CN107966458A - A kind of half board checking device of substrate - Google Patents
A kind of half board checking device of substrate Download PDFInfo
- Publication number
- CN107966458A CN107966458A CN201711428499.6A CN201711428499A CN107966458A CN 107966458 A CN107966458 A CN 107966458A CN 201711428499 A CN201711428499 A CN 201711428499A CN 107966458 A CN107966458 A CN 107966458A
- Authority
- CN
- China
- Prior art keywords
- detection
- glass substrate
- substrate
- probe
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 81
- 238000001514 detection method Methods 0.000 claims abstract description 62
- 239000011521 glass Substances 0.000 claims abstract description 62
- 239000000523 sample Substances 0.000 claims abstract description 58
- 238000003860 storage Methods 0.000 claims description 13
- 238000007689 inspection Methods 0.000 claims description 8
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000013016 damping Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 8
- 230000006872 improvement Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000002788 crimping Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention relates to a kind of half board checking device of substrate, including：Base, plummer, detection components, probe assembly and temporary station；The base is equipped with track, and the plummer is slideably positioned on track, and includes the first microscope carrier A and the second microscope carrier B；The detection components are arranged above track, including gantry head and detector, and gantry head is arranged on base, and the detector is slideably positioned on the head of gantry；The probe assembly is arranged above track；The temporary station is arranged at the second end of the rail.Half board checking device of glass substrate provided by the invention, can realize the full-automatic detection of half plate of glass substrate, substantially increase the efficiency of glass substrate gray scale and defects detection.
Description
Technical Field
The invention relates to the field of display panel detection, in particular to a substrate half-plate detection device.
Background
Generally, there are many processes for manufacturing screens, and the manufacturing of glass substrates is an important step. In the production process of the screen glass substrate, various types of defects are always generated on the surface of the glass substrate or inside the glass substrate, and the defects may include surface discontinuity, linear defects, streaks, stones, bubbles, optical unevenness of the glass substrate body, and the like. In order to prevent the defective glass substrate from flowing into the following process, it is usually necessary to detect whether the glass substrate has the above-mentioned defect. Along with the continuous increase of display panel size, the degree of difficulty of the transport, production and the detection of whole panel increases gradually, can cut into two half boards or even littleer whole big base plate usually to be convenient for transport and production, and display panel's check out test set among the prior art can only be applicable to the detection of whole panel, can not detect two half boards simultaneously, can only detect half base plate at every turn with current equipment, seriously influences detection efficiency.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the problem of half board detection efficiency low of glass substrate among the prior art is solved.
The technical scheme adopted by the invention for solving the technical problems is as follows: a substrate half-panel inspection apparatus comprising: the device comprises a base, a bearing platform, a detection assembly, a probe assembly and a temporary storage station;
the base is provided with a track, the bearing table is arranged on the track in a sliding mode and comprises a first bearing table A and a second bearing table B, and the first bearing table A and the second bearing table B are used for bearing half substrates respectively; the track has opposite first and second ends;
the detection assembly is arranged above the track and comprises a gantry head and a detection head, the gantry head is arranged on the base, and the detection head is arranged on the gantry head in a sliding mode and used for carrying out optical detection on the half plate; the probe assembly is arranged above the track and used for carrying out electrical detection on the half board;
the temporary storage station is arranged at the second end of the rail; wherein,
the first carrying platform A and the second carrying platform B sequentially move between the first end and the second end to finish the detection of the two half boards; and when the half plate on the first carrying platform A is detected, the second carrying platform B is positioned at the temporary storage station.
The glass substrate carrying device is further improved in that a plurality of lifting support legs used for carrying the glass substrate are uniformly arranged on the carrying platform.
The improved structure is characterized in that a plurality of adsorption holes are uniformly distributed on the bearing table and are connected with a vacuumizing device.
The further improvement is that a driver for driving the bearing platform to rotate is arranged below the bearing platform.
The glass substrate clamping device is further improved in that telescopic clamping legs are arranged on the periphery of the bearing table and used for clamping the glass substrate.
