CN106931183B - Throttle valve - Google Patents
Throttle valve Download PDFInfo
- Publication number
- CN106931183B CN106931183B CN201511026521.5A CN201511026521A CN106931183B CN 106931183 B CN106931183 B CN 106931183B CN 201511026521 A CN201511026521 A CN 201511026521A CN 106931183 B CN106931183 B CN 106931183B
- Authority
- CN
- China
- Prior art keywords
- bushing
- valve
- bottom cover
- valve rod
- throttle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007789 sealing Methods 0.000 claims description 19
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 230000008021 deposition Effects 0.000 abstract description 9
- 239000002245 particle Substances 0.000 abstract description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- 239000000356 contaminant Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/08—Details
- F16K5/14—Special arrangements for separating the sealing faces or for pressing them together
- F16K5/18—Special arrangements for separating the sealing faces or for pressing them together for plugs with cylindrical surfaces
- F16K5/181—Special arrangements for separating the sealing faces or for pressing them together for plugs with cylindrical surfaces with the housing or parts of the housing mechanically pressing the seals against the plugs
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
- Details Of Valves (AREA)
Abstract
A kind of throttle valve, including a throttle body, a valve rod, a gasket, a bottom cover, a spring and a bushing.One runner is formed among the throttle body.Valve rod is set among the throttle body, wherein by rotating the valve rod, the opening size of the runner is adjusted.Gasket is set among the throttle body, which abuts the valve rod.Bottom cover connects the throttle body, wherein a gas outlet is formed on the bottom cover, which includes a bottom cover flange, which surrounds the gas outlet.The spring abuts the bottom cover flange and applies an elastic force to the gasket, and the gasket is made to be close to the valve rod.The spring pocket is set on the bushing, first end ejection gasket of the bushing.The gas outlet of throttle valve of the invention will not be blocked because of particle deposition, can reduce the case where adjusting throttle valve opening repeatedly, improve the service life of throttle valve.
Description
Technical Field
The present invention relates to a throttle valve, and more particularly, to a throttle valve capable of preventing particle contamination.
Background
In a vapor deposition process, a deposition layer is deposited on a semiconductor wafer (or substrate), typically by heating the substrate and holding the substrate so that the substrate is maintained a short distance from a supply of deposition gas (process gas) that flows toward the substrate. The deposition gas stream reacts to form a deposition layer on the heated substrate.
At some point on the vacuum line between the chamber and the vacuum pump, a vacuum shut-off valve or throttle valve is typically provided, which provides a restriction to the process chamber when closed. Volatile contaminants, which remain in the vapor state at the high temperatures in the reaction chamber, undesirably condense on the cooled inner walls of the vacuum lines, some distance from the reaction zone of the reaction chamber, but within the containment limits of the process chamber defined by the vacuum valves. In the absence of a gas flow, these contaminants can return to the reaction zone of the chamber and cause undesirable contamination. In an attempt to avoid this problem, the interior surfaces within the containment limits of the process chamber are periodically cleaned by etching (and/or plasma cleaning), or the like, with a cleaning gas to remove dielectric material deposited by the deposition gas.
However, the throttle valve is limited in its structural design, and contaminants may deposit on the internal components of the throttle valve and affect the airflow control effect of the throttle valve. Since the throttle valve is generally controlled by a stepping motor, the stepping motor repeatedly adjusts the opening of the throttle valve when contaminants are deposited on the inner parts of the throttle valve, thereby affecting the pressure of the reaction chamber and reducing the life span of the throttle valve.
Disclosure of Invention
The invention provides a throttle valve for solving the problems in the prior art, which comprises a throttle valve body, a valve rod, a sealing gasket, a bottom cover, a spring and a bushing. A flow passage is formed in the throttle body. The valve rod is arranged in the throttle valve body, wherein, when the valve rod is rotated, the opening degree of the flow passage is adjusted. The sealing gasket is arranged in the throttle valve body and is abutted against the valve rod. The bottom cover is connected with the throttle valve body, wherein an air outlet is formed on the bottom cover, and the bottom cover comprises a bottom cover flange which surrounds the air outlet. The spring is abutted against the flange of the bottom cover and applies elastic force to the sealing gasket, so that the sealing gasket is tightly attached to the valve rod. The spring is sleeved on the bushing, and a first end of the bushing pushes the sealing gasket.
