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CN106625020A - Incremental magnetic induction bus type encoder for high-speed high-precision machine tool main shaft and electric main shaft - Google Patents

Incremental magnetic induction bus type encoder for high-speed high-precision machine tool main shaft and electric main shaft Download PDF

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Publication number
CN106625020A
CN106625020A CN201710111233.2A CN201710111233A CN106625020A CN 106625020 A CN106625020 A CN 106625020A CN 201710111233 A CN201710111233 A CN 201710111233A CN 106625020 A CN106625020 A CN 106625020A
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module
magnetic induction
signal
cosine
sine
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CN201710111233.2A
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CN106625020B (en
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张道勇
许娟
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/007Arrangements for observing, indicating or measuring on machine tools for managing machine functions not concerning the tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/243Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of ac

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The invention relates to an incremental magnetic induction bus type encoder for a high-speed high-precision machine tool main shaft and electric main shaft. The incremental magnetic induction bus type encoder comprises a measurement gear and a magnetic induction read head; a magnetic induction component, a signal conditioning circuit, a reference zero point comparator circuit and a FPGA (Field Programmable Gate Array) interpolation sub-division circuit are arranged in the magnetic induction read head; the magnetic induction component is installed to be tangent to the circumference of the measurement gear; the magnetic induction component performs non-contact scanning on the measurement gear to produce a sine and cosine orthogonal differential signal and a reference zero-point differential signal, after the sine and cosine orthogonal differential signal and the reference zero-point differential signal are conditioned through the signal conditioning circuit, the DC biased error, the amplitude error and the orthogonal-phase error of the sine and cosine orthogonal differential signal and the reference zero-point differential signal are corrected and compensated in real time by the FPGA interpolation subdivision circuit, thereby respectively generating a relative position value of a rotating angle of a rotating shaft with respect to the power-on moment and an absolute position value of the rotating angle of the rotating shaft with respect to the reference zero-point signal in combination with the reference zero-point comparator circuit; the mechanical transmission structure is simple, the machine tool main shaft positioning and the repeated positioning precision are improved, and the overall measurement precision and processing efficiency of a numerically-controlled machine tool are improved.

Description

High speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder
Technical field
The present invention relates to a kind of encoder (Encoder), more particularly, to a kind of high speed and super precision machine tool chief axis, electro spindle magnetic Sensing incremental bus type encoder, can be widely applied to the fields such as Digit Control Machine Tool, robot, elevator and industrial automation.
Background technology
Encoder is a kind of sensor for detection angles, position, speed and acceleration, is the angle position machinery rotation The equipment that shifting or straight-line displacement are worked out, are converted to the electrical signal form that can be used for communicating, transmit and store, is machinery and electricity The accurate measurement device that son is combined closely, is widely used in the various fields such as motor, automobile, wind-powered electricity generation, robot.From measurement function On, coding code device can be divided into increment size encoder (being also incremental encoder) and absolute value encoder.From in measuring principle, compile Code device includes photoelectric encoder and magnetic induction encoder.
Increment size encoder is used to provide information of the current location relative to prior location, not with the current definitely position of memory The function of putting.When electromechanical equipment power-off, if mechanical location changes because of external force movement or rotation, position is caused to produce inclined Move, and when electromechanical equipment restarts, increment size encoder will be unable to judge recorded before the signal of current location and power-off Position signalling it is whether identical, thus must adjust encoder carries out the operation of back to zero.Each position of absolute value encoder The digital code of one determination of correspondence, therefore its indicating value is only relevant with the starting of measurement and final position, and with the centre of measurement Process is unrelated.When sending a telegram in reply again after electromechanical equipment power-off, absolute value encoder can read immediately the current spindle anglec of rotation or Absolute position.
In the industrial production, wide variety of encoder mostly is photo-electric, and its operation principle is:LED light source and condenser lenss The light source of stable raster diffraction stripe is provided;The grating structure of scanning mask and measuring basiss is same or like, when both Slit has light to pass through when aliging, and light cannot pass through when both grooves align, and light cell is sensed during both relative motioies Just there is strong and weak alternate in light intensity, this alternate be in triangular wave patterns, but due to grating diffration effect it is this Alternate is actually in sine wave.Sine and cosine encoded signal refers to the sinusoidal signal loading position that two-way phase contrast is 90 degree The code device signal of confidence breath.Photoelectric encoder both can detect angle displacement, can detect straight in the case where mechanical switching device is helped again Line position, has the advantages that low inertia, low noise, high accuracy, high-resolution, and it is poor to environmental suitability to have the disadvantage, for dampness, The resistivity of dust, greasy dirt and temperature change is weaker, needs to do encapsulation process in practical application;Additionally, photoelectric encoder grating Disk mostly is glass material, when rotating at a high speed around axle, easily because of the impact of the external environment conditions such as shaft vibration, impact so that grating disc Fragmentation.
When photoelectric encoder is used on machine tool chief axis, its first position feedback photoelectric encoder feeds back with the second position Photoelectric encoder directly can not connect with machine tool chief axis, generally with the mechanical transmission mechanisms such as synchronizing wheel, belt and machine tool chief axis It is indirectly connected with, its transmission process is:The spindle servo electric machine of built-in first position encoder drives belt movement, belt drive machine Bed motion of main shaft, machine tool chief axis drive synchronizing wheel rotation, and synchronizing wheel drives the rotation of second position encoder, thus whole machinery is passed Dynamic structure is more complicated, causes servomotor maximum speed relatively low.Supporting CNC digital control systems, are capable of achieving not high to required precision The function such as screw thread process, rigid tapping, orientation trouble and tool magazine tool changing.If long-play, due to bearing load it is larger, skin Band, the elastic deformation of Timing Belt, expand with heat and contract with cold and wear and tear so that Digit Control Machine Tool overall processing precision can become poorer and poorer.
