CN106500591A - A kind of integrated form multiband Michelson's interferometer - Google Patents
A kind of integrated form multiband Michelson's interferometer Download PDFInfo
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- CN106500591A CN106500591A CN201611215147.8A CN201611215147A CN106500591A CN 106500591 A CN106500591 A CN 106500591A CN 201611215147 A CN201611215147 A CN 201611215147A CN 106500591 A CN106500591 A CN 106500591A
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- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000001228 spectrum Methods 0.000 claims abstract description 19
- 238000012545 processing Methods 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 230000010287 polarization Effects 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 16
- 239000006185 dispersion Substances 0.000 abstract description 13
- 239000007788 liquid Substances 0.000 abstract description 8
- 239000000463 material Substances 0.000 description 7
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- 235000013361 beverage Nutrition 0.000 description 2
- 150000001720 carbohydrates Chemical class 0.000 description 2
- 239000008157 edible vegetable oil Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010999 medical injection Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
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- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The present invention is to provide a kind of integrated form multiband Michelson's interferometer.Including photodetector, light source, collimator, Amici prism and its adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system, optical path compensator and signal processing unit, the photodetector is 8 wave band photodetectors, described light source is wide spectrum light source, the continuous light wave of wide spectrum light source output multiband, the light wave of each wave band is respectively formed one group of white light interference pattern through Michelson's interferometer, the each independent detection of 8 wave band white light interference signals is realized simultaneously by 8 each independent wave band photodetectors and signal processing unit.The present invention constructs the integrated technical solution of multiband Michelson's interferometer using wide spectrum light source, Amici prism and its adjustment system, Multirange photoelectric detector.Can be used for the measurement of the optical characteristics such as refraction, the dispersion of transparent medium, be particularly suitable for the measurement and discriminating of transparency liquid.
Description
Technical field
The present invention relates to a kind of integrated form multiband Michelson's interferometer.
Background technology
Known Michelson's interferometer is cooperated with Mo Lei by U.S.'s experimental physicist Michelson, be research " with
The precision optical instrument for too " drifting about and manufacturing and designing out.It is to produce dual-beam using divide amplitude to realize interfering.Pass through
The interferometer is adjusted, equal thick interference fringe can be produced, it is also possible to produce equal inclination fringe.
Using known Michelson's interferometer principle, research worker develops multiple special interferometers.Wherein, based on white
The Michelson's interferometer of light, the low-coherence light source that wide spectrum, coherence length can be utilized very short, using the interference for interfering generation
Striped carries out absolute measurement to parameters such as light path, optical dispersions, with strong antijamming capability, simple structure, with low cost etc. excellent
Point.
The light source of known white light Michelson's interferometer is generally monochromatic light, such as major technique related to this, light path
Coupling, signal modulation and demodulation etc., ripe.Based on the various kinds of sensors designed by known Michelson's interferometer,
To during the measurement of simple target, with high accuracy, high-sensitivity characteristic.
But, sensor function is integrated, intelligent, under networking technical background, traditional, known Michael
Inferior interferometer, single due to measuring target, its application is restricted.In engineering in practice, using a set of sensor-based system to many mesh
Mark is carried out while measuring, or same measurement target carries out the measurement of multiple wave bands, is to obtain more rich information and to quilt
Measurement object carries out the important technical of overall merit.As known white light Michelson's interferometer generally adopts monochromatic light
Source, when measuring to medium refraction, dispersion characteristics, one-shot measurement can only obtain the refractive index of one group of specific wavelength.And it is real in production
In border, the acquisition of the refractive index of some doping transparent media, dispersion characteristics is needed to obtain more rich metrical information and could be obtained
Accurate measurement result is arrived, this is that monochromatic light Michelson's interferometer can not be completed by one-shot measurement.
Content of the invention
It is an object of the invention to provide the optical characteristics such as a kind of refraction that can be realized to detected material, dispersion is more
The integrated form multiband Michelson's interferometer that dimension is evaluated.
The object of the present invention is achieved like this：Including photodetector, light source, collimator, Amici prism and its adjustment
System, stationary mirror, cuvette and its fixed system, mobile mirror system, optical path compensator and signal processing unit, institute
Photodetector is stated for 8 wave band photodetectors, described light source is wide spectrum light source, 8 wave band photodetectors, wide spectrum light source,
Collimator, Amici prism and its adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system, light path
Compensator and signal processing unit are integrated in 8 Michelson interferences for working in different-waveband of composition on same light base board
Instrument, the continuous light wave of wide spectrum light source output multiband, the light wave of each wave band are respectively formed one group through Michelson's interferometer
By 8 each independent wave band photodetectors and signal processing unit, white light interference pattern, realizes that 8 wave band white lights are done simultaneously
Relate to each independent detection of signal.
