CN106736991A - A kind of five axle three-D ultrasonic burnishing machines and its application method - Google Patents

Abstract

A five-axis three-dimensional ultrasonic polishing machine tool, which currently consists of a frame, an X-direction moving mechanism, a Y-direction moving mechanism, a Z-direction moving mechanism, an ultrasonic vibration polishing device, a rotary table, a polishing liquid ultrasonic atomization liquid application device and The five-axis two-dimensional ultrasonic polishing machine tool composed of the workpiece online detection device is improved, and the ultrasonic vibration polishing device is changed from the original one-dimensional ultrasonic vibration to the two-dimensional ultrasonic vibration. The two-dimensional ultrasonic vibration is installed on a vertical rotary On the table, two ultrasonic devices whose angle can be adjusted through the station adjustment hole and the base of the polishing head connected with the horn of the ultrasonic device are completed, and the polishing head is fixed on the base. The ultrasonic polishing machine applies two-dimensional ultrasonic vibration to the polishing head. The two-dimensional ultrasonic coupling can not only increase the polishing power, but also make the trajectory of the polishing head evenly cover the processing area in the form of a curved reciprocating circle, so that the polishing efficiency is significantly improved.

Description

A five-axis three-dimensional ultrasonic polishing machine tool and its use method

technical field

The invention relates to a polishing machine, in particular to a five-axis three-dimensional ultrasonic polishing machine tool for complex curved surface polishing and a method for using the same.

Background technique

With the development of industrial technology, hard and brittle materials have shown broad application prospects in the fields of aerospace, automobiles, molds, optics, and semiconductors. Optical glass is often used to make reconnaissance satellite camera lenses, stealth radar search mirrors, high-speed aircraft windows, large mirrors for astronomical telescopes, and optical lenses and prisms in laser emitting devices. Conventional machining of optical elements of hard and brittle materials is very difficult, and is usually obtained through ultra-precision grinding, polishing and ultra-precision grinding, but this method takes a long time and costs a lot. In order to solve this processing problem, an ultrasonic polishing processing method began to be applied in the industrial field in the early 20th century. Ultrasonic polishing can reduce cutting force and cutting temperature, reduce tool wear, improve processing quality, and expand the range of machinable materials. It is especially suitable for processing various hard and brittle materials such as glass, ceramics, quartz, diamond, and silicon.

In order to solve the problems existing in various ultrasonic polishing machine tools at present, including the misalignment of the axis direction of the polishing head and the normal direction of the polishing point of complex curved surface components, the uneven contact stress between the polishing head and the surface of the workpiece affects the surface polishing accuracy of the workpiece; during the polishing process, the polishing head The surface of the workpiece is easily damaged at the maximum elastic compression depth; the workpiece is immersed in the polishing liquid to disperse the energy transmitted by the ultrasonic wave, and the energy transmitted to the abrasive particles in the polishing liquid is less, and the processing efficiency is low; the workpiece is detected offline during the polishing process Due to many technical problems such as the adverse effects of positioning errors caused by repeated installation on processing quality and efficiency, the applicant once disclosed a five-axis two-dimensional ultrasonic polishing machine tool for curved surface processing in the Chinese patent application specification with application number 201611119653.7. The machine tool is composed of a frame, an XYZ three-dimensional moving mechanism, a rotary ultrasonic vibration polishing device, a rotary table, a polishing liquid ultrasonic atomization liquid application device and an online workpiece detection device. When using it to polish optical complex curved surface components, the surface shape parameters of the components are converted into the tool path file of the polishing head, and the CNC program of the machine tool is obtained through kinematic inverse solution, and the five-axis linkage of the machine tool (three-dimensional movement and two-dimensional movement) is achieved through the program control system. rotation), so that the axial direction of the polishing head coincides with the normal line of the workpiece polishing point; determine the ultrasonic frequency used by the ultrasonic atomization liquid application device for the polishing liquid according to the degree of atomization required for polishing; the amplitude of the rotary ultrasonic vibration polishing device is determined according to the polishing The technical parameters of the liquid atomization liquid application device and the processed workpiece, as well as the critical impact speed and critical cutting speed at the maximum elastic compression depth of the workpiece are obtained according to the calculation formula; the workpiece surface is detected online by the workpiece online detection device. Although this ultrasonic polishing machine tool solves the above-mentioned technical problems existing in the existing ultrasonic polishing machine tools, the one-dimensional ultrasonic vibration applied to the main shaft can only make the polishing head do reciprocating linear motion along the main shaft direction, and the polishing power is low. The movement trajectory of the polishing head is only a single point on the complex surface during processing, and the processing efficiency is not high enough.

