CN107484322B - High-voltage shielding bin - Google Patents

Abstract

The invention belongs to the technical field of high-voltage shielding for high-voltage accelerators, and specifically relates to a high-voltage shielding chamber, which is used to shield high-voltage equipment of high-voltage accelerators or ion implanters, and includes a detachable metal frame structure and detachable settings. The metal pipe (4) on the frame structure forms a shielding array capable of shielding high voltage on each outer surface of the frame structure, and also includes a reserved shielding array arranged on the shielding array. The combined frame structure and shielding array cover the periphery of the high-potential equipment. By using detachable metal tubes to form a shielding array, and the metal tubes can be disassembled and assembled individually, there is no need to reserve a dedicated maintenance channel. When the shielded equipment in the high-voltage shielding chamber needs to be installed or repaired, only the personnel and equipment need to be removed. This can be achieved by placing several metal pipes at the entrance of the equipment; after the installation or maintenance activities are completed, the metal pipes only need to be reinstalled.

Description

A high-voltage shielded warehouse

Technical field

The invention belongs to the technical field of high-voltage shielding for high-voltage accelerators, and specifically relates to a high-voltage shielding chamber.

Background technique

A high-voltage accelerator is a device that accelerates a charged particle beam through the electric field generated by a DC high-voltage power supply one or more times. It can be used for nuclear experiments, radioactive medicine, radioactive chemistry, manufacturing of radioactive isotopes, non-destructive flaw detection, etc. The ion implanter also has an accelerator device (composed of an ion source, an accelerator, a lens, a scanning system, a target chamber, etc.). The ion implanter can be used for impurity doping in the semiconductor industry to replace the old process of thermal diffusion. This greatly improves the yield and various performance indicators of semiconductor devices. There are corresponding high-voltage equipment inside high-voltage accelerators and ion implanters. Due to functional requirements, there will be a large number of equipment of different shapes arranged at high potential. These local tips of high-potential equipment are exposed to the outside world. The spatial relationship can easily lead to the occurrence of high-voltage partial discharge, and this discharge phenomenon will not only seriously affect the stable operation of the entire accelerator, but the instantaneous current during the high-voltage discharge process may even cause irreversible damage to the equipment. Therefore, in high-voltage accelerators and ion implanters, in order to reduce high-voltage ignition of equipment and achieve stable operation of high-voltage accelerators or implanters, it is often necessary to place the entire equipment at high potential in a high-voltage shielding chamber. The installation and maintenance of the equipment in the shielded warehouse requires separate consideration in the design to reserve passages or movable doors on the high-voltage shielded warehouse. The structure of the existing high-voltage shielded warehouse is usually built with metal plates or nets. It is easy to install at the joints of the connecting plates or nets, the rounded corners between the plates or nets and the vertices of the shielded warehouse, and the joints between the beams of the shielded warehouse and the columns of the shielded warehouse. Tips appear. Tips are also prone to appear at the joints between reserved passages or movable doors and high-voltage shielding chambers due to repeated opening and closing. If these tips are not processed, the probability of high-pressure ignition will be greatly increased, seriously affecting the stable operation of the high-pressure accelerator or injector.

Contents of the invention

In view of the shortcomings of the existing shielding structure of the high-voltage shielding chamber using metal plates and metal mesh, the purpose of the present invention is to design a high-voltage shielding chamber without sharp protrusions that facilitates maintenance of the shielded equipment.

In order to achieve the above objectives, the technical solution adopted by the present invention is a high-voltage shielding chamber, which is used to shield high-voltage accelerators or high-potential equipment of ion implanters, which includes a detachable metal frame structure and a detachable A metal tube arranged on the frame structure. The metal tube forms a shielding array capable of shielding high voltage on each outer surface of the frame structure. It also includes a reserved channel arranged on the shielding array. The combined The frame structure and shielding array cover the periphery of the high-potential equipment.

