CN107843379A - The capacitive pressure transducer of assembled fixed electrode - Google Patents
The capacitive pressure transducer of assembled fixed electrode Download PDFInfo
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- CN107843379A CN107843379A CN201711325860.2A CN201711325860A CN107843379A CN 107843379 A CN107843379 A CN 107843379A CN 201711325860 A CN201711325860 A CN 201711325860A CN 107843379 A CN107843379 A CN 107843379A
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- fixed electrode
- electrode
- insulator
- moving electrode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The problems such as a kind of capacitive pressure transducer of assembled fixed electrode, solves that the accessory of existing capacitive pressure transducer is more, and gas easily adheres in ceramic insulation body, influences vacuum, non-linear big, and moving electrode deformation mismatches with fixed electrode face shape.The fixed electrode insulator that its sapphire single-crystal makes is fixedly supported on middle position in clamping pressure ring cavity with cover using elastic positioner, the film moving electrode of the two-sided plating layer of precious metal made using invar property metal, between the planar annular for having the planar annular for being crimped on fixed electrode insulator foot of support and the bearing with impulse mouth, pressed by the gold-plated stage clip of three ripples, make to be in close contact between the film moving electrode and fixed electrode insulator of two-sided plating layer of precious metal.Its is simple in construction, reasonable in design, and it is easy to make, and production efficiency is high, using reliable, for a long time without zeroising, reduce inspiratory capacity, discharge quantity, substantially reduces leak rate, vacuum can be maintained for a long time, significantly improve the stability and measurement accuracy of measurement.
Description
Technical field
Be used to measuring the capacitive pressure transducer of gas medium the present invention relates to a kind of, particularly a kind of fixed electrode and have according to
The capacitive pressure transducer for the assembled fixed electrode that the moving electrode crimping of support is packaged together.It is suitable to the micro- of measurement gas medium
Small pressure, small absolute pressure（Vacuum gauge）.
Background technology
At present, the capacitive pressure transducer based on parallel plate capacitor principle, the slight pressure for measuring gas medium are micro-
Small absolute pressure（Vacuum gauge）, particularly surveying has certain corrosive medium, in absolute predominance.MKS companies of the U.S. are this kind of productions
The main monopolization business of product, and limitation is sold to China.The product of MKS companies uses a kind of assembled fixed electrode structure, such as Fig. 4~5
It is shown, including film moving electrode 14, the ceramics insulator 15 of fixed electrode 95, the bearing 16 with impulse mouth, the upper holding ring of simultaneous shell
17th, conducting bolt 18, plain cushion 19, nut 20, glass envelope electrode 21, volute spring 22, getter room 23, dish-shaped stage clip 24, gold
Belong to multiple tube 25, upper lid 26, stage clip lower gasket 27, tripodia pad 28, polyester film 29, measuring electrode 30, reference electrode 31, survey
Measure the parts such as electrodes conduct bolt hole 32, reference electrode conducting bolt hole 33.Its ceramics insulator 15 of fixed electrode 95 is in plane, two
On parallel surface, measuring electrode 30, the reference electrode 31 of thick film have been produced with thick film circuit technique, using conducting bolt 18, has been put down
Pad 19, nut 20, insulator front reference electrode 31 and measuring electrode 30 are guided in the Ohmic contact film layer at the back side, made
Fixed electrode；With Inconel X-750,20 μm are made（For the vacuum gauge of 0.1Torr ranges）Thick film moving electrode.Film moves
Electrode clamps by the moving electrode shell 17 made of same Inconel X-750 alloys with 16 two accessories of bearing with impulse mouth
Weld clamped.The ceramics insulator 15 of fixed electrode 95, by disk spring 24, stage clip lower gasket 27, tripodia pad 28, press seal is in dynamic electricity
On pole shell 17.Certain interval is left between the ceramics insulator 15 of fixed electrode 95 and shell, relative to gap, the ceramics of fixed electrode 95 are absolutely
Edge body 15 is not necessarily centrosymmetric.200 μm or so of gap is left between film moving electrode 14, leaves film moving electrode 14 for
Compression deformation is used.The Inconel X-750 that 4mm or so is lined between the ceramics insulator 15 of fixed electrode 95 and film moving electrode 14 are folded
Add area.The upper lid 26 of fixed pressure disk spring 24 is welded on moving electrode shell 17.It is welded with upper lid 26 and vacuumizes use
The outer stainless steel of interior copper metal composite pipe 25, after reference chamber is extracted into high vacuum, with this pipe of mechanical press seal, realize sealing；On
Getter room 23 is welded with lid 26, interior is filled with activated at getter；Two glass envelope electrodes 21, glass are welded with upper lid 26
Be respectively fixed with volute spring 22 on envelope electrode 21, the reference electrode 31 on the depended on pressure contact ceramics insulator 15 of fixed electrode 95 with
The Ohmic contact film layer of measuring electrode 30, realize the electricity conducting of electric capacity.