In one embodiment, the bushing includes a bushing flange, one end of the spring abuts the bottom cover flange, and the other end of the spring abuts the bushing flange.
In one embodiment, the bushing flange is formed at the first end.
In one embodiment, the liner includes a second end that extends through the air outlet.
In one embodiment, the bushing has a bushing through hole, and the diameter of the bushing through hole is smaller than that of the air outlet.
In one embodiment, the bushing is made of aluminum alloy.
In one embodiment, the throttle body includes an inlet port that is collinear with the outlet port.
The invention also relates to a throttle valve, which comprises a throttle valve body, a valve rod, a sealing gasket, a bottom cover and a spring. A flow passage is formed in the throttle body. The valve rod is arranged in the throttle valve body, wherein, when the valve rod is rotated, the opening degree of the flow passage is adjusted. The sealing gasket is arranged in the throttle valve body and is abutted against the valve rod. The bottom cover is connected with the throttle valve body, wherein an air outlet is formed on the bottom cover, and the bottom cover comprises a bottom cover flange which surrounds the air outlet. The spring is abutted against the flange of the bottom cover and applies elastic force to the sealing gasket, so that the sealing gasket is tightly attached to the valve rod.
In one embodiment, the valve rod is formed with a notch, when the valve rod is rotated, the position of the notch is adjusted, the opening of the flow passage is adjusted, and the sealing pad is formed with an abutting portion which abuts against the valve rod in a sealing manner.
With the throttle valve of the present invention, particles are not deposited on the spring and the bottom cover flange because the bushing isolates the airflow from the spring and the bottom cover flange. Therefore, the air outlet of the throttle valve is not blocked by particle deposition, and the repeated adjustment of the throttle valve opening can be reduced. Therefore, stable reaction chamber pressure can be provided and the life of the throttle valve can be improved.
Drawings
The drawings are only for purposes of illustrating and explaining the present invention and are not to be construed as limiting the scope of the present invention. Wherein,
fig. 1 shows a throttle valve according to a first embodiment of the invention.
FIG. 2 shows a bottom lid flange of a first embodiment of the present invention.
Fig. 3 shows a throttle valve according to a second embodiment of the invention.
Fig. 4 shows a bushing according to a second embodiment of the invention.
Figure 5 shows a second end of a bushing according to a second embodiment of the invention.
The reference numbers illustrate:
1. 2-a throttle valve;
10-a first connecting assembly;
11-O-shaped rings;
12-a first gasket;
13-a first abutting portion;
14-O-ring;
20-a second connecting assembly;
21-O-ring;
22-a second gasket;
23 to a second contact portion;
24-O-ring;
30-throttle valve body;
31-air inlet;
40-valve rod unit;
41-valve rod;
42-gap;
50-bottom cover;
51-an air outlet;
52-bottom cover flange;
60-spring;
70-lining;
71-first end;
72 to the second end;
73-a bushing flange;
74-bushing through hole.
Detailed Description
In order to make the technical contents and objects of the present invention and the effects achieved thereby more complete and clear, embodiments of the present invention will now be described with reference to the accompanying drawings:
referring to fig. 1, a throttle valve 1 according to a first embodiment of the present invention is shown, including a first connecting member 10, a second connecting member 20, a throttle valve body 30, a valve stem unit 40, and a bottom cover 50. The first connecting element 10 includes an O-ring 11, a first gasket 12, and an O-ring 14. The second connecting member 20 includes an O-ring 21, a second gasket 22, and an O-ring 24. The throttle body 30 includes an intake port 31. The valve stem unit 40 includes a valve stem 41, and a notch 42 is formed in the valve stem 41. An air outlet 51 is formed in the bottom cover 50, and the bottom cover 50 is connected to the throttle body 30.
A flow passage is formed in the throttle body 30 (from the intake port 31 to the outlet port 51). In this embodiment, the flow path is linear, and the air inlet 31 and the air outlet 51 are located on the same straight line. The valve rod 41 is provided in the throttle body 30, wherein by rotating the valve rod 41, the position of the notch 42 is adjusted, and the opening size of the flow passage is adjusted accordingly. The O-ring 11 is disposed between the first seal 12 and an external pipe (not shown). An O-ring 14 is disposed between the throttle body 30 and the external pipe (not shown). The O-ring 21 is disposed between the second gasket 22 and the bottom cover 50, and the O-ring 24 is disposed between the throttle body 30 and the bottom cover 50.