Further, the frame structure includes several vertex assemblies and several frame beams and columns, each of the vertex assemblies can connect several of the frame beams and columns, the frame beams and columns are cylindrical, and the vertex assembly is connected to the One end of the frame beams and columns are connected, and the frame beams and columns are connected through the vertex assembly to form the frame structure.

Further, the vertex assembly is connected to one end of the frame beam and column through a connector. The connector is annular and has no sharp protrusions on its surface and edges. The edge of the connector is provided with a device to prevent high-voltage ignition. Chamfer or fillet.

Furthermore, the apex component is made of cylindrical pipes by bending and connecting, and the outer surface and corners of the apex component are smooth surfaces without sharp protrusions.

Further, the frame beams and columns are provided with mounting holes arranged in an array, and the metal pipes pass through the mounting holes and are arranged in an array on the outer surface formed by the frame beams and columns to form the shielding array.

Furthermore, the reserved channels are provided on the shielding array, including cable ducts and beam equipment channels. This is achieved by arranging corresponding circular openings on the shielding array and arranging annular flat plates at the openings. , the diameter of the annular flat plate is adapted to the diameter of the circular opening, and is connected to the metal tube constituting the circular opening; the annular flat plate is made of metal, and its surface and edges are not sharp. It is raised, and the edges are chamfered or rounded to prevent high-pressure sparking.

Furthermore, the cable duct also includes a metal cable tube that is penetrated on the shielding array through the annular flat plate. There are no sharp protrusions on the surface and edges of the cable tube, and the edges are provided with There are chamfers or rounded corners to prevent high-pressure ignition.

Further, the frame structure is a cube, and the frame beams and columns include upright columns and cross beams; the vertex assembly is composed of an elbow bent at 90 degrees and a straight tube, and the elbow connects the two beams. , the straight pipe is connected to one of the uprights, and the angles between the uprights and the crossbeams connected to the same vertex assembly are all 90 degrees; the mounting holes are evenly arranged on one side of the crossbeam.

Furthermore, the beams and apex components are made of metal pipes with a diameter of 200mm; the bending radius of the 90-degree bend on the apex component is 300mm; the columns are made of metal pipes with a diameter of 168mm; the metal pipes The diameter is 40mm, and the spacing between the metal tubes in the shielding array is 100mm; the assembled high-voltage shielding cabin is 4800mm long, 3600mm wide, and 2720mm high.

The beneficial effects of the present invention are:

By using detachable metal tubes to form a shielding array, and the metal tubes can be disassembled and assembled individually, there is no need to reserve a dedicated maintenance channel. When the shielded equipment in the high-voltage shielding warehouse needs to be installed or inspected, only the personnel need to remove it. This can be achieved by installing several metal pipes at the entrance of the equipment; after the installation or maintenance activities are completed, the metal pipes only need to be reinstalled, which will not affect the high-voltage shielding effect.

Description of the drawings

Figure 1 is a schematic diagram of a high-voltage shielded warehouse according to a specific embodiment of the present invention;

In the picture: 1-beam, 2-vertex assembly (2), 3-column, 4-metal tube, 5-cable tube, 6-beam equipment channel, 7-connector, 8-annular flat plate.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings and examples.

The invention provides a high-voltage shielding chamber (as shown in Figure 1), which is used to shield high-voltage equipment of high-voltage accelerators or ion implanters. It consists of a metal frame structure and metal tubes 4, wherein the frame structure It is a detachable structure, and the metal pipe 4 is also detachably arranged on the frame structure. The metal tubes 4 are arranged in an array on each outer surface of the frame structure, and these metal tube arrays constitute a shielding array capable of shielding high voltage. The combined frame structure and shielding array cover the periphery of high-potential equipment to achieve the function of shielding high-potential equipment of high-voltage accelerators or ion implanters.

On the shielding array of the frame structure, reserved channels of different specifications are provided according to actual needs for various pipeline connections of shielded high-potential equipment and connections to external equipment of the high-voltage shielded warehouse.

