CN107645284A - The clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected - Google Patents
The clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected Download PDFInfo
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Abstract
The clamped beam perseverance width device that the excess energy of the Autonomous test of the internet of things oriented of the present invention is collected is made up of co-planar waveguide, fixed beam structure, capacitor plate, drop-down pole plate, total is made based on Si substrates, one shares two fixed beam structures, clamped beam close to input forms electric capacity with pole plate, form online Capacitance Power sensor, realize the Autonomous test of input signal, clamped beam close to output end is different according to the watt level of input signal, the tributary signal of different proportion is coupled out under applied voltage control, to ensure the output perseverance width of main signal line；AC/DC circuits are terminated in the output of coupling branch road, the energy being coupled out is changed and stored by rechargeable battery, realizes the collection of excess energy.These clamped beam perseverance width devices simple in construction efficiently realized with Autonomous test and excess energy collecting function.
Description
Technical field
The present invention proposes the clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected, and belongs to microelectronics
The technical field of mechanical system (MEMS).
Background technology
Microwave limiter is a kind of algorithm for power modulation device, and in small-power, signal is almost without damply by but input work
When rate increases to certain value, signal can produce very big decay, and this value is referred to as the threshold level of limiter, hereafter input power
Continue to increase, power output keeps nearly constant.Microwave limiter is a kind of important microwave controller, and it is widely used
In the systems such as all kinds of microwave signal receivers.Its most common effect is mounted in the high-frequency amplifier and frequency mixer of receiver
Before, protect them from being burnt by strong signal.Microwave limiter is often from control member of the PIN diode as microwave signal
Part, but recently as the fast development of MEMS technology, make it possible to realize above-mentioned function based on MEMS technology.It is basic herein
On, this patent further provides the structure of the permanent width device based on MEMS clamped beams, by the microwave signal process of input into constant
The signal output of amplitude, it is more efficiently to protect late-class circuit, meanwhile, during applied to LNA front ends, LNA input signal width
Spend constant, in order to reach the constant of LNA amplitude output signals, its gain can be constant, i.e., need not change its direct current biasing point, make
Obtaining no longer needs the AGC modules of complexity in LNA, improve the LNA linearity.
The content of the invention
Technical problem：Collected it is an object of the invention to provide a kind of excess energy of Autonomous test of internet of things oriented clamped
Beam perseverance width device, present invention employs simple co-planar waveguide and clamped beam coupled structure, is surveyed by online self-test geodesic structure
Go out the size of input signal power, the coupling amount of coupled structure is controlled according to the size of input power to reach the mesh that permanent width exports
, while excess energy is coupled is collected.
Technical scheme：To achieve the above object, the technical solution adopted by the present invention is：
The clamped beam perseverance width device that a kind of excess energy of Autonomous test of internet of things oriented is collected, the clamped beam perseverance width device is base
Made in Si substrates, including signal wire, the first ground wire, the second ground wire, the 3rd ground wire, the 4th ground wire, the first clamped beam, first
Capacitor plate, the second capacitor plate, the second clamped beam, the first anchor area, the second anchor area, the first drop-down pole plate, the second drop-down pole plate,
Wherein：Signal inputs from the signal wire input of signal wire, signal wire input and the first ground wire, the second ground wire structure of signal wire
Into the first co-planar waveguide CPW1, the first clamped beam is on the first ground wire and the second ground wire in the first co-planar waveguide CPW1, and
The underface of one capacitor plate, first clamped beam between signal wire and the first ground wire, the second capacitor plate be located at signal wire and
The underface of first clamped beam between second ground wire, the first capacitor plate and the second capacitor plate are symmetrical on signal wire, and second
Clamped beam, which is suspended from above signal wire to be connected with the first anchor area and the second anchor area, forms fixed beam structure, and the first drop-down pole plate is positioned at letter
The underface of second clamped beam number between line and the first anchor area, the second drop-down pole plate are located at second between signal wire and the second anchor area
The underface of clamped beam, the first drop-down pole plate and the second drop-down pole plate are symmetrical on signal wire, the first anchor area and the first ground wire, the
Two ground wires form the second co-planar waveguide CPW2, and the second anchor area forms the 3rd co-planar waveguide CPW3 with the second ground wire, the 4th ground wire, the
Two co-planar waveguide CPW2 and the 3rd co-planar waveguide CPW3 are as coupling branch road output end, the second anchor area connection AC/DC circuits, AC/
DC circuits connect rechargeable battery, and the signal line output terminal of signal wire and the 3rd ground wire form the 4th co-planar waveguide CPW4 as output
End, signal export from the signal line output terminal of signal wire, and the structure realizes signal Autonomous test and the output of signal constant width simultaneously
Function, excess energy is have collected, when it is applied in LNA, self-powered can be not only realized, moreover, no longer needing AGC in LNA
Module, improve the linearity.