The improved glass substrate positioning device is characterized in that a moving mechanism perpendicular to the direction of the rail is arranged at the bottom of the bearing table, two cameras are arranged on two sides of the rail respectively, and the cameras are used for acquiring position information of the glass substrate.
The further improvement is that a vibration eliminating platform is arranged below the base.
The temporary storage station further comprises a clamping box, and the clamping box is used for storing multiple groups of probe sets.
The improved structure is characterized by further comprising a probe replacing component, wherein the probe replacing component is arranged on the base through a support, the probe replacing component is provided with a manipulator used for clamping the probe group, and the manipulator moves between the cassette and the probe component through a second track.
The improved structure is characterized in that lifting components are arranged on two sides of the clamping box and used for lifting or downwards moving the probe group to be taken to the taking height.
The invention has the beneficial effects that:
the glass substrate half-plate detection device provided by the invention realizes full-automatic detection of the optical performance and the electrical performance of the glass substrate, greatly improves the detection efficiency and saves the manpower. Meanwhile, the simultaneous detection of the two half plates is realized, and different products can be detected by using one device, so that the detection efficiency is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of a substrate half-plate inspection apparatus according to the present invention;
FIG. 2 is a schematic view of a carrier stage according to the present invention;
FIG. 3 is a schematic view of the detecting assembly and the probe assembly according to the present invention;
FIG. 4 is an enlarged view of portion C of FIG. 1;
FIG. 5 is a schematic view of the structure of the driver and the vibration damping platform of the present invention;
the reference numbers in the figures are:
the detection device comprises a base, a bearing table, a 3 detection assembly, a 4 probe assembly, a 5 support, a 6 vibration eliminating table, a 7 temporary storage station, an 8 probe replacing assembly, an 11 rail, a 12 camera, a 21 support foot, a 22 driver, a 23 clamping foot, a 24 moving mechanism, a 25 adsorption hole, a 31 gantry head, a 311-Y rail, a 32 detection head, a 41 fixing seat, a 42 probe assembly, a 51-X moving rail, a 71 lifting assembly, a 72 cassette, an 81 manipulator and a 82-second rail.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
In the description of the invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be considered as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to specific situations.
Examples
As shown in fig. 1, the present embodiment provides a substrate half-plate detection apparatus, which is characterized by comprising: the device comprises a base 1, a bearing platform 2, a detection assembly 3, a probe assembly 4 and a temporary storage station 7;
the base 1 is provided with a track 11, the bearing table 2 is arranged on the track 11 in a sliding manner and comprises a first bearing table A and a second bearing table B, and the first bearing table A and the second bearing table B are respectively used for bearing half substrates; the track 11 has opposite first (left end of the device in fig. 1) and second (right end of the device in fig. 1) ends;
the temporary storage station 7 is arranged at the second end of the track 11; the first carrying platform A and the second carrying platform B sequentially move between the first end and the second end to finish the detection of the two half boards; when the half plate on the first carrier A is detected, the second carrier B is positioned at the temporary storage station 7; the probe assembly 4 detects the gray scale and the defect of the substrate;
as shown in fig. 3, the detection assembly 3 is disposed above the rail 11, and includes a gantry head 31 and a detection head 32, the gantry head 31 is disposed on the base 1 through the bracket 5, the bracket 5 is provided with an X-direction moving rail 51 and a driving device, under the driving of the driving device, the gantry head 31 can move along the X-direction (the second end direction of the rail 11), the detection head 32 is slidably disposed on the gantry head 31 through a Y-direction rail 311 on the gantry head, and the detection head 32 moves along the Y-direction under the driving of the driving device, so as to realize the overall scanning of the half-plate, and complete the detection of the optical performance, such as the gray scale of the half-plate, the detection of the micro-defects, and the like.
Probe subassembly 4 sets up in track 11 top, including fixing base 41 and set up the probe group 42 on fixing base 41, fixing base 41 erects and track 11 top, and when the plummer 2 that bears the glass substrate moved to probe subassembly 4 below, probe group 42 crimping makes its work on the contact point on the glass substrate for the glass substrate provides the power, shows the content signal, and the display effect of this glass substrate is shot and is sent for check out test set to the test head this moment, also carries out electrical detection to the glass substrate simultaneously.
