CN106475566A - The manufacture method of molybdenum titanium target base - Google Patents
The manufacture method of molybdenum titanium target base Download PDFInfo
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Abstract
The present invention provides a kind of manufacture method of molybdenum titanium target base, and wherein methods described includes：Molybdenum, titanium mixed-powder are provided；Isostatic cool pressing technique is carried out to the molybdenum, titanium mixed-powder, forms molybdenum, titanium mixed-powder blank；The molybdenum, titanium mixed-powder blank are loaded jacket and the bag is vacuumized to be formed after vacuum canning, heat and other static pressuring processes are carried out to the molybdenum, titanium mixed-powder blank；The vacuum canning is removed, obtains molybdenum titanium target base.By the isostatic cool pressing technique, the molybdenum, titanium mixed-powder preformingization is made, molybdenum, the titanium mixed-powder blank of half compactness is formed, and allows follow-up heat and other static pressuring processes to carry out more preferable densification；Pass through heat and other static pressuring processes again, apply each to impartial and omnibearing gas pressure, final acquisition high-compactness, the institutional framework molybdenum titanium target base of semiconductor evenly to the vacuum canning.
Description
Technical field
The present invention relates to semiconductor applications, more particularly to a kind of manufacture method of molybdenum titanium target base.
Background technology
Sputtering technology is one of conventional process of field of semiconductor manufacture, growing with sputtering technology,
Sputtering target material serves more and more important effect in sputtering technology.Sputtering target material is mainly by target blankss and the back of the body
Plate constitutes, and wherein, the quality of target blankss has directly influenced the quality of forming film of sputtering target material.
Molybdenum titanium alloy is one kind than more typical target blankss material.As titanium has stronger corrosion resistance, and
Molybdenum has good heat endurance, has been widely used in field of semiconductor manufacture.In order to ensure to splash
Shoot at the target the quality of forming film of material, molybdenum titanium target base not only to compactness, hardness and can processing type have very high requirement,
While the interior tissue uniformity to molybdenum titanium alloy also has very high requirement.
The manufacture method of target blankss has a lot, mainly realizes molybdenum titanium target base using the method for powder metallurgy at present
Manufacture, the powder metallurgy be by producing metal dust (add or without non-metal powder), real
Apply shaping and sinter, the processing method for making material or product.Powder metallurgy has unique chemical composition
With machinery, physical property, and forming temperature is relatively low, such that it is able to make porous, half fine and close or full densification
, the uniform molybdenum titanium target base of microstructure.
In specific powder metallurgical technique, hot-pressing sintering technique is typically adopted.The hot-pressing sintering technique
Specially ready powder is filled in a particular mold, is subsequently placed in vacuum hotpressing stove, in vacuum or
Under person's inert gas conditions, using forcing press, acted on mould by upper and lower two pressure heads, side is heated up
Side is pressurizeed, until pressure and temperature all reaches setting value, keeps one under the conditions of the pressure and temperature for setting
Along with the furnace cooling after the section time, comes out of the stove.
However, the uniformity of the internal organizational structure of the molybdenum titanium target base that is made using hot-pressing sintering technique and cause
Density cannot meet and require higher and higher sputtering technology.
Content of the invention
The problem that the present invention is solved is to provide a kind of preparation method of new molybdenum titanium target base, partly leads so as to improve
Body consistency and the uniform texture of molybdenum titanium target base.
For solving the above problems, the present invention provides a kind of preparation method of molybdenum titanium target base.Comprise the steps：
Molybdenum, titanium mixed-powder are provided；
Isostatic cool pressing technique is carried out to the molybdenum, titanium mixed-powder, forms molybdenum, titanium mixed-powder blank；
The molybdenum, titanium mixed-powder blank are loaded jacket and the jacket is vacuumized to form vacuum packet
After after set, heat and other static pressuring processes are carried out to the molybdenum, titanium mixed-powder blank, form molybdenum titanium alloy；
The vacuum canning is removed, obtains molybdenum titanium target base.
Optionally, the technological temperature of the isostatic cool pressing technique is 25 DEG C to 200 DEG C, and environmental stress is
150MPa to 180MPa, the process time under the technological temperature and environmental stress are 10 minutes to 30
Minute.
Optionally, the heat and other static pressuring processes include to heat technique and HIP sintering technique.
Optionally, the technological temperature of the heating technique is 250 DEG C to 500 DEG C, is incubated 3 at said temperatures
Hour was to 4 hours.
