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CN106959082A - A kind of many optical axis systematic optical axis Parallel testing method and system - Google Patents

A kind of many optical axis systematic optical axis Parallel testing method and system Download PDF

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Publication number
CN106959082A
CN106959082A CN201710288229.3A CN201710288229A CN106959082A CN 106959082 A CN106959082 A CN 106959082A CN 201710288229 A CN201710288229 A CN 201710288229A CN 106959082 A CN106959082 A CN 106959082A
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optical axis
optical
sub
collimated light
target surface
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杨飞
安其昌
赵宏超
姜海波
郭鹏
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明公开了一种多光轴系统光轴平行度检测方法,包括:激光器发射准直光至中转元件,经过所述中转元件后形成与主光学元件的理想光轴平行的准直光;所述准直光经所述主光学元件后,反射至所述主光学元件的焦点处,所述焦点与靶面中心重合;移动所述中转元件至各个待测子光学元件上方,所述激光器发射所述准直光经过所述中转元件以及所述待测子光学元件之后,在所述靶面上形成光斑;依次判断所述光斑是否与靶面中心重合,若否,则根据所述光斑与所述靶面中心之间的偏离距离调节所述待测子光学元件的光轴相互平行。提高多光轴系统的光轴平行度的准确性并简化检测步骤。本发明还公开一种多光轴系统光轴平行度检测系统,具有上述有益效果。

The invention discloses a method for detecting the parallelism of optical axes of a multi-optical axis system, comprising: a laser emits collimated light to a relay element, and after passing through the relay element, collimated light parallel to an ideal optical axis of a main optical element is formed; After the collimated light passes through the main optical element, it is reflected to the focus of the main optical element, and the focus coincides with the center of the target surface; the transfer element is moved above each sub-optical element to be tested, and the laser emits After the collimated light passes through the transit element and the sub-optical element to be tested, a light spot is formed on the target surface; it is judged in turn whether the light spot coincides with the center of the target surface, and if not, according to the light spot and the center of the target surface, The deviation distance between the centers of the target surfaces adjusts the optical axes of the sub-optical components to be tested to be parallel to each other. Improve the accuracy of the parallelism of the optical axes of the multi-optical axis system and simplify the detection steps. The invention also discloses a multi-optical axis system optical axis parallelism detection system, which has the above beneficial effects.

Description

一种多光轴系统光轴平行度检测方法及系统A method and system for detecting the parallelism of optical axes of a multi-optical axis system

技术领域technical field

本发明涉及精密光机装调检测技术领域,特别涉及一种多光轴系统光轴平行度检测方法,还涉及一种多光轴系统光轴平行度检测系统。The invention relates to the technical field of precision optical machine assembly and adjustment detection, in particular to a method for detecting the parallelism of optical axes of a multi-optical axis system, and also to a detection system for the parallelism of optical axes of a multi-optical axis system.

背景技术Background technique

目前多光轴系统的光轴平行度的检测方法有多种,现有的检测方法中,对光轴的确立主要依靠轮廓测量的方法,轮廓测量有两种方式:干涉测量与坐标测量,其中,干涉测量需要建立基准,不论是标准的补偿镜还是计算全息图,都存在的一定误差,导致检测结果不准确;坐标测量分为直角坐标测量与球坐标测量,直角坐标测量精度依赖于平移组件的精度,而球坐标测量装置受制于角位移测量,导致检测方法步骤繁琐,因此,对于多光轴系统来说,上述方法测量的光轴平行度并不是最佳的方法。At present, there are many methods for detecting the parallelism of the optical axes of the multi-axis system. Among the existing detection methods, the establishment of the optical axis mainly depends on the method of contour measurement. There are two methods of contour measurement: interferometry and coordinate measurement. , Interferometric measurement needs to establish a benchmark, whether it is a standard compensation mirror or a computational hologram, there are certain errors that lead to inaccurate detection results; coordinate measurement is divided into rectangular coordinate measurement and spherical coordinate measurement, and the accuracy of rectangular coordinate measurement depends on the translation component The precision of the spherical coordinate measuring device is limited by the angular displacement measurement, which leads to cumbersome detection method steps. Therefore, for the multi-optical axis system, the above method to measure the parallelism of the optical axes is not the best method.

