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CN107245694B - It throws the net the clamp method of device, base station, fixture and mask plate - Google Patents

It throws the net the clamp method of device, base station, fixture and mask plate Download PDF

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Publication number
CN107245694B
CN107245694B CN201710433816.7A CN201710433816A CN107245694B CN 107245694 B CN107245694 B CN 107245694B CN 201710433816 A CN201710433816 A CN 201710433816A CN 107245694 B CN107245694 B CN 107245694B
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CN
China
Prior art keywords
deformation
base station
mask plate
component
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710433816.7A
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Chinese (zh)
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CN107245694A (en
Inventor
吴建鹏
杨忠英
罗昶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201710433816.7A priority Critical patent/CN107245694B/en
Publication of CN107245694A publication Critical patent/CN107245694A/en
Priority to PCT/CN2018/083730 priority patent/WO2018223782A1/en
Priority to US16/303,469 priority patent/US11535925B2/en
Application granted granted Critical
Publication of CN107245694B publication Critical patent/CN107245694B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physical Vapour Deposition (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)

Abstract

The invention discloses the clamp methods of a kind of device of throwing the net, base station, fixture and mask plate, belong to display panel manufacturing field.The device of throwing the net include: for carrying the base station of mask plate, the fixture for clamping the mask plate and the deformation that is arranged on the base station or the fixture adjust component；The deformation adjusts component and protrudes from deformation quantity of the part of the base station on gravity direction for adjusting the mask plate when the base station carries the mask plate, and the deformation quantity is made to be less than default deformation threshold value.The present invention protrudes from deformation quantity of the part of base station on gravity direction by adjusting component adjusting mask plate, so that fixture can smoothly clamp mask plate.The present invention is in device of throwing the net.

Description

It throws the net the clamp method of device, base station, fixture and mask plate
Technical field
The present invention relates to display panel manufacturing field, in particular to a kind of device of throwing the net, base station, fixture and mask plate folder Hold method.
Background technique
Currently, evaporation process is production Organic Light Emitting Diode (English: Organic Light-Emitting Diode； OLED) one of the important process during the organic luminous layer of display, specifically, using having figuratum mask assembly, Required pattern is formed on substrate to be deposited by vacuum evaporation mode.Wherein, mask plate component includes metal framework and covers Diaphragm plate is needed after being tensioned mask plate on metal framework using device of throwing the net when mask plate is in conjunction with metal framework, will be covered Diaphragm plate is fixed on metal framework.The mask plate can for fine metal mask plate (English: Fine Metal Mask, referred to as: FMM)。
Referring to FIG. 1, Fig. 1 is a kind of structural schematic diagram for device of throwing the net that the prior art provides, which includes Base station 01 and fixture 02, the base station 01 clamp the mask plate 03 on base station 01 for carrying mask plate 03, in order to facilitate fixture 02, The width d2 of mask plate 03 needs the width d1 greater than base station 01, and the width d2 of usual mask plate 03 is bigger than the width d1 of base station 01 It 30 millimeters (mm), that is to say, when base station 01 carries mask plate 03, the distance d3 that mask plate 03 protrudes from 01 two sides of base station is 15mm。
But the mask plates of base station two sides is protruded under the influence of its own gravity, mask plate protrudes from the portion of base station Point there are deformation quantities on gravity direction, for example, as shown in Figure 1, mask plate 03 protrudes from the part of base station 01 in gravity direction On deformation quantity be d0, when d0 is greater than 1mm, clamping mask plate that fixture can not be successfully.
Summary of the invention
In order to solve the problems, such as clamping mask plate that the fixture of the prior art can not be successfully, the embodiment of the invention provides one Plant the clamp method of throw the net device, base station, fixture and mask plate.The technical solution is as follows:
It throws the net device in a first aspect, providing one kind, comprising:
For carrying the base station of mask plate, the fixture for clamping the mask plate and being arranged in the base station or the folder Deformation on tool adjusts component；
The deformation adjusts component and protrudes from institute for adjusting the mask plate when the base station carries the mask plate Deformation quantity of the part of base station on gravity direction is stated, the deformation quantity is made to be less than default deformation threshold value.
Optionally, it includes: electromagnet and current control unit that the deformation, which adjusts component,；
The electromagnet is connect with the current control unit, and the current control unit is big by the electric current of control output The small electromagnetic force to control the electromagnet.
Optionally, the device of throwing the net further include: measuring unit；
The measuring unit is connect with the current control unit, and the measuring unit is for measuring the mask plate protrusion In initial deformation amount of the part of the base station on gravity direction, the initial deformation amount is before the adjusting component is adjusted The mask plate protrude from deformation quantity of the part of the base station on gravity direction；
The current control unit is used to determine the electric current of the current control unit output according to the initial deformation amount, And the electric current is exported to the electromagnet.
