CN106706130A - THz spectral imager based on stereoscopic phase optical grating and pore diameter segmentation technology - Google Patents
THz spectral imager based on stereoscopic phase optical grating and pore diameter segmentation technology Download PDFInfo
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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Abstract
The invention discloses a THz spectral imager based on a stereoscopic phase optical grating and a pore diameter segmentation technology. The THz spectral imager is composed of a prepositioned lens, a prepositioned view field diaphragm, a prepositioned collimating lens, the stereoscopic phase optical grating, a post-positioned focusing lens, a post-positioned view field diaphragm, a post-positioned collimating lens, a sub-pore diameter imaging lens, a detector, a detector control processing system and a control acquisition and processing computer. The detector is used for obtaining light intensity information of N zero-grade diffraction light, diffracted by N cells of the stereoscopic phase optical grating at the same time, of the target scene through a pore diameter segmentation manner; N groups of corresponding relation data of optical path differences and light intensity are obtained according to the N optical path differences corresponding to the N cells of the stereoscopic phase optical grating; target THz spectrum and image are obtained in real time through Fourier transformation, and the THz spectral imager is applicable to related fields including THz spectral detection, analysis and the like.
Description
The present invention relates to a kind of tera-hertz spectra imager, and in particular to one kind can in real time obtain target THz spectrum with figure
As the optical spectrum imagers of information.The THz optical spectrum imagers are by preset lens, preposition field stop, preposition collimating mirror, three-dimensional phase
Grating, rearmounted convergent mirror, rearmounted field stop, rearmounted collimating mirror, sub-aperture image mirror, detector, detector control process system
System and control acquisition process computer composition.The detector obtains target scene in aperture segmentation mode by three-dimensional phase simultaneously
The intensity signal of N number of zero order diffracted light of the N number of cellular institute diffraction of grating, the N corresponding to N number of cellular of the three-dimensional phase grating of foundation
Individual optical path difference, obtains the corresponding relation data of N groups optical path difference and light intensity, by Fourier transformation, the THz spectrums of target is obtained in real time
And picture, it is adaptable to the association area such as THz spectral detections, analysis.
Background technology
Terahertz (THz) ripple refers to electromagnetic wave (1THz of the frequency in the range of 0.1-10T (wavelength is 3000-30 μm)
=1012Hz).The generation system of current THz ripples has two kinds, the THz wave producers based on photonic propulsion, and using free electron
THz radiation source.THz wave producers based on photonic propulsion means are limited by the light energy use efficiency of poor efficiency, based on free electron
THz radiation source be limited by the continuous diminution of device size and make device very fragile, therefore the THz radiation energy that two ways is obtained
Amount is still no more than 20mW at present.And the relatively strong of steam absorbs in air, the detection of the target Terahertz spectrum for making faces very big tired
It is difficult.
At present, it is adaptable to which the spectral instrument of terahertz wave band mainly has two classes：When infrared Fourier spectrometer and Terahertz
Domain spectrometer (THz-TDS).Infrared Fourier spectrometer has multichannel, high-throughout spy using Fourier Transform Technique light splitting
Point, but Fourier Transform Technique relies on the sequential scanning of index glass, it is impossible in real time into spectrum, it is limited in quick change, complicated ring
Use in border；Secondly, infrared Fourier spectrometer is based on the basic configuration of Michelson's interferometer, wherein essential divides
Beam piece makes incident optical energy be lost 50%, limits use of the instrument in signal detection；In addition infrared Fourier spectrometer
Moving parts and step motion control motor are introduced, while increasing volume and power consumption, the service life of instrument is have impact on.
THz-TDS is based on photoconductive sampling or electro-optic sampling to the detection of terahertz signal, to object into time spectrum, it is necessary to according to
Secondary completion wavelength dimension, the scanning of space dimension is, it is necessary to take a substantial amount of time；Secondly THz-TDS needs to use femto-second laser to make
It is the radiation appliance of THz wave so that bulky, the mobile difficulty of instrument；In addition its purposes of THz-TDS is in laboratory
Measurement of species is not appropriate for terahertz of the wild environment to limited distance target in saturating, the anti-rate characteristic of terahertz wave band in environment
Hereby spectrum detection and imaging applications.