Contents of the invention

The object of the present invention is to provide a five-axis three-dimensional ultrasonic polishing machine tool with higher polishing power and polishing processing efficiency than the above-mentioned five-axis two-dimensional ultrasonic polishing machine tool and a method for using the machine tool.

The five-axis three-dimensional ultrasonic polishing machine tool of the present invention, the ultrasonic vibration polishing device is changed from the original one-dimensional ultrasonic vibration to two-dimensional ultrasonic vibration, and the remaining parts include the frame, the X-direction moving mechanism, the Y-direction moving mechanism, the Z-direction moving mechanism, The rotary table, ultrasonic atomization device for polishing liquid and online workpiece detection device are all the same as the five-axis two-dimensional ultrasonic polishing machine tool.

The five-axis three-dimensional ultrasonic polishing machine tool of the present invention includes a frame, an X-direction moving mechanism, a Y-direction moving mechanism, a Z-direction moving mechanism, an ultrasonic vibration polishing device, a rotary table, a polishing liquid ultrasonic atomization liquid application device and a workpiece online detection device ; Wherein the Z-direction movement mechanism is located on the bed of the frame, the X-direction movement mechanism and the Y-direction movement mechanism are located on the base of the frame;

The frame includes a machine base and a bed vertically fixed on the machine base;

The Z-direction movement mechanism is located on the bed of the frame, and the X-direction movement mechanism and the Y-direction movement mechanism are located on the base of the frame;

The Z-direction moving mechanism includes a Z-direction guide seat fixedly installed on the front wall of the bed, with a Z-direction guide rail at the front, a Z-direction mobile platform that can move in the Z direction along the Z guide rail, and drives the Z-direction guide rail. The Z-direction moving lead screw for the Z-direction movement of the mobile table and the Z-direction servo motor driving the Z-direction moving lead screw to rotate; the Y-direction moving mechanism includes a Y-direction fixedly installed on the machine base with a Y-guiding rail on the upper part. The guide rail seat, the Y-direction moving table that can move in the Y direction along the Y-direction rail, the Y-direction moving screw that drives the Y-direction moving table to move in the Y direction, and the Y-direction servo motor that drives the Y-direction moving screw to rotate. There is an X-guiding rail on the mobile platform; the X-direction moving mechanism includes an X-direction mobile platform that can move in the X-direction along the X-direction rail on the Y-direction mobile platform, and drives the X-direction mobile platform to move in the X-direction. Moving lead screw and X-direction servo motor driving X-direction moving lead screw to rotate;

The rotary table includes a casing fixedly installed on the X-direction mobile table, a horizontal rotary table for placing workpieces to be processed is arranged on the upper part of the casing, and a driving horizontal rotary table is installed inside the casing for horizontal There is a horizontal rotating worm drive mechanism that rotates vertically, and there is a servo motor driving the horizontal rotary worm drive mechanism on the side of the casing;

The polishing liquid ultrasonic atomization liquid application device includes a five-axis manipulator fixedly installed on one side of the machine base, and the front end of the five-axis manipulator is equipped with an ultrasonic nozzle for spraying the polishing liquid to the polishing part of the workpiece;

