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CN107931078B - Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array - Google Patents

Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array Download PDF

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Publication number
CN107931078B
CN107931078B CN201710984973.7A CN201710984973A CN107931078B CN 107931078 B CN107931078 B CN 107931078B CN 201710984973 A CN201710984973 A CN 201710984973A CN 107931078 B CN107931078 B CN 107931078B
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Prior art keywords
ultrasonic transducer
mems
transducer array
cleaning device
annular base
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CN201710984973.7A
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CN107931078A (en
Inventor
谢金
乐先浩
庞锦涛
陈旭颖
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0625Annular array
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70Specific application
    • B06B2201/74Underwater

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Studio Devices (AREA)

Abstract

The invention discloses an online real-time ultrasonic cleaning device for an underwater marine lens based on an MEMS ultrasonic transducer array. Ultrasonic cleaning device adopts the little, the MEMS ultrasonic transducer array that the power consumption is low and easily integrate, can evenly arrange a plurality of ultrasonic transducer array modules in the circumference on annular base, each transducer unit in the transducer array module can both the autonomous working, can realize carrying out online real-time or regularly wasing to the ocean underwater lens, and can be according to the operating condition of arbitrary transducer unit in the actual conditions control ultrasonic transducer array and the work number of transducer array module, thereby change ultrasonic cleaning's radiating surface, can also save the energy consumption when high-efficient abluent.