Optionally, the size of the electric current of the current control unit output is equal to the size of the initial deformation amount and presets The product of ratio, and the electromagnetic force of the electromagnet is less than or equal to the mask plate and protrudes from suffered by the part of the base station Gravity.
Optionally, it includes: the n1 magnet being detachably arranged that the deformation, which adjusts component, and the n1 is more than or equal to 2 Integer.
Optionally, the device of throwing the net further include: support rod,
Described support rod one end is connect with the edge of the base station, and the deformation is provided on the other end and adjusts component, institute It states deformation and adjusts the working face top that component is located at the base station.
Optionally, the fixture includes: clamp assemblies；
The clamp assemblies include: the first sub-folder gripping member and the second sub-folder gripping member,
The first sub-folder gripping member and the second sub-folder gripping member are flexibly connected, and one end of the first sub-folder gripping member is located at described The top of plane where the working face of base station, one end of the second sub-folder gripping member are located at plane where the working face of the base station Lower section；
The deformation adjusts component and is arranged on one end of the first sub-folder gripping member.
Optionally, the fixture has n2, and the support rod has n2, and the deformation, which adjusts component, n2, the n2 For the integer more than or equal to 4, the n2 support rods adjust component with the n2 deformation and are arranged in a one-to-one correspondence.
Second aspect provides a kind of base station, comprising:
Base station ontology, support rod and deformation adjust component；
Described support rod one end is connect with the edge of the base station ontology, and the deformation adjusting group is provided on the other end Part, the deformation adjust component and are located above the working face of the base station ontology.
Optionally, it includes: electromagnet and current control unit that the deformation, which adjusts component,；
The electromagnet is connect with the current control unit, and the current control unit is big by the electric current of control output The small electromagnetic force to control the electromagnet.
The third aspect provides a kind of fixture, comprising:
Chuck body and deformation adjust component；
The chuck body includes: clamp assemblies；
The clamp assemblies include: the first sub-folder gripping member and the second sub-folder gripping member, the first sub-folder gripping member and the second son Clamping piece is flexibly connected；
The deformation adjusts component and is arranged on one end of the first sub-folder gripping member.
Optionally, it includes: electromagnet and current control unit that the deformation, which adjusts component,；
The electromagnet is connect with the current control unit, and the current control unit is big by the electric current of control output The small electromagnetic force to control the electromagnet.
Fourth aspect provides a kind of clamp method of mask plate, applied to any device of throwing the net of first aspect, institute The method of stating includes:
When the base station carries mask plate, the component adjusting mask plate is adjusted by the deformation and protrudes from the base Deformation quantity of the part of platform on gravity direction makes the deformation quantity be less than default deformation threshold value；
The mask plate is clamped by the fixture.
Optionally, it is described component adjusted by the deformation adjust the mask plate protrude from the part of the base station in weight Deformation quantity on power direction, comprising:
The mask plate, which is adjusted, by electromagnet protrudes from deformation quantity of the part of the base station on gravity direction.
Optionally, described the mask plate is adjusted by electromagnet to protrude from the part of the base station on gravity direction Before deformation quantity, the method also includes:
It measures the mask plate and protrudes from initial deformation amount of the part of the base station on gravity direction, the initial shape Variable is that the mask plate that the deformation is adjusted before component is adjusted protrudes from the part of the base station on gravity direction Deformation quantity；
The electric current of current control unit output is determined according to the initial deformation amount, and exports the electricity to the electromagnet Stream.
Technical solution provided in an embodiment of the present invention has the benefit that
Device provided in an embodiment of the present invention of throwing the net, base station, fixture and mask plate clamp method, on base station or fixture Deformation is set and adjusts component, when base station carries mask plate, the part that base station is protruded from by adjusting component adjusting mask plate exists Deformation quantity on gravity direction makes the deformation quantity be less than default deformation threshold value, so that fixture can smoothly clamp exposure mask Plate.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other Attached drawing.