When machine tool chief axis are higher to positioning accuracy request, first position feedback needs to use 17 or higher resolution Photoelectric encoder, second position feedback will use the high-precision encoders such as magnetic resistance, magnetic grid, while second position feedback axial coding Device and machine tool chief axis are direct-connected, to reduce driving error.It is integrated with machine tool chief axis that electro spindle realizes spindle motor, by height Precision encoding device is direct-connected with machine tool chief axis, is reducing the error brought of actuating device simultaneously, and processing, positioning accurate greatly improved Degree, and be a kind of desired transmission mode for meeting high speed and high precision processing requirement with a series of excellent drive characteristics.
To the Motor drive using digit position and controlling technology of velocity, it is electric that high accuracy sine and cosine encoder can provide 1Vpp The sinusoidal increment signal of ordinary mail number, signal quality is high to be become so as to carry out high frequency multiplication interpolation subdivision in follow-up signal process circuit May.For example, if 4096 times thin are carried out in follow-up signal process circuit to the rotary encoder of 512 signal periods of every circle Point, 2,000,000 measurement step pitches or line number, the resolution equivalent to 21 just can be produced in a circle.Even if rotating speed reaches 24000 Revolutions per second, frequency when signal reaches control system input circuit also only has about 200KHz.The sinusoidal increment signal of 1Vpp is due to defeated The spectrum component for going out is relatively simple, can transmit larger distance compared with square wave and it is unattenuated or distortion, it is allowed to cable Length is up to 150 meters.
Except photoelectric encoder, magnetic induction encoder is also widely used in commercial production.Magnetic induction encoder is based on magnetic Sensor, and Magnetic Sensor is widely used in modern industry and electronic product, is measured with induced field intensity and its distribution The physical parameters such as electric current, position, direction.In the prior art, have many different types of sensors for measure magnetic field and its His parameter, for example with Hall (Hall) element, anisotropic magnetoresistance (Anisotropic MagnetoResistance, AMR) element, giant magnetoresistance (Gaint MagnetoResistance, GMR) element, tunnel magneto resistance TMR (Tunnel MagnetoResistance) element is the Magnetic Sensor for measuring sensing element.Compared to other magnetic sensor elements, TMR elements Possesses the advantages of big, the excellent temperature stability of Micro Energy Lose, high resolution, dynamic range and high sensitivity.
In the servosystem that high speed, high accuracy, high dynamic performance are required, generally passed using the magnetic of output cosine and sine signal Sensor detecting element, for position and velocity feedback.Its output signal includes that periodic sine and cosine (SINE, COSINE) is orthogonal Differential signal, often rotates a circle and also exports reference zero (INDEX) differential signal all the way, when electromechanical equipment starts, though can Jing Later continuing signal processing circuit carries out high frequency multiplication interpolation subdivision, but can not immediately read the absolute position of the current spindle anglec of rotation Value, until rotating shaft is rotated past after reference zero signal, can just obtain the absolute place value of the current spindle anglec of rotation.If using The mode transmission signal of traditional pulse string, on the one hand with the raising of position-measurement device resolution and precision, its output line number It is increasing, it is higher to the requirement of subsequent control device interface in the case of motor runs up, easily there is HFS transmission Miscount, so as to affect numerical control device feedback control;On the other hand, train of pulse is exported apart from limited, easily by industrial environment Electromagnetic interference, be not suitable for the high-speed transfer of industry spot.In order to improve position feedback accuracy and reliably transmit position at a high speed Data are put, in digital control system, digital serial bus formula communicator is adopted between position-measurement device and control device, by controlling End unit processed and measurement end unit are connected and composed by communication cable, are compared with Transistor-Transistor Logic level with sine and cosine burst mode, serial Bus type transmission means improves capacity of resisting disturbance, with higher reliability and real-time, while transmission increment position may be selected Put value or absolute position.
At present, the installation positioning mode of magnetic induction encoder is very coarse, and the positioning reference plane of read head is plane.In peace During dress, using positioning tool it is difficult to ensure that magnetic induction read head center, measure gear, machine tool chief axis install concentricity, meanwhile, The positioning reference plane of read head and measure circumference of gear tangent plane be parallel to each other, read head and the guarantee for measuring the distance between gear Also it is highly difficult, so as to cause the accuracy and concordance of read head actual installation very poor, and then greatly reduce magnetic induction coding The control accuracy of device.
Additionally, magnetic induction sine and cosine encoder is in engineer applied, due to by fluted disc processing technique, power-supply fluctuation, ring The impact of border temperature change, the factor such as non-linear of read head magnetic induction chip, the output of position detecting element magnetic induction chip Cosine and sine signal is often accompanied by direct current biasing error, amplitude error and quadrature phase error, harmonic component error, noise error etc., These errors directly influence the precision and reliability of servo-control system.The Angle Position letter for how sine and cosine encoder being exported Number error is effectively corrected and compensated, and high-resolution position is extracted from cosine and sine signal using suitable interpolation method Confidence ceases, and has important research and using value to meet the high speed of servosystem, high-precision control requirement.
In Chinese invention patent application disclosed in 9 days March in 2016, number of patent application is 201511029653.3, open Number it is CN105387879A, discloses the absolute place value magnetic coder of Large central aperture axial charging structure, is that a kind of magnet ring type is compiled Code device, the magnet ring type coding disk employed in it is to pass through note by ferromagnetic material powder and as the ductile material of binding agent The circulus of the technique machine-shapings such as modeling, die casting or casting, is limited by the uniformity of material, and magnetizes position also difficult precisely control System so that magnetic moment size on coding disk, strong and weak and uniformity is more difficult is further enhanced, and during engineer applied, Because coding disk upper magnetic pole exposes outside, easily adsorb flying dust and tiny iron filings and carry out error to detection band.As motor is processed The rising of temperature, the coding disk temperature characterisitic of conduction of heat will be the factor for having to consider, and coding disk can be magnetic decay, cause Accuracy of waveform deteriorates, and closely affects machining accuracy.
In the Chinese utility model patent of the bulletin of on April 29th, 2015, number of patent application is 201420861460.9, bulletin Number be CN204301754U, disclose gear rotary encoder, its output signal is divided into A roads, B roads and Z roads, with analogue signal or The form output of square wave, does not have bus type data output capacities;Its sensing read head and gear between gap be 0.1 to 0.15mm, gap is too little, and mechanical erection requires excessively harshness, causes installation and debugging to expend a large amount of man-hours;Have at program inside it Reason chip, needs to debug signal parameter by computer software, and program write-in program memorizer is preserved, non intelligent behaviour Control, manually adjusts very loaded down with trivial details, wastes time and energy, and homogeneity of product is not high.
