to 1,320 ℃ very high temperature, this does not observe in conventional Si semiconductor technology, if the preparation wafer, the even problem of temperature distributing disproportionation can become more serious, does not have very effective device not realize.

Except the formation SOI known technology of above introduction, proposed the single crystalline Si substrate binding is produced to another single crystalline Si substrate that carries out thermal oxidation the technology of soi structure recently.The active layer that this method requires to have uniform thickness is formed on the device.Particularly, thickness is that the single crystalline Si substrate of hundreds of micron will be made and is as thin as several microns or littler.The attenuate single crystal Si layer is known three kinds of technology:

(1) polishing

(2) local plasma etching

(3) selective corrosion

Be difficult to obtain uniform film thickness by above polishing technology (1).Particularly, when film will be thinned to the sub-micron order of magnitude, the deviation of film thickness made that greatly to tens percent this technology is infeasible.For having large diameter wafer, this problem is especially remarkable.

Technology (2) generally is used in combination with technology (1).Specifically, thickness is thinned to about 1 to 3 μ m, by observe the distribution that film thickness decides film thickness at many somes place by technology (1).Then, at the SF that with diameter is several millimeters ₆Operation is corroded to film in plasma particulate scan place, and the distribution of calbrating film thickness is until reaching required film thickness.Have that report can be with the distribution limitation of film thickness at pact ± 10nm or littler by this technology.Yet also there is deficiency in this technology, if there is the graininess foreign matter to exist on substrate during the plasma etching, when the corrosion EO, carry out the projection on many etching masks formation substrates.

In addition, because corrosion operation back substrate surface at once can be very coarse,, only during the contact polishing operation, control so after plasma etching finishes, contact polishing (touch-polishing) operation from the teeth outwards.Then, the film thickness deviation that causes owing to polishing occurs once more.Moreover the polishing agent that generally contains silica gel (colloidal sliica) is used for polishing operation, so the polishing agent direct friction makes the layer of active layer, scratches and/or is out of shape so may produce.When handling wafer, have functional relation because the wafer surface of the prolongation in the cycle of plasma etching operation and production is long-pending, so the output of technology obviously descends.

Comprising the technology (3) of using the membrane structure be thinned substrate comprises and optionally corrodes one or more layers film.For example, suppose to contain more than 10 ¹⁹/ cm ³P ⁺Type Si thin layer and P type Si thin layer are grown in successively by epitaxial growth and form first substrate on the P type substrate, it is bonded on second substrate then, insulating barrier is inserted between the two, and insulating barrier is generally oxide-film, at first makes the rear surface of first substrate become enough thin by friction and polishing.Subsequently, expose P by the P type layer above the selective corrosion ⁺Layer, selective corrosion P then ⁺Layer exposes P type substrate, forms soi structure.This technology has detailed discussion (W.P.Maszara, J.Electrochem.Soc., Vol.138,341 (1991)) in the report of Maszara.

Though selective corrosion can produce the film with uniform films thickness effectively, also has the following disadvantages.

-selective corrosion is than unsatisfactory, and is very low, and at the most 10 ²

-because the corrosion operation produces rough surface, so need to contact polishing with smooth surface after the corrosion operation.Therefore, along with the attenuate that polishing is carried out, film thickness is no longer even.Particularly, when polishing operation was controlled by the operation cycle, constantly alter a great deal, so be difficult to strict control operation because polishing speed is different.Therefore, when formation was as thin as the SOI as thin as a wafer of 100nm, this problem became and can not ignore.

-owing to use the film formation technology of on the Si of heavy doping B layer, carrying out ion injection and extension or heterogenous junction epitaxy growth, so the soi layer that produces demonstrates relatively poor degree of crystallinity.In addition, with respect to conventional Si wafer, the gluing of surfaces of substrate may demonstrate relatively poor evenness (C.Harendt, et al., J.Elect.Mater.Vol.20,267 (1991), H.Baumgart, et al., ExtendedAbstract of ECS first International symposium of Wafer Bonding, pp-733 (1991), C.E.Hunt, Extended Abstract of ECS firstInternational symposium of Wafer Bonding, pp-696 (1991)).Moreover, the selective corrosion Technology Selection depend on to a great extent be contained in the substrate as the concentration difference between the impurity of boron etc. and impurity precipitous degree along the CONCENTRATION DISTRIBUTION of the substrate degree of depth.Therefore, if bonding annealing is at high temperature carried out improving the adhesive strength of layer, and epitaxial growth also at high temperature carries out to strengthen the degree of crystallinity of soi layer, and the impurities concentration distribution along the degree of depth becomes smooth so, has reduced the selectivity of corrosion operation.Briefly, the requirement with the raising adhesive strength conflicts mutually with degree of crystallinity to improve the selectivity of corroding, and can not satisfy simultaneously.

In these cases, the present inventor proposes a kind of novel method of making semiconductor product in Japanese patent gazette No.5-21338.According to this invention, the method that proposes is characterised in that following steps: the nonporous monocrystalline semiconductor region is set in the porous monocrystalline semiconductor district, surface adhesion that insulating material is arranged on it to the corresponding surface in described porous monocrystalline semiconductor district, is removed described porous monocrystalline semiconductor district with post-etching and formed product.

People such as the present inventor T.Yonehara claim also that with regard to uniform films thickness and degree of crystallinity bonding SOI (bonded SOI) is very good, can produce (T.Yonehara et al., Appl.Phys.Lett.Vol.64,2108 (1994)) in batches.Now, Fig. 3 A in conjunction with the accompanying drawings introduces the method for making bonding SOI to 3C summing-up ground.