The shortcoming of above two kind prior art is mainly reflected in the following aspects：First, Fourier spectrometer and THz-
TDS, completing the imaging process of object needs to take a long time, and is not suitable under environmental condition complicated and changeable, target Terahertz
The real-time detection of spectrum and imaging demand；2nd, its purposes of THz-TDS be in laboratory environment measurement of species in terahertz wave band
Thoroughly, anti-rate characteristic, is not appropriate for wild environment to the Terahertz spectrum detection of limited distance target and imaging applications；3rd, Fourier
Spectrometer and THz-TDS, its is bulky, not readily portable.
The content of the invention
For the above-mentioned deficiency of prior art, composed the invention provides a kind of Terahertz based on static Fourier transformation and visited
Survey and imaging device, it is adaptable to Terahertz spectrum real-time detection and the imaging of target.
Technical scheme is as follows：
A kind of THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology, including according to optic path according to
The preset lens 1 of secondary arrangement, preposition field stop 2, preposition collimating mirror 3, three-dimensional phase grating 4, rearmounted convergent mirror 5, rearmounted visual field
Diaphragm 6, rearmounted collimating mirror 7, sub-aperture convergent mirror 8, detector 9, the detector 9 are also connected with detector control process in turn
System 10 and control acquisition process computer 11, as shown in Figure of description 1.Above-mentioned preposition collimating mirror 3, three-dimensional phase grating 4,
Rearmounted convergent mirror 5, rearmounted field stop 6, rearmounted collimating mirror 7, the composition of sub-aperture convergent mirror 8 are based on three-dimensional phase grating beam splitting
Aperture segmentation THz spectrum imaging systems.The focal plane of above-mentioned preset lens 1 overlaps with the front focal plane of preposition collimating mirror 3；It is above-mentioned preposition to regard
Field diaphragm 2 is square, and positioned at the focal plane of preset lens 1, its size matches with the area of visual field and detector 9；Above-mentioned rearmounted standard
The focal plane of straight mirror 5 overlaps with the front focal plane of rearmounted collimating mirror 7；Above-mentioned rearmounted field stop 6 is circular, positioned at Jiao of preset lens 5
Face, its perforate size only allows the zero order diffracted light of grating to pass through.Above-mentioned preset lens 1, preposition collimating mirror 3, rearmounted convergent mirror 6,
Rearmounted collimating mirror 7, sub-aperture convergent mirror 8 are designed using the apochromatism of terahertz wave band.
The structure of above-mentioned Terahertz solid phase grating 4 as shown in Figure of description 2, by the upper surface of cuboid metallic plate 12
A series of rectangular recess for carving flat smooths is constituted, and the material of metallic plate is aluminium, iron, aluminium alloy or titanium alloy, and described is recessed
Groove bottom is parallel with the upper surface of cuboid metallic plate 12, and the depth of groove is respectively h1、h2、…、hN-1、hN, h1、h2、h3、…、
hN-2、hN-1、hN, sequentially increasing, N is the number of cellular, and depth identical groove is considered as a cellular.
The maximum groove depth h of above-mentioned three-dimensional phase grating 4max, spectral resolution R and light as required by design objective enter
Firing angle α is together decided on, and is met：
In formula, α represents incidence angle of the THz wave in three-dimensional phase grating surface, and R is the spectral resolution of system,
The number N of grating cellular meets：
In formula, σmaxRepresent the maximum wave number of terahertz wave band used；
Grating cellular introduce optical path difference be：
In formula, h represents the groove depth of grating cellular；
For the three-dimensional phase grating that N number of cellular is constituted, the phase difference corresponding to i-th grating cellular is：
Wherein hiI-th groove depth of grating cellular is represented, N represents the cellular total number of three-dimensional phase grating.
The number n of cellular further groove meets:
In formula：σminRepresent the smallest wavenumber of THz wave used；
The dutycycle of grating：d:A ＞ 1, wherein d are screen periods, namely grating cellular width, a is groove groove width, and b is
The length of grating cellular, namely groove flute length.
The number of the sub-aperture of sub-aperture convergent mirror 8 is consistent with the number N of cellular in three-dimensional phase grating 4；
Above-mentioned sub-aperture convergent mirror 8 includes a piece of silicon chip 13 and the N number of parameter identical rectangle sub-lens i being arranged on silicon chip1...,
iN, lenslet arrays are constituted, as shown in Figure of description 2.
