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CN107917614B - A kind of microwave pressure sintering furnace - Google Patents

A kind of microwave pressure sintering furnace Download PDF

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Publication number
CN107917614B
CN107917614B CN201711419320.0A CN201711419320A CN107917614B CN 107917614 B CN107917614 B CN 107917614B CN 201711419320 A CN201711419320 A CN 201711419320A CN 107917614 B CN107917614 B CN 107917614B
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microwave
pressure
furnace body
cone
loudspeaker
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CN107917614A (en
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李艳君
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Hunan Long Wave Microwave Technology Co Ltd
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Hunan Long Wave Microwave Technology Co Ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/14Arrangements of heating devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)

Abstract

The invention discloses a kind of microwave pressure sintering furnaces, and bell, attemperator and the energy feedback device being tightly connected including furnace body, with the opening of furnace body, energy feedback device includes magnetron and microwave excitation feed-in pressure-bearing device;The microwave excitation feed-in pressure-bearing device includes the wave transparent fixing piece of the round tube being arranged on furnace body, the cone pressure part positioned at the loudspeaker of furnace interior, in loudspeaker and limitation cone pressure part movement;The antenna of the magnetron is located in round tube, and antenna and round tube form coaxial resonant cavity.Microwave of the invention is after the excitation of coaxial resonant cavity and loudspeaker, enter in furnace body through cone pressure part, realize microwave energy-feeding, round tube inside diameter can be contracted to 5-30mm, the inner wall of cone pressure part and loudspeaker patch merga pass fixing piece is fixed, it is effectively prevent pressure leakage, improves the stress condition of furnace body and cone pressure part, greatly reduces the pressure-bearing pressure design of sintering furnace and energy feedback device and the difficulty of processing.

Description

A kind of microwave pressure sintering furnace
Technical field
The invention belongs to chemical consersion units, are specifically related to a kind of microwave pressure sintering furnace.
Background technique
Microwave chemical is since last century late nineteen eighties are worldwide used as frontier science emerging, in chemistry etc. It is grown rapidly in various industries.Scientific research at present, production all have higher practicability to need microwave chemical reaction apparatus It asks, how to allow efficient, energy-saving and environmental protection microwave chemical reaction apparatus to meet the different production requirement of various industries, in reaction pressure Power, operating power, temperature control etc. all propose new challenge to traditional microwave chemical reaction apparatus.
Document: frequency conversion high-temperature steam micro-wave oven key technology research, it is indicated that, in general microwave reaction device, same To find the preferable waveguide mouth of a coupling ratio inside one resonant cavity is also relatively difficult thing, and matching one meets performance It is required that waveguide mouth work almost account for 80% or more of entire product experimental work amount.And microwave high-temperature reaction kettle not only needs In view of microwave excitation problem, it is also necessary to consider that high pressure pressure-bearing problem, design difficulty are bigger.It is only simple to consider one side, without Consider that the design scheme of another aspect does not all meet actual demand.
The feed-in method and feed-in structure of microwave device are the key that realization air pressure and difficult point, and by feed-in mode and feed-in The limitation of structure, feed-in structure are difficult to ensure the compressive property of feed-in part, be easy to cause air-flow from micro- by excessively high pressure Wave apparatus leakage, so that internal pressure kept decline, the heat losses rate easy impact microwave source of liquid stream that is high, while leaking, lead The disabler of microwave source, equipment damage are caused, and there are great security risks.
Currently, the feed-in bearing structure of microwave device mainly has:
One, using waveguide-blind plate feed-in pressure-bearing mode of conventional microwave device.
Two, using round bottom test tube type wave transparent element pressure-bearing mode feed-in.
