CN107768278B - Droplet discharge device and droplet discharge condition correction method - Google Patents
Droplet discharge device and droplet discharge condition correction method Download PDFInfo
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- CN107768278B CN107768278B CN201710723809.0A CN201710723809A CN107768278B CN 107768278 B CN107768278 B CN 107768278B CN 201710723809 A CN201710723809 A CN 201710723809A CN 107768278 B CN107768278 B CN 107768278B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
- B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
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Abstract
The invention properly corrects the discharge condition of the liquid drop of the functional liquid based on the shooting result of the line sensor for checking the discharged liquid drop of the functional liquid. A droplet discharge device (1) for moving a workpiece table (40) on which a workpiece (W) is mounted in a main scanning direction relative to a droplet discharge nozzle to discharge droplets of a functional liquid from the droplet discharge nozzle onto the workpiece (W) for drawing, the droplet discharge device comprising a line sensor, wherein a mark having a predetermined size is formed in advance on the workpiece (W), the droplet discharge nozzle inspects and discharges the droplets onto the workpiece (W) on the workpiece table (40), the line sensor (31) images the droplet inspected and discharged on the workpiece (W) and the mark, the image pickup result of the droplet is corrected based on the length of the mark in the main scanning direction, and the discharge condition from the droplet discharge nozzle is corrected based on the image pickup result of the droplet after the correction.
Description
Technical Field
The present invention relates to a droplet discharge device that discharges a droplet of a functional liquid to a workpiece and performs drawing, and a droplet discharge condition correction method for the droplet discharge device.
Background
Conventionally, as an apparatus for drawing on a workpiece using a functional liquid, an injection type droplet discharge apparatus for discharging the functional liquid in the form of droplets is known. Droplet discharge apparatuses are widely used in the production of electro-optical devices (flat panel displays; FPDs) such as organic EL devices, color filters, liquid crystal display devices, plasma display panels (PDP devices), electron emission devices (FED devices, SED devices), and the like.
In the droplet discharge device, accuracy of a discharge position of a droplet of a functional liquid is required, and therefore, for the purpose of checking and correcting discharge of the droplet, the discharged droplet is checked before drawing, the discharged droplet is photographed by a photographing device, and a discharge condition is corrected based on the photographed result to adjust a discharge amount, a discharge timing, and the like of the functional liquid (see patent documents 1 and 2).
In addition, in the droplet discharge device of patent document 1, the functional liquid is inspected and discharged with respect to the medium for inspection, and in the droplet discharge device of patent document 2, the functional liquid is inspected and discharged with respect to the inspection area on the workpiece.
Documents of the prior art
Patent document
Patent document 1: japanese patent application laid-open No. 2010-204411
Patent document 2: japanese patent laid-open No. 2006-44059
Disclosure of Invention
Technical problem to be solved by the invention
However, as an imaging device for inspecting functional liquid droplets discharged, a line sensor suitable for continuous processing is widely used as compared with an area sensor.
When a line sensor is used, the workpiece table must constantly move the workpiece in a predetermined direction, i.e., the main scanning direction, at a desired speed. This is because, if the workpiece is not moved at a desired constant speed, the shapes of the actual liquid droplets and the liquid droplets in an image based on the result of photographing by the line sensor (hereinafter referred to as a photographed image) are different. For example, when the droplets discharged by the inspection are actually perfect circles, if the moving speed of the workpiece is lower than a desired speed, the shape of the droplets in the captured image of the line sensor becomes an elliptical shape having a long axis in the main scanning direction, which is the moving direction, and if the moving speed is higher than the desired speed, the shape of the droplets in the captured image of the line sensor becomes an elliptical shape having a long axis in the direction orthogonal to the main scanning direction.
However, the moving speed of the workpiece moved by the workpiece stage has a deviation. Therefore, when the line sensor captures an image of a droplet to be discharged for inspection, the actual shape of the droplet to be discharged for inspection may not be determined from the captured image of the line sensor. If the actual shape cannot be determined, the discharge position of the droplet to be discharged cannot be accurately determined. As a result, the discharge conditions of the liquid droplets from the discharge nozzles cannot be appropriately corrected.
The present invention has been made in view of the above, and an object thereof is to enable a droplet discharge device that can draw a droplet of a functional liquid from a droplet discharge nozzle on a workpiece moving in a main scanning direction with respect to the droplet discharge nozzle, wherein a discharge condition of the droplet of the functional liquid is appropriately corrected based on an imaging result of a line sensor for inspecting the droplet of the discharged functional liquid.