Fig. 1 is a kind of structural schematic diagram for device of throwing the net that the prior art provides；
Fig. 2-1 is a kind of structural schematic diagram of device of throwing the net provided in an embodiment of the present invention；
Fig. 2-2 is that another kind provided in an embodiment of the present invention is thrown the net the structural schematic diagram of device；
Fig. 3-1 be another embodiment of the present invention provides a kind of device of throwing the net structural schematic diagram；
Fig. 3-1a be another embodiment of the present invention provides another kind throw the net the structural schematic diagram of device；
Fig. 3-1b be another embodiment of the present invention provides another device of throwing the net structural schematic diagram；
Fig. 3-1c is that a kind of adjusting mask plate provided in an embodiment of the present invention protrudes from the part of base station on gravity direction Deformation quantity effect picture；
Fig. 3-1d is a kind of floor map of mask plate provided in an embodiment of the present invention；
Fig. 3-2 is a kind of structural schematic diagram for device of throwing the net that further embodiment of this invention provides；
Fig. 3-2a is that another mask plate that adjusts provided in an embodiment of the present invention protrudes from the part of base station in gravity direction On deformation quantity effect picture；
Fig. 4 is a kind of structural schematic diagram of base station provided in an embodiment of the present invention；
Fig. 5 is a kind of structural schematic diagram of fixture provided in an embodiment of the present invention；
Fig. 6 is a kind of flow chart of the clamp method of mask plate provided in an embodiment of the present invention；
Fig. 7 is the flow chart of the clamp method of another mask plate provided in an embodiment of the present invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention Formula is described in further detail.
It throws the net device the embodiment of the invention provides one kind, as shown in Fig. 2-1 and Fig. 2-2, Fig. 2-1 is the embodiment of the present invention A kind of structural schematic diagram of device of throwing the net of offer, Fig. 2-2 are that another kind provided in an embodiment of the present invention is thrown the net the structure of device Schematic diagram, the device of throwing the net may include:
For carrying the base station 10 of mask plate, the fixture 20 for clamping mask plate and being arranged in base station 10 or fixture 20 Deformation adjust component 30.
It should be noted that Fig. 2-1 is that deformation is arranged on base station 10 to adjust component 30, Fig. 2-2 is set in clamping 20 It sets deformation and adjusts component 30.
The deformation adjusts component 30 and protrudes from base station 10 for adjusting mask plate 40 when base station 10 carries mask plate 40 Deformation quantity of the part on gravity direction G makes the deformation quantity be less than default deformation threshold value.
In conclusion device provided in an embodiment of the present invention of throwing the net, is arranged deformation on base station or fixture and adjusts component, when When base station carries mask plate, deformation quantity of the part of base station on gravity direction is protruded from by adjusting component adjusting mask plate, The deformation quantity is set to be less than default deformation threshold value, so that fixture can smoothly clamp mask plate.
In practical application, not only it can be set on base station since deformation adjusts component, but also can be set on fixture, therefore The embodiment of the present invention is schematically illustrated in such a way that following two can be realized based on the setting position difference that deformation adjusts component:
It when deformation, which adjusts component, to be arranged on the base station in device of throwing the net, can please refer in realization mode at the first Fig. 3-1, Fig. 3-1 be another embodiment of the present invention provides a kind of device of throwing the net structural schematic diagram, the device of throwing the net further include: Support rod 11,11 one end of support rod are connect with the edge of base station 10, and deformation is provided on the other end and adjusts component 30, the deformation It adjusts component 30 to be located above the working face A of base station 10, which is the plane that base station 10 is used to carry mask plate.It needs Bright, support rod can be bending structure, and one end of the support rod is arranged in outside the region of base station, avoids due to being provided with Support rod and the area for reducing base station working face；The deformation of support rod other end setting adjusts component in the working face of base station Except, avoid adjusting component since the magnetic force of itself influences other regions of mask plate.
Fig. 3-1 is please referred to, which can also include: measuring unit 12, which can be laser Sensor, the measuring unit 12 can be set on base station 10, which protrudes from base station 10 for measuring mask plate 40 Initial deformation amount of the part on gravity direction G, which is that the mask plate 40 that adjusts before component 30 is adjusted is convex For deformation quantity of the part on gravity direction of base station 10.It should be noted that the measuring unit can move on base station, When being moved to the edge of base station, mask plate can be measured and protrude from deformation quantity of the part of base station on gravity direction, The principle that deformation quantity is measured by detection unit, can not repeat them here this with the principle of reference laser ranging, the embodiment of the present invention.
In practical application, deformation adjusts component adjusting mask plate and protrudes from deformation quantity of the part of base station on gravity direction Mode there are many, the embodiment of the present invention is to be schematically illustrated in terms of following two:
In a first aspect, please refer to Fig. 3-1a, Fig. 3-1a be another embodiment of the present invention provides another kind throw the net device Structural schematic diagram, it may include: electromagnet 31 and current control unit 32 that deformation, which adjusts component 30, which can be set On the other end of support rod 11.The current control unit 32 is connect with electromagnet 31, which passes through control The size of current of output is to control the electromagnetic force of electromagnet 31, further, when base station 10 carries mask plate 40, due to exposure mask The placement position of plate 40 is different, and the mask plate 40 is made to protrude from the different shape of generation of the part of base station 10 on gravity direction G Variable, thus it is possible to vary output electric current in current control unit 32 to change the electromagnetic force of electromagnet 31, and then it is adjustable The different deformation quantities generated on gravity direction G, so that the different deformation quantity is respectively less than default deformation threshold value.