因此,如何提高多光轴系统的光轴平行度的准确性并简化检测步骤是本领域技术人员需要解决的技术问题。Therefore, how to improve the accuracy of the parallelism of the optical axes of the multi-optical axis system and simplify the detection steps is a technical problem to be solved by those skilled in the art.

发明内容Contents of the invention

本发明的目的是提供一种多光轴系统光轴平行度检测方法,提高多光轴系统的光轴平行度的准确性并简化检测步骤。The object of the present invention is to provide a method for detecting the parallelism of optical axes of a multi-optical axis system, which improves the accuracy of the parallelism of optical axes of a multi-optical axis system and simplifies the detection steps.

为解决上述技术问题,本发明提供一种多光轴系统光轴平行度检测方法,包括:In order to solve the above technical problems, the present invention provides a method for detecting the parallelism of optical axes of a multi-optical axis system, including:

激光器发射准直光至中转元件,经过所述中转元件后形成与主光学元件的理想光轴平行的准直光;The laser emits collimated light to the relay element, and forms collimated light parallel to the ideal optical axis of the main optical element after passing through the relay element;

所述准直光经所述主光学元件后,反射至所述主光学元件的焦点处,所述焦点与靶面中心重合;The collimated light is reflected to the focal point of the primary optical element after passing through the primary optical element, and the focal point coincides with the center of the target surface;

移动所述中转元件至各个待测子光学元件上方,所述激光器发射所述准直光经过所述中转元件以及所述待测子光学元件之后,在所述靶面上形成光斑;moving the transition element above each sub-optical element to be tested, and the laser emits the collimated light to form a light spot on the target surface after passing through the transition element and the sub-optical element to be tested;

依次判断所述光斑是否与靶面中心重合,若否,则根据所述光斑与所述靶面中心之间的偏离距离调节所述待测子光学元件的光轴相互平行。Sequentially determine whether the light spot coincides with the center of the target surface, and if not, adjust the optical axes of the sub-optical elements to be tested to be parallel to each other according to the deviation distance between the light spot and the center of the target surface.

优选的,在上述多光轴系统光轴平行度检测方法中,激光器发射准直光至中转元件之前,还包括:Preferably, in the method for detecting the parallelism of the optical axes of the multi-optical axis system, before the laser emits collimated light to the relay element, it further includes:

移动所述中转元件至所述主光学元件的上方,并记录所述中转元件的初始位置。moving the transition element to above the primary optical element, and recording the initial position of the transition element.

优选的,在上述多光轴系统光轴平行度检测方法中,移动所述中转元件至各个待测子光学元件上方,包括:Preferably, in the above method for detecting the parallelism of optical axes of a multi-optical axis system, moving the transit element above each sub-optical element to be tested includes:

以所述初始位置为圆心,将所述中转元件沿半径方向平移,同时沿圆周方向旋转移动,直至到达各个所述待测子光学元件的上方。Taking the initial position as the center of the circle, the transition element is translated in the radial direction, and at the same time rotated and moved in the circumferential direction until it reaches the top of each of the sub-optical elements to be measured.

本发明还提供了一种多光轴系统光轴平行度检测系统,包括:The present invention also provides a multi-optical axis system optical axis parallelism detection system, including:

激光器,用于发射准直光至中转元件;a laser for emitting collimated light to the relay element;

中转元件,用于将所述激光器发射的所述准直光转换为与主光学元件理想光轴平行的准直光,a relay element for converting the collimated light emitted by the laser into collimated light parallel to the ideal optical axis of the main optical element,

判断模块,用于依次判断所述光斑是否与靶面中心重合;A judging module, used to sequentially judge whether the light spot coincides with the center of the target surface;

调节模块,用于根据所述光斑与所述靶面中心之间的偏离距离调节所述待测子光学元件的光轴相互平行。An adjustment module, configured to adjust the optical axes of the sub-optical elements to be tested to be parallel to each other according to the deviation distance between the light spot and the center of the target surface.

