CN107404330A - The clamped beam microwave receiver front end that internet of things oriented carrier energy is collected - Google Patents
The clamped beam microwave receiver front end that internet of things oriented carrier energy is collected Download PDFInfo
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- CN107404330A CN107404330A CN201710698769.9A CN201710698769A CN107404330A CN 107404330 A CN107404330 A CN 107404330A CN 201710698769 A CN201710698769 A CN 201710698769A CN 107404330 A CN107404330 A CN 107404330A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/1607—Supply circuits
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/22—Circuits for receivers in which no local oscillation is generated
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Abstract
The invention discloses the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, including the output of microwave antenna, microwave filter, low-noise amplifier, online clamped beam demodulator, demodulated signal, AC/DC modular converters, rechargeable battery and dc source.Pass through the demodulation function and LPF function of online clamped beam demodulator, only need to measure the capacitance variations on the first capacitor plate and the second capacitor plate, the demodulation of am signals can be achieved, frequency mixer, local oscillator and the intermediate-frequency filter in traditional microwave receiver front end need not be used, so as to simplify system architecture, system power dissipation is reduced.Meanwhile the carrier wave of am signals is converted to DC voltage by AC/DC modular converters, is finally stored in rechargeable battery, after rechargeable battery is in parallel with dc source, the self-powered of low-noise amplifier is realized.
Description
Technical field
The present invention proposes the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, and belongs to micro- electricity
The technical field of sub- mechanical system (MEMS).
Background technology
In recent years, the concept of Internet of Things all turns into upsurge in the whole nation or even the whole world, more and more enters and influences people
Life, and being connected for thing and thing be unable to do without microwave transmitting and receiving front end.But microwave current receiver front end have it is complicated and
The characteristics of power consumption is higher, than can just obtain intermediate-freuqncy signal that late-class circuit can handle, it is necessary to wave filter if desired for two level mixing
Filtering is realized, and accounts for compared with useful signal the carrier energy of exhausted large scale and is all wasted.It is exactly because in this way, a kind of low
Development of the microwave receiver front end of power consumption and simplification for Internet of Things is particularly significant.Nowadays, MEMS demodulators are as a kind of
Emerging technology has obtained extensive research and development, and its application in microwave receiver front end also has potentiality very much.
The content of the invention
In order to overcome the deficiencies in the prior art, the present invention provides a kind of consolidating for internet of things oriented carrier energy collection
Strutbeam microwave receiver front end, using online clamped beam demodulator, not only realize online microwave amplitude modulation signal demodulation
Function, while the energy storage for the carrier signal that exhausted large scale is accounted for compared with useful signal is collected among rechargeable battery.Fill
Battery is connected with after dc source parallel connection with low-noise amplifier, realizes the self-powered of low-noise amplifier.
To achieve the above object, the technical solution adopted by the present invention is：
The clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, the output end connection of microwave antenna
To the input of microwave filter, the output end of the microwave filter is connected with the input of low-noise amplifier, described low
The output end of noise amplifier is connected with the signal input part coplanar waveguide transmission line of online clamped beam demodulator, described online
The input of the signal output part coplanar waveguide transmission line connection AC/DC modular converters of formula clamped beam demodulator, the AC/DC turn
The output termination rechargeable battery of block is changed the mold, is powered after the rechargeable battery is in parallel with dc source for low-noise amplifier；Online
The the first metal Pad and the second metal Pad of formula clamped beam demodulator are connected with demodulated signal output end.
Further：Receiver uses the microwave antenna reception signal, and access microwave filter is filtered, after filtering
Signal amplify into low-noise amplifier, exaggerated microwave signal enters online clamped beam demodulator, and input microwave is believed
Low-frequency modulation signal in number is solved by the first metal pad and the second metal pad of the online clamped beam demodulator
Signal is adjusted, demodulated signal exported by demodulated signal output end, and the carrier signal for inputting microwave signal medium-high frequency part can be from
Signal output part coplanar waveguide transmission line exports, and is connected to AC/DC modular converters, and AC/DC modular converters change carrier signal
For DC voltage, and by energy savings among rechargeable battery, rechargeable battery is in parallel with dc source, realizes low-noise amplifier
Self-powered, improve the utilization ratio of dc source.