In embodiments of the present invention, as shown in Fig. 3-1a, measuring unit 12 is connect with current control unit 32, the electric current control Unit 32 processed determines electric current control for protruding from initial deformation amount of the part of base station 10 on gravity direction G according to mask plate 40 The electric current that unit 22 processed exports, and the electric current is exported to electromagnet 31.It is exemplary, mask plate can be measured by measuring unit 12 40 protrude from initial deformation amount of the part of base station 10 on gravity direction G, may thereby determine that out that electromagnet 31 is adjusted initially Deformation quantity is so that the initial deformation amount is less than electromagnetic force required for default deformation threshold value, and then can determine current control unit The electric current of 32 outputs.
Optionally, the size of the electric current of current control unit output is equal to the size of initial deformation amount and multiplying for default ratio Product, the default ratio are greater than 0, that is to say, the size of the electric current of current control unit output and the size of initial deformation amount meet Direct proportion function.The electromagnetic force of electromagnet needs to be less than or protrudes from equal to mask plate gravity suffered by the part of base station, keeps away Exempt from that the part of the protrusion is caused to be folded upward at since electromagnetic force is excessive.
Second aspect, please refers to Fig. 3-1b, Fig. 3-1b be another embodiment of the present invention provides another device of throwing the net Structural schematic diagram, it may include: the n1 magnet 33 being detachably arranged which, which adjusts component 30, and n1 is more than or equal to 2 Integer, the n1 magnet 33 being detachably arranged can be set on the other end of support rod 11.When base station 10 carries mask plate 40 When, since the placement position of mask plate 40 is different, the mask plate 40 is made to protrude from production of the part of base station 10 on gravity direction G Raw different deformation quantity, thus it is possible to vary the number of magnet 33 to change the magnetic force that deformation adjusts component 30, and then it is adjustable The different deformation quantities generated on gravity direction G, so that the different deformation quantity is respectively less than default deformation threshold value.
In embodiments of the present invention, as shown in Fig. 3-1b, which can also include: display unit 13, the display Unit 13 is connect with measuring unit 12, and the display unit 13 is for showing that measuring mask plate 40 by measuring unit 12 protrudes from base station Initial deformation amount of 10 part on gravity direction G, according to the initial deformation amount, staff can determine that deformation is adjusted Component 30 adjusts initial deformation amount so that the initial deformation amount is less than magnetic force required for default deformation threshold value, and then staff It can determine that deformation adjusts the number of magnet 33 in component 30.
Optionally, the magnetic force for adjusting component needs to be less than or protrudes from equal to mask plate weight suffered by the part of base station Power, avoid causes the part of the protrusion to be folded upward at since magnetic force is excessive.
Fig. 3-1 is please referred to, is arranged on the other end of support rod 11 since deformation adjusts component 30, deformation adjusting group The distance of part 30 to the part that mask plate 40 protrudes from base station 10 immobilizes, so deformation adjust component 30 to mask plate 40 The magnetic force for protruding from the part of base station 10 is not influenced by distance.At this point, the magnetic force that deformation adjusts the offer of component 30 can be direct It adjusts mask plate 40 and protrudes from deformation quantity of the part of base station 10 on gravity direction G, the deformation quantity is made to be less than default deformation threshold Value.It is exemplary, Fig. 3-1c is please referred to, Fig. 3-1c is a kind of portion for adjusting mask plate and protruding from base station provided in an embodiment of the present invention The effect picture for dividing the deformation quantity on gravity direction, before adjusting component and adjusting, the part of protrusion is located at the a1 of position；Pass through The magnetic force that deformation adjusts component 30 can directly be adjusted the part of protrusion at the b1 of position, so that the part of protrusion is in weight Deformation quantity on power direction is less than default deformation threshold value.