The content of the invention
The relatively low technical problem of encoder control accuracy and reliability in order to solve prior art, the present invention provides a kind of Suitable for high speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder, the encoder applies gear sensing magnetic Line of force operation principle, to measuring gear non-contact scanning is carried out, and produces high reliability sine and cosine orthogonal differential signal and reference Zero point differential signal, using FPGA field programmable logic devices, realizes that the high accuracy interpolation to cosine and sine signal is segmented, and ties Reference zero comparator circuit is closed, so as to generate the height of the rotating shaft anglec of rotation at electric moment relative on respectively in decoder internal The high line number absolute position values of line number relative position value and the rotating shaft anglec of rotation relative to reference zero signal, it is complicated reducing While mechanical transmission mechanism, positioning, the repetitive positioning accuracy of machine tool chief axis is greatly improved, so as to improve Digit Control Machine Tool Overall accuracy in measurement and working (machining) efficiency.
High speed and super precision machine tool chief axis of the present invention, electro spindle incremental magnetic induction type bus type encoder, including being sleeved on lathe On main shaft, electro spindle and with machine tool chief axis, the magnetic strength for measuring gear and using cooperatively with measurement gear of electro spindle synchronous rotary Answer read head;The measurement gear is provided with sine and cosine orthogonal differential signal output magnetic track and reference zero differential signal output magnetic Road;Magnetic induction components and parts, signal conditioning circuit, reference zero comparator circuit and FPGA interpolations are provided with magnetic induction read head thin Parallel circuit, magnetic induction components and parts and the just tangent installation of measurement circumference of gear;The magnetic induction components and parts carry out non-to measurement gear Sine and cosine orthogonal differential signal and reference zero differential signal produced by contact type scanning, after signal conditioning circuit, by FPGA interpolations sub-circuit is corrected in real time and compensated to its direct current biasing error, amplitude error and quadrature phase error, And with reference to reference zero comparator circuit, so as to generate the relative position value of the rotating shaft anglec of rotation relative to the upper electric moment respectively With the absolute position values of the rotating shaft anglec of rotation relative to reference zero signal.
Preferably, the FPGA interpolations sub-circuit include direct current biasing error compensation module, amplitude error compensating module, Cosine and sine signal is most worth the life of module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and the rotating shaft anglec of rotation Into module, rotating shaft anglec of rotation generation module is connected with reference zero comparator circuit, Coordinate Rotation Digital computing module, direct current Biased error compensating module, amplitude error compensating module, frequency multiplication module and Coordinate Rotation Digital computing module are sequentially connected, Cosine and sine signal is most worth module and is connected with direct current biasing error compensation module, amplitude error compensating module, memory module respectively, just Cosine signal is most worth module for asking for the sampling maximum and minima of cosine and sine signal, and memory module is inclined for storing direct current Put the operation result that error compensation module, amplitude error compensating module, cosine and sine signal are most worth module.
Preferably, the frequency multiplication module includes cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment Circuit module, wherein cosine and sine signal multiplier module are provided with two, the input and amplitude of a cosine and sine signal multiplier module Error compensation module connects, and outfan is connected with adjustment circuit module;The input of another cosine and sine signal multiplier module leads to Cross cosine and sine signal phase shift block to be connected with amplitude error compensating module, outfan is connected with adjustment circuit module, adjustment circuit Module is connected with Coordinate Rotation Digital computing module.
Preferably, the direct current biasing error compensation module and amplitude error compensating module derive respectively cosine and sine signal Direct current biasing error and amplitude error;Then using frequency multiplication module by phase shift, frequency multiplication by quadrature phase error It is transformed into direct current biasing error and amplitude error, adjusted circuit module is gone after removing DC bias error and adjustment amplitude, uses two The two-way cosine and sine signal of frequency multiplication carries out again interpolation subdivision as primary signal in Coordinate Rotation Digital computing module;The seat Mark rotary digital computing module calculates arc tangent, asks for phase value, draws rotating shaft anglec of rotation present position values, i.e., relative to upper The relative position value of the rotating shaft anglec of rotation at electric moment;The signal conditioning circuit to reference zero differential signal amplify shaping, Single-ended signal is generated after filtering, into reference zero comparator circuit, the digital signal of low and high level is converted into, is recently entered and is turned Axle anglec of rotation generation module, generates the absolute position values of the rotating shaft anglec of rotation relative to reference zero signal.
The memory module is the FLASH ROM in FPGA pieces, and FPGA interpolation sub-circuits call FLASH ROM institutes The direct current biasing error compensation module of storage, amplitude error compensating module operation result, to realize FPGA Automatic Program school again The accurate and Automatic adjusument to error.
Preferably, the seating side of the magnetic induction read head is in same plane with gear side is measured;Magnetic induction is read The housing bottom for taking head is provided with the symmetrical projection being easily installed, and symmetrical rising height one is shown and realizes magnetic induction components and parts and measurement The just tangent installation of circumference of gear, that is, realize magnetic induction components and parts center, measure the concentricity that gear, machine tool chief axis are installed.
