CN106338840A - Surface wave field enhancement tunable total internal reflection optical excitation device - Google Patents
Surface wave field enhancement tunable total internal reflection optical excitation device Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/56—Optics using evanescent waves, i.e. inhomogeneous waves
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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Abstract
The invention belongs to the technical field of guide wave optics and optical measurement, and specifically relates to a surface wave field enhancement tunable total internal reflection optical excitation device. The device comprises a precise lift platform, an inverted-trapezoid prism, a collimation excitation beam, ultrathin plane slide glass and an optical and spectral measurement system. A certain air gap is kept between the inverted-trapezoid prism and the ultrathin plane slide glass; and a certain air gap is kept between a sample to be measured and the optical and spectral measurement system. Under the condition that the incidence angle is larger than the internal total reflection angle of the upper surface of the inverted-trapezoid prism, by selecting different incidence angles to motivate a horizontal guided wave mode in the ultrathin plane slide glass, by utilizing a surface evanescent wave filed formed on the upper surface thereof through the guided waves to carry out optical excitation on the sample to be measured, and by strictly controlling the distance between the inverted-trapezoid prism and the ultrathin plane slide glass by utilizing the precise lift platform, continuous adjustment of field enhancement of evanescent waves on the upper surface of the ultrathin plane slide glass can be realized. The surface wave field enhancement tunable total internal reflection optical excitation device has important applications in the aspects of measurement of fluorescence spectrum, absorption spectrum and Raman spectrum of a micro-nano material and the like.
Description
Technical field
The invention belongs to Wave Guiding Optics and field of optical measuring technologies are and in particular to a kind of wave field enhancing in surface is tunable
Total internal reflection optical excitation apparatus.
Background technology
Total internal reflection fluorescence spectrum (total internal reflection fluorescence (tirf)), Yi Jibiao
Face strengthen Raman spectrum be research table/boundary material structure two effective ways, they be all using surface evanescent wave to point
Son carries out shallow-layer and excites, and produces excitation without molecules a large amount of in measuring targets, such that it is able to realize selectively entering
Row measurement and analysis.But, directly utilize the evanescent wave that high index prism surface produces, its intensity is very weak, typically can only reach
Intensity to incident light.For this reason, the evanescent wave of higher-strength to be obtained, only increase incident intensity.This for even with
As the system of light source, the increase rate of luminous intensity is also very limited amount of to laser, more still more utilizes incoherent light source
Situation.
The present invention proposes a kind of surface wave field and strengthens tunable total internal reflection optical excitation apparatus, and it utilizes plane light wave
Lead produced surface evanescent wave, and non-immediate utilization prism surface produces, its intensity can be than the intensity of incident light source itself
Improve the 1-3 order of magnitude, and this enhancing can be realized continuously adjusting.The surface evanescent wave intensity of planar optical waveguide, mainly
Degree of regulation restriction by the coupling angle (abbreviation synchro angle) of guided wave mode in planar optical waveguide.Synchro angle controls more accurate,
Obtained surface evanescent wave is stronger, but it is also higher to the imbalance susceptibility of angle.In order to overcome this problem, it is proposed that
Realized in the case of limited incidence angle degree of regulation by the method adjusting the coupling space of prism and planar optical waveguide
Enhanced to surface evanescent wave field continuously adjust.
Advantages of the present invention, be with the existing displacement governor motion with nano-precision come back-off to Angle ambiguity essence
The excessive demand of degree, thus in the case of existing angle control precision, can carry out effectively to the field intensity of surface evanescent wave
Adjust.Meanwhile, the evanescent wave intensity adjustment method of the present invention is not related to the change of the polarization state to incident light, therefore in system no
Expensive polarizer (especially centering far infrared band) need to be installed.
Content of the invention
It is an object of the invention to provide a kind of total internal reflection that the field intensity of surface evanescent wave effectively can be adjusted
Optical excitation device.
