CN107484322B - High-voltage shielding bin - Google Patents
High-voltage shielding bin Download PDFInfo
- Publication number
- CN107484322B CN107484322B CN201710558950.XA CN201710558950A CN107484322B CN 107484322 B CN107484322 B CN 107484322B CN 201710558950 A CN201710558950 A CN 201710558950A CN 107484322 B CN107484322 B CN 107484322B
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- shielding
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- frame structure
- voltage
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- 239000002184 metal Substances 0.000 claims abstract description 52
- 239000007769 metal material Substances 0.000 claims abstract description 4
- 238000005452 bending Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 5
- 238000009434 installation Methods 0.000 abstract description 3
- 238000000429 assembly Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 5
- 238000003491 array Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Particle Accelerators (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
The invention belongs to the technical field of high-voltage shielding of high-voltage accelerators, and particularly relates to a high-voltage shielding bin which is used for shielding high-potential equipment of a high-voltage accelerator or an ion implanter and comprises a detachable frame structure made of metal materials and a detachable metal pipe (4) arranged on the frame structure, wherein the metal pipe (4) forms a shielding array capable of shielding high voltage on each outer surface of the frame structure, and the high-voltage shielding bin further comprises a reserved channel arranged on the shielding array, and the combined frame structure and the combined shielding array are covered on the periphery of the high-potential equipment. The shielding array is formed by adopting the detachable metal pipes, the metal pipes can be independently disassembled and assembled, a special maintenance channel is not required to be reserved, and when the shielded equipment in the high-voltage shielding bin needs to be installed or maintained, only a plurality of metal pipes at the entry of personnel and equipment are required to be disassembled; after the installation or maintenance activities are completed, only the metal tube is required to be installed again.
Description
Technical Field
The invention belongs to the technical field of high-voltage shielding of high-voltage accelerators, and particularly relates to a high-voltage shielding bin.
Background
The high-voltage accelerator is a device for accelerating a charged particle beam by passing the charged particle beam through an electric field generated by a direct-current high-voltage power supply one or more times, and can be used for atomic nucleus experiments, radiomedicine, radiochemistry, radioisotope manufacturing, nondestructive flaw detection, and the like. Ion implanters also have accelerator equipment (consisting of ion source, accelerator, lens, scanning system, target chamber, etc., in particular) and can be used for impurity doping in the semiconductor industry instead of the old process of thermal diffusion. The yield and various performance indexes of the semiconductor device are greatly improved. Corresponding high-voltage equipment is arranged in the high-voltage accelerator and the ion implanter, a plurality of equipment with different forms are arranged on high potential due to the requirement of functional use, the space relationship between the local tips and the like of the high-potential equipment and the outside is extremely easy to cause high-voltage partial discharge, and the discharge phenomenon not only can seriously influence the stable operation of the whole accelerator, but also causes unrecoverable damage to the equipment even due to instantaneous current in the high-voltage discharge process. Therefore, in the high-voltage accelerator and the ion implanter, in order to reduce the high-voltage ignition of equipment and realize the stable operation of the high-voltage accelerator or the implanter, the equipment at high potential is often put in a high-voltage shielding bin as a whole, and in order to facilitate the installation and the maintenance of the equipment in the high-voltage shielding bin, a channel or a movable door is required to be reserved on the high-voltage shielding bin in design separately. The structure of the existing high-voltage shielding bin is generally built by adopting a metal plate or a net, sharp ends are easy to appear at joints of the connecting plate or net, the top corners of the plate or net and the shielding bin, and joints between the shielding bin cross beam and the shielding bin upright post, and the reserved passage or the joint of the movable door and the high-voltage shielding bin are easy to appear due to repeated opening and closing. The probability of high pressure fires occurring is greatly increased if these tips are not treated, severely affecting the stable operation of the high pressure accelerator or implanter.