Relative to prior art, the present invention has advantages below and positive technique effect:
1st, inventive encoder has hypersensitivity, precision and response speed using a kind of, and matches somebody with somebody with gear is measured The magnetic resistance sensor with higher advantageous characteristic is closed, using gear induced magnetism line operation principle, measurement gear is carried out non- Contact type scanning, produces high reliability cosine and sine signal and reference zero signal, right using FPGA field programmable logic devices Cosine and sine signal direct current biasing error, amplitude error and the quadrature phase error that ADC modulus switching devices are sampled is carried out in real time Amendment and compensation, and preserve and call using error parameter is write into FPGA field programmable logic device in-chip FLASH ROM Mode, carry out in FPGA programs electricity and recalibrate automatically and the Automatic adjusument to error, realize the height to cosine and sine signal Accuracy interpolation is segmented, and with reference to reference zero comparator circuit, so as to generate the electricity relative on respectively inside encoder system The high line number relative position value of the rotating shaft anglec of rotation at moment and the high line of the rotating shaft anglec of rotation relative to reference zero signal Number absolute position values, realize the various errors to cosine and sine signal calibrate automatically, Automatic adjusument function, improve encoder Precision and reliability, and without the need for manual debugging full automation operation, greatly improve production efficiency.Inventive encoder In the operating modes such as rapid drilling, rapid changing knife and seriality tapping, processing, positioning, the control essence of stability can be remained Degree;Simple structure, small volume, lightweight, easy to install and impact resistance and environmental suitability are strong, reliability height, anti-vibration, height Frequency response, high accuracy, while complicated machinery drive mechanism is reduced, greatly improved positioning, the resetting essence of machine tool chief axis Degree, so as to improve the overall accuracy in measurement and working (machining) efficiency of Digit Control Machine Tool.
2nd, using serial bus type transmission means, capacity of resisting disturbance is improve, with higher reliability and real-time, inspection Survey high precision and high-speed response can be carried out.Incremental magnetic induction type bus type code device signal is connect by RS485 or RS422 buses The serial communication protocols such as mouth output, compatible BISS, SSI, and can survey under conditions of 20000 revs/min of turn up and the above Determine absolute position.Magnetic induction read head has selected high-precision sensing chip, using gear induced magnetism line operation principle, can be with Identification measures the angle position of gear immediately below chip, realizes high accuracy, high reliability detection.
3rd, heavy caliber hollow axle is installed, without the need for complicated mechanical transmission structure, it is not necessary to carry any bearing, it is not required that Any machenical coupling, measures direct geared and is sleeved on machine tool chief axis, electro spindle and synchronously revolves with machine tool chief axis, electro spindle Turn.High-precision encoder is direct-connected with machine tool chief axis, electro spindle, reducing the error brought of actuating device simultaneously, greatly improve Processing, positioning precision, solve photoelectric encoder at a high speed rotation to the problems such as axial float and sensitive circular runout, improve The adaptability of product, and with a series of excellent drive characteristics, it is particularly well-suited to machine tool chief axis, electro spindle high speed and high precision processing Occasion.
4th, do coding disk with measurement gear and there is bigger advantage compared to magnet ring type coding disk, its plasticity is good, is easy to Processing, uniformity are good, and dimensional accuracy is more preferably controlled, and meet different application scenarios, and more most heavy is that Jing magnetic resistance sensors are produced Raw cosine and sine signal accuracy of waveform is high, and concordance is good.
5th, magnetic induction encoder frame for movement simplifies firm, measure between gear and magnetic induction read head using noncontact, Without abrasion design, the characteristic with anti-vibration, anticorrosive, antipollution and wide operating temperature, fast response time, rotation at a high speed is adapted to Transhipment is dynamic, can be applicable to the immalleable field of photoelectric encoder, and high precision, life-span length, integral drive machine error is little, and does not have There is mechanism's back clearance problem.
6th, novel header structure, the firm, strong shock resistance of design, degree of protection height are read in magnetic induction, up to IP68, environment Adaptability is good, and stable and reliable working performance, accurate positioning, installation are easily and using easy to operate.
Description of the drawings
Fig. 1 is high speed and super precision machine tool chief axis of the present invention, electro spindle incremental magnetic induction type bus type encoder overall structure is shown It is intended to;
Fig. 2 is the schematic block circuit diagram of magnetic induction read head of the present invention;
Fig. 3 is the theory diagram of FPGA interpolations sub-circuit of the present invention;
Fig. 4 A are a kind of structural representation that the present invention measures gear;
Fig. 4 B are another kind of structural representation that the present invention measures gear;
Fig. 5 is BISSC serial communication protocols timing waveform of the present invention.
Specific embodiment
Below in conjunction with embodiment and Figure of description, the present invention is described in further detail, but the enforcement of the present invention Mode not limited to this.
Embodiment
Referring to Fig. 1, high speed and super precision machine tool chief axis of the present invention, electro spindle incremental magnetic induction type bus type encoder include suit On machine tool chief axis, electro spindle and with machine tool chief axis, electro spindle synchronous rotary ferromagnetism measure gear 1, and with measure tooth The magnetic induction read head 2 that wheel 1 is used cooperatively.The gear 1 that measures is provided with one for the centre bore in the live spindle 11;The magnetic induction read head 2 is arranged on the outside top for measuring gear 1, seating side 26 and the measurement of magnetic induction read head The side 12 of gear be in same plane, and adjust magnetic induction read head 2 and measure gear 1 between gap be 0.1 to 0.3mm。
Such as Fig. 2, the circuit part of magnetic induction read head is encapsulated in metal shell 21, including first circuit board 22, magnet steel 23rd, electrical connector 24, second circuit board 25, cooperation magnet steel is provided with first circuit board 22 to be carried out to change of magnetic field strength situation The magnetic induction components and parts of real-time detection;The signal condition electricity electrically connected with magnetic induction components and parts is provided with second circuit board 25 Road, and ADC analog to digital conversion circuits, reference zero comparator circuit, FPGA (field programmable logic device) interpolation subdivision electricity Road and input/output interface circuit, wherein signal conditioning circuit respectively with ADC analog to digital conversion circuits, reference zero comparator circuit Connection, FPGA (field programmable logic device) interpolations sub-circuit respectively with ADC analog to digital conversion circuits, reference zero comparator Circuit, input/output interface circuit connection, and input/output interface terminal is drawn from input/output interface circuit.Magnetic induction unit Device produces sine and cosine (A, B) orthogonal differential signal and reference zero (Z) differential signal, sine and cosine (A, B) orthogonal differential signal Jing after signal conditioning circuit amplification, Filtering Processing, into ADC analog to digital conversion circuits the single-ended sine and cosine letter of digital quantity is converted to Number, finally processed by FPGA interpolation sub-circuits;And reference zero (Z) differential signal Jing signal conditioning circuits amplify and whole After managing into single-ended signal, into reference zero comparator circuit, the digital signal of low and high level is converted into, sends into FPGA interpolations thin Parallel circuit is processed.The metal shell 21 of magnetic induction read head 2 adopts copper alloy or aluminum alloy material, including the He of cylinder body 27 Upper lid 28 of the spiral-lock directly over cylinder body 27, is attached between cylinder body 27 and upper lid 28 by screw or solid gum, and is carried out Electron pouring sealant is sealed, and the circuit part of magnetic induction read head is placed in the sealing intracavity that cylinder body is constituted with upper lid, and its outside is equipped with Metal water joint is electrically connected with input/output interface circuit, realizes the output of incremental bus type current position signal.