The workpiece online detection device includes a five-axis manipulator fixedly installed on the other side of the machine base, and a laser interferometric probe for detecting the accuracy of the polished surface shape of the workpiece is installed on the front end of the five-axis manipulator;

The ultrasonic vibration polishing device includes a vertical rotation mechanism and a two-dimensional ultrasonic polishing mechanism;

The vertical rotation mechanism includes a box-type housing fixedly installed on the Z-direction mobile platform. There is a vertical rotation platform at the front of the box-type housing, and a drive vertical rotation unit is installed inside the box-type housing. The platform is used as a vertical rotary worm drive mechanism for vertical rotation (rotating around the Y direction), and there is a servo motor driving the vertical rotary worm drive mechanism on the upper part of the box-type housing; the two-dimensional ultrasonic polishing mechanism includes a fixed installation On the right-angled fixed plate on the vertical rotary table, there are symmetrically distributed station adjustment holes under the horizontal plate of the fixed plate, and two left and right symmetrical holes for adjusting the axes of the two ultrasonic vibration devices are installed through the station adjustment holes. Ultrasonic device fixing plate with an included angle. The two ultrasonic vibration device fixing plates are respectively installed with ultrasonic vibration device I and ultrasonic vibration device II. The front ends of the horns of the vibrating device I and the ultrasonic vibrating device II are respectively connected to the arc-shaped polishing head base with the horn connecting hole matched with the station adjustment hole, and the polishing head is installed on the polishing head base. seat.

The use method of the five-axis three-dimensional ultrasonic polishing machine tool of the present invention comprises the following steps:

1) Convert the shape parameters of the surface of the processed workpiece (optical complex curved surface element) into the tool pass file of the polishing head, obtain the CNC program of the machine tool through kinematics inversion, and make the five-axis linkage of the machine tool (three-dimensional movement and two-dimensional movement) through the program control system Dimensional rotation), so that the axial direction of the polishing head and the normal direction of the workpiece polishing point are always coincident;

2) Obtain the numerical control program of the five-axis manipulator of the polishing liquid ultrasonic atomization liquid application device through the inverse analysis of the spindle position and posture of the polishing head, so that it can follow the polishing head, and make the direction of the polishing liquid spray and the normal direction of the workpiece polishing point Keep the included angle at 45±5 degrees;

3) Determine the ultrasonic frequency f3 (given by the calibration function of the nozzle product) used by the polishing liquid ultrasonic atomization liquid applicator according to the degree of atomization (the diameter of the droplet) required for polishing;

4) Select ultrasonic vibration frequencies f1 and f2, ultrasonic vibration amplitudes A ₁ and A ₂ , ultrasonic vibration initial phases θ ₁ and θ ₂ , ultrasonic vibration device Ⅰ and ultrasonic vibration The axial angle α of the device II, the angle α is adjusted through the station adjustment hole under the fixed plate and the corresponding horn connection hole on the base of the polishing head,

The value of α is one of: 30°, 60°, 60°, 90°

30°, 45°, 60°, 90°

The value range of the amplitudes A ₁ and A ₂ is: 10μm≤A ₁ ≤30μm,

The value range of frequency f1 and f2 is: 20kH _Z ≤ f ₁ ≤ 55kH _Z , and make The phase difference between the two phases of θ ₁ and θ ₂ θ=|θ ₁ -θ ₂ | ranges from: [0°, 20°]∪[70°, 90°];

5) During the polishing process, when the processing accuracy of the curved surface of the workpiece needs to be tested, the workpiece is withdrawn from the processing area through the Y-direction moving mechanism, and the workpiece curved surface is detected by the workpiece online detection device. The moving mechanism returns the workpiece to the processing area to continue the polishing process.

Compared with the five-axis two-dimensional ultrasonic polishing machine tool described in the background technology, the beneficial effects of the present invention are:

1. The present invention applies two-dimensional ultrasonic vibration on the polishing head, not only can improve the polishing power, but also through the adjustment of the vibration direction, amplitude, frequency and phase difference of the two-dimensional ultrasonic vibration, after coupling, the motion trajectory of the polishing head can be changed to a curve The reciprocating form evenly covers the processing area, the polishing area increases, and the polishing efficiency is significantly improved.

