CN107796302A - A kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber - Google Patents
A kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber Download PDFInfo
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- CN107796302A CN107796302A CN201710959795.2A CN201710959795A CN107796302A CN 107796302 A CN107796302 A CN 107796302A CN 201710959795 A CN201710959795 A CN 201710959795A CN 107796302 A CN107796302 A CN 107796302A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
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Abstract
The present invention relates to a kind of dual-purpose type digital holographic micro-measuring device.The present apparatus is occurred to form with fiber beam splitting system, object light optic path system, reference light optic path system, measurement pattern switching system and sharp combiner and record system by laser.The present invention integrates transmission-type measurement and reflective measurement, it is possible to achieve the real-time three-dimensional topography measurement of transparent sample and opaque sample.The present apparatus possesses telecentric beam path structure, can eliminate once and quadratic phase distorts；Light is passed using optical fiber, level of integrated system height, small volume, stability are good.
Description
Technical field
The invention belongs to digital micro-holography field, is related to microstructure measurement device, and in particular to one kind is based on
The dual-purpose type telecentric structure digital holographic micro-measuring device of optical fiber, available for transparent or opaque micro-structural object dimensional pattern
Measurement in real time.
Background technology
The method of currently used micro-structural object micrometering mainly has laser scanning confocal microscopy, white light interference
Art, scanning probe microscopy and digital holographic microscopy.Although laser scanning confocal microscopy, White light interferometry and scanning are visited
Pin microtechnic resolution ratio is higher, but laser scanning confocal microscopy, White light interferometry to be completed by scan mode it is three-dimensional into
Picture, scanning probe microscopy needs and sample contact, the risk of damage sample be present, and these features constrain their application
Scope.By contrast, a kind of new microtechnic that digital holographic microscopy combines as digital holography and microscopy,
With the whole audience, without intrusion, high-resolution, in real time, no-raster, need not to sample sputter the advantage such as conductive layer or fluorescence labeling.
Digital micro-holography requires high to the stability of a system, and the fluctuation in surrounding environment has a great influence to it；Together
When, existing digital holographic micro-measuring device light path complexity is huge, and required component is more, and volume weight is larger, makes the skill
The application of art receives some limitations.But with the continuous development of optical fiber technology, the emergence of high-performance optical fiber, by optical fiber
Introducing digital micro-holography becomes more feasible.Being introduced into for optical fiber reduces optical element in Digital holographic microscopy light path
Number, light channel structure is simplified, reduce the volume and weight of device, while optical fiber has good anti-electromagnetic interference capability,
Allow device to resist a certain degree of external interference, help to lift measuring system precision.
Digital micro-holography has two kinds of ways of realization：Transmission-type and reflective, transmission-type can be realized to thin, thoroughly
Bright phase type object dimensional imaging, the reflective three-dimensional imaging that can be realized to opaque amplitude type object.Existing number
Single measurement pattern is only provided in word holographic microphotography instrument, thus for this transparent and opaque two classes object under test, it is necessary to
The instrument of two different measurement patterns is used, the inconvenience for bringing the increase of use cost and using.
The content of the invention
The purpose of the present invention is the technical deficiency part for existing digital holographic micro-measuring device, proposes that one kind is based on
Optical fiber passes the dual-purpose type telecentric structure digital holographic micro-measuring device of light, is realized in light channel structure by translating pentagonal prism
The exchange of transmission measurement pattern and Reflection measurement mode, finally realize merely with a table apparatus measurement amplitude type and the micro- knot of phase type
The three-dimensional appearance of structure object, measurement process is set to save financial cost while simplification.
To reach above-mentioned purpose, the technical solution adopted by the present invention is a kind of dual-purpose type telecentric structure number based on optical fiber
Word holographic micro-measuring device, including object light optic path system, the beam projecting end of object light optic path system are provided with
One speculum (21), the emergent ray of the first speculum (21) pass through objective table successively by the reflection of the second speculum (22)
(17), microcobjective (16) and Amici prism (18) enter CMOS cameras (20)；
Wherein, light can be cut out by being additionally provided between the beam projecting end of object light optic path system and the first speculum (21)
First pentagonal prism (8) on road, the emergent ray of the first pentagonal prism (8) is turned back downwards by Amici prism (18), by aobvious
Sample on speck mirror (16) irradiation objective table (17), the light being reflected off the specimen are amplified into CMOS by microcobjective (16)
Camera (20).