The method that is proposed uses the porous layer 42 that forms on the Si substrate 41 as the layer of wanting selective etching.Form nonporous monocrystalline Si layer 43 by epitaxial growth on porous layer 42, it is bonded on second substrate 44, Si oxide layer 45 is clipped in therebetween (Fig. 4 A).Then, by wipe first substrate off from rear side, on the whole surface of first substrate, expose porous Si layer (Fig. 4 B).Then by generally containing KOH or HF+H ₂O ₂The selective corrosion solution porous Si that will expose erode (Fig. 4 C).Because with respect to corrosion body Si layer (nonporous monocrystalline Si layer), the selective corrosion ratio of this technology corrosion porous Si layer is up to hundreds of thousands, the nonporous monocrystalline Si layer growth that at first is formed on the porous layer forms the SOI substrate to second substrate, can not reduce the thickness of nonporous monocrystalline Si layer.Therefore, during epitaxial growth steps, can determine the uniform film thickness of SOI substrate.According to the report of Sato et al., can be used as epitaxial growth owing to be suitable for the CVD system of conventional semiconductor technology, so can realize uniform films thickness up to 100nm ± 2%.In addition, the Si layer of extension demonstrates and is about 3.5 * 10 ²/ cm ²Good degree of crystallinity.

As mentioned above, because any conventional selective corrosion Technology Selection largely depends on the concentration difference of the impurity that substrate contains and the impurity precipitous degree along the CONCENTRATION DISTRIBUTION of the substrate degree of depth, the temperature limitation of therefore heat treatment (bonding, epitaxial growth, oxidation or the like) be 800 ℃ at the most, is owing to becoming mild in the above impurities concentration distribution of this temperature limit.On the other hand, the corrosion rate of the corrosion technology that proposes mainly by the decision of the architectural difference between porous layer and the body layer, so can not carry out the restriction of this strictness to heat treatment, can be used the temperature up to 1,180 ℃.Now be known in and heat-treated technology after the bonding operation and can improve adhesive strength between wafer and void size that can reduce to produce on the bonding interface and quantity significantly.In addition, because the selective corrosion operation depends on the architectural difference between porous layer and the body layer, the molecule that adheres on the porous Si layer can not have a negative impact to the uniformity of film thickness.

Yet, require at least two wafers as original material inevitably by the Semiconductor substrate of technique for sticking manufacturing, one of them is wasted in polishing and corrosion process basically, has consumed the limited natural resource with getting nowhere.In other words, except the controllable degree of enhanced process and improve the uniformity of thickness, also require SOI worker artistic skill to realize low-cost and economic feasibility.

Change an angle and say, the technological requirement of making high-quality SOI substrate comprises good reproducibility, strengthens ability and the low manufacturing cost that economizes on resources by reusing identical wafer.

In this case, the present inventor discloses a kind of technology of making Semiconductor substrate in Japanese patent gazette No.7-302889, wherein two substrate bindings together, bonding substrate is at the porous layer place separately, after removing remaining porous layer, can reuse substrate separately.Introduce an example of the disclosure technology below in conjunction with Fig. 5 A and 5C.

The superficial layer of the one Si substrate 51 is made porous and is formed porous layer 52, and single crystal Si layer 53 forms thereon then.Single crystal Si layer on the one Si substrate bonds on the first type surface of the 2nd Si substrate 54, and insulating barrier 55 is clipped in therebetween (Fig. 5 A).Wafer separates (Fig. 5 B) at the porous layer place then.Optionally remove the porous Si layer that exposes on second substrate surface, form SOI substrate (Fig. 5 C).After removing porous layer, can reuse first substrate 51.

In the disclosed above technology of Japanese patent gazette No.7-302889, with respect to the atresia silicon layer, used the fragility of porous silicon layer that substrate is separated, can reuse the used substrate of semiconductor technology, to reduce production costs.

Disclose a kind of technology among the Japanese patent gazette No.8-213645, the semiconductor layer that wherein is used for the photoelectric conversion section of solar cell is formed on porous Si layer, at the porous layer place semiconductor layer is separated afterwards, reuses the substrate with porous silicon layer.

On the other hand, Japanese patent gazette No.5-211128 discloses the another kind of technology of not using this porous silicon layer separate substrate.In this technology, be infused in by ion and form bubble layer in the silicon substrate, crystal rearranges, and causes that by heat treatment bubble is coalescent in bubble layer, and exhume at the bubble layer place in surface of silicon substrate district (being called the film, semiconductor film).Film, semiconductor film in this is open is meant the outermost regions of the body Si that does not almost inject ion.Yet, known body Si wafer contains inherent shortcoming (the T.Abe:Extended Abst.Electrochem.Soc.Spring Meeting just like drift net (flowpattern) etc., Vol.95-1, pp.596 (May, 1995)) and come from the particle (H.Yamamoto: " Problems in Large-Diameter Silicon Wafer " of crystal, 23thUltra Clean Technology College (August, 1996)).Therefore, the film, semiconductor film also has drift net defective and the particle that comes from crystal naturally.

If semiconductor film can separate and not have the drift net defective and come from the particle of crystal with silicon substrate, the technology with above-mentioned use porous silicon is different so, in fact can provide the semi-conducting material of usefulness at low cost.From above problem,, finished the present invention through comprehensive investigation.

The object of the present invention is to provide a kind of technology of making semiconductor product, comprise the step that two substrates that part substrate place is bonding use as the material of semiconductor product again.

According to a scheme of the present invention, a kind of technology of making semiconductor product is provided, may further comprise the steps: preparation comprises first substrate of silicon substrate, and the nonporous semiconductor layer is formed on the silicon substrate, forms ion implanted layer in the one deck at least in silicon substrate and nonporous semiconductor layer; First substrate binding is obtained nonporous semiconductor to second substrate be placed on sandwich construction in it, separate sandwich construction at the ion implanted layer place; And remove ion implanted layer on second substrate of staying separation.

According to another aspect of the present invention, a kind of technology of making semiconductor product is provided, may further comprise the steps: preparation comprises first substrate of silicon substrate, and the nonporous semiconductor layer is formed on the silicon substrate, forms ion implanted layer in the one deck at least in silicon substrate and nonporous semiconductor layer; First substrate binding is obtained nonporous semiconductor to second substrate be placed on sandwich construction in it; Separate sandwich construction at the ion implanted layer place; Remove the ion implanted layer on second substrate of staying separation; After removing the ion implanted layer that stays, once more first substrate is used as first backing material.