The problem of MKS vacuum gauge is present be：Due to the fabricated construction of fixed electrode, fixed electrode is set to be produced with moving electrode non-
Contact encapsulates, for the deformation to fixed electrode and moving electrode, it may occur that asymmetry change.This point, it is that MKS companies will determine electricity
The main reason for flat electrodes is made in pole.Because fixed electrode is plane electrode, moving electrode compression deformation is in parabola deformation, with putting down
The fixed electrode in face mismatches, non-linear big, so having done reference electrode 31 and measuring electrode 30 on its flat fixed electrode, that is, does
There is the capacitive pressure transducer with reference capacitance.Although the amendment measurement electric capacity of available reference electric capacity 31 is non-linear, circuit is answered
It is miscellaneous, trouble, because moving electrode deformation and fixed electrode face shape mismatch, fixed electrode effective area is used for the part of measuring electrode 30 and subtract
Few, output capacitance variable quantity is small.Most important problem is that longitudinal direction aspect between fixed electrode and moving electrode, there is 4mm to be superimposed area,
Due to big 95 1 times or so of the ceramics of the Inconel X-750 coefficient of expansion, error caused by ± 1 DEG C is about 28 × 10-5, for
It is known as resolution ratio up to for the MKS vacuum gauges of ten a ten thousandths, whole sensor must work at a constant temperature；Further, it is fixed
Electrode is in plane, and it is in parabola deformation that moving electrode, which is pressurized, and moving electrode curvature of centre is more than edge, for the deformation in useful range
Section, to 200 μm of distances under fixed electrode and moving electrode zero-pressure, only 100 μm or so effectively.Because range ability is narrow, therefore make biography
Sensor range ability reduces more than 50%.Moreover as a result of a large amount of gases are contained in 95 ceramics insulators, adsorption plane is too
Greatly；Because the structural fittings are more, using more than 20 individual accessories and getter, so preparation technology is complicated, low production efficiency.Except inhaling
Attached face is outer greatly, also there is a large amount of gas collection gaps, makes pumpdown time oversize, vacuum is not high.Plus used more weld bond and compared with
Long weld seam, although having used getter, because air-breathing agent dose is limited, it will soon fail, therefore vacuum remains difficult relatively, for a long time
Stability is bad.Therefore, on the product provided with zero potential device.MKS companies provide in code, it is formal every time in use,
Must zeroising under high vacuum.This vacuum is the pressure of the minimum resolution of sensor, reaches such high vacuum
Afterwards, zeroising is carried out, interim zero shift is carried out with circuit.Such as absolute 0~15Pa 626 type electric capacity absolute pressure transducers,
Will be 10-4Zeroising under Pa.Otherwise, it is impossible to reach the precision of demarcation.The operation of this zeroising is very time-consuming in the application,
Hell to pay, or even can not realize at all sometimes.
The applicant once designs some new products to solve the above problems, such as the A of Publication No. CN 105910751
" parallel-plate dry-type capacitance pressure sensor ", the A of Publication No. CN 106225962 " the gold-plated capacitive pressure biography of moving electrode plate
Sensor ", the A of Publication No. CN 106644187 " capacitive pressure transducer of sapphire insulator fixed electrode ", Publication No.