优选的,在上述多光轴系统光轴平行度检测系统中,还包括:Preferably, in the above-mentioned multi-optical axis system optical axis parallelism detection system, it also includes:

标记模块,用于移动所述中转元件至所述主光学元件的上方,并记录所述中转元件的初始位置。a marking module, configured to move the transition element above the primary optical element, and record the initial position of the transition element.

优选的,在上述多光轴系统光轴平行度检测系统中,还包括:Preferably, in the above-mentioned multi-optical axis system optical axis parallelism detection system, it also includes:

旋转导轨,用于以所述初始位置为圆心,将所述中转元件沿半径方向平移,同时沿圆周方向旋转移动,直至到达各个所述待测子光学元件的上方。The rotating guide rail is used to use the initial position as the center of the circle to translate the transition element in the radial direction and at the same time rotate and move in the circumferential direction until it reaches the top of each of the sub-optical elements to be measured.

优选的,在上述多光轴系统光轴平行度检测系统中,所述中转元件为五棱镜。Preferably, in the above multi-optical axis system optical axis parallelism detection system, the transition element is a pentaprism.

本发明所提供一种多光轴系统光轴平行度检测方法,包括:激光器发射准直光至中转元件,经过所述中转元件后形成与主光学元件的理想光轴平行的准直光;所述准直光经所述主光学元件后,入射至所述主光学元件的焦点处,所述焦点与靶面中心重合;移动所述中转元件至各个待测子光学元件上方,所述激光器发射所述准直光经过所述中转元件以及所述待测子光学元件之后,在所述靶面上形成光斑;依次判断所述光斑是否与靶面中心重合,若否,则根据所述光斑与所述靶面中心之间的偏离距离调节所述待测子光学元件的光轴相互平行。The invention provides a method for detecting the parallelism of optical axes of a multi-optical axis system, comprising: a laser emits collimated light to a relay element, and after passing through the relay element, collimated light parallel to the ideal optical axis of the main optical element is formed; After the collimated light passes through the main optical element, it is incident on the focus of the main optical element, and the focus coincides with the center of the target surface; the transfer element is moved above each sub-optical element to be measured, and the laser emits After the collimated light passes through the transit element and the sub-optical element to be tested, a light spot is formed on the target surface; it is judged in turn whether the light spot coincides with the center of the target surface, and if not, according to the light spot and the center of the target surface, The deviation distance between the centers of the target surfaces adjusts the optical axes of the sub-optical components to be tested to be parallel to each other.

通过中转元件将激光器的发射光转换为与主光学元件理想光轴平行的准直光,记录在靶面中心的光斑,之后通过移动中转元件到各个待测子光学元件上方,同样进行激光反射,在靶面上的光斑与靶面中心的偏离进行光轴平行度的调节。由于多光轴光学系统中包括了主设备与多个辅助设备,因此,在一个辅助设备的光轴调节结束后,接着对另一个辅助设备进行装调,直至全部子系统的轴线误差得到检测并装调完成。高多光轴系统的光轴平行度的准确性并简化检测步骤。Through the relay element, the emitted light of the laser is converted into collimated light parallel to the ideal optical axis of the main optical element, and the light spot in the center of the target surface is recorded, and then the laser reflection is also carried out by moving the relay element above each sub-optical element to be tested. The deviation of the light spot on the target surface from the center of the target surface is used to adjust the parallelism of the optical axis. Since the multi-optical axis optical system includes the main device and multiple auxiliary devices, after the optical axis adjustment of one auxiliary device is completed, the other auxiliary device is then adjusted until the axis errors of all subsystems are detected and corrected. The adjustment is complete. High accuracy of optical axis parallelism of multi-optical axis system and simplified detection steps.