Further：The online clamped beam demodulator is used to utilize its demodulation function and LPF function, only
Need to measure the capacitance variations on the first capacitor plate and the second capacitor plate, you can realize the demodulation of am signals, no
Frequency mixer, local oscillator and the wave filter in legacy demodulator are needed, enormously simplify system architecture；It is described online clamped
Beam demodulator device includes clamped beam, microwave signal line, the first anchor area, the second anchor area, substrate, the first capacitor plate, the second capacitance pole
Plate, second dielectric layer, the 3rd dielectric layer and first medium layer；The substrate top surface is provided with ground wire one and ground wire two, and institute
State ground wire one and ground wire two be located at the upper surface both ends of substrate, the second dielectric layer, first medium layer and the 3rd dielectric layer from
On the left-to-right substrate surface being set in turn between ground wire one and ground wire two；First capacitor plate is located in second dielectric layer,
And the bottom of first capacitor plate is in contact with the substrate surface；Microwave signal line is located in first medium layer, and institute
The bottom for stating microwave signal line is in contact with the substrate surface；Second capacitor plate is located in the 3rd dielectric layer, and described
The bottom of two capacitor plates is in contact with the substrate surface；The first anchor area is provided with the ground wire one, on the ground wire two
The second anchor area is provided with, one end of the clamped beam on the inside of the first anchor area with being in contact, the other end of the clamped beam and
It is in contact on the inside of two anchor areas；Second metal pad one end connects the first capacitor plate, second metal by metal wire two
The pad other end connects the second capacitor plate by metal wire one, and the metal wire one is embedded in below ground wire two, is arranged in lining
On bottom, and do not contacted with the surface of ground wire two, the metal wire two is embedded in below ground wire one, is arranged on substrate, and and ground wire
One surface does not contact.
Preferably：The first medium layer, second dielectric layer, the 3rd dielectric layer are insulating silicon nitride dielectric layer.
Preferably：The substrate is silicon substrate.
Beneficial effect：
The clamped beam microwave receiver front end that the internet of things oriented carrier energy of the present invention is collected is online demodulation, is only needed
Measure the capacitance size on the first metal Pad and the second metal Pad of online clamped beam demodulator 3, you can realize microwave
The demodulation of signal, it is not necessary to be mixed structure, local oscillator and intermediate-frequency filter, greatly simplified traditional microwave receiver
Structure, reduce system power dissipation.
The clamped beam microwave receiver front end that the internet of things oriented carrier energy of the present invention is collected has carrier energy collection
Function.Due to equivalent to one low pass filter of online clamped beam demodulator, so the low frequency modulations letter in input signal
Number it can be obtained by the online clamped beam demodulator, and the carrier signal of HFS can be from signal output part co-planar waveguide
Transmission line exports, and is connected to AC/DC modular converters, realizes that carrier signal is converted to DC voltage, and by energy savings in charging
Among battery.Rechargeable battery is in parallel with dc source, realizes the self-powered of low-noise amplifier.
Brief description of the drawings
Fig. 1 is the structured flowchart for the clamped beam microwave receiver front end that internet of things oriented carrier energy is collected；
Fig. 2 is the AA' profiles of online clamped beam demodulator 3；
Fig. 3 is the BB' profiles of online clamped beam demodulator 3.