Also include being arranged on collimation lens (19) between Amici prism (18) and CMOS cameras (20), and be arranged on the
The first lens (9) between one pentagonal prism (8) and Amici prism (18).
Also include laser to occur to occur to pass by object light light path respectively with fiber beam splitting system with fiber beam splitting system, laser
Defeated system, reference light optic path system are connected to sharp combiner and hologram recording recording system.
Laser occurs to include laser (1) with fiber beam splitting system, and the output end of laser (1) passes through single-mode polarization maintaining fiber
(2) fiber optic splitter (3) input is connected to, the output end of fiber optic splitter (3) passes through object light splitting optical fiber (4) and ginseng respectively
Examine light splitting optical fiber (10) and be connected to the first fiber optic collimator mirror (5) and the second fiber optic collimator mirror (11)；
Wherein, the beam projecting end of the first fiber optic collimator mirror (5) is provided with the first collimator and extender mirror (7), and the first optical fiber is accurate
The first attenuator (6), the beam projecting of the first collimator and extender mirror (7) are directly provided between mirror (5) and the first collimator and extender mirror (7)
End is provided with and can cut out the pentagonal prism of light path first (8) beam projecting end and be disposed with the first lens (9) and Amici prism
(18)；
The exit end of second fiber optic collimator mirror (11) is disposed with the second attenuator (12), the second beam-expanding collimation mirror (13)
With the second pentagonal prism (14), the exit end of the second pentagonal prism (14) is disposed with the second lens (15) and Amici prism
(18), and the second lens (15) are symmetrical arranged with the first lens (9)；It is saturating that the exit end of Amici prism (18) is disposed with collimation
Mirror (19) and CMOS cameras (20).
Fiber optic splitter (3) is according to beam intensity ratio 1:1 ratio is divided.
CMOS cameras (20) are high speed camera, and Amici prism (18) is light splitting ratio 1:1 depolarization Amici prism.
A kind of method of work of the dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber, laser (1)
The tail optical fiber that the laser sent is carried by laser is coupled directly into optical fiber, passes through fiber optic splitter (3), object light splitting optical fiber
(4) light separated is as object light light beam, and the light that reference light splitting optical fiber (10) separates is as reference light light beam, reference light beam splitting light
Fine (10) connect the second fiber optic collimator mirror (11) by FC/PC ports, by the light collimation in optical fiber be directional light in space to
Lower propagation, reference light light intensity is adjusted by the second attenuator (12) afterwards, light is sequentially expanded by the second collimator and extender mirror (13)
Spot diameter, the second pentagonal prism (14) is turned back to be propagated to the left, then turns into spherical wave by the second lens (15), by the second lens
(15) and collimation lens (19) form telecentric structure, i.e., upwardly propagated through turning back for Amici prism (18), pass through collimation lens
(19) turn into directional light, be irradiated to CMOS cameras (20), object light splitting optical fiber (4) connects the first optical fiber standard by FC/PC ports
Straight mirror (5), it is the directional light in space by the light collimation in optical fiber, adjusts object light light intensity by the first attenuator (6) afterwards, lead to
Cross the first collimator and extender mirror (7) and expand spot diameter；
When measurement pattern is transmission measurement, pentagonal prism (8) is removed, through the first speculum (21) and the second speculum
(22) upwardly propagated after turning back twice, the transparent sample on irradiation objective table (17), pass through microcobjective through the light of sample
(16) amplify, by the telecentric structure being made up of microcobjective (16) and collimation lens (19), that is, the object light spherical wave amplified is saturating
Amici prism (18) is crossed, turns into directional light by collimation lens (19), is irradiated to CMOS cameras (20), is interfered with reference light light path
Hologram is formed, is recorded by CMOS cameras (20)；
When measurement pattern is reflection measurement, the first pentagonal prism (8) is moved into, is propagated to the right after turning back, it is saturating by first
Mirror (9) is assembled to the right, is turned back downward propagation through Amici prism (18), turns into parallel light irradiation positioned at carrying by microcobjective (16)
Opaque sample above thing platform (17), by the telecentric structure being made up of microcobjective (16) and collimation lens (19), i.e. sample
Originally the light reflected amplifies by microcobjective (16), and the object light spherical wave of amplification passes through Amici prism (18), by collimation
Lens (19) turn into directional light, are irradiated to CMOS cameras (20), interfere to form hologram with reference light light path, by CMOS cameras
(20) record.