The frame structure is composed of several vertex components 2 and several frame beams and columns. Each vertex component 2 can connect several frame beams and columns. The frame beams and columns are cylindrical metal pipes with no sharp protrusions on the surface (to prevent high-pressure ignition). Each vertex component 2 is connected to one end of the frame beams and columns, and the frame beams and columns are connected through the vertex components 2 to form a frame structure. (That is to say, each vertex component 2 is a point where one end of several frame beams and columns gathers). Among them, the frame beams and columns are provided with mounting holes arranged in an array, and the metal pipes 4 pass through the mounting holes and are arranged in an array on the outer surface of the frame beams and columns to form a shielding array.

In the present invention, the frame structure is a cube, and the frame beams and columns include two types: upright columns 3 and cross beams 1 (the cross beam 1 is divided into two types with different lengths, which respectively constitute the "length" and "width" of the cube). The frame structure can also be adjusted according to the needs of the shielding object (different frame beams and columns and vertex components 2 connecting different numbers of frame beams and columns) to form various polyhedrons, and corresponding shielding arrays are set on each outer surface of the polyhedron, thereby Various shielding warehouses are formed to meet the needs of shielding objects.

The apex component 2 is made of cylindrical pipes by bending and connecting. The outer surface and corners of the apex component 2 are smooth and have no sharp protrusions. In the present invention, the apex assembly 2 is specifically composed of a curved pipe and a straight pipe, where the curved pipe is processed into a 90-degree fillet. The curved pipe is connected to two beams 1, and the straight pipe is connected to a column 3. The angles between the column 3 and the beam 1 on the same vertex assembly 2 are both 90 degrees; the mounting holes are evenly spaced on one side of the beam 1.

In the high-voltage shielded warehouse provided by the present invention, the beam 1 and the vertex assembly 2 are made of metal pipes with a diameter of 200mm; the bending radius of the 90-degree rounded elbow on the vertex assembly 2 is 300mm; the column 3 is made of a metal pipe with a diameter of 168mm. Production; the diameter of the metal tube 4 is 40mm, and the spacing between the metal tubes 4 in the shielding array is 100mm; the assembled high-voltage shielding cabin is 4800mm long, 3600mm wide, and 2720mm high. The spacing between the mounting holes (that is, the spacing between the metal tubes 4 in the shielding array), the diameter of the metal tube 4, and the bending radius of the bend of the vertex assembly 2 can be selected according to the size of the voltage difference and the shielding requirements. Using the metal tube 4. Its smooth surface avoids the tip facing the ground potential, thereby effectively reducing the probability of high-voltage sparking.

The vertex component 2 is connected to one end of the frame beam and column (beam 1, column 3) through a connector 7. The connector 7 is annular, with no sharp protrusions on the surface or edges. The edges of the connector 7 are provided with inverts to prevent high-voltage ignition. Corners or rounded corners, vertex assembly 2 and frame beams and columns (beams 1, columns 3) are connected together by inserting into connectors 7. Connector 7 is also made of metal.

The reserved channels are arranged on the shielding array. In the present invention, the reserved channels include cable ducts and beam equipment channels 6, which are realized by arranging corresponding circular openings on the shielding array and arranging annular flat plates 8 at the openings. The diameter of the annular flat plate 8 is adapted to the diameter of the opening and is connected to the metal tube 4 forming the circular opening. The metal tube 4 forming the circular opening is cut accordingly and connected to the annular flat plate 8 by welding. The annular flat plate 8 is also made of metal, and has no sharp protrusions on the surface and edges, and is provided with high-pressure ignition protection on the edges. Chamfer or fillet. The diameters of the cable duct and beam equipment channel 6 are set according to actual needs. On the high-voltage shielded cabin provided by the present invention, two beam equipment channels 6 and a cable duct (with a cable round tube 5) are provided.

In order to ensure the shielding effect, a cable round tube 5 is also provided on the cable duct. The cable round tube 5 is passed through the annular flat plate 8 on the shielding array. The cable round tube 5 is made of metal and is used to pass through the shielded high-voltage shielding array. Cables, cables and other pipelines required to connect level equipment. There are no sharp protrusions on the surface and edges of the cable round tube 5, and the edges are provided with chamfers or rounded corners to prevent high-voltage ignition.