本发明还提供一种多光轴系统光轴平行度检测系统,具有上述有益效果,在此不再赘述。The present invention also provides a multi-optical axis system optical axis parallelism detection system, which has the above-mentioned beneficial effects and will not be repeated here.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据提供的附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention, and those skilled in the art can also obtain other drawings according to the provided drawings without creative work.

图1为本发明实施例所提供的多光轴系统光轴平行度检测方法的流程图;FIG. 1 is a flowchart of a method for detecting the parallelism of optical axes of a multi-optical axis system provided by an embodiment of the present invention;

图2为本发明实施例所提供的多光轴系统光轴平行度检测系统的结构图;2 is a structural diagram of a multi-optical axis system optical axis parallelism detection system provided by an embodiment of the present invention;

图3为本发明实施例所提供的测量原理图。Fig. 3 is a measurement schematic diagram provided by an embodiment of the present invention.

具体实施方式detailed description

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

请参考图1,图1为本发明实施例所提供的多光轴系统光轴平行度检测方法的流程图。Please refer to FIG. 1 , which is a flowchart of a method for detecting the parallelism of optical axes of a multi-optical axis system provided by an embodiment of the present invention.

本发明提供一种多光轴系统光轴平行度检测方法,具体可以包括:The present invention provides a method for detecting the parallelism of optical axes of a multi-optical axis system, which may specifically include:

步骤S1:激光器1发射准直光至中转元件2,经过所述中转元件2后形成与主光学元件3的理想光轴平行的准直光。Step S1: the laser 1 emits collimated light to the relay element 2, and after passing through the relay element 2, collimated light parallel to the ideal optical axis of the main optical element 3 is formed.

其中,中转元件2将激光器1的准直光中转至主光学元件3的理想光轴平行的方向。对准直光是否与理想光轴平行进行校正,具体的,通过两维偏摆的方式调节,保证改变中转元件2的位置时,准直光通过中转元件2以及主光学元件3后落在靶面4的光斑位置不变,表明准直光与理想光轴平行。同时,激光器1无需与主光学元件3对准,只要中转元件2与主光学元件3对准即可,同时利用中转元件2避免了调节激光器1的准直光方向与理想光轴方向容易产生的偏差。Wherein, the relay element 2 relays the collimated light of the laser 1 to a direction parallel to the ideal optical axis of the main optical element 3 . Correct whether the collimated light is parallel to the ideal optical axis, specifically, through the adjustment of two-dimensional deflection, to ensure that when the position of the relay element 2 is changed, the collimated light falls on the target after passing through the relay element 2 and the main optical element 3 The position of the spot on surface 4 remains unchanged, indicating that the collimated light is parallel to the ideal optical axis. At the same time, the laser 1 does not need to be aligned with the main optical element 3, as long as the transfer element 2 is aligned with the main optical element 3. At the same time, the use of the transfer element 2 avoids the easy occurrence of adjusting the collimated light direction of the laser 1 and the ideal optical axis direction. deviation.

步骤S2:所述准直光经所述主光学元件3后,反射至所述主光学元件3的焦点处,所述焦点与靶面4中心重合。Step S2: The collimated light is reflected to the focal point of the primary optical element 3 after passing through the primary optical element 3 , and the focal point coincides with the center of the target surface 4 .

其中,准直光以平行于理想光轴的方向入射至主光学元件3表面,经过主光学元件3反射后,反射光线经过焦点,在焦面处放置一靶面4设置于主光学元件3的焦面处,靶面4中心与焦点重合,反射光在靶面4中心形成光斑,相当于靶面4中心即为光斑的标定。Wherein, the collimated light is incident on the surface of the main optical element 3 in a direction parallel to the ideal optical axis, after being reflected by the main optical element 3, the reflected light passes through the focal point, and a target surface 4 is placed on the focal plane to be arranged on the surface of the main optical element 3 At the focal plane, the center of the target surface 4 coincides with the focal point, and the reflected light forms a spot at the center of the target surface 4, which is equivalent to the calibration of the spot at the center of the target surface 4.

