CN107045074B - A kind of needle tip of scanning tunnel microscope preparation facilities and preparation method thereof - Google Patents
A kind of needle tip of scanning tunnel microscope preparation facilities and preparation method thereof Download PDFInfo
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- CN107045074B CN107045074B CN201710370403.9A CN201710370403A CN107045074B CN 107045074 B CN107045074 B CN 107045074B CN 201710370403 A CN201710370403 A CN 201710370403A CN 107045074 B CN107045074 B CN 107045074B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 28
- 239000000523 sample Substances 0.000 claims abstract description 55
- 229910052709 silver Inorganic materials 0.000 claims abstract description 51
- 239000004332 silver Substances 0.000 claims abstract description 51
- 238000005260 corrosion Methods 0.000 claims abstract description 18
- 230000007797 corrosion Effects 0.000 claims abstract description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 230000002572 peristaltic effect Effects 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 7
- 230000005641 tunneling Effects 0.000 abstract description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 41
- 230000008859 change Effects 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The present invention relates to scanning tunneling microscope fields more particularly to a kind of needle tip of scanning tunnel microscope preparation facilities and preparation method thereof.Including probe column, solution tank, solution tower and the driving part that travel distance can be measured, the driving part is connect with the probe column, the solution tank is arranged below the probe column, filamentary silver one end to be corroded is fixed on the probe column, the filamentary silver other end to be corroded, which can release, to be plugged in the solution tower, the probe column is internally provided with fixed value resistance, and the fixed value resistance is connect with filamentary silver to be corroded, and the fixed value resistance has been arranged in parallel micro-control plate.Driving part drives probe column mobile to solution tower, when the voltage that micro-control plate detects fixed value resistance is not equal to 0, driving part stops advancing, probe column does reciprocal telescopic, filamentary silver to be corroded is corroded, and when the voltage that micro-control plate detects fixed value resistance is less than or equal to minimum amount of voltage that, solution tower and probe column stop working, driving part is retracted, and corrosion terminates.
Description
Technical field
The present invention relates to scanning tunneling microscope field more particularly to a kind of needle tip of scanning tunnel microscope preparation facilities and
Preparation method.
Background technique
Currently, according to document " Automated electrochemical etching and polishing of
" electrochemistry liquid-film method corrosion preparation STM is visited for silver scanning tunneling microscope tips " and document
The record of needle and its scanning application " while manually monitoring, also needs artificial constantly operation, and needle point is contacted with liquid film to be needed manually
Adjusting knob moves microscope carrier；During reciprocating motion, each translation distance and resultant force in the horizontal direction by
In manual operation, there is very big error, has a significant impact to the shape of needle point.Corrosion needs carefully to modify liquid with dropper before starting
Film thickness is thin；If solution film ruptures in corrosion process, need dropper that solution is added dropwise on solution ring again, due to manual operation,
So the position of dropwise addition solution, angle, quality all have different possibility every time, this increases many in entire corrosion process
Uncontrollable factor.If solution ring is not added solution in time, then metallic wire tip may because it is exposed in an atmosphere due to
It is contaminated, next corrosion is had an impact.In addition, whole device does not reuse residual solution, but use absorbent cotton
It absorbs, will cause unnecessary waste in this way.
Utility model content
Technical problem to be solved by the invention is to provide a kind of needle tip of scanning tunnel microscope preparation facilities, solve artificial
Operation and monitoring influence tips quality, working efficiency is low and corrosion process solution wastes serious problem.
The technical scheme to solve the above technical problems is that a kind of needle tip of scanning tunnel microscope preparation facilities,
Including probe column, solution tank, solution tower and the driving part that can measure travel distance, the driving part and the probe column connect
Connect, the solution tank is arranged below the probe column, and filamentary silver one end to be corroded is fixed on the probe column, it is described to
The corrosion filamentary silver other end, which can release, to be plugged in the solution tower, and the probe column is internally provided with fixed value resistance, the definite value
Resistance is connect with filamentary silver to be corroded, and the fixed value resistance has been arranged in parallel micro-control plate.
Further, the driving part includes screw rod stepper motor, turntable and rotary mounting seat, the screw rod stepping electricity
Machine is fixed on the turntable, and the turntable lower part is rotatable to be plugged on the rotary mounting seat, the rotation
Motor start switch is provided in mounting base, the turntable side can release formula with the motor start switch and offset, described
Micrometer caliper is provided on screw rod stepper motor.
