CN107246852A

CN107246852A - Measurement scaling method, device and angle-adjusting mechanism based on angle-adjusting mechanism

Info

Publication number: CN107246852A
Application number: CN201710612716.0A
Authority: CN
Inventors: 柴宗明
Original assignee: Goertek Inc
Current assignee: Goertek Techology Co Ltd
Priority date: 2017-07-25
Filing date: 2017-07-25
Publication date: 2017-10-13
Anticipated expiration: 2037-07-25
Also published as: CN107246852B

Abstract

The invention discloses measurement scaling method, device and the angle-adjusting mechanism based on angle-adjusting mechanism, this method includes：Set up that the first servo angular displacement platform corresponding first connects firmly coordinate system and the second servo angular displacement platform corresponding second connects firmly coordinate system, and when described two servo angular displacement platforms are in angle origin, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference；Control described two servo angular displacement platforms to export first angle and second angle respectively, and angle of inclination of the acquisition standard reflecting plate relative to the frame of reference is measured according to the autocollimator；Based on the transformational relation, set up the first angle and the second angle maps to the computation model of the frame of reference；The computation model is utilized based on the angle of inclination, the actual angle for obtaining described two servo angular displacement platforms is calculated.The embodiment of the present invention realizes the demarcation of the measurement to the angle of intersection of two servo angular displacement platforms.

Description

Measurement scaling method, device and angle-adjusting mechanism based on angle-adjusting mechanism

Technical field

The present embodiments relate to technical field of industrial control, specifically, it is related to a kind of based on angle-adjusting mechanism Measure scaling method, device and angle-adjusting mechanism.

Background technology

Angle-adjusting mechanism is entered in CNC (Computer numerical control, computer digital control machine tool) During row processing operation, the device of angle adjustment control is carried out to processing workpiece.At present, widely used two servo angular displacements platform connection The dynamic angle-adjusting mechanism constituted, by controlling two servo angular displacement platforms to export required angle, to realize the angle of workpiece Adjustment.

In the prior art, two servo angular displacement platforms are generally assembled according to the orthogonal assembling mode of axis of oscillation, with So that two servo angular displacement platform 90 degree of orthogonal forms of formation.

But, in mechanism assembling process, it is difficult to control the orthogonal level of the axis of oscillation of two servo angular displacement platforms, cause Angular deviation occurs, accordingly, it would be desirable to demarcation be measured to the angle of intersection of two servo angular displacement platforms, to determine angle of intersection Whether it is orthogonal angles.

The content of the invention

In view of this, the embodiments of the invention provide a kind of measurement scaling method based on angle-adjusting mechanism, device and Angle-adjusting mechanism, the measurement demarcation of the angle of intersection to solve effectively realize two servo angular displacement platforms in the prior art Technical problem.

In order to solve the above-mentioned technical problem, the first aspect of the present invention provides a kind of measurement mark based on angle-adjusting mechanism Determine method, the angle-adjusting mechanism includes：Two servos on pedestal are arranged on according to the orthogonal assembling mode of axis of oscillation Angular displacement platform；Standard reflecting plate is installed on the execution face of the angle-adjusting mechanism；The standard reflecting plate follows described two The linkage of servo angular displacement platform and move；Autocollimator is installed above the standard reflecting plate；Described two servo angular displacement platforms When being in angle origin, standard reflecting plate datum water level corresponding with the pedestal is parallel and the autocollimator Measurement angle scale be set to measurement zero point；

Methods described includes：

Set up the first servo angular displacement platform corresponding first in described two servo angular displacement platforms and connect firmly coordinate system and Two servo angular displacement platforms corresponding second connect firmly coordinate system, and are in angle origin in described two servo angular displacement platforms When, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference；Wherein, described two servo angular displacement platforms During in angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly the coordinate system of coordinate system Direction is overlapped；

In two servo angular displacement platforms output any angle, determine first connect firmly coordinate system, second connect firmly coordinate system with And the transformational relation of the frame of reference；Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms；

Described two servo angular displacement platforms are controlled to export first angle and second angle respectively, and according to the autocollimatic Straight instrument measurement obtains angle of inclination of the standard reflecting plate relative to the frame of reference；

Based on the transformational relation, set up the first angle, the second angle and map to the frame of reference Computation model；

The computation model is utilized based on the angle of inclination, the actual folder for obtaining described two servo angular displacement platforms is calculated Angle.

Preferably, during described two servo angular displacement platforms output any angle, determine that first connects firmly coordinate system, second connects firmly Coordinate system and the transformational relation of the frame of reference include：

When the first servo angular displacement platform exports any angle, determine that first connects firmly coordinate system relative to the benchmark First transformational relation of coordinate system；

When the second servo angular displacement platform exports any angle, determine that second connects firmly coordinate system relative to described first Connect firmly the second transformational relation of coordinate system；

Based on first transformational relation and second transformational relation, set up described second connect firmly coordinate system relative to 3rd transformational relation of the frame of reference；

It is described to be based on the transformational relation, set up the first angle, the second angle and map to the reference coordinate The computation model of system includes：

Based on the 3rd transformational relation, set up the first angle, the second angle and map to the reference coordinate The computation model of system.

Preferably, the 3rd transformational relation include using the angle of described two servo angular displacement platforms as it is unknown Parameter；

It is described that the computation model is utilized based on the angle of inclination, calculate the reality for obtaining described two servo angular displacement platforms Border angle includes：

The angle of inclination is utilized to the result data of the computation model, the reality for obtaining the 3rd transformational relation is calculated Border data；

According to the real data of the 3rd transformational relation, calculate the unknown parameter obtained and be used as described two servos The actual angle of angular displacement platform.

