CN107104098A - light sensing device - Google Patents
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/16—Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of types provided for in two or more different subclasses of H10B, H10D, H10F, H10H, H10K or H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of types provided for in two or more different subclasses of H10B, H10D, H10F, H10H, H10K or H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
- H10F55/20—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers
- H10F55/25—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers wherein the radiation-sensitive devices and the electric light source are all semiconductor devices
- H10F55/255—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers wherein the radiation-sensitive devices and the electric light source are all semiconductor devices formed in, or on, a common substrate
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Abstract
Description
本申请为分案申请,其母案的申请号为:201610124463.8;申请日为:2016年3月4日;申请人为:友达光电股份有限公司;发明名称为:光感测装置。This application is a divisional application, and the application number of its parent case is: 201610124463.8; the application date is: March 4, 2016; the applicant is: AU Optronics Co., Ltd.; the invention name is: optical sensing device.
技术领域technical field
本发明涉及一种感测装置,且特别是有关于一种光感测装置。The present invention relates to a sensing device, and in particular to a light sensing device.
背景技术Background technique
一般而言,光感测装置包括光感测面板以及外挂于光感测面板之外的背光模块。背光模块用以发出光束。光感测面板配置于光束的传递路径上。光感测面板包括第一基板、阵列排列于第一基板上的多个感光单元以及多个主动元件。多个主动元件与多个感光单元电性连接,以读取感光单元接收的信号。Generally speaking, the photo-sensing device includes a photo-sensing panel and a backlight module mounted outside the photo-sensing panel. The backlight module is used for emitting light beams. The light sensing panel is arranged on the transmission path of the light beam. The photosensitive panel includes a first substrate, a plurality of photosensitive units arrayed on the first substrate, and a plurality of active components. Multiple active components are electrically connected with multiple photosensitive units to read signals received by the photosensitive units.
光感测装置的应用方式多元,以指纹扫描为例,当使用者手指触碰光感测装置时,指纹的波峰与波谷会反射强度不同的光束,而使分别对应波峰与波谷的多个感光单元接收到强度不同的反射光束。借此,光感测装置便可获得使用者的指纹影像。为了使光束准直地通过光感测面板,以提升光感测装置的性能,背光模块需采用多个棱镜片。然而,此举不利于光感测装置的成本降低,且使光感测装置的厚度减薄不易。此外,虽背光模块已采用棱镜片,但背光模块发出的光束仍有部分会传递至感光单元,而造成信号干扰的问题。There are many ways to apply the light sensing device. Taking fingerprint scanning as an example, when the user’s finger touches the light sensing device, the peaks and troughs of the fingerprint will reflect light beams with different intensities, so that the multiple light sensors corresponding to the peaks and troughs respectively The unit receives reflected beams of varying intensities. In this way, the light sensing device can obtain the fingerprint image of the user. In order to collimate the light beam through the light sensing panel and improve the performance of the light sensing device, the backlight module needs to use multiple prism sheets. However, this is not conducive to reducing the cost of the photo-sensing device, and it is not easy to reduce the thickness of the photo-sensing device. In addition, although the backlight module has adopted a prism sheet, part of the light beam emitted by the backlight module will still be transmitted to the photosensitive unit, causing the problem of signal interference.
发明内容Contents of the invention
本发明所要解决的技术问题是针对现有技术的上述缺陷,提供一种性能良好的光感测装置。The technical problem to be solved by the present invention is to provide a photo-sensing device with good performance for the above-mentioned defects of the prior art.
为了实现上述目的,本发明提供了一种光感测装置,包括第一基板、第一反射层、发光二极管、第一绝缘层、第二反射层、感光单元以及与感光单元电性连接的主动元件。第一反射层覆盖第一基板。发光二极管位于第一反射层上。第一绝缘层覆盖第一反射层与发光二极管。第二反射层配置于第一绝缘层上且位于发光二极管正上方。发光二极管发出的光束被第一反射层及第二反射层反射后从感光单元旁出射。In order to achieve the above object, the present invention provides a light sensing device, which includes a first substrate, a first reflective layer, a light emitting diode, a first insulating layer, a second reflective layer, a photosensitive unit and an active sensor electrically connected to the photosensitive unit. element. The first reflection layer covers the first substrate. The light emitting diode is located on the first reflective layer. The first insulating layer covers the first reflective layer and the light emitting diode. The second reflective layer is disposed on the first insulating layer and located right above the light emitting diode. The light beam emitted by the light-emitting diode is reflected by the first reflective layer and the second reflective layer, and then emerges from the side of the photosensitive unit.
为了更好地实现上述目的,本发明还提供了一种光感测装置,包括第一基板、主动元件、感光单元、发光二极管以及挡光结构。主动元件配置于第一基板上。感光单元配置于第一基板上且与主动元件电性连接。感光单元包括第一感光电极、相对于第一感光电极的第二感光电极以及感光层。感光层夹设于第一感光电极与第二感光电极之间。第一感光电极位于感光层与第一基板之间。发光二极管配置于第一基板上且位于感光单元旁。挡光结构与感光单元及发光二极管实质上位于同一平面,且位于感光单元的两侧。In order to better achieve the above object, the present invention also provides a light sensing device, including a first substrate, an active element, a light sensing unit, a light emitting diode and a light blocking structure. The active element is configured on the first substrate. The photosensitive unit is configured on the first substrate and electrically connected with the active element. The photosensitive unit includes a first photosensitive electrode, a second photosensitive electrode opposite to the first photosensitive electrode, and a photosensitive layer. The photosensitive layer is sandwiched between the first photosensitive electrode and the second photosensitive electrode. The first photosensitive electrode is located between the photosensitive layer and the first substrate. The light emitting diode is arranged on the first substrate and is located beside the photosensitive unit. The light blocking structure is substantially on the same plane as the photosensitive unit and the light emitting diode, and is located on both sides of the photosensitive unit.
为了更好地实现上述目的,本发明还提供了一种光感测装置,包括第一基板、第一主动元件、第一绝缘层、反射电极、发光二极管、第二绝缘层以及感光单元。第一基板具有承载面。第一主动元件配置于第一基板的承载面上。第一绝缘层覆盖第一主动元件且具有第一开口。第一绝缘层具有定义出第一开口的侧壁。反射电极位于第一开口中且至少覆盖所述侧壁。发光二极管配置于第一开口中。反射电极环绕发光二极管。感光单元配置于第二绝缘层上。感光单元包括第一感光电极。第一感光电极配置于第二绝缘层上且不与发光二极管于垂直方向上重叠。垂直方向平行于承载面的法线方向。In order to better achieve the above object, the present invention also provides a light sensing device, comprising a first substrate, a first active element, a first insulating layer, a reflective electrode, a light emitting diode, a second insulating layer and a photosensitive unit. The first substrate has a carrying surface. The first active element is configured on the bearing surface of the first substrate. The first insulating layer covers the first active element and has a first opening. The first insulating layer has sidewalls defining a first opening. The reflective electrode is located in the first opening and at least covers the sidewall. The light emitting diode is disposed in the first opening. A reflective electrode surrounds the light emitting diode. The photosensitive unit is configured on the second insulating layer. The photosensitive unit includes a first photosensitive electrode. The first photosensitive electrode is disposed on the second insulating layer and does not vertically overlap with the light emitting diode. The vertical direction is parallel to the normal direction of the bearing surface.
本发明的技术效果在于:Technical effect of the present invention is:
基于上述,在本发明一实施例的光感测装置中,发光二极管内建在感光单元所属的光感测面板中,因此,背光模块不需额外设置于光感测面板外的,从而光感测装置整体的厚度能够减薄。此外,由于发光二极管设置于第一、二反射层之间且感光单元设置于第二反射层上方,因此发光二极管所发出的光束被第一、二反射层反射后,会从感光单元旁穿出光感测装置,而不容易误入感光单元的感光层。借此,可以改善外挂于光感测面板之外的背光模块所造成的信号干扰问题。Based on the above, in the light-sensing device according to an embodiment of the present invention, the light-emitting diodes are built in the light-sensing panel to which the light-sensing unit belongs, so the backlight module does not need to be additionally arranged outside the light-sensing panel, so that The overall thickness of the measuring device can be reduced. In addition, since the light-emitting diode is arranged between the first and second reflective layers and the photosensitive unit is arranged above the second reflective layer, the light beam emitted by the light-emitting diode will pass through the photosensitive unit after being reflected by the first and second reflective layers. The photosensitive device is not easy to enter the photosensitive layer of the photosensitive unit by mistake. In this way, the signal interference problem caused by the backlight module installed outside the light sensing panel can be improved.
在本发明另一实施例的光感测装置中,除了因发光二极管内建在感光单元所属的光感测面板中而使光感测装置整体的厚度能够减薄外,更借由配置挡光结构于发光二极管的两侧,发光二极管发出的光束会被挡光结构阻挡,而不容易误入感光单元的感光层中。借此,可以改善外挂于光感测面板之外的背光模块所造成的信号干扰问题。In the photo-sensing device according to another embodiment of the present invention, in addition to the fact that the light-emitting diode is built into the photo-sensing panel to which the photo-sensing unit belongs, the overall thickness of the photo-sensing device can be reduced, and the light-blocking Structured on both sides of the light-emitting diode, the light beam emitted by the light-emitting diode will be blocked by the light-shielding structure, and will not easily enter the photosensitive layer of the photosensitive unit by mistake. In this way, the signal interference problem caused by the backlight module installed outside the light sensing panel can be improved.
在本发明再一实施例的光感测装置中,除了因发光二极管内建在感光单元所属的光感测面板中而使光感测装置整体的厚度能够减薄之外,借由环绕在发光二极管的反射层,能够将发光二极管发出的光束往正视方向集中。借此,当光感测装置检测物体时,被物体反射的光束可以较小的反射角进入对应的感光单元中。如此一来,光感测装置检测到的物体影像锐利度便能够提升,从而获得清晰的物体影像。In the photo-sensing device according to another embodiment of the present invention, in addition to the fact that the light-emitting diode is built into the photo-sensing panel to which the photo-sensing unit belongs, the overall thickness of the photo-sensing device can be reduced. The reflective layer of the diode can concentrate the light beam emitted by the light-emitting diode toward the front view direction. Thereby, when the light sensing device detects an object, the light beam reflected by the object can enter the corresponding light sensing unit at a relatively small reflection angle. In this way, the sharpness of the object image detected by the light sensing device can be improved, so as to obtain a clear object image.
以下结合附图和具体实施例对本发明进行详细描述,但不作为对本发明的限定。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.