The form parameter of the rectangle sub-lens meets with the form parameter of grating cellular：
E=d × f2/f1；G=b × f2×cos(α)/f1 (6)
Wherein e represents rectangle sub-lens i1..., iNWidth, g represents rectangle sub-lens i1..., iNHeight, d represents three-dimensional
The width of the unit born of the same parents of phase grating 4, i.e., the screen periods of three-dimensional phase grating 4, b represents the length of the unit born of the same parents of three-dimensional phase grating 4, f1
Represent the focal length of rearmounted convergent mirror 5, f2The focal length of rearmounted collimating mirror 7 is represented, α represents THz wave in three-dimensional phase grating surface
Incidence angle.
Above-mentioned detector control process system 10 carries out parallel processing to N number of signal that detector 9 is gathered, and it is extracted respectively
Strength information, this N number of signal intensity constitutes Fourier transform pairs with the optical path difference of the N number of cellular of three-dimensional phase grating；Above-mentioned control
Collecting computer 11 carries out Fourier transformation to the Fourier transform pairs that N groups data are constituted, you can obtain the THz spectrum of target,
The superposition of THz spectrum can be obtained the THz images of target.
Action principle of the invention is as follows：
The THz ripples that target sends are collected by preset lens 1, and the space filtering through preposition field stop 2 is accurate by preposition collimating mirror 3
Directly, parallel incident Terahertz solid phase grating 4.There is diffraction in the parallel THz wave oblique incidence solid phase grating 4 of wide range, spread out
Light is penetrated to be focused at lens focal plane by rearmounted convergent lens 5 ,+1 order diffraction ripple, -1 order diffraction ripple and other higher levels time
Diffracted wave is filtered by the rearmounted aperture diaphragm 6 positioned at lens focal plane, and 0 order diffraction light of three-dimensional phase grating continues freely to pass
Broadcast, be parallel THz wave through the collimation of rearmounted collimating mirror 7.
Due to cellular one, cellular two, cellular three ..., cellular N there are different groove depths, it is to incident THz wave
Different zones produce different phase-modulations, have the wavefront of corresponding with the N number of cellular of grating regional in 0 order diffraction ripple
There are a different phase informations, therefore 0 order diffraction ripple is by the parallel THz wave that is obtained after rearmounted collimating mirror 7, its wavefront tool
There is N number of varying strength region, the optical path difference with N number of cellular of three-dimensional phase grating 4 is corresponded.
The parallel THz wave collimated through rearmounted collimating mirror 7 is assembled by sub-aperture convergent mirror 8, and N number of focusing is produced in focal plane
Point is detected by detector 9, the parallel processing of the detector control process system 10 by being connected with detector 9, is obtained and solid
The one-to-one N number of intensity level of the optical path difference of N number of cellular of phase grating 4.Eventually pass the 11 pairs of acquisitions of control collecting computer
N groups optical path difference and light intensity data carry out Fourier transformation, obtain the THz spectrums of target, modal data superposition is obtained the THz of target
Image.
Core of the invention is that three-dimensional phase grating is combined with aperture segmentation technology, while measuring three-dimensional phase grating
The intensity signal of the zero order diffracted light of each cellular, obtains the corresponding relation data of N groups optical path difference and light intensity, is become by Fourier
Change, the THz spectrums and picture of target are obtained in real time.
Compared with prior art, the THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology have following
Advantage：First, compared with Fourier spectrometer and THz-TDS, the THz spectrum based on three-dimensional phase grating and aperture segmentation technology into
As instrument can realize real-time detection and imaging that target THz is composed；2nd, the THz based on three-dimensional phase grating and aperture segmentation technology
Optical spectrum imagers carry out composing detection and imaging using the zero order diffracted light of grating, have the advantages that capacity usage ratio is high, applicable
In the real-time detection and imaging of weak signal；3rd, the THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology are used
Three-dimensional phase grating has the advantages that simple structure, small volume, without moving parts as light-splitting device, is applicable to outdoor multiple
Miscellaneous changeable environment.