In accordance with yet a further aspect of the invention, a kind of technology of making semiconductor product is provided, may further comprise the steps: preparation comprises first substrate of silicon substrate, and the nonporous semiconductor layer is formed on the silicon substrate, forms ion implanted layer in the one deck at least in silicon substrate and nonporous semiconductor layer; First substrate binding is obtained nonporous semiconductor to second substrate be placed on sandwich construction in it; Separate sandwich construction at the ion implanted layer place; Remove the ion implanted layer on second substrate of staying separation; After removing the ion implanted layer that stays, once more first substrate is used as second backing material.

In making the technology of semiconductor product, first substrate has and is used for bonding nonporous semiconductor layer.The nonporous semiconductor layer preferably is made of epitaxial semiconductor layer.Use this nonporous semiconductor layer, can make high-quality semiconductor product, and do not have the intrinsic drift net defective of above-mentioned silicon wafer or come from the particle of crystal.Owing to can control the conduction type and the impurity concentration of nonporous semiconductor layer at an easy rate, can satisfy different requirements so the present invention makes the technology of semiconductor product, and can be applied to various uses.

Separate at the ion implanted layer place by the sandwich construction that first substrate and second substrate binding are obtained together, the part that the silicon substrate of the first remaining substrate can be used as first substrate or second substrate reuses, and helps resources conservation like this and reduces cost.

The invention provides a kind of technology of making semiconductor product, for form the single-crystal semiconductor layer with high-crystallinity on second substrate that is made of insulation or similar substrate, this semiconductor product has good productivity ratio, controllability, and low-cost.

Figure 1A, 1B, 1C, 1D and 1E are the constructed profile of introducing embodiments of the invention 1 technology.

Fig. 2 A, 2B, 2C, 2D and 2E are the constructed profile of introducing embodiments of the invention 2 technologies.

Fig. 3 A, 3B and 3C are the constructed profile of introducing embodiments of the invention 3 technologies.

Fig. 4 A, 4B and 4C are the constructed profile of introducing prior art processes.

Fig. 5 A, 5B and 5C are the constructed profile of introducing another prior art processes.

Introduce the present invention below in conjunction with embodiment. To achieve the object of the present invention, the present invention is not limited In this. [ion implanted layer]

Helium ion or hydrogen ion are injected in the monocrystalline substrate, and forming diameter in the injection region in substrate is the micropore (micro-cavities) of a few to tens of nanometers, and the density of micropore is up to 10¹⁶- 10 ¹⁷/cm ² Therefore, silicon substrate has the structure of similar porous layer. Implantation adopts in the present invention Ion be selected from the ion of rare gas element, hydrogen and nitrogen. In the present invention, ion implanted layer forms In in the nonporous semiconductor layer on silicon substrate and silicon substrate at least one, or be formed on their boundary The face place. Can form two or more ion implanted layers. Consider by first substrate and second substrate sticking The layer that connects the sandwich construction of formation separates, so the ion implantation dosage of ion implanted layer is preferably in 10¹⁶To 10¹⁷/cm ²Scope in. The thickness of ion implanted layer depends on accelerating potential, generally is no more than 500 Dust, consider that multiple layer separates after, the uniformity of the nonporous semiconductor layer thickness on second substrate, Preferably be no more than 200 dusts. Ion concentration in the implanted layer distributes along the layer thickness direction. The multilayer knot The layer of structure separates along the horizontal plane of high ion concentration and carries out. [nonporous semiconductor layer]

Nonporous semiconductor layer among the present invention preferably by be selected from single crystalline Si, polysilicon, amorphous silicon and As GaAs, InP, GaAsP, GaAlAs, InAs, AlGaSb, InGaAs, ZnS, The compound semiconductor materials of CdSe, CdTe and SiGe etc. forms. In the nonporous semiconductor layer, can Introduce in advance the semiconductor element such as FET (field-effect transistor). [first substrate]

First substrate among the present invention comprises silicon substrate, is formed on the nonporous semiconductor layer on the silicon substrate, With the ion implanted layer that is formed in silicon substrate and the nonporous semiconductor layer at least one. Therefore, first Substrate comprises that not only ion implanted layer forms silicon substrate and nonporous semiconductor layer in the inner, also comprises attached Add substrate just like the insulating barrier of nitride film and oxide-film, have the semiconductor layer of extension and be formed on silicon The substrate of the insulating barrier on substrate and the ion implanted layer that subsequently Implantation formed in the silicon substrate, Have and be formed on silicon substrate and nonporous semiconductor layer on the ion implanted layer that forms of Implantation subsequently Substrate, and similar substrate.

The nonporous semiconductor layer that forms on the silicon substrate can be by auxiliary such as low pressure chemical vapor deposition, plasma CVD, light Help (photo-assisted) CVD, and the CVD of MOCVD (metallorganic CVD) etc., spatter Penetrate (comprising bias sputtering), molecular beam epitaxial growth, liquid growth, or similarly method forms. [second substrate]

Nonporous semiconductor layer growth second substrate thereon comprises the semiconductor lining such as monocrystalline substrate The end, have such as the substrate of the dielectric film of oxide-film (comprising heat oxide film) and nitride film, such as silica The light-transmissive substrates of glass substrate and glass substrate, metal substrate, such as the dielectric substrate of alumina, and class Like substrate. The application of semiconductor product is depended in the suitable selection of second substrate. [bonding]

Above-mentioned first substrate binding obtains the nonporous semiconductor layer to second substrate in the present invention Put sandwich construction in the inner. In the present invention, has nonporous semiconductor stratification multilayer knot in the inner Structure comprises that not only the nonporous semiconductor layer of first substrate directly bonds to the structure of second substrate, also comprises The oxide-film, the nitride film that form on nonporous semiconductor layer surface, or similar film bonds to second substrate Structure. That is, have nonporous semiconductor stratification structure in the inner and refer to that the nonporous semiconductor layer is arranged on Sandwich construction in the sandwich construction in the porous silicon layer.