The magnetic induction components and parts are SMRE (Semiconductor MagnetoResistive Element) quasiconductor Magnetoresistive element or TMR (Tunnel MagnetoResistance) tunnel magneto resistance sensor.Magnetic resistance sensor chip Can be superior, with high magnetic field gradient sensitivity, small changes of magnetic field can be detected, output signal has good temperature Stability, it adopts push-pull type Wheatstone bridge design, and to Grad of the externally-applied magnetic field along sensor sensing direction difference is provided Voltage output, and the quadrature voltage output signal that two-way has precise phase difference is produced, to detect the position for measuring pinion rotation Put and direction.Coordinate magnetic induction encoder location and installation technique and welding circuit board production technology, such as magnetic induction chip pin Design of pad etc., it is ensured that cosine and sine signal quadrature phase error is in the range of rational restriction.
In work, machine tool chief axis, electro spindle drive and measure gear rotation, the magnetic strength on magnetic induction read head first circuit board Answer components and parts to coordinate magnet steel, using gear induced magnetism line operation principle, to measuring gear non-contact scanning is carried out, produce high Reliability sine and cosine orthogonal differential signal and reference zero differential signal, through signal conditioning circuit, put to differential signal Greatly, shaping, and filter high frequency spurs, using FPGA field programmable logic devices ADC analog to digital conversion circuits are sampled it is just remaining String signal direct current biasing error, amplitude error and quadrature phase error are corrected in real time and compensated, and error parameter is write Enter FPGA field programmable logic device in-chip FLASHs ROM preservations and upper electricity is called, realize the high accuracy to cosine and sine signal Interpolation is segmented, and with reference to reference zero comparator circuit, so as to generate the electric moment relative on respectively inside encoder system The high line number relative position value of the rotating shaft anglec of rotation and exhausted relative to the high line number of the rotating shaft anglec of rotation of reference zero signal To positional value.
The present invention uses FPGA field programmable logic devices, straight to the cosine and sine signal of ADC analog to digital conversion circuits sampling Stream biased error, amplitude error and quadrature phase error are corrected in real time and compensated, and are realized to the high-precision of cosine and sine signal Degree interpolation subdivision, theory diagram is as shown in figure 3, including direct current biasing error compensation module, amplitude error compensating module, sine and cosine Signal is most worth module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and the rotating shaft anglec of rotation and generates mould Block, rotating shaft anglec of rotation generation module is connected with reference zero comparator circuit, Coordinate Rotation Digital computing module, direct current biasing Error compensation module, amplitude error compensating module, frequency multiplication module and Coordinate Rotation Digital computing module are sequentially connected, just remaining String signal is most worth module and is connected with direct current biasing error compensation module, amplitude error compensating module, memory module respectively, stores mould Block is used to store the operation result that direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal are most worth module. Frequency multiplication module includes cosine and sine signal multiplier module, cosine and sine signal phase shift block, wherein adjustment circuit module, sine and cosine Signal multiplication module is provided with two, and the input of a cosine and sine signal multiplier module is connected with amplitude error compensating module, defeated Go out end to be connected with adjustment circuit module;The input of another cosine and sine signal multiplier module passes through cosine and sine signal phase shift block It is connected with amplitude error compensating module, outfan is connected with adjustment circuit module, adjustment circuit module and Coordinate Rotation Digital meter Calculate module connection.
The sine and cosine orthogonal differential signal of magnetic induction components and parts output, through signal conditioning circuit, to orthogonal differential signal Be amplified, Shape correction, and filter high frequency spurs and even-order harmonic.Using ADC analog to digital conversion circuits to sine wave signal and Cosine wave signal carries out high speed real-time synchronization collection, and carries out digital filtering by FPGA, and filtering method is:Eight numbers of continuous acquisition According to, two maximum sampled values, two minimum sampled values are removed, the meansigma methodss of lower four sampled values of remainder are as current form Sampled value.Using this kind of digital filtering method, shake, saltus step and the interference of sampled data are eliminated well.
Due to being affected by measuring the factors such as Gearmaking Technology, power-supply fluctuation, variation of ambient temperature, monocycle sine and cosine The sampling maximum of signal and minima can all have data dithering all the time, measure the sine and cosine letter that gear revolves sampling of turning around Number maximum and minima also can all have data dithering all the time, for the smoothed data subdivision error that brings of shake, adopt Take following method to be processed:Machine shaft is rotated past after reference zero signal, is started cosine and sine signal and is most worth module, motor For each revolution when reference zero signal, count one maximum of sinusoidal signal, a minima, cosine signal one for rotating shaft Individual maximum, a minima, in eight cycles of continuous counter, sample and obtain eight sinusoidal signal maximums, minima, more than eight String signal maximum, minima.Two maximum sampled values, two minimum sampled values are removed, lower four sampled values of remainder Sampling maximum and minima of the meansigma methodss as cosine and sine signal.