Patent CN200610046206, using rectangular waveguide flange, quartz plate seal and pressure bearing is commonly BJ26 microwave square Shape waveguide flange, rectangular opening is having a size of 43.2*86.4mm;Such microwave feed-in mode is seriously affected in the rectangular opening of furnace body The furnace body pressure design of autoclave;In the solution due to microwave, especially in aqueous solution, penetration depth is limited, aqueous solution In general penetration depth be no more than 3-8cm, reaction kettle needs up-sizing to produce, during the sintering process, especially large scale material Microwave sintering when, since penetration depth is limited in the material for microwave, such as the stronger silicon carbide of absorbing property or silicon nitride material Material sintering, penetration depth are no more than 5-10cm, therefore, either from increasing microwave heating power, or from homogeneous heating angle Degree or microwave feed-in depth angle consider, are required to multiple microwave devices and uniformly match use, when because using rectangular waveguide energy regenerative, Multiple rectangular openings are opened up, on the pressure part of pressure vessel, what is generally selected is high-boron-silicon glass and quartz glass, in national standard GB/T 23259 and NB/T47017-2011 are explicitly pointed out, and pressure-bearing glass diameter is inversely proportional with permission institute's pressure-bearing, rectangular Angle Position stress is concentrated, and opening size is big, greatly increases the pressure-bearing pressure design of reaction kettle autoclave body and microwave feed-in window And difficulty of processing.
It is presented in patent CN201410471234 and CN201410471231 using round bottom test tube type wave transparent element pressure-bearing mode Enter, is connected on reacting furnace-e/or using large scale waveguide aperture, equally when multiple microwave devices are applied in combination, also due to by The bore size of pressure vessel and corresponding the number of openings limitation, have seriously affected being evenly arranged for microwave device, while also increasing The autoclave body of autoclave and the pressure-bearing pressure design and difficulty of processing of microwave feed-in window;Meanwhile microwave magnetron antenna Length is generally between 25-50mm, in large-sized high-pressure bottle, the universal 10mm of thickness of 2 mounting flange faces and kettle wall More than, the exposed length of the standard magnetron antenna of industrial common 2450MHz and 915MHz and rectangular cavities are difficult to With combination of stimulation microwave.
In the prior art, limited by microwave energy-feeding bearing structure, greatly increase reaction unit pressure design and Difficulty of processing simultaneously limits the use scope of microwave high pressure sintering equipment.
In microwave sintering, there are weak, the multiple energy feedback devices of need since the electromagnetic field of sintering zone has by force in different zones Uniform matched design homogenizes the electromagnetic field of sintering zone, simultaneously because sintering temperature is higher, needs big heating power, also needs Multiple energy feedback devices are set, in equipment to increase the heating power of equipment.Especially after large-scale production, heating is often needed It wants dozens or even hundreds of energy feedback device while using, this proposes new choose to microwave energy-feeding window and its pressure-bearing design War.Existing realization technology is difficult to meet the needs of amplification production.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of microwave pressure sintering furnaces, and bearing capacity is good, and uniformly installation is more A efficient microwave energy feed system, uniformity of temperature profile, sintering effect are good.
The present invention includes furnace body, bell, attemperator and energy feedback device with the opening sealed connection of furnace body, microwave Energy feed system includes magnetron and microwave excitation feed-in pressure-bearing device;
The microwave excitation feed-in pressure-bearing device includes the round tube being arranged on furnace body, the loudspeaker positioned at furnace interior, position In the wave transparent fixing piece of cone pressure part and limitation cone pressure part movement in loudspeaker;
The antenna of the magnetron is located in round tube, and antenna and round tube form coaxial resonant cavity, coaxial resonant cavity and loudspeaker Form microwave excitation device.
The round tube inside diameter is 5-30mm.The length of round tube is the 1/4-1/2 for transmitting microwave wavelength.Reducing furnace body wall thickness While spending, guarantees that multiple microwave devices are uniformly distributed and microwave efficiently motivates energy regenerative, realize the being heated evenly property of substance.
Loudspeaker bore a height of 10~100mm, and bore is 45~180mm, preferably bore high 20~50mm, and bore is 60~ 140mm。
The cone pressure part material is polytetrafluoroethylene (PTFE), quartz glass, high purity aluminium oxide, high-boron-silicon glass, PEEK At least one of plastics.Material selection electromagnetic wave transparent material, while there is pressure-resistant performance.
Gasket is set between the cone pressure part and loudspeaker inner wall, between cone pressure part and wave transparent fixing piece Gasket is set.Gasket material is at least one of polytetrafluoroethylene (PTFE), fluorubber, nitrile rubber.
The wave transparent fixing piece is hollow metal flange or the plate that wave transparent material is made into.During wave transparent fixing piece is The gasket for stress buffering is equipped with when empty metal flange, between flange and cone pressure part.
The energy feedback device is uniformly arranged multiple on furnace body.
The bell and furnace body are tight by bolt handle, and gasket seal is equipped between bell and furnace body.