Further, the probe column includes releasing transmission parts, piezoelectric ceramics and needle point connecting component, the releasing transmission
Component is connect by rotor with the driving part, and the needle point connecting component is driven by the piezoelectric ceramics and the releasing
Component connection.
Further, the releasing transmission parts include bearing and connector, and the bearing is set on the outside of the rotor, institute
It states and is fixedly connected on the inside of bearing with the rotor, the connector is set on the outside of the bearing, the connector inside and institute
Fixed clamping, the piezoelectric ceramics on the outside of bearing is stated to be fixedly connected with the connector.
Further, the needle point connecting component includes hold assembly and hold assembly fixing piece, and the hold assembly is fixed
Part side is fixedly connected with the piezoelectric ceramics, and the hold assembly fixing piece other side detachably connects with the hold assembly
It connects, the filamentary silver to be corroded is folded on the inside of the hold assembly.
Further, the solution tower includes that pedestal, peristaltic pump, conduit and annular platinoiridita ring, the solution Taka are located at institute
It states on pedestal, the top of the pedestal is arranged in the annular platinoiridita ring, is provided with catheter channel on the outside of the peristaltic pump, described
Conduit is arranged in the catheter channel, and the tube at one end is connected to the solution tank, and the conduit other end is arranged in institute
It states at annular platinoiridita ring position.
The present invention provides a kind of needle tip of scanning tunnel microscope preparation facilities, including probe column, solution tank, solution tower and can
The driving part of travel distance is measured, the driving part is connect with the probe column, and the solution tank is arranged in the probe
Below tower, filamentary silver one end to be corroded is fixed on the probe column, and the filamentary silver other end to be corroded, which can release, to be plugged in
In the solution tower, the probe column is internally provided with fixed value resistance, and the fixed value resistance is connect with filamentary silver to be corroded, described fixed
Value resistor coupled in parallel is provided with micro-control plate.In this way, driving part drives probe column mobile to solution tower, it is inserted into filamentary silver to be corroded molten
When one slight depth of liquid, circuit conducting, loop current, which has, compares significantly transition, if current jump is steeper
, then there will be apparent variations with the concatenated fixed value resistance both end voltage of filamentary silver to be corroded, then can pass through definite value
The critical state of resistance both end voltage changed to judge filamentary silver insertion solution, the voltage of micro-control plate detection fixed value resistance are not equal to
When 0, driving part stops advancing, and probe column does reciprocal telescopic, and filamentary silver to be corroded is corroded, and micro-control plate detects fixed value resistance
When voltage is less than or equal to minimum amount of voltage that, solution tower and probe column stop working, and driving part is retracted into original position, corrosion knot
Beam.It has the advantage, that in terms of existing technologies without human intervention and monitoring, tips quality obtains effective guarantee, work
It is reusable to make high-efficient and corrosion process solution, avoids wasting, save the cost.
The present invention also provides a kind of methods that needle tip of scanning tunnel microscope preparation facilities prepares needle point, including walk as follows
It is rapid:
S1: filamentary silver to be corroded is inserted into probe column one end；
S2: driving part drives probe column mobile to solution tower；
S3: whether the voltage of micro-control plate detection fixed value resistance is equal to 0, and voltage is equal to 0, repeats step 2；
S4: driving part stops advancing, and probe column does reciprocal telescopic, and filamentary silver to be corroded is corroded；
S5: whether the voltage of micro-control plate detection fixed value resistance is less than or equal to minimum amount of voltage that, and voltage is greater than minimum amount of voltage that,
Repeat step 4；
S6: solution tower and probe column stop working, and driving part is retracted into original position, and corrosion terminates.
In this way, driving part drives probe column mobile to solution tower, one slight depth of solution is inserted into filamentary silver to be corroded
When, circuit conducting, loop current, which has, compares significantly transition, if current jump is steeper, and wait corrode
There will be apparent variations for the concatenated fixed value resistance both end voltage of filamentary silver, then can pass through the change of fixed value resistance both end voltage
Change the critical state to judge filamentary silver insertion solution, when the voltage that micro-control plate detects fixed value resistance is not equal to 0, driving part stops
It advances, probe column does reciprocal telescopic, and filamentary silver to be corroded is corroded, and the voltage that micro-control plate detects fixed value resistance is less than or equal to minimum
When voltage value, solution tower and probe column stop working, and driving part is retracted into original position, and corrosion terminates.
