CN107483066A - The standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy - Google Patents
The standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy Download PDFInfo
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- CN107483066A CN107483066A CN201710698260.4A CN201710698260A CN107483066A CN 107483066 A CN107483066 A CN 107483066A CN 201710698260 A CN201710698260 A CN 201710698260A CN 107483066 A CN107483066 A CN 107483066A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/1607—Supply circuits
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/22—Circuits for receivers in which no local oscillation is generated
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Abstract
The invention discloses a kind of standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy, it is made up of microwave antenna, clamped beam LNA, dc source, rechargeable battery and frequency mixer, local oscillator, LC bandstop filters, AC/DC modules and the intermediate-frequency filter that there is standing wave energy to collect, there is the clamped beam LNA that standing wave energy is collected to be made up of 2 LC tunable band-stop filters, 2 AC/DC modular converters, input tuning network, amplifier section and output tuning network.By the size for the electric capacity for adjusting LC bandstop filters, so as to adjust the stopband frequency domain of LC bandstop filters, allow with standing wave energy collect clamped beam LNA both ends standing wave and mixing system in LC bandstop filters can not be passed through by the clutter of intermediate-frequency filter, and then changed by AC/DC modules, collected by rechargeable battery, the power supply for receiver front end.
Description
Technical field
The present invention proposes the standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy, belongs to micro- electricity
The technical field of sub- mechanical system (MEMS).
Background technology
Internet of Things is considered as the third time information industry tide after computer, internet and mobile communications network, because
Its wide sector application prospect and paid attention to by national governments.The microwave receiver of one of core technology as Internet of Things
Front end, generally comprise microwave antenna, microwave filter, low-noise amplifier, frequency mixer, local oscillator and intermediate-frequency filter.
But some drawbacks that traditional microwave receiver front end has limit its application in Internet of Things, such as mixing system
In, standing wave and the standing wave of LNA both ends formation can not be formed in systems by the clutter of intermediate-frequency filter, system can all be made
Into electromagnetic interference.In recent years, with the fast development of MEMS technology, and to MEMS energy collection technologies and MEMS filter technology
Conduct in-depth research so that the standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy have realization
Possibility.
The content of the invention
Technical problem：It is an object of the invention to provide a kind of standing wave of internet of things oriented and the clamped beam of clutter collection of energy
Receiver front end, receiver front end of the invention receive microwave signal using microwave antenna, and microwave signal is by having standing wave energy
The clamped beam LNA amplifications that amount is collected, finally clamped beam mixing system of the access with clutter collection of energy, realizes that intermediate frequency exports,
And complete to the standing wave and the collection of energy of clutter in receiver front end, the standing wave of collection and the energy of clutter, realize microwave
The self-powered of receiver front end, improve the electromagnetic compatible environment of circuit.
Technical scheme：To achieve the above object, the technical solution adopted by the present invention is：
A kind of standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy, the receiver front end is by micro-
Wave antenna, dc source, the clamped beam LNA collected with standing wave energy, the clamped beam mixing system with clutter collection of energy
Formed with rechargeable battery, wherein, there is the clamped beam mixing system of clutter collection of energy by frequency mixer, local oscillator, No.1
LC bandstop filters, No.1 AC/DC modules and intermediate-frequency filter are formed；Microwave antenna receives microwave signal, by with standing wave energy
The clamped beam LNA amplifications that amount is collected, amplified signal access from the input of frequency mixer, and frequency mixer is connected with local oscillator, mixes
The output termination intermediate-frequency filter input of frequency device, while also connect the input of No.1 LC bandstop filters, No.1 LC band resistances
Wave filter cascades No.1 AC/DC modules, No.1 AC/DC modules connection rechargeable battery, rechargeable battery connection dc source, direct current
The clamped beam LNA collected with standing wave energy, frequency mixer, local oscillator power supply, the output end output of intermediate-frequency filter are given in source
Intermediate-freuqncy signal；
The intermediate-frequency filter is LC bandpass filters, and it is by the 5th planar inductor, the 6th planar inductor and the 5th electric capacity
Formula clamped beam, the 6th condenser type clamped beam are formed, wherein, one end of the 5th condenser type clamped beam is as microwave signal input
Mouthful, the other end connect the 5th planar inductor, the 5th condenser type clamped beam metal polar plate connection ground, the 5th planar inductor it is another
End is connected with the 6th planar inductor, the 6th condenser type clamped beam respectively, the other end ground connection of the 6th planar inductor, the 6th condenser type
The other end of clamped beam is hanging, the output end of the metal polar plate lead of the 6th condenser type clamped beam as wave filter；
The No.1 LC bandstop filters are by the 7th planar inductor, the 8th planar inductor and the 7th condenser type clamped beam,
Eight condenser type clamped beams are formed, wherein, one end of the 8th condenser type clamped beam is as microwave signal input port, other end connection
8th planar inductor, the metal polar plate connection ground of the 8th condenser type clamped beam, the other end of the 8th planar inductor is respectively with the
Seven planar inductors, the 7th condenser type clamped beam are connected, the other end of the 7th planar inductor ground connection, the 7th condenser type clamped beam it is another
One end is hanging, the output end of the metal polar plate lead of the 7th condenser type clamped beam as wave filter.