步骤S3:移动所述中转元件2至各个待测子光学元件5上方,所述激光器1发射所述准直光经过所述中转元件2以及所述待测子光学元件5之后,在所述靶面4上形成光斑;Step S3: Move the transit element 2 above each sub-optical element 5 to be tested, and the laser 1 emits the collimated light after passing through the transit element 2 and the sub-optical element 5 to be tested, and then on the target A light spot is formed on surface 4;

其中,移动中转元件2的方式有多种,均在保护范围内。在本实施例中,将激光器1与中转元件2放置于一导轨上,将导轨安装于整个系统的上方,导轨可以焦点为圆心进行旋转,中转元件2通过在导轨上的移动,同时旋转导轨本身来实现中转元件2在旋转半径内任意位置的扫描,以便于对各个待测子光学元件5进行扫描。Among them, there are many ways to move the transfer element 2, all of which are within the scope of protection. In this embodiment, the laser 1 and the transfer element 2 are placed on a guide rail, and the guide rail is installed above the entire system. The guide rail can be rotated with the focus as the center of the circle, and the transfer element 2 moves on the guide rail while rotating the guide rail itself. To realize the scanning of any position of the relay element 2 within the radius of rotation, so as to scan each sub-optical element 5 to be measured.

步骤S4:依次判断所述光斑是否与靶面4中心重合,若否,则根据所述光斑与所述靶面4中心之间的偏离距离调节所述待测子光学元件5的光轴相互平行。Step S4: sequentially judge whether the light spot coincides with the center of the target surface 4, if not, adjust the optical axes of the sub-optical elements 5 to be tested to be parallel to each other according to the deviation distance between the light spot and the center of the target surface 4 .

其中,移动中转元件2至各个待测子光学元件5上方,激光器1发射准直光至中转元件2,中转元件2将准直光经待测子光学元件5反射后至靶面4上,形成光斑,判断所述光斑是否与靶面4中心重合,若否,则根据所述光斑与所述靶面4中心之间的偏离距离计算光轴偏移量,根据光轴偏移量调节各个待测子光学元件5的光轴相互平行。Wherein, the transfer element 2 is moved above each sub-optical element 5 to be tested, the laser 1 emits collimated light to the transfer element 2, and the transfer element 2 reflects the collimated light to the target surface 4 after being reflected by the sub-optical element 5 to be measured, forming Light spot, judge whether described light spot coincides with the center of target surface 4, if not, calculate the optical axis offset according to the deviation distance between the described light spot and the center of the target surface 4, adjust each waiting position according to the optical axis offset The optical axes of the sub-optics 5 are parallel to each other.

通过中转元件2将激光器1的发射光转换为与主光学元件3理想光轴平行的准直光,记录在靶面4中心的光斑,之后通过移动中转元件2到各个待测子光学元件5上方,同样进行激光反射,在靶面4上的光斑与靶面4中心的偏离进行光轴平行度的调节。由于多光轴光学系统中包括了主设备与多个辅助设备,因此,在一个辅助设备的光轴调节结束后,接着对另一个辅助设备进行装调,直至全部子系统的轴线误差得到检测并装调完成。高多光轴系统的光轴平行度的准确性并简化检测步骤。The emitted light of the laser 1 is converted into collimated light parallel to the ideal optical axis of the main optical element 3 through the relay element 2, and the light spot in the center of the target surface 4 is recorded, and then the relay element 2 is moved to the top of each sub-optical element 5 to be measured , laser reflection is also carried out, and the deviation of the spot on the target surface 4 from the center of the target surface 4 is used to adjust the parallelism of the optical axis. Since the multi-optical axis optical system includes the main device and multiple auxiliary devices, after the optical axis adjustment of one auxiliary device is completed, the other auxiliary device is then adjusted until the axis errors of all subsystems are detected and corrected. The adjustment is complete. High accuracy of optical axis parallelism of multi-optical axis system and simplified detection steps.