Directly utilize in prism surface light surface evanescent wave produced by total reflection principle intensity generally with incident rib
The intensity of the light of mirror bottom surface quite, then can reach ratio using surface evanescent wave produced by the guided wave mode in planar optical waveguide
The enhancing of the much higher light field of incident field, this enhancing can reach several orders of magnitude.But, the surface of planar optical waveguide is suddenly
The misalignment rate of the coupling synchro angle to waveguide mode for the intensity of wave that dies is very sensitive, so that it cannot by adjust synchro angle reach right
The purpose that the intensity of evanescent wave is adjusted.
In the structure of the planar optical waveguide of prism-coupled, for the optical guided wave that excited of synchro angle of a finite accuracy
Pattern, its evanescent wave intensity is a relative slowly varying relation with prism and the coupling space of planar optical waveguide, Ke Yitong
Cross and change the method for this coupling space to realize in the case of existing angle control precision, the surface of planar optical waveguide suddenly being died
Intensity of wave carries out the purpose of continuous control.
Based on above-mentioned principle, the present invention devises a kind of surface wave field tunable total internal reflection optical of enhancing and excites dress
Put, using the displacement governor motion of nano-precision, 2 orders of magnitude be can reach to surface wave field enhanced tuning amount.Its structure is such as
Shown in Fig. 1, specifically include: an accurate hoistable platform, an inverted trapezoidal prism, a branch of collimation excitation beam, one piece ultra-thin flat
Face object carrier, and a set of optics and spectral measurement system；Wherein, inverted trapezoidal prism is fixed on above-mentioned precision hoistable platform
On, and make prism base holding level；It is followed successively by super-thin plane object carrier, optics and spectral measurement system above inverted trapezoidal prism
System, maintains certain the air gap, super-thin plane object carrier is used for putting between inverted trapezoidal prism and super-thin plane object carrier
Put sample to be measured, between sample to be measured and optics and spectral measurement system, maintain certain the air gap；Collimated incident light
Bundle be aligned inverted trapezoidal prism, the interior incidence angle θ of its upper bottom edge for inverted trapezoidal prism is (with respect to prism surface normal n)
Critical angle more than its experiences total internal reflection；And incidence angle θ continuously adjustable；Internal reflection light beam is received by reflecting light collector
Collection.
In the present invention, described precision hoistable platform be used for control between inverted trapezoidal prism and super-thin plane object carrier away from
From, it is possible to achieve enhanced to the field of the evanescent wave of super-thin plane object carrier upper surface continuously adjust, accurate hoistable platform
Positioning precision can reach nanoscale, and total kilometres are no less than 500 nanometers.
In the present invention, described inverted trapezoidal prism is the glass with high index (more than 1.7), such as dense flint glass.
In the present invention, described collimated incident beam is collimated light beam, is a parallel collimated beam, and it is for above-mentioned ladder
The interior incidence angle θ of the upper bottom edge of shape prism (is greater than the critical of its experiences total internal reflection with respect to prism surface normal n)
Angle.And incidence angle θ continuously adjustable, the precision of regulation reaches second level.
In the present invention, described super-thin plane object carrier, is a plate glass, and thickness is less than 50 microns, and collimation
Excitation beam place wave band is transparent, and its refractive index is less than inverted trapezoidal prism.This super-thin plane object carrier is at work
Play planar optical waveguide effect, for the surface of surface generation thereon evanescent wave, its locus is relatively fixed in whole device.
In the present invention, certain the air gap to be kept in described inverted trapezoidal prism and super-thin plane object carrier, that is, fall
Dove prism is not connected with each other with super-thin plane object carrier, has a layer of air gap therebetween, can be by above-mentioned accurate lifting
Platform is adjusted.
In the present invention, between described sample to be measured and optics and spectral measurement system, keep certain the air gap, that is,
To there is certain air between the light collector unit (as microcobjective) in testing sample to be kept and optics and spectral measurement system
It is impossible to be moistened with oil immersion, this spacing is typically no less than 1 micron in gap.
