CN106251909A - A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform - Google Patents

Abstract

The invention discloses a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, including a base body, a moving platform formed in the center of the base body and four flexible bridge-type amplification mechanisms evenly distributed around the moving platform, arranged along the X direction Any one of the flexible bridge amplifying mechanisms is driven by piezoelectric ceramic driver Ⅰ, and the two flexible bridge amplifying mechanisms arranged along the Y direction are each driven by a piezoelectric ceramic driver II; the two flexible bridge amplifying mechanisms arranged along the X direction Each adopts two semicircular flexible hinges connected in series along the X direction to connect with the moving platform, and the two flexible bridge-type amplification mechanisms arranged along the Y direction each use a set of two semicircular flexible hinges II to connect to the moving platform. , two semicircular flexible hinges II in each group are connected in series and parallel to the Y direction, and two groups of semicircular flexible hinges II are symmetrical about the center. The invention can realize the high-precision and large-stroke motion of the moving platform in the XY plane, and has higher working bandwidth and natural frequency.

Description

A high-precision, large-travel three-degree-of-freedom parallel micro-positioning platform

technical field

The invention relates to a three-degree-of-freedom parallel micro-positioning platform, in particular to a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform.

Background technique

With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. At present, the micro-positioning platform with small stroke has achieved a major breakthrough, but the micro-positioning platform with high precision and large stroke needs to be further improved. At present, the most commonly used structure of high-precision, long-stroke micro-positioning platform is: X-direction translation, Y-direction translation and Z-direction rotation in series. However, this cascading mechanism will lead to a reduction in the operating bandwidth and natural frequency of the platform.

Contents of the invention

In order to solve the technical problems in the known technology, the invention provides a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, which has a relatively high working bandwidth and natural frequency.

The technical solution adopted by the present invention to solve the technical problems existing in the known technology is: a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, including a base body, a moving platform formed in the center of the base body and uniformly distributed on the Four flexible bridge amplifying mechanisms around the moving platform, two of which are arranged along the X direction, and the other two are arranged along the Y direction, and each of the flexible bridge amplifying mechanisms The amplifying mechanism of the parallel plate is provided with a parallel plate guiding mechanism, and the combination of the two forms a micro-positioning mechanism; any one of the flexible bridge amplifying mechanisms arranged along the X direction is driven by a piezoelectric ceramic driver I, and the two described flexible bridge amplifying mechanisms arranged along the Y direction Each of the flexible bridge-type amplifying mechanisms is driven by a piezoelectric ceramic driver II; each of the two flexible bridge-type amplifying mechanisms arranged along the X direction is connected to the moving platform by two semicircular flexible hinges I connected in series along the X-direction , the two flexible bridge-type amplifying mechanisms arranged along the Y direction each use a set of two semicircular flexible hinges II to connect with the moving platform, and the two semicircular flexible hinges II in each set In series and parallel to the Y direction, the two groups of semicircular flexible hinges II are symmetrical about the center.

The parallel plate guiding mechanism is provided with 4 parallel plates.

Positioning holes are arranged on the base body.

The advantages and positive effects of the present invention are: four micro-positioning mechanisms containing flexible bridge-type amplifying mechanisms are connected in parallel, which can realize high-precision and large-stroke movement of the moving platform in the XY plane; X-direction and Y-direction micro-positioning mechanisms are connected in parallel , which increases the bandwidth of the platform and the natural frequency of the platform; the flexible bridge-type amplifying mechanism has the function of amplifying. The hinge loses stability under pressure; the four sets of series-connected semicircular flexible hinges connected to the moving platform decouple the movement restrictions of the micro-positioning mechanism on the moving platform's X-direction translation, Y-direction translation and centerline rotation perpendicular to the XY plane, improving the The motion accuracy of the moving platform.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Fig. 2 is a structural schematic diagram of a micro-positioning mechanism of the present invention.