The splitting optical fiber 4 of above-mentioned transmission Object light wave connects fiber optic collimator mirror 5, and the light collimation in optical fiber is parallel for space
Light, sequentially pass through attenuator 6, collimator and extender mirror 7 and pentagonal prism 8：Under reflective-mode, light is turned back through pentagonal prism 8, by saturating
Mirror 9 and Amici prism 18 are turned back downwards, and the sample irradiated by microcobjective 16 on objective table 17, the light being reflected off the specimen passes through
Microcobjective 16 amplifies；Under transmission mode, pentagonal prism 8 is removed, is turned back through speculum 21 and speculum 22, sequentially passes through loading
Sample on platform 17, amplified by microcobjective 16.Described fiber optic collimator mirror 5 is characterized in that front end is accessed by FC/PC ports
Optical fiber 4, there is a globe lens inside it, be the collimated light beam in space by the laser alignment in optical fiber.The work of described attenuator 6
With the light intensity for being regulation object light light path.The effect of the collimator and extender mirror 7 is the diameter of expansion of laser light hot spot.Five jiaos of described ribs
The effect of mirror 8 is to change object light optical path direction, by translating pentagonal prism 8, realizes that reflective measurement pattern measures with transmission-type
Switching between pattern.The feature of described objective table 17 can be achieved on transverse direction, longitudinal direction, the movement regulation of axial three degree of freedom
With pitching, rotation regulation, micro-structural object sample to be observed is placed thereon.The feature of described microcobjective 16 be its focus with
The focus of collimation lens 19 is overlapped, and telecentric beam path structure is formed with collimation lens 19, while is placed in rotating nosepiece system, is led to
Cross the conversion that rotating nosepiece system completes different model microcobjective.The described feature of lens 9 is a Curvature Matching lens, its
Focal position overlaps with the focal position of microcobjective 16.
In above-mentioned digital holographic micro-measuring device, described reference light optic path system by fiber optic collimator mirror 11,
Attenuator 12, beam-expanding collimation mirror 13, pentagonal prism 14, lens 15 are formed.The splitting optical fiber 10 of above-mentioned transmission reference light wave connects
Fiber optic collimator mirror 11 is connect, is space directional light by the light collimation in optical fiber, sequentially passes through attenuator 12, beam-expanding collimation mirror 13, five
Angle prism 14 is turned back to the left, by lens 15.Described fiber optic collimator mirror 11 is characterized in that light is accessed in front end by FC/PC ports
Fibre 10, there is a globe lens inside it, be the directional light in space by the laser alignment in optical fiber 10.The work of described attenuator 12
With the light intensity for being regulation reference light light path.The effect of the collimator and extender mirror 13 is the diameter of expansion of laser light hot spot.Described is saturating
Mirror 15 is characterized in that its focus and the focus of collimation lens 19 overlap, and telecentric beam path structure is formed with collimation lens 19.
Compared with prior art, the present invention at least has the advantages that, the present invention is by object light optic path system
The first pentagonal prism (8) of light path can be cut out by being additionally provided between the beam projecting end of system and the first speculum (21), and be passed through
The incision of the first pentagonal prism is controlled with cutting out the both of which for realizing object light light path, i.e. transmission-type and reflective two kinds of measurements
Pattern need to can only complete the switching of two kinds of measurement patterns in one by shirtsleeve operation, can be to phase type and amplitude type
Sample is observed, with strong applicability.