For example, at room temperature, make two bonding planes become smooth,, thereby first substrate and second substrate binding are in the same place both closely contacts mutually.Anodically-bonded, push, or heat treatment can form more firm bonding.[layer of sandwich construction separates]

Sandwich construction separates at the ion implanted layer place in the present invention.Ion implanted layer has micropore or small bubble in it, compares more crisp with other zone.Therefore, utilize fragility to separate effectively.More specifically, ion implanted layer being applied external force separates.In addition, can utilize from the periphery of wafer and separate to the internal oxidation ion implanted layer, the accelerated oxidation of the porous part by ion implanted layer expands the volume of layer, thereby by expansive force layer is separated.

Ion implanted layer is also covered by non-porous layer in peripheral part usually.Before or after bonding, the peripheral part of ion implanted layer or end face all should expose.When bonding substrate is carried out oxidation, owing to the oxidation reaction that quicken in large-area hole will be from the peripheral part of ion implanted layer.By Si is oxidized to SiO ₂, volume increases by 2.27 times.Therefore, porousness is no more than at 56% o'clock, and the ion implanted layer volume of oxidation increases.The degree of oxidation is diminished to inside gradually by peripheral part, makes that the ion implanted layer of oxidation is bigger in the peripheral part volumetric expansion, seems that a wedge enters into ion implanted layer from the end face of wafer.Therefore, internal pressure affacts ion implanted layer and makes the separation of ion implanted layer genetic horizon.Because oxidation reaction is carried out equably at the peripheral part of wafer, and the periphery of wafer is separated equably, therefore separated sandwich construction.By this method, utilize Si-IC technology oxidation step commonly used to control the even separation of wafer satisfactorily.

Also can on the ion implanted layer of fragility, produce thermal stress sandwich construction is separated stratification by heating.

Only can utilize also that heating will separate layer laser, by localized heating rather than heat whole sandwich construction sandwich construction is separated stratification.Therefore, can utilize and to be separated by the laser beam of the ion implanted layer of porous or the absorption of its near zone.

Can also carry out the separation of sandwich construction by ion implanted layer or its near zone that applies electric current Fast Heating porous.[removing porous layer]

The sandwich construction that produces by bonding first substrate and second substrate is after the ion implanted layer place separates, and the ion implanted layer of staying on the substrate utilizes the low mechanical strength of ion implanted layer or high surface area optionally to remove.The method that selectivity is removed comprises as polishing or the Mechanical Method of grinding, uses the chemical corrosion method of etchant solution and as the ion etching method of reactive ion etching.

When nonporous film is single crystalline Si, optionally corrode ion implanted layer and can use at least a in the following solution: Si etchant solution, hydrofluoric acid solution, hydrofluoric acid solution and ethanol commonly used and at least a mixed solution in the hydrogen peroxide, the hydrofluoric acid solution of buffering, and hydrofluoric acid solution that cushions and at least a mixed solution in ethanol and the hydrogenperoxide steam generator.When the nonporous semiconductor layer comprised compound semiconductor, can use than compound semiconductor had the etchant solution of higher rate corrosion Si to erode ion implanted layer.

Introduce embodiments of the invention below in conjunction with accompanying drawing.

Embodiment 1

Figure 1A is the constructed profile of embodiments of the invention 1 step to 1E.

At first, on the first type surface of first substrate 11 of single crystalline Si, form a non-porous layer 12 (Figure 1A) at least.Because the characteristic of the SOI substrate that produces depends on non-porous layer 12, so single crystalline Si substrate 11 can be not specify the wafer of resistance or common regeneration (regenerated) wafer.In addition, can be with SiO ₂Layer 13 forms outermost layer.This SiO ₂Layer can be used to break away from bonding interface from active layer.

By using by the first type surface injection ion (Figure 1B) of at least a element in rare gas, hydrogen and the nitrogen by first substrate.Be preferably in the near interface between first single crystalline substrate 11 and the non-porous layer 12 or in non-porous layer 12, form ion accumulation layer 14.

The surface of second substrate 15 for example at room temperature closely contacts (Fig. 1 C) with the surface of first substrate.

When the deposit single crystalline Si, the surface of single crystalline Si is preferably in bonding before by thermal oxidation or similar approach oxidation.In Fig. 1 C, second substrate and first substrate closely bond, and insulating barrier 13 is positioned at wherein.When thin layers of non-porous 12 is not to be made of Si, or second substrate is not when being made of Si, and this insulating barrier 13 can omit.

When bonding, can insert the thin insulating plate, three flaggies can be bonding overlappingly.

Then, separate substrate (Fig. 1 D) at ion accumulation layer 14 place.The method of separating comprises to be used as presses, pulls out, cuts and the external force method of wedging etc.; Use heating; Use the internal stress that expands and produce by oxidation periphery porous Si; The stress that use produces by PULSE HEATING; Make it deliquescing, but be not limited to these.

By the method for mentioning in the past ion accumulation layer 14 is optionally removed respectively from the substrate that separates.

What Fig. 1 E showed is semiconductor product prepared in accordance with the present invention.On second substrate 15, on entire wafer, be formed uniformly thin layers of non-porous 12, for example thin single crystal Si film.Just make the viewpoint of the electric device of insulation, by inserting insulating barrier 13 to the semiconductor product of the step preparation of first substrate of great use with second substrate binding.

Substrate 11 can be used as the first single crystalline Si substrate 11, or second substrate 15 reuses.After removing the ion accumulation layer 14 that stays, the surface of first single crystalline substrate 11 is very coarse, and before reusing, the processing substrate makes and has an even surface.

For reusing, replenish because the thickness that layer separates and surface treatment causes reduces with epitaxial growth as the first single crystalline Si substrate 11.Therefore, can use substrate semipermanently, not have thickness loss.

Embodiment 2

Fig. 2 A-2E is the constructed profile of embodiments of the invention 2 steps.