Preferably, it is described that the computation model is utilized based on the angle of inclination, calculate and obtain described two servo angle positions The actual angle of moving stage includes：

According to the theoretical angle and the computation model of described two servo angular displacement platforms, calculate and obtain the standard To be corrected angle of the reflecting plate relative to the frame of reference；

Compare the angle to be corrected and whether the angle of inclination is consistent；

If it is, the actual angle for determining described two servo angular displacement platforms is the theoretical angle；

If not, utilizing the computation model based on the angle of inclination, calculate and obtain described two servo angular displacement platforms Actual angle.

Preferably, it is described that the computation model is utilized based on the angle of inclination, calculate and obtain described two servo angle positions After the actual angle of moving stage, methods described also includes：

Calculate the amount of deflection of the actual angle and theoretical angle of described two servo angular displacement platforms；

The amount of deflection is inputted to the digital control system of the angle-adjusting mechanism, so that the digital control system performs angle During adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.

The second aspect of the present invention provides a kind of measurement caliberating device based on angle-adjusting mechanism, the angle adjustment machine Structure includes：Two servo angular displacement platforms on pedestal are arranged on according to the orthogonal assembling mode of axis of oscillation；The angle adjustment Standard reflecting plate is installed on the execution face of mechanism；The standard reflecting plate follows the linkage of described two servo angular displacement platforms and transported It is dynamic；Autocollimator is installed above the standard reflecting plate；When described two servo angular displacement platforms are in angle origin, the mark Quasi-reflection plate datum water level corresponding with the pedestal is parallel and measurement angle scale of the autocollimator is set to measurement zero Point；

Described device includes：

First sets up module, for setting up the first servo angular displacement platform corresponding first in described two servo angular displacement platforms Connect firmly coordinate system and the second servo angular displacement platform corresponding second connects firmly coordinate system, and in described two servo angular displacement platforms When being in angle origin, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference；Wherein, described two When individual servo angular displacement platform is in angle origin, the frame of reference connects firmly coordinate system with described first, described second connected firmly The coordinate system direction of coordinate system is overlapped；

First determining module, in two servo angular displacement platforms output any angle, determine first connect firmly coordinate system, Second connects firmly the transformational relation of coordinate system and the frame of reference；Wherein, the transformational relation and described two servo angles The angle of displacement platform is related；

First measurement module, for controlling described two servo angular displacement platforms to export first angle and second jiao respectively Degree, and angle of inclination of the acquisition standard reflecting plate relative to the frame of reference is measured according to the autocollimator；

Second sets up module, is mapped to for based on the transformational relation, setting up the first angle, the second angle The computation model of the frame of reference；

First computing module, for utilizing the computation model based on the angle of inclination, calculates and obtains described two watch Take the actual angle of angular displacement platform.

Preferably, first determining module includes：

First determining unit, for when the first servo angular displacement platform exports any angle, determining that first connects firmly seat First transformational relation of the mark system relative to the frame of reference；

Second determining unit, for when the second servo angular displacement platform exports any angle, determining that second connects firmly seat The second transformational relation that mark system connects firmly coordinate system relative to described first；

3rd determining unit, for based on first transformational relation and second transformational relation, setting up described Two connect firmly threeth transformational relation of the coordinate system relative to the frame of reference；

Described second, which sets up module, includes：

First sets up unit, is reflected for based on the 3rd transformational relation, setting up the first angle, the second angle It is incident upon the computation model of the frame of reference.

First computing module includes：

First computing unit, the result data for the angle of inclination to be utilized to the computation model, calculates and obtains institute State the real data of the 3rd transformational relation；

Second computing unit, for the real data according to the 3rd transformational relation, calculates the unknown ginseng obtained Measure the actual angle as described two servo angular displacement platforms.

Preferably, first computing module includes：

3rd computing unit, for the theoretical angle according to described two servo angular displacement platforms and the calculating mould Type, calculates and obtains to be corrected angle of the standard reflecting plate relative to the frame of reference；

First comparing unit, it is whether consistent for comparing the angle to be corrected and the angle of inclination；If it is, really The actual angle of fixed described two servo angular displacement platforms is the theoretical angle；If not, utilizing institute based on the angle of inclination Computation model is stated, the actual angle for obtaining described two servo angular displacement platforms is calculated.

Preferably, described device also includes：

Second computing module, the variation of actual angle and theoretical angle for calculating described two servo angular displacement platforms Value；

First output module, the digital control system for the amount of deflection to be inputted to the angle-adjusting mechanism, for institute When stating digital control system execution angle adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.

The second aspect of the present invention provides a kind of angle-adjusting mechanism, and the angle-adjusting mechanism includes：

Pedestal；

Two servo angular displacement platforms on the pedestal are arranged on according to the orthogonal assembling mode of swinging axle；

Standard reflecting plate on the angle-adjusting mechanism execution face；Wherein, the standard reflecting plate is according to institute State the linkage of two servo angular displacement platforms and move；

Autocollimator above the standard reflecting plate；Wherein, described two servo angular displacement platforms are in During angle origin, standard reflecting plate datum water level corresponding with the installation pedestal is parallel, the measurement of the autocollimator Angle calibration is measurement zero point.