The device described in the present invention is not limited to the examples described in the specific implementation modes. Those skilled in the art can derive other implementation modes based on the technical solutions of the present invention, which also fall within the scope of technical innovation of the present invention.

Claims (9)

1. A high-voltage shielding chamber, used to shield high-voltage equipment of high-voltage accelerators or ion implanters, characterized by: including a detachable metal frame structure and a detachable metal frame structure disposed on the frame structure. Metal tube (4), the metal tube (4) forms a shielding array capable of shielding high voltage on each outer surface of the frame structure, and also includes a reserved channel provided on the shielding array, and the combined The frame structure and shielding array cover the periphery of the high-potential equipment. 2. The high-voltage shielded warehouse according to claim 1, characterized in that the frame structure includes several vertex components (2) and several frame beams and columns, and each of the vertex components (2) can connect several so-called beams. The frame beams and columns are cylindrical, and the vertex assembly (2) is connected to one end of the frame beams and columns. The frame beams and columns are connected through the vertex assembly (2) to form the frame structure. . 3. The high-voltage shielded warehouse according to claim 2, characterized in that: the vertex assembly (2) is connected to one end of the frame beam and column through a connector (7), and the connector (7) is annular, There are no sharp protrusions on the surface or edges, and the edges of the connector (7) are provided with chamfers or rounded corners to prevent high-voltage sparking. 4. The high-voltage shielded warehouse according to claim 3, characterized in that: the apex component (2) is made of cylindrical pipes by bending and connecting, and the outer surface and bending angle of the apex component (2) are Smooth surface with no sharp protrusions. 5. The high-voltage shielded warehouse according to claim 2, characterized in that: the frame beams and columns are provided with mounting holes arranged in an array, and the metal pipes (4) pass through the mounting holes and are arranged in an array at the locations. The shielding array is formed on the outer surface of the frame beams and columns. 6. The high-voltage shielded warehouse according to claim 5, characterized in that: the reserved channels are arranged on the shielding array, including cable ducts and beam equipment channels (6). By arranging corresponding channels on the shielding array, The circular opening is realized by arranging an annular flat plate (8) at the opening. The diameter of the annular flat plate (8) is adapted to the diameter of the circular opening, and is formed with the circular opening. The metal tubes (4) of the holes are connected; the annular plate (8) is made of metal, and there are no sharp protrusions on the surface and edges, and the edges are provided with chamfers or rounded corners to prevent high-pressure ignition. 7. The high-voltage shielded warehouse according to claim 6, characterized in that the cable duct further includes a metal cable tube (5) that is penetrated on the shielding array through the annular flat plate (8). ), the surface and edges of the cable round tube (5) have no sharp protrusions, and the edges are provided with chamfers or rounded corners to prevent high-voltage ignition. 8. The high-voltage shielded warehouse according to claim 5, characterized in that: the frame structure is a cube, and the frame beams include upright columns (3) and cross beams (1); the vertex assembly (2) consists of a It consists of an elbow bent at 90 degrees and a straight tube. The elbow is connected to two of the beams (1). The straight tube is connected to one of the uprights (3), which is connected to the same vertex assembly. (2) The angles between the upright column (3) and the cross beam (1) are both 90 degrees; the mounting holes are evenly arranged on one side of the cross beam (1). 9. The high-voltage shielded warehouse according to claim 8, characterized in that: the cross beam (1) and the vertex assembly (2) are made of metal pipes with a diameter of 200mm; the 90-degree angle on the vertex assembly (2) The bending radius of the elbow is 300mm; the column (3) is made of a metal pipe with a diameter of 168mm; the diameter of the metal pipe (4) is 40mm, and the spacing between the metal pipes (4) in the shielding array is 100mm; the assembled high-voltage shielding cabin is 4800mm long, 3600mm wide and 2720mm high.