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CN107342363A - Display base plate and preparation method thereof - Google Patents

Display base plate and preparation method thereof Download PDF

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Publication number
CN107342363A
CN107342363A CN201710742638.6A CN201710742638A CN107342363A CN 107342363 A CN107342363 A CN 107342363A CN 201710742638 A CN201710742638 A CN 201710742638A CN 107342363 A CN107342363 A CN 107342363A
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CN
China
Prior art keywords
base plate
cushion
display base
barrier structure
viewing area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710742638.6A
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Chinese (zh)
Inventor
王有为
张嵩
蔡鹏�
宋平
郭远征
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201710742638.6A priority Critical patent/CN107342363A/en
Publication of CN107342363A publication Critical patent/CN107342363A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention provides a kind of display base plate, belongs to display technology field, and it can solve existing during display base plate is prepared, and cushion can carve the problem of disconnected because of laser ablation.The display base plate of the present invention includes underlay substrate and the cushion on the underlay substrate, and the underlay substrate is divided into viewing area and positioned at the marginal zone of the non-display area;The cushion is located at viewing area and the part marginal zone of the underlay substrate, and the position without cushion is groove in the marginal zone;Barrier structure is additionally provided with the underlay substrate, the barrier structure is located at least in the groove.

Description

Display base plate and preparation method thereof
Technical field
The invention belongs to display technology field, and in particular to a kind of display base plate and preparation method thereof.
Background technology
Organic electroluminescence device (OLED) due to self-luminous, high brightness, high-contrast, low-work voltage, can be soft Property display the features such as, be referred to as the display device for most having application prospect.
Flexible oled display substrate is usually first to be initially formed cushion in the substrate of display master blank in the preparation (Buffer layers), re-forms multiple OLED, OLED drive and interlayer insulating film etc..Substrate is divided into multiple viewing areas and will The spacer region that viewing area separates, display master blank is cut along spacer region, display master blank can be cut into multiple including viewing area and portion Divide the flexible oled display substrate of spacer region (i.e. marginal zone).
In the prior art, the mode of generally use laser cutting is cut to display master blank.Due to laser cutting in itself In the presence of certain ablation distance, and cushion is generally made up of inorganic material, therefore, OLED is easily caused in laser cutting Fracture (crack) occurs for the cushion at display base plate marginal zone, and then penetrates into steam, oxygen etc., causes OLED to show Show that substrate edges reliability has problem, influence its life-span.
The content of the invention
It is contemplated that at least solves one of technical problem present in prior art, there is provided one kind can be avoided because of buffering Fault rupture influences the display base plate in display base plate life-span.
Technical scheme is a kind of display base plate used by solving present invention problem, including underlay substrate and located at institute The cushion on underlay substrate is stated, the underlay substrate is divided into viewing area and positioned at the marginal zone of the non-display area;
The cushion is in viewing area and the part marginal zone of the underlay substrate, the marginal zone without buffering The position of layer is groove;
Barrier structure is additionally provided with the underlay substrate, the barrier structure is located at least in the groove.
Preferably, the groove forms at least one annular around the viewing area.
Preferably, the barrier structure includes being located at the main part of groove location and extended to from main part in marginal zone Cushion on extension.
Preferably, the barrier structure and the distance of the side of the display base plate are more than or equal to 100 microns.
Preferably, display base plate also includes:
Source-drain layer located at the viewing area, the source-drain layer is above the cushion;
The barrier structure is set with the source-drain layer with layer.
Preferably, display base plate also includes:
Interlayer insulating film, the interlayer insulating film is above the cushion and the barrier structure.
Another technical scheme is a kind of preparation method of display base plate used by solving present invention problem, including:
Cushion is formed above the substrate of display master blank, the substrate is divided into multiple viewing areas and for that described will show Show the spacer region that region separates;