In digital micro-holography, off-axis recording beam path can introduce a tilted phase distortion, and microcobjective can introduce
Quadratic phase distorts, and is additionally superimposed upon object including other phase distortions intrinsic in optical system, these phase distortions
On true phase, the accuracy of measurement is influenceed, it is necessary to go to compensate using certain method, the present invention passes through the first lens, second
The design of telecentric structure between lens and collimation lens, in object light optic path system and reference light optic path system
Using telecentric structure, primary and secondary phase distortion is eliminated, ensure that higher measurement accuracy.
Further, optical fiber is employed herein and passes light so that level of integrated system is high, takes small volume, the light used
Component number is few compared with ordinary numbers holographic micro-measuring system, and stability, antijamming capability are stronger.
Further, microcobjective can be convenient for changing by rotating nosepiece mechanism in system, can be according to observation needs
Change the multiplication factor of object light light path, while CMOS cameras use high speed camera, it is possible to achieve high-speed, high precision measures.
Brief description of the drawings
Fig. 1 is the structured flowchart of the digital holographic micro-measuring device of the present invention.
Fig. 2 is the structural representation of the present invention.
Fig. 3 is the structural representation of transmission measurement pattern of the present invention.
Fig. 4 is the structural representation of Reflection measurement mode of the present invention.
In accompanying drawing：1- lasers, 2- single-mode polarization maintaining fibers, 3- fiber optic splitters, 4- object lights splitting optical fiber, 10- reference lights
Splitting optical fiber, the fiber optic collimator mirrors of 5- first, the fiber optic collimator mirrors of 11- second, the attenuators of 6- first, the attenuators of 12- second, 7- first
Collimator and extender mirror, 13- the second collimator and extender mirrors, 8 first pentagonal prisms, the pentagonal prisms of 14- second, the lens of 9- first, 15- second
Lens, 16- microcobjectives, 17- objective tables, 18- Amici prisms, 19- collimation lenses, 20-CMOS cameras, the speculums of 21- first,
The speculums of 22- second.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
As described in Fig. 1 and 2, the present invention includes object light optic path system, the beam projecting end of object light optic path system
The first speculum 21 is provided with, the emergent ray of the first speculum 21 passes through objective table successively by the reflection of the second speculum 22
17th, microcobjective 16, Amici prism 18 and collimation lens 19 enter CMOS cameras 20；
Wherein, light path can be cut out by being additionally provided between the beam projecting end of object light optic path system and the first speculum 21
The first pentagonal prism 8, the emergent ray of the first pentagonal prism 8 prism 18 that is split after the first lens 9 turns back downwards, warp
The sample that microcobjective 16 is irradiated on objective table 17 is crossed, the light being reflected off the specimen is saturating by collimating after the amplification of microcobjective 16
Enter CMOS cameras 20 after mirror 19；
Also include laser to occur to occur to pass by object light light path respectively with fiber beam splitting system with fiber beam splitting system, laser
Defeated system, reference light optic path system are connected to sharp combiner and hologram recording recording system, and laser occurs and fiber beam splitting system
System includes laser 1, and the output end of laser 1 is connected to the input of fiber optic splitter 3, optical fiber point by single-mode polarization maintaining fiber 2
The output end of beam device 3 is connected to the first fiber optic collimator mirror 5 and by object light splitting optical fiber 4 and reference light splitting optical fiber 10 respectively
Two fiber optic collimator mirrors 11；
Wherein, the beam projecting end of the first fiber optic collimator mirror 5 is provided with the first collimator and extender mirror 7, the first fiber optic collimator mirror 5
The first attenuator 6 is provided between the first collimator and extender mirror 7, the beam projecting end of the first collimator and extender mirror 7 is provided with and can cut
Go out the beam projecting end of the first pentagonal prism of light path 8 and be disposed with the first lens 9 and Amici prism 18；
The exit end of second fiber optic collimator mirror 11 is disposed with the second attenuator 12, the second beam-expanding collimation mirror 13 and second
Pentagonal prism 14, the exit end of the second pentagonal prism 14 are disposed with the second lens 15 and Amici prism 18, and the second lens
15 are symmetrical arranged with the first lens 9；The exit end of Amici prism 18 is disposed with collimation lens 19 and CMOS cameras 20；
In above-mentioned digital holographic micro-measuring device, combiner is swashed with hologram recording recording system by Amici prism 18, standard
Straight lens 19 and CMOS cameras 20 are formed, and object light and reference light light beam close beam at Amici prism 18, upwardly through collimation lens
19 interfere to form hologram and be recorded at CMOS cameras 20, and the requirement of Amici prism 18 is depolarization Amici prism, can be pressed
According to 1:1 ratio is divided, and Amici prism ensures that object light and reference light shape are at a certain angle by rotating, and forms off-axis record system
System；The focal position of collimation lens 19 overlaps with the focal position of lens 15, microcobjective 16, respectively with lens 15 and micro- thing
Mirror 16 forms two telecentric systems, and it is the sphere for making object light optic path system and reference light optic path system that it, which is acted on,
Ripple is converted to plane wave, eliminates primary and secondary phase distortion, and the effect of CMOS cameras 20 is shooting object light and refers to the interference of light
The hologram of formation, using high speed camera, record the dynamic changing process of sample to be observed.