Detailed description of the invention
Fig. 1 is a kind of overall structure diagram of needle tip of scanning tunnel microscope preparation facilities of the present invention；
Fig. 2 is a kind of partial structural diagram of needle tip of scanning tunnel microscope preparation facilities of the present invention；
Fig. 3 is a kind of partial structurtes perspective view of the explosion of needle tip of scanning tunnel microscope preparation facilities of the present invention；
Fig. 4 is the flow diagram that a kind of needle tip of scanning tunnel microscope preparation facilities of the present invention prepares needle point.
In attached drawing, parts list represented by the reference numerals are as follows:
1, screw rod stepper motor, 2, turntable, 3, rotary mounting seat, 4, connector, 5, bearing, 6, piezoelectric ceramics, 7, folder
Hold segment mounts, 8, hold assembly, 9, pedestal, 10, peristaltic pump, 11, annular platinoiridita ring, 12, solution tank, 13, pedestal.
Specific embodiment
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the invention.
As Figure 1-Figure 4, the present invention provides a kind of needle tip of scanning tunnel microscope preparation facilities, including probe column, molten
Liquid bath 12, solution tower and the driving part that can measure travel distance, the driving part are connect with the probe column, the solution
Slot 12 is arranged below the probe column, and filamentary silver one end to be corroded is fixed on the probe column, the filamentary silver to be corroded
The other end, which can release, to be plugged in the solution tower, and the probe column is internally provided with fixed value resistance, the fixed value resistance with to
Corrode filamentary silver connection, the fixed value resistance has been arranged in parallel micro-control plate.In this way, driving part drives probe column to move to solution tower
Dynamic, when corroding filamentary silver insertion one slight depth of solution, circuit conducting, loop current, which has, compares significantly transition, such as
Fruit current jump is steeper, then becoming with the concatenated fixed value resistance both end voltage of filamentary silver to be corroded there will be apparent
Change, then can judge that filamentary silver is inserted into the critical state of solution, the inspection of micro-control plate by the variation of fixed value resistance both end voltage
When the voltage of measured value resistance is not equal to 0, driving part stops advancing, and probe column does reciprocal telescopic, and filamentary silver to be corroded carries out rotten
Erosion, when the voltage that micro-control plate detects fixed value resistance is less than or equal to minimum amount of voltage that, solution tower and probe column stop working, driving portion
Part is retracted into original position, and corrosion terminates.
Needle tip of scanning tunnel microscope preparation facilities of the invention, as Figure 1-Figure 4, the technical solution described in front
On the basis of it may also is that the driving part include screw rod stepper motor 1, turntable 2 and rotary mounting seat 3, the screw rod
Stepper motor 1 is fixed on the turntable 2, and 2 lower part of turntable is rotatable to be plugged in the rotary mounting seat 3
On, motor start switch is provided on the rotary mounting seat 3,2 side of turntable can be solved with the motor start switch
Except formula offsets, micrometer caliper is provided on the screw rod stepper motor 1.In this way, turn to another direction in rotation can be real for turntable 2
Existing 1 angle change of screw rod stepper motor, facilitates installation and dismantles filamentary silver to be corroded, when 2 cycle of turntable, 2 side of turntable
It offsets with the motor start switch, realizes power supply connection, screw rod stepper motor 1 drives filamentary silver to be corroded to advance, and walks in screw rod
It is provided with micrometer caliper on into motor 1, the travel distance of screw rod stepper motor 1 can be measured, the parameter measured according to these,
It may determine that the critical point of filamentary silver insertion solution to be corroded.Further preferred technical solution is: the probe column includes releasing
Transmission parts, piezoelectric ceramics 6 and needle point connecting component, the releasing transmission parts are connect by rotor with the driving part,
The needle point connecting component is connect by the piezoelectric ceramics 6 with the releasing transmission parts.In this way, the fixed peace of filamentary silver to be corroded
In needle point connecting component, when piezoelectric ceramics 6 adds external electric field identical with spontaneous polarization, it is equivalent to and enhances polarization by force
Degree.The increase of polarization intensity extends piezoelectric ceramics 6 along polarization direction；On the contrary, if plus reversed electric field, then 6 edge of piezoelectric ceramics
Polarization direction shortens, and the reciprocating motion of filamentary silver to be corroded may be implemented, and releases transmission parts and piezoelectric ceramics 6 and needle point are connected
Relay part will not follow the rotation of screw rod stepper motor 1 and rotate, and then realizes that screw rod stepper motor 1 drives and release driving section
Part, piezoelectric ceramics 6 and needle point connecting component move forward.Further preferred technical solution is: the releasing transmission parts packet
Bearing 5 and connector 4 are included, the bearing 5 is set on the outside of the rotor, and 5 inside of bearing is fixedly connected with the rotor,
The connector 4 is set in 5 outside of bearing, and 4 inside of connector is clamped with fixed on the outside of the bearing 5, the pressure
Electroceramics 6 is fixedly connected with the connector 4.In this way, when the rotor rotates, rotating with it on the inside of bearing 5, outer ring keeps quiet
Only.