Cushion in the spacer region of part is removed, forms groove;
At least barrier structure is formed in the groove location;
The display master blank for completing above-mentioned steps is cut into multiple display base plates, wherein cutting obtained each display Substrate includes viewing area and is the part spacer region positioned at the marginal zone of the non-display area, the marginal zone, and described The groove and barrier structure are provided with marginal zone.
Preferably, the barrier structure includes being located at the main part of groove location and extended to from main part in marginal zone Cushion on extension.
Preferably, the source-drain layer located at the viewing area is also included in the substrate, the source-drain layer is located at the buffering Layer top;
The barrier structure is formed with source-drain layer in a patterning processes.
Preferably, it is described also to include after the groove location forms barrier structure:
Interlayer insulating film is formed above the cushion and the barrier structure.
The display base plate of the present invention includes underlay substrate and cushion, and underlay substrate is divided into viewing area and marginal zone, buffering Floor covers the viewing area and part edge area of underlay substrate, and does not have the region (i.e. groove location) of cushion in fringe region then Provided with barrier structure, due to the presence of the barrier structure, can make, when preparing the display base plate, to avoid laser ablation from causing to show The buffering fault rupture in area, so as to avoid having an impact to display base plate.
Brief description of the drawings
Fig. 1 is the overlooking the structure diagram of the display base plate of embodiments of the invention 1;
Fig. 2 is the cross section structure schematic diagram of the display base plate of embodiments of the invention 1;
Fig. 3 is the partial cross section structural representation of the display base plate of embodiments of the invention 1;
Figure 4 and 5 are using the structural representation that cushion is formed in the preparation method of the display base plate of embodiments of the invention 2 Figure;
Fig. 6 is using the structural representation that groove is formed in the preparation method of the display base plate of embodiments of the invention 2;
Fig. 7 is using the schematic diagram that barrier structure is formed in the preparation method of the display base plate of embodiments of the invention 2;
Fig. 8 is using the structural representation that cushion is formed in the preparation method of the display base plate of embodiments of the invention 2.
Embodiment
To make those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and specific embodiment party Formula is described in further detail to the present invention.
Embodiment 1:
As shown in Fig. 1 values 3, the present embodiment provides a kind of display base plate 1, and the display base plate 1 is preferably used for organic light emission The array base palte of diode (OLED) display device.
As illustrated in fig. 1 and 2, the plate of display base plate 1 includes underlay substrate 2 and the cushion 3 on underlay substrate 2, lining Substrate 2 divides the marginal zone 1-2 for viewing area 1-1 and positioned at viewing area 1-1 peripheries;Cushion 3 is located at the display of underlay substrate 2 The position without cushion 3 is groove in area 1-1 and part edge area 1-2, marginal zone 1-2;Blocking junction is additionally provided with underlay substrate 2 Structure 4, barrier structure 4 are located at least in groove.
Specifically, as shown in Figures 1 to 3, viewing area 1-1 and marginal zone 1-2 are divided on underlay substrate 2, is set in the 1-1 of viewing area There are the components such as thin film transistor (TFT) (TFT, figure not shown in), OLED 6, marginal zone 1-2 is surrounded on the outer of viewing area 1-1 Enclose, wherein without the structure for being directly used in display.Cushion 3 covers most of region (including whole viewing area 1- of underlay substrate 2 1 and part edge area 1-2), it is used to make other structures thereon more closely to be combined with underlay substrate 2, and marginal zone 1-2 domains In there is no cushion 3 region (i.e. groove location) be then provided with barrier structure 4, cushion 3 can be divided using the barrier structure 4 and be Close to viewing area 1-1 and remote viewing area 1-1 part, so as to when preparing the display base plate 1, even if laser ablation causes Portion of buffer layer 3 away from viewing area 1-1 produces fracture, does not also interfere with the portion of buffer layer 3 close to viewing area 1-1, from And avoid having an impact display base plate 1.
Preferably, underlay substrate 2 is flexible substrate substrate, and it can be formed by flexible material, such as metallic film, ultra-thin glass Glass etc..
Preferably, barrier structure 4 and the distance of the side of display base plate 1 are more than or equal to 100 microns.
