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CN107631818A - Flexible array pressure measurement sensor and its measuring method based on piezoresistive effect - Google Patents

Flexible array pressure measurement sensor and its measuring method based on piezoresistive effect Download PDF

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Publication number
CN107631818A
CN107631818A CN201610573987.5A CN201610573987A CN107631818A CN 107631818 A CN107631818 A CN 107631818A CN 201610573987 A CN201610573987 A CN 201610573987A CN 107631818 A CN107631818 A CN 107631818A
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China
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control circuit
row
circuit
column
sensing unit
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CN201610573987.5A
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Inventor
刘连庆
贺凯
赵亮
于鹏
杨洋
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Shenyang Institute of Automation of CAS
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Shenyang Institute of Automation of CAS
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Abstract

The present invention relates to the flexible array pressure measurement sensor based on piezoresistive effect, including be linked in sequence line control circuit, touch first sensing unit, row control circuit, amplifying circuit in the same direction, filter circuit, micro-control circuit and data communication port, and the equipotential screened circuit being connected with tactile first sensing unit;The line control circuit, equipotential screened circuit, row control circuit are connected with micro-control circuit.Method includes:The power for touching diverse location on first sensing unit is presented as the change of different resistance values, measurement point switching circuit selects sensing unit different in array accessing signal conditioning circuit by ranks analog switch, sensing unit resistance change is converted into voltage, the demarcation through overvoltage and pressure corresponding relation obtains pressure.The present invention realizes 22 points/cm of density based on sensing unit ranks distribution scheme2The measurement of two dimensional surface distributed force, solves current the problems such as pressure measurement sensor density is relatively low both at home and abroad, detection speed is excessively slow.

Description

Flexible array pressure measurement sensor based on piezoresistive effect and measurement method thereof
Technical Field
The invention relates to an array pressure measurement technology based on piezoresistive effect for robot electronic skin. In particular to a measuring system and a measuring method for measuring plane force distribution, which are mainly used in the fields of robot bionic electronic skin, man-machine interaction and the like.
Background
The human skin is a very powerful sensor, which not only can measure various physical quantities, such as pressure, temperature, texture, etc., but also can simultaneously detect the intensity and stimulation position of the same stimulation physical quantity. Therefore, from the bionics, the skin-like measuring sensor for detecting the same physical quantity can not only detect the intensity of the stimulated physical quantity, but also detect the stimulated position, but is interfered by the processing technology and the sensor between detection points, and the density and the precision of the skin-like measuring sensor are greatly limited for a long time. The current skin-imitated measuring sensor mainly comprises two types, wherein each measuring sensitive unit of one type is mutually independent, the measuring effect is good, and the interference among the sensitive units is small, but the main defect is that the distribution density of the sensitive units is small, and the highest distribution density is 4-7 sensitive units per square centimeter generally; the other type is that the sensitive units are distributed in an array mode, row leads and column leads are led out respectively, the density of the sensor can be improved by about 2 times compared with that of an independent sensor, but the target sensitive unit of the sensor is easily interfered by other sensitive units due to the fact that other sensitive units are led in the target sensitive unit and connected back in parallel, and therefore interference suppression and filtering must be carried out through an external circuit. Because the performance of the sensor directly influences the interaction effect between a robot or other equipment and the environment, the research on the skin-imitated physical quantity measuring sensor at home and abroad is very important at present. For example, barrett, usa for micro-force array type measurement sensors developed with three-finger robots can assist the robots in achieving flexible gripping of most objects.
Disclosure of Invention
In view of the above technical deficiencies, the present invention aims to provide an array type pressure measurement system and a measurement method thereof, which have high density (the number of sensitive units per square centimeter > = 16), have small mutual interference between the sensitive units, and can simultaneously realize the measurement of the stimulation intensity and the stimulation position, and can improve the distribution density and the measurement accuracy of the bionic electronic skin sensor.
The technical scheme adopted by the invention for solving the technical problems is as follows: the flexible array pressure measurement sensor based on the piezoresistive effect comprises a row control circuit, a touch element sensing unit, a column control circuit, a same-direction amplifying circuit, a filter circuit, a microcontroller control circuit, a data communication port and an equal potential shielding circuit, wherein the row control circuit, the touch element sensing unit, the column control circuit, the same-direction amplifying circuit, the filter circuit, the microcontroller control circuit and the data communication port are sequentially connected; and the row control circuit, the equal potential shielding circuit and the column control circuit are connected with the microcontroller control circuit.
The row control circuit is a multi-channel analog switch chip. The column control circuit is a multi-channel analog switch chip.