The present invention can also include：
1st, the Amici prism and its adjustment system are by Amici prism, Amici prism firm banking, firm banking angle
Adjustment frame is constituted, and the inside and outside contour line of the firm banking angular adjustment frame is square, in firm banking angle
The vertical view face of adjustment frame is provided with 4 apertures for running through, and each aperture is centrally located at the symmetrical centre in each side face of adjustment frame,
2 silk holes that runs through are had on facade before and after firm banking angular adjustment frame, two on same facade silk hole is symmetrical
The both sides of opened aperture on the side face corresponding to the facade are distributed in, the silk hole on former and later two facades is conllinear.
2nd, the Amici prism firm banking overlooks face for square, and the center for overlooking face is provided with a countersunk head through little
Hole；Amici prism is installed together with Amici prism firm banking, and the downward projection face of prism is centrally located at Amici prism and fixes
Base overlooks the center in face, and the square four in the downward projection face of prism is when face square four is overlooked with firm banking
Parallel.
3rd, also include the polarizer of the polarization state of each wave band light wave for controlling to enter Amici prism and its adjustment system, also
Including making the multiband light wave of 8 wave band photodetector of entrance in the analyzer of identical polarization state.
The invention provides a kind of using wide spectrum light source, Amici prism and its adjustment system, Multirange photoelectric detector structure
The integrated technical solution of the multiband Michelson's interferometer that makes, its purpose is to overcome single wave band mikey in prior art
Measurement target that your inferior interferometer brings is single and the problems such as be unable to overall merit detected target property.
The main feature of the present invention is embodied in：
1st, the Michelson's interferometer that 8 work in different-waveband is integrated on same light base board, it is by 8 wave bands
Photodetector, light base board, wide spectrum light source, collimator, Amici prism and its adjustment system, stationary mirror, the polarizer, inspection
Device, cuvette and its fixed system, mobile mirror system, optical path compensator, signal processing unit are constituted partially.
This way has an advantage that：The light source of each specific band in wide spectrum light source, all by with light base board on
Collimator, Amici prism and its adjustment system, stationary mirror, the polarizer, analyzer, cuvette and its fixed system, movement
It is used for detecting the light emitted ripple of aforementioned specific band light source in mirror system, optical path compensator, and 8 wave band photodetectors
Probe unit, constitute a Michelson's interferometer.
This way is also beneficial in that：By 8 wave band photodetectors, collimator, Amici prism and its adjustment system, admittedly
Reflecting mirror, the polarizer, analyzer, cuvette and its fixed system, optical path compensator is determined all installed in same light base board
On, the integrated of 8 different-waveband Michelson's interferometers is not only technically achieved, the monolithic stability of system is also add
Property.
2nd, the wide spectrum light source output continuous light wave of multiband, the light wave of each wave band through Michelson's interferometer,
One group of white light interference pattern is formed, by 8 each independent wave band photodetectors and signal processing unit, while realizing 8
The each independent detection of wave band white light interference signal.
This way has an advantage that：As 8 wave band photodetectors can realize that the independent detection of each wave band is opened
Open or several wave bands detection and meanwhile open, can according to commercial measurement need and measurement target attribute, by signal processing
Unit, is optimized design to the mode of operation of 8 wave band photodetectors.
As the white light of 8 wave bands is respectively positioned on visible light wave range, this causes wide spectrum light source to be easily obtained, common halogen
Lamp, natural light are may serve to as work light.
3rd, Amici prism and its adjustment system are by Amici prism, Amici prism firm banking, firm banking angle adjustment
3 part of frame composition.
The inside and outside contour line of firm banking angular adjustment frame is square；In this firm banking angle adjustment
The vertical view face of frame is provided with 4 apertures for running through, and each aperture is centrally located at the symmetrical centre in each side face of adjustment frame；At this
The head-on view of firm banking angular adjustment frame and backsight face, have two silk holes that runs through, same two silks on face
Hole is symmetrically distributed in the both sides depending on opened aperture on the side face corresponding to face, and the silk hole that former and later two are regarded on face is conllinear.
In the vertical view face of aforesaid firm banking angular adjustment frame, 4 apertures for running through are provided with, its role is to adjust this
Whole frame is fixed on light base board.4 opened on firm banking angular adjustment frame are passed through in wire hole, respectively precession jackscrew
Afterwards, each jackscrew withstands on the corresponding side elevation of Amici prism and its adjustment system firm banking.So, when precession or back-out top
Silk, can control and finally fix the entirety constituted by Amici prism and Amici prism firm banking, so as to realize Amici prism
Angle adjustment.