Wherein, the side of display base plate 1 refers to the outermost each side of display base plate 1.Display base plate 1 is passed through by display master blank What laser cutting formed, the distance of laser ablation is about 80 microns, in the present embodiment, in order to avoid barrier structure 4 is burnt by laser Erosion destroys, and preferably sets the distance of barrier structure 4 and the side of display base plate 1 and is more than or equal to 100 microns, certainly, specifically Distance value can be configured according to actual conditions, will not be repeated here.
Preferably, groove forms at least one circular viewing area 1-1 annular.
As shown in figure 1, groove is in the annular around viewing area 1-1, that is to say, that barrier structure 4 is in around viewing area 1-1 Loop configuration, viewing area 1-1 cushion 3 cushion 3 completely outermost with display base plate 1 is separated, so as to have Effect avoids the laser ablation in the preparation process of display base plate 1 from impacting viewing area 1-1 cushion 3.It is further preferred that As shown in figure 3, groove forms two annular concentrics around viewing area 1-1, so as to further protect delaying for viewing area 1-1 Rush layer 3.
Preferably, display base plate 1 also includes:Interlayer insulating film 5, interlayer insulating film 5 are located at cushion 3 and barrier structure 4 Top.
Interlayer insulating film 5 can be used for the different interstructural insulation (such as source-drain layer and electrode) of display, as shown in Fig. 2 its The Zone Full of display base plate 1 is covered, and in the 1-2 of marginal zone, interlayer insulating film 5 (ILD layer) and cushion 3 or blocking junction Structure 4 directly contacts.
Preferably, barrier structure 4 includes being located at the main part 4-1 of groove location and extends to edge from main part 4-1 The extension 4-2 on cushion 3 in area 1-2.
Due to steam, oxygen etc. may be between cushion 3 and interlayer insulating film 5 interlayer spacings in penetrate into, influence The performance of OLED 6 in the 1-1 of viewing area and life-span.Therefore in the present embodiment, it is preferred that as shown in Fig. 2 barrier structure 4 wraps Main part 4-1 and extension 4-2 are included, extension 4-2 covering parts cushion 3, i.e. barrier structure 4 protrude from the surface of cushion 3, So as to which the barrier structure 4 to maintain an equal level relative to thickness and cushion 3, above-mentioned barrier structure 4 can in a disguised form increase interlayer insulating film 5 With the contact area of the structure that is disposed below (i.e. with the contact area sum of cushion 3 and barrier structure 4), that is to say, that The path of the infiltration display base plate 1 such as above-mentioned barrier structure 4 can extend and change steam, oxygen, so as to further effectively reduce Steam, oxygen etc. enter viewing area 1-1, and then improve the edge seal characteristic of display base plate 1 and the life-span of display base plate 1.
Preferably, barrier structure 4 is formed by metal material, will can effectively stop that steam, oxygen etc. penetrate into display base plate 1。
Preferably, display base plate 1 also includes:Located at viewing area 1-1 source-drain layer, source-drain layer is located at the top of cushion 3;Resistance Structure 4 is kept off to set with layer with source-drain layer.
The viewing area 1-1 top of cushion 3 is provided with TFT structure (not shown), barrier structure 4 preferably with source therein Drop ply (i.e. source, drain electrode) is set with layer, so, barrier structure 4 can be formed while source-drain layer is prepared, so as to without single again The step of only increase prepares barrier structure 4, simplifies preparation technology.Source-drain layer is generally formed by metal material, such as titanium, aluminium etc.. The formation material of corresponding source-drain layer, in the present embodiment, barrier structure 4 can be made up of one layer or multilayer knot metals such as titanium, aluminium Structure.
Preferably, as shown in figure 3, in the 1-1 of viewing area, the top of interlayer insulating film 5 is provided with OLED 6, block water cofferdam 7th, the structure such as the first inorganic water blocking layer 8, the first organic buffer layer 9, second inorganic water blocking layer 10.Wherein, OLED 6 is with blocking water Cofferdam 7 on the interlayer insulating film 5, and the cofferdam 7 that blocks water with respect to OLED 6 closer to marginal zone 1-2, the first inorganic water blocking layer 8 are located at OLED 6 and block water on cofferdam 7, cover whole viewing area 1-1, and the corresponding OLED 6 of the first organic buffer layer 9 is set In on the first inorganic water blocking layer 8, the second inorganic water blocking layer 10 covers whole viewing area 1-1 on the first organic buffer layer 9.