Optionally, the technological temperature of the HIP sintering technique is 1000 DEG C to 1350 DEG C, environment pressure
It is by force 120MPa to 180MPa, the process time under the technological temperature and environmental stress is 3 hours to 6
Hour.
Optionally, the step of vacuum canning being vacuumized includes：By the molybdenum, titanium mixed-powder base
After material is positioned over jacket, the jacket is vacuumized, the vacuum after vacuumizing in the jacket is extremely
It is 2E-3Pa less, and during the heat and other static pressuring processes, makes the vacuum canning keep sealing state.
Optionally, the molybdenum after the isostatic cool pressing, titanium mixed-powder blank are loaded after vacuum canning, right
Before the vacuum canning is vacuumized, the manufacture method also includes：Shut by the way of argon arc welding
The vacuum canning；A deaeration pipe is drawn in the vacuum canning；
The vacuum step is vacuumized to vacuum canning by the deaeration pipe.
Optionally, before removing the vacuum canning, also include：Pressure cooling is carried out to the vacuum canning.
Optionally, the step of providing molybdenum, titanium mixed-powder includes：Molybdenum powder and titanium valve are provided；Using mixed powder
Machine carries out mechanical mixture to molybdenum, titanium powder.
Optionally, the mass ratio of the molybdenum powder and titanium valve is 8.95:1 to 9.05:1..
Optionally, the step of providing molybdenum, titanium mixed-powder also includes：Mechanical mixture is being carried out with mixed powder machine
Before, being filled with inert gas into mixed powder machine makes to reach malleation in mixed powder machine.
Optionally, during molybdenum powder and titanium valve being carried out mechanical mixture with mixed powder machine, add in mixed powder machine
Enter medium ball, the medium ball is titanium ball or molybdenum ball.
Optionally, the mass ratio of the medium ball and the molybdenum, titanium mixed-powder is 2.5：1 to 3.5：1.
Compared with prior art, technical scheme has advantages below：Isostatic cool pressing work is first adopted
Skill molybdenum, titanium mixed-powder are carried out densified first and preforming, formed consistency 60% or so molybdenum,
Titanium mixed-powder blank, allows follow-up heat and other static pressuring processes to enter the molybdenum, titanium mixed-powder blank
Row is preferably fine and close；Then heat and other static pressuring processes, the heat are carried out to the molybdenum, titanium mixed-powder blank
Isostatic pressing process includes：First the molybdenum, titanium mixed-powder blank are loaded in jacket and the jacket is taken out
Vacuum is forming after vacuum canning, then passes through to apply to the vacuum canning each to impartial and omnibearing gas
Body pressure is to carry out HIP sintering technique to the molybdenum, titanium mixed-powder blank.By described heat etc.
Static pressure technique, final obtain consistency high, consistent internal structure, and meet the molybdenum titanium of dimensions
Target blankss.
Further, during forming molybdenum titanium target base using said method, using vacuum canning rather than mould,
And the jacket unbounded size system, it is to avoid the problem limited by die size and intensity by target blankss size.
Further, mechanical mixture is carried out to molybdenum powder and titanium valve using mixed powder machine before isostatic cool pressing technique,
So that the molybdenum powder and titanium valve is more uniformly mixed, prepare composition uniform and the molybdenum of segregation-free, titanium
Mixed-powder, efficiently solves molybdenum, titanium mixed-powder and causes because the density difference of molybdenum powder and titanium valve is larger
Segregation lamination, improve processing performance and the mechanical performance of molybdenum titanium target base.
Description of the drawings
Fig. 1 is the schematic flow sheet of one embodiment of preparation method of molybdenum titanium target base of the present invention；
Fig. 2 be molybdenum titanium target base of the present invention one embodiment of preparation method in powder hybrid technique technological principle
Figure；
Fig. 3 be molybdenum titanium target base of the present invention one embodiment of preparation method in isostatic cool pressing technique technological principle
Figure；
Fig. 4 be molybdenum titanium target base of the present invention one embodiment of preparation method in vacuum canning mould assembling illustrate
Figure；
Fig. 5 be molybdenum titanium target base of the present invention one embodiment of preparation method in heat and other static pressuring processes technological principle
Figure.