The touch element sensing unit comprises a piezoresistive touch element, a column electrode, a row electrode and a PET film; a plurality of pressure-resistant contact elements are arranged between the column electrode and the row electrode, and the outer layers of the column electrode and the row electrode are PET films; the pressure contact elements are distributed on the same plane to form a square array; any two adjacent piezoresistive contact elements on a row or column are equally spaced.
The column electrodes and the row electrodes are strip-shaped metal plates and are multiple; the row electrodes are transversely arranged, and one row of the row-pressure contact elements is respectively connected to one row electrode; the column electrodes are arranged longitudinally, and one column of pressure contact elements are respectively connected to one column electrode; the column electrodes are grounded through sampling resistors.
The piezoresistive contact elements are piezoresistors.
The equipotential shielding circuit comprises a decoder and a multi-path single-pole single-throw switch; one end of each switch of the multi-path single-pole single-throw switch is connected with a row electrode of the touch element sensing unit, the other end of each switch is connected with an AD input end of a microcontroller control circuit, a decoder sends a control signal to a control end of the single-pole single-throw switch, and a control line of the decoder is connected with the microcontroller control circuit.
The flexible array pressure measuring method based on the piezoresistive effect comprises the following steps:
the microcontroller control circuit controls the row control circuit to select a target row i of the touch element sensing unit needing to be collected, controls the equal potential shielding circuit to gate other rows except the row i, controls the column control circuit to gate a target column j, then selects the ith row and the jth row of the touch element sensing unit, at the moment, the pressure resistance touch element and the sampling resistor form a voltage division circuit, a voltage signal on the sampling resistor is sent to a equidirectional amplification circuit (5) through the column control circuit to be amplified, then is filtered through the filter circuit and then is sent to the microcontroller control circuit, and the microcontroller control circuit receives data and then obtains a pressure value according to the relation between the voltage and the pressure.
The voltage signal on the sampling resistor is obtained by the following formula:
wherein, V out The voltage value R output by the pressure of the pressure contact element i,j Representing resistance, R, at row i and column j under pressure ef To sample the resistance, R s R is a control resistance of amplification factor, V + Is the reference voltage of the row control circuit.
The microcontroller control circuit receiving data comprises the following steps:
after the microcontroller control circuit controls the row control circuit and the column control circuit to switch, a timer is started to carry out us-level delay and block the delay to a semaphore;
triggering timer interruption when the delay time reaches, triggering timer delay semaphore in timer interruption service, performing ADC interruption enabling after the ADC acquisition task receives the timer delay semaphore, enabling and blocking the current ADC conversion completion semaphore;
triggering an interrupt service program after the current ADC conversion is finished, triggering the ADC conversion to finish the semaphore in the ADC interrupt service program, and reading the conversion result after the ADC acquisition task receives the semaphore converted by the ADC
The invention has the following beneficial effects and advantages:
1. the invention is based on the row-column distribution scheme of the sensitive units, and realizes the density of 22 points/cm based on a row-column control circuit, an equipotential shielding circuit, a signal processing circuit, a microcontroller control circuit and an embedded real-time operating system 2 The measurement of two-dimensional plane distribution force solves the problems of low density, low detection speed and the like of the current domestic and foreign pressure measurement sensors.
2. In addition, the sensor is based on a PET film substrate, is a sensor with high flexibility, can be attached to a detected surface with certain curved surface characteristics, and therefore has a wider application environment.
3. In addition, the array pressure measurement scheme does not depend on a single certain force-sensitive material, has the universal characteristic of all piezoresistive force-sensitive materials, and can realize two-dimensional force measurement in different ranges and different precisions by selecting different force-sensitive materials.
Drawings
FIG. 1 is a schematic structural view of the present invention;
the system comprises a row 1 control circuit, a potential-equal shielding circuit 2, a touch element sensing circuit 3, a column 4 control circuit, a homodromous amplifying circuit 5, a filter circuit 6, a microcontroller control circuit 7 and a data communication port 8, wherein the row is divided into a row, a column and a column;
fig. 2 is a schematic diagram of the array pressure measurement sensor of fig. 1.
Wherein, 9 force sensitive layers, 10 glue, 11 silver wires and 12PET films
Fig. 3 is a schematic diagram of the distribution of the positions of the touch sensing units.
Wherein, 13 pressure contact elements, 14 row electrodes.
FIG. 4 is a flow chart of array pressure measurement software.
Detailed Description
The present invention will be described in further detail with reference to examples.