In the present invention, described optics and spectral measurement system, including the opto-electronic conversion mechanism of luminous intensity measurement, and spectrum is surveyed
Measuring mechanism, is used for carrying out fluorescence spectrum, absorption spectrum and raman spectroscopy measurement, and relevant data acquisition and process.
In the present invention, in the case that incidence angle is more than inverted trapezoidal prism upper surface inner total reflection angle, select different entering
Firing angle, to excite the horizontal guided wave mode in super-thin plane object carrier, is suddenly died using this guided wave surface that surface is formed thereon
Wave field carries out optical excitation to testing sample, strictly controls inverted trapezoidal prism and super-thin plane object carrier with accurate hoistable platform
Between distance, it is possible to achieve enhanced to the field of the evanescent wave of super-thin plane object carrier upper surface continuously adjust, its regulated quantity
Can reach 2 orders of magnitude, with selected guided wave mode and the precision of incident beam angle controlling organization that adopted is relevant, this
The device of invention can have important application at aspects such as the fluorescence spectrum of micro-nano material, absorption spectrum and raman spectroscopy measurements.
The invention has the advantages that
1st, be with the existing displacement governor motion with nano-precision come back-off the excessive demand to angle control precision.From
And in the case of existing angle control precision, the field intensity of surface evanescent wave effectively can be adjusted；
2nd, for the instrument system already equipped with nanometer displacement controlling organization in existing measuring system, the present invention can pass through
Simply install a super-thin plane object carrier additional it is possible to realize being produced by total internal reflection on prism surface to original
The order of magnitude of surface evanescent wave field enhancing, and can be continuously adjusted with this enhancing.Therefore can be to existing instrument
Device equipment carries out effective efficiency upgrading；
3rd, the evanescent wave intensity adjustment method of the present invention is not related to the change of the polarization state to incident light, therefore need not pacify in system
Fill expensive polarizer, especially centering far infrared band, polarizer and its governor motion are all very expensive.Therefore have
Help reduce system cost.
Brief description
Fig. 1 is that a kind of surface wave field strengthens tunable total internal reflection optical excitation apparatus schematic diagram.
Fig. 2 is the spatial variations situation of surface evanescent field strength.Wherein, (1) left side y-axis (prismatic data point), is rib
The evanescent wave that mirror couple planar light guide surface produces, on the right of (2), y axle (linear data) is only by prism total internal reflection
The evanescent wave producing on surface, in prism in the case of two, incidence angle is 38.3594 °.
Fig. 3 be the evanescent wave that produces with only prism surface of prism-coupled planar optical waveguide surface evanescent wave maximum
The situation of change of the coupling space with prism-slab guide for the strength ratio of big value.Wherein, in prism, incidence angle is 38.3594 °
(precision be decimal point after the 4th), 3 articles of curves represent incidence angle situation of change of the 5th after decimal point.
In figure label: 1 is accurate hoistable platform, 2 is collimation excitation beam, and 3 is inverted trapezoidal prism, and 5 carry for super-thin plane
Thing glass, 4 is the air gap between inverted trapezoidal prism and super-thin plane object carrier, and 6 is reflection light collector, and 7 is to survey
Amount sample, 9 is optics and spectral measurement system, and 8 is the air gap between sample to be measured and optics and spectral measurement system.