Specific embodiment
Prior art mainly realizes the manufacture of molybdenum titanium target base using the method for hot pressed sintering, and methods described needs
The mould that size design according to molybdenum titanium target base matches, therefore the molybdenum titanium target base size is by the mould
Tool size and the restriction of intensity, this mould costly and are easier to be lost.Additionally, during hot pressed sintering
Uniaxially pressurize, its action direction is only single direction, in the molybdenum titanium target base that is made using methods described
The uniformity of portion's institutional framework is poor, consistency is relatively low, it is impossible to meets and requires higher and higher sputtering technology.
In order to solve the above problems, the present invention provides a kind of preparation method of molybdenum titanium target base, methods described bag
Include：Molybdenum, titanium mixed-powder are provided；Isostatic cool pressing technique is carried out to the molybdenum, titanium mixed-powder, is formed
Molybdenum, titanium mixed-powder blank；The molybdenum, titanium mixed-powder blank are loaded jacket and the jacket is taken out
Vacuum carries out heat and other static pressuring processes, shape to be formed after vacuum canning to the molybdenum, titanium mixed-powder blank
Become molybdenum titanium alloy；The vacuum canning is removed, obtains molybdenum titanium target base.
It is densified first and preforming by first being carried out to molybdenum, titanium mixed-powder using isostatic cool pressing technique,
Consistency is formed in 60% or so molybdenum, titanium mixed-powder blank, follow-up heat and other static pressuring processes are made to institute
Stating molybdenum, titanium mixed-powder blank can carry out more preferable densification；Then to the molybdenum, titanium mixed-powder base
Material carries out heat and other static pressuring processes, and the heat and other static pressuring processes include：First by the molybdenum, titanium mixed-powder base
Material loads in jacket and vacuumizes the jacket to be formed after vacuum canning, then passes through to the vacuum packet
Set applies each to impartial and omnibearing gas pressure to carry out heat etc. to the molybdenum, titanium mixed-powder blank
Static pressure sintering process.By the heat and other static pressuring processes, final obtain consistency high, internal structure equal
Even, and meet the molybdenum titanium target base of dimensions
Further, during forming molybdenum titanium target base using said method, using vacuum canning rather than mould,
And the jacket unbounded size system, it is to avoid the molybdenum titanium target base size is limited by die size and intensity
Problem.
Understandable for enabling the above objects, features and advantages of the present invention to become apparent from, below in conjunction with the accompanying drawings
Specific embodiment to the present invention is described in detail.
The schematic flow sheet that Fig. 1, Fig. 1 are one embodiments of preparation method of molybdenum titanium target base of the present invention is refer to,
The preparation method of the present embodiment molybdenum titanium target base includes following basic step：
Step S1：Molybdenum powder and titanium valve are provided；
Step S2：Molybdenum powder and titanium valve are mixed, is formed molybdenum, titanium mixed-powder；
Step S3：Isostatic cool pressing technique is carried out to molybdenum, titanium mixed-powder, forms molybdenum, titanium mixed-powder base
Material；
Step S4：Molybdenum after isostatic cool pressing, titanium mixed-powder blank are loaded in vacuum canning, then right
The vacuum canning is vacuumized；
Step S5：Vacuum canning after to vacuumizing is heated and is incubated, and is completed densified again；
Step S6：HIP sintering work is carried out to completing molybdenum densified again, titanium mixed-powder blank
Skill, forms molybdenum titanium alloy；
Step S7：Pressure cooling is carried out to vacuum canning；
Step S8：Vacuum canning is removed, obtains molybdenum titanium target base.
Preparation method in order to the molybdenum titanium target base of the embodiment of the present invention is better described, below in conjunction with reference
Fig. 2 to Fig. 5, the specific embodiment to the present invention are further described.
Step S1, provides molybdenum powder 101 and titanium valve 102 (as shown in Figure 2) first.
In the present embodiment, the molybdenum powder 101 and titanium valve 102 are the high-purity powder of purity more than 99.9%,
And the mass ratio of the molybdenum powder 101 and titanium valve 102 is 8.95:1 to 9.05:1.The granularity of the molybdenum powder 101
For 4 μm to 5 μm, the granularity of the titanium valve 102 is 40 μm to 45 μm.
It should be noted that due to the sieve of screen cloth adopted when the molybdenum powder 101 and titanium valve 102 is prepared
Eye size is 45 μm, is therefore respectively less than 45 μm by its granularity of powder of the sieve mesh.
Then execution step S2, molybdenum powder 101 and titanium valve 102 are mixed, and form molybdenum, titanium mixed powder
Last 103 (as shown in Figure 2).