The array pressure measuring system for robot electronic skin specifically comprises an array flexible film pressure measuring sensor, a sensor contact element switching circuit and an acquisition control software system thereof, wherein forces applied to different positions on the array flexible film pressure measuring sensor are reflected by changes of resistance values of different sensitive units, the measuring point switching circuit can select to connect different sensitive units in an array into a signal conditioning circuit through a line analog switch, the signal conditioning circuit converts the change of the resistance values of the sensitive units into voltage changes detectable by an acquisition system, and the corresponding relation between output voltage and pressure is calibrated through a tension pressure tester, so that the measurement of the pressure at different positions on the array flexible film pressure measuring sensor can be realized. The invention can realize the measurement of the pressure on different positions of the surface of the equipment and establish the two-dimensional force distribution on the surface of the equipment.
The measuring point switching circuit is composed of a row control circuit 1, a column control circuit 4 and an equipotential shielding circuit 2, and the signal processing circuit is composed of an in-phase voltage amplifying circuit 5 and a filter circuit 6. The microcontroller control circuit comprises a microcontroller main chip, a crystal oscillator circuit, a reset circuit, a debugging interface and a CAN bus communication circuit.
The sensitive unit of flexible film pressure measurement sensor of array is formed by having the quick thick liquids of the big less pressure-resistance negative correlation characteristic force of unit area applied pressure, divide into 7 layer structures, be top layer PET thin layer respectively, top layer silver wire layer, the quick layer of top layer force, the glue layer, the quick layer of bottom force (the quick layer of top layer force in figure 3, the glue layer, the quick layer of bottom force is the basic structure who constitutes pressure resistance touch element), bottom silver wire layer, bottom PET thin layer, the ranks lead wire is drawn forth from bottom and top layer silver wire layer respectively. The row and column electrodes respectively form a bottom silver conductor layer and a top silver conductor layer.
The system software design is based on an embedded real-time operating system, a timer in a microcontroller is used for switching and delaying touch element sensing units, next program synchronization is realized through semaphore when timing time is cut, ADC acquisition is also realized through the semaphore, when ADC conversion data needs to be read, ADC interruption is enabled, synchronous semaphore is sent in interruption triggered by completion of ADC conversion, and data storage and sending processing are carried out after a main acquisition task waits for the semaphore.
The array pressure measuring system for robot electronic skin has touch element sensing units distributed in rows and columns to convert the pressure change in different positions into corresponding resistance value change in the sensitive units, and the resistance value change is converted into voltage signal in the signal processing circuit.
The row control circuit selects a target row i to be acquired, the equipotential shielding circuit gates other rows except the row i through a decoder, the column control circuit gates a target column j, and the touch element sensing unit resistor R i,j And the voltage signal on the sampling resistor Ref is sent to the equidirectional amplifying circuit through the analog switch 2 and then sent to ADC conversion equipment for data conversion after passing through the filter circuit.
The pressure measuring sensor has the advantages that the sensitive units have piezoresistive effect, each sensitive unit is simultaneously communicated with the row and column leads of the top layer and the bottom layer, and the resistance value of each sensitive unit is reduced along with the increase of the applied pressure.
The acquisition control hardware and software are respectively realized based on a microcontroller and an embedded real-time operating system, and the acquisition task synchronization is realized by using semaphore and a mailbox. The microcontroller is integrated with an ADC data conversion module, a CAN bus communication module and a timer module which are respectively used for voltage signal acquisition, sensor data communication and timing.
After the operating system is started, the ADC in the microcontroller is in a conversion state all the time, but the interruption of the ADC is enabled only after the operation of the touch element sensing unit switching program is effective, and the interruption of the ADC is cleared in the interruption of the ADC, so that the higher conversion speed of the ADC can be ensured.
After the row and column switching circuit finishes touch element switching in the step (1) and the step (4), the microcontroller starts an internal timer to realize accurate time delay for a certain time, the acquisition task is blocked to wait for timing to the semaphore, then the semaphore is sent in the timer interrupt, the acquisition task starts to enable the ADC interrupt after timing to the semaphore and blocks to wait for the current ADC to acquire the semaphore, the ADC interrupt is triggered after ADC conversion is finished, the semaphore after conversion is sent in the ADC interrupt, and the acquisition task is converted into the semaphore and then reads and stores the output voltage value of the current sensitive unit.
And after the system finishes the acquisition of all the sensitive unit signals in the array, the acquisition task calls the CAN to send a data frame header, voltage data of each sensitive unit and a data frame tail.
The array pressure detection basic principle of the invention is as follows: when the external force is changed, the internal conductivity of the material with the force-sensitive characteristic is changed, so that the resistance value of a sensitive unit made of the material is approximately linearly related to the magnitude of the applied force within a certain force action range. The sensing units are distributed at different positions on the plane, and the magnitude of the force applied at the distributed positions on the plane can be obtained by acquiring the resistance values of the different sensing units. After the sensitive units are distributed according to rows and columns, the two-dimensional force distribution on a certain plane can be measured through the cooperation of the row-column switching circuit and other circuits.