附图说明Description of drawings
图1A至图1F为本发明一实施例的光感测装置的制造流程剖面示意图;1A to 1F are schematic cross-sectional views of the manufacturing process of a light sensing device according to an embodiment of the present invention;
图2为本发明另一实施例的光感测装置的剖面示意图;2 is a schematic cross-sectional view of an optical sensing device according to another embodiment of the present invention;
图3为本发明又一实施例的光感测装置的剖面示意图;3 is a schematic cross-sectional view of a light sensing device according to another embodiment of the present invention;
图4A至图4F为本发明再一实施例的光感测装置的制造流程剖面示意图;4A to 4F are cross-sectional schematic diagrams of the manufacturing process of a photo-sensing device according to yet another embodiment of the present invention;
图5为本发明一实施例的光感测装置的剖面示意图;5 is a schematic cross-sectional view of an optical sensing device according to an embodiment of the present invention;
图6为本发明另一实施例的光感测装置的剖面示意图。FIG. 6 is a schematic cross-sectional view of a light sensing device according to another embodiment of the present invention.
其中,附图标记Among them, reference signs
110、310、510 第一基板110, 310, 510 first substrate
120、120A、120B 第一反射层120, 120A, 120B first reflective layer
130、130A、130B 发光二极管130, 130A, 130B LEDs
132、134、352、354 电极132, 134, 352, 354 electrodes
136 发光层136 Luminescent layer
140、160、330、520 第一绝缘层140, 160, 330, 520 First insulating layer
180、370、410、592 绝缘层180, 370, 410, 592 insulation
142、182、372、382、412、592a 开口142, 182, 372, 382, 412, 592a opening
150 第二反射层150 second reflective layer
170、364、560:第一感光电极170, 364, 560: the first photosensitive electrode
200、420、570 第二感光电极200, 420, 570 Second photosensitive electrode
190、400、580 感光层190, 400, 580 photosensitive layer
210、430、590 保护层210, 430, 590 protective layers
220、340 粘性体220, 340 sticky body
310a 表面310a surface
320、360 导电层320, 360 conductive layer
322 遮光图案322 blackout patterns
332 接触洞332 contact hole
350、540 发光二极管350, 540 LEDs
350a 顶面350a top surface
362 线路图案362 line pattern
380 挡光结构380 light blocking structure
380a 内缘380a inner edge
380b 外缘380b outer edge
380c 底面380c Bottom
380d 顶面380d top surface
390 反射层390 reflective layer
400a 接触面400a contact surface
510a 承载面510a bearing surface
522 第一开口522 First opening
524 侧壁524 side wall
526 第二开口526 Second opening
530 反射电极530 reflective electrode
532 导电图案532 conductive pattern
540a 点540a point
550 第二绝缘层550 Second insulating layer
550A:第二绝缘层(第二基板)550A: Second insulating layer (second substrate)
552 第三开口552 Third opening
1000、1000A、1000B、2000、3000、3000A 光感测装置1000, 1000A, 1000B, 2000, 3000, 3000A light sensing device
CH、CH1、CH2 通道层CH, CH1, CH2 channel layer
D、D1、D2 漏极D, D1, D2 drain
d 内径d Inner diameter
F 物体F object
GI 栅绝缘层GI gate insulating layer
G、G1、G2 栅极G, G1, G2 Gate
h1、h2、h3、H1、H2 距离h1, h2, h3, H1, H2 distance
L、L1、L2、L3 光束L, L1, L2, L3 beams
PD 感光单元PD photosensitive unit
S、S1、S2 源极S, S1, S2 source
T、T1、T2 主动元件T, T1, T2 active components
W 宽度W width
x 水平方向x horizontal direction
y 垂直方向y vertical direction
具体实施方式detailed description
下面结合附图对本发明的结构原理和工作原理作具体的描述:Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:
图1A至图1F为本发明一实施例的光感测装置的制造流程剖面示意图。请参照图1A,首先,提供第一基板110。第一基板110可为透光第一基板或不透光/反光第一基板。举例而言,透光第一基板的材质可为玻璃、石英、塑胶或其它适当材料,不透光/反光第一基板的材质可为晶圆、陶瓷或其它适当材料,但本发明不以此为限。接着,形成第一反射层120,以覆盖第一基板110。在本实施例中,第一反射层120可为导电材料,例如:金属、合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或其它不透明的导电材料、或是前述至少二种材料的堆叠层,但本发明不以此为限。1A to 1F are schematic cross-sectional views of the manufacturing process of the light sensing device according to an embodiment of the present invention. Please refer to FIG. 1A , firstly, a first substrate 110 is provided. The first substrate 110 may be a light-transmitting first substrate or an opaque/reflective first substrate. For example, the material of the light-transmitting first substrate can be glass, quartz, plastic or other suitable materials, and the material of the opaque/reflective first substrate can be wafer, ceramics or other suitable materials, but the present invention does not limit. Next, a first reflective layer 120 is formed to cover the first substrate 110 . In this embodiment, the first reflective layer 120 can be a conductive material, such as: metal, alloy, nitride of metal material, oxide of metal material, oxynitride of metal material, or other opaque conductive material, or A stacked layer of the aforementioned at least two materials, but the present invention is not limited thereto.
接着,将发光二极管130配置于第一反射层120上。在本实施例中,发光二极管130可为垂直式晶片。换言之,发光二极管130的第一、二电极132、134可分别位于发光层136的不同两侧。然而,本发明不限于此,在其他实施例中,发光二极管也可为水平式晶片,即第一、二电极132、134位于发光层136同一侧,或其他适当型式的晶片。发光层136材料包括第一型半导体层、主动层以及第二型半导体层,其中第一型半导体层举例为P型半导体,第二半型导体层举例为N型半导体。于其它实施例中,发光层136材料也可包括第一型半导体层以及第二型半导体层,且第一型半导体层与第二半型导体层极性不同,或其它合适的材料。接着,形成第一绝缘层140,以覆盖第一反射层120与发光二极管130。在本实施例中,第一绝缘层140的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。Next, the LED 130 is disposed on the first reflective layer 120 . In this embodiment, the LED 130 can be a vertical chip. In other words, the first and second electrodes 132 and 134 of the light emitting diode 130 can be respectively located on different sides of the light emitting layer 136 . However, the present invention is not limited thereto. In other embodiments, the light emitting diode can also be a horizontal chip, that is, the first and second electrodes 132 and 134 are located on the same side of the light emitting layer 136 , or other suitable types of chips. The material of the light-emitting layer 136 includes a first-type semiconductor layer, an active layer and a second-type semiconductor layer, wherein the first-type semiconductor layer is, for example, a P-type semiconductor, and the second-type semiconductor layer is, for example, an N-type semiconductor. In other embodiments, the material of the light-emitting layer 136 may also include a first-type semiconductor layer and a second-type semiconductor layer, and the first-type semiconductor layer and the second semiconductor layer have different polarities, or other suitable materials. Next, a first insulating layer 140 is formed to cover the first reflective layer 120 and the LED 130 . In this embodiment, the material of the first insulating layer 140 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof.
请参照图1B,接着,在本实施例中,可选择性地图案化第一绝缘层140,以使第一绝缘层140具有开口142。在本实施例中,开口142暴露出发光二极管130的第二电极134,开口142的垂直投影面积与发光二极管130的第二电极134的垂直投影面积基本上不限制二者之间的关系,只要开口142与发光二极管130的第二电极134至少一部分重叠。本实施例中,为了后续工艺的容许度,第一绝缘层140的开口142可暴露出发光二极管130的第二电极134及其附近的第一绝缘层,即开口142的垂直投影面积大于发光二极管130的第二电极134的垂直投影面积,且开口142与发光二极管130的第二电极134至少一部分重叠,但不限于此。请参照图1C,接着,形成第二反射层150与栅极G。第二反射层150以及栅极G配置于第一绝缘层140上。在本实施例中,栅极G与第二反射层150分离且栅极G垂直投影于第一基板110上不与发光二极管130重叠。在垂直方向y上,第二反射层150遮蔽发光二极管130。在本实施例中,第一反射层120可超出第二反射层150的边缘。换言之,第二反射层150的边缘在第一基板110上的正投影可完全在第一反射层120的面积内,但本发明不以此为限。于本发明中垂直方向y与第一基板110的表面垂直。水平方向x与第一基板110的表面平行,且垂直方向y与水平方向x互相垂直,详细而言垂直方向y与水平方向x夹角为90度角。Referring to FIG. 1B , next, in this embodiment, the first insulating layer 140 may be selectively patterned so that the first insulating layer 140 has an opening 142 . In this embodiment, the opening 142 exposes the second electrode 134 of the light emitting diode 130, the vertical projected area of the opening 142 and the vertical projected area of the second electrode 134 of the light emitting diode 130 basically do not limit the relationship between the two, as long as The opening 142 overlaps at least a portion of the second electrode 134 of the LED 130 . In this embodiment, for the tolerance of the subsequent process, the opening 142 of the first insulating layer 140 can expose the second electrode 134 of the light-emitting diode 130 and the first insulating layer near it, that is, the vertical projected area of the opening 142 is larger than that of the light-emitting diode. The vertical projected area of the second electrode 134 of the light emitting diode 130, and the opening 142 overlaps with at least a part of the second electrode 134 of the LED 130, but is not limited thereto. Referring to FIG. 1C , next, the second reflective layer 150 and the gate G are formed. The second reflective layer 150 and the gate G are disposed on the first insulating layer 140 . In this embodiment, the gate G is separated from the second reflective layer 150 and the vertical projection of the gate G on the first substrate 110 does not overlap with the LED 130 . In the vertical direction y, the second reflective layer 150 shields the LED 130 . In this embodiment, the first reflective layer 120 may exceed the edge of the second reflective layer 150 . In other words, the orthographic projection of the edge of the second reflective layer 150 on the first substrate 110 may be completely within the area of the first reflective layer 120 , but the invention is not limited thereto. In the present invention, the vertical direction y is perpendicular to the surface of the first substrate 110 . The horizontal direction x is parallel to the surface of the first substrate 110 , and the vertical direction y and the horizontal direction x are perpendicular to each other. Specifically, the angle between the vertical direction y and the horizontal direction x is 90 degrees.