In Amici prism and its adjustment system, Amici prism firm banking overlooks face for square, overlooks the center in face
A countersunk head is provided with through aperture；Amici prism is installed together with Amici prism firm banking, in the downward projection face of prism
The heart is located at the center that Amici prism firm banking overlooks face, and four side of square in the downward projection face of prism and fixed bottom
It is parallel that seat overlooks face four sides of square.
A countersunk head is provided with through aperture at the center of Amici prism firm banking, which has an advantage that：Due to white light mikey
The inferior interferometer of that requires that to light path coupling Amici prism is arranged on light splitting to light path coupling with directly affecting by harshness, angle
On prism firm banking, then the entirety constituted by Amici prism and Amici prism firm banking can be arranged on by countersunk head aperture
On light base board, so this entirety can be planar rotated centered on countersunk head aperture, you can think the angle of Amici prism
Degree adjustment provides convenient.
The integrated form multiband Michelson's interferometer of the present invention, the optics that can be used for various transparent mediums and material are special
Property, the measurement of dispersion characteristics.It is particularly suitable for transparency liquid, such as：Drinks, saccharide beverage；Various edible vegetable oils；Various transparent
The measurement and discriminating of medical injection medicinal liquid etc..
Compared with first technology, the present invention is the technological means by adopting wide spectrum light source, Multirange photoelectric detector, real
Now at least the white light Michelson's interferometer of 8 wave bands is integrated on same light base board, a kind of integrated form for producing
Multiband Michelson interference system.This interferometer can be used for refractive index, the dispersion characteristics for observing material.As this interferometer can
8 wave bands in natural light are worked in, so the observation to same material can obtain 8 kinds of characteristic spectrums simultaneously.Comprehensive analysis
These collection of illustrative plates, can carry out multidimensional evaluation to being detected the refraction of material, dispersion characteristics, so as to improve the optical characteristics to material
Detection and the accuracy of characteristic differentiation.
Description of the drawings
Fig. 1 is multiband integrated form Michelson's interferometer system dimensional structure diagram.
Fig. 2 is multiband integrated form Michelson's interferometer structural plan of the present invention expanded schematic diagram.
Fig. 3 is the schematic top plan view of Amici prism and its adjustment system.
Fig. 4 is Amici prism and its adjustment system forward sight (or backsight) schematic diagram.
Fig. 5 is the front-view schematic diagram of Amici prism firm banking.
Fig. 6 is the structural representation of mobile mirror system.
Fig. 7 is the embodiment schematic diagram by the use of Halogen light as alternative light source.
Specific embodiment
Illustrate below and the present invention is described in more detail.
In conjunction with Fig. 1 and 2, the multiband integrated form Michelson's interferometer system of the present invention by 8 wave band photodetectors 1,
Wide spectrum light source 3, collimator 4, Amici prism and its adjustment system 5, stationary mirror 6, the polarizer 7, analyzer 8, cuvette and
Its fixed system 9, mobile mirror system 10, optical path compensator 11, signal processing unit 12 are constituted.It is arranged on same smooth roadbed
On plate 2.
In conjunction with Fig. 3, Amici prism and its adjustment system 5 are by Amici prism 13, Amici prism firm banking 14, firm banking
Angular adjustment frame 15, jackscrew 16, jackscrew 17, jackscrew 18, jackscrew 19 are constituted；It is provided with firm banking angular adjustment frame 15 and runs through
Aperture, respectively through aperture 20, through aperture 21, through aperture 22, through aperture 23.
In conjunction with Fig. 4, Amici prism and its adjustment system 5 are by Amici prism 13, Amici prism firm banking 14, firm banking
Angular adjustment frame 15 is constituted.It is provided with the head-on view of firm banking angular adjustment frame 15 and passes through wire hole 24,25；It is provided with backsight face
Pass through wire hole 26,27.Forward sight (or backsight) perspective plane for passing through wire hole 24,26 is to overlap；Pass through the forward sight of wire hole 25,27
(or backsight) perspective plane is to overlap.
In conjunction with Fig. 5, countersunk head is provided with through aperture 28 in the center of Amici prism firm banking 14.
In conjunction with Fig. 6, mobile mirror system 10 is single by micron order displacement scan table 29, the control of micron order displacement scan table
Unit 30, reflecting mirror 31 constitutes.