The first single crystalline Si substrate 21 is provided.By using, form ion accumulation layer 22 (Fig. 2 A) within it by the first type surface injection ion of at least a element in rare gas, hydrogen and the nitrogen by first substrate.Be preferably in and inject the preceding SiO of formation of ion ₂Layer 23 makes rough surface to prevent that ion from injecting.Remove SiO ₂After the layer 23, on first type surface, form one deck non-porous layer 24 (Fig. 2 B) at least.

Second substrate, 15 surfaces for example at room temperature closely contact (Fig. 2 C) with the surface of first substrate.

When the deposit single crystalline Si, the surface of single crystalline Si is preferably in bonding before by thermal oxidation or similar approach oxidation.In Fig. 2 C, second substrate and first substrate closely bond, and insulating barrier 25 is therebetween.When thin layers of non-porous 24 is not to be made of Si, or second substrate is not when being made of Si, and this insulating barrier 25 can omit.

Then, separate substrate (Fig. 2 D) at ion accumulation layer 22 place.

Ion accumulation layer 22 is optionally removed respectively from the substrate that separates.

What Fig. 2 E showed is semiconductor product prepared in accordance with the present invention.On second substrate 26, on entire wafer, be formed uniformly thin layers of non-porous 24, for example thin single crystal Si film.Just make the viewpoint of the electric device of insulation, by inserting insulating barrier 25 to the semiconductor product of the step preparation of first substrate of great use with second substrate binding.

Substrate 21 can be used as first single crystalline substrate 21, or second substrate 26 reuses.After removing the ion accumulation layer 22 that stays, the surface of the first single crystalline Si substrate 21 is very coarse, and before reusing, the processing substrate makes and has an even surface.

Embodiment 3

Fig. 3 A-3C is the constructed profile of embodiments of the invention 3 steps.

Shown in Fig. 3 A-3C, shown in embodiment 1 and embodiment 2, use two second substrates simultaneously and handle two Semiconductor substrate of two sides preparation of first substrate.

In Fig. 3 A-3C, numeral 31 is represented first substrate; 32 and 35 is porous layer; 33 and 36 is nonporous film; 34 and 37 is SiO ₂Layer; 38 and 39 is second substrate.Fig. 3 A has shown first substrate 31 and

second substrate

38,39 that bonds to first substrate, 31 surfaces of handling two surfaces with embodiment 1 identical mode.Fig. 3 B has shown the state of the mode identical with embodiment 1 after

porous layer

32,35 separates.Fig. 3 C has shown the state of removing behind the

porous layer

32,35.

Substrate 21 can be used as the first single crystalline Si substrate 31, or second substrate 38 (or 39) reuses.After removing the ion accumulation layer that stays, the surface of the first single crystalline Si substrate 21 is very coarse, and before reusing, the processing substrate makes and has an even surface.

Support substrates

38,39 can be different

mutually.Nonporous film

33,36 can be different

mutually.Insulating barrier

34,37 can omit.

Introduce the present invention particularly below with reference to example.Example 1

On crystal Si substrate (first substrate), under following growth conditions, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.30 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Pass through SiO then ₂Superficial layer injects H with 40keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

SiO ₂Laminar surface contacts with the surface of another Si substrate (second substrate), and bonding substrate is 600 ℃ of annealing down.By annealing, because the loose structure of ion implanted layer, near the projected range that ion injects, bonding substrate is divided into two thin slices.The substrate surface that separates is very coarse.The surface that the hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution optionally corrode second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and remove ion implanted layer fully.

Because the corrosion of nonporous monocrystalline Si is extremely slow, so the minimizing of film thickness almost ignore (about tens dusts).

Therefore, the thick single crystal Si layer of 0.2 μ m is formed on the Si oxide layer.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of bed thickness is 201nm ± 6nm.

Have single crystal Si layer growth substrate thereon in hydrogen atmosphere 1100 ℃ of following heat treatments one hour.Measure by atomic force microscope, with regard to the mean square roughness (average square roughness) of 50 μ m square area, surface roughness is about 0.2nm.This is identical with commercial rank with the Si wafer.

Do not have to find have additional crystal defect to be incorporated into the Si layer, find to have good crystallinity with the transmission electron microscope observation section.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.

For reusing as first substrate, the thickness that replenishes wafer with outer layer growth reduces.Therefore, can use substrate semipermanently.For the second time or in the later use, the thickness of outer layer growth is not 0.30 μ m, but the minimizing of corresponding thickness, ion implanted layer is formed in the epitaxial loayer.Example 2

On single crystalline Si substrate (first substrate), under following growth conditions, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.50 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

Inject H with 50keV from the teeth outwards by epitaxial loayer then ⁺, dosage is 6 * 10 ¹⁶Cm ^-2

Epi-layer surface with have a thick SiO of 500nm ₂The surface of another Si substrate (second substrate) that layer is formed thereon contacts, and bonding substrate is 550 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.The substrate surface that separates is very coarse.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution stir the surface of optionally corroding second substrate simultaneously.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and remove ion implanted layer fully.

Make by polishing and to have an even surface.

Therefore, the thick single crystal Si layer of 0.5 μ m is formed on the Si oxide layer.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of bed thickness is 498nm ± 15nm.

Measure by atomic force microscope, with regard to the mean square roughness of 50 μ m square area, surface roughness is about 0.2nm.This is identical with commercial rank with the Si wafer.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.