The A of CN 106353014 capacitive pressure transducer of graded seal ring " carry ", the A's of Publication No. CN 106289592
" shunt capacitance type capacitive pressure transducer ", the A of Publication No. CN 106289593 " the capacitive pressure sensing of vertical moving electrode
Patents such as the A of device " Publication No. CN 106225962 " the gold-plated capacitive pressure transducers of battery lead plate ".Although to a certain degree
On overcome the defects of above-mentioned 626 type electric capacity absolute pressure transducer is present, still, because the active electrode of the sensor is a diameter of
27mm, absolute pressure 15Pa moving electrode thickness only have 20 μm, still the minimum range that can find be absolute 0~15Pa left
The right side, also seem not small enough for most of vacuum measurements.
The content of the invention
It is an object of the invention to provide a kind of capacitive pressure transducer of assembled fixed electrode, solves existing capacitive pressure
The accessory of sensor is more, and gas easily adheres in ceramic insulation body, influences vacuum, non-linear big, moving electrode deformation is with determining electricity
The problems such as pole-face shape mismatches, its is simple in construction, reasonable in design, and it is easy to make, and production efficiency is high, using reliable, for a long time not
With zeroising, reduce inspiratory capacity, discharge quantity, substantially reduce leak rate, vacuum can be maintained for a long time, significantly improve survey
The stability and measurement accuracy of amount.
The technical solution adopted in the present invention is：The capacitive pressure transducer of the assembled fixed electrode includes shell and band draws
The bearing of mouth is pressed, the fixed electrode insulator and enclosed electrode and moving electrode being assembled in shell, is characterized in that：It is described outer
Shell uses clamping pressure ring with cover, the film moving electrode for the two-sided plating layer of precious metal that moving electrode is made using invar property metal；Lan Bao
The metallized vias periphery on the fixed electrode insulator top that stone monocrystalline makes is provided with Annular ohmic contact conductive layer, and fixed electrode is exhausted
The parabolic concave surface periphery of edge body bottom is provided with the planar annular for relying on moving electrode, the surface of the parabolic concave surface of fixed electrode insulator
Conductive film layer is coated with, conductive film layer is connected by the metallized vias of fixed electrode insulator with the resistive conductive layer on top
Logical, conductive film layer surface is covered with insulating film layer；Upper surface of support with impulse mouth sets relative with fixed electrode insulator foot
Claim the parabolic concave surface of structure and rely on the planar annular of moving electrode, the film moving electrode crimping of two-sided plating layer of precious metal is encapsulated in
Between clamping pressure ring with cover and bearing with impulse mouth, fixed electrode insulator is determined by the elasticity being plugged in cylinder vertical groove
Position device is fixedly supported in clamping pressure ring cavity with cover, fixed electrode insulator is remained middle position, is insulated with sapphire
Enclosed electrode of the sub- soldering above clamping pressure ring with cover, is connect using gold-plated volute spring and the ohm on fixed electrode insulator top
Tactile conductive layer is connected；The gold-plated pressure of three ripples is provided between fixed electrode insulator top and the upper base portion of clamping pressure ring with cover
Spring, pressed, fixed electrode insulator is strapped in clamping pressure ring cavity with cover, and make the expensive gold of two-sided plating by the gold-plated stage clip of three ripples
The film moving electrode of category layer has the planar annular for being crimped on fixed electrode insulator foot of support and the ring of the bearing with impulse mouth
Between shape plane.
The film moving electrode of the two-sided plating layer of precious metal is two-sided gold-plated, plating ruthenium or the film moving electrode for plating iridium.
The elastic positioner is the short tube that oblique section is carried from end made of plastic shape-changing material.