进一步的,在上述多光轴系统光轴平行度检测方法中,激光器1发射准直光至中转元件2之前,还包括:Further, in the above method for detecting the parallelism of the optical axes of the multi-optical axis system, before the laser 1 emits collimated light to the relay element 2, it also includes:

移动所述中转元件2至所述主光学元件3的上方,并记录所述中转元件2的初始位置。Move the transition element 2 to above the primary optical element 3, and record the initial position of the transition element 2.

进一步的,在上述多光轴系统光轴平行度检测方法中,移动所述中转元件2至各个待测子光学元件5上方,包括:Further, in the above method for detecting the parallelism of the optical axes of the multi-optical axis system, moving the transfer element 2 above each sub-optical element 5 to be tested includes:

以所述初始位置为圆心,将所述中转元件2沿半径方向平移,同时沿圆周方向旋转移动,直至到达各个所述待测子光学元件5的上方。Taking the initial position as the center of the circle, the transition element 2 is translated in the radial direction, and at the same time rotated and moved in the circumferential direction until it reaches the top of each of the sub-optical elements 5 to be tested.

其中,测量原理如图3所示,图3为本发明实施例所提供的测量原理图。其中,φmain代表主口径,φsub表示被装调的待测子光学元件5口径。O1为轨道中转轴的位置,可以利用磁力吸附于主光学元件3之上,中转元件2的直线运动半径为R,结合转动与平移,中转元件2可实现任意半径为fR(0<f≤1)的圆周运动。Wherein, the measurement principle is shown in FIG. 3 , and FIG. 3 is a measurement principle diagram provided by an embodiment of the present invention. Among them, φ main represents the main aperture, and φ sub represents the 5 aperture of the sub-optical element to be tested. O 1 is the position of the rotation axis in the track, which can be adsorbed on the main optical element 3 by magnetic force. The linear motion radius of the relay element 2 is R. Combining rotation and translation, the relay element 2 can realize any radius fR (0<f≤ 1) circular motion.

如图2所示,图2为本发明实施例所提供的多光轴系统光轴平行度检测系统的结构图。As shown in FIG. 2 , FIG. 2 is a structural diagram of a multi-optical axis system optical axis parallelism detection system provided by an embodiment of the present invention.

在另一种具体实施例中,本发明还提供了一种多光轴系统光轴平行度检测系统,包括:In another specific embodiment, the present invention also provides a multi-optical axis system optical axis parallelism detection system, including:

激光器1,用于发射准直光至中转元件2;a laser 1 for emitting collimated light to the relay element 2;

中转元件2,用于将所述激光器1发射的所述准直光转换为与主光学元件3理想光轴平行的准直光,The relay element 2 is used to convert the collimated light emitted by the laser 1 into collimated light parallel to the ideal optical axis of the main optical element 3,

判断模块,用于依次判断所述光斑是否与靶面4中心重合;A judging module, configured to sequentially judge whether the light spot coincides with the center of the target surface 4;

调节模块,用于根据所述光斑与所述靶面4中心之间的偏离距离调节所述待测子光学元件5的光轴相互平行。An adjustment module, configured to adjust the optical axes of the sub-optical elements 5 to be tested to be parallel to each other according to the deviation distance between the light spot and the center of the target surface 4 .

进一步的,在上述多光轴系统光轴平行度检测系统中,还包括:Further, in the above-mentioned multi-optical axis system optical axis parallelism detection system, it also includes:

标记模块,用于移动所述中转元件2至所述主光学元件3的上方,并记录所述中转元件2的初始位置。The marking module is used to move the transition element 2 above the primary optical element 3 and record the initial position of the transition element 2 .

进一步的,在上述多光轴系统光轴平行度检测系统中,还包括:Further, in the above-mentioned multi-optical axis system optical axis parallelism detection system, it also includes:

旋转导轨,用于以所述初始位置为圆心,将所述中转元件2沿半径方向平移,同时沿圆周方向旋转移动,直至到达各个所述待测子光学元件5的上方。The rotating guide rail is used for using the initial position as the center of the circle to translate the transition element 2 in the radial direction and at the same time rotate and move in the circumferential direction until it reaches the top of each of the sub-optical elements 5 to be measured.