In embodiments of the present invention, Fig. 3-1, Fig. 3-1a and Fig. 3-1b are with 20,11 and of support rod of a fixture It is schematically illustrated for one deformation adjusting component 30, in practical application, the fixture in device of throwing the net has n2, support Bar has n2, and deformation, which adjusts component, n2, which is the integer more than or equal to 4, and n2 support rod is adjusted with n2 deformation Component is arranged in a one-to-one correspondence.It is exemplary, Fig. 3-1d is please referred to, Fig. 3-1d is a kind of mask plate 40 provided in an embodiment of the present invention Floor map, the mask plate 40 may include: 4 clamping zone a, and clamping zone a is the region of fixture clamping, when this is covered When diaphragm plate 40 is carried on base station, 4 clamping zone a may generate deformation on gravity direction, and device of throwing the net at this time can be with It include: that 4 fixtures, 4 support rods and 4 deformation adjust component, 4 support rods and 4 deformation adjust component and correspond Setting.
In second of achievable mode, when deformation, which adjusts component, to be arranged on the fixture in device of throwing the net, please refer to Fig. 3-2, Fig. 3-2 are a kind of structural schematic diagrams for device of throwing the net that further embodiment of this invention provides, and fixture 20 may include: folder Component 21 and grasping force control component 22 are held, which can control clamp assemblies 21 and clamp mask plate；It should Clamp assemblies 21 may include: the first sub-folder gripping member 211 and the second sub-folder gripping member 212, the first sub-folder gripping member 221 and the second son Clamping piece 222 is flexibly connected, the top of plane where one end of the first sub-folder gripping member 211 is located at the working face A of base station 10, and second The lower section of plane where one end of sub-folder gripping member 212 is located at the working face A of base station 10.Deformation adjusts the setting of component 30 in the first son On one end of clamping piece 211, the other end of the first sub-folder gripping member 211 is flexibly connected with grasping force control component 22.
It should be noted that it is same that deformation adjusts component when deformation adjusts component and is arranged on the fixture in device of throwing the net Sample may include: electromagnet and current control unit, alternatively, it may include: the n1 magnetic being detachably arranged that deformation, which adjusts component, Iron, the principle that deformation adjusting component adjusting mask plate protrudes from deformation quantity of the part of base station on gravity direction can refer to upper Embodiment is stated, the embodiment of the present invention does not repeat them here this.Following embodiment is only to illustrate that deformation adjusts the regulative mode of component.
Fig. 3-2 is please referred to, when base station 10 carries mask plate 40, is held since deformation adjusts the setting of component 30 in the first sub-folder On one end of part 221, therefore when clamp assemblies 21 clamp mask plate 40, component 30 is adjusted to mask plate 40 and protrudes from base station 10 Part distance change, and then deformation adjust component 30 to mask plate 40 protrude from base station 10 part magnetic force because of distance Reduced influence and increase.At this time if when fixture 20 does not work, deformation adjusts the magnetic force that component 30 provides and directly adjusts Section mask plate 40 protrudes from deformation quantity of the part of base station 10 on gravity direction G, and the deformation quantity is made to be less than default deformation threshold value, When fixture 20 work when, mask plate 40 protrude from base station 10 part may due to deformation adjust component 30 magnetic force increase and It is folded upward at.
Therefore, in embodiments of the present invention, Fig. 3-2a is please referred to, Fig. 3-2a is another tune provided in an embodiment of the present invention Section mask plate protrudes from the effect picture of deformation quantity of the part of base station on gravity direction, convex before adjusting component 30 and adjusting Part out is located at the a2 of position；When fixture 20 does not work, the part of protrusion is adjusted to position by adjusting component 30 At b2；When fixture 20 works, the magnetic force due to adjusting component 30 increases, and the part of protrusion can be adjusted at the c2 of position, So that deformation quantity of the part of protrusion on gravity direction is less than default deformation threshold value.
Optionally, the default deformation in above two achievable mode is default to be 0.5mm, when mask plate protrudes from base When the deformation quantity on gravity direction is less than 0.5mm, fixture can smoothly clamp mask plate for the part of platform.
In conclusion device provided in an embodiment of the present invention of throwing the net, is arranged deformation on base station or fixture and adjusts component, when When base station carries mask plate, deformation quantity of the part of base station on gravity direction is protruded from by adjusting component adjusting mask plate, The deformation quantity is set to be less than default deformation threshold value, so that fixture can smoothly clamp mask plate.
The embodiment of the present invention provides a kind of base station, as shown in figure 4, Fig. 4 is a kind of base station 10 provided in an embodiment of the present invention Structural schematic diagram, which may include:
Base station ontology 13, support rod 11 and deformation adjust component 30；The edge of support rod 11 one end and base station ontology 13 It connects, deformation is provided on the other end and adjusts component 30, which adjusts component 30 and be located on the working face A of base station ontology 13 Side.
Optionally, it may include: electromagnet and current control unit which, which adjusts component,；Electromagnet and current control list Member connection, current control unit control the electromagnetic force of electromagnet by the size of current of control output.