In the intermediate-frequency filter, by controlling the drop-down of the 5th condenser type clamped beam and the 6th condenser type clamped beam to drive
Drop-down driving voltage on electrode can adjust electric capacity C5, C6 of access size so as to adjust the passband of LC bandpass filters frequency
Domain；The passband for forming the LC bandpass filters of intermediate-frequency filter is f5≤f≤f5, wherein
In the No.1 LC bandstop filters, by controlling under the 8th condenser type clamped beam and the 7th condenser type clamped beam
The drop-down driving voltage in driving electrodes is drawn to adjust electric capacity C8, C7 of access size so as to adjusting LC bandstop filters
Stopband frequency domain；The passband of No.1 LC bandstop filters is f≤f7Or f >=f8, wherein
Wherein, f5=f7, f6=f8。
The input of the clamped beam LNA collected with standing wave energy connects No. two by the input of input tuning network
The input of LC tunable band-stop filters is formed, and inputs the input of the output end connection amplifier section of tuning network, enlarging section
The input of the output termination output tuning network divided, the output end for exporting tuning network connect No. three LC tunable band-stop filters
Input as with standing wave energy collect clamped beam LNA output end；The output end of No. two LC tunable band-stop filters
Connect the input of No. two AC/DC modular converters, the output end connection rechargeable battery of No. two AC/DC modular converters；No. three LC can
The output end of bandstop filter is adjusted to connect the input of No. three AC/DC modular converters, the output end of No. three AC/DC modular converters
Connect rechargeable battery.
The input tuning network and output tuning network are made up of a LC bandpass filter respectively, two LC band logicals filters
Ripple device is identical, and each LC bandpass filters are by the first planar inductor, the second planar inductor and the first condenser type clamped beam,
Two condenser type clamped beams are formed, wherein, one end of the first condenser type clamped beam is as microwave signal input port, other end connection
First planar inductor, the metal polar plate connection ground of the first condenser type clamped beam, the other end of the first planar inductor is respectively with second
Planar inductor, the second condenser type clamped beam are connected, the other end of the second planar inductor ground connection, the second condenser type clamped beam it is another
End is hanging, the output end of the metal polar plate lead of the second condenser type clamped beam as wave filter.
In the LC bandpass filters, by controlling the drop-down of the first condenser type clamped beam and the second condenser type clamped beam to drive
Drop-down driving voltage on moving electrode can adjust electric capacity C1, C2 of access size so as to adjust the passband of LC bandpass filters
Frequency domain；The passband for forming input tuning network and exporting the LC bandpass filters of tuning network is f1≤f≤f2, wherein
No. two LC bandstop filters and No. three LC bandstop filters are identical, and each LC bandstop filters are by the 3rd
Planar inductor, fourth plane inductance and the 3rd condenser type clamped beam, the 4th condenser type clamped beam are formed, wherein, the 4th condenser type
One end of clamped beam is as microwave signal input port, other end connection fourth plane inductance, the gold of the 4th condenser type clamped beam
Belonging to pole plate connection ground, the other end of fourth plane inductance is connected with the 3rd planar inductor, the 3rd condenser type clamped beam respectively, and the 3rd
The other end ground connection of planar inductor, the other end of the 3rd condenser type clamped beam is hanging, the metal polar plate of the 3rd condenser type clamped beam
Output end of the lead as wave filter.
In the LC bandstop filters, by controlling the drop-down of the 4th condenser type clamped beam, the 3rd condenser type clamped beam to drive
Drop-down driving voltage on moving electrode can adjust electric capacity C4, C3 of access size so as to adjust the stopband of LC bandstop filters
Frequency domain；The passband of No. two LC bandstop filters and No. three LC bandstop filters is f≤f3Or f >=f4, whereinWherein, f1=f3, f2=f4。
First planar inductor, the second planar inductor, the 3rd planar inductor, fourth plane inductance, the 5th planar inductor,
6th planar inductor, the 7th planar inductor, the structure of the 8th planar inductor are identical, and each planar inductor includes being arranged at High Resistivity Si
First paragraph transmission line, the second segment transmission line at substrate top surface both ends, and inductance coil, inductance coil pass through the first connection branch
Dagger, the second connection support column are connected with first paragraph transmission line, second segment transmission line and vacantly transmitted positioned at first paragraph respectively
On silicon nitride medium layer and second segment transmission line on line.