In the present embodiment, forming the molybdenum, the concrete technology of titanium mixed-powder 103 is：By molybdenum powder 101
With titanium valve 102 according to mass ratio be 8.95:1 to 9.05:1 ratio carries out mechanical mixture with mixed powder machine, tool
Depending on actual size of the body mass ratio according to molybdenum titanium target base.
When the incorporation time of the mechanical mixture is very few, mixed due to the molybdenum powder 101 and titanium valve 102
Close uniform not enough, easily cause the molybdenum, titanium mixed-powder 103 because of molybdenum powder 101 and titanium valve 102
The segregation lamination that density difference is larger and causes, and then reduce processing performance and the machinery of molybdenum titanium target base
Performance；When the incorporation time of the mechanical mixture is excessive, due to the molybdenum powder 101 and titanium valve 102
Mix through abundant and uniform, effect will not be produced again, can only waste the process time, increase process costs.
For this purpose, in the present embodiment, the incorporation time of the mechanical mixture is 23 hours to 25 hours.
The blending processes of powders adopts dry pigmentation.It should be noted that carrying out the molybdenum powder 101 and titanium valve
Before 102 mixing, also into mixed powder machine, inert gas is filled with so that mixing in powder machine and reaches malleation, to exclude
Air in mixed powder machine cavity body, can so prevent from mixing the molybdenum powder 101 and titanium valve 102 during powder
Raw oxidation.The inert gas adopted in the present embodiment is argon gas, ensures argon gas full of mixed in mixed process
Powder machine cavity body, and the pressure of the argon gas is more than atmospheric pressure, in case air is penetrated in the mixed powder machine cavity body.
In order to preferably mix the molybdenum powder 101 and titanium valve 102, the molybdenum powder 101 is being carried out
In the mixed process of titanium valve 102, in mixed powder machine, medium ball (mark) is added, after mixed powder is uniform,
The medium ball is taken out.In the present embodiment, in order to prevent introducing other impurities, the material of the medium ball
Material is identical with the material of the molybdenum powder 101 and titanium valve 102, i.e., described medium ball is titanium ball or molybdenum ball.When
When the medium ball is titanium ball, the mass ratio of the titanium ball and the molybdenum, titanium mixed-powder 103 is 2.5：
1 to 3.5：1；When the medium ball is molybdenum ball, the molybdenum ball and the molybdenum, titanium mixed-powder 103
Mass ratio is 2.5：1 to 3.5：1.
In conjunction with referring to Fig. 3, execution step S3, molybdenum, titanium mixed-powder 103 (as shown in Figure 2) are carried out
Isostatic cool pressing technique, forms molybdenum, titanium mixed-powder blank 303.
Specifically, the molybdenum, titanium mixed-powder 103 are loaded in hollow mould 300, then will be described
Hollow mould 300 is inserted in cold isostatic press, by applying from each side to the hollow mould 300
To pressure, isostatic cool pressing technique is carried out to the molybdenum, titanium mixed-powder 103, complete densified first,
Form molybdenum, titanium mixed-powder blank 303.
In the present embodiment, the technological temperature of the isostatic cool pressing technique is 25 DEG C to 200 DEG C of normal temperature, environment
Pressure is 150MPa to 180MPa, that is to say, that apply from each side to the hollow mould 300
To pressure size be 150MPa to 180MPa, technique under the technological temperature and environmental stress when
Between be 10 minutes to 30 minutes, due to temperature, the pressure all same of the isostatic cool pressing technique all directions,
By the technique advance comprising, molybdenum, the titanium mixed powder of half densification of consistency about 60% or so is obtained
Last blank 303, while allow subsequent forming technique preferably fine and close.
When environmental stress is less than 10 minutes less than 150MPa or process time, due to the hollow mold
The pressure that tool 300 applies not enough or are applied the stressed time and are fallen short of, it is impossible to reach molybdenum, the titanium of half densification
Mixed-powder blank 303.As the technological temperature of isostatic cool pressing technique is room temperature, cold etc. quiet at such a temperature
Die pressing product increases pressure after reaching certain consistency or the increase process time is difficult to further densification, therefore presses
Power has not produced effect higher than 180MPa or process time more than 30 minutes, makes cost become big on the contrary,
And waste the process time.
In conjunction with Fig. 4 is referred to, execution step S4, by the molybdenum after isostatic cool pressing, titanium mixed-powder blank 303
Load in jacket, then the jacket is vacuumized to form vacuum canning 401.