在本实施例中,第二反射层150可填入第一绝缘层140的开口142,以和发光二极管130的第二电极134连接。本实施例中,为了后续工艺的平坦度,第二反射层150仅位于开口142内,但不限于此。于其它实施例中,第二反射层150也可延伸过开口142的边缘,覆盖开口142附近的第一绝缘层140。发光二极管130的第一电极132可与第一反射层120连接。换言之,在本实施例中,第一、二反射层120、150除了用以反射发光二极管130发出的光束外,部分的第一、二反射层120、150也可做为发光二极管130的驱动线路。此举有助于光感测装置的结构简化。然而,本发明不限于此,在其他实施例中,发光二极管130也可选择性地不与第一反射层120、第二反射层150或其组合电性连接。In this embodiment, the second reflective layer 150 can fill the opening 142 of the first insulating layer 140 to be connected to the second electrode 134 of the LED 130 . In this embodiment, for the flatness of the subsequent process, the second reflective layer 150 is only located in the opening 142 , but it is not limited thereto. In other embodiments, the second reflective layer 150 may also extend beyond the edge of the opening 142 to cover the first insulating layer 140 near the opening 142 . The first electrode 132 of the light emitting diode 130 may be connected to the first reflective layer 120 . In other words, in this embodiment, in addition to the first and second reflective layers 120 and 150 being used to reflect the light beam emitted by the light emitting diode 130, part of the first and second reflective layers 120 and 150 can also be used as the driving circuit of the light emitting diode 130 . This helps to simplify the structure of the light sensing device. However, the present invention is not limited thereto. In other embodiments, the light emitting diode 130 may also be selectively not electrically connected to the first reflective layer 120 , the second reflective layer 150 or a combination thereof.
请参照图1D,接着,形成栅极绝缘层160,以覆盖栅极G以及第二反射层150。在本实施例中,栅极绝缘层160的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。接着,在栅极绝缘层160上形成通道层CH。通道层CH设置于栅极G上方。在本实施例中,通道层CH可为单层或多层结构,其包含非晶硅、多晶硅、微晶硅、单晶硅、有机半导体材料、氧化物半导体材料(例如:铟锌氧化物、铟锗锌氧化物、或是其它合适的材料、或上述的组合)、或其它合适的材料、或含有掺杂物(dopant)于上述材料中、或上述组合。Referring to FIG. 1D , next, a gate insulating layer 160 is formed to cover the gate G and the second reflective layer 150 . In this embodiment, the material of the gate insulating layer 160 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof. Next, a channel layer CH is formed on the gate insulating layer 160 . The channel layer CH is disposed above the gate G. In this embodiment, the channel layer CH can be a single-layer or multi-layer structure, which includes amorphous silicon, polycrystalline silicon, microcrystalline silicon, single crystal silicon, organic semiconductor materials, oxide semiconductor materials (for example: indium zinc oxide, InGeZnO, or other suitable materials, or the above combinations), or other suitable materials, or containing dopant in the above materials, or the above combinations.
请参照图1D,接着,形成源极S、漏极D以及第一感光电极170。第一感光电极170、源极S以及漏极D位于同一膜层。源极S与漏极D位于通道层CH及部分栅极绝缘层160上,且分别与通道层CH的两侧电性连接。第一感光电极170与源极S、漏极D其中之一(例如:漏极D)电性连接,即第一感光电极170与其所连接的电极(源极或漏极其中之一)可同时作为主动元件中的电极与感光单元PD中的电极。源极S、漏极D、通道层CH与栅极G构成主动元件T。源极S、漏极D以及第一感光电极170为导电材料。举例而言,在本实施例中,源极S、漏极D以及第一感光电极170的材质可为金属、合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或是其它导电材料、或是前述材料至少二种的堆叠层。Referring to FIG. 1D , next, the source S, the drain D and the first photosensitive electrode 170 are formed. The first photosensitive electrode 170 , the source S and the drain D are located in the same film layer. The source S and the drain D are located on the channel layer CH and part of the gate insulating layer 160 , and are electrically connected to two sides of the channel layer CH respectively. The first photosensitive electrode 170 is electrically connected to one of the source S and the drain D (for example: the drain D), that is, the first photosensitive electrode 170 and the electrode (one of the source or the drain) connected to it can be simultaneously As the electrode in the active element and the electrode in the photosensitive unit PD. The source S, the drain D, the channel layer CH and the gate G constitute the active element T. The source S, the drain D and the first photosensitive electrode 170 are conductive materials. For example, in this embodiment, the material of the source S, the drain D, and the first photosensitive electrode 170 can be metal, alloy, nitride of metal material, oxide of metal material, oxynitride of metal material, Or other conductive materials, or stacked layers of at least two of the aforementioned materials.
请参照图1E,接着,形成绝缘层180。绝缘层180覆盖源极S、漏极D以及部分绝缘层170且具有开口182。开口182暴露出第一感光电极170。绝缘层180的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。接着,形成感光层190。感光层190设置于第一感光电极170上。感光层190填入绝缘层180的开口182而与第一感光电极170电性连接。在本实施例中,感光层190的材质主要为硅例如为SivOw,其中v、w均不为零。感光层190例如为包括依序堆叠的一第一型半导体材料层、一本征半导体材料层以及一第二型半导体材料层,且第一型半导体材料层以及第二型半导体材料层其中一为p型半导体材料,另一为n型半导体材料。然而,本发明不限于此,在其他实施例中,感光层190的材质也可为依序堆叠的一第一型半导体材料层以及一第二型半导体材料层,且第一型半导体材料层与第二型半导体材料层极性不同、或是第一型半导体材料层与本征半导体材料层,或是其他适合的材料。接着,在感光层190上形成第二感光电极200。第二感光电极200设置于感光层190上且与感光层190电性连接。于本实施例中,第二感光电极200会暴露出部分的绝缘层180,即第二感光电极200不会与栅极G、源极S及通道CH重叠于范例,但不限于此。Referring to FIG. 1E , next, an insulating layer 180 is formed. The insulating layer 180 covers the source S, the drain D and part of the insulating layer 170 and has an opening 182 . The opening 182 exposes the first photosensitive electrode 170 . The material of the insulating layer 180 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof. Next, a photosensitive layer 190 is formed. The photosensitive layer 190 is disposed on the first photosensitive electrode 170 . The photosensitive layer 190 fills the opening 182 of the insulating layer 180 and is electrically connected to the first photosensitive electrode 170 . In this embodiment, the photosensitive layer 190 is mainly made of silicon, such as SivOw, where v and w are not zero. The photosensitive layer 190 includes, for example, a first-type semiconductor material layer, an intrinsic semiconductor material layer, and a second-type semiconductor material layer stacked in sequence, and one of the first-type semiconductor material layer and the second-type semiconductor material layer is One is a p-type semiconductor material, and the other is an n-type semiconductor material. However, the present invention is not limited thereto. In other embodiments, the material of the photosensitive layer 190 may also be a first-type semiconductor material layer and a second-type semiconductor material layer stacked in sequence, and the first-type semiconductor material layer and The polarity of the second-type semiconductor material layer is different, or the first-type semiconductor material layer and the intrinsic semiconductor material layer, or other suitable materials. Next, the second photosensitive electrode 200 is formed on the photosensitive layer 190 . The second photosensitive electrode 200 is disposed on the photosensitive layer 190 and is electrically connected to the photosensitive layer 190 . In this embodiment, the second photosensitive electrode 200 exposes a part of the insulating layer 180 , that is, the second photosensitive electrode 200 does not overlap with the gate G, the source S and the channel CH, but it is not limited thereto.
第一感光电极170、感光层190以及第二感光电极200构成感光单元PD。主动元件T与感光单元PD电性连接。感光单元PD位于第二反射层150的正上方。第二感光电极200为透光导电图案。在本实施例中,第二感光电极200的材质可选用铟锡氧化物、铟锌氧化物、铝锡氧化物、铝锌氧化物、铟锗锌氧化物、石墨烯、纳米银、纳米炭管/杆、或者其它合适的材料、或者上述至少二者的堆叠层。请参照图1F,接着,形成保护层210,以覆盖保护层210下方的所有构件,例如:主动元件T、感光单元PD等。在本实施例中,保护层210的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。The first photosensitive electrode 170 , the photosensitive layer 190 and the second photosensitive electrode 200 constitute a photosensitive unit PD. The active element T is electrically connected to the photosensitive unit PD. The photosensitive unit PD is located right above the second reflective layer 150 . The second photosensitive electrode 200 is a light-transmitting conductive pattern. In this embodiment, the material of the second photosensitive electrode 200 can be selected from indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium germanium zinc oxide, graphene, nano silver, carbon nano tube /rod, or other suitable materials, or a stack of at least two of the above. Referring to FIG. 1F , next, a protective layer 210 is formed to cover all components below the protective layer 210 , such as the active device T, the photosensitive unit PD, and the like. In this embodiment, the material of the protection layer 210 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof.
请参照图1F,发光二极管130发出的光束L1、L2、L3会被第一反射层120与第二反射层150其中至少一个或者第一、二反射层120、150与栅极G反射后从感光单元PD旁边射出。详言之,光束L1可先被第二反射层150反射到第一反射层120,然后,再被第一反射层120反射而从第二反射层150旁边穿出光感测装置1000;光束L2可先被第一反射层120反射后直接由第二反射层150旁边穿出光感测装置1000;光束L3可依序被第二反射层150、第一反射层120、栅极G以及第一反射层120反射,然后,由主动元件T旁边穿出光感测装置1000。光束L1、L2、L3穿出光感测装置1000后,可被使用者的手指或物件反射至对应的感光单元PD,则对应的感光单元PD可接收被使用者手指或物件反射的光束L1、L2、L3,进而使光感测装置1000获得使用者的手指或物件影像或其触碰位置。Please refer to FIG. 1F, the light beams L1, L2, and L3 emitted by the light emitting diode 130 will be reflected by at least one of the first reflective layer 120 and the second reflective layer 150 or the first and second reflective layers 120, 150 and the grid G, and then pass through the photosensitive The unit PD is shot next to it. In detail, the light beam L1 can be firstly reflected by the second reflective layer 150 to the first reflective layer 120, and then reflected by the first reflective layer 120 to pass through the light sensing device 1000 from the side of the second reflective layer 150; the light beam L2 The light beam L3 can be reflected by the first reflective layer 120 first and then pass through the light sensing device 1000 directly from the side of the second reflective layer 150; The reflective layer 120 reflects, and then passes out of the light sensing device 1000 from the side of the active device T. After the light beams L1, L2, L3 pass through the light sensing device 1000, they can be reflected by the user's finger or object to the corresponding photosensitive unit PD, and the corresponding photosensitive unit PD can receive the light beam L1, reflected by the user's finger or object. L2 and L3 , so that the light sensing device 1000 obtains the user's finger or object image or its touch position.