For reusing as first substrate, the thickness that replenishes wafer with epitaxial growth reduces.Therefore, can use substrate semipermanently.For the second time or in the later use, the thickness of outer layer growth is not 0.50 μ m, but the minimizing of corresponding thickness, ion implanted layer is formed in the epitaxial loayer.Example 3

On single crystalline Si substrate (first substrate), under following growth conditions, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.30 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Pass through SiO then ₂Laminar surface injects H with 40keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

SiO ₂Laminar surface with have a thick SiO of 500nm ₂The surface of another Si substrate (second substrate) that layer is formed thereon contacts, and bonding substrate is 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.The substrate surface that separates is very coarse.Ion implanted layer remaining on second substrate is optionally corroded in the hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution and stirring.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

Have single crystal Si layer growth substrate thereon in hydrogen atmosphere 1100 ℃ of following heat treatments one hour.Measure by atomic force microscope, with regard to the mean square roughness of 50 μ m square area, surface roughness is about 0.2nm.This is identical with commercial rank with the Si wafer.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 4

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Pass through SiO then ₂Laminar surface 40keV injects H ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

The quartz substrate (second substrate) of fusion (molten) is provided individually.SiO to first substrate ₂Laminar surface and vitreous silica substrate surface carry out plasma treatment, and wash with water.Two surfaces are in contact with one another, bonding substrate is annealed down at 600 ℃.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.Because the loose structure of ion implanted layer, the substrate surface of separation is very coarse.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

Therefore, on transparent quartz substrate, form the thick single crystal Si layer of 0.2 μ m.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of bed thickness is 201nm ± 6nm.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate and reuses.Example 5

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Pass through SiO then ₂Superficial layer injects H with 60keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

Individually, provide Sapphire Substrate (second substrate).SiO to first substrate ₂The laminar surface and second substrate surface carry out plasma treatment, and wash with water.Two surfaces are in contact with one another, bonding substrate is annealed down at 600 ℃.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

Make having an even surface of corrosion by polishing.

Therefore, on Sapphire Substrate, form the thick single crystal Si layer of 0.4 μ m.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of bed thickness is 402nm ± 12nm.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate and reuses.Example 6

On single crystalline Si substrate (first substrate), under following growth conditions, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.60 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Pass through SiO then ₂Superficial layer injects H with 70keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

Individually, provide glass substrate (second substrate).SiO to first substrate ₂The laminar surface and second substrate surface carry out plasma treatment, and wash with water.Two surfaces are in contact with one another, are annealed down at 600 ℃ in bonding surface.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

Make having an even surface of corrosion by polishing.

Therefore, on transparent glass substrate, form the thick single crystal Si layer of 0.5 μ m.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of bed thickness is 501nm ± 15nm.

Also stir the ion implanted layer that optionally corrodes on first substrate simultaneously with 49% the hydrofluoric acid and the mixture of 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate and reuses.Example 7

On single crystalline Si substrate (first substrate), under following growth conditions, by the thick monocrystalline GaAs of MOCVD (Organometallic chemical vapor deposition) epitaxial growth 0.50 μ m.

Source gas: TMG/AsH ₃/ H ₂

Air pressure: 80Torr

Temperature: 700 ℃

On the surface of this GaAs layer, forming thickness is the SiO of 50nm ₂Layer.Then by surperficial SiO ₂Layer injects H with 60keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

The SiO of first substrate ₂Laminar surface contacts with the surface of another Si substrate (second substrate), and bonding substrate is 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.Because the porousness of ion implanted layer, the substrate surface of separation is very coarse.Adopt 1, (mixed proportion=17ml:3g:8ml) is optionally corroded the surface of second substrate to the mixture of 2-ethylenediamine, catechol and water.Therefore, end material with the uncorroded monocrystalline GaAs of residue as corrosion and remove an ion implanted layer and a residual Si substrate fully.

Therefore, the monocrystalline GaAs layer that 0.5 μ m is thick is formed on the Si substrate.On whole layer, measure the thickness of the monocrystalline GaAs layer of 100 some places formation, find that the uniformity of bed thickness is 504nm ± 16nm.

Measure by atomic force microscope, with regard to the mean square roughness of 50 μ m square area, surface roughness is about 0.3nm.This is identical with commercial rank with the GaAs wafer.

Not finding has additional crystal defect to be incorporated into the GaAs layer after the epitaxial growth, finds to have good crystallinity with the transmission electron microscope observation section.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 8

On single crystalline Si substrate (first substrate), by the thick monocrystalline InP of MOCVD (Organometallic chemical vapor deposition) epitaxial growth 0.7 μ m.

On the surface of this InP layer, forming thickness is the SiO of 50nm ₂Layer.Pass through SiO then ₂Superficial layer injects H with 80keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

The SiO of first substrate ₂Laminar surface contacts with the surface of another Si substrate (second substrate), 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.Because the porousness of ion implanted layer, the substrate surface of separation is very coarse.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded monocrystalline InP of residue as corrosion and erode an ion implanted layer and a remaining Si substrate fully.

Therefore, on single crystal Si layer, form the thick monocrystalline InP layer of 0.5 μ m.On whole layer, measure the thickness of the monocrystalline InP layer of 100 some places formation, find that the uniformity of bed thickness is 704nm ± 23nm.

Measure by atomic force microscope, with regard to the mean square roughness of 50 μ m square area, surface roughness is about 0.3nm.This is identical with commercial rank with the InP wafer.

Not finding has additional crystal defect to be incorporated into the InP layer after the epitaxial growth, finds to have good crystallinity with the transmission electron microscope observation section.

Also stirring simultaneously with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution selects dried rhizome of rehmannia corrosion to stay ion implanted layer on first substrate.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 9

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Then by surperficial SiO ₂Layer injects H with 80keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

SiO ₂Laminar surface contacts with the surface of another Si substrate (second substrate), 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

This substrate in hydrogen atmosphere 1100 ℃ of following heat treatments one hour.Measure by atomic force microscope, with regard to the mean square roughness of 50 μ m square area, surface roughness is about 0.2nm.This is identical with commercial rank with the Si wafer.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 10

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

SiO ₂Laminar surface contacts with the surface of another Si substrate (second substrate).

After removing oxide-film from the reverse side of first substrate, from the first substrate side CO ₂Laser illumination entire wafer surface.CO ₂Laser at bonding interface by the thick SiO of 200nm ₂Layer absorbs, and abrupt temp (abrupt temperature) is raise, by near the thermal stress that enters two thin slices the projected range of injecting at ion, with bonding substrate separation.Laser beam can be the consecutive pulses formula.

The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 11

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

SiO ₂Laminar surface contacts with the surface of another Si substrate (second substrate).By corroding the end face of bonding wafer, SiO ₂Layer end and epitaxial loayer end are peeled off, and the ion implanted layer end exposes.