In conjunction with Fig. 7, by the use of Halogen light as the embodiment of alternative light source in, selected Halogen light as including all
The wide spectrum light source of 8 detecting bands.The composition of this embodiment includes：The photodetector 1 of 8 wave bands, light base board 2, halogen
Plain lamp 3, colimated light system 4, Amici prism and its adjustment system 5, stationary mirror system 6, the polarizer 7, analyzer 8, cuvette
And its fixed system 9, mobile mirror system 10, optical path compensator 11, signal processing unit 12.
It is a technical scheme for obtaining certain transparency liquid refraction, dispersion characteristics of the invention.According to Fig. 7
Embodiment, its space optical path are such：
The multiband light wave that Halogen light 3 sends, after colimated light system 4, after entering into Amici prism and its adjustment system 5
It is divided into two beams.After the reflected beams therein impinge perpendicularly on stationary mirror system 6 and reflect through the reflecting mirror, it is re-introduced into
Amici prism and its adjustment system 5, and after through Amici prism and its adjustment 5 transmission of system after, arrive at 8 wave band photodetectors 1；
Transmitted light beam therein then impinges perpendicularly on mobile mirror system 10, and after reflecting mirror reflection, is re-introduced into light splitting
Prism and its adjustment system 5, after Amici prism and its adjustment system 5 reflect, arrive at 8 wave band photodetectors 1.
8 selected characteristic wave bands are respectively positioned on visible light wave range, and respective centre wavelength is respectively：428nm、460nm、
490nm、515nm、557nm、615nm、660nm、695nm.
As needed, the polarizer 7 that can be laid in the optical path, it is therefore an objective to which control enters Amici prism and its adjustment system 5
Each wave band light wave polarization state；Analyzer 8 is laid in the optical path, it is therefore an objective to make many ripples of 8 wave band photodetector of entrance
The light wave of Duan Guangbo, particularly the same band is in identical polarization state, so as to improve the coherent contrast degree of optical signal.
Embodiment according to Fig. 7, its light path coupling are realized in：
In mobile mirror system 10, by reflecting mirror 31 on micron order displacement scan table 29.When institute in the present invention
When signal arm light path in the integrated form multiband Michelson's interferometer that states changes, by micron order displacement scan table control
Moving forward and backward for the control reflecting mirror of unit processed 30, realizes that light path mates.
Embodiment according to Fig. 7, its refraction to certain transparency liquid, the detection of dispersion characteristics are realized in
's：
In adjustment colimated light system 4, mobile mirror system 10, Amici prism and its adjustment system 5, optical path compensator 11,
Realize in multiband integrated form multiband Michelson's interferometer of the present invention, the light path of signal arm and reference arm is close to absolutely
After equal, in cuvette and its fixed system 9, it is put into testing liquid.After stable, by driving mobile mirror system
System 10, realizes that light path is scanned.After single pass, the white light interference collection of illustrative plates of 8 wave bands can be obtained in signal processing unit 12.
Due to the light wave of different-waveband, the refractive index in same medium is different, then in the embodiment shown in fig. 7, per
Geometry distance coupling in one wave band white light interference collection of illustrative plates corresponding to peak value is different.So, embodiment illustrated in fig. 7 obtained 8
Individual wave band white light interference collection of illustrative plates, will appear from the displaced from one another of peak value.Shifted by analysis, and the association of refractive index and dispersion
Property, it is possible to obtain the multiband refraction of fluid to be measured, dispersion characteristics, so as to realize to being detected the light such as the refraction of material, dispersion
Learn the multidimensional evaluation of characteristic.The embodiment is suitable for transparency liquid, such as：Drinks, saccharide beverage, various edible vegetable oils are various
The measurement and discriminating of transparent medical injection medicinal liquid etc..
Claims (5)
1. a kind of integrated form multiband Michelson's interferometer, including photodetector, light source, collimator, Amici prism and its
Adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system, optical path compensator and signal processing list
Unit, is characterized in that：The photodetector is 8 wave band photodetectors, and described light source is wide spectrum light source, 8 band of light electrical resistivity surveys
Survey device, wide spectrum light source, collimator, Amici prism and its adjustment system, stationary mirror, cuvette and its fixed system, movement
Mirror system, optical path compensator and signal processing unit are integrated in composition 8 on same light base board and work in different ripples
The Michelson's interferometer of section, the continuous light wave of wide spectrum light source output multiband, the light wave of each wave band is through Michelson
Interferometer is respectively formed one group of white light interference pattern, by 8 each independent wave band photodetectors and signal processing unit simultaneously
Realize each independent detection of 8 wave band white light interference signals.