In the present invention, by setting angle-adjusting mechanism, including the two servo angular displacement platforms installed with orthogonal manner, mark The first servo angular displacement platform in quasi-reflection plate and autocollimator, described two servo angular displacement platforms can set up first and connect firmly Coordinate system, the second servo angular displacement platform can set up second and connect firmly coordinate system, and the swing based on two servo angular displacement platforms Axis sets up the frame of reference.Corresponding servo angle can be carried out according to the coordinates device of servo angular displacement platform after establishment of coordinate system The servo angle of displacement platform is rotated, and forms corresponding angular transition relation, can produced in described two servo angular displacement platforms When angle is tilted, the angle relation of changing between the servo angular displacement platform can be changed, corresponding two can be obtained The actual angle of individual servo angular displacement platform, the axis of oscillation that can determine two servo angular displacement platforms by the actual angle is No orthogonal, whether angle of intersection is orthogonal angles, the measurement demarcation of angle of intersection is effectively realized, so that based on the actual folder Angle, it may be determined that the angular deviation of two servo angular displacement platforms, can be to the output angle of angle-adjusting mechanism based on the angular deviation Degree compensates correction.

Brief description of the drawings

Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the present invention, this hair Bright schematic description and description is used to explain the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：

Fig. 1 is a kind of structural representation of the one embodiment for angle-adjusting mechanism that the present invention is provided；

Fig. 2 is a kind of flow of the one embodiment for measurement scaling method based on angle-adjusting mechanism that the present invention is provided Figure；

Fig. 3 is a kind of stream of another embodiment of measurement scaling method based on angle-adjusting mechanism that the present invention is provided Cheng Tu；

Fig. 4 is a kind of structure of the one embodiment for measurement caliberating device based on angle-adjusting mechanism that the present invention is provided Schematic diagram.

Embodiment

Describe embodiments of the present invention in detail below in conjunction with drawings and Examples, thereby how the present invention is applied Technological means can fully understand and implement according to this to solve technical problem and reach the implementation process of technology effect.

The embodiment of the present invention is mainly used in the space angle adjust automatically scene of data fields, mainly passes through reality The actual angle of two servo angular displacement platforms and the gap of point of theory are determined, by differential seat angle away to two servo angular displacement platforms Linkage when actual linkage angle carry out angle compensation, with ensure control angle accuracy.

In the prior art, CNC system when being processed operation, it is necessary to processing workpiece carry out angle adjustment, generally it is right The angle adjustment for processing workpiece carries out angle adjustment by the linkage of double servo angular displacement platforms.Under normal circumstances, double servo angular displacements Platform can form 90 degree of orthogonal forms in assembling, still, when actually assembling, the assembling angle of actual double servo angular displacement platforms Degree is generally unable to reach exactly 90 degree of orthogonal forms, it is possible to there is certain angular deviation.For example, double servo angular displacement platforms The point of theory of assembling is usually 90 degree, but in actual assembled, assembling angle is probably 90.1 degree, and this there is 0.1 degree Angular deviation.In the presence of this angular deviation, described two servo angular displacement platforms are likely to result in output control angle, There is angular deviation and cause the actual control angle to workpiece deviation occur in double servo angular displacement playscript with stage directions bodies, cause processing workpiece to add Occur machining deviation during work, cause workpiece error larger.

Inventor's research is found, although double servo angular displacement platforms have an orthogonal angles deviation, but in actual applications this Individual problem is often ignored, and causes the loss of significance of unnecessary processing workpiece.Inventor has found by a series of research, double It is due to double servo angular displacement platforms that why the orthogonal angles deviation for the angle-adjusting mechanism that servo angular displacement platform is constituted, which is ignored, The axis of oscillation of servo angular displacement platform can not be demarcated in an assembling process, and then be unable to two servo angles of time measurement position The actual angle of moving stage.Therefore, technical scheme is inventors herein proposed.

In the embodiment of the present invention, two devices of standard reflecting plate and Laser Autocollimator are added in CNC system. When two servo angular displacement platforms are in angle origin, the frame of reference can be set up；Exported in two servo angular displacement platforms During unspecified angle, determine that two servo angular displacement platforms corresponding first connect firmly coordinate system and second connect firmly coordinate system respectively, and It can determine that described first connects firmly coordinate system, second connects firmly transformational relation between coordinate system and the frame of reference.Institute When stating two servo angular displacement platforms and exporting first angle and second angle respectively, you can using standard reflecting plate and laser from Quasi- instrument determines to connect firmly angle of inclination of the coordinate system relative to the frame of reference based on described two；According to the transformational relation, The computation model that first angle, second angle map to the frame of reference can be set up, and based on the computation model, meter Calculate the actual angle for obtaining described two servo angular displacement platforms.And then can be according to the actual folders of described two servo angular displacement platforms Angle, can determine whether the axis of oscillation of two servo angular displacement platforms is orthogonal, and whether angle of intersection is just by the actual angle Angle of cut degree, effectively realizes the measurement demarcation of angle of intersection, so that based on the actual angle, it may be determined that two servo angular displacement platforms Angular deviation, correction can be compensated to the output angle of angle-adjusting mechanism based on the angular deviation.

The embodiment of the present invention is described in detail below in conjunction with accompanying drawing.

As shown in figure 1, a kind of structural representation of one embodiment of the angle-adjusting mechanism provided for the present invention, the angle Degree adjustment mechanism can include：

Pedestal 100；

Two servo angular displacement platforms on pedestal 100 are arranged on according to the orthogonal assembling mode of axis of oscillation；This two are watched Taking angular displacement platform includes the first servo displacement platform 101 and the second servo displacement platform 102.

Standard reflecting plate 103 is installed on the execution face of the angle-adjusting mechanism；Wherein, the standard reflecting plate 103 can Moved with following the linkage of described two servo angular displacement platforms；

Autocollimator 104 installed in the top of standard reflecting plate 103；Wherein, described two servo angular displacement platforms 101 And 102 when being in angle origin, the standard reflecting plate 103 it is parallel with the corresponding datum water level of the pedestal 100 with And the measurement angle scale of the autocollimator 104 is set to measurement zero point.