Specifically, the good molybdenum of the isostatic cool pressing, titanium mixed-powder blank 303 are loaded after jacket, right
Before the jacket is vacuumized, the jacket is shut, the jacket draws a deaeration pipe 405 simultaneously
Vacuumized by 405 pairs of jackets of the deaeration pipe, form vacuum canning 401.
In the present embodiment, the jacket includes jacket thin-walled 402, jacket lower cover 403 and jacket upper cover plate
404；The jacket uses stainless steel welded shaping of the thickness for 2mm to 3mm.By described stainless
The jacket intensity that Steel material is made is larger, can prevent the jacket under the heating condition of subsequent technique from sending out
Raw deformation or cracking.
In the present embodiment, first by the jacket thin-walled 402 and jacket lower cover by way of argon arc welding
403 are welded, and are then loaded the good molybdenum of isostatic cool pressing, titanium mixed-powder blank 303 unwelded described
In the jacket of jacket upper cover plate 404, again will by way of argon arc welding after covering jacket upper cover plate 404
The jacket upper cover plate 404 is soldered to the upper surface of the jacket thin-walled 402, is shut the jacket.
The jacket draws a deaeration pipe 405, and the deaeration pipe 405 is connected with vacuum equipment, will dress
There are the molybdenum, the jacket of titanium mixed-powder blank 303 to be placed in heating furnace, open vacuum equipment
The jacket is vacuumized so that vacuum canning 401 is formed, reach the vacuum in the vacuum canning 401
2E-3Pa.
With continued reference to Fig. 4, execution step S5, to vacuumizing after vacuum canning 401 heated and protected
Temperature, completes densified again.
In the present embodiment, when the vacuum in the vacuum canning 401 reaches 2E-3Pa, start heating
Stove is heated to the vacuum canning 401；The vacuum canning 401 is heated to 250 DEG C extremely by room temperature
After 500 DEG C, and 3 hours are incubated to 4 hours at said temperatures, complete densified again, formation densification
Spend more preferable molybdenum, titanium mixed-powder blank 303.
In heating furnace intensification and insulating process, vacuum equipment is constantly in opening, so that described
Vacuum in vacuum canning 401 is all the time maintained at least at 2E-3Pa；After insulation terminates, from heating furnace
The vacuum canning 401 is taken out, in the state of continuing to keep its inner vacuum, the deaeration pipe 405 is closed,
The vacuum canning 401 is made to be internally formed a closed vacuum environment.
In conjunction with Fig. 5 is referred to, execution step S6, to completing molybdenum densified again, titanium mixed-powder blank
303 carry out HIP sintering technique, form molybdenum titanium alloy.
Specifically, molybdenum, titanium mixed-powder blank 303 and the internal vacuum for airtight vacuum environment will be equipped with
Jacket 401 is placed in high temperature insostatic pressing (HIP) stove, first carries out increasing temperature and pressure, makes technological temperature reach 1000 DEG C extremely
1350 DEG C, environmental stress reach 120MPa to 180MPa, that is to say, that make the vacuum canning 401
It is subject to from each gas pressure to impartial and omnibearing 150MPa to 180MPa；Walk in increasing temperature and pressure
After rapid, under the technological temperature and environmental stress, it is incubated 3 hours to 6 hours.
In the present embodiment, technological temperature, environmental stress and temperature retention time optimized collocation is done.
When the technological temperature is less than 1000 DEG C, due to temperature not enough, cause the molybdenum, titanium mixed powder
Cannot thoroughly be diffused between each material of last blank 303, affect the molybdenum titanium target base after sinter molding
Quality；When the technological temperature is higher than 1350 DEG C, too high technological temperature makes the vacuum canning 401
In rugged environment, easily cause the vacuum canning 401' to deform upon or ftracture, what is more may be used
Can melt can the vacuum canning 401 or the vacuum canning 401 be made with the molybdenum, titanium mixed powder
Last blank 303 reacts, and causes scrapping for molybdenum titanium target base.
When the environmental stress less than 120MPa when, due on the vacuum canning 401 apply power not
Enough big, cause the molybdenum, titanium mixed-powder blank 303 cannot thoroughly sinter molding, and final obtain
Molybdenum titanium target base consistency poor；When the environmental stress is more than 180MPa, for having completed most
The molybdenum of good sinter molding, titanium mixed-powder blank 303, it is difficult to fine and close further, then improve environment
Pressure is high to acquisition consistency, consistent internal structure molybdenum titanium target base is nonsensical, wastes energy on the contrary
Source, or even too high environmental stress may make the vacuum canning 401 deform upon or ftracture.