由于发光二极管130与感光单元PD是位于同一第一基板110上,也就是说,发光二极管130内建在感光单元PD所属的光感测面板中,因此,光感测装置1000可不包括位于光感测面板外的背光模块,从而光感测装置1000的厚度能够大幅减薄。此外,由于发光二极管130设置于第一、二反射层120、150之间且感光单元PD设置于第二反射层150上方,因此发光二极管130所发出的光束L1、L2、L3被第一、二反射层120、150其中至少一个或者第一、二反射层120、150与栅极G反射后,会从感光单元PD以外的地方穿出光感测装置1000,而不容易误入感光单元PD的感光层190。借此,可以改善外挂于光感测面板的外的背光模块所造成的信号干扰问题。Since the light-emitting diode 130 and the photosensitive unit PD are located on the same first substrate 110, that is, the light-emitting diode 130 is built in the light-sensing panel to which the photosensitive unit PD belongs, therefore, the light-sensing device 1000 may not include The backlight module outside the measuring panel, so that the thickness of the light sensing device 1000 can be greatly reduced. In addition, since the light emitting diode 130 is disposed between the first and second reflective layers 120 and 150 and the photosensitive unit PD is disposed above the second reflective layer 150, the light beams L1, L2 and L3 emitted by the light emitting diode 130 are captured by the first and second reflective layers. After at least one of the reflective layers 120, 150 or the first and second reflective layers 120, 150 are reflected with the grid G, the photosensitive device 1000 will pass through from a place other than the photosensitive unit PD, and it is not easy to enter into the photosensitive unit PD by mistake. photosensitive layer 190 . In this way, the signal interference problem caused by the backlight module mounted outside the light sensing panel can be improved.
图2为本发明另一实施例的光感测装置的剖面示意图。图2的光感测装置1000A与图1F的光感测装置1000类似,因此相同或相对应的元件,以相同或相对应的标号表示。光感测装置1000A与光感测装置1000的差异在于:光感测装置1000A的发光二极管130A及第一反射层120A与光感测装置1000的发光二极管130及第一反射层120不同。以下主要就此差异处说明,两者相同处还请依照图2中的标号参照前述说明,于此便不再重述。FIG. 2 is a schematic cross-sectional view of a light sensing device according to another embodiment of the present invention. The photo-sensing device 1000A of FIG. 2 is similar to the photo-sensing device 1000 of FIG. 1F , so the same or corresponding components are denoted by the same or corresponding reference numerals. The difference between the photo-sensing device 1000A and the photo-sensing device 1000 is that: the light-emitting diode 130A and the first reflective layer 120A of the photo-sensing device 1000A are different from the light-emitting diode 130 and the first reflective layer 120 of the photo-sensing device 1000 . The difference is mainly described below, and the similarities between the two can be referred to the foregoing description according to the symbols in FIG. 2 , and will not be repeated here.
请参照图2,光感测装置1000A包括第一基板110、覆盖第一基板110的第一反射层120A、位于第一反射层120A上的发光二极管130A、覆盖第一反射层120A与发光二极管130A的第一绝缘层140A、配置于第一绝缘层140A上且位于发光二极管130A正上方的第二反射层150、位于第二反射层150正上方的感光单元PD以及与感光单元PD电性连接的主动元件T。发光二极管130A发出的光束L1、L2、L3被第一反射层120与第二反射层150其中至少一个或者第一、二反射层120、150与栅极G反射后从感光单元PD旁边出射。Referring to FIG. 2, the light sensing device 1000A includes a first substrate 110, a first reflective layer 120A covering the first substrate 110, a light emitting diode 130A on the first reflective layer 120A, and a light emitting diode 130A covering the first reflective layer 120A. The first insulating layer 140A, the second reflective layer 150 disposed on the first insulating layer 140A and directly above the light-emitting diode 130A, the photosensitive unit PD located directly above the second reflective layer 150, and the photosensitive unit PD are electrically connected Active element T. The light beams L1 , L2 , L3 emitted by the light emitting diode 130A are reflected by at least one of the first reflective layer 120 and the second reflective layer 150 or the first and second reflective layers 120 , 150 and the grid G, and exit from the side of the photosensitive unit PD.
与光感测装置1000不同的是,光感测装置1000A的发光二极管130A是水平式发光二极管。换言之,发光二极管130A的第一、二电极132、134位于发光层136的同一侧。举例而言第一、二电极132、134位于发光层136远离第一反射层120A的一侧。发光二极管130A可透过粘性体220固定于第一反射层120A上。发光二极管130A的第一电极132可透过导电图案230与第一反射层120电性连接,即导电图案230一端与第一电极132连接,且导电图案230往第一反射层120A方向延伸,而导电图案230另一端与第一反射层120A连接。第一绝缘层140A的开口142仅暴露发光二极管130A的第二电极134,第二反射层150填入开口142而与发光二极管130A的第二电极134电性连接。光感测装置1000A具有与光感测装置1000类似的优点与功效,于此便不再重述。Different from the light sensing device 1000, the light emitting diode 130A of the light sensing device 1000A is a horizontal light emitting diode. In other words, the first and second electrodes 132 and 134 of the light emitting diode 130A are located on the same side of the light emitting layer 136 . For example, the first and second electrodes 132 and 134 are located on the side of the light emitting layer 136 away from the first reflective layer 120A. The LED 130A can be fixed on the first reflective layer 120A through the adhesive 220 . The first electrode 132 of the LED 130A can be electrically connected to the first reflective layer 120 through the conductive pattern 230, that is, one end of the conductive pattern 230 is connected to the first electrode 132, and the conductive pattern 230 extends toward the first reflective layer 120A, and The other end of the conductive pattern 230 is connected to the first reflective layer 120A. The opening 142 of the first insulating layer 140A only exposes the second electrode 134 of the LED 130A, and the second reflective layer 150 fills the opening 142 to be electrically connected to the second electrode 134 of the LED 130A. The photo-sensing device 1000A has similar advantages and functions to those of the photo-sensing device 1000 , which will not be repeated here.
图3为本发明又一实施例的光感测装置的剖面示意图。图3的光感测装置1000B与图1的光感测装置1000类似,因此相同或相对应的元件,以相同或相对应的标号表示。光感测装置1000B与光感测装置1000的主要差异在于:光感测装置1000B的发光二极管130B与光感测装置1000的发光二极管130不同;此外,光感测装置1000B的发光二极管130B可不与第二反射层150B电性连接,且光感测装置1000B的第一反射层120B与光感测装置1000的第一反射层120略有不同。以下主要就此差异处说明,两者相同处还请依照图3中的标号参照前述说明,于此便不再重述。FIG. 3 is a schematic cross-sectional view of a light sensing device according to another embodiment of the present invention. The photo-sensing device 1000B in FIG. 3 is similar to the photo-sensing device 1000 in FIG. 1 , so the same or corresponding components are denoted by the same or corresponding reference numerals. The main difference between the light sensing device 1000B and the light sensing device 1000 is that: the light emitting diode 130B of the light sensing device 1000B is different from the light emitting diode 130 of the light sensing device 1000; in addition, the light emitting diode 130B of the light sensing device 1000B may not be the same as The second reflective layer 150B is electrically connected, and the first reflective layer 120B of the photo-sensing device 1000B is slightly different from the first reflective layer 120 of the photo-sensing device 1000 . The difference will be mainly described below, and the similarities between the two can be referred to the foregoing description according to the reference numerals in FIG. 3 , and will not be repeated here.
请参照图3,光感测装置1000B包括第一基板110、覆盖第一基板110的第一反射层120B、位于第一反射层120B上的发光二极管130B、覆盖第一反射层120B与发光二极管130B的第一绝缘层140B、配置于第一绝缘层140B上且位于发光二极管130B正上方的第二反射层150B、位于第二反射层150B正上方的感光单元PD以及与感光单元PD电性连接的主动元件T。发光二极管130B发出的光束L1、L2、L3被第一反射层120B以及第二反射层150B其中至少一个或者第一、二反射层120、150与栅极G反射后从感光单元PD旁边射出。Referring to FIG. 3 , the light sensing device 1000B includes a first substrate 110 , a first reflective layer 120B covering the first substrate 110 , a light emitting diode 130B located on the first reflective layer 120B, and a light emitting diode 130B covering the first reflective layer 120B. The first insulating layer 140B, the second reflective layer 150B disposed on the first insulating layer 140B and directly above the light emitting diode 130B, the photosensitive unit PD located directly above the second reflective layer 150B, and the photosensitive unit PD are electrically connected Active element T. The light beams L1, L2, L3 emitted by the light emitting diode 130B are reflected by at least one of the first reflective layer 120B and the second reflective layer 150B or the first and second reflective layers 120, 150 and the grid G, and then exit the photosensitive unit PD.
与光感测装置1000不同的是,光感测装置1000B的发光二极管130B是水平式发光二极管。换言之,发光二极管130B的第一、二电极132、134位于发光层136的同一侧。发光二极管130B可透过粘性体220固定于第一反射层120B上。发光二极管130B的第一、二电极132、134可分别透过导电图案232、234分别与第一反射层120B上的驱动线路电性连接,即导电图案232一端与第二电极134连接,且导电图案232往第一反射层120A方向延伸,而导电图案232另一端与第一反射层120A连接,导电图案234一端与第一电极132连接,且导电图案234往第一反射层120A方向延伸,而导电图案234另一端与第一反射层120A连接,其中,导电图案232、234是往发光二极管130B不同边的第一反射层120A方向延伸,即第一反射层120A具有第一部分(未图示)与第二部分(未图示),第一部分与第二部分分隔开来,以传递不同的电位且防止发光二极管130B的第一与第二电极132与134发生短路。因此,导电图案232是往第一反射层120A的第一部分(未图示)延伸,导电图案234是往第一反射层120A的第二部分(未图示)延伸。第二反射层150B可不与发光二极管130B连接,即第一绝缘层140B不存在任何开口142,且第二反射层150B设置于发光二极管130B上方的第一绝缘层140B上。光感测装置1000B具有与光感测装置1000类似的优点与功效,于此便不再重述。Different from the light sensing device 1000, the light emitting diode 130B of the light sensing device 1000B is a horizontal light emitting diode. In other words, the first and second electrodes 132 and 134 of the light emitting diode 130B are located on the same side of the light emitting layer 136 . The LED 130B can be fixed on the first reflective layer 120B through the adhesive body 220 . The first and second electrodes 132 and 134 of the light emitting diode 130B can be electrically connected to the driving circuit on the first reflective layer 120B through the conductive patterns 232 and 234 respectively, that is, one end of the conductive pattern 232 is connected to the second electrode 134 and conducts electricity. The pattern 232 extends toward the first reflective layer 120A, and the other end of the conductive pattern 232 is connected to the first reflective layer 120A, and one end of the conductive pattern 234 is connected to the first electrode 132, and the conductive pattern 234 extends toward the first reflective layer 120A, and The other end of the conductive pattern 234 is connected to the first reflective layer 120A, wherein the conductive patterns 232 and 234 extend toward the first reflective layer 120A on different sides of the LED 130B, that is, the first reflective layer 120A has a first portion (not shown) Separated from the second portion (not shown), the first portion and the second portion are separated to transmit different potentials and prevent short circuiting of the first and second electrodes 132 and 134 of the LED 130B. Therefore, the conductive pattern 232 extends toward the first portion (not shown) of the first reflective layer 120A, and the conductive pattern 234 extends toward the second portion (not shown) of the first reflective layer 120A. The second reflective layer 150B may not be connected to the light emitting diode 130B, that is, the first insulating layer 140B does not have any opening 142 , and the second reflective layer 150B is disposed on the first insulating layer 140B above the light emitting diode 130B. The photo-sensing device 1000B has similar advantages and functions to those of the photo-sensing device 1000 , which will not be repeated here.
