CN107941473A - A kind of Long focal length measurement device with fringe contrast automatic regulation function - Google Patents
A kind of Long focal length measurement device with fringe contrast automatic regulation function Download PDFInfo
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- CN107941473A CN107941473A CN201711277642.6A CN201711277642A CN107941473A CN 107941473 A CN107941473 A CN 107941473A CN 201711277642 A CN201711277642 A CN 201711277642A CN 107941473 A CN107941473 A CN 107941473A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of Long focal length measurement device with fringe contrast automatic regulation function, its scheme is：Optical fiber laser (1) the outgoing collimated object lens of standard spherical wave (2) produce standard flat wavefront afterwards；Detected element (3) is placed between collimator objective (2) and main scale grating (4), standard flat wavefront carries the focus information of system under test (SUT) (3) after system under test (SUT), then in turn through the main scale grating (4) and base ruler grating (6) between grid line there are very little angle, Moire fringe is formed on rotating ground glass (7)；Computer (9) is transferred to by ccd sensor (8) collection Moire fringe, computer after the Moire fringe processing of collection to can obtain detected element focal length.The configuration of the present invention is simple, Moire fringe quality number, the degree of automation and the measuring precision are very high, can be used for the high precision automatic measurement of long-focus.
Description
Technical field
The invention belongs to optical precision technical field of measurement and test, is related to a kind of length with fringe contrast automatic regulation function
Focal length measuring equipment, available for long focal length optical element and the high-precision automatic measurement of optical system focal length.
Background technology
Focal length is optical element and the important parameter of optical system, as laser fusion technology, heavy caliber astronomical are looked in the distance
The development of the technology such as system and space remote sensing camera, the focal length parameter measurement of optical element and optical system to long-focus propose
The requirement of higher.Measurement to long-focus mainly has conventional focal length measuring method and Taibo Moire technique.Traditional measurement method exists
Convenient and precision is high during the smaller optical element of focal length measurement, but needs complicated optical system and stringent for Long focal length measurement
Measuring environment.It is a kind of higher measurement side of accuracy generally acknowledged at present to survey long-focus based on Taibo Moire fringe technology
Method, this method measuring device include light-source system, Taibo interferometer and image capturing system.
Since Tabo effect is different from light distribution is imaged in the interference of grating different distance, Moire fringe is caused to measure
Fringe contrast is uncontrollable when difference is tested focal length value, and fringe contrast can not be constantly in desired positions, directly affect device
Measurement accuracy.This influence is eliminated frequently with compensating plate at present, limits the realization of system automation measurement.
The content of the invention
(1) goal of the invention
The purpose of the present invention is：There is provided for the high-precision automatic measurement of long focal length optical element and optical system a kind of
Long focal length measurement device with fringe contrast automatic regulation function, this device is based on Taibo Moire fringe technology, using electricity
Dynamic displacement platform realizes the automatic adjustment of main scale grating and base ruler grating space, while eliminates image laser using rotating ground glass and dissipate
Spot, obtains high contrast Moire fringe, realizes the high-precision automatic measurement of long-focus.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of long-focus with fringe contrast automatic regulation function
Measuring device, it includes：Along the coaxially arranged optical fiber laser 1 of optical path direction, collimator objective 2, main scale grating 4, base ruler grating
6th, rotating ground glass 7, ccd sensor 8；Optical fiber laser 1 produces standard flat ripple after being emitted the collimated object lens 2 of standard spherical wave
Before；Detected element 3 is placed between collimator objective 2 and main scale grating 4, and standard flat wavefront carries quilt after detected element 3
The focus information of element 3 is surveyed, then in turn through main scale grating 4 and base ruler grating 6, More's bar is formed on rotating ground glass 7
Line；Moire fringe is gathered by ccd sensor 8 and is transferred to computer 9, computer 9 after the Moire fringe processing of collection to that can obtain
To detected element focal length.