Technical solution for solving technical problem
In order to achieve the above object, the present invention provides a droplet discharge device for moving a workpiece table on which a workpiece is mounted in a main scanning direction with respect to a droplet discharge nozzle, and discharging droplets of a functional liquid from the droplet discharge nozzle onto the workpiece to perform drawing, the droplet discharge device including: a line sensor in which imaging elements are arranged in a direction perpendicular to the main scanning direction; and a control unit that controls the droplet discharge nozzle, the workpiece stage, and the line sensor, wherein a mark having a predetermined size is formed in advance on the workpiece stage or the workpiece, the control unit causes the droplet discharge nozzle to perform inspection discharge of the droplet on the workpiece stage, causes the line sensor to perform imaging of the droplet and the mark to be inspected and discharged on the workpiece, corrects an imaging result of the droplet based on a length of the imaged mark in the main scanning direction, and corrects a discharge condition from the droplet discharge nozzle based on the corrected imaging result of the droplet.
Preferably, the droplet discharge nozzles and the line sensors are arranged in this order from a negative side in the main scanning direction, and the control unit performs the imaging using the line sensors at least once each of a period in which the mark moves from the droplet discharge nozzles to a positive side in the main scanning direction and a period in which the mark moves from the positive side in the main scanning direction to the negative side in the main scanning direction.
Preferably, a telecentric lens is provided for the photographing element of the line sensor.
Preferably, the control unit performs inspection discharge of the liquid droplet from the droplet discharge nozzle a plurality of times.
Preferably, a discharge surface of the workpiece on which the liquid droplets are discharged is a quadrilateral shape, and the discharge surface is provided with an inspection discharge region for performing inspection discharge of the liquid droplets along a side on a positive side in the main scanning direction, and a drawing region on a negative side in the main scanning direction with respect to the inspection discharge region.
Another aspect of the present invention is a droplet discharge method for a droplet discharge apparatus for moving a workpiece table on which a workpiece is mounted in a main scanning direction with respect to a droplet discharge nozzle, and discharging droplets of a functional liquid from the droplet discharge nozzle onto the workpiece to perform drawing, the droplet discharge method including: an inspection discharge step of performing inspection discharge of a liquid droplet from the liquid droplet discharge nozzle to the workpiece on the workpiece stage, an imaging step of imaging the liquid droplet to be inspected and discharged on the workpiece and a mark of a predetermined size provided in advance on the workpiece stage or the workpiece by a line sensor in which imaging elements are arranged in a direction perpendicular to the main scanning direction, and an imaging result correction step of correcting an imaging result of the liquid droplet based on a length of the imaged mark in the main scanning direction; and a discharge condition correction step of correcting a discharge condition from the droplet discharge nozzle based on the corrected imaging result of the droplet.
Preferably, the droplet discharge nozzles and the line sensors are arranged in this order from a negative side in the main scanning direction, and in the image pickup step, the image pickup using the line sensors is performed at least once each during a period in which the marks are moved from the droplet discharge nozzles to a positive side in the main scanning direction and during a period in which the marks are moved from the positive side in the main scanning direction to the negative side in the main scanning direction.
Preferably, a telecentric lens is provided for the photographing element of the line sensor.
Preferably, in the inspection discharge step, inspection discharge of the liquid droplet from the droplet discharge nozzle is performed a plurality of times.
Preferably, a discharge surface of the workpiece on which the droplet is discharged is a quadrilateral shape, a test discharge region in which the droplet is tested and discharged is provided on the discharge surface along a side on a positive side in the main scanning direction, a drawing region is provided on a negative side in the main scanning direction with respect to the test discharge region, and the test discharge step performs the test discharge of the droplet to the test discharge region.
Effects of the invention
According to the present invention, in a droplet discharge device which can draw a droplet of a functional liquid from a droplet discharge nozzle on a workpiece moving in a main scanning direction with respect to the droplet discharge nozzle, a discharge condition of the droplet of the functional liquid is appropriately corrected based on an imaging result of a line sensor for inspecting the droplet of the functional liquid discharged.
Drawings
Fig. 1 is a schematic side view showing a configuration of an example of a droplet discharge device according to a first embodiment of the present invention.
Fig. 2 is a schematic plan view of the droplet discharge device of fig. 1.
Fig. 3 is a schematic plan view of a workpiece stage in a state where a workpiece is placed on the workpiece stage provided in the droplet discharge apparatus of fig. 1.
Fig. 4 is a partial enlarged view of the workpiece of fig. 3.
Fig. 5 is an explanatory diagram of a processing operation of the droplet discharge device according to the first embodiment.
Fig. 6 is an explanatory diagram of a processing operation of the droplet discharge device according to the first embodiment.
Fig. 7 is an enlarged view of a portion of the workpiece to be inspected where droplets of the functional liquid are discharged.
Fig. 8 is a diagram showing an example of the imaging result of the line sensor.
Fig. 9 is an explanatory diagram of an example of a method of correcting the imaging result of the line sensor.