Wherein, the autocollimator 104 can be Laser Autocollimator, and the autocollimator 104 is installed on the standard The top of reflecting plate 103.When the swing angle of described two servo angular displacement platforms 101 and 102 is 0, namely in angle During origin, the measurement angle indicating value of the autocollimator is 0；The laser that now Laser Autocollimator is sent is by the standard Reflecting plate 103 presses backtracking, does not occur any angle and tilts.

As shown in Fig. 2 one reality of measurement scaling method based on the angle-adjusting mechanism shown in Fig. 1 provided for the present invention The flow chart of example is applied, methods described can include following steps：

201：Set up the first servo angular displacement platform corresponding first in described two servo angular displacement platforms connect firmly coordinate system with And second servo angular displacement platform corresponding second connect firmly coordinate system, and in described two servo angular displacement platforms to be in angle former During point, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference.

Wherein, when described two servo angular displacement platforms are in angle origin, the frame of reference is connected firmly with described first Coordinate system, the described second coordinate system direction for connecting firmly coordinate system are overlapped.

Alternatively, the servo angular displacement platform is that the processing workpiece that can be used in CNC system carries out angle of inclination control Machine control unit.Under normal circumstances, the angle of inclination of workpiece can be processed by two servo angular displacement platform linkages Control, the swinging axles of two servo angular displacement platforms be designed to 90 degree it is orthogonal.Namely described two servo angular displacement platforms are in assembling When need to be assembled into the state of swinging axle orthogonal 90, because in assembling process, the swinging axle of two servo angular displacement platforms can not again Demarcation, it may be orthogonal 90 degree just to cause the actual angle between the swinging axle of described two servo angular displacement platforms, In the presence of certain angular error.It once assembly be completed, described two servo angular displacement platforms are to be connected firmly in CNC system, institute Stating angular error can not be adjusted again.Accordingly, it would be desirable to be processed work in the described two servo angular displacement platforms of later use During the angle of inclination control of part, it can be modified for the angular error.

Described two servo angular displacement playscript with stage directions bodies are fixedly connected with corresponding coordinate system, can be according to described two displacement platforms in itself The coordinate system connected firmly can determine that first connects firmly coordinate system, second connects firmly coordinate system.Described first connects firmly coordinate system and described Second to connect firmly coordinate system be cartesian coordinate system, namely rectangular coordinate system.When the swinging axle of described two servo angular displacement platforms During rotation, its corresponding first connects firmly coordinate system, second connects firmly coordinate system and also occur corresponding angular turn.

When described two servo angular displacement platforms are in angle origin, now, base of the standard reflecting plate parallel to installation pedestal Quasi- horizontal plane, now, the angle that autocollimator measurement is obtained are output as 0, can be by now perpendicular to the reference water of installation pedestal The normal vector of plane could be arranged to Z axis.Two servo angular displacement platforms be designed as 90 degree it is orthogonal, therefore can will be in angle The axially arranged of any one servo angular displacement platform in two servo angular displacement platforms of origin is to point to X-axis, another servo angle The axially arranged of displacement platform is to point to Y-axis.And then corresponding benchmark can be set up be mostly.Now, the frame of reference with Described first connect firmly coordinate system, second connect firmly coordinate system coordinate system direction is identical or machine.

202：In two servo angular displacement platforms output any angle, determine that first connects firmly coordinate system, second connects firmly coordinate System and the transformational relation of the frame of reference.

Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms.

When the swinging axle of described two servo angular displacement platforms is swung, it connects firmly changing therewith for coordinate system.

During described two servo angular displacement platform swinging axle changes, the linkage that can produce the two changes, and the connection of the two Dynamic change can cause the change of the standard reflecting plate, and then the laser that autocollimator is sent is when being reflected, you can to produce The angle change of raw reflection laser, autocollimator can calculate described two servos according to the change of the reflection laser detected The angle changing of displacement platform, and export the angle changing.

During described two servo angular displacement platforms output unspecified angle, first connect firmly coordinate system, second connect firmly coordinate system can be with The corresponding variable angle of generation.Can the transformational relation based on space coordinates, determine that described first connects firmly coordinate system, second Connect firmly rotation relation of the coordinate system relative to the frame of reference.

When described two servo angular displacement platforms export unspecified angle when, described first connect firmly coordinate system and it is described second consolidate Connection coordinate system and the frame of reference can with as shown in figure 3, in Fig. 3, contain 3 coordinate systems, including, by x0, y0, The frame of reference { 0 } that z0 is constituted；Coordinate system { 1 } is connected firmly by x1, y1, the first of z1 compositions；By x2, y2, the second of z2 compositions Connect firmly coordinate system { 2 }.In coordinate system shown in Fig. 3, in order to more easily show the angle change between different coordinates, by base Conventional coordinates is set to identical with first origin of coordinates for connecting firmly coordinate system, and in actual applications, the origin of coordinates of the two can be with It is different.

203：Described two servo angular displacement platforms are controlled to export first angle and second angle respectively, and according to described Autocollimator measurement obtains angle of inclination of the standard reflecting plate relative to the frame of reference.

It is flat in described two servo angular displacements because the standard reflecting plate is installed on the execution face of angle-adjusting mechanism When platform interlocks with the rotation, standard reflecting plate follows the linkage of described two servo angular displacement platforms and moved.

Alternatively, CNC system controls described two servo angular displacement platforms to export first angle and second angle respectively When, autocollimator can determine the angle of inclination relative to the frame of reference using standard reflecting plate.

204：Based on the transformational relation, set up the first angle, the second angle and map to the reference coordinate The computation model of system.