The inspection apparatus is connected to the inspection head 32, acquires display effect information of the glass substrate photographed by the inspection head, and analyzes the gray scale of the glass substrate to be inspected and whether there is a defect. The detection equipment is a computer, a server or other equipment with a calculation and analysis function.
As shown in fig. 2, a further improvement is that a plurality of liftable support legs 21 for supporting the glass substrate are uniformly arranged on the bearing table 2. Generally, a production workshop of the glass substrate is provided with a robot arm, the glass substrate is placed on the bearing table 2 through a comb-shaped manipulator of the robot arm, and if the glass substrate is directly placed without corresponding bearing, the glass substrate can be scratched, placed out of position and even dropped. In the technical scheme, when the comb-shaped mechanical arm places the glass substrate on the bearing table 2, the support legs 21 are lifted to bear the glass substrate, then the comb-shaped mechanical arm is pulled away again, the support legs 21 are lowered, and the problem is avoided.
As shown in fig. 2, a further improvement is that a plurality of adsorption holes 25 are uniformly distributed on the bearing table 2, and the adsorption holes 25 are connected with a vacuum-pumping device. When the support legs 21 descend, after the glass substrate is arranged on the bearing platform 2, the vacuumizing equipment performs vacuumizing to suck away and keep air between the glass substrate and the bearing platform 2, so that the glass substrate is firmly fixed on the bearing platform 2, and the problem that the glass substrate cannot be lightened due to the fact that the probe set 42 of the re-probe assembly 4 is warped or displaced in a crimping mode and is not accurately crimped is solved.
In a further improvement, a driver 22 for driving the bearing platform to rotate is arranged below the bearing platform 2. Because the contact point position on the glass substrate of different products is different, some are located the long limit of glass substrate, some then are located the minor face of glass substrate, consequently make it can rotate through set up the driver under plummer 2, just can detect the glass substrate of different products, and need not to change equipment.
As shown in fig. 4, in a further improvement, the periphery of the plummer 2 is provided with retractable clamping legs 23 for clamping the glass substrate, in this embodiment, the clamping legs 23 are L-shaped clamping legs. Because of the influence of factors such as the movement error of the robot arm for transferring the glass substrate, the displacement of the glass substrate on the robot arm and the like, when the glass substrate is placed on the bearing table 2, the position is not very accurate, the telescopic clamping feet 23 arranged around the bearing table 2 are in an extending state when the glass substrate is not placed, and after the glass substrate is placed on the bearing table 2, the clamping feet 23 are contracted to align and clamp the glass substrate; or the clamping feet 23 extend out at the same time when the support feet 21 extend out, and the clamping feet 23 contract after the glass substrate is placed on the bearing platform 2.
The further improvement is that the bottom of the bearing table 2 is provided with a moving mechanism 24 perpendicular to the track direction, two sides of the track 11 are respectively provided with a camera 12, and the cameras 12 are used for acquiring the position information of the glass substrate. The alignment performed by the clamping pins is mechanical alignment or has an error of about 0.3mm, a position diagram of the glass substrate on the bearing table 2 is shot by the camera 12 to obtain the position of the glass substrate, and then the equipment controlling the movement of the bearing table 2 controls the bearing table 2 to move along the direction of the rail 11 and/or the direction perpendicular to the rail 11, so that the bearing table 2 moves to a corresponding position, and the position of the rear probe group 42 pressed on the contact point of the glass substrate is ensured to be accurate.
As shown in fig. 5, the base 1 is further improved by arranging a vibration damping platform 6 below the base. The device is a precise detection device, and generally, a lot of devices and a lot of people exist in a factory, so that a lot of vibration sources influence the detection precision of the device, and the interference of external vibration on the device can be effectively eliminated through the vibration eliminating platform 6.
In a further improvement, the temporary storage station 7 of the device further comprises a cassette 72, and the cassette 72 is used for storing a plurality of groups of probe sets. The replacement of the probe group for the glass substrate of different products is facilitated.