The present invention has the advantage that and good effect is：Pair made due to the moving electrode of the present invention using invar property metal
The film moving electrode of layer of precious metal is plated in face, and is fixedly supported in clamping pressure ring cavity with cover and remained using elastic positioner
The fixed electrode insulator that the sapphire single-crystal of middle position makes, there is the annular flat for being crimped on fixed electrode insulator foot of support
Between face and the planar annular of bearing with impulse mouth, pressed by the gold-plated stage clip of three ripples, make the film of two-sided plating layer of precious metal
It is in close contact between moving electrode and fixed electrode insulator, so the capacitive pressure transducer is floated by temperature caused by temperature change
Move, lateral aspects only have fixed electrode insulator from area minor variations caused by temperature change of experiencing, in longitudinal direction because fixed electrode is exhausted
The relative distance of edge body and the film moving electrode of two-sided plating layer of precious metal is unchanged, temperature drift namely zero, therefore, the letter of its structure
Single, reasonable in design, it is easy to make, and production efficiency is high, using reliable, for a long time without zeroising, reduce inspiratory capacity, deflates
Amount, substantially reduces leak rate, vacuum can be maintained for a long time, significantly improve the stability and measurement accuracy of measurement.
In addition, after fixed electrode insulator crimps encapsulation with the moving electrode for having support, the fixed electrode that sapphire single-crystal makes is exhausted
Edge body two-sided plating layer of precious metal film moving electrode it is soldered it is clamped on the basis of, apply pressure equivalent to spring, it is blue
Be in close contact between jewel and moving electrode, due to sapphire inherent characteristic, i.e., dry friction coefficient can it is small to less than 0.02 spy
Property.The lubrication played plus the coat of metal above moving electrode, realize both with sapphire to the clamped of moving electrode, again may be used
With free displacement.So, moving electrode is stressed the parabola in parabola deformation, all the time just and the parabolic on fixed electrode insulator
Face coaxial-symmetrical.Therefore, it is fabricated both to make using fixed electrode insulator, does not also cause the asymmetric change of curved surface face shape
Change, do not produce extra error.This point, the production of the assembled fixed electrode of the U.S. MKS with monopolizing vacuum gauge in the world at present
Product, just there is the difference of essence.Under the present invention and MKS fixed electrode diameter same cases, our capacitance change is much larger than
MKS, it can be held the lead in current world wide.
Because the capacitive pressure transducer accessory is few, in addition to sapphire fixed electrode insulator, other accessories use gold-plated place
Reason, reduces inspiratory capacity, discharge quantity, reduces weld bond quantity and reduces fusion length, substantially reduces leak rate.Make so
Absolute pressure transducer, eliminate the getter of reference chamber, vacuum can be maintained for a long time.
In summary, the present invention solve existing capacitive pressure transducer accessory it is more, gas is easy in ceramic insulation body
The problems such as attachment, influences vacuum, non-linear big, and moving electrode deformation mismatches with fixed electrode face shape.
Brief description of the drawings
Below in conjunction with accompanying drawing, the invention will be further described.
Fig. 1 is a kind of structural representation of the present invention；
Fig. 2 is Fig. 1 I mplifying structure schematic diagram；
Fig. 3 is sectional views of the Fig. 1 along line A-A；
Fig. 4 is a kind of structural representation of electric capacity vacuum gauge of prior art；
Fig. 5 is a kind of structural representation of the ceramics insulator of fixed electrode 95 in Fig. 4.
Number explanation in figure：The film moving electrode of 1 two-sided plating layer of precious metal, 2 fixed electrode insulators, 3 branch with impulse mouth
Seat, 4 it is with cover clamping pressure ring, the gold-plated stage clip of 5 three ripples, 6 gold-plated taper stage clips, 7 enclosed electrodes, 8 metallized vias, 9 gauge pressure guide holes
With aspirating hole during absolute pressure, 10 elastic positioners, 11 conductive film layers, 12 insulating film layers, 13 resistive conductive film layers, 14
Film moving electrode, the ceramics insulator of 15 fixed electrode 95,16 bearings with impulse mouth, 17 shells, 18 conducting bolts, 19 plain cushions, 20
Nut, 21 glass envelope electrode, 22 volute springs, 23 getter rooms, 24 dish-shaped stage clips, 25 metal composite pipes, lid, 27 stage clips on 26
Lower gasket, 28 tripodia pads, 29 polyester films, 30 measuring electrodes, 31 reference electrodes, 32 measuring electrode conducting bolt holes, 33 ginsengs
Examine electrodes conduct bolt hole.