Description of the reference numerals
1. droplet discharge device
23. carrier
24. nozzle head
31. line sensor
40. workpiece stage
41. table rotating mechanism
150. control section
W workpiece
W41. mark.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited to the embodiments shown below.
<1 > first embodiment >
First, the structure of a droplet discharge device according to a first embodiment of the present invention will be described with reference to fig. 1 to 4. Fig. 1 is a schematic side view showing a configuration of an example of a droplet discharge device according to a first embodiment of the present invention. Fig. 2 is a schematic plan view of the droplet discharge device of fig. 1. Fig. 3 is a schematic plan view of a workpiece stage in a state where a workpiece is placed on the workpiece stage provided in the droplet discharge apparatus of fig. 1. Fig. 4 is a partially enlarged view of a portion a of the workpiece of fig. 3.
In the following description, the main scanning direction of the workpiece is defined as an X-axis direction, the sub-scanning direction orthogonal to the main scanning direction is defined as a Y-axis direction, the vertical direction orthogonal to the X-axis direction and the Y-axis direction is defined as a Z-axis direction, and the rotational direction about the Z-axis direction is defined as a θ -direction.
As shown in fig. 1 and 2, the droplet discharge device 1 includes an X-axis table 10 extending in a main scanning direction (X-axis direction) for moving a workpiece W in the main scanning direction, and a pair of Y-axis tables 11 and 11 spanning the X-axis table 10 and extending in a sub-scanning direction (Y-axis direction). A pair of X-axis guide rails 12, 12 extending in the X-axis direction are provided on the upper surface of the X-axis table 10, and an X-axis linear motor (not shown) is provided on each X-axis guide rail 12. A Y-axis guide 13 extending in the Y-axis direction is provided on the upper surface of each Y-axis table 11, and a Y-axis linear motor (not shown) is provided on the Y-axis guide 13.
The pair of Y-axis tables 11 and 11 are provided with a carrier unit 20 and an imaging unit 30. The X-axis table 10 is provided with a workpiece stage 40. A maintenance unit 50 is provided between the pair of Y-axis tables 11 and 11 on the outer side (Y-axis negative direction side) of the X-axis table 10.
The carrier unit 20 is provided in plural, for example, 10 on the Y-axis table 11. Each carrier unit 20 has a carrier plate 21, a carrier turning mechanism 22, a carrier 23, and a nozzle head 24.
The carrier plate 21 is attached to the Y-axis guide rail 13, and the carrier plate 21 is freely moved in the Y-axis direction by a Y-axis linear motor provided on the Y-axis guide rail 13. However, the plurality of carrier plates 21 may be moved in the Y axis direction as a unit.
A carrier pivot mechanism 22 is provided at the center of the lower surface of the carrier plate 21, and a detachable carrier 23 is attached to the lower end of the carrier pivot mechanism 22. The carrier 23 can be freely rotated in the θ direction by the carrier rotating mechanism 22.
The lower surface of the carrier 23 is provided with a plurality of nozzle heads 24. The number of nozzle heads 24 is, for example, 12.
The nozzle head 24 has a plurality of droplet discharge nozzles (not shown) formed on a nozzle surface, which is a lower surface thereof, and discharges droplets of the functional liquid from the droplet discharge nozzles (hereinafter, referred to as discharge nozzles).
The photographing unit 30 has a line sensor 31. The line sensor 31 is disposed on the X-axis positive side with respect to the carrier 23.
The line sensor 31 photographs the workpiece W, specifically, photographs droplets of the functional liquid discharged onto the workpiece W for inspection. The line sensor 31 is supported by, for example, a base 32 provided on a side surface of the Y-axis table 11 on the X-axis positive side of the pair of Y-axis tables 11, 11.
The line sensor 31 includes a plurality of imaging elements (not shown), and each imaging element is provided with a light source and a half mirror (not shown). The plurality of imaging elements are arranged in the sub-scanning direction, and the imaging elements are provided at positions in the sub-scanning direction at which substantially the entire workpiece W can be imaged by one imaging. The light source may be shared among a plurality of imaging elements, but is preferably a blue led (light Emitting diode). In the line sensor 31, light emitted from the light source is reflected by the half mirror, further reflected by the object, transmitted through the half mirror, and received by each imaging element.
When the workpiece table 40 is guided to just below such a line sensor 31, the line sensor 31 can photograph the droplets of the workpiece W that are inspected and discharged onto the workpiece table 40.
Here, each imaging element of the line sensor 31 is not parallel to the workpiece W, that is, the distance from each imaging element to a region immediately below the imaging element in the workpiece W is not constant in the sub-scanning direction. In this case, it is preferable that a telecentric lens is provided for each imaging element of the line sensor 31 so that the reflected light from the subject can be detected by each imaging element. The telecentric lens may be integral with the line sensor 31 or may be separate.
