CN107400863A - ZrNbCN gradient composite coating cutters and preparation method thereof - Google Patents
ZrNbCN gradient composite coating cutters and preparation method thereof Download PDFInfo
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- CN107400863A CN107400863A CN201710532623.7A CN201710532623A CN107400863A CN 107400863 A CN107400863 A CN 107400863A CN 201710532623 A CN201710532623 A CN 201710532623A CN 107400863 A CN107400863 A CN 107400863A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0084—Producing gradient compositions
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties
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Abstract
The invention belongs to be machined cutting tool field, it is related to a kind of ZrNbCN gradient composite coatings cutter and preparation method thereof, coated cutting tool is followed successively by from the inside to the outside：Tool matrix, Ti transition zones, the ZrNbCN gradient composite coatings of ZrNbC transition zones and nitrogen content gradient, the ZrNbCN gradient coating cutters prepared using the composite film coating method of non-balance magnetically controlled sputter+electric arc plating.The superhard carboritride coatings of the ZrNbCN due to adding two kinds of elements such as Zr, Nb simultaneously in the coating, coating structure composition nitrogen content gradient, can improve the synthesis performance of cutter.The coated cutting tool has high hardness, intensity and resistance to compression, impact flexibility, wear-resisting, corrosion resisting property.Friction and the bonding between cutter and workpiece can be reduced in the ZrNbCN gradient composite coating tool cutting process, it is not likely to produce built-up edge, obtain good surface roughness, cutting force and cutting temperature more than 35% can be reduced, improve coated cutting tool antioxygenic property more than 60%, tool life and durability more than 50%.
Description
Technical field
The invention belongs to machine-building metal cutting tool field, more particularly to a kind of ZrNbCN gradient composite coatings knife
Tool and preparation method thereof.
Background technology
Cutter material not only needs very high hardness and wearability, and needs preferable bending strength and punching
Hit toughness.The ganoine thin film of tool surface has following requirement to material：1. hardness is high, anti-wear performance is good；2. stable chemical performance,
Do not chemically reacted with workpiece material；3. heat-resistant oxidized, coefficient of friction is low, with matrix adhesion-tight etc..With cutting at a high speed
The development cut, abrasion of the caused cutting heat to cutter is more much higher than conventional cutting in machining, therefore to cutter material
Hardness, intensity, wearability, toughness and impact resistance and high red hardness and chemical stability have higher requirement.Pass
Single coating material of uniting is difficult to entirely reach above-mentioned technical requirements, and coating technology is from individual layer to polynary, multilayer, stratified development.
TiCN is most widely used ternary carboritride coating, TiCN coatings due to have concurrently TiC high rigidity and TiN it is good
Good toughness, significantly improve its friction and wear behavior (Jinlong Li, Shihong Zhang, Mingxi Li.Influence
ofthe C2H2 flow rate on gradient TiCN films deposited by multi-arc ion plating
[J].Applied Surface Science,2013(283):134-144.), be widely used to milling, tapping, punching press, into
Type and the processing of gear hobbing, it is higher than the wearability of ordinary rigid alloy cutter 5-8 times in high-speed cutting.Chinese patent " steam turbine
Rotor wheel slot cutter surface TiCN multi-layer composite coatings preparation technology " (patent No. 201510564738.5) utilizes Ti, nitrogen
(N2) and acetylene gas (C2H2) TiCN coating milling cutters have been synthesized under 450 DEG C of depositing temperatures, solve 26NiCrMov145 materials
Rotor machining problem.
Although TiCN coatings have the advantages of high rigidity, low-friction coefficient, simultaneously because its heat endurance and red hardness compared with
Difference, it is suitable only for being applied to slow cutting or there is the occasion of good cooling condition, it is necessary to conventional Ti CN coating structures and preparation
Method is improved.At present, diversification is the effective way that material improves mechanical property, corrosion resistance and wearability, passes through preparation
Multicomponent composite coating, can both improve the bond strength of coating and matrix, take into account the combination property of a variety of single coatings again, significantly improve
The performance of coated cutting tool.
The carboritride such as TiCN is mainly prepared by technologies such as chemical vapour deposition techniques (CVD) at present, that is, is passed through
TiCl4(or Ti targets), CH4(or C2H2) and N2Generated Deng gas reaction, depositing temperature is usually more than 400-500 DEG C, to matrix
Have a negative impact, while gaseous carbon sources easily pollute to coating apparatus, constrain its extensive use.
The content of the invention
It is an object of the invention to overcome the shortcomings of current existing carboritride coated cutting tool performance and preparation method, knot
The advantages of closing multicomponent composite coating structure provides a kind of ZrNbCN gradient composite coatings cutter and preparation method thereof.The cutter uses
The composite film coating method of non-balance magnetically controlled sputter+electric arc plating, directly provides carbon source, and depositing temperature control using ZrNbC composition targets
System can be prepared below 300 DEG C on more extensive cutter, instrument and die matrix.The coating structure is by matrix to coating
Surface is followed successively by：The ZrNbCN gradient composite coatings of Ti transition zones, ZrNbC transition zones and nitrogen content gradient.
