CN107615132A - Light scanning apparatus, device for image and TOF type analysis devices - Google Patents
Light scanning apparatus, device for image and TOF type analysis devices Download PDFInfo
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- CN107615132A CN107615132A CN201680027206.0A CN201680027206A CN107615132A CN 107615132 A CN107615132 A CN 107615132A CN 201680027206 A CN201680027206 A CN 201680027206A CN 107615132 A CN107615132 A CN 107615132A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0073—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by tomography, i.e. reconstruction of 3D images from 2D projections
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/02—Viewing or reading apparatus
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0062—Arrangements for scanning
- A61B5/0066—Optical coherence imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4256—Details of housings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
- G02B6/4401—Optical cables
- G02B6/4415—Cables for special applications
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Abstract
Present invention aims at the technology that offer can further improve scan performance.The light scanning apparatus of the mode of the present invention, it is characterised in that including：Scanner section, its have to incidence light guide so that its from ejecting end project fiber waveguide, and produce vibrate so that above-mentioned ejecting end vibration vibration section；With signal transport part, it makes above-mentioned scanner section sweep object thing to above-mentioned scanner section transmission signal, and above-mentioned scanner section has vibrates attenuator by the end face of the above-mentioned injection side of above-mentioned vibration section the first bonding Nian Jie with above-mentioned fiber waveguide is simultaneous with elastomeric element.
Description
Technical field
The present invention relates to light scanning apparatus, device for image and TOF type analysis devices.
Background technology
With the miniaturization of device for image, it is desirable to which the miniaturization of light scanning apparatus and performance improve.
In patent document 1, the technology on fiber-optic scanner is disclosed.Recorded in the paragraph 0017 of the document：
" fiber-optic scanner 1 as shown in FIG. 1 to 3, has：Make the illumination light from light source portion 5 incident from the incidence end 6a of base end side,
Optical fiber 6 that is guide-lighting in the longitudinal direction, being projected from the ejecting end 6b of front end；The ejecting end 6b of the optical fiber 6 is set to intersect with major axis
Direction on the vibration generating unit 7 vibrated；With the vibration attenuation part 8 for making caused vibration decay.”.In addition, in paragraph 0021
It is middle to record：" vibration attenuation part 8 is the cylinder part of the outer surface complete cycle of the covering optical fiber 6 protruded from elastic portion 9, by having
The resin material for having pliability is formed.Vibrate attenuation part 8 has impartial circular shape of cross section, tool as shown in Figure 2
Have on the complete cycle direction of optical fiber 6 have identical mechanical property shape, i.e., around optical fiber 6 major axis rotary body shape.”.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2014-180317 publications
The content of the invention
Invention technical problems to be solved
In the case where applying vibration to fiber waveguides such as optical fiber by vibration section, conduction be present to the part beyond fiber waveguide
Vibration turns into external disturbance and vibrates and propagate to the situation of fiber waveguide, and the scanning accuracy of fiber waveguide is impacted.
In the technology of patent document 1, vibration attenuation part is the shape for the optical fiber for only covering vibration, it is impossible to thinks vibration
Fade performance is abundant.In addition, the reason for increase of cost and size can be turned into.
The present invention is to complete in view of the above problems, and its object is to provide one kind scan performance can be made further to carry
High technology.
For solving the technological means of problem
The application includes the multiple technological means to solve the above problems, lifts one example, as described below.
In order to solve the above problems, the light scanning apparatus of of the invention mode is characterised by, including：Scanner section,
It has to incidence light guide so that its from ejecting end project fiber waveguide, and produce vibration so that above-mentioned ejecting end shakes
Dynamic vibration section；With signal transport part, it makes above-mentioned scanner section sweep object thing to above-mentioned scanner section transmission signal, above-mentioned to sweep
Retouch portion have with elastomeric element by the end face of the above-mentioned injection side of above-mentioned vibration section it is Nian Jie with above-mentioned fiber waveguide first be bonded
And vibration attenuator.
In accordance with the invention it is possible to provide a kind of technology for further improving scan performance.
Problem, structure and effect other than the above will be understood by the explanation of implementation below.
Brief description of the drawings
Fig. 1 is the figure of one of the functional module for the device for image for representing to have light scanning apparatus.
Fig. 2 is the figure of one of the functional module for representing light scanning apparatus.
Fig. 3 is the sectional view of one of the structure for representing scanner section.
Fig. 4 is to represent the section view of one with the state during section cutting vibration section vertical with the length direction of fiber waveguide
Figure.
Fig. 5 is the sectional view of one of the structure for representing the scanner section in the first variation.
Fig. 6 is the sectional view of one of the structure for representing the scanner section in the second variation.
Fig. 7 is the sectional view of one of the structure for representing the scanner section in the 3rd variation.
Fig. 8 is the sectional view of the other examples for the structure for representing the scanner section in the 3rd variation.
Fig. 9 is the sectional view of one of the structure for representing the scanner section in the 4th variation.
Figure 10 is the sectional view of one of the structure for representing the scanner section in the 5th variation.
Figure 11 is the A-A' sections skeleton diagram of the scanner section in the 5th variation.
Figure 12 is the skeleton diagram of one of the structure for representing Lighting Division.
Figure 13 is the skeleton diagram of one of the structure for representing Lighting Division and light accepting part.
Figure 14 is the skeleton diagram for the configuration example for representing Lighting Division and light accepting part in TOF type analysis devices.
Figure 15 is the skeleton diagram of one of the structure for the device for image for being denoted as head mounted display.
Figure 16 is the skeleton diagram of one of the structure for the device for image for being denoted as light coherence tomography measurement apparatus.
Embodiment
Below based on the example of brief description of the drawings embodiments of the present invention.
The structure ＞ of ＜ device for image 100
Fig. 1 is the figure of one of the functional module for the device for image 100 for representing to have light scanning apparatus.Device for image 100
E.g. camera and endoscope etc. have the device of the function of filmed image.Or device for image 100 is projecting apparatus and wear-type
Display etc. has the device of the function of projection image.
Device for image 100 has light scanning apparatus 101, controller 102, drive signal generating unit 103, picture signal processing
Portion 104, power feeding section 105, storage medium 106, detecting means 107, sensor input and output portion 108, communication unit 109, communication
Input and output portion 110, sound processing section 111 and sound input and output portion 112.Light scanning apparatus 101 is to use up to carry out sweep object
The device of thing, details are aftermentioned.
Controller 102 uniformly controls device for image 100 overall.CPU (the Central Processing of controller 102
) etc. Unit central operation device realizes its function.The generation of drive signal generating unit 103 driving device for image 100 and optical scanning device
Put the signal of the 101 each processing units described later having.The driving that light scanning apparatus 101 generates according to drive signal generating unit 103
Signal scanning object.