When the temperature retention time was less than 3 hours, due under proper temperature and pressure, in the vacuum
Applying the stressed time on jacket 401 falls short of, and causes the molybdenum, titanium mixed-powder blank 303 cannot
Fully sintered shaping, so that the consistency of the molybdenum titanium target base for obtaining is poor；When temperature retention time is little more than 6
Constantly, for the molybdenum, the titanium mixed-powder blank 303 for having completed best sinter molding, it is difficult to enter
One step is fine and close, is further added by temperature retention time and wastes the energy on the contrary, reduces the manufacture efficiency of the molybdenum titanium target base.
It should be noted that for the sinter molding effect for improving the molybdenum, titanium mixed-powder blank 303,
During increasing temperature and pressure, heating rate can be 250 DEG C/H to 350 DEG C/H to the present embodiment, rate of pressure rise
Can be 20MPa/H to 30MPa/H.
When heating rate is higher than 350 DEG C/H, the furnace temperature in high temperature insostatic pressing (HIP) stove is not easy diffusion, causes heat
Non-uniform temperature in isostatic pressed stove, produces furnace temperature deviation, affects the molybdenum, titanium mixed-powder blank 303
Sinter molding；When heating rate is less than 250 DEG C, the heating-up time is long, causes the process time to lengthen,
So that production efficiency reduces, production cost is uprised.Therefore the heating rate is preferably 250 DEG C/H extremely
350℃/H.In order to coordinate the heating rate, the rate of pressure rise is preferably 20MPa/H to 30MPa/H,
So that the technological temperature and environmental stress almost reach setting value in the same time.
Execution step S7, carries out pressure cooling to the vacuum canning 401 (as shown in Figure 5).
In the present embodiment, after the molybdenum, titanium mixed-powder blank 303 complete hip moulding, close
High temperature insostatic pressing (HIP) stove, makes the vacuum canning 401 go naturally to press and be cooled to room using the method for along with the furnace cooling
25 DEG C to 200 DEG C of temperature, methods described avoids the rapid drawdown of temperature so that the molybdenum titanium alloy after shaping is more
Solid.
Execution step S8, removes vacuum canning 401 (as shown in Figure 5), obtains molybdenum titanium target base.
Specifically, the vacuum canning 401 is gone, after pressure cooling, to be machined work by turnery processing etc.
The sheath material on the molybdenum titanium alloy surface is removed by skill, obtains molybdenum titanium target base.
The molybdenum titanium target base subsequently also needs to be welded with backboard as the material of manufacture molybdenum-titanium alloy target
Connect, form molybdenum-titanium alloy target.
Although the present invention oneself with preferred embodiment disclose as above, the present invention is not limited to this.Any
Skilled person, without departing from the spirit and scope of the present invention, can all make various changes or modifications,
Therefore protection scope of the present invention should be defined by claim limited range.
Claims (13)
1. a kind of manufacture method of molybdenum titanium target base, it is characterised in that include：
Molybdenum, titanium mixed-powder are provided；
Isostatic cool pressing technique is carried out to the molybdenum, titanium mixed-powder, forms molybdenum, titanium mixed-powder blank；
The molybdenum, titanium mixed-powder blank are loaded jacket and the jacket is vacuumized to form vacuum packet
After after set, heat and other static pressuring processes are carried out to the molybdenum, titanium mixed-powder blank, form molybdenum titanium alloy；
The vacuum canning is removed, obtains molybdenum titanium target base.
2. the manufacture method of molybdenum titanium target base as claimed in claim 1, it is characterised in that the isostatic cool pressing work
The technological temperature of skill is 25 DEG C to 200 DEG C, and environmental stress is 150MPa to 180MPa, in the technique
Process time at temperature and environmental stress is 10 minutes to 30 minutes.
3. the manufacture method of molybdenum titanium target base as claimed in claim 1, it is characterised in that the high temperature insostatic pressing (HIP) work
Skill includes to heat technique and HIP sintering technique.
4. the manufacture method of molybdenum titanium target base as claimed in claim 3, it is characterised in that the heating technique
Technological temperature is 250 DEG C to 500 DEG C, is incubated 3 hours to 4 hours at said temperatures.