2. Similarly, the present invention drives the ultrasonic spray head and the polishing head to follow up through the five-axis manipulator of the polishing liquid ultrasonic atomization liquid application device, and sprays the polishing liquid in the direction of keeping an angle of 45 degrees with the normal line of the polishing point, so that the vapor state The polishing liquid is sprayed between the polishing head and the workpiece at the polishing point, which can avoid the surface damage of the workpiece caused by the dry grinding of the polishing head, and is conducive to saving the polishing liquid; the online measurement of the polishing process can be realized by the workpiece online measurement device, which can avoid the offline detection of the workpiece The positioning error caused by repeated installation has an adverse effect on the processing quality and polishing efficiency; it can also be used to process large-scale optical complex curved surface components with a diameter of 300-350mm.

Description of drawings

Fig. 1 is the overall structure schematic diagram of ultrasonic polishing device of the present invention,

Fig. 2 is a schematic diagram of the rotating mechanism of the ultrasonic vibration polishing device in Fig. 1,

Fig. 3 is the front view of the ultrasonic vibration polishing mechanism of the ultrasonic vibration polishing device in Fig. 1,

Fig. 4 is an oblique bottom view of Fig. 3 (for displaying the station adjustment hole),

Fig. 5 is a schematic diagram of the station adjustment hole in Fig. 3,

Fig. 6 is a schematic diagram of the polishing head base in Fig. 3,

Fig. 7 is a schematic diagram of the structure of the rotary table in Fig. 1,

Fig. 8 is a schematic diagram of the structure of the polishing liquid ultrasonic atomization liquid application device in Fig. 1,

Fig. 9 is a schematic diagram of the direction of spraying the polishing liquid by the ultrasonic nozzle in Fig. 8,

Fig. 10 is a schematic diagram of the trajectory of the polishing head of the ultrasonic polishing device,

FIG. 11 is a schematic structural diagram of the online workpiece detection device in FIG. 1 .

detailed description

The present invention will be further described below in conjunction with drawings and embodiments.

As shown in Figure 1, the five-axis three-dimensional ultrasonic polishing machine tool of the present invention includes a frame; an X-direction movement mechanism, a Y-direction movement mechanism and a Z-direction movement mechanism installed on the frame; an ultrasonic vibration polishing device 5; a rotary table; Polishing liquid ultrasonic atomization liquid applicator and workpiece online detection device.

The frame includes a machine base 17 and a bed 1 vertically fixed on the machine base; on the base.

The Z-direction moving mechanism includes a Z-direction rail seat 3 fixedly installed on the front wall of the bed, Z-direction rail seats 26 on both sides of the front of the Z-direction rail seat, and a Z-direction mobile platform 25 on the Z-direction rail. The moving platform is driven by the Z-direction servo motor 2 installed at the rear of the Z-direction rail seat through the Z-direction moving lead screw 4 connected to it, and can move along the Z-direction rail in Z direction.

The Y-direction moving mechanism includes a Y-direction rail seat 15 fixedly installed on the machine base with a Y-direction rail 16 on the top, a Y-direction mobile platform 12 that can move in the Y direction along the Y guide rail, and drives the Y-direction movement. Platform is done Y to move leading screw 14 and drives Y to move Y to the servomotor 13 that Y moves leading screw and rotate, and X guide rail 21 is arranged on Y to moving platform.

The X-direction moving mechanism includes an X-direction mobile platform 22 that can move in the X-direction along the X-direction rail 21 on the Y-direction mobile platform, drives the X-direction mobile lead screw 20 and drives the X-direction mobile platform to move in the X direction. The X direction servomotor 19 that X moves leading screw to rotate.

1 to 6, the ultrasonic vibration polishing device 5 includes a vertical rotation mechanism and a two-dimensional ultrasonic polishing mechanism.