The first condenser type clamped beam, the second condenser type clamped beam, the 3rd condenser type clamped beam, the 4th condenser type are clamped
Beam, the 5th condenser type clamped beam, the 6th condenser type clamped beam, the 7th condenser type clamped beam, the 8th condenser type clamped beam (K8)
Structure is identical, is arranged on HR-Si substrate, and condenser type clamped beam includes being arranged on the of HR-Si substrate upper surface both ends
Three sections of transmission lines and the 4th section of transmission line, the 3rd section of transmission line have set the first anchor area, and the 4th section of transmission line is provided with the second anchor
Area, being set up between the first anchor area and the second anchor area has clamped beam, and the lower section of clamped beam is provided with a metal polar plate, and clamped beam hangs
Sky is above metal polar plate, two pull-down electrodes for being provided at both ends with clamped beam of metal polar plate, respectively the first pull-down electrode
With the second pull-down electrode.
The metal polar plate is provided with the first insulating silicon nitride dielectric layer.
First pull-down electrode is provided with the second insulating silicon nitride dielectric layer, and the second pull-down electrode is provided with the 3rd nitridation
Silicon insulating medium layer.
The HR-Si substrate is using silicon as substrate, aoxidizes one layer of SiO on a silicon substrate2Layer.
Beneficial effect：Exist in the standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy of the present invention
Traditional LNA structures both ends add standing wave energy collection structure, it is only necessary to which the drop-down of simple control condenser type clamped beam is driven
The size of dynamic voltage, just adjust filtering of the LC bandstop filters to standing wave；Employ the mixing with the effect of clutter collection of energy
System, LC bandstop filters are connected in parallel between the frequency mixer and intermediate-frequency filter in traditional mixing system, those are passed through
Fail to be filtered out by LC bandstop filters by the clutter of intermediate-frequency filter after frequency mixer；By the standing wave of LC bandstop filters and miscellaneous
Ripple is charged by the AC/DC module converters of rear class for direct current signal to rechargeable battery, for the power supply of receiver front end, is realized micro-
The self-powered of wave receiver front end, while the electromagnetic compatible environment of circuit is improved, there is higher potential value.
Brief description of the drawings
Fig. 1 be the present invention internet of things oriented standing wave and clutter collection of energy clamped beam receiver front end structure
Figure；
Fig. 2 is the structured flowchart for the clamped beam LNA that there is standing wave energy to collect in the present invention；
Fig. 3 is to form input tuning network in the present invention and export the schematic diagram of the LC bandpass filters of tuning network；
Fig. 4 is to form input tuning network in the present invention and export the equivalent circuit of the LC bandpass filters of tuning network
Figure；
Fig. 5 is the schematic diagram of No. two LC bandstop filters and No. three LC bandstop filters in the present invention；
Fig. 6 is the equivalent circuit diagram of No. two LC bandstop filters and No. three LC bandstop filters in the present invention；
Fig. 7 is the schematic diagram for the LC bandpass filters that intermediate-frequency filter is formed in the present invention；
Fig. 8 is the equivalent circuit diagram for the LC bandpass filters that intermediate-frequency filter is formed in the present invention；
Fig. 9 is the schematic diagram of No.1 LC bandstop filters in the present invention；
Figure 10 is the equivalent circuit diagram of No.1 LC bandstop filters in the present invention；
Figure 11 is the top view of planar inductor；
Figure 12 is AA ' the faces profile of planar inductor；
Figure 13 is the top view of condenser type clamped beam；
Figure 14 is BB ' the faces profile of condenser type clamped beam.
In figure, 1- microwave antennas, 2- dc sources, 3- have standing wave energy collect clamped beam LNA, 4- there is clutter energy
Measure the mixing system of collecting action, 5- frequency mixers, 6- local oscillators, 7- No.1 LC bandstop filters, 8- No.1 AC/DC moulds
Block, 9- rechargeable batteries, 10- intermediate-frequency filters, No. bis- LC bandstop filters of 11-, No. bis- AC/DC modules of 12-, 13- input tunings
Network, 14- amplifier sections, 15- output tuning networks, No. tri- LC bandstop filters of 16-, No. tri- AC/DC modules of 17-, L1- first
Planar inductor, the planar inductors of L2- second, K1- the first condenser type clamped beams, K2- the second condenser type clamped beams, the planes of L3- the 3rd
Inductance, L4- fourth plane inductance, the planar inductors of L5- the 5th, the planar inductors of L6- the 6th, the condenser type clamped beams of K5- the 5th, K6-
6th condenser type clamped beam, the planar inductors of L7- the 7th, the planar inductors of L8- the 8th, the condenser type clamped beams of K7- the 7th, K8- the 8th
Condenser type clamped beam, 20- silicon substrates, 21-SiO2Layer, 22- first paragraph transmission lines, 23- second segment transmission lines, 24- inductance coils,
The connection support columns of 25- first, the connection support columns of 26- second, 27- silicon nitride medium layers, the 3rd section of transmission line of 28-, the 4th section of 29-
Transmission line, the first anchors of 30- area, the second anchors of 31- area, 32- clamped beams, 33- metal polar plates, 34- the first silicon nitride medium layers, 35-
First pull-down electrode, 36- the second silicon nitride medium layers, the pull-down electrodes of 37- second, the silicon nitride medium layers of 38- the 3rd.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
It is as shown in Figure 1 the standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy of the present invention,
The receiver front end by microwave antenna 1, dc source 2, with standing wave energy collect clamped beam LNA3, have clutter energy receipts
The clamped beam mixing system 4 and rechargeable battery 9 of collection are formed, wherein, there is the clamped beam mixing system 4 of clutter collection of energy by mixing
Frequency device 5, local oscillator 6, No.1 LC bandstop filters 7, No.1 AC/DC modules 8 and intermediate-frequency filter 10 are formed；Microwave antenna
1 receives microwave signal, is amplified by the clamped beam LNA3 collected with standing wave energy, and amplified signal terminates from the input of frequency mixer 5
Enter, frequency mixer 5 is connected with local oscillator 6, the output termination input of intermediate-frequency filter 10 of frequency mixer 5, while also connects one
The input of number LC bandstop filters 7, No.1 LC bandstop filters 7 cascade No.1 AC/DC modules 8, and No.1 AC/DC modules 8 connect
Rechargeable battery 9 is connect, rechargeable battery 9 connects dc source 2, and dc source 2 is given the clamped beam LNA3 collected with standing wave energy, mixed
Frequency device 5, local oscillator 6 are powered, the output end output intermediate-freuqncy signal of intermediate-frequency filter 10.