Under 1000 ℃, bonding wafer is carried out high-temperature oxydation.Therefore, at the ion implanted layer place in 10 hours two bonding substrates separate fully.The attachment surface of finding the wafer perimeter part has become SiO ₂, core is almost constant.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 12

On single crystalline Si substrate (first substrate), under following growth conditions, by CVD (chemical vapor deposition) the epitaxial growth thick single crystalline Si of μ m O.30.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 200nm ₂Layer.Then by surperficial SiO ₂Layer injects H with 40keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

Individually, provide another Si substrate (second substrate).SiO to first substrate ₂The laminar surface and second substrate surface carry out plasma treatment, and wash with water.Two surfaces are in contact with one another, with bonding surface 300 ℃ of following heat treatments one hour, to increase the intensity of substrate binding.By wedging from periphery the bonding substrate, near the projected range that ion injects, bonding substrate is divided into two thin slices.Because the porousness of ion implanted layer, the substrate surface of separation is very coarse.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and remove ion implanted layer fully.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 13

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

Individually, provide another Si substrate (second substrate).SiO to first substrate ₂The laminar surface and second substrate surface carry out plasma treatment, and wash with water.Two surfaces are in contact with one another, with bonding surface 300 ℃ of following heat treatments one hour, to increase the intensity of substrate binding.By bonding substrate is used shearing force, near the projected range that ion injects, bonding substrate is divided into two thin slices.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.

For reusing as first substrate, the thickness that replenishes wafer with outer layer growth reduces.Therefore, can use substrate semipermanently.For the second time or in the later use, the thickness of epitaxial loayer is not 0.30 μ m, but corresponding to the minimizing of thickness, ion implanted layer is formed in the epitaxial loayer.Example 14

On the first type surface of single crystalline Si substrate (first substrate), H ⁺The injection energy be 10keV, dosage is 5 * 10 ¹⁶Cm ^-2Under following growth conditions, on identical face, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.30 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness is the SiO of 200nm ₂Layer.

The SiO of first substrate ₂Laminar surface contacts with the surface of another Si substrate (second substrate), and bonding substrate is 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.

Because the porousness of ion implanted layer, the substrate surface of separation is very coarse.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, end material with the uncorroded single crystalline Si of residue as corrosion and erode ion implanted layer fully.In addition, first substrate that injects the remainder of the degree of depth corresponding to ion is removed by corrosion.

Therefore, the thick single crystal Si layer of 0.2 μ m is formed on the Si oxide layer.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of bed thickness is 201nm ± 7nm.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 15

On a first type surface of single crystalline Si substrate (first substrate), under following growth conditions, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.50 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

At growing period, add impurity gas and obtain n ⁺Si/n ^-The substrat structure of Si/Si.

The SiO of first substrate ₂Laminar surface contacts with the surface of another Si substrate (second substrate), and substrate is 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.

The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, ending material with the uncorroded single crystalline Si of residue as corrosion corrodes fully and removes ion implanted layer.

Therefore, the thick n that buries that contains of 0.2 μ m ⁺The single crystal Si layer of layer is formed on the Si oxide layer.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of thickness is 201nm ± 6nm.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 16

On a first type surface of single crystalline Si substrate (first substrate), under following growth conditions, by the thick single crystalline Si of CVD (chemical vapor deposition) epitaxial growth 0.30 μ m.

Source gas: SiH ₂Cl ₂/ H ₂

Gas flow rate: 0.5/180L/min

Air pressure: 80Torr

Temperature: 950 ℃

The speed of growth: 0.30 μ m/min

On the surface of this epitaxy Si layer, forming thickness by thermal oxidation is the SiO of 50nm ₂Layer.Pass through SiO then ₂Inject H with 40keV ⁺, dosage is 5 * 10 ¹⁶Cm ^-2

The SiO of first substrate ₂Laminar surface and the thick SiO of 500nm is arranged on it ₂The surface of another Si substrate (second substrate) of layer contacts, and substrate is 600 ℃ of annealing down.By annealing, near the projected range that ion injects, bonding substrate is divided into two thin slices.The hydrofluoric acid of employing 49% and the mixture of 30% aqueous hydrogen peroxide solution also stir the surface of optionally corroding second substrate.Therefore, ending material with the uncorroded single crystalline Si of residue as corrosion corrodes fully and removes ion implanted layer.

Therefore, the thick n that buries that contains of 0.29 μ m ⁺The single crystal Si layer of layer is formed on the Si oxide layer.On whole layer, measure the thickness of the single crystal Si layer of 100 some places formation, find that the uniformity of thickness is 291nm ± 9nm.

Also stir optionally corrosion simultaneously and stay ion implanted layer on first substrate with the mixture of 49% hydrofluoric acid and 30% aqueous hydrogen peroxide solution.Again substrate is carried out surface treatment as hydrogen annealing and surface finish.Therefore, substrate can be used as first substrate, or second substrate reuses.Example 17

Two faces handling first substrate with the mode identical with example 1 to 16 prepare semiconductor product.

Claims

1. technology of making semiconductor product may further comprise the steps: preparation comprises first substrate of silicon substrate, and the nonporous semiconductor layer is formed on the silicon substrate, forms ion implanted layer in the one deck at least in silicon substrate and nonporous semiconductor layer; First substrate binding is obtained nonporous semiconductor to second substrate be placed on sandwich construction in it, separate sandwich construction at the ion implanted layer place; And remove ion implanted layer on second substrate of staying separation.

2. a technology of making semiconductor product may further comprise the steps: prepare first substrate that comprises silicon substrate, the nonporous semiconductor layer is formed on the silicon substrate, form ion implanted layer in the one deck at least in silicon substrate and nonporous semiconductor layer; First substrate binding is obtained nonporous semiconductor to second substrate be placed on sandwich construction in it; Separate sandwich construction at the ion implanted layer place; Remove the ion implanted layer on second substrate of staying separation; After removing the ion implanted layer that stays, once more first substrate is used as first backing material.