The workpiece stage 40 is, for example, a vacuum suction stage, and suctions and places the workpiece W. The workpiece table 40 is supported to be rotatable in the θ direction by a table rotating mechanism 41 provided on the lower surface side of the workpiece table 40. A workpiece alignment camera (not shown) for imaging alignment marks of the workpiece W on the workpiece stage 40 is provided above the workpiece stage 40 on the X-axis negative side of the Y-axis table 11. Then, the position of the workpiece W on the stage workpiece table 40 in the θ direction is corrected by the table rotating mechanism 41 based on the image captured by the workpiece alignment camera.
The workpiece table 40 and the table rotating mechanism 41 are supported by an X-axis slide 42 provided on the lower surface side of the table rotating mechanism 41. The X-axis slider 42 is attached to the X-axis guide rail 12 and is movable in the X-axis direction by an X-axis linear motor provided on the X-axis guide rail 12. Further, the workpiece table 40 (workpiece W) is also movable in the X-axis direction along the X-axis guide rail 12 by the X-axis slider 42.
The workpiece W placed on the workpiece stage 40 is, for example, a G8.5 glass substrate. As shown in fig. 3, the workpiece W has a rectangular discharge surface for discharging the functional liquid for drawing, six effective areas W1 serving as drawing areas are designated in the central portion, and dummy areas W2 are provided along each side. The dummy region W2 is a region where the functional liquid is not discharged at least during drawing. As shown in fig. 4, the dummy region W2 provided along the side on the positive side in the X-axis direction is an inspection discharge region in which droplets D of the functional liquid are inspected to be discharged, and the effective region W1 is provided on the negative side in the X-axis direction with respect to the dummy region W2 serving as the inspection discharge region. In addition, a liquid repellent layer is formed on the surface of the dummy area W2. Further, the workpiece W is provided with an alignment mark W3 for adjusting the position of the workpiece W in the θ direction. The liquid repellent layer may be formed flat, or may be formed to have predetermined irregularities as a bank, like the effective region W1.
In addition, the scale W4 is provided at both end regions of the dummy region W2 of the workpiece W in the Y direction. The scale W4 is formed by marks W41 of a predetermined size and shape arranged at equal intervals in the main scanning direction. The scale W4 may be provided in the vicinity of the region where inspection discharge is performed in the dummy region W2, and may be formed only in the vicinity of the inspection discharge direction or may be formed substantially in the entire main scanning direction of the workpiece W. The method of utilizing the scale W4 is described later.
Returning to the description of fig. 1 and 2.
The maintenance unit performs maintenance of the nozzle head 24 to eliminate discharge failure of the nozzle head 24.
The droplet discharge device 1 described above is provided with the control unit 150. The control unit 150 is, for example, a computer and has a data storage unit (not shown). The data storage unit stores drawing data (bitmap data) for controlling droplets discharged onto the workpiece W to draw a predetermined pattern on the workpiece W, for example. The control unit 150 includes a program storage unit (not shown). The program storage unit stores programs for controlling various processes of the droplet discharge device 1, programs for controlling the drive of the drive system, and the like.
The data and the program may be recorded in a computer-readable storage medium such as a computer-readable Hard Disk (HD), a Flexible Disk (FD), a Compact Disc (CD), a magneto-optical disk (MO), or a memory card, and may be installed from the storage medium to the control unit 150.
Next, the workpiece processing performed by the droplet discharge device 1 configured as described above will be described. In the following description, on the X-axis table 10, a region on the X-axis negative side with respect to the Y-axis table 11 is referred to as a carrying-in/out region a1, a region between the pair of Y-axis tables 11 and 11 is referred to as a processing region a2, and a region on the X-axis positive side with respect to the Y-axis table 11 is referred to as a standby region A3.
First, as shown in fig. 1, the workpiece stage 40 is disposed in the carry-in/out area a1, and the workpiece W carried into the droplet discharge apparatus 1 by the carrying mechanism (not shown) is placed on the workpiece stage 40. Next, the alignment mark W3 of the workpiece W on the workpiece table 40 is photographed by the workpiece alignment camera. Then, the table rotating mechanism 41 corrects the position of the workpiece W on the stage workpiece table 40 in the θ direction based on the captured image, and performs alignment of the workpiece W (step S1).
Then, as shown in fig. 5, the workpiece stage 40 is moved from the carry-in/out area a1 to the processing area a2 by the X-axis slide 42. In the processing area a2, first, the dummy area W2 of the workpiece W is disposed below the nozzle head 24, and a pattern (condition correction pattern) for correcting the discharge conditions of the discharge nozzles, that is, droplets of the discharge functional liquid are inspected from all the discharge nozzles is drawn on the dummy area W2 (step S2).