Such as Fig. 2, the input with the clamped beam LNA3 of standing wave energy collection is connected by the input of input tuning network 13
The input for connecing No. two LC tunable band-stop filters 11 is formed, and the output end of input tuning network 13 connects the defeated of amplifier section 14
Enter end, the input of the output termination output tuning network 15 of amplifier section 14, the output end connection three of output tuning network 15
Output end of the input of number LC tunable band-stop filters 16 as the clamped beam LNA3 collected with standing wave energy；No. two LC can
The output end of bandstop filter 11 is adjusted to connect the input of No. two AC/DC modular converters 12, the output of No. two AC/DC modular converters
The connection of end 12 rechargeable battery 9；The output end of No. three LC tunable band-stop filters 16 connects the input of No. three AC/DC modular converters 17
End, the output end of No. three AC/DC modular converters 17 also connect rechargeable battery 9.
Such as Fig. 7 and 8, intermediate-frequency filter 10 is LC bandpass filters, and it is by the 5th planar inductor L5, the 6th planar inductor L6
Formed with the 5th condenser type clamped beam K5, the 6th condenser type clamped beam K6, wherein, the 5th condenser type clamped beam K5 one end conduct
Microwave signal input port, the other end connect the 5th planar inductor L5, and the 5th condenser type clamped beam K5 metal polar plate connects ground,
The 5th planar inductor L5 other end is connected with the 6th planar inductor L6, the 6th condenser type clamped beam K6 respectively, the 6th plane electricity
Feel L6 other end ground connection, the 6th condenser type clamped beam K6 other end is hanging, the 6th condenser type clamped beam K6 metal polar plate
Output end of the lead as wave filter；
Such as Fig. 9 and 10, No.1 LC bandstop filters 7 are by the 7th planar inductor L7, the 8th planar inductor L8 and the 7th electric capacity
Formula clamped beam K7, the 8th condenser type clamped beam K8 are formed, wherein, the 8th condenser type clamped beam K8 one end is defeated as microwave signal
Inbound port, the other end connect the 8th planar inductor L8, the 8th condenser type clamped beam K8 metal polar plate connection ground, the 8th plane
The inductance L8 other end is connected with the 7th planar inductor L7, the 7th condenser type clamped beam K7 respectively, and the 7th planar inductor L7's is another
One end is grounded, and the 7th condenser type clamped beam K7 other end is hanging, the 7th condenser type clamped beam K7 metal polar plate lead conduct
The output end of wave filter.
Such as Fig. 3 and 4, input tuning network 13 and output tuning network 15 are made up of a LC bandpass filter respectively, and two
Individual LC bandpass filters are identical, and each LC bandpass filters are by the first planar inductor L1, the second planar inductor L2 and first
Condenser type clamped beam K1, the second condenser type clamped beam K2 are formed, wherein, the first condenser type clamped beam K1 one end is believed as microwave
Number input port, the other end connect the first planar inductor L1, the first condenser type clamped beam K1 metal polar plate connection ground, and first is flat
The face inductance L1 other end is connected with the second planar inductor L2, the second condenser type clamped beam K2 respectively, the second planar inductor L2's
The other end is grounded, and the second condenser type clamped beam K2 other end is hanging, and the second condenser type clamped beam K2 metal polar plate lead is made
For the output end of wave filter.