As shown in Fig. 2 under transmission measurement pattern, the first pentagonal prism 8 is removed, it is anti-by the first speculum 21 and second
Penetrate mirror 22 to turn back, upwards through the sample on objective table 17, amplify by microcobjective 16, be irradiated on Amici prism 18；
Under Reflection measurement mode, the first pentagonal prism 8 is moved into, is turned back downward propagation through Amici prism 18 after the first lens 9 to the right,
By the opaque sample on the lighting object stage 17 of microcobjective 16, the light being reflected off the specimen amplifies through microcobjective 16, irradiation
To Amici prism 18；
In transmission measurement pattern and Reflection measurement mode, reference light optic path system by the second fiber optic collimator mirror 11,
Second attenuator 12, the second collimator and extender mirror 13, the second pentagonal prism 14 and the second lens 15 are formed, the second fiber optic collimator mirror 11
Light collimation in reference light splitting optical fiber 10 is collimated after the directional light of space, to be propagated through the second attenuator 12 and second downwards
Beam expanding lens 13, after propagating to lens 15 to the left after being turned back by the second pentagonal prism 14, it is irradiated to Amici prism 18.
Swash combiner to be made up of Amici prism 18, collimation lens 19 and CMOS cameras 20 with hologram recording recording system, it is tied
Structure is after object light light beam closes beam with reference light light beam on Amici prism 18, to upwardly propagate by lens 19, in CMOS cameras 20
Upper interference, by the hologram recorded of CMOS cameras 20.
Second lens 15 form telecentric beam path, the focus of lens 15 and the focus weight of collimation lens 19 with collimation lens 19
Close；Microcobjective 16 forms telecentric beam path structure, the focus of microcobjective 16 and the focus of collimation lens 19 with collimation lens 19
Overlap；Microcobjective 16 is placed in rotating nosepiece system, and turning for different model microcobjective is completed by rotating nosepiece system
Change；First lens 9 are a Curvature Matching lens, and its focal position overlaps with the focal position of microcobjective 16.
This digital holographic micro-measuring device, when the sample of observation is transparent phase type object, as shown in figure 3, this
Invention is operated under transmission measurement pattern, i.e. the first pentagonal prism 8 is removed into object light light path：
The tail optical fiber that the laser that laser 1 is sent is carried by laser is coupled directly into optical fiber, passes through fiber optic splitter 3
According to beam intensity ratio 1:1 ratio is divided into two beams, and the light that object light splitting optical fiber 4 separates is as object light light beam, reference light splitting optical fiber
10 light separated are as reference light light beam, and object light splitting optical fiber 4 connects the first fiber optic collimator mirror 5 by FC/PC ports, by object light
Light collimation in splitting optical fiber 4 is the directional light in space, adjusts object light light intensity by the first attenuator 6 afterwards, passes through first
Collimator and extender mirror 7 expands spot diameter, and removes pentagonal prism 8, by the first speculum 21 and the second speculum 22 turn back to
On, through the transparent sample for being placed on the top of objective table 17, amplified by the microcobjective 16 above it, exaggerated object light sphere
Ripple is upwardly propagated through Amici prism 18, is turned into directional light by collimation lens 19, is irradiated to CMOS cameras 20；
Reference light splitting optical fiber 10 connects the second fiber optic collimator mirror 11 by FC/PC ports, by reference light splitting optical fiber 10
In light collimation be space in directional light propagate downwards, pass through the second attenuator 12 adjust reference light light intensity, second collimation expand
Beam mirror 13 expands spot diameter, turns back through the second pentagonal prism 14 and propagates to the left, turns into spherical wave by the second lens 15, through dividing
Light prism 18, which is turned back, to be upwardly propagated, and is turned into directional light by collimation lens 19, is irradiated to CMOS cameras 20, with object light wave interference shape
Into hologram, recorded by CMOS cameras 20.