A kind of display base plate 1, including underlay substrate 2 and cushion 3 are present embodiments provided, underlay substrate 2 divides for display Area 1-1 and marginal zone 1-2, the viewing area 1-1 and part edge area 1-2 of the covering underlay substrate 2 of cushion 3, and marginal zone 1-2 domains In there is no cushion 3 region (i.e. groove location) be then provided with barrier structure 4, due to the presence of the barrier structure 4, can make making During the standby display base plate 1, laser ablation is avoided to cause viewing area 1-1 cushion 3 to be broken, so as to avoid producing to display base plate 1 It is raw to influence.
Embodiment 2:
As shown in Fig. 1 to Fig. 8 the present embodiment provides a kind of preparation method of display base plate 1, for preparing in embodiment 1 Display base plate 1.
The preparation method includes:
S1, cushion 30 is formed above the substrate 20 of display master blank, substrate 20 is divided for multiple viewing area 1-1 domains and is used for The spacer region 1-3 that viewing area 1-1 domains are separated.
As shown in figure 4, by setting spacer region 1-3 on display master blank, display master blank is divided into multiple viewing area 1- 1, each viewing area 1-1 is independent of one another.
Formed by cushion 30, the Zone Full of covering display master blank substrate 20, formed as shown in Figure 5 on the substrate 20 Structure.
Preferably, substrate 20 is flexible substrates, and it can be formed by flexible material, such as metallic film, ultra-thin glass etc..
S2, the cushion 30 in the spacer region 1-3 of part removed, form groove 11.
That is, after cushion 30 is formed, the cushion 30 in the spacer region 1-3 of part is removed by certain technique Go, expose the substrate 20 of correspondence position, form groove 11, obtain structure as shown in Figure 6.
Specifically, cushion 30 can be removed by etching technics, to form groove 11.The width of groove 11 can basis Actual conditions are set, and are not limited herein.
Preferably, groove 11 is the annular groove 11 around each viewing area 1-1, and around adjacent display areas 1-1 annular Certain intervals be present between groove 11.
S3, at least form barrier structure 4 in the position of groove 11.
That is, by certain patterning processes in the position of groove 11, or position in groove 11 and its in addition is formed Barrier structure 4, obtain structure as shown in Figure 7.
Wherein, " patterning processes " refer to by the way that the part in complete material layer is removed, so that this layer of remainder The technology of structure needed for formation, it generally includes to form material layer, coating photoresist, exposure, development, etching, photoresist lift off Etc. the one or multi-step in step.
Preferably, barrier structure 4 includes being located at the main part 4-1 of the position of groove 11 and extends to side from main part 4-1 The extension 4-2 on cushion 30 in edge area 1-2.
Specifically, can be by controlling part steps (such as control etching agent dosage, etch period in patterning processes Deng) control barrier structure 4 net shape.
Preferably, the source-drain layer located at viewing area 1-1 is also included in substrate 20, source-drain layer is located at the top of cushion 30;Resistance Gear structure 4 is formed with source-drain layer in a patterning processes.
Barrier structure 4 can be simplified into manufacture craft, saving is manufactured into source-drain layer by being formed with a patterning processes This, improves production efficiency.
S4, interlayer insulating film 5 is formed above cushion 30 and barrier structure 4.
That is, after barrier structure 4 is formed, interlayer insulating film 5 is continuously formed, obtains structure as shown in Figure 8.
It is understood that after interlayer insulating film 5 is formed, can also go to continuously form OLED 6, first in display The structures such as inorganic water blocking layer 8, the first organic buffer layer 3093, the second inorganic water blocking layer 107, will not be repeated here.
S5, display master blank is cut into multiple display base plates 1, wherein each display base plate 1 for cutting to obtain includes display The area 1-1 and marginal zone 1-2 positioned at viewing area 1-1 peripheries, marginal zone 1-2 is part spacer region 1-3, and is set in the 1-2 of marginal zone Fluted 11 and barrier structure 4.
That is, the display master blank for completing above-mentioned steps is cut into multiple display base plates 1 as shown in Figures 1 to 3.
Specifically, being cut along the spacer region 1-3 of display master blank, include each display base plate 1 that cutting obtains Viewing area 1-1 and part spacer region 1-3, and groove 11 and barrier structure 4 are included in the spacer region 1-3 of part, and the part interval Area 1-3 is located at outside the 1-1 of viewing area, forms the marginal zone 1-2 of display base plate 1.
Preferably, display master blank is cut by laser cutting mode.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, but the invention is not limited in this.For those skilled in the art, the essence of the present invention is not being departed from In the case of refreshing and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.