Such as Fig. 5 and 6, No. two LC bandstop filters 11 are identical with No. three LC bandstop filters 16, and each LC bands resistance is filtered
Ripple device is by the 3rd planar inductor L3, fourth plane inductance L4 and the 3rd condenser type clamped beam K3, the 4th condenser type clamped beam K4 structures
Into, wherein, the 4th condenser type clamped beam K4 one end is as microwave signal input port, other end connection fourth plane inductance
L4, the 4th condenser type clamped beam K4 metal polar plate connection ground, the fourth plane inductance L4 other end are electric with the 3rd plane respectively
Sense L3, the 3rd condenser type clamped beam K3 are connected, and the 3rd planar inductor L3 other end ground connection, the 3rd condenser type clamped beam K3's is another
One end is hanging, the output end of the 3rd condenser type clamped beam K3 metal polar plate lead as wave filter.
Such as Figure 11 and 12, the first planar inductor L1, the second planar inductor L2, the 3rd planar inductor L3, fourth plane inductance
L4, the 5th planar inductor L5, the 6th planar inductor L6, the 7th planar inductor L7, the 8th planar inductor L8 structure are identical, each
Planar inductor includes first paragraph transmission line 22, the second segment transmission line 23, Yi Ji electricity for being arranged at HR-Si substrate upper surface both ends
Feel coil 24, inductance coil 24 by first connection support column 25, second connect support column 26 respectively with first paragraph transmission line 22,
Second segment transmission line 23 connects and vacantly in the silicon nitride medium layer 27 and second segment transmission line on first paragraph transmission line 22
On 23.
Such as Figure 13 and 14, the first condenser type clamped beam K1, the second condenser type clamped beam K2, the 3rd condenser type clamped beam K3,
4th condenser type clamped beam K4, the 5th condenser type clamped beam K5, the 6th condenser type clamped beam K6, the 7th condenser type clamped beam K7,
8th condenser type clamped beam K8 structure is identical, is arranged on HR-Si substrate, and condenser type clamped beam includes being arranged on high resistant
The 3rd section of transmission line 28 and the 4th section of transmission line 29 at silicon substrate upper surface both ends, the 3rd section of transmission line 28 have set the first anchor area
30, the 4th section of transmission line 29 is provided with the second anchor area 31, and being set up between the first anchor area 30 and the second anchor area 31 has clamped beam 32, Gu
The lower section of strutbeam 32 is provided with a metal polar plate 33, and clamped beam 32 is vacantly above metal polar plate 33, and the two of metal polar plate 33
End is provided with two pull-down electrodes of clamped beam, respectively the first pull-down electrode 35 and the second pull-down electrode 37；Metal polar plate 33
It is provided with the first insulating silicon nitride dielectric layer 34；First pull-down electrode 35 is provided with the second insulating silicon nitride dielectric layer 36, and second
Pull-down electrode 37 is provided with the 3rd insulating silicon nitride dielectric layer 38.
HR-Si substrate is using silicon as substrate, and one layer of SiO is aoxidized on silicon substrate 202Layer 21.
It is complete phase for the input tuning network in the clamped beam LNA that is collected with standing wave energy and output tuning network
With, belong to LC bandpass filters, applying specific drop-down driving voltage leads condenser type clamped beam K1 and condenser type clamped beam K2
Logical, now the two condenser type clamped beams are equivalent to electric capacity C1 and C2, input tuning network and output tuning network equivalent circuit
For the circuit shown in Fig. 4, therefore according to formula (1), input tuning network and the upper band connection frequency for exporting tuning network are f1：
According to formula (2), lower band connection frequency is f2：
Wherein f1<f2.The frequency f for radiofrequency signal that and if only if meets f1≤f≤f2When, can be by inputting tuning network
With output tuning network.The first condenser type clamped beam K1, the second condenser type can be adjusted by adjusting application drop-down driving voltage
Clamped beam K2 equivalent capacity C1, C2 inputs the passband frequency domain of tuning network and output tuning network so as to adjust.
For No. two LC bandstop filters and No. three LC bandreject filterings in the clamped beam LNA that is collected with standing wave energy
Device, they are identical, and applying specific drop-down driving voltage makes the 4th condenser type clamped beam K4 and the 3rd condenser type clamped
Beam K3 is turned on, and it is shown in Fig. 6 that now the two condenser type clamped beams, which are equivalent to electric capacity C4 and C3, LC bandstop filter equivalent circuit,
Circuit, therefore according to formula (3), the upper cut off frequency of LC variable band-pass filters is f3：
According to formula (4), lower limiting frequency f4：
Wherein f3<f4.The frequency f for radiofrequency signal that and if only if meets f≤f3Or f >=f4When, No. two LC band resistances can be passed through
Wave filter and No. three LC bandstop filters.By adjust apply drop-down driving voltage can adjust the 4th condenser type clamped beam K4 and
3rd condenser type clamped beam K3 equivalent capacity C4, C3 is filtered so as to No. two LC bandstop filters of regulation and No. three LC band resistances
Ripple device stopband frequency domain.