The feed inlet is arranged on bell, and discharge port setting is respectively provided with valve in bottom of furnace body, feed inlet and discharge port, One or more are arranged in feed inlet.
Turntable the invention also includes motor and with motor drive axis connection, the attemperator are placed on turntable On, material is placed with inside attemperator.
It is provided with protrusion or groove on the turntable, is provided on attemperator corresponding with above-mentioned protrusion or groove Groove or protrusion.When being provided with protrusion on turntable, the setting of attemperator lower part is fluted, conversely, then opposite.
Pressure measuring unit, temperature measuring equipment, releasing pressure automatically solenoid valve and safety valve are provided on the bell;
The controller for controlling temperature and pressure in the furnace body is additionally provided with outside the furnace body;
The furnace body is connected with pressurizing device.
The beneficial effects of the present invention are: the antenna of magnetron is located in round tube, antenna and round tube form coaxial resonant cavity, together Axis resonant cavity presses the formation microwave excitation device of certain dimension scale and loudspeaker combination, and microwave is motivated through microwave excitation device Afterwards, enter in furnace body through cone pressure part, realize the efficient energy regenerative of microwave, the microwave feed-in mouth on furnace body is round tube, round tube Internal diameter can be contracted to 5-30mm, and the inner wall patch merga pass wave transparent fixing piece of cone pressure part and loudspeaker is fixed, and effectively prevent Gas is leaked from microwave feed-in mouth, in the case where guaranteeing that microwave effectively motivates, is greatly reduced the bore size of furnace body, is improved Hole shape improves the stress condition of furnace body, microwave feed-in mouth and cone pressure part, can make microwave pressure sintering furnace The use scope for extending microwave pressure sintering furnace to higher pressure is improved with pressure, is uniformly arranged on furnace body multiple micro- Wave energy feed system is realizing while being evenly heated of microwave pressure sintering furnace, is greatly reducing microwave pressure sintering furnace and micro- The pressure-bearing pressure design of wave energy feed system and the difficulty of processing.Microwave load point is moved in sintering furnace simultaneously, microwave can penetrate To the more center of reaction system, the influence of the reduction of the reaction effect caused by the depth of microwave penetration is reduced, same anti- It answers in system, settable larger sized sintering furnace.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of energy feedback device of the present invention.
Fig. 2 is structural schematic diagram of the invention.
1 furnace body, 2 magnetrons, 3 round tubes, 4 wave transparent fixing pieces, 5 cone pressure parts, 6 gaskets, 7 antennas, 8 in the figure Coaxial resonant cavity, 9 energy feedback devices, 10 bolts, 11 bells, 12 safety valves, 13 pressure measuring units, 14 motors, 15 thermometrics dress It sets, 16 turntables, 17 attemperators, 18 materials, 19 air inlets, 20 loudspeaker, 21 exhaust outlets.
Specific embodiment
As depicted in figs. 1 and 2, the present invention includes furnace body 1, bell 11, attemperator with the opening sealed connection of furnace body 1 17 and energy feedback device 9, energy feedback device 9 includes magnetron 2 and microwave excitation feed-in pressure-bearing device;
The microwave excitation feed-in pressure-bearing device includes the round tube 3 being arranged on furnace body 1, the loudspeaker inside furnace body 1 20, the cone pressure part 5 in loudspeaker 20 and the wave transparent fixing piece 4 of the limitation movement of cone pressure part 5;
The antenna 7 of the magnetron 2 is located in round tube 3, and antenna 7 and round tube 3 form coaxial resonant cavity 8, coaxial resonant cavity 8 Microwave excitation device is formed with loudspeaker 20.
Furnace body 1 and bell 11 are all made of Special high-strength metal plate and are made, to guarantee its voltage endurance capability.Cone pressure part 5 by pressure seal in furnace body 1, prevent gas in furnace body 1 from leaking from round tube 3.If being not provided with cone pressure part 5, let out The gas of dew can damage energy feedback device 9, pressure needed for sintering furnace can not ensure reaction, and there are security risks.
Magnetron 2 is fixed by screw and fixed plate and furnace body 1, and compresses with round tube 3, and the antenna 7 of magnetron 2 is packed into circle Pipe 3, forms coaxial resonant cavity 8, and the microwave excitation device that coaxial resonant cavity 8 is formed with loudspeaker 20 effectively swashs microwave It encourages.Round tube 3 and loudspeaker 20 are all made of high duty metal and are made.