Then, as shown in fig. 6, the workpiece stage 40 is moved to the standby area a3, and the dummy area W2 of the workpiece W inspected to discharge droplets of the functional liquid passes below the line sensor 31. Then, at the time of passage, as shown in at least fig. 7, the line sensor 31 is caused to photograph a portion of the dummy area W2 of the workpiece W where droplets D of the functional liquid are discharged, a portion where the mark W41 is formed, and a portion of the effective area W1 adjacent to the dummy area W2 in the main scanning direction. Thereby, the line sensor 31 is caused to pick up the droplet D of the functional liquid discharged for inspection and the marker W41 (step S3). The imaging result is output to the control unit 150.
After the imaging is completed, the control unit 150 creates and acquires a two-dimensional image including the droplet to be inspected and the mark, that is, an imaged image, based on the one-dimensional image from the line sensor 31 (step S4).
Then, the control unit 150 acquires the mark W41 from the acquired captured image by pattern matching or the like, calculates the length of the captured mark W41 in the main scanning direction, and corrects the captured image based on the length (step S5). For example, as shown in fig. 8, when the length L of the mark W41 in the main scanning direction is larger than the length Lo of the actual mark W41 (L is larger than Lo), that is, the moving speed of the workpiece W in the main scanning direction is smaller than a predetermined value, the captured image is corrected so as to be reduced in the main scanning direction. On the other hand, although not shown, when the length of the mark W41 in the main scanning direction is smaller than the length of the actual mark W41 (Lo > L), that is, when the calculated moving speed of the workpiece W in the main scanning direction is larger than the predetermined value, the captured image is corrected so as to be enlarged in the main scanning direction.
In the case of extracting the plurality of marks W41, the captured image may be calculated based on the average length of the plurality of marks W41, or one mark W41 may be selected from the plurality of marks W41, and the captured image may be corrected based on the length of the selected mark W41.
Further, the control unit 150 may calculate the speed of the workpiece in the main scanning direction based on the length of the mark in the main scanning direction, and correct the captured image based on the calculation result of the speed.
After correcting the captured image, the control unit 150 corrects the discharge conditions of the functional liquid droplets from the discharge nozzles based on the corrected captured image (step S6).
Specifically, for example, the control unit 150 extracts the droplet D to be inspected and discharged from the corrected captured image by pattern matching or the like, and calculates the distance in the main scanning direction from the extracted droplet to the effective area W1 and the area of the extracted droplet. The distance in the main scanning direction is, for example, a distance from the center of the droplet D to be inspected in the captured image to the effective region W1 closest to the center. Then, the control unit 150 corrects the discharge timing data as the discharge condition based on the calculated distance in the main scanning direction. For example, when the distance is greater than a predetermined value, the discharge timing data is corrected so that the discharge timing when the workpiece moves in the same direction as that when discharge is inspected is advanced, and when the distance is less than the predetermined value, the discharge timing data is corrected so that the discharge timing is delayed. Instead of the discharge timing data, the drawing data itself may be corrected. Further, the control unit 150 corrects the discharge amount as the discharge condition based on the calculation result of the area of the droplet to be inspected in the captured image.
After the above-described discharge conditions are corrected, the workpiece stage 40 is moved from the standby area A3 side to the processing area a2 by the X-axis slider 42. In the processing region a2, droplets are discharged from the discharge nozzles whose discharge conditions are corrected to the effective region of the workpiece W moved below the nozzle head 24. Further, the workpiece table 40 is moved to the carry-in/out region a1 side so that the entire effective region of the workpiece W passes below the nozzle head 24. Then, the workpiece W is reciprocated in the X-axis direction, and the carrier unit 20 is appropriately moved in the Y-axis direction, so that a predetermined pattern is drawn on the workpiece W (step S7). The moving speed of the workpiece W, that is, the scanning speed, is different between the inspection discharge and the imaging by the line sensor 31 and the drawing.
After the drawing is completed, the workpiece stage 40 is moved from the standby area A3 to the carry-in/out area a 1. When the workpiece table 40 moves to the carry-in/out area a1, the workpiece W that has finished drawing is carried out of the droplet discharge apparatus 1 (step S8).
Next, the next workpiece W is carried into the droplet discharge apparatus 1, and the above-described steps S1 to S8 are repeated.
As described above, in the droplet discharge apparatus 1, the mark W41 having a predetermined size is formed in advance on the workpiece W, and the line sensor 31 captures the droplet of the functional liquid discharged from the discharge nozzle for inspection and the mark W41. Then, the captured image including the liquid droplets is corrected based on the result of the imaging of the mark W41, and the discharge conditions of the discharge nozzles are corrected based on the corrected captured image. Therefore, even if the moving speed of the workpiece W is not a desired speed, the discharge condition can be appropriately corrected based on the imaging result of the droplet of the functional liquid to be inspected and discharged imaged by the line sensor.