Wherein, further include：Electricity driving displacement platform 5, main scale grating 4 are placed on electricity driving displacement platform 5, pass through electricity driving displacement platform 5
Main scale grating 4 is driven to do high-precision linear motion.
Wherein, the computer 9 judges that Moire fringe contrast realizes the automatic of main scale grating 4 and 6 spacing of base ruler grating
Adjust, and then realize the automatic regulation function of Moire fringe contrast.
Wherein, the rotating ground glass 7 be able to can be disappeared around optical axis rotation by the rotary speed for adjusting rotating ground glass 7
Except the laser speckle noise in Moire fringe image.
Wherein, the computer 9 can obtain the Moire fringe processing back-pushed-type (1) for being put into the front and rear collection of detected element 3
To the equivalent thermal focal of system under test (SUT),
Wherein, d is grating space；θ is grating angle；To place Moire fringe angle before and after detected element.
The present invention also provides a kind of Long focal length measurement method with fringe contrast automatic regulation function, it includes following
Step：
S1, system adjustment, ensure that measuring device optical axis is consistent；
The grating angle theta and grating space d of S2, measurement main scale grating 4 and base ruler grating 6；
S3, when not placing detected element 3, judge that Moire fringe contrast realizes main scale grating 4 and base ruler by computer
The automatic adjustment of 6 spacing of grating, and then realize the automatic regulation function of Moire fringe contrast, Moire fringe is gathered, is denoted as bar
Line 1；
S4, place detected element 3, adjusts the posture of detected element, ensures that optical axis is consistent, judges More's bar by computer
Line contrast realizes the automatic adjustment of main scale grating 4 and 6 spacing of base ruler grating, and then realizes the automatic tune of Moire fringe contrast
Save function and read grating space variable quantity, gather Moire fringe, be denoted as striped 2；
S5, the angle for calculating two groups of Moire fringesCalculate the focal length f of detected element；
(3) beneficial effect
The Long focal length measurement device with fringe contrast automatic regulation function that above-mentioned technical proposal is provided, using meter
Calculation machine real-time judge Moire fringe contrast, changes main scale stop position by electricity driving displacement platform and realizes Moire fringe contrast
Automatic adjustment, and overcome heavy caliber rotating ground glass to design processing difficulties, being added in image capturing system has certain rotation speed
The frosted glass of degree receives screen, eliminates image laser speckle, and the automatization judgement precision and inclination angle for improving Moire fringe contrast are asked
Precision is solved, and then realizes the high-precision automatic measurement of long focal length optical element and optical system focal length.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the Long focal length measurement device with fringe contrast automatic regulation function of the present invention
Figure.
Fig. 2 is present apparatus measurement flow chart.
In Fig. 1：1- optical fiber lasers, 2- collimator objectives, 3- detected elements, 4- main scales grating, 5- electricity driving displacements platform, 6- bases
Ruler grating, 7- rotating ground glass, 8-CCD sensors, 9- computers.
Embodiment
To make the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to the present invention's
Embodiment is described in further detail.
As shown in Figure 1, the present embodiment Long focal length measurement device includes：Along the coaxially arranged optical fiber laser 1 of optical path direction,
Collimator objective 2, main scale grating 4, base ruler grating 6, rotating ground glass 7, ccd sensor 8；Optical fiber laser 1 is emitted standard sphere
Standard flat wavefront is produced after the collimated object lens 2 of ripple；Detected element 3 is placed between collimator objective 2 and main scale grating 4, standard
Plane wave front carries the focus information of detected element 3 after detected element 3, then in turn through main scale grating 4 and base ruler light
Grid 6, Moire fringe is formed on rotating ground glass 7；Moire fringe is gathered by ccd sensor 8 and is transferred to computer 9, computer 9
To can obtain detected element focal length after the Moire fringe processing of collection.
Wherein, there are very little angle between the grid line of main scale grating 4 and base ruler grating 6.