Picture signal processing unit 104 receives the detection signal of return light from light scanning apparatus 101, and generation represents object
Image.In addition, picture signal processing unit 104 makes storage medium 106 described later store the shooting image generated as indicated.Electric power
Supply unit 105 is to the supply electric power of device for image 100.
Storage medium 106 stores the information needed for the processing for the processing unit that device for image 100 and light scanning apparatus 101 have
With the information of generation.Storage medium 106 is the storage devices such as RAM (Random Access Memory) or flash memory, is played temporarily
The effect of the storage region of reading program and data.Storage medium 106 includes HDD (Hard Disk Drive), CD-R
(Compact Disc-Recordable)、DVD-RAM(Digital Versatile Disk-Random Access
) and the storage medium that can write and read such as SSD (solid state drive) and device for driving storage medium Memory
Deng.In addition, controller 102 by according to the program read in storage medium 106 come the CPU processing of work.
Detecting means 107 detect the situation of surrounding with sensor.Detecting means 107 are for example inputted using following such sensor
Detected status is carried out in output section 108, i.e.,：Detect posture or direction, the inclination sensor of action and acceleration transducer, inspection of user
GPS (the Global of the sight sensor and temperature sensor of the health of survey user, the positional information of detection user
Positioning System) each sensor such as sensor or voltage sensitive sensor, electrostatic capacitance sensor, barcode reader.
Communication unit 109 carries out the connection via communication input and output portion 110 and network (not shown).Communication unit 109 is for example
Use Bluetooth (registration mark), Wi-Fi (registration mark), UHF (Ultra High Frequency) or VHF (Very
High Frequency) etc. closely or long range wireless communication or wire communication carry out it is whole with other information processings (not shown)
The communication at end.Sound processing section 111 is used as the sound input and output portion such as the microphone of sound input and output portion 112 or earphone
112 receive the input of sound, or carry out the output of sound.
The structure ＞ of ＜ light scanning apparatus 101
Fig. 2 is the figure of one of the functional module for representing light scanning apparatus 101.Light scanning apparatus 101 has drive division
120th, connector 121,127, Lighting Division 122, signal transport part 123, fiber waveguide 124, scanner section 125 and light accepting part 126.
Drive division 120 receives the drive signal from drive signal generating unit 103 via connector 121, and signal is transmitted
Portion 123 and Lighting Division 122 are sent.Lighting Division 122 has light source, and light source is driven for the drive signal in self-driven portion 120.Separately
Outside, Lighting Division 122 represents to make the optical system from the photopolymerization that light source occurs to fiber waveguide 124.
Signal transport part 123 receives the drive signal from drive division 120 and scanner section 125 is transmitted, and makes its scanning pair
As thing.The light that Lighting Division 122 occurs fiber waveguide 124 guides, and it is projected from ejecting end.In addition, in device for image 100
In the case of shoot function, fiber waveguide 124 is received because what the light projected from ejecting end reflecting on object and occurring returns
Light echo, it is channeled to light accepting part 126 described later.Fiber waveguide 124 is, for example, optical fiber.
Scanner section 125 has at least a portion and the vibration section of fiber waveguide 124, vibrates vibration section by using drive signal
And the ejecting end of fiber waveguide 124 is vibrated, sweep object thing, details are aftermentioned.Light accepting part 126 detects what is received by fiber waveguide 124
Return light, picture signal processing unit 104 is sent via connector 127.In addition, do not have shoot function in device for image 100
In the case of, light accepting part 126 is not necessarily.In picture signal processing unit 104, represented using the return photogenerated detected
The image of object.
In addition, light scanning apparatus 101 outside above-mentioned device for image 100, also can be used in TOF (Time Of Flight,
Flight time) type analysis device.It is described further below on TOF type analysis devices.
The structure ＞ of ＜ scanner sections 125
Fig. 3 is the sectional view of one of the structure for representing scanner section 125.(A) in Fig. 3 is with the length with fiber waveguide 124
Spend the sectional view of the parallel section cutting scanner section 125 in direction.Scanner section 125 has a part for fiber waveguide 124, and vibration
Portion 130, scanning lens 131, supporting member 132, the bonding of housing 133 and first and vibration attenuator 134.
Fiber waveguide 124 is, for example, single mode or the optical fiber of multimode.Optical fiber is made up of jacket layer, clad and core layer, light quilt
It is enclosed in core layer and is propagated.Alternatively, it is also possible to use the optical fiber for having peeled off jacket layer as fiber waveguide 124.Thus,
The integral miniaturization of light scanning apparatus 101 can be made.
In the case of shooting image, fiber waveguide 124 receives the return light from object, directs it to light accepting part
126.Fiber waveguide 124 can use multifiber to improve the receiving efficiency of return light, can also use the light of multinuclear cardioid
It is fine.
Vibration section 130 is the device vibrated, e.g. piezo-activator, electromagnetic actuators or electrostatic actuator.
In present embodiment, vibration section 130 is to set multiple electricity in central part for the inner circumferential of the piezoelectric element of hollow cylinder type or periphery
Pole and form.Vibration section 130 is connected with signal transport part 123, is carried out based on the drive signal transmitted from signal transport part 123
Vibration.Fiber waveguide 124 is set in the hollow space of vibration section 130.
Scanning lens 131 is the lens formed by glass or resin.Scanning lens 131 is sphere or non-spherical lens, is wrapped
Include GRIN (gradient index, graded index) lens of Fresnel Lenses and distributed refractive index etc..Lens section can be with
It is integrated with the ejecting end 124a of fiber waveguide 124.In addition, scanning lens 131 can not be 1, but multi-disc.The light warp of injection
By the irradiation object thing of scanning lens 131, the scanning thus, it is possible to carry out object object plane.
Supporting member 132 is the part that scanner section 125 is supported on to housing 133.Housing 133 accommodates scanner section 125 and letter
Number transport part 123.Signal transport part 123 is, for example, discrete cable or coaxial cable or flexible printing patch panel, with vibration section
End face (end face in the direction opposite with ejecting end 124a sides of the fiber waveguide 124) connection of 130 side of Lighting Division 122.
In present embodiment, the ejecting end 124a of fiber waveguide 124 using the described later first bonding and vibration attenuator 134 as
Fixing end is in protrude in cantilever manner.When vibrating vibration section 130, free end is the ejecting end 124a vibrations of fiber waveguide 124.Cause
For the vibration, the light projected from fiber waveguide 124 is irradiated to object object plane via scanning lens 131, is scanned.