Disclosure of Invention
Aiming at the defect that the existing shielding structure which is used as a high-voltage shielding bin through a metal plate and a metal net is overcome, the invention aims to design the high-voltage shielding bin which is free of sharp protrusions and convenient to overhaul shielded equipment.
In order to achieve the above purpose, the technical scheme adopted by the invention is a high-voltage shielding bin for shielding high-potential equipment of a high-voltage accelerator or an ion implanter, wherein the high-voltage shielding bin comprises a detachable frame structure made of metal materials and a detachable metal pipe arranged on the frame structure, the metal pipe forms a shielding array capable of shielding high voltage on each outer surface of the frame structure, the high-voltage shielding bin further comprises a reserved channel arranged on the shielding array, and the combined frame structure and the shielding array are covered on the periphery of the high-potential equipment.
Further, the frame structure comprises a plurality of peak assemblies and a plurality of frame beams and columns, each peak assembly can be connected with a plurality of frame beams and columns, each frame beam and column is cylindrical, the peak assemblies are connected with one ends of the frame beams and columns, and the frame beams and columns are connected through the peak assemblies to form the frame structure.
Further, the vertex component is connected with one end of the frame beam column through a connector, the connector is annular, no sharp protrusions exist on the surface and the edge, and a chamfer or a round angle for preventing high-pressure ignition is arranged on the edge of the connector.
Furthermore, the vertex component is made of cylindrical pipes through bending and connecting, and the outer surface and the bent angle of the vertex component are smooth surfaces without sharp protrusions.
Further, the frame beam columns are provided with mounting holes which are arranged in an array, and the metal pipes are arranged on the outer surface formed by the frame beam columns in an array manner through the mounting holes to form the shielding array.
Still further, the reserved channel is disposed on the shielding array, and includes a cable conduit and a beam device channel, and is implemented by disposing a corresponding circular opening on the shielding array and disposing an annular flat plate at the opening, where the diameter of the annular flat plate is adapted to the diameter of the circular opening and is connected to the metal tube forming the circular opening; the annular flat plate is made of metal, no sharp protrusions exist on the surface and the edge, and a chamfer or a round angle for preventing high-pressure ignition is arranged on the edge.
Further, the cable pipeline is further provided with a cable circular tube made of metal materials and penetrating through the annular flat plate, the surface and the edge of the cable circular tube are not provided with sharp protrusions, and the edge of the cable circular tube is provided with a chamfer or a round angle for preventing high-voltage ignition.
Further, the frame structure is a cube, and the frame beam column comprises upright posts and cross beams; the vertex component consists of an elbow bent into 90 degrees and a straight pipe, the elbow is connected with two cross beams, the straight pipe is connected with one upright post, and the angles between the upright posts and the cross beams connected with the same vertex component are 90 degrees; the mounting holes are uniformly arranged at one side of the cross beam at equal distance.
Furthermore, the cross beam and the top point component are made of metal pipes with the diameters of 200 mm; the bending radius of the 90 degree bend on the vertex component is 300mm; the upright post is made of a metal pipe with the diameter of 168 mm; the diameter of the metal tubes is 40mm, and the spacing between the metal tubes in the shielding array is 100mm; the assembled high-voltage shielding cabin is 4800mm long, 3600mm wide and 2720mm high.
The invention has the beneficial effects that:
the shielding array is formed by adopting the detachable metal pipes, the metal pipes can be independently disassembled and assembled, a special maintenance channel is not required to be reserved, and when the shielded equipment in the high-voltage shielding bin needs to be installed or maintained, the shielded equipment can be realized by only disassembling a plurality of metal pipes at the entry positions of personnel and equipment; after the installation or maintenance activities are completed, only the metal tube is required to be installed again, and the high-voltage shielding effect cannot be influenced.
Drawings
FIG. 1 is a schematic view of a high voltage shield cartridge according to an embodiment of the present invention;
in the figure: the device comprises a 1-cross beam, a 2-vertex component (2), a 3-upright post, a 4-metal pipe, a 5-cable round pipe, a 6-beam equipment channel, a 7-connector and an 8-annular flat plate.