This digital holographic micro-measuring device, when the sample of observation is opaque amplitude type object, surveyed using reflection
Amount pattern, as shown in Figure 4, i.e. the first pentagonal prism 8 is moved into object light light path：
The tail optical fiber that the laser that laser 1 is sent is carried by laser is coupled directly into optical fiber, passes through fiber optic splitter 3
According to beam intensity ratio 1:1 ratio is divided into two beams, and the light that object light splitting optical fiber 4 separates is as object light light beam, reference light splitting optical fiber
10 light separated are as reference light light beam.Object light wave splitting optical fiber 4 is connected to the first fiber optic collimator mirror 5 by FC/PC ports, will
Light collimation in Object light wave splitting optical fiber 4 is the directional light in space, adjusts object light light intensity by the first attenuator 6 afterwards, leads to
Cross the first collimator and extender mirror 7 and expand spot diameter, and propagated to the right after the first pentagonal prism 8 is turned back, by lens 9 to the right
Assemble, turned back downward propagation through Amici prism 18, turning into parallel light irradiation by microcobjective 16 be located above objective table 17
Opaque sample, the light that sample reflection is returned amplify by microcobjective 16, and the object light spherical wave of amplification passes through Amici prism 18,
Turn into directional light by collimation lens 19, be irradiated to CMOS cameras 20.Reference light splitting optical fiber 10 passes through FC/PC ports connection the
Two fiber optic collimator mirrors 11, the light collimation in optical fiber is propagated downwards for the directional light in space, adjusted by the second attenuator 12
Reference light light intensity, the second collimator and extender mirror 13 expand spot diameter, turn back through the second pentagonal prism 14 and propagate to the left, pass through second
Lens 15 turn into spherical wave, are upwardly propagated through turning back for Amici prism 18, turn into directional light by collimation lens 19, are irradiated to
CMOS cameras 20, hologram is formed with object light wave interference, is recorded by CMOS cameras 20.
Claims (7)
1. a kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber, it is characterised in that including object light light
Road Transmission system, the beam projecting end of object light optic path system are provided with the first speculum (21), the first speculum (21)
Emergent ray passes through objective table (17), microcobjective (16) and Amici prism (18) successively by the reflection of the second speculum (22)
Into CMOS cameras (20)；
Wherein, light path can be cut out by being additionally provided between the beam projecting end of object light optic path system and the first speculum (21)
First pentagonal prism (8), the emergent ray of the first pentagonal prism (8) are turned back downwards, by micro- thing by Amici prism (18)
Sample on mirror (16) irradiation objective table (17), the light being reflected off the specimen are amplified into CMOS cameras by microcobjective (16)
(20)。
2. a kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber according to claim 1, its
It is characterised by, in addition to the collimation lens (19) being arranged between Amici prism (18) and CMOS cameras (20), and be arranged on
The first lens (9) between first pentagonal prism (8) and Amici prism (18).
3. a kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber according to claim 2, its
It is characterised by, in addition to laser occurs to occur to pass through object light light path respectively with fiber beam splitting system with fiber beam splitting system, laser
Transmission system, reference light optic path system are connected to sharp combiner and hologram recording recording system.