The problem of structure as existing scanner section 125, it can enumerate vibration section 130 is be bonded with fiber waveguide 124
In the case of fixation, because deformation caused by the form error and stress of the piezoelectric element that vibration section 130 has or bonding material
Deformation etc. caused by the form error and stress of material, the emergent light from fiber waveguide 124 can not describe preferable track, to scanning
Precision impacts.Vibration caused by ejecting end 124a in fiber waveguide 124 and the vibration of vibration section 130 are swept to housing 133 etc.
Retouch the part beyond portion 125 to propagate, turn into the ejecting end 124a that external disturbance vibration arrives again at fiber waveguide 124.It is because outside
Interference vibration, the ejecting end 124a of fiber waveguide 124 can not accordingly describe preferably scanning track with drive signal, project
Or it is deformed in the image of shooting.
In present embodiment, in order to absorb external disturbance vibration, with flexible adhesives penetrating vibration section 130
Go out to hold the end face 130a of 124a sides be bonded with fiber waveguide 124.Thus, vibration section 130 and fiber waveguide 124 are suitably fixed, and
And external disturbance vibration decay is set to prevent it from arriving again at ejecting end 124a.
(B) in Fig. 3 is the end face 130a of the ejecting end 124a sides of vibration section 130 enlarged drawing.First bonding is simultaneous to shake
Dynamic attenuator 134 is formed by elastomeric element.First bonding and vibration attenuator 134 are, for example, the bonding agent of UV cured property.
Durometer measurements hardness of the hardness of first bonding and vibration attenuator 134 preferably according to the standards of JIS K 7215 is that A types are hard
More than 30, D type hardness testers are spent below 85.During less than the hardness, vibration component excessive attenuation can be made, it is difficult to sufficiently scanned
Amount.
First bonding is simultaneous to vibrate attenuator 134 to fill vibration section 130 around a part for fiber waveguide 124 and hollow
End face 130a between the mode in gap formed, it is thus that the end face 130a of vibration section 130 is be bonded with fiber waveguide 124.Pass through
End face 130a in vibration section 130 forms the first bonding and vibration attenuator 134, fiber waveguide 124 can be fixed on into vibration section
On 130, prevent fiber waveguide 124 from being bent in vibration section 130, make the vibration of vibration section 130 more correctly to ejecting end 124a
Conduction.
In present embodiment, the first bonding and vibration attenuator 134 be formed towards from the end face 130a of vibration section 130 to
The direction that ejecting end 124a is gone is swelled in a manner of with specific thickness, becomes the week of a part for covering fiber waveguide 124
The shape enclosed.Thereby, it is possible to suppress to shake because of the external disturbance that the vibration of fiber waveguide 124 returns to the direction of vibration section 130 and occurs
It is dynamic, while fiber waveguide 124 is properly secured on vibration section 130.
It is thickness to make the distance of the front end of side from end face 130a to ejecting end 134a in the first bonding and vibration attenuator 134
Spend T.First bonding and vibration attenuator 134 swell thickness T it is too small when can not fully be inhibited external disturbance vibration effect
Fruit, on the other hand, when blocked up the decay of necessary vibration component also increase, it is impossible to obtain sufficient scanning amount.For the above
Viewpoint, preferred thickness T-phase for vibration section 130 diameter D in 0.5D<T<In the range of 2D.
By the first bonding of present embodiment and the structure of vibration attenuator 134, external disturbance vibration decay can be made,
And vibration section 130 is suitably be bonded with fiber waveguide 124, therefore, with setting and declining only for making external disturbance vibration decay
The structure for subtracting the patent document 1 of part is compared, and is helped to realize and is saved cost and equipment miniaturization.
Fig. 4 is one of the state with the section cutting vibration section 130 vertical with the length direction of fiber waveguide 124 of representing
Sectional view.Vibration section 130 be the piezoelectric element 154 of hollow cylinder type periphery configure electrode 150,151,152,153 and
Form.Electrode 150,151,152,153 can also configure the inner circumferential in piezoelectric element 154.In the hollow bulb of piezoelectric element 154
Fiber waveguide 124 is set in point.Fiber waveguide 124 shown in Fig. 4 has core 124b.
Each electrode is, for example, with the length direction with the length direction of the piezoelectric element 154 of cylinder type, i.e. fiber waveguide 124
The substantially rectangular shape of parallel long side.Make relative electrode 150 and electrode 151, electrode 152 and electrode 153 paired respectively,
And apply the voltage of sine wave, thus vibrate the i.e. ejecting end 124a in free end of fiber waveguide 124.In addition, using making to put on
The waveform that the phase deviation substantially 90 of different pairs of sine wave is spent, thus ejecting end 124a vibrated with circuit orbit.In addition, make to apply
The amplitude of the sine wave added changes over time, and thus ejecting end 124a describes spiral helicine track, can carry out the two of object
Dimension scanning.
In addition, the structure of vibration section 130 is not limited to this.For example, it is also possible to formed in the periphery of the metal tube of cylindrical shape
Film layer with piezoelectricity, electrode is set in the inner circumferential of metal tube or periphery or the periphery of film layer.In this case,
Fiber waveguide 124 is set in the hollow space of metal tube.
In addition, vibration section 130 can also outside electrode 150,151,152,153, with these electrodes in piezoelectric element
On 154 length direction in different regions, electrode (not shown) is set.The electrode is with a part for piezoelectric element 154
Inner circumferential complete cycle and periphery complete cycle are set across the overlapping mode of piezoelectric element 154.By applying voltage, Neng Gougai to these electrodes
Become the length of piezoelectric element 154.Thereby, it is possible to change the ejecting end 124a of fiber waveguide 124 and the interval of scanning lens 131.
By changing ejecting end 124a and scanning lens 131 interval, the size of light scanning apparatus 101 can not be increased
The focal position of the image of ground, adjustment projection or shooting.
First variation ＞ of ＜ scanner sections 125
Fig. 5 is the sectional view of one of the structure for representing the scanner section 125 in the first variation.Explanation and above-mentioned reality below
Apply the difference of mode.Other variations are similarly below.
Vibration is conducted to the periphery of the grade of housing 133 vibration section 130 via supporting member 132 caused by vibration section 130, turns into outer
Portion's interference vibration and to fiber waveguide 124 ejecting end 124a propagate, scanning accuracy may be impacted.In this variation, it is
Prevent from vibrating the propagation from vibration section 130 to housing 133, the second bonding and vibration attenuator 135 are set.
Second bonding and vibration attenuator 135 are by a manner of filling the gap between vibration section 130 and supporting member 132
The flexible adhesives formed is formed.With the second bonding and attenuator 135 is vibrated by vibration section 130 and supporting member
132 bondings.Second bonding and vibration attenuator 135 are formed as swelling to ejecting end 124a sides.As a result, the second bonding and vibration
Attenuator 135 is formed as a part of overlapping with the face of the ejecting end 124a sides in supporting member 132.Simultaneous shake is bonded as second
The elastomeric element of dynamic attenuator 135 has the hardness same with the elastomeric element as the first bonding and vibration attenuator 134, but
Two elastomeric elements can also hardness it is different, can suitably adjust.