Figure includes：Microwave antenna 1, microwave filter 2, online clamped beam demodulator 3, demodulated signal output 4, AC/
It is DC modular converters 5, rechargeable battery 6, signal input part coplanar waveguide transmission line 7, signal output part coplanar waveguide transmission line 8, solid
Strutbeam 9, the 10-1 of ground wire one, the 10-2 of ground wire two, microwave signal line 11,1 end 11-1 of microwave signal line, 2 ends of microwave signal line
11-2, the first metal Pad12, the second metal Pad13, the first anchor area 14, the second anchor area 15, silicon substrate 16, the first capacitor plate
17th, the second capacitor plate 18, second dielectric layer 19, the 3rd dielectric layer 20, first medium layer 21, low-noise amplifier 22, direct current
Power supply 23, metal wire 1, metal wire 2 25.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these examples are merely to illustrate this
Invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are various to the present invention's
The modification of the equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, receiver uses
The reception signal of microwave antenna 1, access microwave filter 2 are filtered, and filtered signal amplifies into low-noise amplifier 22,
Exaggerated microwave signal enters online clamped beam demodulator 3, and the low-frequency modulation signal inputted in microwave signal passes through described
First metal pad of online clamped beam demodulator 3 is the first metal polar plate 12 and the second metal pad i.e. the second metal polar plate 13
Demodulated signal is obtained, demodulated signal is exported by demodulated signal output end 4, and inputs the carrier wave letter of microwave signal medium-high frequency part
It number can be exported from signal output part coplanar waveguide transmission line 8, and be connected to AC/DC modular converters 5, AC/DC modular converters 5 are by carrier wave
Signal is converted to DC voltage, and by energy savings among rechargeable battery 6, rechargeable battery 6 is in parallel with dc source 23, realizes
The self-powered of low-noise amplifier 22, improve the utilization ratio of dc source.
The clamped beam microwave receiver front end that the internet of things oriented carrier energy is collected includes microwave antenna 1, microwave is filtered
Ripple device 2, low-noise amplifier 22, online clamped beam demodulator 3, demodulated signal output 4, AC/DC modular converters 5, charging electricity
Pond 6 and dc source 23；The microwave antenna 1 is used to receive microwave signal；The microwave filter 2 is used to filter out microwave antenna
Clutter in 1 signal received；The low-noise amplifier 22 is used for the microwave signal for amplifying the output of microwave filter 2, and
Access online clamped beam demodulator 3；The online clamped beam demodulator 3 is used to utilize its demodulation function and LPF work(
Can, it is only necessary to measure the capacitance variations on the first capacitor plate 12 and the second capacitor plate 13, you can realize am signals
Demodulation, it is not necessary to it is significantly simple using frequency mixer, local oscillator and the intermediate-frequency filter in traditional microwave receiver front end
System architecture is changed；The demodulated signal output 4 is used to export demodulated signal；The AC/DC modular converters 5 are the lists of dual-port
First integration module, the carrier signal for signal output part coplanar waveguide transmission line 8 to be exported are converted into DC voltage；It is described to fill
Battery be used for store AC/DC modular converters 5 change after DC energy, and it is in parallel with dc source 23 after be low noise amplification
Device 22 is powered.
The output end of the microwave antenna 1 is connected to the input of microwave filter 2, the output of the microwave filter 2
End is connected with the input of low-noise amplifier 22, the output end of the low-noise amplifier 22 and online clamped beam demodulator
3 signal input part coplanar waveguide transmission line 7 is connected, the signal output part co-planar waveguide of the online clamped beam demodulator 3
Transmission line 8 connects the input of AC/DC modular converters 5, and the output termination rechargeable battery 6 of the AC/DC modular converters 5 is described
Powered after rechargeable battery 6 is in parallel with dc source 23 for low-noise amplifier 22；First metal of online clamped beam demodulator 3
Pad12 and the second metal Pad13 are connected with demodulated signal output end 4.