Wherein, f1=f3, f2=f4。
For the intermediate-frequency filter in the clamped beam mixing system with clutter collection of energy, belong to LC bandpass filters,
Applying specific drop-down driving voltage turns on the 5th condenser type clamped beam K5 and the 6th condenser type clamped beam K6, now the two electricity
Appearance formula clamped beam is equivalent to electric capacity C5 and C6, and intermediate-frequency filter equivalent circuit is the circuit shown in Fig. 8, therefore according to formula (5), in
The upper band connection frequency of frequency wave filter is f5：
According to formula (6), lower band connection frequency is f6：
Wherein f5<f6.The frequency f for radiofrequency signal that and if only if meets f5≤f≤f6When, intermediate-frequency filter can be passed through.It is logical
The 5th condenser type clamped beam K5 and the 6th condenser type clamped beam K6 equivalent electric can be adjusted by overregulating application drop-down driving voltage
Hold C5, C6 so as to adjust the passband frequency domain of intermediate-frequency filter.
For the No.1 LC bandstop filters in the clamped beam mixing system with clutter collection of energy, apply specific drop-down
Driving voltage turns on the 8th condenser type clamped beam K8 and the 7th condenser type clamped beam K7, now the two condenser type clamped beams etc.
It is the circuit shown in Figure 10 to imitate as electric capacity C8 and C7, No.1 LC bandpass filters equivalent circuit, therefore according to formula (7), LC is adjustable
The upper cut off frequency of bandpass filter is f7：
According to formula (8), lower limiting frequency f8：
Wherein f7<f8.The frequency f for radiofrequency signal that and if only if meets f≤f7Or f >=f8When, it can be hindered by No.1 LC bands
Wave filter.The 8th condenser type clamped beam K8 and the 7th condenser type clamped beam K7 can be adjusted by adjusting application drop-down driving voltage
Equivalent capacity C8, C7 so as to the No.1 LC bandstop filters of regulation stopband frequency domain.
Wherein, f5=f7, f6=f8。
Microwave signal is received by microwave antenna, is amplified by the clamped beam LNA collected with standing wave energy, the signal after amplification
Clamped beam mixing system of the input with clutter collection of energy, input signal arrive after frequency mixer is mixed with local oscillated signal
Up to intermediate-frequency filter, realize that intermediate frequency exports, and the LNA that is formed at the clamped beam LNA both ends collected with standing wave energy and do not lead to
Crossing the clutter of intermediate-frequency filter then can be by being connected in parallel on the LC bandstop filters at LNA both ends and intermediate-frequency filter input, then
It is direct current signal by AC/DC module converters, and then be electrically charged battery to have energy storage to receiver front end for dc source
The power supply of source device.
Present invention be distinguished in that：
The standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy of the present invention is tied in traditional LNA
Structure both ends add standing wave energy collection structure, it is only necessary to which simple control condenser type clamped beam pulls down the big of driving voltage
It is small, just adjust filtering of the LC bandstop filters to standing wave；The mixing system with the effect of clutter collection of energy is employed, in tradition
Mixing system in frequency mixer and intermediate-frequency filter between be connected in parallel LC bandstop filters, those are failed after frequency mixer
Filtered out by the clutter of intermediate-frequency filter by LC bandstop filters；By the standing wave and clutter of LC bandstop filters by rear class
AC/DC module converters are that direct current signal charges to rechargeable battery, the power supply for receiver front end.LC tunable band-stop filters by
Two planar inductor L and two condenser type clamped beams are formed, by controlling the drop-down driving voltage of condenser type clamped beam to adjust
The capacitance of section access filter network is so as to adjusting the stopband frequency domain of wave filter so that the passband frequency domain of two kinds of LC bandstop filters
It is identical with the frequency range of standing wave and clutter respectively.
Meet that the structure of conditions above is considered as the standing wave of internet of things oriented and the clamped beam receiver of clutter collection of energy
Front end.