The first angle and second angle are respectively that two servo displacement platforms connect firmly coordinate system compared to the benchmark The angle change of coordinate system, the first angle and the second angle can be obtained by described from straight quasi- instrument measurement.

The transformational relation is that the first of formation connects firmly coordinate after described two servo angular displacement platforms are rotated according to swinging axle System, second connect firmly coordinate system and the transformational relation of the frame of reference, based on the transformational relation, can connect firmly seat by described first Mark system, second are connected firmly in the frame of reference described in coordinate system mapping device.

Coordinate system is connected firmly based on described first, second connect firmly the mapping relations of coordinate system and the frame of reference, i.e., It can determine that described first connects firmly coordinate system, second connects firmly mapping of the coordinate system by the first angle, second angle With the computation model for the frame of reference for determining mapping.

205：The computation model is utilized based on the angle of inclination, the reality for obtaining described two servo angular displacement platforms is calculated Border angle.

The computation model is a calculation equation, in the case of other amounts of calculation of formula are known, can be watched two The actual angle of angular displacement platform is taken as unknown parameter, formula is introduced, described two servo angular displacements is obtained by matrix computations The actual angle of platform.

In the embodiment of the present invention, by introducing angle-adjusting mechanism, using the standard reflecting plate in angle-adjusting mechanism with And autocollimator determines the angle of inclination of two servo angular displacement platforms.And can determine any in amount servo angular displacement platform output During angle, first connects firmly angle and second connects firmly the transformational relation of angle and the frame of reference, and is turned based on described The relation of changing determines the computation model of the frame of reference, and according to the computation model, can respectively be counted according to the angle of inclination Calculate the actual angle for obtaining described two servo angular displacement platforms.Two servo angular displacement platforms can be determined by the actual angle Whether axis of oscillation is orthogonal, and whether angle of intersection is orthogonal angles, the measurement demarcation of angle of intersection is effectively realized, so as to be based on The actual angle, it may be determined that the angular deviation of two servo angular displacement platforms, can be to angle-adjusting mechanism based on the angular deviation Output angle compensate correction.

As shown in figure 3, for the measurement scaling method based on the angle-adjusting mechanism shown in Fig. 1 that provides of the present invention another The flow chart of embodiment, methods described can include following steps：

301：Set up the first servo angular displacement platform corresponding first in described two servo angular displacement platforms connect firmly coordinate system with And second servo angular displacement platform corresponding second connect firmly coordinate system, and in described two servo angular displacement platforms to be in angle former During point, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference.

302：When the first servo angular displacement platform exports any angle, determine that first connects firmly coordinate system relative to described First transformational relation of the frame of reference.

In the embodiment of the present invention, it is assumed that the coordinate system that connects firmly of the first servo angular displacement platform connects firmly coordinate system for first, Assuming that the coordinate system that connects firmly of the second servo angular displacement platform connects firmly coordinate system for second.The first servo angular displacement platform output Any angle be θ₁, then first connect firmly coordinate system and can be expressed as relative to the first transformational relation of the frame of reference：

303：When the second servo angular displacement platform exports any angle, determine that second connects firmly coordinate system relative to described Second transformational relation of the frame of reference.

The first servo angular displacement platform is orthogonal with 90 degree of the axis of oscillation of the second servo angular displacement platform, it is assumed that described Mechanical distance between first servo angular displacement platform and the second servo angular displacement platform is d, and therefore, described first connects firmly coordinate System connects firmly the distance between coordinate system transposed matrix relative to described second and is：

Described first, which connects firmly the angular transition matrix that coordinate system connects firmly relative to described second between coordinate system, is：

Then it can know that described first connects firmly coordinate system and connected firmly relative to described second based on above-mentioned formula 2 and formula 3 The second transformational relation between coordinate system is：

4304：Based on first transformational relation and second transformational relation, set up described second and connect firmly coordinate system Relative to the 3rd transformational relation of the frame of reference.

It can know that described second connects firmly coordinate system relative to the frame of reference based on above-mentioned formula 1 and formula 4 The 3rd transformational relation：

305：Described two servo angular displacement platforms are controlled to export first angle and second angle respectively, and according to described Autocollimator measurement obtains angle of inclination of the standard reflecting plate relative to the frame of reference.

306：Based on the 3rd transformational relation, set up the first angle, the second angle and map to the benchmark The computation model of coordinate system.

Due to being theoretically orthogonality relation between the first servo angular displacement platform and the second servo angular displacement platform, because This, it is believed that the first angle θ₁, the second angle θ₂Synthesis angle after synthesis, can there is anti-by standard from straight quasi- instrument Penetrate reflection of the plate to laser to obtain, the synthesis angle can be represented with cartesian coordinate system, be decomposed into corresponding unit vector shape Formula：

Wherein, x, y, z are the current laser from straight quasi- instrument collection respectively with standard reflecting plate relative to frame of reference X Axle, Y-axis, the angular dimension of Z axis.

Thus, when synthesis angle being decomposed into formula as shown in Equation 6, carried out after next coordinate transform, obtained Conversion of measurement unit matrix of the coordinate system relative to the frame of reference is connected firmly to described second：

Wherein, formula 7 is unit transition matrix.

And due to when described two servo angular displacement platforms are set to angle origin, namely θ₁=0, θ₂When=0, now Two connect firmly coordinate system relative to the laser vertical from straight quasi- instrument transmitting in the standard reflecting plate, at this point it is possible to take described second Connecting firmly unit normal vector of the coordinate system in the frame of reference is：

[1,0,0]^TFormula 8

Because the transformational relation that formula 5 is is not unit transformational relation, it therefore, it can determine with formula 8 by formula 5 Go out the described second Conversion of measurement unit matrix for connecting firmly coordinate system and the frame of reference：

Wherein, the unit normal vector homogeneous transformation has been subjected in the Conversion of measurement unit matrix, with can be with the formula 5 Transformational relation matrix can carry out matrix operation.