Specific embodiment
The surface wave field of present invention design strengthens tunable total internal reflection optical excitation apparatus, specifically includes: an essence
Close hoistable platform, an inverted trapezoidal prism, the collimation excitation beam of a branch of experiences total internal reflection, one piece of super-thin plane loading glass
Glass, will keep certain the air gap between inverted trapezoidal prism and super-thin plane object carrier, and a set of optics and spectral measurement system
System, keeps certain the air gap between sample to be measured and optics and spectral measurement system.It is more than inverted trapezoidal prism in incidence angle
In the case of the inner total reflection angle of upper surface, select different incidence angles to excite the horizontal guided wave mould in super-thin plane object carrier
Formula, carries out optical excitation using this guided wave surface evanescent wave field that surface is formed thereon to testing sample.Flat with accurate lifting
Platform strictly controls the distance between inverted trapezoidal prism and super-thin plane object carrier, it is possible to achieve to super-thin plane object carrier upper table
The field of the evanescent wave in face is enhanced to be continuously adjusted, its regulated quantity, typically can reach 2 orders of magnitude, with selected guided wave mode
And the precision of the incident beam angle governor motion being adopted is relevant, assembly of the invention can in the fluorescence spectrum of micro-nano material,
Absorption spectrum, and the aspect such as raman spectroscopy measurement has important application.Structural representation is as shown in Figure 1.
Structure according to Fig. 1, selectes a laser work wavelength such as: 632.8nm, inverted trapezoidal prism material choosing weight
Flint glass, refractive index is 1.85, and super-thin plane object carrier is taken as flint glass, and refractive index is 1.60, and thickness is 40 microns.
The air gap between inverted trapezoidal prism and super-thin plane object carrier is initially set to 0.5 micron.
A branch of collimated light beam according to shown in Fig. 1 light path incidence inverted trapezoidal prism upper bottom edge, in facing more than total internal reflection
In the case of boundary angle, by inverted trapezoidal prism, incident light can go out the guided wave mould of many in super-thin plane object carrier internal excitation
Formula, adjusts the incident angle of incident light, can therefrom select corresponding guided wave.If incident light on the internal upper bottom edge of prism for the light
Strong is 1, taking H mode (te ripple) as a example, incident light inside prism, the air gap, and super-thin plane object carrier internal and
The field intensity expression formula of the light field of surface each several part, all can be write out using strict coupled-mode theory row, and according to te ripple electricity
Field vector carries out quantitative calculating in the condition of continuity of boundary.Equally, only formed by prism surface experiences total internal reflection
Surface evanscent field it is also possible to accordingly theory calculated.Correlation calculation result is as shown in Fig. 2 and Fig. 3.
Fig. 2 is shown in the prism-coupled planar optical waveguide table that incidence angle in prism in structure shown in Fig. 1 is when 38.3594 °
Strength Space change (prismatic data, left side y-axis) of face evanscent field, and the Strength Space of the only evanscent field of prism surface
Situation of change (linear data, the right y axle).From in figure data, produced by prism-coupled planar optical waveguide, surface is suddenly
The intensity (left side y-axis) of field of dying is the strongest in glass surface, and its value is 1495.63 under above-mentioned incidence angle, now prism and glass
The coupling space of glass slab guide is 0.5 micron.And in the case of same incidence angle, only by during prism surface total internal reflection
The intensity (the right y axle) of produced evanescent wave then only has 3.47.It can be seen that, on planar optical waveguide surface after prism-coupled
The surface evanescent wave producing will strengthen at least 2 orders of magnitude than only by produced evanescent wave during prism total internal reflection.
Now, in the case that the incident angle of collimated light is constant in fixed prism, prism and glass planar waveguide are changed
Coupling space, thus it is possible to vary the intensity of the evanscent field on glass planar waveguide surface.Fig. 3 shows correlated results.Coupling space
Change to 0.9 micron from 0.1 micron.Can see, the intensity of the evanscent field on glass planar waveguide surface with only by prism table
The strength ratio of evanescent wave produced by face, from about 3.1, through the 610 of peak value, varies continuously to about 4.4.I.e. evanescent wave intensity increases
Amount up to 610, that is, is more than two orders of magnitude.But, the maximum of this increment is the control of the incidence angle with light in prism
Precision is relevant, when changing for the 5th of incidence angle, maximum of increments, as shown in figure 3, respectively 455.5,513.4, and
610.