Optionally, it may include: the n1 magnet being detachably arranged which, which adjusts component, and n1 is more than or equal to 2 Integer.
Optionally, the support rod in base station has n2, and deformation, which adjusts component, n2, and n2 is the integer more than or equal to 4, N2 support rod adjusts component with n2 deformation and is arranged in a one-to-one correspondence.
Optionally, which can also include: measuring unit, which can be set on base station ontology, the survey Amount unit protrudes from initial deformation amount of the part of base station on gravity direction for measuring mask plate, which is to adjust Mask plate before section component is adjusted protrudes from deformation quantity of the part of base station on gravity direction.
Optionally, measuring unit can be connect with current control unit, which is used for according to initial deformation The electric current for determining current control unit output is measured, and exports electric current to electromagnet.
Optionally, the size of the electric current of current control unit output is equal to the size of initial deformation amount and multiplying for default ratio Product, and the electromagnetic force of electromagnet is less than or equal to mask plate and protrudes from gravity suffered by the part of base station.
Optionally, measuring unit can be laser sensor.
Optionally, which can also include: display unit, which can connect with measuring unit, the display Unit protrudes from initial deformation amount of the part of base station on gravity direction by measuring unit measurement mask plate for showing.
It is apparent to those skilled in the art that for convenience and simplicity of description, the base station of foregoing description Specific structure, can be with reference to the corresponding structure in aforementioned Installation practice of throwing the net, details are not described herein.
In conclusion base station provided in an embodiment of the present invention, is arranged deformation on base station and adjusts component, when base station ontology is held When carrying mask plate, deformation quantity of the part of base station ontology on gravity direction is protruded from by adjusting component adjusting mask plate, is made The deformation quantity is less than default deformation threshold value, so that fixture can smoothly clamp mask plate.
The embodiment of the present invention provides a kind of fixture, as shown in figure 5, Fig. 5 is a kind of fixture 20 provided in an embodiment of the present invention Structural schematic diagram, which may include:
Chuck body 23 and deformation adjust component 30；The chuck body 23 may include: clamp assemblies 21；The clamp assemblies 21 may include: the first sub-folder gripping member 211 and the second sub-folder gripping member 212, the first sub-folder gripping member 211 and the second sub-folder gripping member 212 are flexibly connected；Deformation adjusts component 30 and is arranged on one end of the first sub-folder gripping member 211.
Optionally, it may include: electromagnet and current control unit which, which adjusts component,；Electromagnet and current control list Member connection, current control unit control the electromagnetic force of electromagnet by the size of current of control output.
Optionally, it may include: the n1 magnet being detachably arranged which, which adjusts component, and n1 is more than or equal to 2 Integer.
Optionally, which can also include: grasping force control component, which can control folder Component clamping mask plate is held, the other end of the first sub-folder gripping member is flexibly connected with the grasping force control component.
It is apparent to those skilled in the art that for convenience and simplicity of description, the fixture of foregoing description Specific structure, can be with reference to the corresponding structure in aforementioned Installation practice of throwing the net, details are not described herein.Also, it is above-mentioned to retouch The specifically used process of device of throwing the net, base station and the fixture stated, can be with reference to the corresponding process in following methods embodiment, herein It repeats no more.
In conclusion fixture provided in an embodiment of the present invention, is arranged deformation on fixture and adjusts component, when base station carrying is covered When diaphragm plate, deformation quantity of the part of base station on gravity direction is protruded from by adjusting component adjusting mask plate, makes the deformation quantity Less than default deformation threshold value, so that fixture can smoothly clamp mask plate.
The embodiment of the present invention also provides a kind of clamp method of mask plate, applied to any of the above-described device of throwing the net, please join Fig. 6 is examined, Fig. 6 is a kind of flow chart of the clamp method of mask plate provided in an embodiment of the present invention, and this method may include:
Step 601, when base station carries mask plate, component adjusted by deformation adjust mask plate and protrude from the part of base station Deformation quantity on gravity direction makes deformation quantity be less than default deformation threshold value.
Step 602 clamps mask plate by fixture.
In conclusion the clamp method of mask plate provided in an embodiment of the present invention, is arranged deformation tune on base station or fixture Component is saved, when base station carries mask plate, protrudes from the part of base station on gravity direction by adjusting component adjusting mask plate Deformation quantity, so that the deformation quantity is less than default deformation threshold value, so that fixture can smoothly clamp mask plate.
Referring to FIG. 7, Fig. 7 is the flow chart of the clamp method of another mask plate provided in an embodiment of the present invention, the party Method may include:
Step 701, measurement mask plate protrude from initial deformation amount of the part of base station on gravity direction.