Thus, the transition matrix of the formula 9 and the formula 7 is set up in two servo station angular displacement equatioies：

In 10 above-mentioned formulas 10, described two servo angular displacement platforms are orthogonal in 90 degree, and described first to connect firmly coordinate system relative The distance between coordinate system transposed matrix is connected firmly for formula 2 in described second.What it is when described two servo angular displacement platforms is not 90 When spending orthogonal, that is, when the actual angle of described two servo angular displacement platforms is not 90 degree, described first to connect firmly coordinate system relative The distance between coordinate system transposed matrix is connected firmly for unknown matrix D in described second, unknown matrix D and described two servo angles The actual angle of displacement platform is associated, and in formula 10 its dependent variable, such as x, y, z and θ₁、θ₂, it is known that therefore can draw Location matrix formula：

Corresponding unknown matrix D can be obtained by matrix computations, the formula 10 is one kind of the computation model.

307：The computation model is utilized based on the angle of inclination, the reality for obtaining described two servo angular displacement platforms is calculated Border angle.

As a kind of possible implementation, the 3rd transformational relation is included with described two servo angular displacement platforms Angle as unknown parameter；

Assuming that the unknown parameter is θ ', then above-mentioned formula 4 can be simplified shown as：

Matrix Trans (d, 0,0) Rot (x, θ ')=D in the formula 12, can then calculate the unknown parameter θ′。

It is described that the computation model is utilized based on the angle of inclination, calculate the reality for obtaining described two servo angular displacement platforms Border angle can include：

Using the angle of inclination as the result data of the computation model, the reality for obtaining the 3rd transformational relation is calculated Border data；

During actual test, its dependent variable, such as x, y, z and θ in formula 10₁、θ₂, it is known that being inputted corresponding Formula 10, you can to obtain corresponding unknown matrix D, by the formula D and corresponding θ₂The formula is brought into etc. data 11, and then unknown parameter can be obtained for θ ', that is, obtain the actual angle of described two servo angular displacement platforms.

In the embodiment of the present invention, by the first transformational relation and the second transformational relation, second can be set up and connect firmly coordinate Be the 3rd transformational relation between the frame of reference, and based on the 3rd transformational relation, can calculate first angle and Second angle maps to the computation model of the frame of reference.And the angle of described two servo angular displacement platforms can be as not Know that parameter inputs the computation model, and the real data in computation model can calculate the unknown parameter, you can obtain Obtain the angle of described two servo angular displacement platforms.Two actual servo displacement platforms can be accurately calculated by angular transition relation Angle, the actual angle of described two servo angular displacement platforms has been ensured, so that based on the actual angle, it may be determined that two servos The angular deviation of angular displacement platform, can be compensated serious based on the angular deviation to the output angle of angle-adjusting mechanism.

It is described that the computation model is utilized based on the angle of inclination as another embodiment, calculate and obtain described two The actual angle of individual servo angular displacement platform can include：

According to the theoretical angle and the computation model of described two servo angular displacement platforms, the acquisition standard is calculated anti- Penetrate to be corrected angle of the plate relative to the frame of reference；

In the embodiment of the present invention, when calculating the actual angle of described two servo angular displacement platforms, can first it confirm corresponding Treat correction angle, by judge described in treat whether correction angle consistent with the angle of inclination, when consistent, that is, illustrate described two The actual angle of individual servo angular displacement platform can directly determine described two servo angular displacements with theoretical angle and in the absence of error The actual angle of platform is the theoretical angle.It is described when correction angle and the angle of inclination are inconsistent, then calculate described The actual angle of two servo angular displacement platforms, and then can avoid blindly calculating computation model, the calculating of correlation can be saved Step, improves the determination efficiency of the actual angle of described two servo angular displacement platforms.

It is described that the computation model is utilized based on the angle of inclination as another embodiment, calculate and obtain described two After the actual angle of individual servo angular displacement platform, methods described can also include：

In the embodiment of the present invention, after the actual angle of described two servo angular displacement platforms is obtained, by the actual angle It is compared with theoretical angle, obtains the amount of deflection of two angles, it is possible to use the deviation data utilizes two to digital control system Individual servo angular displacement number of units carries out the compensation of output angle according to when controlling angle, and the compensation of output angle can reach control The optimization of angle, and then the precision of processing workpiece can be improved.

As shown in figure 4, a kind of measurement caliberating device based on angle-adjusting mechanism shown in Fig. 1 one provided for the present invention The structural representation of embodiment

Described device can include following module：

First sets up module 401, corresponding for setting up the first servo angular displacement platform in described two servo angular displacement platforms First connects firmly coordinate system and the second servo angular displacement platform corresponding second connects firmly coordinate system, and in described two servo angles position When moving stage is in angle origin, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference.

First determining module 402, in two servo angular displacement platform output any angles, determining that first connects firmly coordinate The transformational relation that system, second connect firmly coordinate system and the frame of reference.

First measurement module 403, for controlling described two servo angular displacement platforms to export first angle and respectively Two angles, and angle of inclination of the acquisition standard reflecting plate relative to the frame of reference is measured according to the autocollimator.

Second sets up module 404, is reflected for based on the transformational relation, setting up the first angle, the second angle It is incident upon the computation model of the frame of reference.

First computing module 405, for utilizing the computation model based on the angle of inclination, calculates and obtains described two The actual angle of servo angular displacement platform.