Needle tip of scanning tunnel microscope preparation facilities of the invention, as Figure 1-Figure 4, the technical solution described in front
On the basis of it may also is that the needle point connecting component include hold assembly 8 and hold assembly fixing piece 7, the hold assembly
7 side of fixing piece is fixedly connected with the piezoelectric ceramics 6, and 7 other side of hold assembly fixing piece and the hold assembly 8 can
Dismantling connection, the filamentary silver to be corroded are folded in 8 inside of hold assembly.In this way, 7 other side of hold assembly fixing piece and folder
It holds component 8 to be detachably connected, filamentary silver to be corroded is folded in 8 inside of hold assembly, realizes the quick for installation of filamentary silver to be corroded
It is convenient, it greatly improves work efficiency.
Needle tip of scanning tunnel microscope preparation facilities of the invention, as Figure 1-Figure 4, the technical solution described in front
On the basis of it may also is that the solution tower includes pedestal 9, peristaltic pump 10, conduit and annular platinoiridita ring 11, the solution Taka
It is located on the pedestal 9, the top of the pedestal 9 is arranged in the annular platinoiridita ring 11, is provided on the outside of the peristaltic pump 10
Catheter channel, the conduit are arranged in the catheter channel, and the tube at one end is connected to the solution tank 12, the conduit
Other end setting is at annular 11 position of platinoiridita ring.In this way, the solution in solution tank 12 is drawn by peristaltic pump 10 when work
At annular platinoiridita silk position, it can be released due to being formed by solution film at filamentary silver one end to be corroded and the annular platinoiridita silk position
Formula grafting, and then realize the electrolytic etching for treating corrosion filamentary silver.
Needle tip of scanning tunnel microscope preparation facilities of the invention, as Figure 1-Figure 4, the technical solution described in front
On the basis of further include pedestal 13, the solution tank 12 setting is above 13 middle part of pedestal, the driving portion
Part and the solution tower are arranged in 12 two sides of solution tank.In this way, solution tank 12, solution tower and driving part are fixedly installed
On pedestal 13, so that fixation between all parts is more firm, and pass through the adjustable driving part of pedestal 13 and molten
The installation site of liquid tower guarantees corrosion quality so that driving part and solution tower precisely align.
As Figure 1-Figure 4, the present invention also provides the sides that a kind of needle tip of scanning tunnel microscope preparation facilities prepares needle point
Method includes the following steps:
S1: filamentary silver to be corroded is inserted into probe column one end；
S2: driving part drives probe column mobile to solution tower；
S3: whether the voltage of micro-control plate detection fixed value resistance is equal to 0, and voltage is equal to 0, repeats step 2；
S4: driving part stops advancing, and probe column does reciprocal telescopic, and filamentary silver to be corroded is corroded；
S5: whether the voltage of micro-control plate detection fixed value resistance is less than or equal to minimum amount of voltage that, and voltage is greater than minimum amount of voltage that,
Repeat step 4；
S6: solution tower and probe column stop working, and driving part is retracted into original position, and corrosion terminates.