Coated cutting tool surface is the ZrNbCN gradient composite coatings of nitrogen content gradient, and tool matrix is with applying interlayer successively
For Ti transition zones and ZrNbC transition zones.Zr elements in the gradient composite coating cutter play solution strengthening effect to coating, carry
The high intensity and abrasion resistant qualities of coating, Nb elements improve hardness, intensity and the resistance to compression of coating, wear-resisting, corrosion resisting property, C
Element can reduce the coefficient of friction of coating surface, while the multilayered and graded structure can slow down the thermal expansion between coating and matrix
Coefficient and elastic modulus difference, improve the matching in structure and performance, increase coating and matrix adhesion and coating it is resistance to
Impact property.Therefore it is remarkably improved cutting-tool's used life and processing efficiency.
In order to realize foregoing invention purpose, the technical solution adopted by the present invention is：
ZrNbCN gradient composite coatings cutter of the present invention, tool matrix material are high-speed steel, tool steel, mould steel, hard
One kind in alloy, ceramics or cubic boron nitride, coated cutting tool are followed successively by from the inside to the outside：Tool matrix, Ti transition zones, ZrNbC
The ZrNbCN gradient composite coatings of transition zone and nitrogen content gradient.
The preparation method of ZrNbCN gradient composite coatings cutter of the present invention, depositional mode are splashed using non-equilibrium magnetic controlled
The composite film coating method with electric arc plating is penetrated, 2 non-balance magnetically controlled sputter ZrNbC composition targets, 2 electric arcs plating Ti use during deposition
Target.Electric arc plated deposition Ti transition zones are used first, and ZrNbC transition zones are then deposited using non-balance magnetically controlled sputter method and nitrogen contains
The ZrNbCN gradient composite coatings of gradient are measured, are comprised the following steps that：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol
In acetone, it is cleaned by ultrasonic each 20min, removes tool surface greasy dirt and other attachments, hair dryer is put rapidly after drying fully
Enter coating machine, be evacuated to 7.0 × 10-3Pa, 270 DEG C are heated to, are incubated 25~30min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.4Pa, opens grid bias power supply, voltage 500V, dutycycle 0.4, aura
Discharge Cleaning 30min；Reduction is biased into 400V, dutycycle 0.3, opens ion gun Ion Cleaning 20min, opens electric arc plating Ti targets
Power supply, Ti target current 70A, bias 300V, dutycycle 0.2,1~2min of Ions Bombardment；
(3) depositing Ti transition zone：Ar 0.8~0.9Pa of air pressure, bias are down to 240V, Ti target current 75A, depositing temperature 210
DEG C, 5~6min of electric arc plating Ti transition zones；
(4) ZrNbC transition zones are deposited：Ar 0.9~1.0Pa of air pressure, bias are adjusted to 150V, close electric arc plating Ti target power supplies,
190 DEG C of depositing temperature, open non-balance magnetically controlled sputter ZrNbC target current 30A, 7~8min of deposition ZrNbC transition zones；
(5) ZrNbCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.9Pa, Ar 0.8~0.9Pa of air pressure, is biased
170V, ZrNbC target current 35A, 200 DEG C of depositing temperature, 10~11min of deposition ZrNbCN composite beds；Other parameters are constant, rise
N2Air pressure, N2Air pressure raises 0.1Pa every time, deposits ZrNbCN 10~11min of composite bed, until N2Air pressure rises to 1.5Pa, then sinks
10~11min of product ZrNbCN composite beds；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
The ZrNbCN gradient composite coating cutters prepared by above-mentioned technique, tool surface are nitrogen content gradient
ZrNbCN gradient composite coatings, tool matrix are followed successively by Ti transition zones and ZrNbC transition zones with applying interlayer, to reduce remaining answer
Power, increase the bond strength between coating and tool matrix.Zr elements in the gradient composite coating cutter play solid solution to coating
Invigoration effect, improves the intensity and abrasion resistant qualities of coating, Nb elements improve coating hardness, intensity and resistance to compression, it is wear-resisting,
Corrosion resisting property, C element can reduce the coefficient of friction of coating surface, at the same the multilayered and graded structure can slow down coating and matrix it
Between thermal coefficient of expansion and elastic modulus difference, improve the matching in structure and performance, increase the adhesion of coating and matrix
With the impact resistance of coating, and the extension of coating crack can be prevented, the physics of traditional carboritride coated cutting tool can be improved
Mechanical performance.