3. a technology of making semiconductor product may further comprise the steps: prepare first substrate that comprises silicon substrate, the nonporous semiconductor layer is formed on the silicon substrate, form ion implanted layer in the one deck at least in silicon substrate and nonporous semiconductor layer; First substrate binding is obtained nonporous semiconductor to second substrate be placed on sandwich construction in it; Separate sandwich construction at the ion implanted layer place; Remove the ion implanted layer on second substrate of staying separation; After removing the ion implanted layer that stays from it, once more first substrate is used as second backing material.

4. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein after forming the nonporous semiconductor layer on the silicon substrate, forming ion implanted layer.

5. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein forming the nonporous semiconductor layer on the silicon substrate and after forming dielectric film on the nonporous semiconductor layer, forming ion implanted layer.

6. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein ion implanted layer forms with the ion elements in the group that is selected from rare gas element, hydrogen and nitrogen.

7. according to the technology of the manufacturing semiconductor product of claim 6, the implantation dosage of its intermediate ion is controlled at 10 ¹⁶-10 ¹⁷/ cm ²Scope in.

8. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein the THICKNESS CONTROL of ion implanted layer is not more than 500 dusts.

9. the technology of manufacturing semiconductor product according to Claim 8, wherein the THICKNESS CONTROL of ion implanted layer is not more than 200 dusts.

10. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein ion implanted layer is applied external force sandwich construction is separated.

11., wherein push, be pulled away from, or apply external force by adding shearing force by the direction vertical with substrate surface by the direction vertical with substrate surface according to the technology of the manufacturing semiconductor product of claim 10.

12. make the technology of semiconductor product according among the claim 1-3 any one, wherein sandwich construction is by exposing at the ion implanted layer at the edge of sandwich construction and with the bonding substrate separation of rear oxidation.

13. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein sandwich construction separates by the heating sandwich construction.

14. the technology according to the manufacturing semiconductor product of claim 13 wherein heats whole sandwich construction.

15. according to the technology of the manufacturing semiconductor product of claim 13, wherein heating part sandwich construction.

16. the technology according to the manufacturing semiconductor product of claim 15 wherein heats by laser radiation.

17. according to the technology of the manufacturing semiconductor product of claim 16, wherein laser is a carbon dioxide laser.

18. the technology according to the manufacturing semiconductor product of claim 15 wherein heats by applying electric current.

19. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein the nonporous semiconductor layer comprises monocrystalline silicon layer.

20. according to the technology of the manufacturing semiconductor product of claim 19, wherein monocrystalline silicon layer is formed by epitaxial growth.

21., wherein on the surface of monocrystalline silicon layer, form silicon oxide layer and constitute first substrate according to the technology of the manufacturing semiconductor product of claim 19.

22. according to the technology of the manufacturing semiconductor product of claim 21, wherein silicon oxide layer is formed by thermal oxidation.

23. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein the nonporous semiconductor layer comprises compound semiconductor layer.

24. according to the technology of the manufacturing semiconductor product of claim 23, wherein compound semiconductor is a monocrystalline.

25. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein second substrate comprises monocrystalline substrate.

26. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein second substrate is an oxide-film monocrystalline substrate formed thereon.

27. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein second substrate is a light-transmissive substrates.

28. according to the technology of the manufacturing semiconductor product of claim 27, wherein light-transmissive substrates is a glass substrate.

29. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein the step of bonding substrate is by carrying out first substrate and tight mutually contact of second substrate.

30. make the technology of semiconductor product according among the claim 1-3 any one, wherein the step of bonding substrate be by anodically-bonded, push, or heat treatment is carried out.

31., wherein remove ion implanted layer by polishing according to the technology of any one the manufacturing semiconductor product among the claim 1-3.

32., wherein remove ion implanted layer by corrosion according to the technology of any one the manufacturing semiconductor product among the claim 1-3.

33., wherein corrode with hydrofluoric acid according to the technology of the manufacturing semiconductor product of claim 32.

34. according to the technology of any one the manufacturing semiconductor product among the claim 1-3, wherein said silicon substrate is made of porous material.

35. technology of making semiconductor product, may further comprise the steps: preparation comprises first substrate of silicon substrate, epitaxial semiconductor layer is positioned on the silicon substrate, forms ion implanted layer in the one deck at least in silicon substrate and epitaxial semiconductor layer, and wherein said epitaxial semiconductor layer is not a porous region; First substrate binding is obtained epitaxial semiconductor to second substrate be placed on sandwich construction in it; Separate sandwich construction at the ion implanted layer place; Transfer to described epitaxial semiconductor layer on second substrate at hydrogen annealing behind the described separating step then.

36. technology of making semiconductor product, may further comprise the steps: preparation comprises first substrate of silicon substrate, wherein said silicon substrate is not a porous region, epitaxial semiconductor layer is positioned on the silicon substrate, wherein said epitaxial semiconductor layer is not a porous region, forms ion implanted layer in the one deck at least in silicon substrate and epitaxial semiconductor layer; First substrate binding is obtained epitaxial semiconductor to second substrate be placed on sandwich construction in it; Separate sandwich construction at the ion implanted layer place; Transfer to the surface of the described epitaxial semiconductor layer on second substrate then in polishing behind the described separating step.

37. a technology of making semiconductor product may further comprise the steps: preparation comprises first substrate of silicon substrate, and ion implanted layer is formed in the described silicon substrate, and described silicon substrate is an imperforate section; First substrate binding is obtained sandwich construction to second substrate; Separate sandwich construction at the ion implanted layer place; Hydrogen annealing is transferred to a part first substrate on second substrate then.

38. make the technology of semiconductor product according among claim 1-3 and the 35-37 any one, allow between first substrate and second substrate, to insert insulating barrier when wherein carrying out described bonding step.

39., wherein on described silicon substrate, form the described ion implanted layer that forms described first substrate after the insulating barrier according to the technology of the manufacturing semiconductor product of claim 37.

40., wherein form described ion implanted layer by injecting rare gas or hydrogen or nitrogen according to the technology of any one the manufacturing semiconductor product among claim 1-3 and the 35-37.