Preferably：The Si substrate top surfaces are provided with SiO2Layer.
Preferably：The signal wire, the first ground wire, the second ground wire, the 3rd ground wire, the 4th ground wire, the first capacitor plate,
Two capacitor plates, the first anchor area, the second anchor area, the first drop-down pole plate, the second drop-down pole plate are arranged at SiO2The upper surface of layer, and
First ground wire, the second ground wire are located at the axial both sides of signal wire, and the 3rd ground wire, the 4th ground wire are located at the axial direction two of signal wire
Side, the first anchor area, the second anchor area are located at the axial both sides of signal wire, and the first anchor area is located at the first ground wire and the 3rd ground wire
Between, between the second ground wire and the 4th ground wire, first capacitor plate is located at signal wire and the first ground wire in the second anchor area
Between, the second capacitor plate between signal wire and the second ground wire, the first drop-down pole plate be located at signal wire and the first anchor area it
Between, the second drop-down pole plate is located between signal wire and the second anchor area.
Preferably：Also covered on the signal wire immediately below the first clamped beam, on the first capacitor plate and the second capacitor plate
It is stamped the first Si3N4Dielectric layer.On the signal wire immediately below the first drop-down pole plate and the second drop-down pole plate and the second clamped beam
It is also covered with the 2nd Si3N4Dielectric layer.
Preferably：Signal inputs from the first co-planar waveguide CPW1, and microwave signal can produce electrostatic masterpiece to the first clamped beam
With so that the first clamped beam is subjected to displacement, so as to change with the first capacitor plate of lower section, the electric capacity of the second capacitor plate
Become.The size of electrostatic force is related to microwave signal power, can be by measuring the first capacitor plate, the second capacitor plate and first
Electric capacity C between clamped beambThe power P size of microwave signal is extrapolated, so as to realize the function of Autonomous test.Electric capacity CbWith signal work(
Rate P relation is：
Wherein, A1It is the area of signal wire and the first clamped beam overlapping part, A2It is the first capacitor plate, the second capacitance pole
The gross area of plate and the first clamped beam overlapping part, g0It is between the first capacitor plate, the second capacitor plate and the first clamped beam
The thickness of air layer, g1It is the first capacitor plate, the first Si on the second capacitor plate3N4The thickness of dielectric layer, εrIt is the first Si3N4
The relative dielectric constant of dielectric layer, k1It is the coefficient of elasticity of the first clamped beam, Z0It is CPW characteristic impedance.
Preferably：After the Autonomous test of signal power is realized, signal has portion of energy by when passing through the second clamped beam
Two clamped beams are coupled to branch road and are collected via the second co-planar waveguide CPW2 and the 3rd co-planar waveguide CPW3 to AC/DC circuits, root
, can be on the first drop-down pole plate below the second clamped beam, the second drop-down pole plate according to the watt level P of the input signal detected
Add corresponding DC voltage U so that the second clamped beam pulled down to appropriate position, equivalent to the second clamped beam of change and signal
Electric capacity C between linedSize, so as to change the size for being coupled to branched portion energy, realize that main signal line exports permanent width.Surveying
Input signal power be P, for ensure output signal power it is constant be P0, required coupled capacitor C can be extrapolateddSize, relational expression
It is as follows：
Wherein, f is the frequency of input signal, and j represents imaginary part, Z0It is the impedance value of CPW transmission lines, ZLIt is output end load
Impedance value, and the size of coupled capacitor is relevant with the drop-down displacement x of clamped beam, and relational expression is as follows：
Wherein, A3It is the area of the second clamped beam and signal wire overlapping part, the drop-down displacement x of clamped beam is then by pulling down pole
Added DC voltage U is controlled on plate, pulls down displacement x and DC voltage U relation is as follows：
Wherein, k2It is the coefficient of elasticity of the second clamped beam.