4. a kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber according to claim 3, its
It is characterised by, laser occurs to include laser (1) with fiber beam splitting system, and the output end of laser (1) passes through single mode polarization-maintaining light
Fine (2) are connected to fiber optic splitter (3) input, the output end of fiber optic splitter (3) respectively by object light splitting optical fiber (4) and
Reference light splitting optical fiber (10) is connected to the first fiber optic collimator mirror (5) and the second fiber optic collimator mirror (11)；
Wherein, the beam projecting end of the first fiber optic collimator mirror (5) is provided with the first collimator and extender mirror (7), the first fiber optic collimator mirror
(5) the first attenuator (6) is provided between the first collimator and extender mirror (7), the beam projecting end of the first collimator and extender mirror (7) is set
The pentagonal prism of light path first (8) beam projecting end can be cut out by, which being equipped with, is disposed with the first lens (9) and Amici prism (18)；
The exit end of second fiber optic collimator mirror (11) is disposed with the second attenuator (12), the second beam-expanding collimation mirror (13) and
Two pentagonal prisms (14), the exit end of the second pentagonal prism (14) are disposed with the second lens (15) and Amici prism (18),
And second lens (15) be symmetrical arranged with the first lens (9)；The exit end of Amici prism (18) is disposed with collimation lens
And CMOS cameras (20) (19).
5. a kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber according to claim 4, its
It is characterised by, fiber optic splitter (3) is according to beam intensity ratio 1:1 ratio is divided.
6. a kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber according to claim 1, its
It is characterised by, CMOS cameras (20) are high speed camera, and Amici prism (18) is light splitting ratio 1:1 depolarization Amici prism.
A kind of 7. method of work of the dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber, it is characterised in that
The tail optical fiber that the laser that laser (1) is sent is carried by laser is coupled directly into optical fiber, passes through fiber optic splitter (3), thing
The light that light splitting optical fiber (4) separates is as object light light beam, and the light that reference light splitting optical fiber (10) separates is as reference light light beam, ginseng
Examine light splitting optical fiber (10) and the second fiber optic collimator mirror (11) is connected by FC/PC ports, be in space by the light collimation in optical fiber
Directional light propagate downwards, afterwards by the second attenuator (12) adjust reference light light intensity, sequentially pass through the second collimator and extender mirror
(13) spot diameter is expanded, the second pentagonal prism (14) is turned back to be propagated to the left, then turns into spherical wave by the second lens (15), warp
The telecentric structure that the second lens (15) and collimation lens (19) are formed is crossed, i.e., is upwardly propagated through turning back for Amici prism (18), is led to
Crossing collimation lens (19) turns into directional light, is irradiated to CMOS cameras (20), and object light splitting optical fiber (4) is connected by FC/PC ports
First fiber optic collimator mirror (5), it is the directional light in space by the light collimation in optical fiber, is adjusted afterwards by the first attenuator (6)
Object light light intensity, spot diameter is expanded by the first collimator and extender mirror (7)；
When measurement pattern is transmission measurement, pentagonal prism (8) is removed, through the first speculum (21) and the second speculum (22) two
It is secondary turn back after upwardly propagate, the transparent sample in irradiation objective table (17), through sample light by microcobjective (16) amplification,
By the telecentric structure being made up of microcobjective (16) and collimation lens (19), that is, the object light spherical wave amplified passes through Amici prism
(18), turn into directional light by collimation lens (19), be irradiated to CMOS cameras (20), interfere to form holography with reference light light path
Figure, recorded by CMOS cameras (20)；
When measurement pattern is reflection measurement, the first pentagonal prism (8) is moved into, is propagated to the right after turning back, by the first lens (9)
Assemble to the right, turned back downward propagation through Amici prism (18), objective table is located at as parallel light irradiation by microcobjective (16)
(17) the opaque sample above, it is anti-by the telecentric structure being made up of microcobjective (16) and collimation lens (19), i.e. sample
It is emitted back towards the light come by microcobjective (16) to amplify, the object light spherical wave of amplification passes through Amici prism (18), by collimation lens
(19) turn into directional light, be irradiated to CMOS cameras (20), interfere to form hologram with reference light light path, remembered by CMOS cameras (20)
Record.
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| CN112379583A (en) * | 2020-11-12 | 2021-02-19 | 昆明理工大学 | Lens-free system and color scanning holographic implementation method thereof |
| CN112684462A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Amplified area array sweep frequency measuring device and method |
| CN115290006A (en) * | 2022-08-08 | 2022-11-04 | 清华大学深圳国际研究生院 | System and method for alignment of optical axis and detection of surface curvature of reflection light path |
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