Fig. 2 and Fig. 3 is the AA' profiles and BB' profiles of online clamped beam demodulator 3, as shown in Figure 1, Figure 2, Fig. 3 institutes
Show, the online clamped beam demodulator 3 includes clamped beam 9, microwave signal line 11, the first anchor area 14, the second anchor area 15, substrate
16th, the first capacitor plate 17, the second capacitor plate 18, second dielectric layer 19, the 3rd dielectric layer 20 and first medium layer 21；It is described
The upper surface of substrate 16 is provided with the 10-1 of ground wire one and the 10-2 of ground wire two, and the 10-1 of the ground wire one and the 10-2 of ground wire two are located at substrate
16 upper surface both ends, the second dielectric layer 19, the dielectric layer 20 of first medium layer 21 and the 3rd are from left to right set in turn in
On the surface of substrate 16 between the 10-1 of ground wire one and the 10-2 of ground wire two；First capacitor plate 17 is located in second dielectric layer 19, and
The bottom of first capacitor plate 17 is in contact with the surface of substrate 16；Microwave signal line 11 is located at first medium layer 21
It is interior, and the bottom of the microwave signal line 11 is in contact with the surface of substrate 16；Second capacitor plate 18 is located at the 3rd medium
In layer 20, and the bottom of second capacitor plate 18 is in contact with the surface of substrate 16；Set on the 10-1 of ground wire one
There is the first anchor area 14, the second anchor area 15, one end of the clamped beam 9 and the first anchor area 14 are provided with the 10-2 of ground wire two
Inner side is in contact, and the other end of the clamped beam 9 is in contact with the inner side in the second anchor area 15；Second metal pad12 one end leads to
Cross metal wire 2 25 and connect the first capacitor plate 17, the other end of the second metal pad12 passes through the connection of metal wire 1 the
Two capacitor plates 18, the metal wire 1 are embedded in below the 10-2 of ground wire two, arrangement over substrate 16, and with the 10-2 of ground wire two
Surface is not contacted, and the metal wire 2 25 is embedded in below the 10-1 of ground wire one, arrangement over substrate 16, and with the 10-1 tables of ground wire one
Face does not contact.The first medium layer 21, second dielectric layer 19, the 3rd dielectric layer 20 are insulating silicon nitride dielectric layer, described
Substrate 16 is silicon substrate.
Due to equivalent to one low pass filter of online clamped beam demodulator, the tune for including low frequency in microwave signal is inputted
Signal fs and high frequency processed carrier signal fc, wherein low-frequency modulation signal fs are after the low pass filter, from the first metal
Pad12 and the second metal Pad13 are output to demodulated signal output end 4, and the carrier signal fc of HFS can be from signal output
End coplanar waveguide transmission line 8 exports, the carrier signal that AC/DC modular converters 5 export signal output part coplanar waveguide transmission line 8
It is converted into DC voltage.
The signal input part coplanar waveguide transmission line 7 of signal from online clamped beam demodulator 3 inputs；What it is when input is one
When individual power is P microwave signal, microwave signal can produce electrostatic force to clamped beam 9 so that and clamped beam 9 is subjected to displacement,
First capacitor plate 17 is connected with the second capacitor plate 18 by the second metal pad13, as a pole plate, so that clamped beam
Electric capacity between 9 and lower section pole plate changes；The size of electrostatic force is related to microwave signal power, by measuring pad with it is clamped
Electric capacity C between beam 9bThe power P size of microwave signal can be extrapolated；Electric capacity CbRelation with signal power P is：
Wherein A1It is the area of microwave signal line 11 and the overlapping part of clamped beam 9, A2It is the first capacitor plate 17 and clamped beam
9th, the second capacitor plate 18 and the gross area of the overlapping part of clamped beam 9, g0It is the thickness of air layer between pole plate and clamped beam 9, g1
It is the thickness of dielectric layer on pole plate, εrIt is the relative dielectric constant of dielectric layer, k1It is the coefficient of elasticity of clamped beam 9, Z0It is coplanar ripple
Lead transmission line CPW characteristic impedance.
As can be seen that electric capacity C from formulabSize and the power P of input microwave signal be that a fixed function closes
System.When input signal is that the signal of two frequencies of fc and fs is included in an am signals, namely input signal, input is believed
Number power P change with low-frequency modulation signal fs, because the vibration frequency of mechanical system is far smaller than am signals
Carrier frequency fc, so clamped beam only can in am signals low-frequency modulation signal fs respond, without respond carry
Ripple signal fc.The result that clamped beam responds for low-frequency modulation signal is reflected in the change of capacitance size, so measurement electric capacity
Size be the signal that can be demodulated.
Described online clamped beam demodulator 3 being capable of direct demodulated signal, it is not necessary to frequency mixer, local oscillator and filter
Ripple device；AC/DC modular converters 5 and rechargeable battery 6 can collect the energy of carrier signal, and improve dc source utilizes effect
Rate；The clamped beam microwave receiver front end that the internet of things oriented carrier energy is collected is that one kind is based on online clamped beam demodulator
3 microwave receiver front end, input range modulated signal is demodulated using online clamped beam demodulator 3, and passes through survey
Amount capacitance variations can be completed to demodulate, and obtain modulated signal, greatly simplified the structure of traditional microwave receiver, reduce and be
System power consumption, it is only necessary to which consuming few energy just can realize the function of reception signal；Microwave signal is inputted from online clamped beam
The output of signal output part coplanar waveguide transmission line 8 of demodulator 3 is followed by AC/DC modular converters 5, realizes carrier signal to direct current
The conversion of pressure, and by energy storage among rechargeable battery 6, rechargeable battery 6 is in parallel with dc source 23, realizes low noise amplification
The self-powered of device.