As one embodiment, first determining module can include：

Described second, which sets up module, to include：

First computing module can include：

As another embodiment, first computing module can include：

As another embodiment, described device can also include：

In a typical configuration, computing device includes one or more processors (CPU), input/output interface, net Network interface and internal memory.

Internal memory potentially includes the volatile memory in computer-readable medium, random access memory (RAM) and/or The forms such as Nonvolatile memory, such as read-only storage (ROM) or flash memory (flash RAM).Internal memory is computer-readable medium Example.

Computer-readable medium includes permanent and non-permanent, removable and non-removable media can be by any method Or technology come realize information store.Information can be computer-readable instruction, data structure, the module of program or other data. The example of the storage medium of computer includes, but are not limited to phase transition internal memory (PRAM), static RAM (SRAM), moved State random access memory (DRAM), other kinds of random access memory (RAM), read-only storage (ROM), electric erasable Programmable read only memory (EEPROM), fast flash memory bank or other memory techniques, read-only optical disc read-only storage (CD-ROM), Digital versatile disc (DVD) or other optical storages, magnetic cassette tape, the storage of tape magnetic rigid disk or other magnetic storage apparatus Or any other non-transmission medium, the information that can be accessed by a computing device available for storage.Define, calculate according to herein Machine computer-readable recording medium does not include the data-signal and carrier wave of non-temporary computer readable media (transitory media), such as modulation.

Some vocabulary have such as been used to censure specific components among specification and claim.Those skilled in the art should It is understood that hardware manufacturer may call same component with different nouns.This specification and claims are not with name The difference of title is used as the mode for distinguishing component, but is used as the criterion of differentiation with the difference of component functionally.Such as logical The "comprising" of piece specification and claim mentioned in is an open language, therefore should be construed to " include but do not limit In "." substantially " refer in receivable error range, those skilled in the art can solve described in the range of certain error Technical problem, basically reaches the technique effect.In addition, " coupling " one word is herein comprising any direct and indirect electric property coupling Means.Therefore, if a first device is coupled to a second device described in text, representing the first device can directly electrical coupling The second device is connected to, or the second device is electrically coupled to indirectly by other devices or coupling means.Specification Subsequent descriptions for implement the present invention better embodiment, so it is described description be by illustrate the present invention rule for the purpose of, It is not limited to the scope of the present invention.Protection scope of the present invention is worked as to be defined depending on the appended claims person of defining.

It should also be noted that, term " comprising ", "comprising" or its any other variant are intended to nonexcludability Comprising, so that commodity or system including a series of key elements not only include those key elements, but also including without clear and definite Other key elements listed, or also include for this commodity or the intrinsic key element of system.In the feelings of not more limitations Under condition, the key element limited by sentence "including a ...", it is not excluded that in the commodity or system including the key element also There is other identical element

Some preferred embodiments of the present invention have shown and described in described above, but as previously described, it should be understood that the present invention Be not limited to form disclosed herein, be not to be taken as the exclusion to other embodiment, and available for various other combinations, Modification and environment, and above-mentioned teaching or the technology or knowledge of association area can be passed through in application contemplated scope described herein It is modified., then all should be in this hair and the change and change that those skilled in the art are carried out do not depart from the spirit and scope of the present invention In the protection domain of bright appended claims.

Claims

1. a kind of measurement scaling method based on angle-adjusting mechanism, it is characterised in that the angle-adjusting mechanism includes：According to The orthogonal assembling mode of axis of oscillation is arranged on two servo angular displacement platforms on pedestal；The execution face of the angle-adjusting mechanism Upper installation standard reflecting plate；The standard reflecting plate follows the linkage of described two servo angular displacement platforms and moved；The standard Autocollimator is installed above reflecting plate；When described two servo angular displacement platforms are in angle origin, the standard reflecting plate with The corresponding datum water level of the pedestal is parallel and measurement angle scale of the autocollimator is set to measurement zero point；

Methods described includes：

The first servo angular displacement platform corresponding first in described two servo angular displacement platforms is set up to connect firmly coordinate system and second watch Take angular displacement platform corresponding second and connect firmly coordinate system, and when described two servo angular displacement platforms are in angle origin, base The frame of reference is set up in the axis of oscillation of described two servo angular displacement platforms；Wherein, described two servo angular displacement platforms are in During angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly the coordinate system direction of coordinate system Overlap；

In two servo angular displacement platforms output any angle, determine that first connects firmly coordinate system, second connects firmly coordinate system and institute State the transformational relation of the frame of reference；Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms；

Described two servo angular displacement platforms are controlled to export first angle and second angle respectively, and according to the autocollimator Measurement obtains angle of inclination of the standard reflecting plate relative to the frame of reference；

Based on the transformational relation, set up the first angle, the second angle and map to the calculating of the frame of reference Model；

The computation model is utilized based on the angle of inclination, the actual angle for obtaining described two servo angular displacement platforms is calculated.

2. according to the method described in claim 1, it is characterised in that during described two servo angular displacement platform output any angles, Determine that first connects firmly coordinate system, second connects firmly coordinate system and the transformational relation of the frame of reference and include：

When the first servo angular displacement platform exports any angle, determine that first connects firmly coordinate system relative to the reference coordinate First transformational relation of system；

When the second servo angular displacement platform exports any angle, determine that second connects firmly coordinate system and connected firmly relative to described first Second transformational relation of coordinate system；

Based on first transformational relation and second transformational relation, set up described second and connect firmly coordinate system relative to described 3rd transformational relation of the frame of reference；

It is described to be based on the transformational relation, set up the first angle, the second angle and map to the frame of reference Computation model includes：

Based on the 3rd transformational relation, set up the first angle, the second angle and map to the frame of reference Computation model.