Equation below is run in direct current biasing error compensation module and amplitude error compensating module, direct current biasing is derived Error and amplitude error;
SIN (θ+)=VCC/2+offset_A+Ksin (θ+α);〈1〉
SIN (θ -)=VCC/2+offset_B-Lsin (θ+α);〈2〉
SIN (θ)=SIN (θ+)-SIN (θ -)=offset_A-offset_B+ (K+L) sin (θ+α);〈3〉
COS (θ+)=VCC/2+offset_C+Mcos (θ+β);〈4〉
COS (θ -)=VCC/2+offset_D-Ncos (θ+β);〈5〉
COS (θ)=COS (θ+)-COS (θ -)=offset_C-offset_D+ (M+N) cos (θ+β);〈6〉
In above-mentioned formula, SIN (θ+), SIN (θ -), COS (θ+), COS (θ -) are magnetic induction components and parts output sine and cosine letter Number differential signal, SIN (θ), COS (θ) are the cosine and sine signal obtained after signal conditioning circuit.offset_A、 Offset_C is the DC deviation amount of sine and cosine principal-employment sub-signal, and offset_B, offset_D are sine and cosine negative differential signal DC deviation amount, K, M are the amplitude deviation factor of sine and cosine principal-employment sub-signal, and L, N are inclined for the amplitude of sine and cosine negative differential signal Difference coefficient, α, β are cosine and sine signal phase deviation.From the maximum of cosine and sine signal, minima:
SIN (90 °)=offset_A-offset_B+ (K+L) sin (90 °);〈7〉
SIN (270 °)=offset_A-offset_B+ (K+L) sin (270 °);〈8〉
SIN (90 °)+SIN (270 °)=2 (offset_A-offset_B);〈9〉
SIN (90 °)-SIN (270 °)=2 (K+L);〈10〉
Offset_A-offset_B=(SIN (90 °)+SIN (270 °))/2;〈11〉
K+L=(SIN (90 °)-SIN (270 °))/2;〈12〉
Obtain the sampling maximum and minima of sinusoidal signal, you can draw the direct current biasing error and amplitude of sinusoidal signal Error, in the same manner, can also draw the direct current biasing error and amplitude error of cosine signal.
Direct current biasing error is deducted by the current optional position moment waveform sample values processed through digital filtering, you can To the cosine and sine signal comprising amplitude error and quadrature phase error:
SIN (θ)-(offset_A-offset_B)=(K+L) sin (θ+α)
COS (θ)-(offset_C-offset_D)=(M+N) cos (θ+β)
Amplitude deviation factor is multiplied by both sides simultaneously, obtains formula:
(M+N) (SIN (θ)-(offset_A-offset_B))=(M+N) (K+L) sin (θ+α)
(K+L) (COS (θ)-(offset_C-offset_D))=(K+L) (M+N) cos (θ+β)
The two-way cosine and sine signal of the direct current biasing error that is eliminated and amplitude error, the tangent letter of negating if two formulas are divided by Number, you can obtain the only cosine and sine signal angular positional value comprising quadrature phase error.
Sampling maximum, minima to cosine and sine signal carries out direct current biasing error amount and the amplitude that above-mentioned computing is obtained Error amount write FPGA in-chip FLASH ROM (i.e. memory module) is preserved, and is called in automatically after electricity on next time, and then to magnetic strength Answering the error of the cosine and sine signal of components and parts generation carries out amendment in real time and compensation.If error deviation threshold value is more than a certain setting Value, such as affect situations such as magnetic induction read head is reinstalled, then FPGA Automatic Program is recalibrated, so as to realize to error Automatic adjusument.
Then the cosine and sine signal for eliminating direct current biasing error and amplitude error is carried out using frequency multiplication technology Amendment, i.e., be transformed into direct current biasing error and amplitude error, the adjustment of Jing rear classes by phase shift, frequency multiplication by quadrature phase error Circuit module is gone after removing DC bias error and adjustment amplitude, with the high-quality cosine and sine signal of the two-way of two frequencys multiplication as original Signal, carries out again interpolation subdivision in Coordinate Rotation Digital computing module, can improve subdivision accuracy, can reduce to sine and cosine again The orthogonality requirement of signal.Coordinate Rotation Digital computing module calculates (CORDIC) algorithm based on Coordinate Rotation Digital, calculates anti- Tangent, asks for phase value, draws rotating shaft anglec of rotation present position values, i.e., relative to the upper electric moment the rotating shaft anglec of rotation phase To positional value;The signal conditioning circuit to amplify to reference zero differential signal and generate single-ended signal after shaping, filtering, into ginseng Zero point comparator circuit is examined, the digital signal of low and high level is converted into, rotating shaft anglec of rotation generation module is recently entered, phase is generated For the absolute position values of the rotating shaft anglec of rotation of reference zero signal.
The ADA4950-2 collection of the preferred Anolog Devices companies of high-speed-differential operational amplifier in signal conditioning circuit Into circuit chip;ADC modulus switching device preferred embodiments, using the multi-level differential streamline of Anolog Devices companies The high-speed parallel AD9248 IC chips of framework;The preferred FPGA field programmable logic devices of interpolation sub-circuit 10M16SCU169I7G IC chips.
Whole algorithms fully with the characteristics of FPGA pipeline parallel method computings, and utilize FPGA using FPGA process The modules such as memory block, hardware multiplier that inside carries improve hardware algorithm and realize performance, and speed is fast, and real-time is high, meets Requirement of the motion control arithmetic to current location real-time.Magnetic induction components and parts are exported just using digital circuit processing mode The various errors of cosine signal are effectively corrected and compensated, and are improve difference and are mended the accuracy and reliability of subdivision, and then are improved The subdivision accuracy and resolution of cosine and sine signal, and using preserving and adjust error parameter write FPGA in-chip FLASH ROM Mode, carries out the recalibration of FPGA Automatic Program and the Automatic adjusument to error.By high-speed ADC analog to digital conversion circuit With working in coordination for FPGA field programmable logic devices, the data acquisition and procession of high-speed, high precision is realized, by serial Communications protocol bus realizes the data output of high-speed and high-efficiency, so as to provide more accurate positional information for servo-control system Meet high speed, the requirement of high-precision control.
The measurement gear has two kinds of magnetic tracks, and one is that sine and cosine (A, B) orthogonal differential signal exports magnetic track 14, the number of teeth It is preferred that 512 teeth;Its two be reference zero (Z) differential signal export magnetic track 13.Reference zero (Z) differential signal output magnetic track has Two kinds of versions, one kind only lacks a tooth for a circle than sine and cosine magnetic track, and as shown in Figure 4 A, one kind is only one, a circle Tooth, as shown in Figure 4 B.