In the figure: 1. Substrate, 2. Piezoelectric ceramic driver Ⅰ, 3. Flexible bridge-type amplification mechanism, 4. Parallel plate guide mechanism, 5. Piezoelectric ceramic driver Ⅱ, 6. Positioning hole, 7. Semicircular flexible hinge Ⅱ, 8, moving platform, 9, semicircular flexible hinge Ⅰ.

detailed description

In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

Please refer to Figures 1 to 2, a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, including a base body 1, a moving platform 8 is formed in the center of the base body 1, and evenly distributed around the moving platform 8 Four flexible bridge-type amplifying mechanisms 3, wherein two of the flexible bridge-type amplifying mechanisms 3 are arranged along the X direction, and the other two flexible bridge-type amplifying mechanisms 3 are arranged along the Y-direction, each of the flexible bridge-type amplifying mechanisms 3 is provided with a parallel plate guiding mechanism 4, the combination of the two forms a micro-positioning mechanism, any one of the flexible bridge amplifying mechanisms 3 arranged along the X direction is driven by a piezoelectric ceramic driver I2, and the two described flexible bridges arranged along the Y direction The flexible bridge-type amplifying mechanisms 3 are each driven by a piezoelectric ceramic driver II5, and the two flexible bridge-type amplifying mechanisms 3 arranged along the X direction each use two semicircular flexible hinges I9 connected in series along the X-direction to connect with the moving parts. The platform 8 is connected, and the two flexible bridge-type amplifying mechanisms 3 arranged along the Y direction are respectively connected to the moving platform 8 by semicircular flexible hinges II7 in groups of two, and the two semicircular flexible hinges II7 in each group are connected to the moving platform 8. The circular flexible hinges II7 are connected in series and parallel to the Y direction, and the two groups of semicircular flexible hinges II7 are symmetrical about the center.

In this embodiment, the parallel plate guiding mechanism 4 is provided with four parallel plates. Positioning holes 6 are provided on the base body 1 .

Working principle of the present invention:

Firstly, the voltage is pre-applied to the piezoelectric ceramic driver I2 and the two piezoelectric ceramic drivers II5, so that the corresponding flexible bridge amplifying mechanism 3 produces a displacement, and finally the moving platform 8 is in a balanced state.

By changing the voltage on the piezoelectric ceramic driver I2, the piezoelectric ceramic driver I2 drives the platform 8 to move in translation along the X direction through the flexible bridge amplifying mechanism 3 connected to it and arranged along the X direction.

By applying pressure to one piezoceramic driver II5 and decompressing the other piezoceramic driver II5 at the same time, the two piezoceramic drivers II5 drive the moving platform 8 through the flexible bridge amplifying mechanism 3 arranged along the Y direction connected to it. Translate in the Y direction.

By simultaneously pressurizing or decompressing the two piezoelectric ceramic actuators II5, the two piezoelectric ceramic actuators II5 drive the center of the moving platform 8 along its vertical XY plane through the flexible bridge-type amplifying mechanism 3 arranged along the Y direction connected to it. The line turns.

To sum up, the moving platform 10 of the present invention can not only realize rotation along its center line perpendicular to the XY plane, but also realize X-direction translation and Y-direction translation.

Although the preferred embodiments of the present invention have been described above in conjunction with the accompanying drawings, the present invention is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are only illustrative and not restrictive. Those of ordinary skill in the art Under the enlightenment of the present invention, people can also make many forms without departing from the purpose of the present invention and the scope of protection of the claims, and these all belong to the protection scope of the present invention.

Claims (3)

1. A high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform is characterized in that it comprises a base body, a moving platform and four flexible bridge-type amplifications evenly distributed around the moving platform are formed in the center of the base body mechanism, wherein two of the flexible bridge-type amplifying mechanisms are arranged along the X direction, and the other two are arranged along the Y-direction, and each of the flexible bridge-type amplifying mechanisms is provided with a parallel plate guiding mechanism, both Combined to form a micro-positioning mechanism; any one of the flexible bridge amplifying mechanisms arranged along the X direction is driven by a piezoelectric ceramic driver I, and each of the two flexible bridge amplifying mechanisms arranged along the Y direction uses a piezoelectric ceramic driver II drive; the two flexible bridge amplifying mechanisms arranged along the X direction each use two semicircular flexible hinges I connected in series along the X direction to connect with the moving platform, and the two flexible bridges arranged along the Y direction The two semicircular flexible hinges II in each group are used to connect with the moving platform, and the two semicircular flexible hinges II in each group are connected in series and parallel to the Y direction. The circular flexible hinge II is symmetrical about the center. 2. The high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform according to claim 1, wherein the parallel-plate guiding mechanism is provided with four parallel plates. 3. The high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform according to claim 1, wherein a positioning hole is provided on the base.