Detailed Description
The invention is further described below with reference to the drawings and examples.
The invention provides a high-voltage shielding bin (shown in figure 1) for shielding high-potential equipment of a high-voltage accelerator or an ion implanter, which consists of a frame structure with a metal texture and a metal pipe 4, wherein the frame structure is a detachable structure, and the metal pipe 4 is also arranged on the frame structure in a detachable mode. The metal tubes 4 are arranged in an array on each outer surface of the frame structure, and these arrays of metal tubes constitute a shielding array capable of shielding high voltages. The combined frame structure and the shielding array are covered on the periphery of the high-potential equipment, so that the effect of shielding the high-potential equipment of the high-voltage accelerator or the ion implanter is realized.
On the shielding array of the frame structure, reserved channels with different specifications are arranged according to actual needs and used for connecting various pipelines of the shielded high-potential equipment and connecting with external equipment of the high-voltage shielding bin.
The frame structure comprises a plurality of vertex components 2 and a plurality of frame beam columns, each vertex component 2 can be connected with a plurality of frame beam columns, the frame beam columns are cylindrical metal pipes, no sharp protrusions exist on the surfaces (high-pressure ignition is prevented), each vertex component 2 is connected with one end of each frame beam column, and the frame beam columns are connected through the vertex components 2 to form the frame structure. (that is, each of the plurality of vertex assemblies 2 is a point where one ends of the plurality of frame beams meet). Wherein, be equipped with the mounting hole of array arrangement on the frame beam column, tubular metal resonator 4 passes through the mounting hole, sets up on the surface that the frame beam column constitutes in array form, constitutes shielding array.
In the invention, the frame structure is a cube, and the frame beam column comprises two types of upright posts 3 and cross beams 1 (wherein the cross beams 1 are divided into two types with different lengths, and respectively form the length and the width of the cube). The frame structure (different frame beams and columns and vertex assemblies 2 for connecting different frame beams and columns) can be adjusted according to the requirements of shielding objects to form various polyhedrons, and corresponding shielding arrays are arranged on the outer surfaces of the polyhedrons, so that various shielding bins are formed, and the requirements of the shielding objects are met.
The vertex component 2 is made of cylindrical pipes through bending and connecting, and the outer surface and the bent angle of the vertex component 2 are smooth surfaces and have no sharp protrusions. In the invention, the vertex component 2 is specifically composed of a bent pipe and a straight pipe, wherein the bent pipe is processed into a 90-degree round angle, the bent pipe is connected with two cross beams 1, the straight pipe is connected with a vertical column 3, and the angles between the vertical column 3 and the cross beams 1 connected on the same vertex component 2 are 90 degrees; the mounting holes are uniformly arranged on one side of the cross beam 1 at equal intervals.
In the high-voltage shielding bin provided by the invention, the cross beam 1 and the vertex component 2 are made of metal pipes with the diameter of 200 mm; the bending radius of the 90-degree fillet bent pipe on the vertex component 2 is 300mm; the upright post 3 is made of a metal pipe with the diameter of 168 mm; the diameter of the metal tubes 4 is 40mm, and the interval between the metal tubes 4 in the shielding array is 100mm; the assembled high-voltage shielding cabin is 4800mm long, 3600mm wide and 2720mm high. The distance between the mounting holes (i.e. the distance between the metal tubes 4 in the shielding array) and the diameters of the metal tubes 4 and the bending radius of the bent tube of the vertex component 2 can be selected according to the voltage difference and shielding requirements, and the smooth surface of the metal tubes 4 is utilized to avoid the occurrence of the tip facing the ground potential so as to effectively reduce the probability of high-voltage ignition.
The vertex component 2 is connected with one end of a frame beam column (the cross beam 1 and the upright column 3) through a connector 7, the connector 7 is annular, no sharp protrusions exist on the surface and the edge, a chamfer or a round angle for preventing high-pressure ignition is arranged on the edge of the connector 7, and the vertex component 2 and the frame beam column (the cross beam 1 and the upright column 3) are connected together in a mode of being inserted into the connector 7. The connector 7 is also made of metal.