According to this variation, it can prevent Vibration propagation to the housing 133 and signal transport part 123 etc. of vibration section 130 from shaking
The dynamic periphery of portion 130.Furthermore it is possible to preventing the external disturbance vibration from housing 133 and signal transport part 123 returns to vibration section
130。
Second variation ＞ of ＜ scanner sections 125
Fig. 6 is the sectional view of one of the structure for representing the scanner section 125 in the second variation.In second variation
One bonding and vibration attenuator 134 have the first elastomeric element 134a and the second elastomeric element 134b.First elastomeric element 134a
It is lower than the second elastomeric element 134b hardness, it is softer.
First elastomeric element 134a is formed as covering around a part for the ejecting end 124a sides of fiber waveguide 124.Second
Elastomeric element 134b and the first elastomeric element 134a is abutted, and is formed as covering another part (irradiation portion side) of fiber waveguide 124
Around.In addition, the second elastomeric element 134b is formed around the end face 130a of vibration section 130 and a part for fiber waveguide 124
Gap.First elastomeric element 134a is formed as swelling to ejecting end 124a sides.
According to this variation, can be absorbed with the first lower elastomeric element 134a of hardness in the injection from fiber waveguide 124
The vibration that end 124a upwardly propagates to the side of vibration section 130.In addition, the second elastomeric element 134b is set to be configured to than the first elastic portion
Part 134a is harder, the vibration of scanning is suitably conducted from vibration section 130 to ejecting end 124a.
In addition, the example of the 2 kinds of elastomeric elements of the first bonding and vibration attenuator 134 with different hardness is illustrated, but
It is that the simultaneous elastomeric element for vibrating attenuator 134 of the first bonding formed in this variation can also be more than 3 kinds.First bonding is simultaneous
As long as vibration attenuator 134 is included in hardness on the bearing of trend of fiber waveguide 124, different multiple elastomeric elements are i.e. by stages
Can.Additionally, it is preferred that elastomeric element is configured to hardness as the injection direction to light is (from Lighting Division 122 to ejecting end 124a side
To) go and reduce, but it is not to say that cannot be configured to hardness reduces with being gone to the direction in opposite direction with the injection of light.
3rd variation ＞ of ＜ scanner sections 125
Fig. 7 is the sectional view of one of the structure for representing the scanner section 125 in the 3rd variation.Scanning in this variation
There is lattice 136 and first to vibrate attenuator 137 in portion 125.
Propagated in the presence of the external disturbance vibration that the scanning accuracy to fiber waveguide portion impacts via signal transport part 123
Situation.For example, because the signal wire for forming signal transport part 123 contacts with housing 133, the external disturbance from housing 133
Vibration is propagated via signal transport part 123 to the ejecting end 124a of fiber waveguide 124, reduces scanning accuracy.Particularly, light is swept
In the case that imaging apparatus 101 is used for the device for image 100 such as endoscope and head mounted display, consideration, which turns into housing 133, to be had
The structure of pliability.Because bending housing 133, the possibility that signal transport part 123 contacts with housing 133 increases.
Lattice 136 is in a manner of a part for the ejecting end 124a sides of signal transport part 123 and another part to be separated
Set, be arranged in signal transport part 123 and the gap of housing 133.First vibration attenuator 137 is with the side with specific thickness
Formula is arranged on the inwall of the housing 133 between supporting member 132 and lattice 136.In addition, lattice 136 is not necessarily.
As long as the first vibration elastomeric element of attenuator 137, such as can be gelatinous vibration-absorptive material or rubber
Deng resin.In addition, the first vibration attenuator 137 can be adhering part Nian Jie with first and that vibration attenuator 134 is same.
The first vibration attenuator 137 shown in Fig. 7 is arranged on the housing 133 between supporting member 132 and lattice 136
On complete cycle, but the structure of the first vibration attenuator 137 is not limited to this.Such as it could be arranged in the length with fiber waveguide 124
It is multiple rectangular-shaped with long side on the parallel direction in direction.Or first vibration attenuator 137 can be in supporting member 132
Multiple places of housing 133 between lattice 136 are on complete cycle such as that arrangement of sample plot of multiple ring-shaped.
Fig. 8 is the sectional view of the other examples for the structure for representing the scanner section 125 in the 3rd variation, in the figure, is being propped up
Between bearing portion part 132 and lattice 136, signal transport part 123 is with the gap of housing 133, being filled with the second vibration decay
Portion 138.In other words, signal transport part 123 and scanner section 125 it is at least one of around gap between housing 133
In be filled with the second vibration attenuator 138.
In addition, the second vibration attenuator 138 and first vibrates attenuator 137 equally, as long as elastomeric element.By
This, the propagation that can suitably prevent the external disturbance between housing 133 and scanner section 125 and signal transport part 123 from vibrating.
In this variation, as long as forming housing 133 with the material with pliability, it becomes possible to which light scanning apparatus 101 is used
In the purposes of the endoscope of the narrow part of the bendings such as the body cavity that can be plugged into humans and animals.In addition, also it is inserted into factory
The narrow part of the bendings such as pipe arrangement.In addition, in the case that light scanning apparatus 101 is used for into head mounted display, can also expect simultaneous
Care for wear to feel improving and improved with scan performance.
4th variation ＞ of ＜ scanner sections 125
Fig. 9 is the sectional view of one of the structure for representing the scanner section 125 in the 4th variation.Vibration section 130 may be because
Temperature characterisitic etc. and vibration characteristics change.Light scanning apparatus 101 in this variation has vibration detecting part 139, detection vibration
The vibratory output in portion 130.In addition, the light scanning apparatus 101 shown in Fig. 9 has the first vibration attenuator 137, but light scanning apparatus
101 structure is not limited to this.
Vibration detecting part 139 is the film layer for having piezoelectricity, such as there is provided the pressure of electrode 150,151,152,153
Formed on the periphery complete cycle of electric device 154.Vibration detecting part 139 can for example use Kynoar (PolyVinylidene
DiFluoride, PVDF) or lead zirconate titanate (lead zirconate titanate, PZT) etc..In addition, vibration detecting part
139 can be arranged between piezoelectric element 154 and electrode 150,151,152,153, can also be arranged on hollow piezoelectric element
154 inner circumferential.
When piezoelectric element 154 vibrates, vibration detecting part 139 detects vibration using the voltage of generation, is transmitted via signal
Portion 123 is sent to controller 102.New vibration occurs for the quiveringly generation that drive signal generating unit 103 is also contemplated for detecting
Signal, vibration section 130 is transmitted.Thereby, it is possible to carry out the feedback control of the drive signal for vibration.Because can carry out with
Vibration characteristics controls accordingly, so scanning accuracy improves.