In this way, driving part drives probe column mobile to solution tower, one slight depth of solution is inserted into filamentary silver to be corroded
When, circuit conducting, loop current, which has, compares significantly transition, if current jump is steeper, and wait corrode
There will be apparent variations for the concatenated fixed value resistance both end voltage of filamentary silver, then can pass through the change of fixed value resistance both end voltage
Change the critical state to judge filamentary silver insertion solution, when the voltage that micro-control plate detects fixed value resistance is not equal to 0, driving part stops
It advances, probe column does reciprocal telescopic, and filamentary silver to be corroded is corroded, and the voltage that micro-control plate detects fixed value resistance is less than or equal to minimum
When voltage value, solution tower and probe column stop working, and driving part is retracted into original position, and corrosion terminates.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (5)
1. a kind of needle tip of scanning tunnel microscope preparation facilities, it is characterised in that: including probe column, solution tank (12), solution tower
With the driving part that can measure travel distance, the driving part is connect with the probe column, and solution tank (12) setting exists
Below the probe column, filamentary silver one end to be corroded is fixed on the probe column, and the filamentary silver other end to be corroded can solve
Except being plugged in the solution tower, the probe column is internally provided with fixed value resistance, and the fixed value resistance and filamentary silver to be corroded connect
It connects, the fixed value resistance has been arranged in parallel micro-control plate；
The probe column includes releasing transmission parts, piezoelectric ceramics (6) and needle point connecting component, the releasing transmission parts to pass through
Rotor is connect with the driving part, and the needle point connecting component passes through the piezoelectric ceramics (6) and the releasing transmission parts
Connection；
The releasing transmission parts include bearing (5) and connector (4), and the bearing (5) is set on the outside of the rotor, described
It is fixedly connected on the inside of bearing (5) with the rotor, the connector (4) is set on the outside of the bearing (5), the connector
(4) inside is clamped with fixed on the outside of the bearing (5), and the piezoelectric ceramics (6) is fixedly connected with the connector (4)；
The solution tower includes that pedestal (9), peristaltic pump (10), conduit and annular platinoiridita ring (11), the solution Taka are located at institute
It states on pedestal (9), the setting on the outside of the top of the pedestal (9), the peristaltic pump (10) is arranged in the annular platinoiridita ring (11)
There is catheter channel, the conduit is arranged in the catheter channel, and the tube at one end is connected to the solution tank (12), described
The setting of the conduit other end is at described annular platinoiridita ring (11) position.
2. needle tip of scanning tunnel microscope preparation facilities according to claim 1, it is characterised in that: the driving part packet
Screw rod stepper motor (1), turntable (2) and rotary mounting seat (3) are included, the screw rod stepper motor (1) is fixed at described
On turntable (2), turntable (2) lower part is rotatable to be plugged on the rotary mounting seat (3), the rotary mounting seat
(3) motor start switch is provided on, turntable (2) side can release formula with the motor start switch and offset, described
Screw rod stepper motor is provided with micrometer caliper on (1).
3. needle tip of scanning tunnel microscope preparation facilities according to claim 1, it is characterised in that: the needle point interconnecting piece
Part includes hold assembly (8) and hold assembly fixing piece (7), hold assembly fixing piece (7) side and the piezoelectric ceramics
(6) it is fixedly connected, hold assembly fixing piece (7) other side is detachably connected with the hold assembly (8), described wait corrode
Filamentary silver is folded on the inside of the hold assembly (8).
4. needle tip of scanning tunnel microscope preparation facilities according to claim 1 to 3, it is characterised in that: also wrap
It includes pedestal (13), solution tank (12) setting top, the driving part and solution tower in the middle part of the pedestal (13)
It is arranged in the solution tank (12) two sides.
5. a kind of side for preparing needle point using the described in any item needle tip of scanning tunnel microscope preparation facilities of claim 1-4
Method, characterized by the following steps:
S1: filamentary silver to be corroded is inserted into probe column one end；
S2: driving part drives probe column mobile to solution tower；
S3: whether the voltage of micro-control plate detection fixed value resistance is equal to 0, and voltage is equal to 0, repeats step 2；
S4: driving part stops advancing, and probe column does reciprocal telescopic, and filamentary silver to be corroded is corroded；
S5: whether the voltage of micro-control plate detection fixed value resistance is less than or equal to minimum amount of voltage that, and voltage is greater than minimum amount of voltage that, repeats
Step 4；
S6: solution tower and probe column stop working, and driving part is retracted into original position, and corrosion terminates.
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| CN108709907A (en) * | 2018-08-21 | 2018-10-26 | 武汉科技大学 | A kind of rapid automatized realization is to split the method that connection measures unimolecule conductance |
| CN109706515B (en) * | 2019-01-11 | 2020-02-28 | 中国电子科技集团公司第三十八研究所 | Preparation device and preparation method of tungsten filament needle tip with controllable length-diameter ratio |
| CN109849499A (en) * | 2019-01-31 | 2019-06-07 | 中国科学院西安光学精密机械研究所 | The micromotion mechanism of servo motor driving web plate in a kind of high accuracy prints machine |
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