3. method according to claim 2, it is characterised in that the 3rd transformational relation is included with described two servos The angle of angular displacement platform as unknown parameter；

It is described that the computation model is utilized based on the angle of inclination, calculate the actual folder for obtaining described two servo angular displacement platforms Angle includes：

The angle of inclination is utilized to the result data of the computation model, the actual number for obtaining the 3rd transformational relation is calculated According to；

According to the real data of the 3rd transformational relation, the unknown parameter obtained is calculated as described two servo angles position The actual angle of moving stage.

4. according to the method described in claim 1, it is characterised in that described that the calculating mould is utilized based on the angle of inclination Type, calculating the actual angle of the described two servo angular displacement platforms of acquisition includes：

According to the theoretical angle and the computation model of described two servo angular displacement platforms, calculate and obtain the standard reflection To be corrected angle of the plate relative to the frame of reference；

If not, utilizing the computation model based on the angle of inclination, the reality for obtaining described two servo angular displacement platforms is calculated Border angle.

5. according to the method described in claim 1, it is characterised in that described that the calculating mould is utilized based on the angle of inclination Type, is calculated after the actual angle for obtaining described two servo angular displacement platforms, methods described also includes：

The amount of deflection is inputted to the digital control system of the angle-adjusting mechanism, so that the digital control system performs angle adjustment When, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.

6. a kind of measurement caliberating device based on angle-adjusting mechanism, it is characterised in that the angle-adjusting mechanism includes：According to The orthogonal assembling mode of axis of oscillation is arranged on two servo angular displacement platforms on pedestal；The execution face of the angle-adjusting mechanism Upper installation standard reflecting plate；The standard reflecting plate follows the linkage of described two servo angular displacement platforms and moved；The standard Autocollimator is installed above reflecting plate；When described two servo angular displacement platforms are in angle origin, the standard reflecting plate with The corresponding datum water level of the pedestal is parallel and measurement angle scale of the autocollimator is set to measurement zero point；

Described device includes：

First sets up module, is connected firmly for setting up the first servo angular displacement platform corresponding first in described two servo angular displacement platforms Coordinate system and the second servo angular displacement platform corresponding second connect firmly coordinate system, and locate in described two servo angular displacement platforms When angle origin, the axis of oscillation based on described two servo angular displacement platforms sets up the frame of reference；Wherein, it is described two to watch When taking angular displacement platform and being in angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly coordinate The coordinate system direction of system is overlapped；

First determining module, in two servo angular displacement platform output any angles, determining that first connects firmly coordinate system, second Connect firmly the transformational relation of coordinate system and the frame of reference；Wherein, the transformational relation and described two servo angular displacements The angle of platform is related；

First measurement module, for controlling described two servo angular displacement platforms to export first angle and second angle respectively, And angle of inclination of the acquisition standard reflecting plate relative to the frame of reference is measured according to the autocollimator；

Second sets up module, for based on the transformational relation, set up the first angle, the second angle map to it is described The computation model of the frame of reference；

First computing module, for utilizing the computation model based on the angle of inclination, calculates and obtains described two servo angles The actual angle of displacement platform.

7. device according to claim 6, it is characterised in that first determining module includes：

First determining unit, for when the first servo angular displacement platform exports any angle, determining that first connects firmly coordinate system Relative to the first transformational relation of the frame of reference；

Second determining unit, for when the second servo angular displacement platform exports any angle, determining that second connects firmly coordinate system The second transformational relation for connecting firmly coordinate system relative to described first；

3rd determining unit, consolidates for based on first transformational relation and second transformational relation, setting up described second Join threeth transformational relation of the coordinate system relative to the frame of reference；

Described second, which sets up module, includes：

First sets up unit, is mapped to for based on the 3rd transformational relation, setting up the first angle, the second angle The computation model of the frame of reference.

8. device according to claim 7, it is characterised in that the 3rd transformational relation is included with described two servos The angle of angular displacement platform as unknown parameter；

First computing module includes：

First computing unit, the result data for the angle of inclination to be utilized to the computation model, calculates and obtains described the The real data of three transformational relations；

Second computing unit, for the real data according to the 3rd transformational relation, calculates the unknown parameter obtained and makees For the actual angle of described two servo angular displacement platforms.

9. device according to claim 6, it is characterised in that first computing module includes：

3rd computing unit, for the theoretical angle and the computation model according to described two servo angular displacement platforms, meter Calculate and obtain to be corrected angle of the standard reflecting plate relative to the frame of reference；

First comparing unit, it is whether consistent for comparing the angle to be corrected and the angle of inclination；If it is, determining institute The actual angle for stating two servo angular displacement platforms is the theoretical angle；If not, utilizing the meter based on the angle of inclination Model is calculated, the actual angle for obtaining described two servo angular displacement platforms is calculated.

10. device according to claim 6, it is characterised in that described device also includes：

Second computing module, the amount of deflection of actual angle and theoretical angle for calculating described two servo angular displacement platforms；

First output module, the digital control system for the amount of deflection to be inputted to the angle-adjusting mechanism, for the number When control system performs angle adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.

11. a kind of angle-adjusting mechanism, it is characterised in that including：

Pedestal；

Standard reflecting plate on the angle-adjusting mechanism execution face；Wherein, the standard reflecting plate is according to described two The linkage of individual servo angular displacement platform and move；

Autocollimator above the standard reflecting plate；Wherein, described two servo angular displacement platforms are in angle During origin, standard reflecting plate datum water level corresponding with the installation pedestal is parallel, the measurement angle of the autocollimator It is demarcated as measuring zero point.