As shown in Figure 2, the vertical rotating mechanism includes a box-type housing 501 fixedly installed on the Z-direction mobile platform 22, and a vertical rotation platform 502 is arranged at the front of the box-type housing. The inside of the body is equipped with a vertical rotary worm drive mechanism 503 that drives the vertical rotary table to do vertical rotation (rotation around the Y direction), and a servo motor 504 that drives the vertical rotary worm drive mechanism is installed on the upper part of the box-type housing. .

The two-dimensional ultrasonic polishing mechanism, as shown in Figures 3 and 4, includes a right-angled fixed plate 505 fixedly installed on the vertical rotary table, and there are symmetrically distributed station adjustment holes 506 under the horizontal plate of the fixed plate , install two left-right symmetrical ultrasonic vibrating device fixing plates 507 and 508 for adjusting the axial angle of the two ultrasonic vibrating devices through the station adjustment holes, and install the ultrasonic vibrating device I509 and the ultrasonic vibrating device I509 on the two ultrasonic vibrating device fixing plates respectively. Vibration device II 510, ultrasonic vibration device I is composed of transducer 5091 and horn 5092, ultrasonic vibration device II is composed of transducer 5101 and horn 5102, ultrasonic vibration device I and horn of ultrasonic vibration device II The front ends are respectively connected with the horn connection holes 511 on the upper surface of the arc-shaped polishing head base 512. The horn connection holes correspond to the station adjustment holes, and the polishing head (513) is fastened to the polishing head by bolts. In the jaw at the center of the upper part of the base (the polishing head does not rotate when it is working).

As shown in Figure 5 and Figure 6, the station adjustment hole 506 and the horn connection hole 511 corresponding to the station adjustment hole are divided into four groups, wherein the stations 1 and 1' correspond to the axial angle of the ultrasonic vibration device 90°, stations 2 and 2' correspond to the axial angle of the ultrasonic vibration device at 60°, stations 3 and 3' correspond to the axial angle of the ultrasonic vibration device at 45°, stations 4 and 4' correspond to the axial angle of the ultrasonic vibration device at 30° .

As shown in Figure 7, the rotary table includes a casing 11 fixedly installed on the X-direction mobile table 22, and a horizontal rotary table 9 for placing workpieces 8 to be processed is arranged on the top of the casing. A horizontal rotary worm drive mechanism 10 for driving the horizontal rotary table to perform horizontal rotation is installed inside, and a servo motor 23 for driving the horizontal rotary worm drive mechanism is arranged on the side of the casing;

As shown in Figures 1 and 8, the polishing liquid ultrasonic atomization liquid application device includes a five-axis manipulator 7 fixedly installed on one side of the machine base, and the front end of the five-axis manipulator is equipped with a device for spraying polishing liquid to the polishing part of the workpiece. Ultrasonic nozzle 6;

As shown in Figures 1 and 11, the workpiece on-line detection device includes a five-axis manipulator 18 fixedly installed on the other side of the machine base, and a laser interferometer for detecting the accuracy of the polished surface of the workpiece is installed on the front end of the five-axis manipulator. twenty four.

The following is an embodiment of using the above-mentioned five-axis three-dimensional ultrasonic polishing machine tool to process optical curved surface elements.

The optical curved surface element is quartz glass with a size of 300mm×300mm×200mm. The polished surface is a concave curved surface. f3 is 100KHZ.

In order to improve polishing power and polishing processing efficiency, the workpiece is polished using the above-mentioned five-axis three-dimensional ultrasonic polishing machine tool.

The shape parameters of the workpiece surface are converted into the tool path file of the polishing head, and the CNC program of the machine tool is obtained through kinematics inversion; the CNC program of the five-axis manipulator of the polishing liquid ultrasonic atomization liquid application device is obtained through the inversion of the spindle position and posture of the polishing head program.