Description

Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array
Technical Field
The invention relates to an ultrasonic cleaning device based on a micro-electro-mechanical system (MEMS) ultrasonic transducer array, in particular to an online real-time ultrasonic cleaning device for lenses of underwater monitoring equipment such as an ocean underwater camera and the like.
Background
The detection and research on the ocean are not only the requirements for developing the ocean economy of the country, but also the foundation for protecting the ocean and realizing sustainable development, and underwater monitoring equipment such as an underwater camera and the like play an important role in ocean underwater operation and ocean scientific research. Then, due to the fouling of marine organisms, the surface of any object placed in seawater is quickly covered by a layer of biofilm, and the biofilm attached to the surfaces of sensitive elements of other monitoring equipment such as underwater camera lenses and the like can influence the normal use of the equipment.
The effective antifouling measure is the guarantee that the underwater monitoring equipment can work normally, the main antifouling methods at present can be divided into a physical antifouling method, a chemical antifouling method and a biological antifouling method, and the latter two methods cause certain pollution to the marine environment due to the adoption of chemical biological coatings. The ultrasonic cleaning in the physical antifouling method is to utilize the vibration of an ultrasonic device in water to generate cavitation effect to form a series of tiny bubbles, and the bubbles are broken to impact the surface of an object, thereby achieving the purpose of cleaning the washed object. Ultrasonic cleaning is a clean and efficient antifouling measure, but the existing ultrasonic cleaning device is large in size and high in energy consumption, and cannot be integrated on an underwater camera to clean a lens in real time. In order to ensure that monitoring equipment such as an underwater camera can normally work, the monitoring equipment can only be recovered to the water surface for manual cleaning, or a robot is used for submerging to the position of a monitor for cleaning, so that the progress of ocean underwater operation and scientific research is seriously hindered, and meanwhile, the maintenance cost of the equipment is greatly increased.
According to the large-scale use of the current underwater camera in ocean development and the lack of an effective antifouling method, a simple, efficient and relatively economical antifouling decontamination device for the lens of the underwater monitoring equipment such as the underwater camera is needed.
Disclosure of Invention
The invention provides an on-line real-time ultrasonic cleaning device for an underwater marine lens based on an MEMS ultrasonic transducer array, which aims to solve the problem of decontamination of the lens of underwater monitoring equipment such as an underwater camera and the like at present and enable the equipment to work normally underwater for a long time.
The online real-time ultrasonic cleaning device for the underwater lens adopts an MEMS ultrasonic transducer array which has the advantages of small size, low energy consumption, easy integration and the like as a main working element, the MEMS ultrasonic transducer can be an MEMS piezoelectric ultrasonic transducer or an MEMS capacitive ultrasonic transducer, each transducer unit can work independently, and the array form of the transducer can be a circular array, an annular array or a rectangular array.
The invention adopts the following specific technical scheme:
the online real-time ultrasonic cleaning device of underwater lens based on MEMS ultrasonic transducer array, it includes annular base, MEMS ultrasonic transducer array module, cover plate, annular gland bonnet and control drive circuit module, the annular base is used for fixing the cleaning device on underwater monitoring equipment lens; the annular base is circumferentially provided with a plurality of through holes, an MEMS ultrasonic transducer array module is installed in each through hole, MEMS ultrasonic transducers which are arranged in an array form are integrated in each MEMS ultrasonic transducer array module, and the sound radiation direction of each MEMS ultrasonic transducer faces towards the lens to be cleaned; the through hole is positioned on one side of the outer surface of the annular base and is fixedly sealed through a cover plate; an annular sealing cover is fixed around the outer part of the through hole in the circumferential direction of the annular base and used for carrying out secondary waterproof sealing on the through hole; the MEMS ultrasonic transducer array module is connected with the control driving circuit module and integrated on the annular base.
Preferably, the MEMS ultrasonic transducer is a MEMS piezoelectric ultrasonic transducer or a MEMS capacitive ultrasonic transducer.
Preferably, the ultrasonic cleaning device is connected with the underwater monitoring equipment to form a common power supply.
Preferably, the through hole and the side, facing the inner surface of the annular base, of the MEMS ultrasonic transducer array module are sealed and fixed through waterproof glue.
Preferably, the cover plate and the annular base are both provided with signal line through holes, and signal lines of the MEMS ultrasonic transducer array module penetrate through the signal line through holes and then are connected with the control driving circuit module.
Preferably, the through hole is rectangular on one side of the outer surface of the annular base and circular on one side of the inner surface of the annular base.
Preferably, the bottom of the cover plate is hollowed, the MEMS ultrasonic transducer array module is installed in the hollowed part, and the MEMS ultrasonic transducer array module and the cover plate are in clearance fit or transition fit.
Preferably, the array of the MEMS ultrasonic transducers is in the form of at least one of a circular array, a rectangular array or other regular array.
The invention can control the working state of any transducer unit in the MEMS ultrasonic transducer array and the working number of transducer array modules according to actual requirements, thereby changing the radiation surface of ultrasonic cleaning, cleaning underwater lenses on line in real time or at regular time, efficiently cleaning and saving energy consumption. The whole set of device has simple structure and reliable work, and is suitable for working in the environment with high water pressure in the sea.
Drawings
For a better understanding of the objects, aspects and advantages of the present invention, reference is made to the following description taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic diagram of the present invention.
Fig. 2 is a partially enlarged view of region i in fig. 1.
In the figure: 1. the underwater monitoring device comprises an annular base, a 2 MEMS ultrasonic transducer array module, a 3. Cover plate, a 4. Annular sealing cover, a 5. Control driving circuit module, a 6. Underwater monitoring device lens, a signal line through hole on the A. Annular base and a signal line through hole on the B. Cover plate.