The preparation method for the clamped beam microwave receiver front end that internet of things oriented carrier energy is collected specifically includes following step
Suddenly.
1) preparing substrate：Silicon is selected as substrate；
2) lithographic transfer line and capacitor plate：Resist coating and chemical wet etching go out microwave signal line 11, the 10-1 of ground wire one,
The 10-2 of line two, the first metal Pad12, the second metal Pad13, the shape of the first capacitor plate 17 and the second capacitor plate 18；
3) Au layers are sputtered：In entirely processing plane sputteringThick Au layers；
4) photoetching Au layers：Peel off unwanted photoresist, formed microwave signal line 11, the 10-1 of ground wire one, the 10-2 of ground wire two,
First metal Pad12, the second metal Pad13, the first capacitor plate 17 and the second capacitor plate 18；
5) photoetching, deposit SiN dielectric layers：Microwave signal line 11, the first capacitor plate 17 and the top of the second capacitor plate 18
Subregion is grown with plasma-reinforced chemical vapor deposition processSi dielectric layers and photoetching；
6) polyimide sacrificial layer is deposited：In entirely processing 1.6 microns of thick polyimide sacrificial layers of planar deposition；
7) Ti/Au/Ti layers are sputtered：The down payment Ti/Au/Ti layers for plating are sputtered on polyimide layer, thickness is
500/1500/Form the down payment Seed Layer for electroplating clamped beam.
8) photoetching Ti/Au/Ti layers：Photoetching titanium/gold/titanium (Ti/Au/Ti) layer, retain the local photoetching that need not be electroplated
Glue；
9) Au layers are electroplated：The layer gold of clamped beam is electroplated, gold is electroplated in 55 ° of cyano group solution, the thickness for electroplating layer gold is micro- for 2
Rice；
10) discharge polyimide sacrificial layer and corrode down payment Ti/Au/Ti layers：Acetone removes the photoresist of remaining, then with aobvious
Polyimide sacrificial layer under shadow liquid dissolving clamped beam, and be dehydrated with absolute ethyl alcohol, form hanging fixed beam structure.
Difference with the prior art of the present invention：
The clamped beam microwave receiver front end that the internet of things oriented carrier energy of the present invention is collected is a kind of based on online
The microwave receiver front end of clamped beam demodulator, input range modulated signal is solved using online clamped beam demodulator
Adjust, and can complete to demodulate by measuring capacitance variations, obtain modulated signal.Therefore structure, local oscillator need not be mixed
And intermediate-frequency filter, the structure of traditional microwave receiver is greatly simplified, reduces system power dissipation, it is only necessary to is consumed few
Energy just can realize the function of reception signal.
Described receiver front end has the function that carrier energy is collected.Microwave signal is inputted from online clamped beam demodulator
The output end output of device is followed by AC/DC modular converters, realizes conversion of the carrier signal to DC voltage, and by energy storage in filling
Among battery.Rechargeable battery is in parallel with dc source, realizes the self-powered of low-noise amplifier.
Meet that the structure of conditions above can be considered the clamped beam microwave that the internet of things oriented carrier energy of the present invention is collected
Receiver front end.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (5)
- A kind of 1. clamped beam microwave receiver front end that internet of things oriented carrier energy is collected, it is characterised in that：Microwave antenna (1) Output end be connected to the inputs of microwave filter (2), the output end and low-noise amplifier of the microwave filter (2) (22) input is connected, and the output end of the low-noise amplifier (22) and the signal of online clamped beam demodulator (3) are defeated Enter to hold coplanar waveguide transmission line (7) to be connected, the signal output part coplanar waveguide transmission line of the online clamped beam demodulator (3) (8) input of AC/DC modular converters (5), the output termination rechargeable battery (6) of the AC/DC modular converters (5), institute are connected State rechargeable battery (6) it is in parallel with dc source (23) after for low-noise amplifier (22) power；Online clamped beam demodulator (3) The first metal Pad (12) and the second metal Pad (13) be connected with demodulated signal output end (4).