Brief description of the drawings
Fig. 1 is principle schematic diagram. of the invention.
Fig. 2 is three-dimensional phase grating structure schematic diagram
Fig. 3 is sub-aperture image mirror structural representation
Specific embodiment
Specific embodiment of the invention, such as Fig. 1, Fig. 2, shown in Fig. 3 are given below in conjunction with the accompanying drawings.
THz optical spectrum imagers described in the present embodiment, by preset lens 1, preposition field stop 2, preposition collimating mirror 3, cubic phase
Position grating 4, rearmounted convergent mirror 5, rearmounted field stop 6, rearmounted collimating mirror 7, sub-aperture convergent mirror 8, detector 9, detector control
Processing system processed 10 and control acquisition process computer 11 are constituted.
In order to ensure wide spectrum image quality and signal to noise ratio, preset lens 1, preposition collimating mirror 3, rearmounted convergent mirror 6, rearmounted standard
Straight mirror 7, sub-aperture convergent mirror 8 are designed using the apochromatism of terahertz wave band, it is ensured that in the range of full spectral coverage, monochromatic light dispersion
Circular diameter is less than detector list pixel dimension.
As shown in Figure 3,9 lenslets are bonded on a smooth silicon chip structure of sub-aperture convergent mirror 8.It is accurate to ensure
The spectrum and image information of target are obtained, the size of lens should be set in strict accordance with proportionate relationship.
The present embodiment uses following main devices：
1. preset lens 1：Material HDPE, focal length 600mm, bore 160mm.Preposition collimating mirror 3, rearmounted convergent mirror 5, rearmounted standard
Straight mirror 6：Material HDPE, focal length 300mm, bore 80mm.
2. three-dimensional phase grating 4：Cellular number 6, groove depth be followed successively by 0.1635cm, 0.327cm, 0.4905cm,
0.654cm、0.8175cm、0.981cm。
3. sub-aperture convergent mirror 8：The size 20mm*20mm of sub-lens, focal length 200mm.
4th, preposition aperture diaphragm 2：Pore size 15mm*15mm.Rearmounted aperture diaphragm 6：Opening diameter 12mm.
The operation principle of the present embodiment is as described below：
The THz ripples that target sends are collected by preset lens 1, and the space filtering through preposition field stop 2 is accurate by preposition collimating mirror 3
Directly, there is diffraction in parallel incident Terahertz solid phase grating 4, and diffraction light is by preposition convergent lens 5 at lens focal plane
Focus on, the secondary diffracted wave of+1 order diffraction ripple, -1 order diffraction ripple and other higher levels is by the rearmounted aperture light positioned at lens focal plane
Door screen 6 is filtered, and 0 order diffraction light of three-dimensional phase grating continues Free propagation, is parallel Terahertz through rearmounted collimating mirror (7) collimation
Ripple, the parallel THz wave collimated through rearmounted collimating mirror 7 is assembled by sub-aperture convergent mirror 8, produces 6 focus points to be visited in focal plane
Survey device 9 to detect, the parallel processing of the detector control process system 10 by being connected with detector 9 obtains 6 intensity levels, with
The optical path difference of 6 cellulars of three-dimensional phase grating 4 is corresponded.Eventually pass 11 pairs of 6 groups of light of acquisition of control collecting computer
Path difference carries out Fourier transformation with light intensity data, obtains the THz spectrums of target, and modal data superposition is obtained the THz images of target.