进一步的,在上述多光轴系统光轴平行度检测系统中,所述中转元件2为五棱镜。Further, in the above multi-optical axis system optical axis parallelism detection system, the relay element 2 is a pentaprism.

其中,由于五棱镜能够将入射准直光转换为与入射的准直光垂直的准直光,无论如何旋转五棱镜,均能够实现上述效果,因此,利用五棱镜能够Wherein, since the pentaprism can convert the incident collimated light into the collimated light perpendicular to the incident collimated light, no matter how the pentaprism is rotated, the above-mentioned effects can be achieved. Therefore, the use of the pentaprism can

需要指出的是,包括但不限于五棱镜,还可以为倾角为45度的平面镜等,均在保护范围内。It should be pointed out that, including but not limited to a pentaprism, it can also be a plane mirror with an inclination angle of 45 degrees, etc., all of which are within the scope of protection.

说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分互相参见即可。对于实施例公开的装置而言,由于其与实施例公开的方法相对应,所以描述的比较简单,相关之处参见方法部分说明即可。Each embodiment in the description is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other. As for the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and for the related part, please refer to the description of the method part.

本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。In this paper, specific examples are used to illustrate the principle and implementation of the present invention, and the descriptions of the above embodiments are only used to help understand the method and core idea of the present invention. It should be pointed out that for those skilled in the art, without departing from the principles of the present invention, some improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims (7)

1. a kind of many optical axis systematic optical axis Parallel testing methods, it is characterised in that including:
Laser launches collimated light to transfer element, and the preferable optical axis formed after the transfer element with main optical element is put down Capable collimated light;
The collimated light reflexes to the focal point of the main optical element, the focus and target surface after the main optical element Center superposition;
Above the mobile transfer element to each sub- optical element to be measured, the laser launches the collimated light by described After transfer element and the sub- optical element to be measured, hot spot is formed on the target surface;
Judge successively the hot spot whether with target surface center superposition, if it is not, then according between the hot spot and the target surface center Deviation distance adjust the optical axis of the sub- optical element to be measured and be parallel to each other.
2. many optical axis systematic optical axis Parallel testing methods as claimed in claim 1, it is characterised in that laser transmitting collimation Before light to transfer element, also include:
The mobile transfer element records the initial position of the transfer element to the top of the main optical element.
3. many optical axis systematic optical axis Parallel testing methods as claimed in claim 2, it is characterised in that the mobile transfer member Above part to each sub- optical element to be measured, including:
Using the initial position as the center of circle, the transfer element is translated along radial direction, at the same it is along the circumferential direction in rotary moving, Until reaching the top of each sub- optical element to be measured.
4. a kind of many optical axis systematic optical axis parallel detection systems, it is characterised in that including:
Laser, for launching collimated light to transfer element;
Transfer element, it is parallel with the preferable optical axis of main optical element for the collimated light that the laser is launched to be converted to Collimated light,
Judge module, for judge successively the hot spot whether with target surface center superposition;
Adjustment module, for according to the sub-light member to be measured of the deviation distance regulation between the hot spot and the target surface center The optical axis of part is parallel to each other.
5. many optical axis systematic optical axis parallel detection systems as claimed in claim 4, it is characterised in that also include:
Mark module, for moving the transfer element to the top of the main optical element, and records the transfer element Initial position.
6. many optical axis systematic optical axis parallel detection systems as claimed in claim 5, it is characterised in that
Rotary rail, for using the initial position as the center of circle, the transfer element being translated along radial direction, while circumferentially Direction is in rotary moving, until reaching the top of each sub- optical element to be measured.
7. many optical axis systematic optical axis parallel detection systems as claimed in claim 6, it is characterised in that the transfer element is Pentaprism.
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CN113959374A (en) * 2021-12-22 2022-01-21 普宙科技(深圳)有限公司 Image-based laser holder optical axis correction method and device
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