This microwave pressure sintering furnace, the round tube 3 that the antenna 7 of magnetron 2 enters, antenna 7 and round tube 3 form coaxial resonant cavity 8, after microwave combines effective excitation of the microwave excitation device formed by coaxial resonant cavity 8 with loudspeaker 20, held through cone Casting die 5 realizes the controllable efficient energy regenerative in microwave transmission direction;The feed-in mouth of furnace body is optimized for round tube, pressure part is optimized for justifying Cone pressure part 5, and be bonded with the inner wall of loudspeaker 20, it is fixed in loudspeaker by wave transparent fixing piece 4, cone pressure part 5 will Pressure seal improves the sealing intensity of entire energy feedback device 9 in furnace body 1, effectively prevent the intracorporal gas of furnace from microwave The leakage of feed-in mouth greatly improves furnace body 1 and cone in the case where guaranteeing that microwave effectively motivates and conduction orientation is controllable The stress condition of pressure part 5, while cone pressure part 5 is not exposed to outside, it is not easy to it damages.
If the application will be unable to pressure required when safeguard work without cone pressure part 5.If not with it is coaxial humorous The chamber that shakes by certain size matches combined loudspeaker 20, but use rectangle or round bottom test tube type wave transparent element, and the application is by nothing Method forms microwave excitation device, so that microwave excitation and control microwave transmission direction cannot be realized effectively.
3 internal diameter of round tube is 5-50mm, preferably 5-30mm, more preferably 10-20mm.Number of patent application is 200610046206.3 waveguide pipe 9 is the rectangular section of 90 × 45mm, need to be equipped with the pressure-bearing glass that diameter is 120mm.Simultaneously Due to rectangular opening, square position stress is easily concentrated.The aperture for the through-hole 5 that number of patent application is 201410471231.0 is 20mm-30mm is much higher than the sectional dimension of the application.The area of section of round tube 3 is smaller, and bearing capacity is stronger.Although this Shen The size of round tube please is smaller, but setting is matched by certain size with coaxial resonant cavity 8 in the intracorporal loudspeaker 20 of furnace and is combined into Microwave excitation cavity, can effective microwave and control microwave transmission direction, while microwave load point being moved in furnace body, microwave can be worn Thoroughly to the more center of reaction system.Realize more evenly being heated for reaction system, and reinforce microwave to influence the promotion of reaction.
Industry heating is often 12.24cm with microwave 2.45GHz frequency wavelength, and the length of round tube 3 is 1/4 to the 1/2 of wavelength, Preferably 3.06-6.12cm.The loudspeaker 20 bore a height of 10~100mm, and bore is 45~180mm, preferably bore it is high by 20~ 50mm, bore are 60~140mm.Pressing force container design codes, the technology that number of patent application is 200610046206.3 are implemented In the process, the sintering furnace body of φ 350mm, the 90*45mm rectangular opening being difficult to realize on Same Latitude more than at 2 and at 2.Together When φ 120mm pressure-bearing glass, sintering furnace allow using be no more than 2.5mpa.Number of patent application be 201410471231.0 in, Such as high-tension apparatus, the thickness of pressure part mounting flange face and furnace wall is required in 10mm or more, microwave magnetron antenna length Generally between 25-50mm, in this structure, exposed antenna length and its pressure-resistant waveguide inner wall are difficult to form effective microwave Resonant cavity;Meanwhile when the microwave transmission of its rear end, BJ26 (rectangular waveguide, 86.3 × 43.2mm of size) or BY22 need to be equally used Waveguide more than (circular waveguide, size φ 97.9mm) or its size.By taking the sintering furnace body of φ 350mm as an example, such structure The 90*45mm rectangular opening being difficult to realize on Same Latitude more than at 2 and at 2.And in this application, as using 10~20mm Circular opening microwave feed-in can realize 4 and 4 or more microwaves easily in the case where not influencing furnace body stress condition, on Same Latitude Feed-in aperture.Small size aperture simultaneously is processed easier.Built in bearing plate, wave transparent fixing piece 4 is not necessarily to stress, it is opposite this two A patent, the processing of wave transparent fixing piece 4 is easier, and material therefor is less, and quality is lighter.
5 material of cone pressure part is polytetrafluoroethylene (PTFE), quartz glass, high purity aluminium oxide, high-boron-silicon glass, PEEK At least one of plastics.