As shown in fig. 1 and 3, the apparatus further comprises a probe replacing assembly 8, the probe replacing assembly 8 is disposed on the base 1 through the bracket 5, the probe replacing assembly 8 has a manipulator 81 for gripping the probe set, the manipulator 81 moves between the cassette 72 and the probe assembly 4 through a second rail 82, and a lifting assembly 71 is disposed at the bottom of the cassette 72 for lifting or moving the probe set to be taken down to the taking height. When the probe group on the probe assembly 4 needs to be replaced, the manipulator 81 moves to the probe assembly 4 along the second rail 82 through the linear motor to take off the probe group on the probe assembly and returns to the cassette 72, the cassette 72 lifts the assembly 71 to work, so that the cassette 72 is lifted or lowered, the empty position in the cassette 72 where the probe group is not stored corresponds to the manipulator 81, and then the manipulator 81 places the probe group at the position to finish the probe group retrieval; the lifting assembly 71 of the cassette 72 operates to lift or lower the cassette 72, so that the position of the probe group to be replaced, which is stored in the cassette 72, corresponds to the manipulator 81, and the manipulator 81 takes off the probe group and moves the probe group to the probe assembly 4 along the second rail 82, and places the probe group on the fixing seat 41 of the probe group, thereby completing the replacement of the probe group.
Two half-plate detection processes on a first stage a and a second stage B: when two half plates are detected simultaneously, firstly, after the two half plates are respectively placed on a first carrier A and a second carrier B through a robot arm, half plate detection of a glass substrate on the second carrier B is firstly carried out, if a contact point on the glass substrate is located on a short side, the second carrier B is firstly rotated and then moved to a probe assembly 4 along a track 11, a probe set 42 is in pressure connection with the contact point to supply power to the contact point, a detection head 32 is used for photographing to obtain a display effect, after the detection is finished, the second carrier B is continuously moved to a temporary storage station 7 at the second end of the track 11, then the first carrier A is moved to the detection assembly 4 to carry out detection, after the half plate detection of the glass substrate on the first carrier A is finished, the first end is returned, and meanwhile, the second carrier B also returns to the first end.
The glass substrate half-plate detection device provided by the invention realizes full-automatic detection of the gray scale and the defects of the glass substrate, greatly improves the detection efficiency and saves the manpower. Meanwhile, the simultaneous detection of the two half plates is realized, and different products can be detected by using one device, so that the detection efficiency is improved.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A half board detection device of base plate which characterized in that includes: the device comprises a base (1), a bearing platform (2), a detection assembly (3), a probe assembly (4) and a temporary storage station (7);
the base (1) is provided with a track (11), the bearing table (2) is arranged on the track (11) in a sliding mode and comprises a first bearing table A and a second bearing table B, and the first bearing table A and the second bearing table B are used for bearing half substrates respectively; the track (11) has opposite first and second ends;
the detection assembly (3) is arranged above the track (11) and comprises a gantry head (31) and a detection head (32), the gantry head (31) is arranged on the base (1), and the detection head (32) is arranged on the gantry head (31) in a sliding mode and used for carrying out optical detection on the half plate; the probe assembly (4) is arranged above the track (11) and is used for carrying out electrical detection on the half board;
the temporary storage station (7) is arranged at the second end of the track (11); wherein,
the first carrying platform A and the second carrying platform B sequentially move between the first end and the second end to finish the detection of the two half boards; and when the half plate on the first carrying platform A is detected, the second carrying platform B is positioned at the temporary storage station (7).
2. The substrate half-plate detection device according to claim 1, wherein a plurality of lifting support legs (21) for supporting the glass substrate are uniformly arranged on the bearing table (2).
3. The substrate half-plate detection device according to claim 1, wherein a plurality of adsorption holes (25) are uniformly distributed on the bearing table (2), and the adsorption holes (25) are connected with a vacuum-pumping device.
4. The substrate half-plate inspection device according to claim 1, wherein a driver (22) for driving the carrier to rotate is disposed under the carrier (2).
5. The apparatus for inspecting a substrate half as set forth in claim 1, wherein the carrier (2) is provided with retractable clamping legs (23) around the periphery thereof for clamping the glass substrate.
6. The substrate half-plate detection device according to claim 5, wherein a moving mechanism (24) perpendicular to the rail direction is arranged at the bottom of the bearing table (2), and two cameras (12) are respectively arranged at two sides of the rail (11), and the cameras (12) are used for acquiring the position information of the glass substrate.