Wherein, initial deformation amount is that the mask plate that deformation is adjusted before component is adjusted protrudes from the part of base station in gravity side Upward deformation quantity.
It is exemplary, but on base station when carrying mask plate, mask plate can be measured by the measuring unit on base station and protruded from Initial deformation amount of the part of base station on gravity direction.
Step 702, the electric current that current control unit output is determined according to initial deformation amount, and electric current is exported to electromagnet.
It is exemplary, size of the size equal to initial deformation amount and default ratio due to the electric current of current control unit output Product therefore when detecting initial deformation amount, the size of current of current control unit output can be calculated, and to electricity Magnet exports electric current.
Step 703 protrudes from deformation quantity of the part of base station on gravity direction by electromagnet adjusting mask plate.
It is exemplary, when electromagnet be arranged on base station when, electromagnet receive current control unit output electric current when, Electromagnetic force corresponding with the electric current of current control unit output can be generated, the adjustable mask plate of the electromagnetic force protrudes from base station Deformation quantity of the part on gravity direction makes deformation quantity be less than default deformation threshold value.
When electromagnet is arranged on fixture, electromagnet can be generated when receiving the electric current of current control unit output Electromagnetic force corresponding with the electric current of current control unit output, the part that the adjustable mask plate of the electromagnetic force protrudes from base station exists Deformation quantity on gravity direction makes the deformation quantity be less than initial deformation amount, but is greater than default deformation threshold value.
Step 704 clamps mask plate by fixture.
It is exemplary, it is less than default deformation threshold value when mask plate protrudes from deformation quantity of the part of base station on gravity direction When, mask plate can smoothly be clamped by fixture.
It should be noted that it includes current control unit that the embodiment of the clamp method of above-mentioned mask plate, which is to adjust component, With schematically illustrated for electromagnet, in embodiments of the present invention, be detachably arranged when adjusting component and including n1 The clamp method of mask plate when magnet, the clamp method with the mask plate when adjusting component and including current control unit and electromagnet Similar, the embodiment of the present invention does not repeat them here this.
It is apparent to those skilled in the art that for convenience and simplicity of description, the exposure mask of foregoing description Specific control principle in the clamp method of plate can refer to the embodiment of aforementioned device of throwing the net, and details are not described herein.
In conclusion the clamp method of mask plate provided in an embodiment of the present invention, is arranged deformation tune on base station or fixture Component is saved, when base station carries mask plate, protrudes from the part of base station on gravity direction by adjusting component adjusting mask plate Deformation quantity, so that the deformation quantity is less than default deformation threshold value, so that fixture can smoothly clamp mask plate.
Those of ordinary skill in the art will appreciate that realizing that all or part of the steps of above-described embodiment can pass through hardware It completes, relevant hardware can also be instructed to complete by program, the program can store in a kind of computer-readable In storage medium, storage medium mentioned above can be read-only memory, disk or CD etc..
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.

Claims (15)

  1. The device 1. one kind is thrown the net characterized by comprising
    For carrying the base station of mask plate, the fixture for clamping the mask plate and being arranged in the base station or the fixture Deformation adjust component；
    The deformation adjusts component and protrudes from the base for adjusting the mask plate when the base station carries the mask plate Deformation quantity of the part of platform on gravity direction makes the deformation quantity be less than default deformation threshold value.
  2. 2. device according to claim 1 of throwing the net, which is characterized in that
    It includes: electromagnet and current control unit that the deformation, which adjusts component,；
    The electromagnet is connect with the current control unit, the current control unit by control output size of current with Control the electromagnetic force of the electromagnet.
  3. 3. device according to claim 2 of throwing the net, which is characterized in that the device of throwing the net further include: measuring unit；
    The measuring unit is connect with the current control unit, and the measuring unit protrudes from institute for measuring the mask plate Initial deformation amount of the part of base station on gravity direction is stated, the initial deformation amount is the institute before the adjusting component adjusting It states mask plate and protrudes from deformation quantity of the part of the base station on gravity direction；
    The current control unit is used to determine the electric current of current control unit output according to the initial deformation amount, and to The electromagnet exports the electric current.
  4. 4. device according to claim 3 of throwing the net, which is characterized in that
    The numerical values recited of the electric current of the current control unit output is equal to the numerical values recited of the initial deformation amount and presets ratio The product of value, and the electromagnetic force of the electromagnet is less than or equal to the mask plate and protrudes from suffered by the part of the base station Gravity.
  5. 5. device according to claim 1 of throwing the net, which is characterized in that
    It includes: the n1 magnet being detachably arranged that the deformation, which adjusts component, and the n1 is the integer more than or equal to 2.