In normal use condition and range, can be according to the situation in actual main shaft or motor space to measuring the outer of gear Footpath, thickness, hole size and modulus claim, measure gear specification modulus can for 0.2,0.3,0.4,0.5,0.6,0.8, 1.0 or 2.0.Measure when gear and magnetic induction read head are installed notably direction, it is necessary to corresponded to installation, otherwise signal up and down It is bad.When magnetic induction read head being installed with gear is measured, it is recommended to use the clearance gauge of standard thickness (such as 0.15 millimeter), both can be accurate The installing space for ensureing magnetic induction components and parts and measuring gear can obtain splendid signal quality between 0.1 to 0.3mm, again. Additionally, being provided with the symmetrical projection being easily installed in the bottom of the metal shell 21 of magnetic induction read head, symmetrical projection is located at metal The both sides of the bottom of housing 21, the symmetrical rising height of both sides is consistent, to realize magnetic induction components and parts and measure circumference of gear positive Cut, that is, realize magnetic induction components and parts center, the concentricity that gear, machine tool chief axis are installed measured, then by screw by magnetic induction Read head is fastenedly connected with read head fixing base, finally extracts clearance gauge out or rotation measures gear and takes out clearance gauge.
The precision for measuring Gear Processing has a huge impact to the precision and concordance of code device signal.Commercial Application In, the precise measure gear of 6 grades of GB or higher precision should be selected.Code device signal line number can be carried out by measuring number of gear teeth Adjustment, and and then impact machine tooling, positioning precision.The measurement gear has three kinds of mounting means:1st, hot charging.Using this During technique, producing the internal diameter of measurement gear should be slightly less than the main shaft diameter of axle.Under room temperature, measuring gear can not connect with main shaft, lead to Crossing heating measurement gear makes material expand, at this moment can measure gear and be mounted on main shaft, and then cooling measures gear receives material Contracting, the final gear that measures firmly is pressed on main shaft.2nd, it is tightened on the shaft shoulder.Gear will be measured to be mounted on main shaft, spiral shell is used Nail is fixed on gear is measured on the main shaft shaft shoulder.3rd, clamped by axle nut.Measure gear to be installed on spindle shaft, by axle spiral shell Mother is pressed on a component;Customer requirement can also be answered, an integration type shaft nut, therefore internal diameter are assembled on gear is measured On have corresponding screw thread.
As shown in table 1, its BISSC serial communication protocol timing waveform is as shown in Figure 5 for inventive encoder data form:
The incremental magnetic induction type bus type encoder data form of table 1
Note 1:" Ack ", confirmation signal, magnetic induction encoder receives the confirmation feedback of the clock signal of host computer transmission, And begin preparing for transmission location data.
Note 2:" Start " and " 0 ", serial communication data transfer start bit, magnetic induction encoder signals are opened to main interface Beginning transmission data.
Note 3:" Relative Position ", relative to the high line number relative position of the rotating shaft anglec of rotation at upper electric moment Value, binary format, 24, line number is overflowed and raps around to zero.
Note 4:" Absolute Position ", it is absolute relative to the high line number of the rotating shaft anglec of rotation of reference zero signal Positional value, binary format, 24, line number is overflowed and raps around to zero.
Note 5:" Zero ", zero signal flag bit, original state be " 0 ", low level;Rotating shaft rotates past reference zero letter After number, " ZERO " position position is permanent for " 1 ", high level.
Note 6:" Error ", error bit, Low level effective." 1 " represents the positional information of transmission by magnetic induction read head Built-in security checking algorithm is verified, as a result correctly;" 0 " represents internal detection failure, and positional information is insincere.
Note 7:" Warn ", alerts position, Low level effective." 1 " represents the positional information of transmission by magnetic induction read head Built-in security checking algorithm is verified, as a result correctly;" 0 " represents that internal detection exceeds threshold value, and positional information is insincere.
Note 8:" CRC ", check bit, relative position, absolute position, mistake and alarm data check bit, 6 altogether.
In Fig. 5, " MA " refers to be asked to be transferred to from host computer with time sequence information (clock) by the collection of magnetic induction encoder position Magnetic induction encoder;" SLO " refers to position data from magnetic induction encoder transmission to the main interface synchronous with MA;“Timeout” For time-out period, the time between a request circulation starts and another request circulation starts.
Incremental magnetic induction type bus type encoder data form is acted on, for used by high speed and super precision machine tool chief axis, electro spindle Synchronous motor, the acquisition of the rotating shaft anglec of rotation current location of asynchronous machine can be processed well.
Asynchronous machine rotor winding because relative motion being there is between magnetic field and induced electromotive force and electric current, and with magnetic field phase Interaction produces electromagnetic torque, realizes energy conversion, and because torque current is vertical with exciting current electrical angle, position data increment is true Fixed, electricity can normal work on for asynchronous machine;The position of magnetic pole for knowing rotor is needed when synchronous motor startup, can High-torque starts servomotor, is so accomplished by absolute value encoder definitely to detect the current location of rotor.But magnetic induction Electricity only knows relative position on incremental bus type encoder one, so for synchronous motor, it is necessary to some special process Mode, such as, with station-keeping data, rotating shaft low speed first turns around, and after finding reference zero signal, then is rotated with current spindle Algorithm process, but this processing mode are done in the absolute position of angle, and first lap cannot be used for part processing because torque current with Exciting current electrical angle phase relation does not determine, after machine shaft rotates past reference zero signal, you can high-torque starts Servomotor, certainly, in engineer applied, can use other software processing methods, such as, high-frequency signal injection is obtaining electricity Phase relation of angle.
Incremental magnetic induction type bus type encoder data format transmission method is selected, for synchronous motor, synchronization is overcome The drawbacks of electricity is accomplished by absolute value encoder and definitely detects rotor current location on motor, expands application, and also has One big advantage, that is, measure that gear is relatively easy to machine, from absolute position magnetic induction encoder then measure gear structure it is complicated, Difficulty of processing is big, and machining tool overall performance is had high demands.