Referring to fig. 1-3, an array pressure measuring sensor for robot electronic skin comprises a flexible film pressure measuring sensor with 8-8 array distributed contact element sensing units, a measuring point switching and signal conditioning circuit, an ADC acquisition system and a software system based on uCOS-III. The 8 by 8 flexible film pressure measurement sensor receives acting force from the outside, force signals applied to the film are converted into resistance value change signals, the resistance value change signals are converted into voltage signals which can be collected by the ADC through the signal conditioning circuit, the ADC collection system controls the measurement point switching circuit to realize selection and ADC conversion of different position sensitive units, and two-dimensional force measurement of an interaction surface is realized.
8 can be equivalent to the resistance array that row and column distributes promptly and touch a first sensing unit for 8, every touches first sensing unit resistance and changes along with the big or small change of exerting force on the first sensing unit position of contact, its structure is shown in figure 2, for simplifying sensor internal circuit, the sensor adopts top layer, bottom to lead wire design respectively, two-layer lead wire has certain length difference, the top layer is for connecting the FPC interface down, the bottom is for connecting the FPC interface up, the sensor can insert in the FPC connector on the PCB side by side, sensor connecting circuit has been simplified. The actual distribution scheme of the touch element sensing units of the sensor is shown in fig. 3, the touch element sensing units are distributed according to rows and columns, and lead wires of rows or columns are shared, so that the internal circuit of the sensor is simplified, and the distribution density of the sensitive units of the sensor is improved, wherein (12) the touch element sensing units are PET films packaged outside the sensor, (13) the touch elements are arranged according to rows and columns, (14) the top layer or the bottom layer is a row and column electrode, and the used material is silver paste.
The measurement point switching and signal conditioning circuit is as shown in parts (1) - (7) of fig. 1, an STM32 control circuit 7 controls a row control circuit 1 to select a target row i to be collected through a control line GPIO, controls an equal potential shielding circuit 2 to gate other rows except the i row through a decoder, controls a column control circuit 4 to gate a target column j, selects a contact sensing circuit Ri, j, forms a voltage division circuit with a sampling resistor Ref at the time, a voltage signal on the sampling resistor Ref is sent to a equidirectional amplification circuit 5 through an analog switch 2, and is sent to an STM32 control circuit to perform ADC conversion, data storage and data forwarding after passing through a filter circuit 6.
As shown in fig. 1, ri, j and Ref constitute a voltage divider circuit, and the generated voltage is sent to the in-phase amplifier circuit 5 through an analog switch, so that the relationship between Vout and Ri, j can be obtained:
wherein, V out Is the voltage value R output after the contact element receives pressure i,j Representing the resistance of the contact element, R, in a linear relationship with the magnitude of the applied pressure ef For sampling resistors, R s R is an amplification factor control resistor in the in-phase amplifying circuit, V + Is a reference voltage, i.e. the voltage at the input of the multi-way analog switch 1.
Including STM32F103C8T6 main chip, crystal oscillator circuit, reset circuit, LED drive circuit, jlink debugging interface, CAN communication circuit on the STM32 control circuit part hardware to adopt the STM32 chip to realize voltage signal's collection from taking the ADC. The part of hardware control circuit is mature in technology, and a recommended implementation scheme of a corresponding chip can be adopted. In order to improve the acquisition speed of the sensor, a program design based on a uCOS-III embedded real-time operating system is adopted in the software design, and the synchronization of a plurality of tasks is realized through semaphore.
As shown in fig. 4, the software system program flow needs a certain time for establishing the port level, so that after the system performs port switching, the STM32 timer is started to perform us-level delay and block the delay to the semaphore, when the delay time reaches, the timer is triggered to be interrupted, the timer is triggered to delay the semaphore in the timer interrupt service, the ADC acquisition task performs ADC interrupt enabling after receiving the timer delay semaphore, enables and blocks the current ADC conversion completion semaphore, the interrupt service program is triggered after the current ADC conversion is completed, the ADC conversion completion semaphore is triggered in the ADC interrupt service program, and the ADC acquisition task reads the conversion result and performs further processing, such as sending, filtering, and the like, after receiving the ADC conversion completion semaphore. The strategy avoids time overhead caused by repeatedly starting and closing the ADC by software, the main time overhead is time for interrupting switching, and the real-time performance is very high.