The reserved channel is arranged on the shielding array, and in the invention, the reserved channel comprises a cable pipeline and a beam equipment channel 6, the reserved channel is realized by arranging corresponding circular holes on the shielding array and arranging annular flat plates 8 at the holes, and the diameter of the annular flat plates 8 is matched with the diameter of the open air and is connected with a metal pipe 4 forming the circular holes. The metal tube 4 forming the round opening is correspondingly cut and is connected with the annular flat plate 8 through welding, the annular flat plate 8 is made of metal, no sharp protrusions exist on the surface and the edge, and a chamfer or a round angle for preventing high-pressure ignition is arranged on the edge. The diameters of the cable duct and the beam equipment channel 6 are set according to actual needs. Two beam device channels 6 and a cable conduit (provided with a cable round tube 5) are arranged on the high-voltage shielding bin provided by the invention.
In order to ensure the shielding effect, a cable circular tube 5 is further arranged on the cable duct, the cable circular tube 5 is arranged on the shielding array in a penetrating manner through the annular flat plate 8, and the cable circular tube 5 is made of metal and used for connecting cables, cables and other pipelines through shielded high-level equipment. The surface and the edge of the cable round tube 5 are not provided with sharp protrusions, and the edge is provided with a chamfer or a round angle for preventing high-pressure ignition.
The device according to the invention is not limited to the examples described in the specific embodiments, and a person skilled in the art obtains other embodiments according to the technical solution of the invention, which also belong to the technical innovation scope of the invention.
Claims (9)
1. The utility model provides a high-pressure shielding storehouse for shield high potential equipment of high-pressure type accelerator or ion implanter, characterized by: the high-voltage shielding device comprises a detachable metal frame structure and a detachable metal tube (4) arranged on the frame structure, wherein the metal tube (4) forms a shielding array capable of shielding high voltage on each outer surface of the frame structure, the shielding device further comprises a reserved channel arranged on the shielding array, and the frame structure and the shielding array after combination are covered on the periphery of the high-voltage equipment.
2. The high voltage shield compartment of claim 1, wherein: the frame structure comprises a plurality of vertex components (2) and a plurality of frame beams and columns, wherein each vertex component (2) can be connected with a plurality of frame beams and columns, each frame beam and column is cylindrical, the vertex components (2) are connected with one end of each frame beam and column, and the frame beams and columns are connected through the vertex components (2) to form the frame structure.
3. The high voltage shield compartment of claim 2, wherein: the vertex component (2) is connected with one end of the frame beam column through a connector (7), the connector (7) is annular, no sharp protrusions exist on the surface and the edge, and a chamfer or a round angle for preventing high-pressure ignition is arranged on the edge of the connector (7).
4. A high voltage shield compartment according to claim 3, characterized in that: the vertex component (2) is made of cylindrical pipes through bending and connecting, and the outer surface and the bent angle of the vertex component (2) are smooth surfaces and have no sharp protrusions.
5. The high voltage shield compartment of claim 2, wherein: the frame beam columns are provided with mounting holes which are arranged in an array, and the metal pipes (4) are arranged on the outer surface formed by the frame beam columns in an array mode through the mounting holes to form the shielding array.
6. The high voltage shield compartment of claim 5, wherein: the reserved channel is arranged on the shielding array and comprises a cable pipeline and a beam equipment channel (6), the reserved channel is realized by arranging a corresponding circular opening on the shielding array and arranging an annular flat plate (8) at the opening, and the diameter of the annular flat plate (8) is matched with the diameter of the circular opening and is connected with the metal pipe (4) forming the circular opening; the annular flat plate (8) is made of metal, no sharp protrusions exist on the surface and the edge, and a chamfer or a round angle for preventing high-pressure ignition is arranged on the edge.