图4A至图4F为本发明再一实施例的光感测装置的制造流程剖面示意图。请参照图4A,首先,提供第一基板310。第一基板310可为透光第一基板或不透光/反光第一基板。举例而言,透光第一基板的材质可为玻璃、石英、塑胶或其它适当材料,不透光/反光第一基板的材质可为晶圆、陶瓷或其它适当材料,但本发明不以此为限。接着,形成导电层320,以覆盖第一基板310。在本实施例中,导电层320包括彼此分离的栅极G与遮光图案322。栅极G设置于第一基板310上且与遮光图案322位于同一膜层。导电层320可选用导电材料,例如:金属、合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或是金属材料与其它导电材料的堆叠层,但本发明不以此为限。4A to 4F are schematic cross-sectional views of the manufacturing process of the photo-sensing device according to another embodiment of the present invention. Referring to FIG. 4A , firstly, a first substrate 310 is provided. The first substrate 310 may be a transparent first substrate or an opaque/reflective first substrate. For example, the material of the light-transmitting first substrate can be glass, quartz, plastic or other suitable materials, and the material of the opaque/reflective first substrate can be wafer, ceramics or other suitable materials, but the present invention does not limit. Next, a conductive layer 320 is formed to cover the first substrate 310 . In this embodiment, the conductive layer 320 includes a gate G and a light-shielding pattern 322 separated from each other. The gate G is disposed on the first substrate 310 and located on the same film layer as the light-shielding pattern 322 . The conductive layer 320 can be made of conductive materials, such as: metal, alloy, nitride of metal material, oxide of metal material, oxynitride of metal material, or a stacked layer of metal material and other conductive materials, but the present invention does not rely on This is the limit.
请参照图4A,接着,形成第一绝缘层330,以覆盖栅极G与遮光图案322。第一绝缘层330可具有暴露出部分遮光图案322的接触洞332。在本实施例中,第一绝缘层330的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。接着,在第一绝缘层330上形成通道层CH。通道层CH设置于栅极G上方。在本实施例中,通道层CH可为单层或多层结构,其包含非晶硅、多晶硅、微晶硅、单晶硅、有机半导体材料、氧化物半导体材料(例如:铟锌氧化物、铟锗锌氧化物、或是其它合适的材料、或上述的组合)、或其它合适的材料、或含有掺杂物(dopant)于上述材料中、或上述组合。Referring to FIG. 4A , next, a first insulating layer 330 is formed to cover the gate G and the light-shielding pattern 322 . The first insulating layer 330 may have a contact hole 332 exposing a portion of the light-shielding pattern 322 . In this embodiment, the material of the first insulating layer 330 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof. Next, a channel layer CH is formed on the first insulating layer 330 . The channel layer CH is disposed above the gate G. In this embodiment, the channel layer CH can be a single-layer or multi-layer structure, which includes amorphous silicon, polycrystalline silicon, microcrystalline silicon, single crystal silicon, organic semiconductor materials, oxide semiconductor materials (for example: indium zinc oxide, InGeZnO, or other suitable materials, or the above combinations), or other suitable materials, or containing dopant in the above materials, or the above combinations.
请参照图4A,接着,可于第一绝缘层330上形成粘性体340与发光二极管350。发光二极管350可透过粘性体340固定在第一基板310上。在本实施例中,发光二极管350可为水平式发光二极管。换言之,发光二极管350的第一、二电极352、354可位于发光层356的同一侧,但本发明不以此为限。Referring to FIG. 4A , next, an adhesive body 340 and a light emitting diode 350 can be formed on the first insulating layer 330 . The LED 350 can be fixed on the first substrate 310 through the adhesive body 340 . In this embodiment, the LED 350 can be a horizontal LED. In other words, the first and second electrodes 352 and 354 of the light emitting diode 350 can be located on the same side of the light emitting layer 356 , but the invention is not limited thereto.
请参照图4A,接着,形成导电层360。在本实施例中,导电层360的材质可为金属、合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或是金属材料与其它导电材料的堆叠层,但本发明不以此为限。导电层360包括线路图案362、源极S、漏极D与第一感光电极364。线路图案362、源极S、漏极D以及第一感光电极364属于同一膜层。线路图案362与发光二极管350的第一电极352以及第二电极354电性连接。线路图案362还可填入第一绝缘层330的接触洞332,以和遮光图案322电性连接。举例而言,与第一电极352连接的线路图案362可称为第一线路图案,与第二电极354连接的线路图案362可称为第二线路图案,则第一线路图案一端与第一电极352连接,第一线路图案另一端经由接触洞332与遮光图案322连接,而第二线路图案一端与第二电极354连接,第二线路图案另一端设置于第一绝缘层330上,其中,第一与第二线路图案分隔开来,以传递不同的电位且防止发光二极管350的第一与第二电极332与334发生短路。源极S与漏极D设置于通道层CH上,且分别与通道层CH的两侧电性连接。源极S与漏极D其中之一(例如:漏极D)与第一感光电极364电性连接,且第一感光电极364与遮光图案322至少一部分重叠。源极S、漏极D、通道层CH以及栅极G构成主动元件T。本实施例的主动元件T以底栅型晶体管为范例。于其它实施例中,主动元件T可为顶栅型晶体管或其它合适的类型的晶体管。Referring to FIG. 4A , next, a conductive layer 360 is formed. In this embodiment, the material of the conductive layer 360 can be metal, alloy, nitride of metal material, oxide of metal material, oxynitride of metal material, or a stacked layer of metal material and other conductive materials, but this The invention is not limited thereto. The conductive layer 360 includes a circuit pattern 362 , a source S, a drain D and a first photosensitive electrode 364 . The circuit pattern 362 , the source S, the drain D and the first photosensitive electrode 364 belong to the same film layer. The circuit pattern 362 is electrically connected to the first electrode 352 and the second electrode 354 of the LED 350 . The circuit pattern 362 can also fill in the contact hole 332 of the first insulating layer 330 to be electrically connected to the light-shielding pattern 322 . For example, the circuit pattern 362 connected to the first electrode 352 can be called a first circuit pattern, and the circuit pattern 362 connected to the second electrode 354 can be called a second circuit pattern, then one end of the first circuit pattern and the first electrode 352 connection, the other end of the first circuit pattern is connected to the light-shielding pattern 322 through the contact hole 332, and one end of the second circuit pattern is connected to the second electrode 354, and the other end of the second circuit pattern is arranged on the first insulating layer 330, wherein, the first One is separated from the second circuit pattern to transmit different potentials and prevent short circuit between the first and second electrodes 332 and 334 of the LED 350 . The source S and the drain D are disposed on the channel layer CH, and are respectively electrically connected to two sides of the channel layer CH. One of the source S and the drain D (eg, the drain D) is electrically connected to the first photosensitive electrode 364 , and the first photosensitive electrode 364 overlaps at least a part of the light shielding pattern 322 . The source S, the drain D, the channel layer CH and the gate G constitute the active element T. The active device T in this embodiment is exemplified by a bottom-gate transistor. In other embodiments, the active device T may be a top-gate transistor or other suitable types of transistors.
请参照图4A,接着,形成绝缘层370。绝缘层370覆盖发光二极管350、线路图案362、源极S与漏极D。绝缘层370具有暴露出部分第一感光电极364的开口372。绝缘层370的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。接着,于绝缘层370的开口372边缘上,形成挡光结构380。挡光结构380具有暴露部分第一感光电极364的开口382。挡光结构380还具有定义出开口382的内缘380a、相对于内缘380a的外缘380b、面向第一基板310的底面380c以及远离第一基板310的第一顶面380d。本实例的挡光结构380的开口382正投影面积小于绝缘层370的开口372正投影面积,且开口382位于开口372内,即内缘380a会各别覆盖开口372的内缘及部分第一感光电极364为范例,可使得后续工艺有较佳的容许度。于其它实施例中,挡光结构380的开口382正投影面积大于绝缘层370的开口372正投影面积,且开口372位于开口382内,可使得感光层400正投影面积变大,即光感应面积变大,也可使得后续工艺有较佳的容许度。或者是,挡光结构380的开口382与绝缘层370的开口372重叠,且开口382的边缘与开口372的边缘对应。Referring to FIG. 4A , next, an insulating layer 370 is formed. The insulating layer 370 covers the LED 350 , the circuit pattern 362 , the source S and the drain D. As shown in FIG. The insulating layer 370 has an opening 372 exposing a portion of the first photosensitive electrode 364 . The material of the insulating layer 370 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof. Next, a light blocking structure 380 is formed on the edge of the opening 372 of the insulating layer 370 . The light blocking structure 380 has an opening 382 exposing a portion of the first photosensitive electrode 364 . The light blocking structure 380 also has an inner edge 380a defining the opening 382 , an outer edge 380b opposite to the inner edge 380a , a bottom surface 380c facing the first substrate 310 , and a first top surface 380d away from the first substrate 310 . The area of the orthographic projection of the opening 382 of the light blocking structure 380 in this example is smaller than the area of the orthographic projection of the opening 372 of the insulating layer 370, and the opening 382 is located in the opening 372, that is, the inner edge 380a will respectively cover the inner edge of the opening 372 and part of the first photoreceptor. The electrode 364 is an example, which can make subsequent processes have better tolerance. In other embodiments, the area of the orthographic projection of the opening 382 of the light blocking structure 380 is larger than the area of the orthographic projection of the opening 372 of the insulating layer 370, and the opening 372 is located in the opening 382, which can make the area of the orthographic projection of the photosensitive layer 400 larger, that is, the photosensitive area Larger, it can also make the follow-up process have a better tolerance. Alternatively, the opening 382 of the light blocking structure 380 overlaps with the opening 372 of the insulating layer 370 , and the edge of the opening 382 corresponds to the edge of the opening 372 .