Claims (10)

1. Flexible array pressure measurement sensor based on piezoresistive effect, its characterized in that: the device comprises a row control circuit (1), a touch element sensing unit (3), a column control circuit (4), a same-direction amplifying circuit (5), a filter circuit (6), a microcontroller control circuit (7), a data communication port (8) and an equipotential shielding circuit (2) connected with the touch element sensing unit (3), wherein the row control circuit, the touch element sensing unit, the column control circuit, the filter circuit, the microcontroller control circuit and the data communication port are sequentially connected; the row control circuit (1), the equipotential shielding circuit (2) and the column control circuit (4) are connected with the microcontroller control circuit (7).
2. The piezoresistive effect-based flexible array pressure measurement sensor according to claim 1, characterised in that the row control circuit (1) is a multi-way analogue switch chip.
3. Flexible array pressure measurement sensor based on piezoresistive effect according to claim 1, characterised in that the column control circuit (4) is a multi-way analogue switch chip.
4. Flexible array pressure measurement sensor based on piezoresistive effect according to claim 1, characterised in that the touch element sensing unit (3) comprises piezoresistive touch elements (14), column electrodes, row electrodes and PET film (13); a plurality of pressure-resistant contact elements (14) are arranged between the column electrode and the row electrode, and the outer layers of the column electrode and the row electrode are PET films (13); the pressure-resistance contact elements (14) are distributed on the same plane to form a square array; any two adjacent piezo-resistive contact elements on a row or column are equally spaced.
5. The flexible array pressure measurement sensor based on piezoresistive effect as claimed in claim 4, wherein the column electrodes and the row electrodes are strip-shaped metal plates, and are multiple; the row electrodes are transversely arranged, and a row of row electrode contact elements are respectively connected to one row electrode; the column electrodes are arranged longitudinally, and one column of pressure contact elements are respectively connected to one column electrode; the column electrodes are grounded through sampling resistors.
6. Piezoresistive effect based flexible array pressure measuring sensor according to claim 4 or 5, characterised in that the piezoresistive contact elements (14) are piezoresistors.
7. Flexible array pressure measurement sensor based on piezoresistive effect according to claim 1, characterised in that the equipotential shield circuit (2) comprises a decoder and a multi-way single pole single throw switch; one end of each switch of the multi-path single-pole single-throw switch is connected with a row electrode of the touch element sensing unit (3), the other end of each switch is connected with an AD input end of a microcontroller control circuit (7), a decoder sends a control signal to a control end of the single-pole single-throw switch, and a control line of the decoder is connected with the microcontroller control circuit (7).
8. The flexible array pressure measurement method based on the piezoresistive effect is characterized by comprising the following steps:
the microcontroller control circuit (7) controls the row control circuit (1) to select a target row i of the touch element sensing unit (3) needing to be acquired, controls the equipotential shielding circuit (2) to gate other rows except the row i, controls the column control circuit (4) to gate a target column j, so that the row i and column j of the touch element sensing unit (3) are selected, the piezoresistive touch elements and the sampling resistor form a voltage division circuit at the moment, voltage signals on the sampling resistor are sent to the equidirectional amplification circuit (5) through the column control circuit (4) to be amplified, then are filtered through the filter circuit (6) and are sent to the microcontroller control circuit (7), and the microcontroller control circuit (7) receives data and then obtains a pressure value according to the relation between the voltage and the pressure.
9. The piezoresistive effect-based flexible array pressure measurement method according to claim 8, wherein the voltage signal on the sampling resistor is obtained by the following formula:
wherein, V out The voltage value R output by the pressure of the pressure contact element i,j Representing resistance, R, at row i and column j under pressure ef For sampling resistors, R s R is a control resistance of amplification factor, V + Is the reference voltage of the row control circuit.
10. The piezoresistive effect-based flexible array pressure measurement method according to claim 8, characterised in that the microcontroller control circuit (7) receiving data comprises the steps of:
after the microcontroller control circuit (7) controls the row control circuit (1) and the column control circuit (4) to switch, a timer is started to carry out us-level delay and block the delay to a semaphore;
triggering timer interruption when the delay time reaches, triggering timer delay semaphore in timer interruption service, performing ADC interruption enabling after the ADC acquisition task receives the timer delay semaphore, enabling and blocking the current ADC conversion completion semaphore;
triggering an interrupt service program after the current ADC conversion is finished, triggering the ADC conversion to finish the semaphore in the ADC interrupt service program, and reading a conversion result after the ADC acquisition task receives the semaphore converted by the ADC.
CN201610573987.5A 2016-07-19 2016-07-19 Flexible array pressure measurement sensor and its measuring method based on piezoresistive effect Pending CN107631818A (en)

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