Simultaneously it should also be appreciated that, can see from Fig. 3, coupling space to evanescent wave intensity regulation in center both sides
Rate of change is also that incident angular accuracy is related.Left of center half, that is, coupling space is from 0.5 to 0.1 micron, three curve weights
Right fine, and right half, that is, from 0.5 to 0.9 micron, comparatively, the registration of the curve of three precision is relatively poor.Cause
This, the strength control to surface evanescent wave produced by slab guide, preferably change half, the left side at center with coupling space, so,
The impact of angle control precision can be minimum.
The above results are realized in the case of being the 4th after incidence angle precision controlling reaches decimal point.Current machinery
The angle control precision of formula turntable can reach about 1 second, that is, the 4th after decimal point, substantially can meet above-mentioned to evanescent wave
The purpose of strength control.If be controlled to incidence angle using more accurate rotating mechanism, dependent field enhancing amount also will be entered
One step increases.
Claims (8)
1. a kind of surface wave field strengthens tunable total internal reflection optical excitation apparatus it is characterised in that including: an accurate liter
Fall platform, an inverted trapezoidal prism, a branch of collimation excitation beam, one block of super-thin plane object carrier, and a set of optics and light
Spectral measurement system；Wherein, inverted trapezoidal prism is fixed on above-mentioned precision hoistable platform, and makes prism base holding level；Fall terraced
It is followed successively by super-thin plane object carrier, optics and spectral measurement system, inverted trapezoidal prism and super-thin plane loading above shape prism
Certain the air gap is maintained, super-thin plane object carrier is used for placing sample to be measured, sample to be measured and light between glass
Learn and maintain certain the air gap and between spectral measurement system；Collimated incident beam is directed at inverted trapezoidal prism, and it is terraced for falling
The interior incidence angle θ of the upper bottom edge of shape prism is more than the critical angle of its experiences total internal reflection；And incidence angle θ continuously adjustable；Interior
The reflected beams are collected by reflecting light collector.
2. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
Described precision hoistable platform is used for controlling the distance between inverted trapezoidal prism and super-thin plane object carrier, realizes super-thin plane is carried
The field of the evanescent wave of thing glass top surface is enhanced to be continuously adjusted, and the positioning precision of accurate hoistable platform reaches nanoscale, head office
Journey is no less than 500 nanometers.
3. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
Described inverted trapezoidal prism is more than 1.7 glass for refractive index.
4. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
Described collimated incident beam is a parallel collimated beam, and the degree of regulation of incidence angle θ reaches second level.
5. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
Described super-thin plane object carrier is a plate glass, and thickness is less than 50 microns, and collimation excitation beam place wave band is
Transparent, its refractive index is less than inverted trapezoidal prism.
6. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
Described super-thin plane object carrier plays planar optical waveguide effect at work, for the surface of surface generation thereon evanescent wave, its
Locus is relatively fixed in whole device.
7. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
The air gap between described sample to be measured and optics and spectral measurement system is not less than 1 micron.
8. surface according to claim 1 wave field strengthen tunable total internal reflection optical excitation apparatus it is characterised in that
Described optics and spectral measurement system, including the opto-electronic conversion mechanism of luminous intensity measurement, and spectral measurement mechanism, are used for carrying out glimmering
Light spectrum, absorption spectrum and raman spectroscopy measurement, and relevant data acquisition and process.
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| CN109786277A (en) * | 2017-11-13 | 2019-05-21 | 台湾积体电路制造股份有限公司 | The method that is carried out by the device and method of quantitative analysis and obtains property of thin film for film |
| CN109786277B (en) * | 2017-11-13 | 2021-04-30 | 台湾积体电路制造股份有限公司 | Device and method for performing metrological analysis on thin film and method for obtaining thin film properties |
| CN114112947A (en) * | 2020-08-26 | 2022-03-01 | 横河电机株式会社 | Spectral analysis apparatus, optical system and method |
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