请参照图4B,接着,形成反射层390。反射层390至少覆盖挡光结构380的外缘380b以及部分顶面380d且暴露出部分第一感光电极364。反射层390的材质可为金属、合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或是其它的合适的材料、或是前述材料至少二种的堆叠层,但本发明不以此为限。请参照图4C,接着,于第一感光电极364上形成感光层400。反射层390仍然会暴露出感光层400。感光层400位于挡光结构380的开口382中。挡光结构380至少位于感光层400的相对两侧。在本实施例中,挡光结构380可围绕感光层400。感光层400的材质例如为SivOw,其中v、w均不为零,但不限于此。感光层400例如为包括依序堆叠的一第一型半导体材料层、一本征半导体材料层以及一第二型半导体材料层,且第一型半导体材料层以及第二型半导体材料层其中一个为p型半导体材料,另一个为n型半导体材料。然而,本发明不限于此,在其他实施例中,感光层400的材质也可为依序堆叠的一第一型半导体材料层以及一第二型半导体材料层,且第一型半导体材料层与第二型半导体材料层极性不同、或是第一型半导体材料层与本征半导体材料层,或是其他适合的材料。Referring to FIG. 4B , next, a reflective layer 390 is formed. The reflective layer 390 at least covers the outer edge 380b and part of the top surface 380d of the light blocking structure 380 and exposes part of the first photosensitive electrode 364 . The material of the reflective layer 390 can be metal, alloy, nitride of metal material, oxide of metal material, oxynitride of metal material, or other suitable materials, or a stacked layer of at least two of the foregoing materials, but The present invention is not limited thereto. Referring to FIG. 4C , next, a photosensitive layer 400 is formed on the first photosensitive electrode 364 . The reflective layer 390 still exposes the photosensitive layer 400 . The photosensitive layer 400 is located in the opening 382 of the light blocking structure 380 . The light blocking structure 380 is at least located on opposite sides of the photosensitive layer 400 . In this embodiment, the light blocking structure 380 may surround the photosensitive layer 400 . The material of the photosensitive layer 400 is, for example, SivOw, wherein v and w are not zero, but not limited thereto. The photosensitive layer 400 includes, for example, a first-type semiconductor material layer, an intrinsic semiconductor material layer, and a second-type semiconductor material layer stacked in sequence, and one of the first-type semiconductor material layer and the second-type semiconductor material layer is One is a p-type semiconductor material and the other is an n-type semiconductor material. However, the present invention is not limited thereto. In other embodiments, the material of the photosensitive layer 400 may also be a first-type semiconductor material layer and a second-type semiconductor material layer stacked in sequence, and the first-type semiconductor material layer and the second-type semiconductor material layer The polarity of the second-type semiconductor material layer is different, or the first-type semiconductor material layer and the intrinsic semiconductor material layer, or other suitable materials.
请参照图4D,接着,形成绝缘层410。绝缘层410覆盖反射层390、主动元件T、发光二极管350以及部分绝缘层370。绝缘层410具有开口412。开口412至少暴露出感光层400。在本实施例中,开口412还可暴露出挡光结构380的内缘380a,但本发明不以此为限。绝缘层410的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。Referring to FIG. 4D , next, an insulating layer 410 is formed. The insulating layer 410 covers the reflective layer 390 , the active device T, the LED 350 and part of the insulating layer 370 . The insulating layer 410 has an opening 412 . The opening 412 at least exposes the photosensitive layer 400 . In this embodiment, the opening 412 can also expose the inner edge 380 a of the light blocking structure 380 , but the invention is not limited thereto. The material of the insulating layer 410 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof.
请参照图4E,接着,形成第二感光电极420,以覆盖感光层400。第二感光电极420为透光电极。在本实施例中,第二感光电极420的材质可选用铟锡氧化物、铟锌氧化物、铝锡氧化物、铝锌氧化物、铟锗锌氧化物、石墨烯、纳米银、纳米炭管/杆、或者其它合适的氧化物、或者上述至少二者的堆叠层,但本发明不以此为限。第一感光电极364、感光层400与第二感光电极420构成感光单元PD。第二感光电极420相对于第一感光电极364。感光层400夹设于第一感光电极364与第二感光电极420之间。第一感光电极364位于感光层400与第一基板310之间。在本实施例中,第二感光电极420可跨越挡光结构380其中至少一个。换言之,部分第二感光电极420可位于开口382之外,但本发明不以此为限。在本实施例中,遮光图案322可位于第一基板310与感光单元PD之间,以遮蔽感光层400。遮光图案322与栅极G可为同一步骤形成,位于第一基板310的表面310a上方。发光二极管350可借由第一绝缘层330的接触洞332与遮光图案322接触。进一步来说,发光二极管350电性连接至遮光图案322,而遮光图案322可作为发光二极管350的驱动线路,但本发明不以此为限。Referring to FIG. 4E , next, a second photosensitive electrode 420 is formed to cover the photosensitive layer 400 . The second photosensitive electrode 420 is a transparent electrode. In this embodiment, the material of the second photosensitive electrode 420 can be selected from indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium germanium zinc oxide, graphene, nano silver, carbon nano tube /rod, or other suitable oxides, or stacked layers of at least two of the above, but the present invention is not limited thereto. The first photosensitive electrode 364 , the photosensitive layer 400 and the second photosensitive electrode 420 form a photosensitive unit PD. The second photosensitive electrode 420 is opposite to the first photosensitive electrode 364 . The photosensitive layer 400 is sandwiched between the first photosensitive electrode 364 and the second photosensitive electrode 420 . The first photosensitive electrode 364 is located between the photosensitive layer 400 and the first substrate 310 . In this embodiment, the second photosensitive electrode 420 can straddle at least one of the light blocking structures 380 . In other words, part of the second photosensitive electrodes 420 may be located outside the opening 382 , but the invention is not limited thereto. In this embodiment, the light shielding pattern 322 may be located between the first substrate 310 and the photosensitive unit PD to shield the photosensitive layer 400 . The light-shielding pattern 322 and the gate G can be formed in the same step, and are located above the surface 310 a of the first substrate 310 . The light emitting diode 350 can be in contact with the light-shielding pattern 322 through the contact hole 332 of the first insulating layer 330 . Further, the light-emitting diode 350 is electrically connected to the light-shielding pattern 322, and the light-shielding pattern 322 can be used as a driving circuit of the light-emitting diode 350, but the invention is not limited thereto.
请参照图4F,接着,形成保护层430,以覆盖保护层430下方的所有构件,例如:主动元件T、感光单元PD等。于此,便完成了本实施例的光感测装置2000。在本实施例中,保护层430的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。Please refer to FIG. 4F , and then, a protective layer 430 is formed to cover all components under the protective layer 430 , such as the active device T, the photosensitive unit PD, and the like. Here, the light sensing device 2000 of this embodiment is completed. In this embodiment, the protective layer 430 can be made of inorganic materials (for example, silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), organic materials, or a combination thereof.
图4F所示,发光二极管350配置于第一基板310上且位于感光单元PD旁。挡光结构380与感光单元PD及发光二极管350实质上位于同一平面,且挡光结构380至少位于感光单元PD的两侧。更进一步地说,感光层400具有与第二感光电极420接触的接触面400a。发光二极管350具有远离第一基板110的顶面350a。在本实施例中,挡光结构380的顶面380d与第一基板310的距离h1大于接触面400a与第一基板310的距离h2以及发光二极管350的顶面350a与第一基板310的距离h3。简言之,挡光结构380高于发光二极管350及感光层400。As shown in FIG. 4F , the light emitting diode 350 is disposed on the first substrate 310 and located beside the photosensitive unit PD. The light blocking structure 380 is substantially located on the same plane as the photosensitive unit PD and the light emitting diode 350 , and the light blocking structure 380 is located at least on both sides of the photosensitive unit PD. Furthermore, the photosensitive layer 400 has a contact surface 400 a contacting with the second photosensitive electrode 420 . The LED 350 has a top surface 350 a away from the first substrate 110 . In this embodiment, the distance h1 between the top surface 380d of the light blocking structure 380 and the first substrate 310 is greater than the distance h2 between the contact surface 400a and the first substrate 310 and the distance h3 between the top surface 350a of the LED 350 and the first substrate 310 . In short, the light blocking structure 380 is higher than the LED 350 and the photosensitive layer 400 .
由于发光二极管350与感光单元PD是位于同一第一基板310上,也就是说,发光二极管350内建在感光单元PD所属的光感测面板中,因此,光感测装置2000可省去外挂于光感测面板之外的背光模块,从而光感测装置2000的厚度能够减薄。此外,借由挡光结构380的设计,发光二极管350所发出的光束L会被挡光结构380阻挡,而不容易误入感光单元PD的感光层400中。借此,可以改善外挂于光感测面板之外的背光模块所造成的信号干扰问题。此外,透过反射层390的设置,除了可降低不当的光束L进入感光层400的机率外,还可将光束L反射至光感测装置2000外,以提高光束L的利用效率。Since the light-emitting diode 350 and the photosensitive unit PD are located on the same first substrate 310, that is, the light-emitting diode 350 is built in the light-sensing panel to which the photosensitive unit PD belongs, therefore, the light-sensing device 2000 can be omitted from the The backlight module other than the light sensing panel, so the thickness of the light sensing device 2000 can be reduced. In addition, due to the design of the light blocking structure 380 , the light beam L emitted by the light emitting diode 350 is blocked by the light blocking structure 380 and is not easy to enter into the photosensitive layer 400 of the photosensitive unit PD by mistake. In this way, the signal interference problem caused by the backlight module installed outside the light sensing panel can be improved. In addition, the configuration of the reflective layer 390 not only reduces the probability of the inappropriate light beam L entering the photosensitive layer 400, but also reflects the light beam L to the outside of the light sensing device 2000, so as to improve the utilization efficiency of the light beam L.
图5为本发明一实施例的光感测装置的剖面示意图。请参照图5,光感测装置3000包括第一基板510、主动元件T1、第一绝缘层520、反射电极530、发光二极管540、第二绝缘层550以及感光单元PD。第一基板510具有承载面510a。第一基板510可为透光第一基板或不透光/反光第一基板。举例而言,透光第一基板的材质可为玻璃、石英、塑胶或其它适当材料,不透光/反光第一基板的材质可为晶圆、陶瓷或其它适当材料,但本发明不以此为限。FIG. 5 is a schematic cross-sectional view of a light sensing device according to an embodiment of the present invention. Referring to FIG. 5 , the light sensing device 3000 includes a first substrate 510 , an active device T1 , a first insulating layer 520 , a reflective electrode 530 , a light emitting diode 540 , a second insulating layer 550 and a photosensitive unit PD. The first substrate 510 has a carrying surface 510a. The first substrate 510 may be a transparent first substrate or an opaque/reflective first substrate. For example, the material of the light-transmitting first substrate can be glass, quartz, plastic or other suitable materials, and the material of the opaque/reflective first substrate can be wafer, ceramics or other suitable materials, but the present invention does not limit.