Different 5 materials of cone pressure part can be selected, to guarantee cone pressure part 5 according to different needs Bearing capacity.5 material of cone pressure part can use a type of material, or carry out phase using a plurality of types of materials Mutually overlapping.
When using the materials such as quartz glass, high purity aluminium oxide, high-boron-silicon glass as cone 5 material of pressure part, Between 20 inner wall of cone pressure part 5 and loudspeaker, stress buffering is set between cone pressure part 5 and wave transparent fixing piece 4 and has been made Gasket.6 material of gasket is at least one of polytetrafluoroethylene (PTFE), fluorubber, nitrile rubber.
The wave transparent fixing piece 4 is hollow metal flange or the plate that wave transparent material is made into.
20 edge of loudspeaker is equipped with link flange face, is fixed on cone pressure part 5 by linking with hollow metal flange In loudspeaker 20, gasket 6 plays sealing and stress buffer function, hollow metal flange, in the same of fixed cone pressure part 5 When can effectively penetrate microwave.
The energy feedback device 9 is uniformly arranged multiple on furnace body.
Microwave is as a kind of energy Wave heating, and penetration depth is always to restrict the main problem of its amplification production, generally Sintered material, the Effective depth penetration of microwave is 5-10cm, the case where according to material wave-sucking performance and treating capacity, is often needed Multiple energy feedback devices 9 to be uniformly arranged on furnace body to realize the uniform energy regenerative of microwave pressure sintering furnace.It is micro- because using Wave energy feed system 9, furnace body 1 are welded and fixed with round tube 3, and the internal diameter of round tube small can arrive 5-30mm, greatly improve furnace body 1 and micro- The bearing capacity of wave energy feed system 9 will not increase microwave pressure burning even if multiple energy feedback devices 9 are arranged on furnace body 1 The pressure design of freezing of a furnace and the difficulty of processing, while equipment allows use to higher pressure environment.Simultaneously by microwave feed-in Point moves in furnace body, and microwave can be penetrated to the more center of reaction system, reduces and is reacted caused by the depth of microwave penetration The influence of effect reduction, in same reaction system, settable larger sized furnace body.
The bell 11 is tight by 10, bolt with furnace body 1, and gasket seal is equipped between bell and furnace body.Connecting portion Compressive property is good, and good airproof performance effectively prevent microwave leakage, and the leakage of the air-tightness and microwave that ensure furnace body is permitted in national standard Perhaps in range.
Pressure measuring unit 13, temperature measuring equipment 15, safety valve 12 are provided on the bell 11.Use is additionally provided with outside the furnace body 1 In the controller for controlling temperature and pressure in the furnace body 1.
Be additionally provided with air inlet 19 and exhaust outlet 21 on the furnace body 1, for in furnace body 1 rush deflate, keep high pressure or Vacuum environment.
Pressure measuring unit 13 is used to detect and control the pressure when work of microwave pressure sintering furnace, since pressure sensor can be by Microwave interference, therefore in pressure detecting position need that wave suppression device is arranged, this wave suppression device can be single hole or gather round small The metal plate in hole, it is ensured that the accuracy of pressure detecting, pressure measuring unit 13 are connect with controller.Pressure measuring unit 13 will test control letter It number is sent to controller, controller adjusts the intracorporal pressure of furnace by adjusting discharge port, the valve of feed inlet.
Temperature measuring equipment 15 is used to detect and control the temperature when work of microwave pressure sintering furnace, and electricity can be used in temperature measuring equipment 15 Even thermometric or infrared measurement of temperature, temperature measuring equipment 15 are connect with controller, and temperature measuring equipment 15 will test control signal and be sent to controller, are controlled The feed-in microwave power size of the magnetron 2 of device control energy feedback device 9 processed, realizes temperature control, multi-point combination can be used Formula observing and controlling temperature, to guarantee the uniformity of thermal field.
Of the invention further includes motor 14 and is driven the turntable 16 of axis connection with motor 14, and the attemperator 17 is put It sets on turntable 16, is placed with material inside attemperator 17.Preferably, protrusion or recessed is provided on the turntable 16 Slot is provided with groove corresponding with above-mentioned protrusion or groove or protrusion on attemperator 17.Turntable 16 rotates material 18, can be with Allow the radiation for receiving microwave of material 18 more evenly.