In addition, vibration detecting part 139 can also be formed with electrode (not shown).In this case, with being detected using film layer
The situation of vibration similarly, the feedback control of signal is driven using the voltage occurred by electrode.
5th variation ＞ of ＜ scanner sections 125
Figure 10 is the sectional view of one of the structure for representing the scanner section 125 in the 5th variation.In 5th variation
Light scanning apparatus 101 has return light guide portion 140.
In addition, in above-mentioned embodiment, light scanning apparatus 101 is used for the feelings of the device for image 100 with shoot function
Under condition, fiber waveguide 124 receives return light.In this variation, return light guide portion 140 receives the ejecting end from fiber waveguide 124
124a project light reflected on object after return light, direct it to light accepting part 126.
Figure 11 is the A-A' sections skeleton diagram of the scanner section 125 in the 5th variation.Figure 11 is in the institute of A-A' cut away views 10
The section skeleton diagram of the state of the scanner section 125 shown.
(A) in Figure 11 is the figure for the first case for representing return light guide portion 140.Return light guide portion 140 is by housing
The multifiber 143 that 133 inner circumferential is formed is formed.Optical fiber 143 has clad 141 and core layer 142, will import core layer
142 return light is guided to light accepting part 126.
(B) in Figure 11 is the figure for the second case for representing return light guide portion 140.Return light guide portion 140 is by housing
The planar guide path 144 that 133 inner circumferential is formed is formed.Planar guide path 144 is the core that planar is clipped with the clad 141 of planar
The film that central layer 142 is formed.Planar guide path 144 is formed such as with the resin polymer.In addition, planar guide path 144
By using the resin of planar or the film of glass as core layer 142 clad 141 can be used as by the use of the reflectance coating for reflecting light
Cover core layer 142 and formed.
Planar guide path 144 is for example formed tubular on the inner circumferential complete cycle of housing 133.Planar guide path 144 by by
Light is enclosed in core layer 142 by clad 141, can be guide-lighting to light accepting part 126.
In addition, in light accepting part 126, in the same manner as above-mentioned example, the return light that is received by return light guide portion 140 is detected
Light quantity.Picture signal processing unit 104 represents the image of object using the signal generation detected by light accepting part 126.
In second case, planar guide path 144 is set to bend to cylindrical shape.This example and the first case phase for arranging multifiber 143
Than it is bigger to participate in the sectional area of the core layer 142 of the reception of light, so the receiving efficiency of return light can be improved.
(C) in Figure 11 is the figure of the 3rd for representing return light guide portion 140.Return light guide portion 140 is by substantially putting down
Multiple planar guide paths 144 in face are formed.(C) in Figure 11 represents to form return light guide portion with 4 planar guide paths 144
140 example.In addition, the quantity of planar guide path 144 is not limited to this.
In this example, along housing 133 inner circumferential planar light guide section 144 is set.By making planar guide path 144 be plane,
The light loss of bending section can be suppressed.
The structure ＞ of ＜ Lighting Divisions 122
Figure 12 is the skeleton diagram of one of the structure for representing Lighting Division 122, and the figure shows head mounted display and projecting apparatus
Etc. the summary for being projected through the Lighting Division 122 used in the device for image 100 for the image that scanning obtains.
(A) in Figure 12 is the figure for the first case for representing Lighting Division 122.Lighting Division 122 in this example have light source 160,
161st, 162, coupled lens 165,166,167, optical fiber 170,171,172 and fiber coupler 175.
Light source 160,161,162 is the lasing light emitter or super-radiance light emitting diode for sending red, blue, green wavelength light respectively
(hereinafter referred to as " SLD ").In addition, the wavelength of light source is not limited to this, infrared or ultraviolet wavelength light can also be sent.In addition,
The number of light source is also not limited to 3.
From light source 160,161,162 project light be coupled respectively lens 165,166,167 couple, incide optical fiber 170,
171、172.The light of optical fiber 170,171,172 is incided by the multiplex of fiber coupler 175, it is guide-lighting to fiber waveguide 124.
(B) in Figure 12 is the figure for the second case for representing Lighting Division 122.Lighting Division 122 in this example has planar guide-lighting
Road 176 and coupled lens 177 replace the fiber coupler 175 of first case.In this example, the light of optical fiber 170,171,172 is incided
The core of planar is clipped with the clad 141 of planar in the same manner as the planar guide path 144 as shown in Figure 11 (B) or Figure 11 (C)
The multiplex of planar guide path 176 for the film that central layer 142 is formed.Emergent light from planar guide path 176 is coupled the coupling of lens 177
Close, it is guide-lighting to fiber waveguide 124.
(C) in Figure 12 is the figure of the 3rd for representing Lighting Division 122.Lighting Division 122 in this example have light source 160,
161st, 162, coupled lens 165,166,167 and coupled lens 177, colour splitting prism 180,181.
The light coupled by each coupled lens 165,166,167 projected from light source 160,161,162, is selected with wavelength
Property and with reflection, the colour splitting prism 180 of transmission film, 181 multiplex.Light after multiplex is coupled lens 177 and coupled, to fiber waveguide
124 is guide-lighting.
In accordance with the above, this implementation can also be used in the device for image 100 for being projected through the image that scanning obtains
The light scanning apparatus 101 of mode, thus can provide small-size light-weight and scanning accuracy are high, can show high-quality image shadow
As device 100.
The structure ＞ of ＜ Lighting Divisions 122 and light accepting part 126
Figure 13 is the skeleton diagram of one of the structure for representing Lighting Division 122 and light accepting part 126.This figure represents camera and interior peeped
The Lighting Division 122 and the summary of light accepting part 126 that the shootings such as mirror use in the device for image 100 by scanning obtained image.This
The light scanning apparatus 101 shown in light scanning apparatus 101 and Figure 10 in figure equally has return light guide portion 140.
(A) in Figure 13 is the Lighting Division 122 for the device for image 100 for representing filmed image and the example of light accepting part 126
Figure.Lighting Division 122 in this example is identical with the structure of the Lighting Division 122 shown in Figure 12 (A).Light accepting part 126 in this example has
Lens 185 and photodiode 186 are imported, receives the return light guided by return light guide portion 140.
Emergent light from light source 160,161,162 is coupled the coupling of lens 165,166,167 respectively, incides optical fiber
170、171、172.Afterwards, light is guided to scanner section 125 by fiber waveguide 124 by the multiplex of fiber coupler 175.With scanner section 125
Reflected light obtained from sweep object thing incides return light guide portion 140, is directed to and imports lens 185.