The ZrNbCN gradient composite coatings cutter has very high hardness and toughness, red hardness energy and friction and wear characteristic,
And the extension of coating crack can be prevented.The ZrNbCN gradient composite coatings cutter can reduce in working angles between cutter and workpiece
Friction and bonding, be not likely to produce built-up edge, obtain good surface roughness, while cutting force and cutting temperature can be reduced
More than 35%, coated cutting tool antioxygenic property more than 60%, tool life and durability more than 50% are improved, should
ZrNbCN gradient composite coating cutters can be widely applied to for chilled cast iron, spheroidal graphite cast-iron, nonferrous metal and alloy it is coarse-fine
Processing, and the semifinishing and finishing of potassium steel, hardened steel and steel alloy etc..
Brief description of the drawings
Fig. 1 is the schematic cross-section of the ZrNbCN gradient composite coating cutters of the present invention；
In figure：1 it is tool matrix, 2 be Ti transition zones, 3 be ZrNbC transition zones, 4 is ZrNbCN gradient composite coatings.
Embodiment：
Two most preferred embodiments of the present invention are given below：
Embodiment one：
ZrNbCN gradient composite coatings cutter of the present invention and preparation method thereof, the cutter are common mechanically-clamped turning tool piece, its
Matrix material is：Hard alloy YG3X, the composite film coating method that depositional mode is plated using non-balance magnetically controlled sputter and electric arc, deposition
When use 2 non-balance magnetically controlled sputter ZrNbC composition targets, 2 electric arcs plate Ti targets.Electric arc plated deposition Ti transition zones are used first,
Then applied using the ZrNbCN graded composites of non-balance magnetically controlled sputter method deposition ZrNbC transition zones and nitrogen content gradient
Layer, is comprised the following steps that：：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol
In acetone, it is cleaned by ultrasonic each 20min, removes tool surface greasy dirt and other attachments, hair dryer is put rapidly after drying fully
Enter coating machine, be evacuated to 7.0 × 10-3Pa, 270 DEG C are heated to, are incubated 30min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.4Pa, opens grid bias power supply, voltage 500V, dutycycle 0.4, aura
Discharge Cleaning 30min；Reduction is biased into 400V, dutycycle 0.3, opens ion gun Ion Cleaning 20min, opens electric arc plating Ti targets
Power supply, Ti target current 70A, bias 300V, dutycycle 0.2, Ions Bombardment 2min；
(3) depositing Ti transition zone：Ar 0.8~0.9Pa of air pressure, bias are down to 240V, Ti target current 75A, depositing temperature 210
DEG C, electric arc plating Ti transition zones 6min；
(4) ZrNbC transition zones are deposited：Ar air pressure 1.0Pa, bias are adjusted to 150V, close electric arc plating Ti target power supplies, deposition temperature
190 DEG C of degree, open non-balance magnetically controlled sputter ZrNbC target current 30A, deposition ZrNbC transition zones 8min；
(5) ZrNbCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.9Pa, Ar air pressure 0.9Pa, biases 170V,
ZrNbC target current 35A, 200 DEG C of depositing temperature, deposition ZrNbCN composite beds 11min；Other parameters are constant, raise N2Air pressure, N2
Air pressure raises 0.1Pa every time, deposits ZrNbCN composite bed 11min, until N2Air pressure rises to 1.5Pa, and redeposited ZrNbCN is compound
Layer 11min；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
Embodiment two：
ZrNbCN gradient composite coatings cutter of the present invention and preparation method thereof, the cutter are common spiral bit, its cutter
Matrix material is：M2 high-speed steel, the composite film coating method that depositional mode is plated using non-balance magnetically controlled sputter and electric arc, make during deposition
With 2 non-balance magnetically controlled sputter ZrNbC composition targets, 2 electric arcs plate Ti targets.Electric arc plated deposition Ti transition zones are used first, then
The ZrNbCN gradient composite coatings of ZrNbC transition zones and nitrogen content gradient, tool are deposited using non-balance magnetically controlled sputter method
Body step is as follows：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol
In acetone, it is cleaned by ultrasonic each 20min, removes tool surface greasy dirt and other attachments, hair dryer is put rapidly after drying fully
Enter coating machine, be evacuated to 7.0 × 10-3Pa, 270 DEG C are heated to, are incubated 25min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.4Pa, opens grid bias power supply, voltage 500V, dutycycle 0.4, aura
Discharge Cleaning 30min；Reduction is biased into 400V, dutycycle 0.3, opens ion gun Ion Cleaning 20min, opens electric arc plating Ti targets
Power supply, Ti target current 70A, bias 300V, dutycycle 0.2, Ions Bombardment 1min；
(3) depositing Ti transition zone：Ar 0.8~0.9Pa of air pressure, bias are down to 240V, Ti target current 75A, depositing temperature 210
DEG C, electric arc plating Ti transition zones 5min；
(4) ZrNbC transition zones are deposited：Ar 0.9~1.0Pa of air pressure, bias are adjusted to 150V, close electric arc plating Ti target power supplies,
190 DEG C of depositing temperature, open non-balance magnetically controlled sputter ZrNbC target current 30A, deposition ZrNbC transition zones 7min；
(5) ZrNbCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.9Pa, Ar air pressure 0.9Pa, biases 170V,
ZrNbC target current 35A, 200 DEG C of depositing temperature, deposition ZrNbCN composite beds 10min；Other parameters are constant, raise N2Air pressure, N2
Air pressure raises 0.1Pa every time, deposits ZrNbCN composite bed 10min, until N2Air pressure rises to 1.5Pa, and redeposited ZrNbCN is compound
Layer 10min；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
Claims (2)
1. a kind of ZrNbCN gradient composite coatings cutter, tool matrix material be high-speed steel, tool steel, mould steel, hard alloy,
One kind in ceramics or cubic boron nitride, it is characterised in that coated cutting tool is followed successively by from the inside to the outside：Tool matrix, Ti transition zones,
The ZrNbCN gradient composite coatings of ZrNbC transition zones and nitrogen content gradient.