The present embodiment Long focal length measurement device further includes：Electricity driving displacement platform 5, main scale grating 4 are placed on electricity driving displacement platform 5
On, drive main scale grating 4 to do high-precision linear motion by electricity driving displacement platform 5, ensure the premise parallel with base ruler grating 6
Under, judge that Moire fringe contrast realizes the automatic adjustment of main scale grating 4 and 6 spacing of base ruler grating, Jin Ershi by computer
The automatic regulation function of existing Moire fringe contrast, improves the degree of automation and device measurement accuracy of measuring device.
In the present embodiment, rotating ground glass 7 has certain rotation speed, as the imaging screen of device, by adjusting hair glass
The rotary speed of glass can eliminate the laser speckle noise in Moire fringe image, and the automation for improving Moire fringe contrast is sentenced
Disconnected precision and inclination angle solving precision, and then improve the measurement accuracy of system.
Computer 9 can obtain system under test (SUT) to the Moire fringe processing back-pushed-type (1) for being put into the front and rear collection of detected element 3
Equivalent thermal focal.
Wherein, d is grating space；θ is grating angle；To place Moire fringe angle before and after detected element.
Refering to Fig. 2, device measurement procedure is：
1st, system adjustment, ensures that measuring device optical axis is consistent；
2nd, main scale grating (4) and base ruler grating (6) grid line angle and grating space basic crack are measured；
When the 3rd, not placing detected element 3, judge that Moire fringe contrast realizes main scale grating (4) and base ruler by computer
The automatic adjustment of grating (6) spacing, and then realize the automatic regulation function of Moire fringe contrast, Moire fringe is gathered, is denoted as
Striped 1；
4th, detected element 3 is placed, adjusts the posture of detected element, ensures that optical axis is consistent, More's bar is judged by computer
Line contrast realizes the automatic adjustment of main scale grating (4) and base ruler grating (6) spacing, and then realizes oneself of Moire fringe contrast
Dynamic regulatory function, reads grating space variable quantity, gathers Moire fringe, is denoted as striped 2；
5th, the angle of two groups of Moire fringes is calculated, the focal length of detected element can be calculated by formula (1).
As can be seen from the above technical solutions, the present invention has following distinguishing feature：
1st, the present apparatus realizes the high accuracy linear motion of main scale grating using electricity driving displacement platform, judges More by computer
Fringe contrast realizes the adjusting of main scale grating and base ruler grating space, and then realizes the automatic adjustment work(of Moire fringe contrast
Energy, improves the degree of automation and device measurement accuracy of measuring device.
2nd, present apparatus system imaging screen receives screen for the frosted glass with certain rotation speed, can eliminate moiré topography
Laser speckle noise as in, improves the automatization judgement precision and inclination angle solving precision of Moire fringe contrast, Jin Erti
The high measurement accuracy of system.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, some improvement and deformation can also be made, these are improved and deformation
Also it should be regarded as protection scope of the present invention.
Claims (6)
- A kind of 1. Long focal length measurement device with fringe contrast automatic regulation function, it is characterised in that including：Along light path side To coaxially arranged optical fiber laser (1), collimator objective (2), main scale grating (4), base ruler grating (6), rotating ground glass (7), Ccd sensor (8)；Optical fiber laser (1) the outgoing collimated object lens of standard spherical wave (2) produce standard flat wavefront afterwards；It is tested Element (3) is placed between collimator objective (2) and main scale grating (4), and standard flat wavefront carries quilt after detected element (3) Survey the focus information of element (3), then in turn through main scale grating (4) and base ruler grating (6), the shape on rotating ground glass (7) Into Moire fringe；Computer (9), More bar of the computer (9) to collection are transferred to by ccd sensor (8) collection Moire fringe Detected element focal length is can obtain after line processing.