The light that importing lens 185 are directed to return light guide portion 140 is concentrated on photodiode 186.The pole of photoelectricity two
The light quantity of light after the detection optically focused of pipe 186, is transmitted to controller 102.Afterwards, picture signal processing unit 104 uses detection signal
Generate the shooting image of object.
(B) in Figure 13 is the Lighting Division 122 for the device for image 100 for representing filmed image and other examples of light accepting part 126
The figure of son.Lighting Division 122 in this example has the structure same with the Lighting Division 122 in above-mentioned Figure 12 (C).
The light projected from light source 160,161,162 is coupled lens 165,166,167 and coupled respectively, is selected with wavelength
Property and with reflection, the colour splitting prism 180 of transmission film, 181 multiplex, be coupled lens 177 and couple and guide to fiber waveguide 124.
Light after being guided by fiber waveguide 124 is used for the scanning of object in scanner section 125, and reflected light is directed to return light guiding
Portion 140.Afterwards, in the same manner as above-mentioned example, light accepting part 126 detects the light quantity of reflected light, transmits to controller 102, thus schemes
As signal processing part 104 generates the shooting image of object.
In accordance with the above, this implementation can also be used in the device for image 100 for shooting the image obtained by scanning
The light scanning apparatus 101 of mode, thus can provide small-size light-weight and scanning accuracy are high, can shoot high-quality image shadow
As device 100.
The Lighting Division 122 of ＜ TOF type analysis devices and the configuration example ＞ of light accepting part 126
Figure 14 is the skeleton diagram for the configuration example for representing Lighting Division 122 and light accepting part 126 in TOF type analysis devices.Figure 14
In (A) represent the first case of the Lighting Division 122 and light accepting part 126 used in TOF type analysis device 200.
Lighting Division 122 at least has the lasing light emitter or SLD i.e. light source 163 for the light for sending infrared wavelength.In addition, Lighting Division
122 can also have the light source of the 3 color wavelength used in above-mentioned example.Correspondingly, Lighting Division 122 has coupled lens
168 and optical fiber 173.
The light projected from light source 160,161,162,163 is respectively via coupled lens 165,166,167,168 relative to light
Fibre 170,171,172,173 couples, by the multiplex of fiber coupler 175.Afterwards, incident light is directed to fiber waveguide 124, by scanning
Projected to object in portion 125.Afterwards, return light is directed to return light guide portion 140, via importing lens 185 in photoelectricity two
Optically focused in pole pipe 186.
When photodiode 186 detects the light quantity of return light, light quantity is transmitted from light accepting part 126 to controller 102.Separately
Outside, TOF type analysis device 200 has distance measuring portion (not shown), is correspondingly measured with the light quantity and detection moment of return light
To the distance of object.Distance measuring portion is sent using measurement result generation distance measurement signals to controller 102.
(B) in Figure 14 is the second case for representing the Lighting Division 122 and light accepting part 126 used in TOF type analysis device 200
Figure.Lighting Division 122 in this example is with the light source 163 and coupled lens 168 for projecting infrared ray or also with Figure 13
In (B) shown in the inscape of Lighting Division 122 and the structure of colour splitting prism 182.From the light that light source 163 projects and other light
Similarly it is coupled lens 168 to couple, by colour splitting prism 182 and other photosynthetic ripples and is coupled lens 177 and couples.Afterwards, directly
To using return light measure object apart from the step of it is identical with above-mentioned example.
According to present embodiment, the good light scanning apparatus 101 of scan performance can be used for TOF type analysis device 200,
Not only facilitate miniaturization, the lightweight of TOF type analysis device 200, additionally it is possible to improve the precision of range measurement.
In addition, in the return light guide portion 140 of TOF type analysis device 200, with the return light guide portion described in Figure 11
140, it is also possible to using optical fiber 143, can also use planar guide path 144.In addition, the situation using planar light guide section 144
Under, TOF type analysis devices have Lighting Division 122, return light guide portion 140 and distance measuring portion, and return light guide portion 140 has
Receive the planar light guide section 144 return light, being formed by film of the light projected from fiber waveguide 124.
The structure ＞ of ＜ head mounted displays
Figure 15 is the skeleton diagram of one of the structure for the device for image 100 for being denoted as head mounted display.In Figure 15
(A) first case of the summary of head mounted display is represented.Head mounted display above-mentioned device for image 100 inscape it
Outside, also there is the virtual image optical section of the generation virtual image.Virtual image optical section has the prism prism lenses element integrated with lens
192.In addition, the shape of prism lenses element 192, structure and piece number are not limited to shown in this figure.
The light projected from Lighting Division 122 projects via fiber waveguide 124 from scanner section 125.The light projected from scanner section 125,
In the position that the micro-display panel such as the liquid crystal of existing head mounted display or digital mirror device is configured, generation is secondary
As 191.Then, from the light that scanner section 125 projects because of the prism lenses element 192 that is set before the pupil of user and to user's
Pupil 195 is reflected, and the virtual image of secondary picture 191 is thus generated in the visual field of user.
In addition, by making the reverse side of prism lenses element 192 turn into half-reflecting mirror or the reflectance coating of polarization selectivity, user
Can be depending on recognizing landscape and the virtual image both sides of surrounding.Thereby, it is possible to head mounted display is had perspective function.
Existing head mounted display is the works such as micro-display panel before the visual field of user, turns into and hinders user to regard
The reason for wild., being capable of the overall miniaturization of realization device by generating secondary picture 191 in present embodiment.In addition, by using
Light scanning apparatus 101 forms head mounted display, can expect that the overall miniaturization of device and lightweight, scanning accuracy improve.
In addition, by each processing units such as the side header arrangement Lighting Divisions 122 in user, the original for hindering the visual field can be become
The works miniaturization of cause.In addition, by making receiving scanner section 125 and the housing of signal transport part 123 133 that there is pliability,
Comfortableness during wearing can be improved.
(B) in Figure 15 represents the second case of the summary of head mounted display.During head mounted display in this example has
Between lens and curved reflector as virtual image optical system.In addition, the virtual image optics such as piece number of intermediate lens and curved reflector
The structure in portion is not limited to the structure shown in this figure.
Curved reflector is irradiated from the light that scanner section 125 projects via intermediate lens, the reflected light pair of curved reflector
The pupil 195 of user forms the virtual image.By projecting reflected light to retina, user can be depending on recognizing object.In this example, use up and sweep
Imaging apparatus 101 is configured to realize the head mounted display of Maxwellian viewing.Thereby, it is possible to provide a kind of higher performance and
Small-sized head mounted display.