The incremental magnetic induction type bus type code device signal via 10 core shielded twisted pair lines, by RS485 or RS422 EBIs are exported, the serial communication protocol such as compatible BISS, SSI, and can 20000 revs/min of turn up and more than Under conditions of determine absolute position, can be widely applied to the fields such as Digit Control Machine Tool, robot, elevator and industrial automation.
One of presently preferred embodiments of the present invention is the foregoing is only, the present invention is not limited to, it is all in the present invention Spirit and principle within any modification, equivalent and the improvement made etc., should be included in protection scope of the present invention it It is interior.

Claims (10)

1. high speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder, it is characterised in that including being sleeved on machine On bed main shaft, electro spindle and with machine tool chief axis, the magnetic for measuring gear and using cooperatively with measurement gear of electro spindle synchronous rotary Sensing read head;The measurement gear is provided with sine and cosine orthogonal differential signal output magnetic track and reference zero differential signal output magnetic Road;Magnetic induction components and parts, signal conditioning circuit, reference zero comparator circuit and FPGA interpolations are provided with magnetic induction read head thin Parallel circuit, magnetic induction components and parts and the just tangent installation of measurement circumference of gear;The magnetic induction components and parts carry out non-to measurement gear Sine and cosine orthogonal differential signal and reference zero differential signal produced by contact type scanning, after signal conditioning circuit, by FPGA interpolations sub-circuit is corrected in real time and compensated to its direct current biasing error, amplitude error and quadrature phase error, And with reference to reference zero comparator circuit, so as to generate the relative position value of the rotating shaft anglec of rotation relative to the upper electric moment respectively With the absolute position values of the rotating shaft anglec of rotation relative to reference zero signal.
2. incremental magnetic induction type bus type encoder according to claim 1, it is characterised in that the FPGA interpolations subdivision Circuit includes that direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal are most worth module, memory module, take advantage of Method times frequency module, Coordinate Rotation Digital computing module and rotating shaft anglec of rotation generation module, rotating shaft anglec of rotation generation module with Reference zero comparator circuit, the connection of Coordinate Rotation Digital computing module, direct current biasing error compensation module, amplitude error compensation Module, frequency multiplication module and Coordinate Rotation Digital computing module are sequentially connected, cosine and sine signal be most worth module respectively with direct current Biased error compensating module, amplitude error compensating module, memory module connection, it is just remaining for asking for that cosine and sine signal is most worth module The sampling maximum of string signal and minima, memory module is used to store direct current biasing error compensation module, amplitude error compensation Module, cosine and sine signal are most worth the operation result of module.
3. incremental magnetic induction type bus type encoder according to claim 2, it is characterised in that the frequency multiplication module Including cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment circuit module, wherein cosine and sine signal multiplier module Two are provided with, the input of a cosine and sine signal multiplier module is connected with amplitude error compensating module, outfan is electric with adjustment Road module connection;The input of another cosine and sine signal multiplier module is mended by cosine and sine signal phase shift block with amplitude error Module connection is repaid, outfan is connected with adjustment circuit module, and adjustment circuit module is connected with Coordinate Rotation Digital computing module.
4. incremental magnetic induction type bus type encoder according to claim 3, it is characterised in that the direct current biasing error Compensating module and amplitude error compensating module derive respectively the direct current biasing error and amplitude error of cosine and sine signal;Then it is sharp Quadrature phase error is transformed into by direct current biasing error and amplitude error, Jing by phase shift, frequency multiplication with frequency multiplication module Adjustment circuit module is gone after removing DC bias error and adjustment amplitude, with the two-way cosine and sine signal of two frequencys multiplication as primary signal Carry out interpolation subdivision again in Coordinate Rotation Digital computing module;The Coordinate Rotation Digital computing module calculates arc tangent, asks Take phase value, draw rotating shaft anglec of rotation present position values, i.e., relative to the upper electric moment the rotating shaft anglec of rotation relative position Value;
The signal conditioning circuit to amplify to reference zero differential signal and generate single-ended signal after shaping, filtering, into referring to zero Point comparator circuit, is converted into the digital signal of low and high level, recently enters rotating shaft anglec of rotation generation module, generate relative to The absolute position values of the rotating shaft anglec of rotation of reference zero signal.
5. incremental magnetic induction type bus type encoder according to claim 2, it is characterised in that the memory module is position FLASH ROM in FPGA pieces, FPGA interpolation sub-circuit calls the direct current biasing error compensation mould that FLASH ROM are stored Block, amplitude error compensating module operation result, the Automatic adjusument to realize the recalibration of FPGA Automatic Program and to error.
6. incremental magnetic induction type bus type encoder according to claim 1, it is characterised in that the magnetic induction read head Positioned at measure gear outside top and and measure gear between gap be 0.1 to 0.3mm.
7. incremental magnetic induction type bus type encoder according to claim 1, it is characterised in that the magnetic induction read head Seating side be in same plane with gear side is measured;The housing bottom of magnetic induction read head is provided be easily installed symmetrical Projection, symmetrical rising height one is shown and realizes magnetic induction components and parts and measure the just tangent installation of circumference of gear, that is, realize magnetic induction The concentricity that components and parts center, measurement gear, machine tool chief axis are installed.
8. incremental magnetic induction type bus type encoder according to claim 1, it is characterised in that the ginseng of the measurement gear The structure that zero point differential signal output magnetic track is that a circle only has a tooth is examined, or it is more defeated than sine and cosine orthogonal differential signal for a circle Go out the structure that magnetic track only lacks a tooth.
9. incremental magnetic induction type bus type encoder according to claim 1, it is characterised in that the measurement gear is provided with One centre bore being used in live spindle;The measurement gear set specifications modulus is 0.2,0.3,0.4,0.5,0.6, 0.8th, 1.0 or 2.0.
10. incremental magnetic induction type bus type encoder according to claim 1, it is characterised in that the magnetic induction is read The ADC analog to digital conversion circuits being connected between signal conditioning circuit and FPGA interpolation sub-circuits are additionally provided with head.
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