Detailed Description
The invention is further illustrated and described below with reference to the drawings and the detailed description. The technical features of the embodiments of the present invention can be combined correspondingly without mutual conflict.
As shown in fig. 1 and 2, the online real-time ultrasonic cleaning device for an underwater marine lens based on an MEMS ultrasonic transducer array of the present embodiment includes an annular base 1, an MEMS ultrasonic transducer array module 2, a cover plate 3, an annular sealing cover 4, and a control driving circuit module 5. The whole device is fixed on the underwater monitoring equipment lens 6 by the annular base 1, and the structure is compact. A plurality of through holes are formed in the circumferential direction of the annular base 1, the MEMS ultrasonic transducer array module 2 is installed in the through holes, and MEMS ultrasonic transducers which are arranged in an array form are integrated in the MEMS ultrasonic transducer array module 2. In order to clean the lens, the sound radiation direction (the direction of emitting ultrasonic waves) of the MEMS ultrasonic transducer needs to be toward the lens to be cleaned, that is, the ultrasonic waves are radiated toward the center of the annular base 1.
The transducer array module is fixed and sealed by a cover plate 3 and an annular sealing cover 4 in a double-layer mode, the cross sections of two ends of a through hole for mounting the MEMS ultrasonic transducer array module 2 on the annular base 1 are different in shape, the cross sections are located on one side of the outer surface of the annular base 1 and are rectangular, and the cross sections are located on one side of the inner surface of the annular base 1 and are circular. The cover plate 3 is also rectangular and hollow on the inner surface, the base of the MEMS ultrasonic transducer array module 2 is arranged in the hollow part, and the cover plate and the base are in clearance fit or transition fit. The cover plate is tightly fixed on one side of the outer surface of the annular base through the through hole, and each MEMS ultrasonic transducer array module 2 is supported and leaned on the radial single side formed between the base and the cover plate 3. The circular diameter of the base of the MEMS ultrasonic transducer array module 2 is slightly smaller than the circular diameter of the through hole of the annular base 1, and waterproof glue is used at the edge of one side of the inner surface of the module facing to the annular base 1 to strengthen the fixing and sealing effects. The ultrasound transducer array module cover plate 3 itself is fixed by means of a rectangular portion in the through hole of the ring-shaped base 1, thereby limiting the movement of the MEMS ultrasound transducer array module 2 in the tangential direction. Use annular sealed lid 4 to encircle to fix outside at the through-hole on this basis, can adopt seal ring or waterproof glue to carry out water repellent between annular sealed lid 4 and the annular base 1, through this secondary fixed seal, it is sealed effectual, be fit for working in the high hydraulic environment in the sea.
The cover plate 3 and the annular base 1 are both provided with signal line through holes, and the MEMS ultrasonic transducer array module 2 is integrated on the annular base. The control driving circuit module 5 is fixed on the annular base 1, shares a power supply with the underwater monitoring equipment, and is connected with the MEMS ultrasonic transducer array module 2 through a signal line through hole A on the annular base and a signal line through hole B on the cover plate. The control driving circuit module 5 may adopt an ultrasonic transducer driving circuit matched with the MEMS ultrasonic transducer array module 2, and generally mainly includes a processor, an ultrasonic signal driver and an ultrasonic power amplifier. The control driving circuit module 5 may be a module pre-configured or recommended by a transducer manufacturer, or may be any of various driving modules reported in the prior art, and the specific model and wiring manner are not limited as long as the control of the MEMS ultrasonic transducer can be achieved.
The MEMS ultrasonic transducer array module 2 is fixedly sealed on the annular base 1 by using an ultrasonic transducer array module cover plate 3 and an annular sealing cover 4, the MEMS ultrasonic transducer is a basic unit forming the MEMS ultrasonic transducer array module and can be an MEMS piezoelectric ultrasonic transducer or an MEMS capacitive ultrasonic transducer, and the device is based on an MEMS micro-processing technology, so that the performance is stable and the work is reliable.
The MEMS ultrasonic transducer array module is used for arraying the MEMS ultrasonic transducers, the array form can be a circular array, an annular array or a rectangular array and other regular arrays, and devices after being arrayed are small in size, simple in structure, low in energy consumption and easy to integrate. The action mode of the MEMS ultrasonic transducer directly contacts with seawater through the circular side of the through hole to play a role. The signals of the MEMS ultrasonic transducers are connected with the upper surface of the cover plate from the upper electrode and then transmitted out, the signals of all the MEMS ultrasonic transducer array modules are connected together, and finally the signals are uniformly transmitted to the control driving circuit module 5.
When the lens needs to be cleaned, the control driving circuit module 5 can generate corresponding driving signals to drive the MEMS ultrasonic transducer array module 2 to carry out ultrasonic vibration and generate a cavitation effect in water to peel off a biological film and other dirt on the surface of the lens, so that the purpose of cleaning the underwater lens on line in real time is achieved. The working state of any transducer unit in the MEMS ultrasonic transducer array module 2 and the working number of the transducer array module 2 can be controlled according to actual needs, so that the radiation surface of ultrasonic cleaning is changed, the underwater monitoring device lens 6 can be cleaned efficiently, and energy consumption can be reduced.
The device has simple structure and stable working performance, and can clean the lens of the underwater monitor on line in real time or at regular time, so that the underwater monitor can normally work in water for a long time.
The above-described embodiments are merely preferred embodiments of the present invention, which should not be construed as limiting the invention. Various changes and modifications may be made by one of ordinary skill in the pertinent art without departing from the spirit and scope of the present invention. Therefore, the technical solutions obtained by means of equivalent substitution or equivalent transformation all fall within the protection scope of the present invention.