In addition, the device for image 100 for possessing light scanning apparatus 101 has the signal of generation driving light scanning apparatus 101
Drive signal generating unit 103, the picture signal processing unit using the detection signal generation image received from light scanning apparatus 101
104th, the virtual image light of the virtual image of the secondary picture of the photogenerated projected by light scanning apparatus 101 is formed on the pupil 195 of user
The department of the Chinese Academy of Sciences.
The structure ＞ of ＜ light coherence tomography measurement apparatus
Figure 16 is to be denoted as light coherence tomography measurement apparatus (below with OCT (optical coherence
Tomography) device illustrates) device for image 100 structure the skeleton diagram of one.OCT devices are in filming image
Outside, also obtain object depth direction section picture device.The light scanning apparatus 101 that OCT devices have is shown in Fig. 2
Constitution element outside, also with the reference light department of the Chinese Academy of Sciences 213.In Figure 16, Lighting Division 122, scanner section that OCT devices have are shown
125th, light accepting part 126 and the reference light department of the Chinese Academy of Sciences 213.
The reference light department of the Chinese Academy of Sciences 213 is made up of collimation lens and speculum, by being collimated to the light of incidence and using speculum
Reflect and generate reference light.
The light source 160,161,162,163 that Lighting Division 122 has is to send red light, blue light, green light and infrared waves
The lasing light emitter or SLD of long light.In addition, the wavelength and number not limited to this of the light source that illumination light 122 has.In addition, Lighting Division
122 have coupled lens 165,166,167,168, the fiber coupler 210 of optical fiber 170,171,172,173, first, the second optical fiber
Coupler 211 and optical circulator 212.
In addition, the light accepting part 126 in OCT devices, which has, imports lens 185, photodiode 186 and light coherence tomography
Measurement portion 214.
First, from light source 160,161,162,163 project light respectively to the incidence of coupled lens 165,166,167,168
Afterwards, coupled in optical fiber 170,171,172,173.The light coupled in optical fiber 170,171,172,173 is by the first fiber coupler
210 multiplex, it is guide-lighting to optical circulator 212.
The light that optical circulator 212 is directed to the first fiber coupler 210 is guided to the second fiber coupler 211.The
The light partial wave being directed to is the first partial wave light and the second partial wave light by two fiber couplers 211.
First partial wave light is directed to scanner section 125 via fiber waveguide 124, in the sweep object thing of scanner section 125.Scanning
The return light obtained after the sweep object thing of portion 125 is directed to return light guide portion 140, guides to light accepting part 126.In light accepting part
126, photodiode 186 detects light quantity according to via the light for importing the guiding of lens 185.Afterwards, using the light quantity detected
The image for representing object is generated by picture signal processing unit 104.
The return light obtained after the sweep object thing of scanner section 125, is also directed into fiber waveguide 124.Fiber waveguide 124 will be led
The return light entered is guided to optical circulator 212 by the second fiber coupler 211.The return light of optical circulator 212 is directed to,
It is guide-lighting to light coherence tomography measurement portion 214.
The the second partial wave light generated by the second fiber coupler 211 is projected so as to which return light occur to the reference light department of the Chinese Academy of Sciences 213
That is reference light.Reference light from the reference light department of the Chinese Academy of Sciences 213 is directed to the second fiber coupler 211, via optical circulator 212 to
Light coherence tomography measurement portion 214 is guide-lighting.Light coherence tomography measurement portion 214 makes the 2 beam interference of light, and thus generation represents entering for object
The layered measurement signal in deep direction.Light coherence tomography measurement portion 214 make reference light from the reference light department of the Chinese Academy of Sciences 213 with by scanner section
The interference of light is returned obtained from 125 sweep object things, thus generates layered measurement signal.
In addition, the method for light layered measurement uses the in general methods such as time domain OCT, spectral coverage OCT.Such as entered with time domain OCT
In the case of row light layered measurement, the speculum that making the reference light department of the Chinese Academy of Sciences 213 has moves in the direction of the optical axis, changes optical path length
Spend, while the optical interference signals of 2 beam return lights are detected by light coherence tomography measurement portion 214.Picture signal processing unit 104 uses inspection
Image procossing as defined in surveying signal progress, generate the section picture of the depth direction of object.
On the other hand, in the case of carrying out light layered measurement with spectral coverage OCT, light coherence tomography measurement portion 214 will be according to 2 beams
The interference light that reflected light obtains is decomposed into the intensity of wavelength spectrum and detection light.Picture signal processing unit 104 is entered using detection signal
Processing as defined in row Fourier transform etc., generate the section picture of the depth direction of object.
According to this structure, using the teaching of the invention it is possible to provide small-sized and scanning accuracy is high and can obtain representing the surface of object and break
The OCT devices of the image of layer.Pass through the OCT devices, it is possible to increase diagnostic accuracy or raising industrial machine in medical treatment scene
Inspection etc. in inspection precision.
The explanation of the embodiments of the present invention and variation has been carried out above, but the present invention is not limited to above-mentioned embodiment party
One of formula, including various modifications example.For example, one of above-mentioned embodiment be in order that the present invention should be readily appreciated that and specifically
Bright, the present invention is not limited to have entire infrastructure described herein as.In addition, can be by the knot of one of some embodiment
A part for structure is replaced into the structure of another.In addition, it can also be added in the structure of one of some embodiment another
The structure of example.In addition, a part for the structure of one for each embodiment, can add, deletes, replace other structures.
In addition, for above-mentioned each structure, function, processing unit, processing unit etc., such as can be used by designing in integrated circuits etc.
Hardware realizes one part or whole.In addition, the control line and information wire in figure, which are shown, thinks that explanation is upper necessary, and differ
Surely whole is shown.It is also assumed that almost all structure is all connected with each other.
In addition, the functional structure of above-mentioned device for image 100, light scanning apparatus 101 and TOF type analysis device 200 be in order to
It should be readily appreciated that and correspondingly classify with main process content.The present application is not limited to the mode of the classification of inscape
And title.The structure of device for image 100, light scanning apparatus 101 and TOF type analysis device 200 can be with process content correspondingly
It is categorized as more inscapes.In addition, it can also classify in a manner of 1 inscape performs more processing.