Claims (4)
1. a kind of THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology, including be made up of too N number of cellular
The three-dimensional phase grating (4) of hertz, and preset lens (1), the detector (9), the detector being arranged in order according to optic path
(9) detector control process system (10) and control acquisition process computer (11) are also connected with turn, it is characterised in that：
Preset lens (1), preposition field stop (2), preposition standard that described THz optical spectrum imagers are arranged in order according to optic path
Straight mirror (3), three-dimensional phase grating (4), rearmounted convergent mirror (5), rearmounted field stop (6), rearmounted collimating mirror (7), sub-aperture meeting
Poly- mirror (8), detector (9), the detector (9) are connected with detector control process system (10) and control acquisition process in turn
Computer (11)；
The preposition collimating mirror (3), three-dimensional phase grating (4), rearmounted convergent mirror (5), rearmounted field stop (6), rearmounted collimation
Mirror (7), sub-aperture convergent mirror (8) composition aperture segmentation THz light spectrum image-forming optical systems；The focal plane of the preset lens (1) with it is preceding
The front focal plane for putting collimating mirror (3) overlaps；The preposition field stop (2) is square, positioned at the focal plane of preset lens (1), its size
Area with visual field and detector (9) matches；The focal plane of the rearmounted collimating mirror (5) and the front focal plane of rearmounted collimating mirror (7)
Overlap；The rearmounted field stop (6) is circular, and positioned at the focal plane of preset lens (5), its perforate size only allows the zero level of grating
Diffraction light passes through；
The detector (9) obtains target scene in aperture segmentation mode by the N number of cellular institute diffraction of three-dimensional phase grating (4) simultaneously
N number of zero order diffracted light intensity signal, N is positive integer, and the value of N meets：
In formula：Above-mentioned hmaxIt is the maximum groove depth of three-dimensional phase grating (4), α represents THz wave in three-dimensional phase grating surface
Incident angle α is angle of incidence of light, σmaxRepresent the maximum wave number of terahertz wave band used；The detector control process system
(10) the N number of signal to detector (9) collection carries out parallel processing, while extracting its strength information；The control collection is calculated
Machine (11) carries out Fourier transformation to the Fourier transform pairs that N number of intensity and corresponding light path difference data are constituted, you can obtain mesh
Target THz spectrum, the superposition of THz spectrum can be obtained the THz images of target.
2. THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology according to right 1, its feature exists
In：The sub-aperture convergent mirror (8) includes a piece of silicon chip (13) and the series of parameters identical rectangle being arranged on silicon chip
Lens are constituted；The number of the number of rectangle sub-lens and grating cellular in three-dimensional phase grating (4) in the sub-aperture convergent mirror (8)
Mesh N is consistent, i.e., the number of rectangle sub-lens is N in sub-aperture convergent mirror (8)；Rectangle sub-lens (the i1..., iN)
Form parameter meets with the form parameter of grating cellular：
E=d × f2/f1；G=b × f2×cos(α)/f1
Wherein e represents rectangle sub-lens (i1..., iN) width, g represents rectangle sub-lens (i1..., iN) height, d represents cubic phase
The screen periods of position grating (4), b represents the length of three-dimensional phase grating (4) unit born of the same parents, f1The focal length of rearmounted convergent mirror (5) is represented,
f2The focal length of rearmounted collimating mirror (7) is represented, α represents incidence angle of the THz wave in three-dimensional phase grating surface.
3. THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology according to right 1, its feature exists
In：The detector (9) applies to the multi-element surface array detector of terahertz wave band, and the pixel number of detector must be sub-aperture
The integral multiple of rectangle sub-lens number N in footpath convergent mirror (8).
4. THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology according to right 1, its feature exists
In：The preset lens (1), preposition collimating mirror (3), rearmounted convergent mirror (6), rearmounted collimating mirror (7), sub-aperture convergent mirror (8) are adopted
With the optical lens designed through apochromatism of terahertz wave band.
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| CN201710037295.3A CN106706130A (en) | 2017-01-19 | 2017-01-19 | THz spectral imager based on stereoscopic phase optical grating and pore diameter segmentation technology |
| CN201720841823.6U CN207007335U (en) | 2017-01-19 | 2017-07-12 | THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology |
| CN201710565864.1A CN107192454B (en) | 2017-01-19 | 2017-07-12 | A kind of THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology |
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| CN108489930A (en) * | 2018-01-30 | 2018-09-04 | 中国科学院上海技术物理研究所 | Passive type THz spectrometers based on unit born of the same parents' solid phase grating |
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- 2017-01-19 CN CN201710037295.3A patent/CN106706130A/en active Pending
- 2017-07-12 CN CN201720841823.6U patent/CN207007335U/en not_active Expired - Fee Related
- 2017-07-12 CN CN201710565864.1A patent/CN107192454B/en active Active
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Also Published As
| Publication number | Publication date |
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| CN207007335U (en) | 2018-02-13 |
| CN107192454A (en) | 2017-09-22 |
| CN107192454B (en) | 2018-10-23 |
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