By material 18 be added attemperator 17 in, open bell 11, be put into attemperator 17, after, by bell 11 with Furnace body 1 is tightly connected;Pass through pressure, temperature and time needed for controller setting reaction;By pressurizing device by microwave pressure Sintering furnace is forced into required pressure, opens motor 14, starts energy feedback device 9, microwave is by energy feedback device 9 to anti- Object is answered to be heated, temperature measuring equipment 15 detects the temperature of reactant, and will test information and feed back to controller, and controller adjustment is micro- The size of wave power;Setting value is reached to temperature and pressure, after the time for keeping setting, controller closes energy feedback device 9 And motor 14, heating, rotation stop.
In order to ensure safety, safety valve 12 is set on bell 11, when the pressure in microwave pressure sintering furnace is more than design When pressure, safety valve 12 can be automatically springed open.
Using identical microwave frequency, identical size etc., but the microwave pressure sintering furnace that pressure-bearing device is different, pass through comparison The performances such as pressure resistance and heating, it is as follows to obtain detection table.
The performance test table of 1 φ 350mm microwave pressure sintering furnace of table
From table 1 it follows that microwave device identical for diameter can be significant using bearing structure of the invention Reduction pressure-bearing part thickness, improve maximum allowble pressure, and Same Latitude is (for the sintering furnace of setting, as equally The microwave feedthrough being arranged on highly) it is more, the being heated evenly property of reactive material can be improved.

Claims (10)

1. a kind of microwave pressure sintering furnace, which is characterized in that the bell being tightly connected including furnace body (1), with the opening of furnace body (1) (11), attemperator (17) and energy feedback device (9), energy feedback device (9) include magnetron (2) and microwave excitation feed-in Pressure-bearing device;
The microwave excitation feed-in pressure-bearing device includes the round tube (3) being arranged on furnace body (1), is located at furnace body (1) internal loudspeaker (20), the cone pressure part (5) that is located in loudspeaker (20) and the mobile wave transparent fixing piece of limitation cone pressure part (5) (4);
The antenna (7) of the magnetron (2) is located in round tube (3), and antenna (7) and round tube (3) form coaxial resonant cavity (8).
2. microwave pressure sintering furnace according to claim 1, which is characterized in that round tube (3) internal diameter is 5-30mm, circle The length of pipe (3) is the 1/4-1/2 for transmitting microwave wavelength.
3. microwave pressure sintering furnace according to claim 1, which is characterized in that the loudspeaker (20) cone a height of 10~ 100mm, bore are 45~180mm.
4. microwave pressure sintering furnace according to claim 1,2 or 3, which is characterized in that cone pressure part (5) material Matter is at least one of polytetrafluoroethylene (PTFE), quartz glass, high purity aluminium oxide, high-boron-silicon glass, PEEK plastics.
5. microwave pressure sintering furnace according to claim 4, which is characterized in that cone pressure part (5) and loudspeaker (20) Gasket (6) are set between inner wall, gasket (6) are set between cone pressure part (5) and wave transparent fixing piece (4).
6. microwave pressure sintering furnace according to claim 5, which is characterized in that the wave transparent fixing piece (4) is hollow Metal flange or the plate that is made into of wave transparent material.
7. microwave pressure sintering furnace according to claim 6, which is characterized in that the energy feedback device (9) is in furnace body (1) it is uniformly arranged on multiple.
8. microwave pressure sintering furnace according to claim 1,2 or 3, which is characterized in that further include motor (14) and and Motor (14) is driven the turntable (16) of axis connection, and the attemperator (17) is placed on turntable (16), attemperator (17) internal to be placed with material.
9. microwave pressure sintering furnace according to claim 8, which is characterized in that be provided with protrusion on the turntable (16) Or groove, groove corresponding with above-mentioned protrusion or groove or protrusion are provided on attemperator (17).
10. microwave pressure sintering furnace according to claim 9, which is characterized in that
Pressure measuring unit (13), temperature measuring equipment (15), releasing pressure automatically solenoid valve and safety valve (12) are provided on the bell (11);
The controller for controlling the furnace body (1) interior temperature and pressure is additionally provided with outside the furnace body (1);
The furnace body (1) is connected with pressurizing device.
CN201711419320.0A 2017-12-25 2017-12-25 A kind of microwave pressure sintering furnace Active CN107917614B (en)

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