The amplitude A1 of the ultrasonic vibration device _I is 20 μm, the amplitude A2 of the ultrasonic vibration device _II is 30 μm, the frequency f1 of the ultrasonic vibration device I is 20KHZ, the frequency f2 of the ultrasonic vibration device II is 35KHZ, the initial phase θ of the ultrasonic vibration device I ₁ is 0°, the initial phase θ of the ultrasonic vibration device _II is 90°, and the axial angle α between the ultrasonic vibration device I and the ultrasonic vibration device II is 60° through the station adjustment hole and the horn connection hole.

During polishing, the five-axis linkage of the machine tool is carried out through the program control system, so that the axis direction of the polishing head and the normal direction of the polishing point of the workpiece are always coincident; the five-axis manipulator is controlled by its numerical control program to keep the direction of the polishing liquid spray and the normal line of the polishing point of the workpiece. 45-degree angle (as shown in Figure 9), the ultrasonic nozzle and the polishing head follow the movement.

In this embodiment, the trajectory of the polishing head is in the form of a curved reciprocating circle as shown in Figure 10 to evenly cover the processing area, and its polishing efficiency is more than five times higher than that of a five-axis two-dimensional ultrasonic polishing machine tool.

During the polishing process, the workpiece has been inspected on-line by the workpiece on-line inspection device for 5 times, and the surface of the finally processed workpiece is smooth and has no scratches.

Claims (3)

1. a kind of five axles three-D ultrasonic burnishing machine, including frame, X be to travel mechanism, Y-direction travel mechanism, Z-direction moving machine Structure, ultrasonic vibration burnishing device, rotary table, polishing fluid ultrasonic atomizatio apply liquid device and workpiece on-line measuring device；Wherein Z It is located on the lathe bed (1) of frame to travel mechanism, X is located on the support (17) of frame to travel mechanism and Y-direction travel mechanism；

The frame includes support (17) and the lathe bed (1) being vertically fixed on support；

The Z-direction travel mechanism is including being fixedly mounted on the antetheca of the lathe bed, the anterior Z-direction with Z-direction guide rail (26) is led Rail chair (3), can do the Z-direction mobile station (25) of Z-direction movement along Z-direction guide rail, drive Z-direction mobile station to do the Z-direction movable wire of Z-direction movement The Z-direction servomotor (2) that thick stick (4) and driving Z-direction movement leading screw are rotated；The Y-direction travel mechanism is described including being fixedly mounted on On support, top with Y-direction guide rail (16) Y-direction guide rail seat (15), can along Y-direction guide rail do Y-direction movement Y-direction mobile station (12) Y-direction for, driving Y-direction mobile station to do Y-direction movement moves leading screw (14) and drives Y-direction to move the Y-direction servo electricity that leading screw is rotated Machine (13), there is X direction guiding rails (21) in Y-direction mobile station；The X to travel mechanism include can along the Y-direction movement table top on X to Guide rail (21) is X to mobile X to mobile station (22), drives X to be X to mobile X to mobile leading screw (20) and drive to mobile station Dynamic X is to the X of mobile leading screw rotation to servomotor (19)；

The rotary table includes being fixedly mounted on the X to the casing (11) in mobile station (22), has on the top of casing The horizontal rotary platform (9) of workpiece to be machined (8) is placed, being provided with driving horizontal rotary platform in the inside of casing does horizontal rotary Horizontal rotary turbine and worm transmission mechanism (10), there is the servo for driving horizontal rotary turbine and worm transmission mechanism in the sidepiece of casing Motor (23)；

The polishing fluid ultrasonic atomizatio applies liquid device includes being fixedly mounted on five axis robots (7) of the support side, and this five The front end of axis robot is installed by the ultrasonic nozzle (6) that polishing fluid is sprayed at oriented workpiece polishing position；

The workpiece on-line measuring device includes being fixedly mounted on five axis robots (18) of the support opposite side, the five axles machine The front end of tool hand is provided with the laser interference gauge head (24) that detection workpiece polishes surface figure accuracy；