Embodiment
Describe the concrete structure of the present invention in detail according to Fig. 1~5.The capacitive pressure transducer of the assembled fixed electrode includes
Shell and the part such as the bearing 3 with impulse mouth, the fixed electrode insulator 2 and enclosed electrode 7 and moving electrode that are assembled in shell.Its
Middle shell is using clamping pressure ring 4 with cover, the film moving electrode for the two-sided plating layer of precious metal that moving electrode is made using invar property metal
1.The film moving electrode 1 of two-sided plating layer of precious metal can be moved according to being actually needed using two-sided gold-plated, plating ruthenium or the film for plating iridium
Electrode.It is conductive that the periphery of metallized vias 8 on the top of fixed electrode insulator 2 that sapphire single-crystal makes is provided with Annular ohmic contact
Layer 13.The parabolic concave surface periphery of the bottom of fixed electrode insulator 2 is provided with the planar annular for relying on moving electrode, fixed electrode insulator 2
The surface of parabolic concave surface be coated with conductive film layer 11.Conductive film layer 11 passes through the metallized vias 8 of fixed electrode insulator 2 and top
Resistive conductive layer 13 be connected, the surface of conductive film layer 11 is covered with insulating film layer 12.The upper surface of bearing 3 with impulse mouth
The planar annular of moving electrode is set with the parabolic concave surface of the symmetrical structure in the bottom of fixed electrode insulator 2 and relies on, two-sided plating is expensive
The film moving electrode 1 of metal level, which crimps, to be encapsulated between clamping pressure ring 4 with cover and bearing 3 with impulse mouth.Fixed electrode insulator 2
It is fixedly supported on by the elastic positioner 10 being plugged in cylinder vertical groove in the clamping cavity of pressure ring 4 with cover, makes fixed electrode
Insulator 2 remains middle position.With enclosed electrode 7 of the sapphire insulator soldering above clamping pressure ring 4 with cover, utilize
Gold-plated volute spring 6 is connected with the resistive conductive layer 13 on the top of fixed electrode insulator 2.The top of fixed electrode insulator 2 with
The gold-plated stage clip 5 of three ripples is provided between the upper base portion of clamping pressure ring 4 with cover, is pressed by the gold-plated stage clip 5 of three ripples, fixed electrode
Insulator 2 is strapped in the clamping cavity of pressure ring 4 with cover, and the film moving electrode 1 of two-sided plating layer of precious metal is had the crimping of support
Between the planar annular of the bottom of fixed electrode insulator 2 and the planar annular of bearing 3 with impulse mouth.Elastic positioner 10 can be with
It is short with oblique section from end made of the plastic shape-changing material do not deflated under the high temperature resistants such as perfluoroethylene-propylene, high vacuum
Pipe.
The film moving electrode 1 that in the present embodiment, use is gold-plated, plates ruthenium or plates the two-sided plating layer of precious metal of iridium uses Inconel
The invar property such as X-750 alloys metal makes.20 μm~50 μm left and right thicknesses are made with isotropism rolloff technology（Depending on range
It is fixed）.In the case of metering swelling is stretched tight and put down, with the invar property metal such as Inconel X-750（It is identical with moving electrode material）Make
Clamping pressure ring 4 with cover and the bearing 3 with impulse mouth, the two-sided plating layer of precious metal film moving electrode 1 of metering swelling is clamped by hydraulic pressure,
Film redundance is cut, welding is clamped.The surface of fixed electrode insulator 2 by strict polishing, particularly with two-sided plating noble metal
The contact portion of film moving electrode 1 of layer, reach less than 5 roughness.Clamping pressure ring 4 with cover is that can be closed with Inconel X-750
The sealing structure body of the low-expansion alloy shell that gold solder connects and the gold-plated enclosed electrodes 7 of Ni50, resistance to 200 DEG C of high temperature can not leak for a long time
Gas.Metallized vias 8 on fixed electrode insulator 2, not only it is used for conduction, while is also pilot, gas port when vacuumizing.Band
Gauge pressure guide hole on lid clamping pressure ring 4 and the aspirating hole 9 during absolute pressure, when reaching required vacuum in reference cavity,
Electron beam or laser beam sealing mouth are used under a high vacuum.The end of elastic positioner 10 carries the short tube end of oblique section（In injection
Device syringe needle shape）, it is easy to interference to be plugged in the cylinder vertical groove of fixed electrode insulator 2, realizes the whole adaptation temperature under high/low temperature
Support is positioned in area, allows fixed electrode insulator 2 to remain middle position.