The present invention compared with prior art, has the advantages that：
In the present invention, CPW transmission lines and fixed beam structure, novelty simple in construction are taken.Autonomous test part, it is to pass through
The detection that capacitance size between clamped beam and pole plate realizes input signal power size is surveyed, input signal is lost low；Additional straight
Flow under voltage control, the input signal of different capacity is coupled to branch road in varing proportions by clamped beam, ensures the perseverance of main signal line
Width exports；Meanwhile the energy being coupled out is converted into direct current and is collected by rechargeable battery by AC/DC modules, when applying in LNA
When, self-powered can be achieved, there is higher potential value.
Brief description of the drawings
Fig. 1 is the top view for the clamped beam perseverance width device that the excess energy of the Autonomous test of the internet of things oriented of the present invention is collected.
Fig. 2 is the clamped beam perseverance width device AA ' directions that the excess energy of the Autonomous test of the internet of things oriented of the present invention is collected
Profile.
Fig. 3 is the clamped beam perseverance width device BB ' directions that the excess energy of the Autonomous test of the internet of things oriented of the present invention is collected
Profile.
In figure：Signal wire 1, signal wire input 1-1, signal line output terminal 1-2, the first ground wire 2-1, the second ground wire 2-2,
3rd ground wire 2-3, the 4th ground wire 2-4, the first clamped beam 3, the first capacitor plate 4-1, the second capacitor plate 4-2, second is clamped
Beam 5, the first anchor area 6-1, the second anchor area 6-2, the first drop-down pole plate 7-1, the second drop-down pole plate 7-2, the first Si3N4Dielectric layer 8-
1, the 2nd Si3N4Dielectric layer 8-2, SiO2 layer 9, Si substrates 10.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these examples are merely to illustrate this
Invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are various to the present invention's
The modification of the equivalent form of value falls within the application appended claims limited range.
The clamped beam perseverance width device that the excess energy of Autonomous test of internet of things oriented a kind of is collected, by 4 coplanar waveguide structures,
2 clamped beams and 4 pole plates are formed, and 4 coplanar waveguide structures are respectively the first co-planar waveguide CPW1, the second co-planar waveguide
CPW2, the 3rd co-planar waveguide CPW3 and the 4th co-planar waveguide CPW4,2 clamped beams are respectively that the first clamped beam 3, second is clamped
5,4 pole plates of beam are respectively the first capacitor plate 4-1, the second capacitor plate 4-2, the first drop-down pole plate 7-1, the second drop-down pole plate
7-2.As Figure 1-3, the clamped beam perseverance width device is made based on Si substrates 10 to concrete structure relation, including signal wire 1, the
One ground wire 2-1, the second ground wire 2-2, the 3rd ground wire 2-3, the 4th ground wire 2-4, the first clamped beam 3, the first capacitor plate 4-1,
Two capacitor plate 4-2, the second clamped beam 5, the first anchor area 6-1, the second anchor area 6-2, the first drop-down pole plate 7-1, the second drop-down pole
Plate 7-2, wherein：Signal inputs from the signal wire input 1-1 of signal wire 1, the signal wire input 1-1 of signal wire 1 and first
Ground wire 2-1, the second ground wire 2-2 form the first co-planar waveguide CPW1, and the first clamped beam 3 is across the of the first co-planar waveguide CPW1
On one ground wire 2-1 and the second ground wire 2-2, i.e., described one end of first clamped beam 3 is arranged on the first ground wire 2-1, and the other end is set
On the second ground wire 2-2, and the first capacitor plate 4-1, the second capacitor plate 4-2 are located at the underface of the first clamped beam 3,
So that first clamped beam 3 is across on the first ground wire 2-1, the second ground wire 2-2, and vacantly formed on signal wire 1 clamped