It is characterized in that：

The ultrasonic vibration burnishing device (5) includes vertical rotating mechanism and two-dimensional ultrasound polishing mechanism；

The vertical rotating mechanism includes the box-type shell (501) being fixedly mounted on the Z-direction mobile station (22), in box shell There is vertical rotating platform (502) front portion of body, is provided with the inside of box-type shell and drives vertical rotating platform to do the vertical of vertical rotating Formula revolving wormgear worm gearing (503), has on the top of box-type shell and drives vertical rotating turbine and worm transmission mechanism Servomotor (504)；The two-dimensional ultrasound polishing mechanism includes that the square being fixedly mounted on the vertical rotating platform is fixed Plate (505), there is symmetrical station adjustment hole (506) below the level board of fixed plate, and two are installed by station adjustment hole Individual symmetrical, for adjusting the axial angle of two ultrasonic vibration installations ultrasonic vibration installation fixed plates (507,508), two Ultrasonic vibration installation I (509) and ultrasonic vibration installation II (510), ultrasonic vibration are respectively mounted in ultrasonic vibration installation fixed plate Device I and ultrasonic vibration installation II are made up of, ultrasonic vibration transducer (5091,5101) and ultrasonic transformer (5092,5102) respectively The front end of the ultrasonic transformer (5092,5102) of device I and ultrasonic vibration installation II respectively be provided with and the station adjustment hole match The arced polishing head pedestal (512) of the luffing lever attachment hole (511) of conjunction connects, and rubbing head (513) is on rubbing head pedestal.

2. five axles three-D ultrasonic burnishing machine according to claim 1, it is characterised in that：The station adjustment hole (506) It is divided into four groups with luffing lever attachment hole (511), 30 °, 45 °, 60 °, 90 ° of the angle in ultrasonic vibration installation axial direction is corresponded to respectively.

3. the application method of five axle three-D ultrasonic burnishing machines described in claim 1, comprises the following steps：

1) form parameter on workpiece to be machined surface is converted into the feed file of rubbing head, lathe is obtained by inverse kinematic Numerical control program, lathe five-axle linkage is made by program control system, make the normal of rubbing head axis direction and workpiece polishing point Direction remains coincidence；

2) numerical control program that polishing fluid ultrasonic atomizatio applies the axis robot of liquid device five is obtained by the anti-solution of main shaft pose of rubbing head, It is realized with rubbing head servo-actuated, and polishing fluid injection direction is kept for 45 ± 5 degree with the angle of workpiece polishing point normal direction；

3) fogging degree needed according to polishing determines that polishing fluid ultrasonic atomizatio applies the ultrasonic frequency f3 that liquid device is used；

4) according to workpiece polishing need to select ultrasonic vibration the frequency f1 and f2 of ultrasonic vibration installation I and ultrasonic vibration installation II, Amplitude of ultrasonic vibration A₁And A₂, ultrasonic vibration initial phase θ₁And θ₂With ultrasonic vibration installation I and the axial direction folder of ultrasonic vibration installation II Angle α, angle α is carried out by the luffing lever attachment hole on the station adjustment hole below fixed plate and corresponding rubbing head pedestal Regulation,

The value of α is：30 °, 45 °, 60 °, the one kind in 90 °

Amplitude A₁、A₂Span be:10μm≤A₁≤ 30 μm,

The span of frequency f1, f2 is：20kH_Z≤f₁≤55kH_Z, and make

θ₁And θ₂The phase difference θ of two phase place=| θ₁-θ₂| span be：[0 °, 20 °] ∪ [70 °, 90 °]；

5) in polishing process, when curve surface of workpiece machining accuracy need to be detected, by Y-direction, workpiece is exited processing district by travel mechanism, Curve surface of workpiece is detected by workpiece on-line measuring device, according to testing result, need to such as proceed polishing, moved by Y-direction Workpiece is return processing district by motivation structure, proceeds polishing.