The first gasket 12 has a first abutting portion 13 having a concavo-convex shape, and the first abutting portion 13 abuts against the valve stem 41 in a sealable manner. The second gasket 22 has a concave-convex shaped second abutting portion 23, and the second abutting portion 23 abuts against the valve stem 41 in a sealable manner. The second seal 22 is disposed in the throttle body 30.
Referring to FIGS. 1 and 2, in the first embodiment, the bottom cover 50 includes a bottom cover flange 52, and the bottom cover flange 52 surrounds the air outlet, thereby preventing particles from being deposited on the bottom cover flange 52. Therefore, the air outlet of the throttle valve is not blocked by particle deposition, and repeated adjustment of the throttle valve opening can be reduced. Therefore, stable reaction chamber pressure can be provided and the life of the throttle valve can be improved.
Referring to fig. 3, there is shown a throttle valve 2 according to a second embodiment of the present invention, which includes a first coupling member 10, a second coupling member 20, a throttle body 30, a valve stem unit 40, a bottom cover 50, a spring 60, and a bushing 70. The first connecting element 10 includes an O-ring 11, a first gasket 12, and an O-ring 14. The second connecting member 20 includes an O-ring 21, a second gasket 22, and an O-ring 24. The throttle body 30 includes an intake port 31. The valve stem unit 40 includes a valve stem 41, and a notch 42 is formed in the valve stem 41. An air outlet 51 is formed in the bottom cover 50, and the bottom cover 50 is connected to the throttle body 30.
A flow passage is formed in the throttle body 30 (from the intake port 31 to the outlet port 51). In this embodiment, the flow path is linear, and the air inlet 31 and the air outlet 51 are located on the same straight line. The valve rod 41 is provided in the throttle body 30, wherein by rotating the valve rod 41, the position of the notch 42 is adjusted, and the opening size of the flow passage is adjusted accordingly. The O-ring 11 is disposed between the first seal 12 and an external pipe (not shown). An O-ring 14 is disposed between the throttle body 30 and the external pipe (not shown). The O-ring 21 is disposed between the second gasket 22 and the bottom cover 50, and the O-ring 24 is disposed between the throttle body 30 and the bottom cover 50.
The first gasket 12 has a first abutting portion 13 having a concavo-convex shape, and the first abutting portion 13 abuts against the valve stem 41 in a sealable manner. The second gasket 22 has a concave-convex shaped second abutting portion 23, and the second abutting portion 23 abuts against the valve stem 41 in a sealable manner.
The spring 60 abuts the bottom cover flange 52 and exerts a resilient force on the second gasket 22, causing the second gasket 22 to abut the valve stem 41. The spring 60 is sleeved on the bushing 70, and a first end 71 of the bushing 70 pushes the second sealing pad 22. In this embodiment, the first end 71 abuts the O-ring 21.
Referring to fig. 3 and 4, in this embodiment, the bushing 70 includes a bushing flange 73, the bushing flange 73 is formed at the first end 71, one end of the spring 60 abuts the bottom cover flange 52, and the other end of the spring 60 abuts the bushing flange 73. The bushing further includes a second end 72. With reference to fig. 5, in one embodiment, the second end 72 extends through the air outlet 51. In one embodiment, the bushing 70 has a bushing through hole 74, and the diameter of the bushing through hole 74 is smaller than the diameter of the air outlet 51.
In one embodiment, the bushing 70 is made of aluminum alloy to resist ozone. The above disclosure is not intended to limit the present invention, and the bushing 70 may be made of Teflon or other materials.
In this embodiment, as with the first embodiment, by properly designing the width of the bottom cover flange 52, the aperture of the air outlet 51 can be maximized and still provide sufficient support for the spring 60.
With the throttle valve of the second embodiment of the present invention, since the bushing is used to isolate the flow of gas from the spring and the bottom cover flange, particles are not deposited on the spring and the bottom cover flange. Therefore, the air outlet of the throttle valve is not blocked by particle deposition, and the repeated adjustment of the throttle valve opening can be reduced. Therefore, stable reaction chamber pressure can be provided and the life of the throttle valve can be improved.