Symbol description
100：Device for image, 101：Light scanning apparatus, 102：Controller, 103：Drive signal generating unit, 104：Image is believed
Number processing unit, 105：Power feeding section, 106：Storage medium, 107：Detecting means, 108：Sensor input and output portion, 109：Communication
Portion, 110：Communicate input and output portion, and 111：Sound processing section, 112：Sound input and output portion, 120：Drive division, 121,127：Even
Connect device, 122：Lighting Division, 123：Signal transport part, 124：Fiber waveguide, 124a：Ejecting end, 124b：Core, 125：Scanner section,
126：Light accepting part, 130：Vibration section, 130a：End face, 131：Scanning lens, 132：Supporting member, 133：Housing, 134：First is viscous
Connect and vibrate attenuator, 135：Second bonding and vibration attenuator, 136：Lattice, 137：First vibration attenuator, 138：The
Two vibration attenuators, 139：Vibration detecting part, 140：Return light guide portion, 141：Clad, 142：Core layer, 143：Optical fiber,
144：Planar guide path, 150,151,152,153：Electrode, 154：Piezoelectric element, 160,161,162,163：Light source, 165,
166、167、168：Coupled lens, 170,171,172：Optical fiber, 175：Fiber coupler, 180,181,182：Colour splitting prism,
185：Importing lens, 186：Photodiode, 191：The virtual image, 192：Prism lenses element, 195：Pupil, 200：TOF type analysis
Device, 210：First fiber coupler, 211：Second fiber coupler, 212：Optical circulator, 213：The reference light department of the Chinese Academy of Sciences, 214：Light
Coherence tomography measurement portion.
Claims (16)
- A kind of 1. light scanning apparatus, it is characterised in that including：Scanner section, it has guides so that the fiber waveguide that the light projects from ejecting end to the light of incidence, and produce vibrate with Make the vibration section of the ejecting end vibration；WithSignal transport part, it makes the scanner section sweep object thing to the scanner section transmission signal,The scanner section has with elastomeric element that the end face of the injection side of the vibration section is Nian Jie with the fiber waveguide First bonding and vibration attenuator.
- 2. light scanning apparatus as claimed in claim 1, it is characterised in that including：The scanner section is supported on to the supporting member of housing；WithBy the supporting member second bonding Nian Jie with the scanner section and attenuator is vibrated with elastomeric element.
- 3. light scanning apparatus as claimed in claim 1, it is characterised in that：First bonding and vibration attenuator have hardness different more by stages on the bearing of trend of the fiber waveguide The individual elastomeric element,The hardness of the elastomeric element is gone and step-down with the injection direction to light.
- 4. light scanning apparatus as claimed in claim 1, it is characterised in that：First bonding and vibration attenuator are with thickness towards the direction gone from the end face of the vibration section to ejecting end The shape that degree T mode is swelled,Relative to the diameter D of the vibration section, the thickness T is in 0.5D<T<In the range of 2D.
- 5. light scanning apparatus as claimed in claim 1, it is characterised in that：The hardness by the Durometer measurements according to JIS K7215 standards of first bonding and vibration attenuator is A type hardness testers More than 30, D type hardness tester are below 85.
- 6. light scanning apparatus as claimed in claim 1, it is characterised in that including：Accommodate the scanner section and the housing with pliability of the signal transport part；WithThe flexible first vibration attenuation part being arranged on the inwall of the housing.
- 7. light scanning apparatus as claimed in claim 1, it is characterised in that including：Accommodate the scanner section and the housing of the signal transport part；WithSecond vibration attenuation part, its fill the signal transport part and the scanner section it is at least one of around with it is described The gap of housing, and it is flexible.
- 8. light scanning apparatus as claimed in claim 1, it is characterised in that including：At least Lighting Division of the light source with red light, green light and blue light；WithThe scanning lens formed by glass or resin,The vibration section is formed by being arranged on multiple electrodes on hollow columnar piezoelectric element,The fiber waveguide is optical fiber, the light as caused by the Lighting Division is guided so that the light injects to the scanning thoroughly Mirror.
- 9. light scanning apparatus as claimed in claim 8, it is characterised in that：The vibration section with being formed in the periphery of metal tube with the piezoelectric element obtained from the film layer of piezoelectricity,The fiber waveguide is arranged in the hollow space of the vibration section.
- 10. light scanning apparatus as claimed in claim 1, it is characterised in that：Vibration detecting part with the vibratory output for detecting the vibration section,The vibration section is formed by being arranged on multiple electrodes on hollow columnar piezoelectric element,The vibration detecting part is formed in the film layer of the piezoelectricity on the piezoelectric element.
- 11. light scanning apparatus as claimed in claim 1, it is characterised in that：The light accepting part of the light quantity of the return light of the light projected with detection from the fiber waveguide,The fiber waveguide is optical fiber, receives the return light of the light of injection, is guided to the light accepting part.
- 12. light scanning apparatus as claimed in claim 1, it is characterised in that including：The planar guide path being made up of film, it receives the return light of the light projected from the fiber waveguide；WithLight accepting part, it detects the light quantity for the return light that have received by the planar guide path.
- A kind of 13. device for image, it is characterised in that including：Light scanning apparatus described in claim 1；Generation drives the drive signal generating unit of the signal of the light scanning apparatus；WithThe picture signal processing unit of image is generated using the detection signal received from the light scanning apparatus.
- 14. device for image as claimed in claim 13, it is characterised in that：With virtual image optical section, it generates the virtual image of the secondary picture of the photogenerated projected by the light scanning apparatus.
- 15. device for image as claimed in claim 13, it is characterised in that including：Lighting Division, it at least has the light source of red light, green light, blue light and infrared light；The reference light department of the Chinese Academy of Sciences, it generates reference light according to the light projected from the Lighting Division；WithLight coherence tomography measurement portion, it makes the return light from the light scanning apparatus interference with the reference light and generate disconnected Layer measurement signal,The fiber waveguide of the light scanning apparatus is optical fiber, receives the return light of the light of injection, is guided relevant disconnected to the light Layer measurement portion.
- A kind of 16. TOF type analysis device, it is characterised in that including：Light scanning apparatus described in claim 1；At least Lighting Division of the light source with infrared light；Return light guide portion, it receives the return light of the light projected from the fiber waveguide；WithDistance measuring portion, it generates the distance represented to the object using the light that have received by the return light guide portion Distance measurement signals.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2016/059490 WO2017163386A1 (en) | 2016-03-24 | 2016-03-24 | Optical scanning device, imaging device, and tof type analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107615132A true CN107615132A (en) | 2018-01-19 |
| CN107615132B CN107615132B (en) | 2020-03-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680027206.0A Active CN107615132B (en) | 2016-03-24 | 2016-03-24 | Optical scanning device, imaging device, and TOF-type analysis device |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10413187B2 (en) |
| JP (1) | JP6475362B2 (en) |
| CN (1) | CN107615132B (en) |
| WO (1) | WO2017163386A1 (en) |
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Also Published As
| Publication number | Publication date |
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| CN107615132B (en) | 2020-03-31 |
| WO2017163386A1 (en) | 2017-09-28 |
| US10413187B2 (en) | 2019-09-17 |
| JPWO2017163386A1 (en) | 2018-03-29 |
| JP6475362B2 (en) | 2019-02-27 |
| US20180296094A1 (en) | 2018-10-18 |
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