A kind of 2. preparation method of ZrNbCN gradient composite coating cutters as claimed in claim 1, it is characterised in that deposition side
The composite film coating method that formula is plated using non-balance magnetically controlled sputter and electric arc, answered using 2 non-balance magnetically controlled sputter ZrNbC during deposition
Target is closed, 2 electric arcs plate Ti targets.Electric arc plated deposition Ti transition zones are used first, are then deposited using non-balance magnetically controlled sputter method
The ZrNbCN gradient composite coatings of ZrNbC transition zones and nitrogen content gradient, are comprised the following steps that：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol and third
In ketone, it is cleaned by ultrasonic each 20min, removes tool surface greasy dirt and other attachments, hair dryer is put into rapidly plating after drying fully
Film machine, is evacuated to 7.0 × 10-3Pa, 270 DEG C are heated to, are incubated 25~30min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.4Pa, opens grid bias power supply, voltage 500V, dutycycle 0.4, glow discharge
Clean 30min；Reduction is biased into 400V, dutycycle 0.3, opens ion gun Ion Cleaning 20min, opens electric arc plating Ti target electricity
Source, Ti target current 70A, bias 300V, dutycycle 0.2,1~2min of Ions Bombardment；
(3) depositing Ti transition zone：Ar 0.8~0.9Pa of air pressure, bias and be down to 240V, Ti target current 75A, 210 DEG C of depositing temperature,
5~6min of electric arc plating Ti transition zones；
(4) ZrNbC transition zones are deposited：Ar 0.9~1.0Pa of air pressure, bias are adjusted to 150V, close electric arc plating Ti target power supplies, deposition
190 DEG C of temperature, open non-balance magnetically controlled sputter ZrNbC target current 30A, 7~8min of deposition ZrNbC transition zones；
(5) ZrNbCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.9Pa, Ar 0.8~0.9Pa of air pressure, biases 170V,
ZrNbC target current 35A, 200 DEG C of depositing temperature, 10~11min of deposition ZrNbCN composite beds；Other parameters are constant, raise N2Gas
Pressure, N2Air pressure raises 0.1Pa every time, deposits ZrNbCN 10~11min of composite bed, until N2Air pressure rises to 1.5Pa, redeposited
10~11min of ZrNbCN composite beds；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
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| CN116162917A (en) * | 2023-04-26 | 2023-05-26 | 赣州澳克泰工具技术有限公司 | Multilayer coating cutter and preparation method thereof |
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| CN102443772A (en) * | 2010-09-30 | 2012-05-09 | 鸿富锦精密工业（深圳）有限公司 | Coated part and preparation method thereof |
| CN103097579A (en) * | 2010-09-21 | 2013-05-08 | 西铁城控股株式会社 | White rigid decorative member |
| CN105063554A (en) * | 2015-07-31 | 2015-11-18 | 山东大学 | ZrSiCN nano-composite gradient coating cutter and preparation process thereof |
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| CN103097579A (en) * | 2010-09-21 | 2013-05-08 | 西铁城控股株式会社 | White rigid decorative member |
| CN102443772A (en) * | 2010-09-30 | 2012-05-09 | 鸿富锦精密工业（深圳）有限公司 | Coated part and preparation method thereof |
| CN105063554A (en) * | 2015-07-31 | 2015-11-18 | 山东大学 | ZrSiCN nano-composite gradient coating cutter and preparation process thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116162917A (en) * | 2023-04-26 | 2023-05-26 | 赣州澳克泰工具技术有限公司 | Multilayer coating cutter and preparation method thereof |
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