主动元件T1配置于第一基板510的承载面510a上。主动元件T1包括薄膜晶体管。薄膜晶体管包括栅极G1、与栅极G1重叠的通道层CH1以及分别与通道层CH1两侧电性连接的源极S1与漏极D1。栅极G1与通道层CH1之间夹有栅绝缘层GI。在本实施例中,通道层CH1可位于栅极G1上方。换言之,主动元件T1可为底部栅极型薄膜晶体管(bottom gate TFT)。然而,本发明不限于此,在其他实施例中,主动元件T1可为顶部栅极型薄膜晶体管(top gate TFT)或其他适当元件。本实施例的光感测装置3000可进一步包括主动元件T2。主动元件T1与主动元件T2可位于同一平面(例如:承载面510a)上,但本发明不以此为限。主动元件T2包括薄膜晶体管。薄膜晶体管包括栅极G2、与栅极G2重叠的通道层CH2以及分别与通道层CH2两侧电性连接的源极S2与漏极D2。栅极G2与通道层CH2之间夹有栅绝缘层GI。在本实施例中,通道层CH2可位于栅极G2上方。换言之,主动元件T2可为底部栅极型薄膜晶体管。然而,本发明不限于此,在其他实施例中,主动元件T2可为顶部栅极型薄膜晶体管或其他适当元件。The active device T1 is disposed on the carrying surface 510 a of the first substrate 510 . The active element T1 includes thin film transistors. The thin film transistor includes a gate G1 , a channel layer CH1 overlapping with the gate G1 , and a source S1 and a drain D1 electrically connected to two sides of the channel layer CH1 . A gate insulating layer GI is interposed between the gate G1 and the channel layer CH1. In this embodiment, the channel layer CH1 may be located above the gate G1. In other words, the active device T1 can be a bottom gate TFT. However, the present invention is not limited thereto. In other embodiments, the active device T1 may be a top gate TFT or other suitable devices. The light sensing device 3000 of this embodiment may further include an active element T2. The active element T1 and the active element T2 may be located on the same plane (for example: the bearing surface 510 a ), but the invention is not limited thereto. The active element T2 includes thin film transistors. The thin film transistor includes a gate G2 , a channel layer CH2 overlapping with the gate G2 , and a source S2 and a drain D2 electrically connected to two sides of the channel layer CH2 . A gate insulating layer GI is interposed between the gate G2 and the channel layer CH2. In this embodiment, the channel layer CH2 may be located above the gate G2. In other words, the active device T2 may be a bottom gate thin film transistor. However, the present invention is not limited thereto. In other embodiments, the active device T2 may be a top gate thin film transistor or other suitable devices.
第一绝缘层520覆盖主动元件T1且具有第一开口522。第一绝缘层520具有定义出第一开口522的侧壁524。在本实施例中,第一绝缘层520的第一开口522可暴露出主动元件T1的源极S1与漏极D1其中之一(例如:漏极D1)。第一绝缘层520还可具有第一开口522外的另一第二开口526。第二开口526可暴露出主动元件T2的源极S2与漏极D2其中之一(例如:漏极D2)。第一绝缘层520的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。The first insulating layer 520 covers the active device T1 and has a first opening 522 . The first insulating layer 520 has a sidewall 524 defining a first opening 522 . In this embodiment, the first opening 522 of the first insulating layer 520 can expose one of the source S1 and the drain D1 (eg, the drain D1 ) of the active device T1 . The first insulating layer 520 may further have another second opening 526 outside the first opening 522 . The second opening 526 can expose one of the source S2 and the drain D2 (eg, the drain D2 ) of the active device T2 . The material of the first insulating layer 520 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof.
反射电极530位于第一开口522中,且至少覆盖第一绝缘层520的侧壁524。在本实施例中,反射电极530可完全地覆盖侧壁524。更进一步地说,反射电极530还覆盖被第一开口522暴露出的源极S1与漏极D1其中之一(例如:漏极D1)。换言之,在本实施例中,反射电极530可呈杯状物,且完全地覆盖第一开口522的侧壁524与第一开口522暴露的构件(例如:部分的漏极D1)。所述杯状物的内径d可随着远离第一基板510而渐增。然而,本发明不限于此,在其他实施例中,反射电极530也可覆盖侧壁524而不覆盖被第一开口522暴露出的构件。在本实施例中,反射电极530的材质可为金属、合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或是其它合适的材料、或是上述至少二种材料的堆叠层,但本发明不以此为限。The reflective electrode 530 is located in the first opening 522 and at least covers the sidewall 524 of the first insulating layer 520 . In this embodiment, the reflective electrode 530 can completely cover the sidewall 524 . Furthermore, the reflective electrode 530 also covers one of the source S1 and the drain D1 (eg, the drain D1 ) exposed by the first opening 522 . In other words, in this embodiment, the reflective electrode 530 may be in the shape of a cup and completely cover the sidewall 524 of the first opening 522 and the exposed components of the first opening 522 (eg, part of the drain D1 ). The inner diameter d of the cup may gradually increase as it gets away from the first substrate 510 . However, the present invention is not limited thereto, and in other embodiments, the reflective electrode 530 may also cover the sidewall 524 without covering the components exposed by the first opening 522 . In this embodiment, the material of the reflective electrode 530 can be metal, alloy, nitride of metal material, oxide of metal material, oxynitride of metal material, or other suitable materials, or at least two of the above materials. The stacked layers, but the present invention is not limited thereto.
本实施例的光感测装置3000还包括导电图案532。导电图案532可与反射电极530位于同一膜层。导电图案532配置于第一绝缘层520上,即导电图案532会配置于主动元件T1与T2上方的第一绝缘层520上。导电图案532填入第一绝缘层520的第二开口526而与主动元件T2的源极S2与漏极D2之一电性连接,其中,导电图案532与反射电极530相分隔开来,以使得导电图案532与反射电极530所分别连接的主动元件T1与T2能够各别运作,而不相互干扰。需说明的是,本发明并不限制光感测装置一定要还包括导电图案532,在其他实施例中,也可不设置导电图案532,以下将于后续实施例中举例说明。The light sensing device 3000 of this embodiment further includes a conductive pattern 532 . The conductive pattern 532 and the reflective electrode 530 can be located on the same film layer. The conductive pattern 532 is disposed on the first insulating layer 520 , that is, the conductive pattern 532 is disposed on the first insulating layer 520 above the active devices T1 and T2 . The conductive pattern 532 fills the second opening 526 of the first insulating layer 520 and is electrically connected to one of the source S2 and the drain D2 of the active device T2, wherein the conductive pattern 532 is separated from the reflective electrode 530 for The active elements T1 and T2 respectively connected to the conductive pattern 532 and the reflective electrode 530 can operate independently without interfering with each other. It should be noted that the present invention does not limit the photo-sensing device to include the conductive pattern 532 , and in other embodiments, the conductive pattern 532 may not be provided, and examples will be described in the following embodiments.
发光二极管540配置于第一开口522中。反射电极530环绕发光二极管540。在本实施例中,发光二极管540可位于反射电极530上,且可透过反射电极530与第一主动元件T1的源极S1与漏极D1之一电性连接。然而,本发明不限于此,在其他实施例中,反射电极530也可暴露出的源极S1与漏极D1其中之一,即反射电极530不与源极S1以及漏极D1连接,而发光二极管540可直接位于源极S1与漏极D1之一上而与主动元件T1电性连接。The LED 540 is disposed in the first opening 522 . The reflective electrode 530 surrounds the LED 540 . In this embodiment, the light emitting diode 540 can be located on the reflective electrode 530 and can be electrically connected to one of the source S1 and the drain D1 of the first active device T1 through the reflective electrode 530 . However, the present invention is not limited thereto. In other embodiments, the reflective electrode 530 may also expose one of the source S1 and the drain D1, that is, the reflective electrode 530 is not connected to the source S1 and the drain D1, and emits light. The diode 540 can be directly located on one of the source S1 and the drain D1 to be electrically connected to the active device T1.
反射电极530在与垂直方向y平行的方向上具有离第一基板510最远的一点530a。垂直方向y平行于承载面510a的法线方向。点530a与第一基板510的距离为H1。发光二极管540在与方向y平行的方向上具有离第一基板510最远的一点540a。点540a与第一基板510的距离为H2。在本实施例中,H1≥H2。换言之,反射电极530的高度可等于或大于发光二极管540的高度,但本发明不以此为限。另一方面,发光二极管540在与垂直方向y垂直的水平方向x上具有最大宽度W,而H1、H2、W可满足下式:0≤(H1-H2)≤(2/3W)。当H1、H2、W满足下式:0≤(H1-H2)≤(2/3W)时,光感测装置3000的视角及感测功能可同时最佳化。The reflective electrode 530 has a point 530a farthest from the first substrate 510 in a direction parallel to the vertical direction y. The vertical direction y is parallel to the normal direction of the carrying surface 510a. The distance between the point 530a and the first substrate 510 is H1. The light emitting diode 540 has a point 540 a farthest from the first substrate 510 in a direction parallel to the direction y. The distance between the point 540a and the first substrate 510 is H2. In this embodiment, H1≥H2. In other words, the height of the reflective electrode 530 may be equal to or greater than that of the light emitting diode 540, but the invention is not limited thereto. On the other hand, the LED 540 has a maximum width W in the horizontal direction x perpendicular to the vertical direction y, and H1, H2, W can satisfy the following formula: 0≤(H1-H2)≤(2/3W). When H1, H2, W satisfy the following formula: 0≦(H1−H2)≦(2/3W), the viewing angle and sensing function of the light sensing device 3000 can be optimized at the same time.
第二绝缘层550覆盖发光二极管540以及反射电极530。在本实施例中,第二绝缘层550还覆盖导电图案532。第二绝缘层550具有第三开口552。第三开口552暴露出部分导电图案532。第二绝缘层550的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。The second insulating layer 550 covers the LED 540 and the reflective electrode 530 . In this embodiment, the second insulating layer 550 also covers the conductive pattern 532 . The second insulating layer 550 has a third opening 552 . The third opening 552 exposes part of the conductive pattern 532 . The material of the second insulating layer 550 can be an inorganic material (such as silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material, or a combination thereof.