Further, although the maintenance cycle is short when the functional liquid droplet is inspected and discharged on the medium for inspection such as the inspection sheet, the maintenance cycle can be increased by inspecting and discharging the dummy region W2 of the workpiece W in the droplet discharge device 1.
In addition, when the inspection sheet is used, ink bleeding or the like may occur depending on compatibility between the functional liquid as ink and the inspection sheet, and the position and size of the landed droplet may not be accurate. However, in the droplet discharge device 1, since the liquid repellent layer is formed in the dummy area W2 of the workpiece W to be inspected and discharged, ink bleeding or the like does not occur, and thus the types of inks that can be mounted are many.
Further, since the effective region W1 is located on the negative side in the main scanning direction, which is the X-axis direction, with respect to the dummy region W2, which is the inspection discharge region, inspection and drawing can be performed efficiently.
In the above example, when a plurality of marks are imaged by the line sensor 31, the entire captured image is corrected based on the average value of the lengths of the marks in the main scanning direction or the like. However, the method of correcting the captured image is not limited to this, and for example, as shown in fig. 9, the captured image may be divided into a plurality of regions R1 to R6 in the main scanning direction, and each region may include one mark W41. Then, the captured images of the regions R1 to R6 including the mark W41 are corrected based on the length of each mark W41 in the main scanning direction. At this time, the discharge conditions from the discharge nozzles are corrected based on the images obtained by synthesizing the captured images corrected for each of the regions R1 to R6.
<2 > second embodiment
Next, the structure of a droplet discharge device according to a second embodiment of the present invention will be described.
The droplet discharge apparatus according to the first embodiment is provided with a scale W41 formed of a mark W41 having a predetermined size on a workpiece W. In contrast, in the droplet discharge device of the second embodiment, a scale composed of a mark having a predetermined size is provided on the workpiece table 40.
At this time, the line sensor 31 also images the droplet of the functional liquid to be inspected and discharged and the mark on the stage 40, corrects the image including the droplet based on the length of the mark in the main scanning direction, and corrects the discharge condition from the discharge nozzle based on the corrected image. This makes it possible to appropriately correct the discharge condition without depending on the moving speed of the workpiece W.
Among them, it is preferable that the marks to be imaged together with the droplets to be inspected are designed uniformly, regardless of the substrate size or the like. This is because the same analysis result can be obtained even if the substrate size, pixel resolution, and the like are changed.
<3 > third embodiment
In the droplet discharge device according to the first embodiment, after the discharge conditions are corrected, drawing is started from the end portion of the effective region W1 on the negative side in the main scanning direction (X-axis direction) of the workpiece W.
In contrast, in the droplet discharge device according to the third embodiment, after the discharge conditions are corrected, drawing is started from the end of the effective region W1 on the positive side in the main scanning direction (X-axis direction) of the workpiece W.
Therefore, in the droplet discharge device according to the third embodiment, after the discharge conditions are corrected, the workpiece W is moved from the standby area A3 to the processing area a2 before drawing is started.
In the droplet discharge apparatus of the third embodiment, as in the droplet discharge apparatus of the first embodiment, the line sensor 31 captures the droplets of the functional liquid to be inspected and discharged and the mark W41 while the workpiece W after the inspection and discharge is moved from the processing area a2 to the standby area A3. In the droplet discharge device according to the third embodiment, unlike the droplet discharge device according to the first embodiment, the same imaging is performed while the workpiece W is moved from the standby area A3 to the processing area a2 before the drawing is started. In other words, in the droplet discharge device according to the third embodiment, the line sensor 31 is imaged once during a period in which the workpiece W moves from the discharge nozzle to the line sensor 31 in the forward direction and a period in which the workpiece W moves in the reverse direction (hereinafter, simply referred to as the reverse direction) opposite to the forward direction.
Then, in the droplet discharge apparatus of the third embodiment, the captured image including the droplets when the workpiece W is moved in the forward direction and the same captured image when the workpiece W is moved in the reverse direction are corrected based on the result of capturing the image of the mark W41 when the workpiece W is moved in the forward direction and the result of capturing the image of the mark W41 when the workpiece W is moved in the reverse direction.
For example, both the captured image when moving in the forward direction and the captured image when moving in the reverse direction are corrected based on the average of the length of the mark W41 in the main scanning direction when moving in the forward direction and the length of the mark W41 in the main scanning direction when moving in the reverse direction. Alternatively, it is also possible to correct the captured image at the time of forward movement based on the length of the mark W41 in the main scanning direction at the time of forward movement, and to correct the captured image at the time of reverse movement based on the length of the mark W41 in the main scanning direction at the time of reverse movement.
In the droplet discharge device according to the third embodiment, the discharge conditions from the discharge nozzles are corrected based on the corrected captured image during the forward movement and the corrected captured image during the reverse movement.
This enables the discharge condition to be corrected more accurately.