Girder construction.First capacitor plate 4-1 is located at the underface of the first clamped beam 3 between the ground wire 2-1 of signal wire 1 and first, the second electricity
Hold pole plate 4-2 and be located at the underface of the first clamped beam 3 between the ground wire 2-2 of signal wire 1 and second, the first capacitor plate 4-1 and the
Two capacitor plate 4-2 are symmetrical on signal wire 1, and the second clamped beam 5 is suspended from the top of signal wire 1 and the first anchor area 6-1 and the second anchor
Area 6-2, which is connected, forms fixed beam structure, i.e., described one end of second clamped beam 5 is arranged on the first anchor area 6-1, and the other end is arranged on
On second anchor area 6-2, and the first drop-down pole plate 7-1, the second drop-down pole plate 7-2 are located at the underface of the second clamped beam 5, make
Second clamped beam 5 across on the first anchor area 6-1, the second anchor area 6-2, and vacantly form clamped beam on signal wire 1
Structure.First drop-down pole plate 7-1 is located at the underface of the second clamped beam 5 between the anchor area 6-1 of signal wire 1 and first, the second drop-down
Pole plate 7-2 is located at the underface of the second clamped beam 5 between the anchor area 6-2 of signal wire 1 and second, the first drop-down pole plate 7-1 and second
It is symmetrical on signal wire 1 to pull down pole plate 7-2, the first anchor area 6-1 and the first ground wire 2-1, the second ground wire 2-3 form the second coplanar ripple
CPW2 is led, the second anchor area 6-2 and the second ground wire 2-2, the 4th ground wire 2-4 form the 3rd co-planar waveguide CPW3, the second co-planar waveguide
CPW2 and the 3rd co-planar waveguide CPW3 connects as coupling branch road output end, the second anchor area 6-2 connection AC/DC circuits, AC/DC circuits
Rechargeable battery is connect, the signal line output terminal 1-2 and the 3rd ground wire 2-3 of signal wire 1 form the 4th co-planar waveguide CPW4 as output
End, signal export from the signal line output terminal 1-2 of signal wire 1, and the structure realizes signal Autonomous test simultaneously and signal constant is defeated
The function of going out, have collected excess energy, when it is applied in LNA, self-powered can not only be realized, moreover, no longer being needed in LNA
AGC modules, improve the linearity.
The upper surface of Si substrates 10 is provided with SiO2Layer 9.As shown in figure 1, the signal wire 1, the first ground wire 2-1,
Two ground wire 2-2, the 3rd ground wire 2-3, the 4th ground wire 2-4, the first capacitor plate 4-1, the second capacitor plate 4-2, the first anchor area 6-
1st, the second anchor area 6-2, the first drop-down pole plate 7-1, the second drop-down pole plate 7-2 are arranged at SiO2The upper surface of layer 9, and described first
Ground wire 2-1, the second ground wire 2-2 are located at the axial both sides of signal wire 1, and the 3rd ground wire 2-3, the 4th ground wire 2-4 are located at signal wire 1
Axial both sides, the first anchor area 6-1, the second anchor area 6-2 are located at the axial both sides of signal wire 1, and the first anchor area 6-1 is positioned at the
Between one ground wire 2-1 and the 3rd ground wire 2-3, the second anchor area 6-2 is between the second ground wire 2-2 and the 4th ground wire 2-4, and described
One capacitor plate 4-1 is located between the ground wire 2-1 of signal wire 1 and first, and the second capacitor plate 4-2 is located at the ground of signal wire 1 and second
Between line 2-2, the first drop-down pole plate 7-1 is located between the anchor area 6-1 of signal wire 1 and first, and the second drop-down pole plate 7-2 is located at signal
Between the anchor area 6-2 of line 1 and second.
As shown in Figure 2,3, on the signal wire 1 immediately below the first clamped beam 3, the first capacitor plate 4-1 and the second electric capacity
The first Si is also covered with pole plate 4-23N4Dielectric layer 8-1.In the first drop-down pole plate 7-1 and the second drop-down pole plate 7-2 and second
The 2nd Si is also covered with signal wire 1 immediately below clamped beam 53N4Dielectric layer 8-2.