The capacitive pressure transducer of the assembled fixed electrode of the present invention, both can be gauge pressure formula, can also pump with reference to pressure
Chamber indoor gas, makes absolute pressure transducer（Vacuum gauge）.
Claims (2)
1. a kind of capacitive pressure transducer of assembled fixed electrode, including shell and the bearing with impulse mouth, are assembled in shell
Fixed electrode insulator and enclosed electrode and moving electrode, it is characterised in that：The shell uses clamping pressure ring with cover, moving electrode
The film moving electrode of the two-sided plating layer of precious metal made using invar property metal；On the fixed electrode insulator that sapphire single-crystal makes
The metallized vias periphery in portion is provided with Annular ohmic contact conductive layer, and the parabolic concave surface periphery of fixed electrode insulator foot is set
There is the planar annular for relying on moving electrode, the surface of the parabolic concave surface of fixed electrode insulator is coated with conductive film layer, and conductive film layer passes through
The metallized vias of fixed electrode insulator is connected with the resistive conductive layer on top, and conductive film layer surface is covered with dielectric film
Layer；Upper surface of support with impulse mouth is set and the parabolic concave surface of the symmetrical structure of fixed electrode insulator foot and support moving electrode
Planar annular, the crimping of the film moving electrode of two-sided plating layer of precious metal is encapsulated in clamping pressure ring with cover and bearing with impulse mouth
Between, fixed electrode insulator is fixedly supported on clamping pressure ring sky with cover by the elastic positioner being plugged in cylinder vertical groove
Intracavitary, fixed electrode insulator is set to remain middle position, it is close above clamping pressure ring with cover with the soldering of sapphire insulator
Electrode is sealed, is connected using gold-plated volute spring with the resistive conductive layer on fixed electrode insulator top；Fixed electrode insulator
The gold-plated stage clip of three ripples is provided between top and the upper base portion of clamping pressure ring with cover, is pressed by the gold-plated stage clip of three ripples, fixed
Electrode insulation body is strapped in clamping pressure ring cavity with cover, and the film moving electrode of two-sided plating layer of precious metal is had the crimping of support
Between the planar annular of fixed electrode insulator foot and the planar annular of bearing with impulse mouth.
2. the capacitive pressure transducer of assembled fixed electrode according to claim 1, it is characterised in that：It is described flexibly positioned
Device is the short tube that oblique section is carried from end made of plastic shape-changing material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711325860.2A CN107843379B (en) | 2017-12-13 | 2017-12-13 | Capacitive pressure sensor with assembled fixed electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711325860.2A CN107843379B (en) | 2017-12-13 | 2017-12-13 | Capacitive pressure sensor with assembled fixed electrode |
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| Publication Number | Publication Date |
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| CN107843379A true CN107843379A (en) | 2018-03-27 |
| CN107843379B CN107843379B (en) | 2023-09-22 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109115392A (en) * | 2018-10-18 | 2019-01-01 | 沈阳市传感技术研究所 | Using the electrode floating type capacitive pressure transducer of assembled fixed electrode |
| CN116380326A (en) * | 2023-04-13 | 2023-07-04 | 北京七星华创流量计有限公司 | Pressure sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109115392A (en) * | 2018-10-18 | 2019-01-01 | 沈阳市传感技术研究所 | Using the electrode floating type capacitive pressure transducer of assembled fixed electrode |
| CN109115392B (en) * | 2018-10-18 | 2023-11-10 | 沈阳市传感技术研究所 | Electrode suspension type capacitance pressure sensor adopting assembled fixed electrode |
| CN116380326A (en) * | 2023-04-13 | 2023-07-04 | 北京七星华创流量计有限公司 | Pressure sensor |
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| CN107843379B (en) | 2023-09-22 |
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