7. The high voltage shield compartment of claim 6, wherein: the cable duct is characterized by further comprising a cable circular tube (5) made of metal materials and penetrating through the annular flat plate (8) on the shielding array, wherein the surface and the edge of the cable circular tube (5) are not provided with sharp protrusions, and the edge of the cable circular tube is provided with a chamfer or a round angle for preventing high-pressure ignition.
8. The high voltage shield compartment of claim 5, wherein: the frame structure is a cube, and the frame beam column comprises an upright post (3) and a cross beam (1); the vertex component (2) is composed of an elbow bent to 90 degrees and a straight pipe, the elbow is connected with the two cross beams (1), the straight pipe is connected with the upright post (3), and the angles between the upright post (3) and the cross beams (1) connected with the same vertex component (2) are all 90 degrees; the mounting holes are uniformly arranged at one side of the cross beam (1) at equal intervals.
9. The high voltage shield compartment of claim 8, wherein: the cross beam (1) and the vertex component (2) are made of metal pipes with the diameters of 200 mm; the bending radius of the 90-degree bent pipe on the vertex component (2) is 300mm; the upright post (3) is made of a metal pipe with the diameter of 168 mm; the diameter of the metal tubes (4) is 40mm, and the interval between the metal tubes (4) in the shielding array is 100mm; the assembled high-voltage shielding cabin is 4800mm long, 3600mm wide and 2720mm high.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558950.XA CN107484322B (en) | 2017-07-10 | 2017-07-10 | High-voltage shielding bin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558950.XA CN107484322B (en) | 2017-07-10 | 2017-07-10 | High-voltage shielding bin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107484322A CN107484322A (en) | 2017-12-15 |
| CN107484322B true CN107484322B (en) | 2023-11-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710558950.XA Active CN107484322B (en) | 2017-07-10 | 2017-07-10 | High-voltage shielding bin |
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| Country | Link |
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| CN (1) | CN107484322B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108682600B (en) * | 2018-07-16 | 2024-05-14 | 中国原子能科学研究院 | Ion source with anti-sparking device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5463268A (en) * | 1994-05-23 | 1995-10-31 | National Electrostatics Corp. | Magnetically shielded high voltage electron accelerator |
| CN102687231A (en) * | 2009-10-09 | 2012-09-19 | 迈普尔平版印刷Ip有限公司 | High voltage shielding arrangement |
| CN104302089A (en) * | 2014-10-11 | 2015-01-21 | 江苏达胜加速器制造有限公司 | Horizontal type self-shielding accelerator |
| CN105448371A (en) * | 2015-11-20 | 2016-03-30 | 中国电子科技集团公司第四十八研究所 | High voltage protection and ray shield system of electrostatic field accelerated high energy ion implantation machine |
| CN207235190U (en) * | 2017-07-10 | 2018-04-13 | 中国原子能科学研究院 | A kind of high-tension shielding storehouse |
-
2017
- 2017-07-10 CN CN201710558950.XA patent/CN107484322B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5463268A (en) * | 1994-05-23 | 1995-10-31 | National Electrostatics Corp. | Magnetically shielded high voltage electron accelerator |
| CN102687231A (en) * | 2009-10-09 | 2012-09-19 | 迈普尔平版印刷Ip有限公司 | High voltage shielding arrangement |
| CN104302089A (en) * | 2014-10-11 | 2015-01-21 | 江苏达胜加速器制造有限公司 | Horizontal type self-shielding accelerator |
| CN105448371A (en) * | 2015-11-20 | 2016-03-30 | 中国电子科技集团公司第四十八研究所 | High voltage protection and ray shield system of electrostatic field accelerated high energy ion implantation machine |
| CN207235190U (en) * | 2017-07-10 | 2018-04-13 | 中国原子能科学研究院 | A kind of high-tension shielding storehouse |
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| Publication number | Publication date |
|---|---|
| CN107484322A (en) | 2017-12-15 |
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