5. the manufacture method of molybdenum titanium target base as claimed in claim 3, it is characterised in that the high temperature insostatic pressing (HIP) burns
The technological temperature of knot technique is 1000 DEG C to 1350 DEG C, and environmental stress is 120MPa to 180MPa,
Process time under the technological temperature and environmental stress is 3 hours to 6 hours.
6. the manufacture method of molybdenum titanium target base as claimed in claim 3, it is characterised in that to the vacuum canning
The step of vacuumizing includes：The molybdenum, titanium mixed-powder blank are positioned over after jacket, to the jacket
Vacuumized, the vacuum after vacuumizing in the jacket is at least 2E-3Pa, and quiet in described heat etc.
The vacuum canning is made to keep sealing state in pressure technical process.
7. the manufacture method of molybdenum titanium target base as claimed in claim 1, it is characterised in that by the isostatic cool pressing
After molybdenum afterwards, titanium mixed-powder blank load vacuum canning, before vacuumizing to the vacuum canning, institute
Stating manufacture method also includes：The vacuum canning is shut by the way of argon arc welding；In the vacuum packet
A deaeration pipe drawn by set；
The vacuum step is vacuumized to vacuum canning by the deaeration pipe.
8. the manufacture method of molybdenum titanium target base as claimed in claim 1, it is characterised in that remove the vacuum packet
Before set, also include：Pressure cooling is carried out to the vacuum canning.
9. the manufacture method of molybdenum titanium target base as claimed in claim 1, it is characterised in that molybdenum, titanium mixing are provided
The step of powder, includes：Molybdenum powder and titanium valve are provided；Mechanical mixture is carried out to molybdenum, titanium powder using mixed powder machine.
10. the manufacture method of molybdenum titanium target base as claimed in claim 9, it is characterised in that the molybdenum powder and titanium valve
Mass ratio be 8.95:1 to 9.05:1.
The manufacture method of 11. molybdenum titanium target bases as claimed in claim 9, it is characterised in that molybdenum, titanium mixing are provided
The step of powder, also includes：Before mechanical mixture being carried out with mixed powder machine, be filled with inert gas into mixed powder machine
Make to mix in powder machine and reach malleation.
The manufacture method of 12. molybdenum titanium target bases as claimed in claim 9, it is characterised in that molybdenum powder and titanium valve are used
During mixed powder machine carries out mechanical mixture, medium ball is added in mixed powder machine, the medium ball is titanium ball
Or molybdenum ball.
The manufacture method of 13. molybdenum titanium target bases as claimed in claim 12, it is characterised in that the medium ball and
The molybdenum, the mass ratio of titanium mixed-powder are 2.5：1 to 3.5：1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510534809.7A CN106475566A (en) | 2015-08-27 | 2015-08-27 | The manufacture method of molybdenum titanium target base |
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| CN108580905A (en) * | 2018-01-22 | 2018-09-28 | 宁波江丰电子材料股份有限公司 | Preparation method, chromium tantalum-titanium alloy sputtering target material and the application of chromium tantalum-titanium alloy sputtering target material |
| CN111151763A (en) * | 2018-11-07 | 2020-05-15 | 宁波江丰电子材料股份有限公司 | Preparation method of tungsten-titanium alloy target material |
| CN111394705A (en) * | 2020-03-19 | 2020-07-10 | 河北宏靶科技有限公司 | Titanium-aluminum-molybdenum alloy target material and preparation method thereof |
| CN113718212A (en) * | 2021-08-27 | 2021-11-30 | 宁波江丰电子材料股份有限公司 | Preparation process of molybdenum-titanium target blank |
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| CN108580905A (en) * | 2018-01-22 | 2018-09-28 | 宁波江丰电子材料股份有限公司 | Preparation method, chromium tantalum-titanium alloy sputtering target material and the application of chromium tantalum-titanium alloy sputtering target material |
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| CN111151763A (en) * | 2018-11-07 | 2020-05-15 | 宁波江丰电子材料股份有限公司 | Preparation method of tungsten-titanium alloy target material |
| CN111394705A (en) * | 2020-03-19 | 2020-07-10 | 河北宏靶科技有限公司 | Titanium-aluminum-molybdenum alloy target material and preparation method thereof |
| CN113718212A (en) * | 2021-08-27 | 2021-11-30 | 宁波江丰电子材料股份有限公司 | Preparation process of molybdenum-titanium target blank |
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