  6. 6. according to any device of throwing the net of claim 2 to 5, which is characterized in that
    The device of throwing the net further include: support rod,
    Described support rod one end is connect with the edge of the base station, and the deformation is provided on the other end and adjusts component, the shape Modified tone section component is located above the working face of the base station.
  7. 7. according to any device of throwing the net of claim 2 to 5, which is characterized in that
    The fixture includes: clamp assemblies；
    The clamp assemblies include: the first sub-folder gripping member and the second sub-folder gripping member,
    The first sub-folder gripping member and the second sub-folder gripping member are flexibly connected, and one end of the first sub-folder gripping member is located at the base station Working face where plane top, one end of the second sub-folder gripping member be located at the base station working face place plane under Side；
    The deformation adjusts component and is arranged on one end of the first sub-folder gripping member.
  8. 8. device according to claim 6 of throwing the net, which is characterized in that
    The fixture has a n2, and the support rod has n2, and the deformation, which adjusts component, n2, the n2 be more than or equal to 4 integer, the n2 support rods adjust component with the n2 deformation and are arranged in a one-to-one correspondence.
  9. 9. a kind of base station characterized by comprising base station ontology, support rod and deformation adjust component；
    Described support rod one end is connect with the edge of the base station ontology, and the deformation is provided on the other end and adjusts component, institute It states deformation and adjusts the working face top that component is located at the base station ontology.
  10. 10. base station according to claim 9, which is characterized in that
    It includes: electromagnet and current control unit that the deformation, which adjusts component,；
    The electromagnet is connect with the current control unit, the current control unit by control output size of current with Control the electromagnetic force of the electromagnet.
  11. 11. a kind of fixture characterized by comprising chuck body and deformation adjust component；
    The chuck body includes: clamp assemblies；
    The clamp assemblies include: the first sub-folder gripping member and the second sub-folder gripping member, and the first sub-folder gripping member and the second sub-folder are held Part is flexibly connected；
    The deformation adjusts component and is arranged on one end of the first sub-folder gripping member.
  12. 12. fixture according to claim 11, which is characterized in that
    It includes: electromagnet and current control unit that the deformation, which adjusts component,；
    The electromagnet is connect with the current control unit, the current control unit by control output size of current with Control the electromagnetic force of the electromagnet.
  13. 13. a kind of clamp method of mask plate, which is characterized in that applied to any device of throwing the net of claim 1 to 8, The described method includes:
    When the base station carries mask plate, the mask plate is adjusted by deformation adjusting component and protrudes from the base station Deformation quantity of the part on gravity direction makes the deformation quantity be less than default deformation threshold value；
    The mask plate is clamped by the fixture.
  14. 14. according to the method for claim 13, which is characterized in that
    It is described component is adjusted by the deformation to adjust the mask plate and protrude from the part of the base station on gravity direction Deformation quantity, comprising:
    The mask plate, which is adjusted, by electromagnet protrudes from deformation quantity of the part of the base station on gravity direction.
  15. 15. according to the method for claim 14, which is characterized in that
    It is described to be adjusted before the mask plate protrudes from deformation quantity of the part of the base station on gravity direction by electromagnet, The method also includes:
    It measures the mask plate and protrudes from initial deformation amount of the part of the base station on gravity direction, the initial deformation amount The mask plate before component is adjusted is adjusted for the deformation protrudes from deformation of the part of the base station on gravity direction Amount；
    The electric current of current control unit output is determined according to the initial deformation amount, and exports the electric current to the electromagnet；
    Wherein, the numerical values recited of the electric current of current control unit output is equal to the numerical values recited of the initial deformation amount and pre- If the product of ratio.
CN201710433816.7A 2017-06-09 2017-06-09 It throws the net the clamp method of device, base station, fixture and mask plate Active CN107245694B (en)

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CN201710433816.7A CN107245694B (en) 2017-06-09 2017-06-09 It throws the net the clamp method of device, base station, fixture and mask plate
PCT/CN2018/083730 WO2018223782A1 (en) 2017-06-09 2018-04-19 Tensioning device, pedestal, clamp and method for clamping mask
US16/303,469 US11535925B2 (en) 2017-06-09 2018-04-19 Tensioning device, base, clamp and method for clamping mask plate

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CN107245694B (en) 2017-06-09 2019-05-31 京东方科技集团股份有限公司 It throws the net the clamp method of device, base station, fixture and mask plate
CN111719117B (en) * 2019-03-21 2021-11-12 上海微电子装备（集团）股份有限公司 Workpiece pushing and pressing mechanism, screen expanding machine and evaporation system

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US11535925B2 (en) 2022-12-27

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