感光单元PD配置于第二绝缘层550上。感光单元PD包括第一感光电极560、相对于第一感光电极560的第二感光电极570以及夹设于第一感光电极560与第二感光电极570之间的感光层580。绝缘层592的开口592a暴露出部分第一感光电极560,且感光层580可位于绝缘层592的开口592a中。第一感光电极560填入第二绝缘层550的第三开口552而与透过导电图案532与主动元件T2电性连接。第一感光电极560较第二感光电极570靠近第一基板510且为不透光/反光电极,且其材料可参阅前述的描述。第一感光电极560配置于第二绝缘层550上且于垂直方向y上不与发光二极管540重叠。换言之,不透光/反光的第一感光电极560与发光二极管540错开。第二感光电极570为透光电极。此外,在本实施例中,光感测装置3000可进一步包括保护层590。保护层590覆盖其下方的所有构件,例如:感光单元PD等。保护层590的材质可为无机材料(例如:氧化硅、氮化硅、氮氧化硅、或上述至少二种材料的堆叠层)、有机材料或上述组合。The photosensitive unit PD is disposed on the second insulating layer 550 . The photosensitive unit PD includes a first photosensitive electrode 560 , a second photosensitive electrode 570 opposite to the first photosensitive electrode 560 , and a photosensitive layer 580 sandwiched between the first photosensitive electrode 560 and the second photosensitive electrode 570 . The opening 592 a of the insulating layer 592 exposes part of the first photosensitive electrode 560 , and the photosensitive layer 580 can be located in the opening 592 a of the insulating layer 592 . The first photosensitive electrode 560 fills the third opening 552 of the second insulating layer 550 and is electrically connected to the active device T2 through the conductive pattern 532 . The first photosensitive electrode 560 is closer to the first substrate 510 than the second photosensitive electrode 570 and is an opaque/reflective electrode, and its material can refer to the foregoing description. The first photosensitive electrode 560 is disposed on the second insulating layer 550 and does not overlap with the light emitting diode 540 in the vertical direction y. In other words, the opaque/reflective first photosensitive electrode 560 and the light emitting diode 540 are staggered. The second photosensitive electrode 570 is a transparent electrode. In addition, in this embodiment, the light sensing device 3000 may further include a protective layer 590 . The protection layer 590 covers all components below it, such as the photosensitive unit PD and the like. The protective layer 590 can be made of inorganic materials (for example, silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), organic materials, or a combination thereof.
由于发光二极管540内建在感光单元PD所属的光感测面板中,因此,光感测装置3000可省去外挂于光感测面板之外的背光模块,从而光感测装置3000的厚度能够大幅减薄。此外,透过反射层530环绕发光二极管540周围的设计,反射层530可将发光二极管540发出的光束L往正视方向(即垂直方向y)集中。借此,当光感测装置3000检测物体F(例如:使用者手指)时,被物体F反射的光束L可以较小的反射角进入对应的感光单元PD中。如此一来,光感测装置3000检测到的物体F影像锐利度便能够提升,从而获得清晰的物体F影像。Since the light-emitting diode 540 is built in the photo-sensing panel to which the photo-sensing unit PD belongs, the photo-sensing device 3000 can save the backlight module that is hung outside the photo-sensing panel, so that the thickness of the photo-sensing device 3000 can be greatly reduced. thinning. In addition, through the design of the reflective layer 530 surrounding the LED 540 , the reflective layer 530 can concentrate the light beam L emitted by the LED 540 toward the front view direction (ie, the vertical direction y). Thereby, when the light sensing device 3000 detects an object F (for example, a user's finger), the light beam L reflected by the object F can enter the corresponding photosensitive unit PD at a relatively small reflection angle. In this way, the sharpness of the image of the object F detected by the light sensing device 3000 can be improved, so that a clear image of the object F can be obtained.
图6为本发明另一实施例的光感测装置的剖面示意图。图6的光感测装置3000A与图5的光感测装置3000类似,因此相同或相对应的元件以相同或相对应的表标号表示。光感测装置3000A与光感测装置3000的主要差异在于:光感测装置3000A的感光单元PD是配置在另一基板上,而不像光感测装置3000的感光单元PD直接配置于第一绝缘层520上。以下主要就此差异说明,两者相同处还请参照前述说明,于此便不再重述。FIG. 6 is a schematic cross-sectional view of a light sensing device according to another embodiment of the present invention. The photo-sensing device 3000A in FIG. 6 is similar to the photo-sensing device 3000 in FIG. 5 , so the same or corresponding components are denoted by the same or corresponding reference numerals. The main difference between the photo-sensing device 3000A and the photo-sensing device 3000 is that the photo-sensing unit PD of the photo-sensing device 3000A is arranged on another substrate, unlike the photo-sensing unit PD of the photo-sensing device 3000, which is directly arranged on the first substrate. on the insulating layer 520 . The difference is mainly described below, and for the similarities between the two, please refer to the above description, and will not be repeated here.
光感测装置3000A包括第一基板510、主动元件T1、第一绝缘层520、反射电极530、发光二极管540、第二绝缘层(当作第二基板)550A以及感光单元PD。第一基板510具有承载面510a。主动元件T1配置于第一基板510的承载面510a上。第一绝缘层520覆盖主动元件T1且具有第一开口522。第一绝缘层520具有定义出第一开口522的侧壁524。反射电极530位于第一开口522中且至少覆盖侧壁524。发光二极管540配置于第一开口522中。反射电极530环绕发光二极管540。第二绝缘层(当作第二基板)550A覆盖发光二极管540、主动元件T1与第一绝缘层520。感光单元PD配置于第二绝缘层550A(当作第二基板)上。感光单元PD包括第一感光电极560。第一感光电极560配置于第二绝缘层(当作第二基板)550A上且不与发光二极管540于垂直方向y上重叠,其中垂直方向y平行于承载面510a的法线方向。与光感测装置3000不同的是,第二绝缘层(当作第二基板)550A为另一基板而不与发光二极管540直接接触。主动元件T2与感光单元PD配置于另一基板上(即第二绝缘层(第二基板)550A)且与感光单元PD电性连接。换言之,主动元件T2与感光单元PD位于第二绝缘层(当作第二基板)550A的内表面上,而主动元件T1与发光二极管540位于第二绝缘层(当作第二基板)550A的外表面与第一基板510的承载面510a之间。发光二极管540与主动元件T2及感光单元PD错开。光感测装置3000A具有与光感测装置3000类似的功效与优点,于此便不再重述。The light sensing device 3000A includes a first substrate 510, an active device T1, a first insulating layer 520, a reflective electrode 530, a light emitting diode 540, a second insulating layer (serving as a second substrate) 550A, and a photosensitive unit PD. The first substrate 510 has a carrying surface 510a. The active device T1 is disposed on the carrying surface 510 a of the first substrate 510 . The first insulating layer 520 covers the active device T1 and has a first opening 522 . The first insulating layer 520 has a sidewall 524 defining a first opening 522 . The reflective electrode 530 is located in the first opening 522 and covers at least the sidewall 524 . The LED 540 is disposed in the first opening 522 . The reflective electrode 530 surrounds the LED 540 . The second insulating layer (serving as the second substrate) 550A covers the LED 540 , the active device T1 and the first insulating layer 520 . The photosensitive unit PD is disposed on the second insulating layer 550A (served as the second substrate). The photosensitive unit PD includes a first photosensitive electrode 560 . The first photosensitive electrode 560 is disposed on the second insulating layer (serving as the second substrate) 550A and does not overlap with the LED 540 in the vertical direction y, wherein the vertical direction y is parallel to the normal direction of the carrying surface 510a. Different from the photo-sensing device 3000 , the second insulating layer (served as the second substrate) 550A is another substrate without direct contact with the LED 540 . The active device T2 and the photosensitive unit PD are disposed on another substrate (ie, the second insulating layer (second substrate) 550A) and electrically connected to the photosensitive unit PD. In other words, the active element T2 and the photosensitive unit PD are located on the inner surface of the second insulating layer (served as the second substrate) 550A, while the active element T1 and the LED 540 are located outside the second insulating layer (served as the second substrate) 550A. surface and the carrying surface 510 a of the first substrate 510 . The light emitting diode 540 is staggered from the active device T2 and the photosensitive unit PD. The photo-sensing device 3000A has functions and advantages similar to those of the photo-sensing device 3000, which will not be repeated here.
综上所述,在本发明一实施例的光感测装置中,发光二极管内建在感光单元所属的光感测面板中,因此,光感测装置可不包括位于光感测面板外的背光模块,从而光感测装置的厚度能够大幅减薄。此外,由于发光二极管设置于第一、二反射层之间且感光单元设置于第二反射层上方,因此发光二极管所发出的光束被第一、二反射层反射后,会从感光单元旁边穿出光感测装置,而不容易误入感光单元的感光层。借此,可以改善外挂于光感测面板之外的背光模块所造成的信号干扰问题。To sum up, in the light-sensing device according to an embodiment of the present invention, the light-emitting diodes are built into the light-sensing panel to which the light-sensing unit belongs. Therefore, the light-sensing device may not include a backlight module located outside the light-sensing panel , so that the thickness of the light sensing device can be greatly reduced. In addition, since the light-emitting diode is disposed between the first and second reflective layers and the photosensitive unit is disposed above the second reflective layer, the light beam emitted by the light-emitting diode will pass through the side of the photosensitive unit after being reflected by the first and second reflective layers The photosensitive device is not easy to enter the photosensitive layer of the photosensitive unit by mistake. In this way, the signal interference problem caused by the backlight module installed outside the light sensing panel can be improved.
在本发明另一实施例的光感测装置中,除了因发光二极管内建在感光单元所属的光感测面板中而使光感测装置的厚度能够大幅减薄之外,借由至少配置于发光二极管两侧的挡光结构,发光二极管发出的光束会被挡光结构阻挡,而不容易误入感光单元的感光层中。借此,可以改善外挂于光感测面板之外的背光模块所造成的信号干扰问题。In another embodiment of the light-sensing device of the present invention, in addition to the fact that the light-emitting diode is built into the light-sensing panel to which the light-sensing unit belongs, the thickness of the light-sensing device can be greatly reduced, by at least disposing the The light-shielding structures on both sides of the light-emitting diodes, the light beams emitted by the light-emitting diodes will be blocked by the light-shielding structures, and will not easily enter the photosensitive layer of the photosensitive unit by mistake. In this way, the signal interference problem caused by the backlight module installed outside the light sensing panel can be improved.
在本发明再一实施例的光感测装置中,除了因发光二极管内建在感光单元所属的光感测面板中而使光感测装置的厚度能够大幅减薄之外,借由环绕在发光二极管的反射层,能够将发光二极管发出的光束往正视方向集中。借此,当光感测装置检测物体时,被物体反射的光束可以较小的反射角进入对应的感光单元中。如此一来,光感测装置检测到的物体影像锐利度便能够提升,从而获得清晰的物体影像。In the photo-sensing device according to another embodiment of the present invention, in addition to the fact that the light-emitting diode is built into the photo-sensing panel to which the photo-sensing unit belongs, the thickness of the photo-sensing device can be greatly reduced, and by surrounding the light-emitting The reflective layer of the diode can concentrate the light beam emitted by the light-emitting diode toward the front view direction. Thereby, when the light sensing device detects an object, the light beam reflected by the object can enter the corresponding light sensing unit at a relatively small reflection angle. In this way, the sharpness of the object image detected by the light sensing device can be improved, so as to obtain a clear object image.
当然,本发明还可有其它多种实施例,在不背离本发明精神及其实质的情况下,熟悉本领域的技术人员当可根据本发明作出各种相应的改变和变形,但这些相应的改变和变形都应属于本发明所附的权利要求的保护范围。Certainly, the present invention also can have other multiple embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding Changes and deformations should all belong to the protection scope of the appended claims of the present invention.
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