Although the present invention has been described with respect to the above embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (5)
1. A choke valve, characterized in that the choke valve comprises:
a throttle body, wherein a flow passage is formed in the throttle body;
a valve rod arranged in the throttle valve body, wherein, when the valve rod is rotated, the opening of the flow passage is adjusted, a gap is formed on the valve rod, the position of the gap is adjusted by rotating the valve rod, and the opening of the flow passage is adjusted accordingly;
the first sealing gasket is arranged in the throttle valve body and is abutted against the valve rod, wherein the first sealing gasket is provided with a first abutting part in a concave-convex shape, and the first abutting part is abutted against the valve rod in a sealable mode;
the second sealing gasket is arranged in the throttle valve body and is abutted against the valve rod, wherein the second sealing gasket is provided with a concave-convex second abutting part which is abutted against the valve rod in a sealable mode;
a bottom cover connected to the throttle body, wherein an air outlet is formed on the bottom cover, the bottom cover includes a bottom cover flange surrounding the air outlet;
the spring is abutted against the flange of the bottom cover and applies elastic force to the second sealing gasket so that the second sealing gasket is tightly attached to the valve rod; and
a bushing, the spring is sleeved on the bushing, a first end of the bushing pushes the second sealing gasket,
wherein the bushing includes a bushing flange, one end of the spring abuts the bottom cap flange, the other end of the spring abuts the bushing flange, and the bushing includes a second end that extends through the air outlet.
2. The choke valve of claim 1, wherein the bushing flange is formed at the first end.
3. The throttling valve of claim 1, wherein the bushing has a bushing through hole, and the diameter of the bushing through hole is smaller than that of the outlet.
4. The throttling valve of claim 1, wherein the bushing is an aluminum alloy.
5. The choke valve of claim 1, wherein the choke body includes an inlet port, the inlet port being collinear with the outlet port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511026521.5A CN106931183B (en) | 2015-12-31 | 2015-12-31 | Throttle valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511026521.5A CN106931183B (en) | 2015-12-31 | 2015-12-31 | Throttle valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106931183A CN106931183A (en) | 2017-07-07 |
| CN106931183B true CN106931183B (en) | 2019-02-01 |
Family
ID=59442685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511026521.5A Active CN106931183B (en) | 2015-12-31 | 2015-12-31 | Throttle valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106931183B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3382892A (en) * | 1965-03-08 | 1968-05-14 | Weatherhead Co | Quick-disconnect coupling |
| US6090206A (en) * | 1997-10-20 | 2000-07-18 | Applied Materials, Inc. | Throttle valve providing enhanced cleaning |
| CN2490375Y (en) * | 2001-07-30 | 2002-05-08 | 自贡市地佩尔阀门有限公司 | High-temp. fixed ball valve |
| CN2748721Y (en) * | 2004-11-16 | 2005-12-28 | 林泰顺 | Ball valve capable of automatically adjusting sealing |
| KR20070106312A (en) * | 2006-04-28 | 2007-11-01 | 주식회사서흥금속 | Ball valve of very low temperature |
| CN101421548A (en) * | 2006-04-13 | 2009-04-29 | Vir里齐奥工程师阀门工业股份公司 | Ball for valves and production method |
| CN104662347A (en) * | 2012-08-06 | 2015-05-27 | 机械解析有限公司 | Valve with a load varying mechanism, and method of operating the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201015032D0 (en) * | 2010-09-10 | 2010-10-20 | Xamol Ltd | Valve assembly |
-
2015
- 2015-12-31 CN CN201511026521.5A patent/CN106931183B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3382892A (en) * | 1965-03-08 | 1968-05-14 | Weatherhead Co | Quick-disconnect coupling |
| US6090206A (en) * | 1997-10-20 | 2000-07-18 | Applied Materials, Inc. | Throttle valve providing enhanced cleaning |
| CN2490375Y (en) * | 2001-07-30 | 2002-05-08 | 自贡市地佩尔阀门有限公司 | High-temp. fixed ball valve |
| CN2748721Y (en) * | 2004-11-16 | 2005-12-28 | 林泰顺 | Ball valve capable of automatically adjusting sealing |
| CN101421548A (en) * | 2006-04-13 | 2009-04-29 | Vir里齐奥工程师阀门工业股份公司 | Ball for valves and production method |
| KR20070106312A (en) * | 2006-04-28 | 2007-11-01 | 주식회사서흥금속 | Ball valve of very low temperature |
| CN104662347A (en) * | 2012-08-06 | 2015-05-27 | 机械解析有限公司 | Valve with a load varying mechanism, and method of operating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106931183A (en) | 2017-07-07 |
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| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| GR01 | Patent grant | ||
| GR01 | Patent grant |