- 2. there is the Long focal length measurement device of fringe contrast automatic regulation function as claimed in claim 1, it is characterised in that Further include：Electricity driving displacement platform (5), main scale grating (4) are placed on electricity driving displacement platform (5), are driven and led by electricity driving displacement platform (5) Ruler grating (4) does high-precision linear motion.
- 3. there is the Long focal length measurement device of fringe contrast automatic regulation function as claimed in claim 2, it is characterised in that The computer (9) judges that Moire fringe contrast realizes the automatic adjustment of main scale grating (4) and base ruler grating (6) spacing, into And realize the automatic regulation function of Moire fringe contrast.
- 4. there is the Long focal length measurement device of fringe contrast automatic regulation function as claimed in claim 1, it is characterised in that The rotating ground glass (7) can eliminate Moire fringe around optical axis rotation by the rotary speed for adjusting rotating ground glass (7) Laser speckle noise in image.
- 5. there is the Long focal length measurement device of fringe contrast automatic regulation function as claimed in claim 1, it is characterised in that The computer (9) can obtain system under test (SUT) to the Moire fringe processing back-pushed-type (1) for being put into the front and rear collection of detected element (3) Equivalent thermal focal,Wherein, d is grating space；θ is grating angle；To place Moire fringe angle before and after detected element.
- 6. the Long focal length measurement device with fringe contrast automatic regulation function as any one of claim 1-5, It is characterised in that it includes following steps：S1, system adjustment, ensure that measuring device optical axis is consistent；The grating angle theta and grating space d of S2, measurement main scale grating (4) and base ruler grating (6)；S3, when not placing detected element 3, judge that Moire fringe contrast realizes main scale grating (4) and base ruler light by computer The automatic adjustment of grid (6) spacing, and then realize the automatic regulation function of Moire fringe contrast, Moire fringe is gathered, is denoted as bar Line 1；S4, place detected element (3), adjusts the posture of detected element, ensures that optical axis is consistent, judges Moire fringe by computer Contrast realizes the automatic adjustment of main scale grating (4) and base ruler grating (6) spacing, and then realizes the automatic of Moire fringe contrast Regulatory function reads grating space variable quantity, gathers Moire fringe, is denoted as striped (2)；S5, the angle for calculating two groups of Moire fringesCalculate the focal length f of detected element；
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| CN201711277642.6A CN107941473A (en) | 2017-12-06 | 2017-12-06 | A kind of Long focal length measurement device with fringe contrast automatic regulation function |
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| CN201711277642.6A CN107941473A (en) | 2017-12-06 | 2017-12-06 | A kind of Long focal length measurement device with fringe contrast automatic regulation function |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799078A (en) * | 2019-03-08 | 2019-05-24 | 中国科学院长春光学精密机械与物理研究所 | Utilize the parallel light tube focal length measuring equipment and method of Moire fringe amplification |
| CN111256848A (en) * | 2019-12-10 | 2020-06-09 | 西南技术物理研究所 | Medium-caliber double-grating type wave aberration measurement laser optical system |
| CN112781502A (en) * | 2020-12-30 | 2021-05-11 | 南京信息工程大学 | Method for verifying and adjusting grating parallelism based on Moire fringe equation |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799078A (en) * | 2019-03-08 | 2019-05-24 | 中国科学院长春光学精密机械与物理研究所 | Utilize the parallel light tube focal length measuring equipment and method of Moire fringe amplification |
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| CN111256848A (en) * | 2019-12-10 | 2020-06-09 | 西南技术物理研究所 | Medium-caliber double-grating type wave aberration measurement laser optical system |
| CN112781502A (en) * | 2020-12-30 | 2021-05-11 | 南京信息工程大学 | Method for verifying and adjusting grating parallelism based on Moire fringe equation |
| CN112781502B (en) * | 2020-12-30 | 2022-04-01 | 南京信息工程大学 | Method for verifying and adjusting grating parallelism based on Moire fringe equation |
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Application publication date: 20180420 |