Claims (10)
1. a kind of standing wave of internet of things oriented and the clamped beam receiver front end of clutter collection of energy, it is characterised in that：The reception
Machine front end by microwave antenna (1), dc source (2), with standing wave energy collect clamped beam LNA (3), have clutter energy receipts
The clamped beam mixing system (4) and rechargeable battery (9) of collection are formed, wherein, the clamped beam mixing system with clutter collection of energy
(4) by frequency mixer (5), local oscillator (6), No.1 LC bandstop filters (7), No.1 AC/DC modules (8) and intermediate-frequency filter
(10) form；Microwave antenna (1) receives microwave signal, is amplified by the clamped beam LNA (3) collected with standing wave energy, amplification letter
Number accessed from the input of frequency mixer (5), frequency mixer (5) is connected with local oscillator (6), during the output of frequency mixer (5) terminates
Frequency wave filter (10) input, while also connect the input of No.1 LC bandstop filters (7), No.1 LC bandstop filters (7)
Cascade No.1 AC/DC modules (8), No.1 AC/DC modules (8) connection rechargeable battery (9), rechargeable battery (9) connection dc source
(2), dc source (2) gives the clamped beam LNA (3) collected with standing wave energy, frequency mixer (5), local oscillator (6) power supply,
The output end output intermediate-freuqncy signal of intermediate-frequency filter (10)；The receiver front end have collected the energy of standing wave and clutter, realize
The self-powered of microwave receiver front end, while improve the electromagnetic compatible environment of circuit；
The intermediate-frequency filter (10) is LC bandpass filters, its by the 5th planar inductor (L5), the 6th planar inductor (L6) and
5th condenser type clamped beam (K5), the 6th condenser type clamped beam (K6) are formed, wherein, one end of the 5th condenser type clamped beam (K5)
As microwave signal input port, the other end connects the 5th planar inductor (L5), the metal pole of the 5th condenser type clamped beam (K5)
Plate connection ground, the other end of the 5th planar inductor (L5) respectively with the 6th planar inductor (L6), the 6th condenser type clamped beam (K6)
It is connected, the other end ground connection of the 6th planar inductor (L6), the other end of the 6th condenser type clamped beam (K6) is hanging, the 6th condenser type
Output end of the metal polar plate lead of clamped beam (K6) as wave filter；
The No.1 LC bandstop filters (7) are consolidated by the 7th planar inductor (L7), the 8th planar inductor (L8) and the 7th condenser type
Strutbeam (K7), the 8th condenser type clamped beam (K8) are formed, wherein, one end of the 8th condenser type clamped beam (K8) is as microwave signal
Input port, the other end connect the 8th planar inductor (L8), and the metal polar plate of the 8th condenser type clamped beam (K8) connects ground, the
The other end of eight planar inductors (L8) is connected with the 7th planar inductor (L7), the 7th condenser type clamped beam (K7) respectively, and the 7th is flat
The other end ground connection of face inductance (L7), the other end of the 7th condenser type clamped beam (K7) is hanging, the 7th condenser type clamped beam (K7)
Output end of the metal polar plate lead as wave filter.
2. the standing wave of internet of things oriented according to claim 1 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：In the intermediate-frequency filter (10), by controlling the 5th condenser type clamped beam (K5) and the 6th condenser type clamped beam
(K6) the drop-down driving voltage in drop-down driving electrodes can adjust electric capacity C5, C6 of access size so as to adjust LC band logicals
The passband frequency domain of wave filter；The passband for forming the LC bandpass filters of intermediate-frequency filter (10) is f5≤f≤f5, wherein
In the No.1 LC bandstop filters (7), by controlling the 8th condenser type clamped beam (K8) and the 7th condenser type clamped beam
(K7) size that the drop-down driving voltage in drop-down driving electrodes can adjust electric capacity C8, C7 of access hinders so as to adjust LC bands
The stopband frequency domain of wave filter；The passband of No.1 LC bandstop filters (7) is f≤f7Or f >=f8, wherein
Wherein, f5=f7, f6=f8。
3. the standing wave of internet of things oriented according to claim 1 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：It is described with standing wave energy collect clamped beam LNA (3) input by input tuning network (13) input
The input of No. two LC tunable band-stop filters (11) of connection is formed, the output end connection amplifier section of input tuning network (13)
(14) input, the input of the output termination output tuning network (15) of amplifier section (14), output tuning network (15)
Output end connect No. three LC tunable band-stop filters (16) input be used as with standing wave energy collection clamped beam LNA
(3) output end；The output end of No. two LC tunable band-stop filters (11) connects the input of No. two AC/DC modular converters (12)
End, output end (12) the connection rechargeable battery (9) of No. two AC/DC modular converters；No. three LC tunable band-stop filters (16) it is defeated
Go out the input of No. three AC/DC modular converters (17) of end connection, the output end of No. three AC/DC modular converters (17) also connects charging
Battery (9).
4. the standing wave of internet of things oriented according to claim 3 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：The input tuning network (13) and output tuning network (15) are made up of a LC bandpass filter respectively, and two
Individual LC bandpass filters are identical, each LC bandpass filters by the first planar inductor (L1), the second planar inductor (L2) and
First condenser type clamped beam (K1), the second condenser type clamped beam (K2) are formed, wherein, one end of the first condenser type clamped beam (K1)
As microwave signal input port, the other end connects the first planar inductor (L1), the metal pole of the first condenser type clamped beam (K1)
Plate connection ground, the other end of the first planar inductor (L1) respectively with the second planar inductor (L2), the second condenser type clamped beam (K2)
It is connected, the other end ground connection of the second planar inductor (L2), the other end of the second condenser type clamped beam (K2) is hanging, the second condenser type
Output end of the metal polar plate lead of clamped beam (K2) as wave filter.