Claims (10)

1. a kind of display base plate, including underlay substrate and the cushion on the underlay substrate, it is characterised in that
The underlay substrate is divided into viewing area and positioned at the marginal zone of the non-display area;
The cushion is in viewing area and the part marginal zone of the underlay substrate, the marginal zone without cushion Position is groove;
Barrier structure is additionally provided with the underlay substrate, the barrier structure is located at least in the groove.
2. display base plate according to claim 1, it is characterised in that
The groove forms at least one annular around the viewing area.
3. display base plate according to claim 1, it is characterised in that
The barrier structure includes being located at the main part of groove location and extended to from main part on the cushion in marginal zone Extension.
4. display base plate according to claim 1, it is characterised in that
The barrier structure and the distance of the side of the display base plate are more than or equal to 100 microns.
5. display base plate according to claim 1, it is characterised in that also include:
Source-drain layer located at the viewing area, the source-drain layer is above the cushion;
The barrier structure is set with the source-drain layer with layer.
6. display base plate according to claim 1, it is characterised in that also include:
Interlayer insulating film, the interlayer insulating film is above the cushion and the barrier structure.
A kind of 7. preparation method of display base plate, it is characterised in that including:
Form cushion above the substrate of display master blank, the substrate is divided into multiple viewing areas and for by the viewing area The spacer region that domain separates;
Cushion in the spacer region of part is removed, forms groove;
At least barrier structure is formed in the groove location;
The display master blank for completing above-mentioned steps is cut into multiple display base plates, wherein cutting obtained each display base plate Including viewing area and positioned at the marginal zone of the non-display area, the marginal zone is the part spacer region, and the edge The groove and barrier structure are provided with area.
8. the preparation method of display base plate according to claim 7, it is characterised in that
The barrier structure includes being located at the main part of groove location and extended to from main part on the cushion in marginal zone Extension.
9. the preparation method of display base plate according to claim 7, it is characterised in that also include being located at institute in the substrate The source-drain layer of viewing area is stated, the source-drain layer is above the cushion;
The barrier structure is formed with source-drain layer in a patterning processes.
10. the preparation method of display base plate according to claim 7, it is characterised in that described in the groove location shape Also include after into barrier structure:
Interlayer insulating film is formed above the cushion and the barrier structure.
CN201710742638.6A 2017-08-25 2017-08-25 Display base plate and preparation method thereof Pending CN107342363A (en)

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Application Number Priority Date Filing Date Title
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CN108281570A (en) * 2018-02-27 2018-07-13 京东方科技集团股份有限公司 A kind of display panel and preparation method thereof
WO2019104838A1 (en) * 2017-11-30 2019-06-06 武汉华星光电半导体显示技术有限公司 Display panel and manufacturing method thereof
WO2019127760A1 (en) * 2017-12-28 2019-07-04 武汉华星光电半导体显示技术有限公司 Edge region structure of flexible display panel, and flexible display panel

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CN107068715A (en) * 2017-03-28 2017-08-18 上海天马微电子有限公司 Organic light-emitting display panel, organic light-emitting display device and preparation method of organic light-emitting display panel
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WO2019104838A1 (en) * 2017-11-30 2019-06-06 武汉华星光电半导体显示技术有限公司 Display panel and manufacturing method thereof
WO2019127760A1 (en) * 2017-12-28 2019-07-04 武汉华星光电半导体显示技术有限公司 Edge region structure of flexible display panel, and flexible display panel
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CN108281570B (en) * 2018-02-27 2020-04-17 京东方科技集团股份有限公司 Display panel and manufacturing method thereof

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Application publication date: 20171110