First, signal inputs from the first co-planar waveguide CPW1, and microwave signal can produce electrostatic masterpiece to the first clamped beam 3
With so that the first clamped beam 3 is subjected to displacement, so as to the first capacitor plate 4-1, the second capacitor plate 4-2 electric capacity with lower section
Change.The size of electrostatic force is related to microwave signal power, can be by measuring the first capacitor plate 4-1, the second electric capacity
Electric capacity C between pole plate 4-2 and the first clamped beam 3bThe power P size of microwave signal is extrapolated, so as to realize the function of Autonomous test.
Electric capacity CbRelation with signal power P is：
Wherein, A1It is the area of the overlapping part of 1 and first clamped beam of signal wire 3, A2It is two pole plates and the first clamped beam 3
The gross area of overlapping part, g0It is the thickness of air layer between pole plate and the first clamped beam 3, g1It is the first Si on pole plate3N4Medium
Layer 8-1 thickness, εrIt is the relative dielectric constant of dielectric layer, k1It is the coefficient of elasticity of the first clamped beam 3, Z0It is CPW feature resistance
It is anti-.
Secondly, after the Autonomous test of signal power is realized, signal has portion of energy by second when passing through the second clamped beam 5
Clamped beam 5 is coupled to branch road and is collected via the second co-planar waveguide CPW2 and the 3rd co-planar waveguide CPW3 to AC/DC circuits, according to
The watt level P of the input signal detected, can be in the first drop-down pole plate 7-1 below the second clamped beam 5, the second drop-down pole plate
On 7-2 plus corresponding DC voltage U so that the second clamped beam 5 pulled down to appropriate position, equivalent to changing the second clamped beam
Electric capacity C between 5 and signal wiredSize, so as to change the size for being coupled to branched portion energy, realize that main signal line output is permanent
Width.Be P measuring input signal power, for ensure output signal power it is constant be P0, required coupled capacitor C can be extrapolateddGreatly
Small, relational expression is as follows：
Wherein, f is the frequency of input signal, and j represents imaginary part, Z0It is the impedance value of CPW transmission lines, ZLIt is output end load
Impedance value, and the size of coupled capacitor is relevant with the drop-down displacement x of clamped beam, and relational expression is as follows：
Wherein, A3It is the second clamped beam 5 and the area of signal wire overlapping part, the drop-down displacement x of clamped beam is then by pulling down
Added DC voltage U is controlled on pole plate, pulls down displacement x and DC voltage U relation is as follows：
Wherein, k2It is the coefficient of elasticity of the second clamped beam 5.
It can be extrapolated by formula (2), (3), (4), when input power is measured as P, to realize permanent width output, pull down institute on pole plate
The size for the DC voltage U that need to add.
The preparation method of clamped beam perseverance width device that the excess energy of the Autonomous test of the internet of things oriented of the present invention is collected is：
1) high resistant Si substrates 10 (4000 Ω cm), thickness 400um are prepared；
2) one layer of SiO of thermal oxide growth2Layer 9, thickness 1.2um；
3) coat photoresist on substrate, remove signal wire 1, ground wire, capacitor plate 4-1 and 4-2, anchor area 6-1 and 6-2,
Photoresist at pull-down electrode 7-1 and 7-2, evaporates one layer of Seed Layer Ti, and thickness isThen first layer gold, thickness are prepared
For 0.3um, the photoresist retained is removed by stripping technology, the metal level in related removal face on a photoresist, preliminarily forms letter
Number line, ground wire, anchor area, capacitor plate, drop-down pole plate；
4) handled in preceding step on obtained Si substrates, pass through PECVD and generate one layerThick Si3N4Dielectric layer,
Photoetching Si3N4Dielectric layer, capacitor plate 4-1 and 4-2, the lower signal line of clamped beam 3, the lower signal of clamped beam 5 will be made by only retaining
Si at line, drop-down pole plate 7-1 and 7-23N4Dielectric layer；
5) polyimide sacrificial layer of one layer of 1.6 μ m-thick is deposited, it is desirable to fill up all pits；Photoetching polyimides sacrifice
Layer, only retain the polyimide sacrificial layer of clamped beam 3 and the lower section of clamped beam 5；
6) photoresist is coated, removes the photoresist at preparation making signal wire, ground wire, anchor area, clamped beam 3 and clamped beam 5,
One layer of Seed Layer Ti is evaporated, thickness isSecond layer gold is prepared, thickness 2um, finally, removes the photoresist of reservation, is formed
Signal wire, ground wire, anchor area, clamped beam 3 and clamped beam 5；
7) polyimide sacrificial layer is discharged, to remove the polyimide sacrificial layer of clamped beam 3 and the lower section of clamped beam 5；Finally,
Soak 5 minutes in deionized water, absolute ethyl alcohol dehydration, volatilize, dry under normal temperature.