2. integrated form multiband Michelson's interferometer according to claim 1, is characterized in that：The Amici prism and its
Adjustment system is made up of Amici prism, Amici prism firm banking, firm banking angular adjustment frame, the firm banking angle
The inside and outside contour line of adjustment frame is square, is provided with 4 in the vertical view face of firm banking angular adjustment frame and runs through
Aperture, each aperture are centrally located at the symmetrical centre in each side face of adjustment frame, stand before and after firm banking angular adjustment frame
2 silk holes that runs through are had on face, and two on same facade silk hole is symmetrically distributed on the side face corresponding to the facade
The both sides of opened aperture, the silk hole on former and later two facades are conllinear.
3. integrated form multiband Michelson's interferometer according to claim 2, is characterized in that：The Amici prism is fixed
Base overlooks face for square, and the center for overlooking face is provided with a countersunk head through aperture；Amici prism is fixed with Amici prism
Together, the downward projection face of prism is centrally located at the center that Amici prism firm banking overlooks face, and rib to floor installation
The square four in the downward projection face of mirror is parallel when face square four is overlooked with firm banking.
4. integrated form multiband Michelson's interferometer according to claim 1 and 2, is characterized in that：Also include controlling into
Enter the polarizer of the polarization state of each wave band light wave of Amici prism and its adjustment system, also include making 8 band of light electrical resistivity survey of entrance
Survey the analyzer of the multiband light wave in identical polarization state of device.
5. integrated form multiband Michelson's interferometer according to claim 3, is characterized in that：Also include that control is entered to divide
The polarizer of the polarization state of each wave band light wave of light prism and its adjustment system, also includes making 8 wave band photodetector of entrance
Multiband light wave in identical polarization state analyzer.
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| CN201611215147.8A CN106500591B (en) | 2016-12-26 | 2016-12-26 | A kind of integrated form multiband Michelson's interferometer |
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| CN201611215147.8A CN106500591B (en) | 2016-12-26 | 2016-12-26 | A kind of integrated form multiband Michelson's interferometer |
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| CN107798976A (en) * | 2017-11-23 | 2018-03-13 | 沈阳师范大学 | A kind of portable modular Michelson interference experimental provision |
| CN110770625A (en) * | 2017-07-06 | 2020-02-07 | 浜松光子学株式会社 | Mirror assembly and optical module |
| CN111780664A (en) * | 2020-06-29 | 2020-10-16 | 四川大学 | Michelson interferometer system capable of simultaneously outputting double-frequency fringes orthogonal to polarization direction and simultaneous output method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11187579B2 (en) | 2017-07-06 | 2021-11-30 | Hamamatsu Photonics K.K. | Optical device |
| CN110770625A (en) * | 2017-07-06 | 2020-02-07 | 浜松光子学株式会社 | Mirror assembly and optical module |
| US11054309B2 (en) | 2017-07-06 | 2021-07-06 | Hamamatsu Photonics K.K. | Optical module |
| US11067380B2 (en) | 2017-07-06 | 2021-07-20 | Hamamatsu Photonics K.K. | Optical module |
| US11209260B2 (en) | 2017-07-06 | 2021-12-28 | Hamamatsu Photonics K.K. | Optical module having high-accuracy spectral analysis |
| US11624605B2 (en) | 2017-07-06 | 2023-04-11 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
| US11629947B2 (en) | 2017-07-06 | 2023-04-18 | Hamamatsu Photonics K.K. | Optical device |
| US11629946B2 (en) | 2017-07-06 | 2023-04-18 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
| US11635290B2 (en) | 2017-07-06 | 2023-04-25 | Hamamatsu Photonics K.K. | Optical module |
| US11879731B2 (en) | 2017-07-06 | 2024-01-23 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
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| CN111780664A (en) * | 2020-06-29 | 2020-10-16 | 四川大学 | Michelson interferometer system capable of simultaneously outputting double-frequency fringes orthogonal to polarization direction and simultaneous output method |
| CN111780664B (en) * | 2020-06-29 | 2021-11-09 | 四川大学 | Output method for simultaneously outputting dual-frequency stripes with orthogonal polarization directions |
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| Publication number | Publication date |
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| CN106500591B (en) | 2018-12-11 |
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Application publication date: 20170315 Assignee: Aifeibo (Ningbo) Optoelectronic Technology Co.,Ltd. Assignor: GUILIN University OF ELECTRONIC TECHNOLOGY Contract record no.: X2023980046363 Denomination of invention: An integrated multi band Michelson interferometer Granted publication date: 20181211 License type: Common License Record date: 20231108 |