When the tendency of the positional deviation of the liquid droplets differs between the discharge image in the forward direction and the captured image in the reverse direction, the drawing may be stopped and the maintenance unit 50 may perform maintenance on the discharge nozzles.
<4. modification of the first and third embodiments >
In the above description, in the first embodiment, the above-described imaging of the line sensor 31 is performed only while the workpiece W is moved in the forward direction, and the number of times of imaging is once. In the third embodiment, the above-described imaging by the line sensor 31 is performed during the forward movement of the workpiece W and during the reverse movement. The number of times of the above-described photographing may be plural in the first embodiment, and the photographing may be performed plural times when moving in the forward direction and plural times when moving in the reverse direction in the third embodiment.
<5 > fourth embodiment >
In the droplet discharge device of the first embodiment, the number of times of inspection discharge of droplets of the functional liquid is one, but in the droplet discharge device of the fourth embodiment, after the first inspection discharge, the second inspection discharge is performed at a position different from the first inspection discharge position. The second inspection discharge may be before or after the line sensor 31 captures the droplets discharged by the first inspection.
In the droplet discharge device according to the fourth embodiment, the droplet discharged by the second inspection is imaged by the line sensor 31 together with the mark W41 on the workpiece W. Here, the droplets discharged by the first inspection and the droplets discharged by the second inspection can be simultaneously photographed by the line sensor 31.
Then, in the droplet discharge device of the fourth embodiment, the captured image of the line sensor 31 is corrected based on the captured result of the mark W41, and the discharge condition from the discharge nozzle is corrected based on the corrected captured image.
This enables the discharge condition to be corrected more accurately.
The number of inspection discharges may be 3 or more.
The droplet discharge device configured as described above can be applied to a substrate processing system for forming an organic EL layer of an organic light emitting diode as described in japanese patent application laid-open No. 2016-77966. Specifically, the droplet discharge device according to any of the above embodiments can be applied to the coating device of the substrate processing system.
The present invention is useful for a technique of applying a functional liquid to a substrate.
Claims (8)
1. A droplet discharge apparatus for moving a workpiece table on which a workpiece is mounted in a main scanning direction relative to a droplet discharge nozzle, and discharging droplets of a functional liquid from the droplet discharge nozzle onto the workpiece to perform drawing, the droplet discharge apparatus comprising:
a line sensor in which imaging elements are arranged in a direction perpendicular to the main scanning direction; and
a control unit for controlling the droplet discharge nozzle, the workpiece stage, and the line sensor,
a mark having a predetermined size is formed in advance on the work table or the work,
the control unit causes the droplet discharge nozzle to perform inspection discharge of the droplet onto the workpiece on the workpiece stage,
causing the line sensor to take a photograph of the droplet to be inspected and discharged and the mark on the workpiece,
correcting the imaging result of the liquid droplet based on the length of the mark imaged in the main scanning direction, correcting the discharge condition from the liquid droplet discharge nozzle based on the imaging result of the liquid droplet after the correction,
the liquid droplet discharge nozzle and the line sensor are arranged in this order from the negative side in the main scanning direction,
the control unit performs the imaging by the line sensor at least once during a period in which the mark moves from the droplet discharge nozzle to a positive side in the main scanning direction and during a period in which the mark moves from the positive side in the main scanning direction to a negative side in the main scanning direction.
2. The droplet discharge apparatus of claim 1,
a telecentric lens is provided for the photographing element of the line sensor.
3. The droplet discharge apparatus of claim 1 or 2,
the control unit performs inspection discharge of the liquid droplet from the droplet discharge nozzle a plurality of times.
4. The droplet discharge apparatus of claim 1 or 2,
a discharge surface of the workpiece on which the liquid droplets are discharged is a quadrangle,
in the discharge surface, a test discharge region for performing test discharge of the liquid droplets is provided along a side on a positive side in the main scanning direction, and a drawing region is provided on a negative side in the main scanning direction with respect to the test discharge region.
5. A liquid droplet discharging method of a liquid droplet discharging apparatus for moving a workpiece table on which a workpiece is mounted in a main scanning direction with respect to a liquid droplet discharging nozzle, and discharging a liquid droplet of a functional liquid from the liquid droplet discharging nozzle onto the workpiece to perform drawing, the liquid droplet discharging method comprising:
a test discharge step of performing a test discharge of the liquid droplet from the liquid droplet discharge nozzle to the workpiece on the workpiece stage,
an imaging step of imaging a droplet to be inspected and discharged on the workpiece and a mark having a predetermined size provided in advance on the workpiece stage or the workpiece by a line sensor having imaging elements arranged in a direction perpendicular to the main scanning direction,
a shot result correction step of correcting a shot result of the liquid droplet based on a length of the shot mark in the main scanning direction; and
a discharge condition correction step of correcting a discharge condition from the droplet discharge nozzle based on the corrected imaging result of the droplet,
the liquid droplet discharge nozzle and the line sensor are arranged in this order from the negative side in the main scanning direction,
in the image capturing step, the image capturing by the line sensor is performed at least once during a period in which the mark moves from the droplet discharge nozzle to a positive side in the main scanning direction and during a period in which the mark moves from the positive side in the main scanning direction to a negative side in the main scanning direction.