Present invention be distinguished in that：
Present invention employs CPW transmission lines and fixed beam structure, novelty simple in construction.Autonomous test part, utilize clamped beam 3
With pole plate form electric capacity, due to input signal the electrostatic force of clamped beam is caused beam produce drop-down displacement, by survey beam with
Capacitance size realizes the detection of input signal power size between pole plate, input signal is lost low；After completing signal detection, outside
Add under DC voltage control, clamped beam 5 is produced drop-down displacement, it is right so as to change the coupled capacitor between clamped beam 5 and signal wire
It will be coupled out in varing proportions by clamped beam in the input signal of different capacity, to ensure that the permanent width of signal exports；Meanwhile coupling
The energy closed out is changed by AC/DC modules and collected by rechargeable battery, and the structure realizes signal Autonomous test and signal simultaneously
The function of permanent width output, have collected excess energy, when it is applied in LNA, can not only realize self-powered, moreover, in LNA not
AGC modules are needed again, improve the linearity.
Meet that the structure of conditions above is considered as consolidating for the excess energy collection of the Autonomous test of the internet of things oriented of the present invention
Strutbeam perseverance width device.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (6)
1. the clamped beam perseverance width device that a kind of excess energy of Autonomous test of internet of things oriented is collected, it is characterised in that：The clamped beam
Permanent width device is made based on Si substrates (10), including signal wire (1), the first ground wire (2-1), the second ground wire (2-2), the 3rd ground
Line (2-3), the 4th ground wire (2-4), the first clamped beam (3), the first capacitor plate (4-1), the second capacitor plate (4-2), second
Clamped beam (5), the first anchor area (6-1), the second anchor area (6-2), the first drop-down pole plate (7-1), the second drop-down pole plate (7-2), its
In：Signal inputs from the signal wire input (1-1) of signal wire (1), the signal wire input (1-1) of signal wire (1) and first
Ground wire (2-1), the second ground wire (2-2) form the first co-planar waveguide CPW1, and the first clamped beam (3) is across in the first co-planar waveguide
On CPW1 the first ground wire (2-1) and the second ground wire (2-2), the first capacitor plate (4-1) is located at signal wire (1) and the first ground wire
The underface of first clamped beam (3) between (2-1), the second capacitor plate (4-2) are located at signal wire (1) and the second ground wire (2-2)
Between the first clamped beam (3) underface, the first capacitor plate (4-1) and the second capacitor plate (4-2) are right on signal wire (1)
Claim, the second clamped beam (5), which is suspended from the first anchor area (6-1) and the second anchor area (6-2) to be connected above signal wire (1), forms clamped beam
Structure, the first drop-down pole plate (7-1) are located at the underface of the second clamped beam (5) between signal wire (1) and the first anchor area (6-1),
Second drop-down pole plate (7-2) is located at the underface of the second clamped beam (5) between signal wire (1) and the second anchor area (6-2), under first
Draw pole plate (7-1) and the second drop-down pole plate (7-2) on signal wire (1) symmetrically, the first anchor area (6-1) and the first ground wire (2-1),
Second ground wire (2-3) forms the second co-planar waveguide CPW2, the second anchor area (6-2) and the second ground wire (2-2), the 4th ground wire (2-4)
Form the 3rd co-planar waveguide CPW3, the second co-planar waveguide CPW2 and the 3rd co-planar waveguide CPW3 and be used as coupling branch road output end, the
Two anchor areas (6-2) connect AC/DC circuits, AC/DC circuits connection rechargeable battery, the signal line output terminal (1-2) of signal wire (1) with
3rd ground wire (2-3) forms the 4th co-planar waveguide CPW4 as output end, signal line output terminal (1- of the signal from signal wire (1)
2) export, the structure realizes the function of signal Autonomous test and the output of signal constant width simultaneously, have collected excess energy, when its application
When in LNA, self-powered can be not only realized, moreover, no longer needing AGC modules in LNA, improves the linearity.