Claims (8)

1. An underwater lens online real-time ultrasonic cleaning device based on an MEMS ultrasonic transducer array is characterized by comprising an annular base (1), an MEMS ultrasonic transducer array module (2), a cover plate (3), an annular sealing cover (4) and a control driving circuit module (5), wherein the annular base (1) is used for fixing the cleaning device on an underwater monitoring equipment lens; the annular base (1) is circumferentially provided with a plurality of through holes, an MEMS ultrasonic transducer array module (2) is installed in each through hole, MEMS ultrasonic transducers which are arranged in an array form are integrated in each MEMS ultrasonic transducer array module (2), and the sound radiation direction of each MEMS ultrasonic transducer faces towards the lens to be cleaned; the through hole is positioned on one side of the outer surface of the annular base (1) and is fixedly sealed through the cover plate (3); an annular sealing cover (4) is fixed around the outer part of the circumferential through hole of the annular base (1) and is used for carrying out secondary waterproof sealing on the through hole; the MEMS ultrasonic transducer array module (2) is connected with the control driving circuit module (5), and the MEMS ultrasonic transducer array module (2) is integrated on the annular base.
2. The on-line real-time ultrasonic cleaning device for underwater lenses based on MEMS ultrasonic transducer array as claimed in claim 1, wherein said MEMS ultrasonic transducer is a MEMS piezoelectric ultrasonic transducer or a MEMS capacitive ultrasonic transducer.
3. The on-line real-time ultrasonic cleaning device for underwater lens based on MEMS ultrasonic transducer array as claimed in claim 1, wherein the ultrasonic cleaning device is connected with a common power supply for underwater monitoring equipment.
4. The on-line real-time ultrasonic cleaning device for the underwater lens based on the MEMS ultrasonic transducer array is characterized in that the through hole and one side, facing the inner surface of the annular base (1), of the MEMS ultrasonic transducer array module (2) are sealed and fixed through waterproof glue.
5. The online real-time ultrasonic cleaning device for the underwater lens based on the MEMS ultrasonic transducer array as claimed in claim 1 is characterized in that the cover plate (3) and the annular base (1) are both provided with signal line through holes, and the signal lines of the MEMS ultrasonic transducer array module (2) are connected with the control drive circuit module (5) after passing through the signal line through holes.
6. The on-line real-time ultrasonic cleaning device for the underwater lens based on the MEMS ultrasonic transducer array as recited in claim 1, wherein the through hole is rectangular at one side of the outer surface of the annular base (1) and circular at one side of the inner surface of the annular base (1).
7. The on-line real-time ultrasonic cleaning device for the underwater lens based on the MEMS ultrasonic transducer array is characterized in that the bottom of the cover plate (3) is hollowed, and the MEMS ultrasonic transducer array module (2) is installed in the hollowed part and is in clearance fit or transition fit with the cover plate.
8. The on-line real-time ultrasonic cleaning device for the underwater lens based on the MEMS ultrasonic transducer array as claimed in claim 1, wherein the array form of the MEMS ultrasonic transducer is at least one of a circular array, a ring array, a rectangular array or other regular array.
CN201710984973.7A 2017-10-20 2017-10-20 Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array Active CN107931078B (en)

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CN110216109A (en) * 2019-04-17 2019-09-10 山东科技大学 A kind of device using bubble cavitation corrosion cleaning marine biofouling
CN111167792B (en) * 2020-01-10 2021-03-16 淮阴工学院 Automatic cleaning device for Bernoulli experimental equipment
CN113247221B (en) * 2021-07-07 2021-10-08 深之蓝海洋科技股份有限公司 Underwater robot and lens decontamination method thereof

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JP2999924B2 (en) * 1994-07-01 2000-01-17 三洋電機株式会社 Ultrasonic cleaning equipment
WO2009126342A1 (en) * 2008-01-14 2009-10-15 David Gross High power density fuel cleaning with planar transducers
CN102580952A (en) * 2012-03-05 2012-07-18 哈尔滨工程大学 Underwater automatic cleaning protective cover
CN202570670U (en) * 2012-05-04 2012-12-05 山东省科学院海洋仪器仪表研究所 Ultrasonic cleaning device for marine underwater monitoring instruments
CN103754820B (en) * 2013-12-27 2015-11-25 浙江大学 Based on sound field synthesis and the parallel operation device of ultrasonic transducer annular array
CN104492752B (en) * 2014-12-01 2016-09-28 河海大学常州校区 One can controlled underwater ultrasound washer and method of work
CN105170563A (en) * 2015-09-25 2015-12-23 无锡市博阳超声电器有限公司 Annular vibration type ultrasonic cleaning tank
CN207401700U (en) * 2017-10-20 2018-05-25 浙江大学 The online real-time ultrasound cleaning device of underwater lens based on MEMS ultrasound transducer arrays

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