- 2. the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 1 is collected, its It is characterised by：Receiver uses the microwave antenna (1) reception signal, and access microwave filter (2) is filtered, filtered Signal amplifies into low-noise amplifier (22), and exaggerated microwave signal enters online clamped beam demodulator (3), and input is micro- The the first metal pad (12) and the second gold medal that low-frequency modulation signal in ripple signal passes through the online clamped beam demodulator (3) Category pad (13) obtains demodulated signal, and demodulated signal is exported by demodulated signal output end (4), and inputs microwave signal medium-high frequency Partial carrier signal can export from signal output part coplanar waveguide transmission line (8), and be connected to AC/DC modular converters (5), AC/ Carrier signal is converted to DC voltage by DC modular converters (5), and by energy savings among rechargeable battery (6), rechargeable battery (6) it is in parallel with dc source (23), the self-powered of low-noise amplifier (22) is realized, improves the utilization ratio of dc source.
- 3. the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 1 is collected, its It is characterised by：The online clamped beam demodulator (3) is used to utilize its demodulation function and LPF function, it is only necessary to measures Capacitance variations on first capacitor plate (17) and the second capacitor plate (18), you can realize the demodulation of am signals, no Frequency mixer, local oscillator and the wave filter in legacy demodulator are needed, enormously simplify system architecture；It is described online clamped Beam demodulator device (3) includes clamped beam (9), microwave signal line (11), the first anchor area (14), the second anchor area (15), substrate (16), the One capacitor plate (17), the second capacitor plate (18), second dielectric layer (19), the 3rd dielectric layer (20) and first medium layer (21)；Substrate (16) upper surface is provided with ground wire one (10-1) and ground wire two (10-2), and the ground wire one (10-1) and Ground wire two (10-2) is located at the upper surface both ends of substrate (16), the second dielectric layer (19), first medium layer (21) and the 3rd Dielectric layer (20) is from left to right set in turn on substrate (16) surface between ground wire one (10-1) and ground wire two (10-2)；The One capacitor plate (17) is located in second dielectric layer (19), and the bottom of first capacitor plate (17) and the substrate (16) Surface is in contact；Microwave signal line (11) is located in first medium layer (21), and the bottom of the microwave signal line (11) and institute Substrate (16) surface is stated to be in contact；Second capacitor plate (18) is located in the 3rd dielectric layer (20), and second capacitor plate (18) bottom is in contact with the substrate (16) surface；The first anchor area (14) is provided with the ground wire one (10-1), it is described The second anchor area (15) is provided with ground wire two (10-2), one end of the clamped beam (9) on the inside of the first anchor area (14) with connecting Touch, the other end of the clamped beam (9) on the inside of the second anchor area (15) with being in contact；Second metal pad (12) one end passes through Metal wire two (25) connects the first capacitor plate (17), and the other end of the second metal pad (12) passes through metal wire one (24) The second capacitor plate (18) is connected, the metal wire one (24) is embedded in below ground wire two (10-2), is arranged on substrate (16), And do not contacted with ground wire two (10-2) surface, the metal wire two (25) is embedded in below ground wire one (10-1), is arranged in substrate (16) on, and do not contacted with ground wire one (10-1) surface.
- 4. the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 3 is collected, its It is characterised by：The first medium layer (21), second dielectric layer (19), the 3rd dielectric layer (20) are insulating silicon nitride medium Layer.
- 5. the clamped beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 3 is collected, its It is characterised by：The substrate (16) is silicon substrate.
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| CN103281078A (en) * | 2013-06-19 | 2013-09-04 | 东南大学 | Frequency divider and preparation method based on micromechanics clamped beam capacitive power sensor |
| CN104771140A (en) * | 2015-03-13 | 2015-07-15 | 江苏物联网研究发展中心 | RFID-based self-powered intelligent sensor |
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