2. the clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected according to claim 1, its feature
It is：Si substrates (10) upper surface is provided with SiO2Layer (9).
3. the clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected according to claim 2, its feature
It is：The signal wire (1), the first ground wire (2-1), the second ground wire (2-2), the 3rd ground wire (2-3), the 4th ground wire (2-4),
One capacitor plate (4-1), the second capacitor plate (4-2), the first anchor area (6-1), the second anchor area (6-2), the first drop-down pole plate (7-
1), the second drop-down pole plate (7-2) is arranged at SiO2The upper surface of layer (9), and first ground wire (2-1), the second ground wire (2-2)
Positioned at the axial both sides of signal wire (1), the 3rd ground wire (2-3), the 4th ground wire (2-4) are located at the axial both sides of signal wire (1), the
One anchor area (6-1), the second anchor area (6-2) are located at the axial both sides of signal wire (1), and the first anchor area (6-1) is located at first
Between ground wire (2-1) and the 3rd ground wire (2-3), the second anchor area (6-2) be located at the second ground wire (2-2) and the 4th ground wire (2-4) it
Between, first capacitor plate (4-1) is located between signal wire (1) and the first ground wire (2-1), the second capacitor plate (4-2) position
Between signal wire (1) and the second ground wire (2-2), the first drop-down pole plate (7-1) is located at signal wire (1) and the first anchor area (6-1)
Between, the second drop-down pole plate (7-2) is located between signal wire (1) and the second anchor area (6-2).
4. the clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected according to claim 1, its feature
It is：On signal wire (1) immediately below the first clamped beam (3), the first capacitor plate (4-1) and the second capacitor plate (4-2)
On be also covered with the first Si3N4Dielectric layer (8-1)；In the first drop-down pole plate (7-1) and the second drop-down pole plate (7-2) and second
The 2nd Si is also covered with signal wire (1) immediately below clamped beam (5)3N4Dielectric layer (8-2).
5. the clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected according to claim 1, its feature
It is：Signal inputs from the first co-planar waveguide CPW1, and microwave signal can produce electrostatic force to the first clamped beam (3) so that
First clamped beam (3) is subjected to displacement, so as to which the first capacitor plate (4-1) with lower section, the electric capacity of the second capacitor plate (4-2) are sent out
It is raw to change；The size of electrostatic force is related to microwave signal power, by measuring the first capacitor plate (4-1), the second capacitor plate
Electric capacity C between (4-2) and the first clamped beam (3)bThe power P size of microwave signal is extrapolated, so as to realize the function of Autonomous test.
6. the clamped beam perseverance width device that the excess energy of the Autonomous test of internet of things oriented is collected according to claim 5, its feature
It is：After the Autonomous test of signal power is realized, signal has portion of energy by the second clamped beam when passing through the second clamped beam (5)
(5) it is coupled to branch road to be collected via the second co-planar waveguide CPW2 and the 3rd co-planar waveguide CPW3 to AC/DC circuits, according to being examined
The watt level P of the input signal of survey, can be in the first drop-down pole plate (7-1) below the second clamped beam (5), the second drop-down pole plate
Add corresponding DC voltage U on (7-2) so that the second clamped beam (5) pulled down to appropriate position, solid equivalent to changing second
Electric capacity C of the strutbeam (5) between signal wiredSize, so as to change the size for being coupled to branched portion energy, realize main signal line
Export permanent width.
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| CN101752676A (en) * | 2008-12-05 | 2010-06-23 | 沈阳铁路信号工厂 | Transponder duplex multifrequency community antenna |
| CN101915871A (en) * | 2010-07-12 | 2010-12-15 | 东南大学 | MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof |
| CN104254958A (en) * | 2012-02-09 | 2014-12-31 | 胡玛沃克斯公司 | Energy harvesting system |
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