6. The liquid droplet discharging method according to claim 5,
a telecentric lens is provided for the photographing element of the line sensor.
7. The liquid droplet discharging method as claimed in claim 5 or 6,
in the inspection discharge step, inspection discharge of the liquid droplet from the liquid droplet discharge nozzle is performed a plurality of times.
8. The liquid droplet discharging method as claimed in claim 5 or 6,
a discharge surface of the workpiece on which the liquid droplets are discharged is a quadrangle,
a test discharge region for performing test discharge of the liquid droplets is provided along a side on a positive side in the main scanning direction on the discharge surface, and a drawing region is provided on a negative side in the main scanning direction with respect to the test discharge region,
in the inspection discharge step, the inspection discharge of the liquid droplet is performed to the inspection discharge region.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2016-162041 | 2016-08-22 | ||
| JP2016162041A JP6695237B2 (en) | 2016-08-22 | 2016-08-22 | Droplet ejection device and droplet ejection condition correction method |
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| CN107768278A CN107768278A (en) | 2018-03-06 |
| CN107768278B true CN107768278B (en) | 2021-07-20 |
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| JP (1) | JP6695237B2 (en) |
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| JP7119417B2 (en) | 2018-02-22 | 2022-08-17 | Ａｇｃ株式会社 | translucent structure |
| KR20200144198A (en) * | 2019-06-17 | 2020-12-29 | 삼성디스플레이 주식회사 | Ink droplet volume measuring apparatus and the ink droplet volume measuring method using the same, and the thin film layer forming apparatus using the measuring apparatus, and the manufacturing method of a display apparatus using the forming apparatus |
| KR102432531B1 (en) * | 2019-10-23 | 2022-08-18 | 세메스 주식회사 | Droplet inspection module and droplet inspection method |
| KR102420993B1 (en) * | 2020-06-30 | 2022-07-15 | 참엔지니어링(주) | Repair apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001203859A (en) * | 2000-01-21 | 2001-07-27 | Canon Inc | Device and method for reading image |
| CN102909954A (en) * | 2011-08-05 | 2013-02-06 | 住友重机械工业株式会社 | Thin film pattern forming apparatus, thin film pattern forming method and adjustment method for thin film pattern forming apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3697131B2 (en) * | 2000-02-21 | 2005-09-21 | キヤノン株式会社 | Manufacturing method of color filter, manufacturing apparatus, manufacturing method of display device including color filter, and manufacturing method of device including the display device |
| JP4320560B2 (en) * | 2003-05-14 | 2009-08-26 | セイコーエプソン株式会社 | Droplet discharge device |
| JP4765278B2 (en) | 2004-08-04 | 2011-09-07 | セイコーエプソン株式会社 | Method for correcting droplet landing position of droplet discharge device, droplet discharge device, and electro-optical device manufacturing method |
| JP2008249958A (en) * | 2007-03-30 | 2008-10-16 | Fujifilm Corp | Reference position measuring instrument and method, and drawing device |
| JP2010026181A (en) * | 2008-07-17 | 2010-02-04 | Shibaura Mechatronics Corp | Droplet applying device and droplet applying method |
| JP2010204411A (en) | 2009-03-04 | 2010-09-16 | Seiko Epson Corp | Liquid drop discharge device, liquid drop discharge method, and method of manufacturing color filter |
| JP5423148B2 (en) * | 2009-05-27 | 2014-02-19 | セイコーエプソン株式会社 | Droplet discharge method and droplet discharge apparatus |
| JP2011120821A (en) * | 2009-12-14 | 2011-06-23 | Nikkiso Co Ltd | Blood purifier |
| JP2013071292A (en) * | 2011-09-27 | 2013-04-22 | Fujifilm Corp | Liquid droplet discharge device and maintenance method therefor |
| JP2014195891A (en) * | 2013-03-29 | 2014-10-16 | セイコーエプソン株式会社 | Calculation method of correction value |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001203859A (en) * | 2000-01-21 | 2001-07-27 | Canon Inc | Device and method for reading image |
| CN102909954A (en) * | 2011-08-05 | 2013-02-06 | 住友重机械工业株式会社 | Thin film pattern forming apparatus, thin film pattern forming method and adjustment method for thin film pattern forming apparatus |
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| JP2018030054A (en) | 2018-03-01 |
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| CN107768278A (en) | 2018-03-06 |
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