5. the standing wave of internet of things oriented according to claim 4 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：In the LC bandpass filters, by controlling the first condenser type clamped beam (K1) and the second condenser type clamped beam
(K2) the drop-down driving voltage in drop-down driving electrodes can adjust electric capacity C1, C2 of access size so as to adjust LC band logicals
The passband frequency domain of wave filter；Form input tuning network (13) and export the passband of LC bandpass filters of tuning network (15) and be
f1≤f≤f2, wherein
6. the standing wave of internet of things oriented according to claim 3 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：No. two LC bandstop filters (11) are identical with No. three LC bandstop filters (16), and each LC bands resistance is filtered
Ripple device is clamped by the 3rd planar inductor (L3), fourth plane inductance (L4) and the 3rd condenser type clamped beam (K3), the 4th condenser type
Beam (K4) is formed, wherein, one end of the 4th condenser type clamped beam (K4) is as microwave signal input port, other end connection the 4th
Planar inductor (L4), the metal polar plate connection ground of the 4th condenser type clamped beam (K4), the other end point of fourth plane inductance (L4)
It is not connected with the 3rd planar inductor (L3), the 3rd condenser type clamped beam (K3), the other end ground connection of the 3rd planar inductor (L3), the
The other end of three condenser type clamped beams (K3) is hanging, and the metal polar plate lead of the 3rd condenser type clamped beam (K3) is as wave filter
Output end.
7. the standing wave of internet of things oriented according to claim 6 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：In the LC bandstop filters, by controlling the 4th condenser type clamped beam (K4), the 3rd condenser type clamped beam (K3)
Drop-down driving electrodes on drop-down driving voltage can adjust access electric capacity C4, C3 size so as to adjusting LC bandreject filterings
The stopband frequency domain of device；The passband of No. two LC bandstop filters (11) and No. three LC bandstop filters (16) is f≤f3Or f >=f4, its
InWherein, f1=f3, f2=f4。
8. the standing wave of the internet of things oriented according to claim 4 or 6 and the clamped beam receiver front end of clutter collection of energy,
It is characterized in that：First planar inductor (L1), the second planar inductor (L2), the 3rd planar inductor (L3), fourth plane electricity
Feel (L4), the 5th planar inductor (L5), the 6th planar inductor (L6), the 7th planar inductor (L7), the 8th planar inductor (L8)
Structure is identical, and each planar inductor includes first paragraph transmission line (22), the second segment for being arranged at HR-Si substrate upper surface both ends
Transmission line (23), and inductance coil (24), inductance coil (24) pass through the first connection support column (25), the second connection support column
(26) it is connected and vacantly on first paragraph transmission line (22) with first paragraph transmission line (22), second segment transmission line (23) respectively
Silicon nitride medium layer (27) and second segment transmission line (23) on.
9. the standing wave of the internet of things oriented according to claim 4 or 6 and the clamped beam receiver front end of clutter collection of energy,
It is characterized in that：The first condenser type clamped beam (K1), the second condenser type clamped beam (K2), the 3rd condenser type clamped beam
(K3), the 4th condenser type clamped beam (K4), the 5th condenser type clamped beam (K5), the 6th condenser type clamped beam (K6), the 7th electric capacity
Formula clamped beam (K7), the structure of the 8th condenser type clamped beam (K8) are identical, are arranged on HR-Si substrate, condenser type clamped beam
The 3rd section of transmission line (28) and the 4th section of transmission line (29) including being arranged on HR-Si substrate upper surface both ends, the 3rd section of transmission
Line (28) has set the first anchor area (30), and the 4th section of transmission line (29) is provided with the second anchor area (31), the first anchor area (30) and
Being set up between two anchor areas (31) has clamped beam (32), and the lower section of clamped beam (32) is provided with a metal polar plate (33), and clamped beam
(32) vacantly above metal polar plate (33), two pull-down electrodes for being provided at both ends with clamped beam of metal polar plate (33), respectively
For the first pull-down electrode (35) and the second pull-down electrode (37), metal polar plate (33) is provided with the first insulating silicon nitride dielectric layer
(34), the first pull-down electrode (35) is provided with the second insulating silicon nitride dielectric layer (36), and the second pull-down electrode (37) is provided with the
Three insulating silicon nitride dielectric layers (38).
10. the standing wave of internet of things oriented according to claim 8 and the clamped beam receiver front end of clutter collection of energy, its
It is characterised by：The HR-Si substrate is using silicon as substrate, and one layer of SiO is aoxidized on silicon substrate (20)2Layer (21).
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| JP2010062606A (en) * | 2008-09-01 | 2010-03-18 | Panasonic Corp | Receiver, and electronic equipment using the same |
| CN101915871A (en) * | 2010-07-12 | 2010-12-15 | 东南大学 | MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof |
| CN102098067A (en) * | 2011-01-07 | 2011-06-15 | 东南大学 | Microwave receiver front end based on online microelectro mechanical microwave power sensor |
| CN104254958A (en) * | 2012-02-09 | 2014-12-31 | 胡玛沃克斯公司 | Energy harvesting system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2524433Y (en) * | 2002-02-06 | 2002-12-04 | 信息产业部电子第五十四研究所 | Multichannel radio signal transponder |
| CN101141120A (en) * | 2007-10-12 | 2008-03-12 | 东南大学 | Microelectronic mechanical variable bandpass filter and process for producing the same |
| JP2010062606A (en) * | 2008-09-01 | 2010-03-18 | Panasonic Corp | Receiver, and electronic equipment using the same |
| CN101915871A (en) * | 2010-07-12 | 2010-12-15 | 东南大学 | MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof |
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