7. The substrate half-plate inspection device according to claim 1, wherein a vibration-damping table (6) is provided under the base (1).
8. The apparatus for inspecting substrate halves as claimed in claim 1, wherein the buffer station (7) further comprises a cassette (72), the cassette (72) being used for storing a plurality of sets of probes.
9. The substrate half-plate inspection apparatus according to claim 8, further comprising a probe replacement assembly (8), wherein the probe replacement assembly (8) is disposed on the base (1) through the bracket (5), the probe replacement assembly (8) has a robot arm (81) for gripping the probe set, and the robot arm (81) moves between the cassette (72) and the probe assembly (4) through the second rail (82).
10. The apparatus for inspecting substrate halves in accordance with claim 8, wherein the cassette (72) is provided with lifting members (71) on both sides thereof for lifting or lowering the probe sets to be picked up to the picking height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711428499.6A CN107966458B (en) | 2017-12-26 | 2017-12-26 | Substrate half-plate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711428499.6A CN107966458B (en) | 2017-12-26 | 2017-12-26 | Substrate half-plate detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107966458A true CN107966458A (en) | 2018-04-27 |
| CN107966458B CN107966458B (en) | 2024-02-09 |
Family
ID=61994841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711428499.6A Active CN107966458B (en) | 2017-12-26 | 2017-12-26 | Substrate half-plate detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107966458B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108426897A (en) * | 2018-05-07 | 2018-08-21 | 芜湖良匠机械制造有限公司 | A kind of glass substrate defect detecting device |
| CN108962777A (en) * | 2018-05-18 | 2018-12-07 | 河海大学常州校区 | A kind of solar energy photovoltaic panel bubble detection device and its detection method |
| CN109030509A (en) * | 2018-07-02 | 2018-12-18 | 京东方科技集团股份有限公司 | A kind of detection device, color film prosthetic appliance and detection method |
| CN109540921A (en) * | 2019-01-16 | 2019-03-29 | 苏州精濑光电有限公司 | A kind of monitor station |
| CN110420864A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | A kind of ULED screen substrate detection/measuring device and its application method |
| CN110567986A (en) * | 2019-10-22 | 2019-12-13 | 苏州精濑光电有限公司 | Silicon-based OLED panel lighting inspection equipment |
| CN111077167A (en) * | 2019-12-27 | 2020-04-28 | 四川国软科技发展有限责任公司 | Bearing saddle detection system |
| CN113184537A (en) * | 2021-04-16 | 2021-07-30 | 昆山精讯电子技术有限公司 | Panel conveying equipment |
| CN113567655A (en) * | 2021-07-27 | 2021-10-29 | 苏州科韵激光科技有限公司 | Glass detection platform device and detection method |
| CN113697513A (en) * | 2021-10-28 | 2021-11-26 | 苏州精濑光电有限公司 | Layered tray layered feeding device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001156425A (en) * | 1999-11-26 | 2001-06-08 | Anritsu Corp | Printed board checker |
| JP2016004964A (en) * | 2014-06-19 | 2016-01-12 | 富士機械製造株式会社 | Substrate transfer device |
| CN207779931U (en) * | 2017-12-26 | 2018-08-28 | 苏州精濑光电有限公司 | A kind of half board checking device of substrate |
-
2017
- 2017-12-26 CN CN201711428499.6A patent/CN107966458B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001156425A (en) * | 1999-11-26 | 2001-06-08 | Anritsu Corp | Printed board checker |
| JP2016004964A (en) * | 2014-06-19 | 2016-01-12 | 富士機械製造株式会社 | Substrate transfer device |
| CN207779931U (en) * | 2017-12-26 | 2018-08-28 | 苏州精濑光电有限公司 | A kind of half board checking device of substrate |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108426897A (en) * | 2018-05-07 | 2018-08-21 | 芜湖良匠机械制造有限公司 | A kind of glass substrate defect detecting device |
| CN108962777A (en) * | 2018-05-18 | 2018-12-07 | 河海大学常州校区 | A kind of solar energy photovoltaic panel bubble detection device and its detection method |
| CN108962777B (en) * | 2018-05-18 | 2022-04-01 | 河海大学常州校区 | Bubble detection device and detection method for solar photovoltaic panel |
| CN109030509A (en) * | 2018-07-02 | 2018-12-18 | 京东方科技集团股份有限公司 | A kind of detection device, color film prosthetic appliance and detection method |
| CN109540921A (en) * | 2019-01-16 | 2019-03-29 | 苏州精濑光电有限公司 | A kind of monitor station |
| WO2020147444A1 (en) * | 2019-01-16 | 2020-07-23 | 苏州精濑光电有限公司 | Detection platform |
| CN110420864A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | A kind of ULED screen substrate detection/measuring device and its application method |
| CN110420864B (en) * | 2019-07-15 | 2023-10-13 | 中导光电设备股份有限公司 | ULED screen substrate detection/measurement equipment |
| CN110567986B (en) * | 2019-10-22 | 2020-11-17 | 苏州精濑光电有限公司 | Silicon-based OLED panel lighting inspection equipment |
| WO2021077551A1 (en) * | 2019-10-22 | 2021-04-29 | 苏州精濑光电有限公司 | Lightening inspection apparatus for silicon-based oled panel |
| CN110567986A (en) * | 2019-10-22 | 2019-12-13 | 苏州精濑光电有限公司 | Silicon-based OLED panel lighting inspection equipment |
| CN111077167A (en) * | 2019-12-27 | 2020-04-28 | 四川国软科技发展有限责任公司 | Bearing saddle detection system |
| CN111077167B (en) * | 2019-12-27 | 2023-10-31 | 四川国软科技集团有限公司 | Bearing saddle detecting system |
| CN113184537A (en) * | 2021-04-16 | 2021-07-30 | 昆山精讯电子技术有限公司 | Panel conveying equipment |
| CN113567655A (en) * | 2021-07-27 | 2021-10-29 | 苏州科韵激光科技有限公司 | Glass detection platform device and detection method |
| CN113567655B (en) * | 2021-07-27 | 2023-08-25 | 苏州科韵激光科技有限公司 | Glass detection platform device and detection method |
| CN113697513A (en) * | 2021-10-28 | 2021-11-26 | 苏州精濑光电有限公司 | Layered tray layered feeding device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107966458B (en) | 2024-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107966458A (en) | A kind of half board checking device of substrate | |
| CN207779931U (en) | A kind of half board checking device of substrate | |
| CN108855962B (en) | A detection machine that is used for pressing in electric ceramic particle capacitive tool board | |
| TW201537197A (en) | Flexible substrate inspecting apparatus | |
| CN109916324B (en) | PCB bending tester and using method thereof | |
| CN113567467A (en) | Precision chip detection equipment | |
| CN214472864U (en) | Polaroid defect detection equipment and system | |
| KR101175770B1 (en) | Lense inspection system and lense inspection method using the same | |
| KR101440310B1 (en) | Apparatus for Auto Testing Trace of Pannel | |
| CN115452058A (en) | Automatic detecting mechanism for micro-element | |
| CN112924770B (en) | Inspection device for display panels of different sizes | |
| CN115274483B (en) | Wafer electrical property detection equipment | |
| CN211669102U (en) | Substrate inspection device | |
| CN217237794U (en) | Diversified outward appearance detection device | |
| CN112903699B (en) | Automatic microscopic examination equipment for busbar | |
| CN113466292A (en) | Defect detection method and device for display module | |
| KR101695283B1 (en) | Apparatus for testing thin film transistor substrate | |
| JPH07311375A (en) | Inspection stage of liquid crystal display substrate inspecting device | |
| KR20130022126A (en) | Probe unit and apparatus for testing electrical characteristics of an object including the same | |
| CN113008794B (en) | Detection equipment and optical detection method | |
| JP3526709B2 (en) | LCD panel alignment device | |
| KR20180091510A (en) | Display cell test equipment | |
| JP4849744B2 (en) | Display substrate inspection equipment | |
| JP2010156575A (en) | Ic handler | |
| KR102104051B1 (en) | Device handler |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |