CN106225727A - Array zeroing laser big working distance autocollimation and method - Google Patents

Abstract

The invention belongs to the field of precision measurement technology and the field of optical engineering, and specifically relates to an array zeroing laser large working distance self-collimation device and method; the device is composed of a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system; reflective mirror, so that the reflected light beam returns to the center of the image plane of the feedback imaging system, and then the angular deflection measurement device on the reflective mirror is used to obtain the angle change of the surface of the measured object; since the present invention adds reflection to the traditional self-collimation angle measurement system Therefore, it can avoid the problem that the reflected light of the measured object deviates from the measurement system and cause the problem that it cannot be measured, and then has the technical advantage of increasing the self-collimation working range under the same working distance, or increasing the working distance under the same self-collimating working range; In addition, the specific design of the collimating mirror, the feedback imaging system, the reflector, etc. make the present invention have the technical advantages of simple structure, low manufacturing cost, measurement in an unstable measurement environment, and rapid measurement.

Description

Array zeroing laser large working distance autocollimation device and method

technical field

The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to an array zeroing laser large working distance self-collimation device and method.

Background technique

In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution from 0.1 arcsecond to 0.001 arcsecond.

In the field of optical engineering and cutting-edge scientific experiments, the combination of laser autocollimator and two-dimensional circular gratings that are perpendicular to each other can measure the spatial angle; the position reference composed of two laser autocollimators can be used for two Measurement of the angle or parallelism between two optical axes. The angular working range is tens of arc seconds to tens of arc minutes.

In the field of cutting-edge scientific experimental devices and high-end precision equipment manufacturing, laser autocollimators can be used to measure the angular rotation accuracy of cutting-edge scientific experimental devices and high-end precision equipment rotary motion benchmarks, measure the space linear accuracy of linear motion benchmarks and pairwise motion benchmarks parallelism and perpendicularity.

Laser self-collimation technology has the advantages of non-contact, high measurement accuracy, and convenient use, and has been widely used in the above fields.

A traditional autocollimator is shown in Figure 1. The system includes a light source 1, a transmissive collimator 21, and a feedback imaging system 6; the light beam emitted by the light source 1 is collimated into a parallel beam by the transmissive collimator 21. Incident to the reflective surface of the measured object 5 ; the light beam reflected from the reflected surface of the measured object 5 is collected and imaged by the feedback imaging system 6 . Under this structure, only the light beam reflected from the surface of the measured object 5 returns to the original path, and can be collected and imaged by the feedback imaging system 6, thereby realizing effective measurement. The conditional limitation of returning to the original path makes the system have the following two disadvantages:

First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, which will lead to failure to achieve self-collimation Straight and micro angle measurement;

Second, the distance from the mirror surface of the measured object 5 to measure the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement.

The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Contents of the invention

Aiming at the two problems existing in the traditional autocollimator, the present invention discloses an array zeroing laser large working distance autocollimation device and method, compared with the traditional autocollimator, it has a significantly increased Autocollimation working range, or the technical advantage of significantly increasing the working distance at the same autocollimation working range.

The purpose of the present invention is achieved like this:

Array zeroing laser large working distance self-collimation device, including light source, transmissive collimator, reflector, and feedback imaging system, the reflector is provided with an angle adjustment measuring device; the light beam emitted by the light source passes through the transmissive collimator After the straight mirror is collimated into a parallel beam, it is reflected by the mirror and incident on the surface of the measured object; the beam reflected from the surface of the measured object is reflected by the mirror and then imaged by the feedback imaging system;

The feedback imaging system is in the following two forms:

First, it is arranged between the light source and the transmissive collimator, including a first feedback beam splitter, a four-quadrant detector and a plurality of single-pixel photoelectric converters arranged on the focal plane of the transmissive collimator, the single-pixel The photoelectric converters are distributed in an array, and the four-quadrant detector is located in the center of the array and on the optical axis of the feedback imaging system; the light beam reflected from the surface of the measured object is reflected by the mirror, transmitted through the transmission collimator, Reflected by the first feedback spectroscope, collected and imaged by a four-quadrant detector or a single-pixel photoelectric converter;

Second, it is arranged between the transmissive collimator and the reflector, including the first feedback beam splitter, the first feedback objective lens, a four-quadrant detector and multiple single-pixel photoelectric converters arranged on the focal plane of the transmissive collimator , the single-pixel photoelectric converters are distributed in an array, and the four-quadrant detector is located at the center of the array and on the optical axis of the feedback imaging system; Feedback spectroscopic reflection, first feedback objective lens transmission, imaging by four-quadrant detector or single-pixel photoelectric converter;

The angle adjustment measurement device includes an angle adjustment device arranged on the mirror, an angle deflection measurement device, and a cardan shaft, and the angle adjustment device includes a first driver and a second driver; the line connecting the first driver and the cardan shaft is perpendicular The connection line between the second driver and the cardan shaft; the angle deflection measurement device is a common optical path autocollimator.

The method for self-collimating the large working distance of the portable array zeroing laser realized on the above-mentioned portable array zeroing laser large working distance self-collimation device comprises the following steps:

Step a, turn on the light source, feed back the imaging system to form an image, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and go to step b;

Second, the obtained point image is located in the area where the four-quadrant detector is located, and directly enters step b;

Step b, four-quadrant detector imaging, after the end of step a, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step c, obtain the angle change Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, and f3 and f4 represent two functions.

The above-mentioned array zeroing laser large working distance autocollimation device also includes a wavefront detection system and a wavefront compensation system;

The wavefront detection system includes a wavefront detection beamsplitter, and at least one of an air disturbance wavefront detector and a mirror deformation wavefront detector; the wavefront detection beamsplitter is arranged between the mirror and the measured object , the air disturbance wavefront detector is set on the reflection light path of the wavefront detection spectroscope, and the mirror deformation wavefront detector is set on the secondary reflection light path of the reflection mirror;

The wavefront compensation system includes a compensating light source, a compensating collimating mirror, and a transmissive liquid crystal spatial light modulator; the beam emitted by the compensating light source is collimated into a parallel beam by the compensating collimating mirror, and then modulated by the transmissive liquid crystal spatial light modulated and incident on the wavefront detection beamsplitter.

The portable array zeroing laser large working distance self-collimation method implemented on the above-mentioned portable array zeroing laser large working distance self-collimation device requires that the wavefront detection system only include a wavefront detection beamsplitter and an air disturbance wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GA and GB respectively by the air disturbance wavefront detector;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), lighting up the compensation light source, and compensating for air disturbance;

Step e, turn on the light source, feed back the imaging system to form an image, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and enter step f;

Second, the point image obtained is located in the area where the four-quadrant detector is located, and directly enters step f;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, obtain the angle change Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, and f3 and f4 represent two functions.

The portable array zeroing laser large working distance self-collimation method realized on the above-mentioned portable array zeroing laser large working distance self-collimation device requires that the wavefront detection system only includes a wavefront detection beam splitter and a mirror deformable wavefront detector ;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GC and GD respectively by the mirror deformable wavefront detector;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d. Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

Step e, feedback imaging system imaging, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and enter step f;

Second, the point image obtained is located in the area where the four-quadrant detector is located, and directly enters step f;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, obtain the angle change Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, and f3 and f4 represent two functions.

The portable array zeroing laser large working distance self-collimation method realized on the above-mentioned portable array zeroing laser large working distance self-collimation device requires the wavefront detection system to include wavefront detection spectroscope, air disturbance wavefront detector and Mirror deformable wavefront detectors;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, and place the reference objects selected in step a at the working position A and the near working position B respectively. The air disturbance wavefront detector obtains two sets of data of GA and GB respectively. Get GC and GD two sets of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), light up the compensation light source, and compensate for air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5(G), turn on the compensation light source, and compensate the deformation of the mirror;

Step e, feedback imaging system imaging, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and enter step f;

Second, the point image obtained is located in the area where the four-quadrant detector is located, and directly enters step f;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, obtain the angle change Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, and f3 and f4 represent two functions.

Beneficial effect:

Compared with the traditional autocollimator, the present invention adds a reflector and an angle adjustment measuring device arranged on the reflector. This structural arrangement can have a larger deflection angle or In the case of a large lateral displacement, adjust the attitude of the mirror by adjusting the angle of the measuring device to ensure that the reflected light returns to the original path and is received by the feedback imaging system, thereby effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured. Furthermore, the present invention has the technical advantage of significantly increasing the working range of self-collimation under the same working distance, or significantly increasing the working distance under the same working distance of self-collimation.

In addition, the present invention also has the following technical advantages:

First, select the transmissive collimating mirror to make the device of the present invention simple in structure, low in manufacturing cost and easy to use;

Second, multiple single-pixel photoelectric converters and four-quadrant detectors are selected as the imaging device in the feedback imaging system, which combines the advantages of large area of multiple single-pixel photoelectric converters and high position resolution of four-quadrant detectors; , the combination of multiple single-pixel photoelectric converters can ensure that the reflected light can still enter the entrance pupil of the optical system when the deflection angle between the reflected light of the object and the incident light is large, and will not exceed the receiving range; on this basis On the other hand, the reflector is used to realize the rapid real-time return compensation of the reflected light, adjust the reflected light to the position of the four-quadrant detector, and obtain higher angle measurement accuracy based on the high position resolution advantage of the four-quadrant detector; therefore Combining a plurality of single-pixel photoelectric converters with four-quadrant detectors not only greatly extends the self-collimation working range or working distance of the present invention, but also helps to improve the accuracy of angle measurement;

Third, select the common optical path autocollimator as the angle deflection measurement device, and utilize the excellent characteristics that the common optical path autocollimator measurement accuracy is less affected by changes in the air environment, so that the present invention can ensure that the air environment is unstable in the measurement environment The measurement is carried out effectively;

Fourth, the present invention also adopts the following technology: the connection line between the first driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft; the two-dimensional arrangement of the two lines perpendicular to each other makes different connection lines The direction data do not interfere with each other, and decoupling operations are not required, which can facilitate calibration, simplify the calculation process, and increase the measurement speed.

Description of drawings

Fig. 1 is a schematic structural diagram of a traditional self-collimation angle measurement system.

Fig. 2 is a schematic diagram of the first structure of Embodiment 1 of the self-collimation device with large working distance for array zeroing laser of the present invention.

Fig. 3 is a schematic diagram of the structure of the angle adjustment device in the angle adjustment measurement device.

Fig. 4 is a structural schematic diagram of the first structure of the angle deflection measuring device in the angle adjusting measuring device.

Fig. 5 is a structural schematic diagram of the second structure of the angle deflection measuring device in the angle adjusting measuring device.

Fig. 6 is a schematic diagram of the second structure of Embodiment 1 of the self-collimation device with large working distance for array zeroing laser of the present invention.

Fig. 7 is a schematic structural diagram of Embodiment 2 of the self-collimation device for array zeroing laser with large working distance according to the present invention.

Fig. 8 is a schematic structural view of Embodiment 3 of the self-collimation device with large working distance for array zeroing laser of the present invention.

Fig. 9 is a schematic structural view of Embodiment 4 of an array zeroing laser large working distance self-collimation device of the present invention.

In the figure: 1 light source, 21 transmissive collimator, 3 reflector, 4 angle adjustment measuring device, 411 first driver, 412 second driver, 429 traditional autocollimation system, 43 cardan shaft, 5 measured object, 6 feedback imaging system, 61 first feedback beam splitter, 63 first feedback objective lens, 66 four-quadrant detector, 67 single-pixel photoelectric converter, 7 wave front detection system, 71 wave front detection beam splitter, 72 air disturbance wave front detection device, 73 mirror deformable wavefront detectors, 8 wavefront compensation systems, 81 compensating light sources, 82 compensating collimating mirrors, and 83 transmissive liquid crystal spatial light modulators.

specific embodiment

The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Specific embodiment one

This embodiment is an embodiment of an array zeroing laser large working distance autocollimation device.

The structure schematic diagram of the array zeroing laser large working distance autocollimation device of this embodiment is shown in FIG. 2 . The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beam splitter 61, a four-quadrant detector 66 and a plurality of single pixels arranged on the focal plane of the transmissive collimator 21 Photoelectric converter 67, the single-pixel photoelectric converter 67 is distributed in an array, and the four-quadrant detector 66 is located at the center of the array and on the optical axis of the feedback imaging system 6; the light beam reflected from the surface of the measured object 5 is then reflected After being reflected by the mirror 3, it is transmitted through the transmissive collimating mirror 21, reflected by the first feedback beam splitter 61, and collected and imaged by the four-quadrant detector 66 or the single-pixel photoelectric converter 67;

Described angle adjustment measurement device 4 comprises the angle adjustment device that is arranged on reflective mirror 3, angle deflection measurement device and cardan shaft 43, and angle adjustment device comprises first driver 411 and second driver 412; First driver 411 and universal shaft The connection line of the second driver 412 and the cardan shaft 43 is vertical to the connection line of the shaft 43, as shown in Figure 3; the angle deflection measurement device is a common optical path autocollimator 429, and the common optical path autocollimator 429 can be installed On any side of the mirror 3, as shown in Fig. 4 and Fig. 5 .

It should be noted that, in this embodiment, the feedback imaging system 6 can also choose the following structure: it is arranged between the transmissive collimator mirror 21 and the reflector 3, including a first feedback beam splitter 61, a first feedback objective lens 63 and The four-quadrant detector 66 and a plurality of single-pixel photoelectric converters 67 arranged on the focal plane of the transmissive collimator 21, the single-pixel photoelectric converters 67 are distributed in an array, and the four-quadrant detector 66 is located at both the center of the array and the On the optical axis of the feedback imaging system 6; the beam reflected from the surface of the measured object 5, after being reflected by the mirror 3, is reflected by the first feedback beam splitter 61, transmitted by the first feedback objective lens 63, and then transmitted by the four-quadrant detector 66 or The single-pixel photoelectric converter 67 collects images; as shown in FIG. 6 .

Specific embodiment two

This embodiment is an embodiment of an array zeroing laser large working distance autocollimation device.

The structure schematic diagram of the array zeroing laser large working distance autocollimation device of this embodiment is shown in FIG. 7 . On the basis of the specific embodiment 1, the array zeroing laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment three

This embodiment is an embodiment of an array zeroing laser large working distance autocollimation device.

The structure schematic diagram of the array zeroing laser large working distance autocollimation device of this embodiment is shown in FIG. 8 . On the basis of the specific embodiment 1, the array zeroing laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment four

This embodiment is an embodiment of an array zeroing laser large working distance autocollimation device.

The structure schematic diagram of the array zeroing laser large working distance autocollimation device of this embodiment is shown in FIG. 9 . On the basis of the specific embodiment 1, the array zeroing laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71, an air disturbance wavefront detector 72 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5 Between, the air disturbance wavefront detector 72 is arranged on the reflection light path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflection light path of the mirror 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

For the above embodiment of the self-collimation device, there are two more points to be explained:

First, the first driver 411 and the second driver 412 in the angle adjustment device can choose a stepper motor or a servo motor driver with a faster driving speed, or a piezoelectric ceramic driver with higher driving precision, or A stepper motor or a servo motor driver can be mixed with a piezoelectric ceramic driver; those skilled in the art can make a reasonable choice according to actual needs.

Second, the transmissive collimator 21 can be a binary optical lens. Compared with ordinary optical lenses, the binary optical lens is thinner, which is beneficial to the miniaturization of the system. At the same time, the binary optical lens has better collimation and has It is beneficial to improve the measurement accuracy of the system.

Specific embodiment five

This embodiment is an embodiment of an array zeroing laser large working distance self-collimation method implemented on the array zeroing laser large working distance self-collimation device described in the first specific embodiment.

The self-collimation method of the array zeroing laser with a large working distance in this embodiment includes the following steps:

Step a, turn on the light source 1, feed back the imaging system 6 to form an image, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step b;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step b;

Step b, four-quadrant detector 66 imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step c, obtain the angle change Δθ and Then obtain the angle change Δα and Δβ of the surface of the measured object 5; wherein, and f3 and f4 represent two functions.

The main innovation point of the present invention is to increase the reflector 3 and the angle adjustment measuring device 4 arranged on the reflector 3. This structure can have a larger deflection angle or a relatively large angle between the incident light and the reflected light of the measured object 5. In the case of large lateral displacement, the attitude of the reflector is adjusted by the angle adjustment measurement device, so that the reflected light returns to the original path and is received by the feedback imaging system 6, effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured.

However, with the introduction of the reflector 3, the surface error will be transmitted to the final result, reducing the measurement accuracy of the system; at the same time, the increase of the working distance makes the air disturbance between the reflector 3 and the measured object 5 not negligible, and also It will reduce the measurement accuracy of the system. It can be seen that in order to achieve high-precision measurement, it is necessary to take into account the influence of the surface shape error of the mirror 3 and the air disturbance between the mirror 3 and the measured object 5 on the measurement results. For this reason, specific embodiments are designed. Example seven, and specific embodiment eight.

Specific embodiment six

This embodiment is an embodiment of an array zeroing laser large working distance self-collimation method implemented on the array zeroing laser large working distance self-collimation device described in the second specific embodiment.

The self-collimation method of the array zeroing laser with a large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), lighting the compensation light source 81, and compensating for air disturbance;

Step e, turn on the light source 1, feed back the imaging system 6 to form an image, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step f;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step f;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, obtain the angle change Δθ and Then obtain the angle change Δα and Δβ of the surface of the measured object 5; wherein, and f3 and f4 represent two functions.

The method of this embodiment is implemented on the device of the specific embodiment 2, the air disturbance can be separated by the air disturbance wavefront detector 72, and then the air disturbance can be compensated by the wavefront compensation system 8, finally realizing the effect of no air disturbance High precision measurement.

Specific embodiment seven

This embodiment is an embodiment of an array zeroing laser large working distance self-collimation method implemented on the array zeroing laser large working distance self-collimation device described in the third embodiment.

The self-collimation method of the array zeroing laser with a large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the mirror deformable wavefront detector 73 obtains two sets of data of GC and GD respectively;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d, adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

Step e, feedback imaging system 6 imaging, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step f;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step f;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, obtain the angle change Δθ and Then obtain the angle change Δα and Δβ of the surface of the measured object 5; wherein, and f3 and f4 represent two functions.

The method of this embodiment is implemented on the device of the specific embodiment 3, and the air disturbance and the mirror deformation can be separated as a whole by using the mirror deformation wavefront detector 73, and then the air disturbance and the mirror deformation can be completely separated by using the wavefront compensation system 8. Carry out overall compensation, and finally realize high-precision measurement without the influence of air disturbance and mirror deformation.

Embodiment 8

This embodiment is an embodiment of an array zeroing laser large working distance self-collimation method implemented on the array zeroing laser large working distance self-collimation device described in Embodiment 4.

The self-collimation method of the array zeroing laser with a large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b: Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively, and the mirror deformation wavefront detection Device 73 respectively obtains GC and GD two groups of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), turn on the compensation light source 81, and compensate for the air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5(G), turn on the compensation light source 81, and compensate the deformation of the mirror;

Step e, feedback imaging device 6 imaging, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step f;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step f;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, obtain the angle change Δθ and Then obtain the angle change Δα and Δβ of the surface of the measured object 5; wherein, and f3 and f4 represent two functions.

The method of this embodiment is implemented on the device of Embodiment 4, and the air disturbance and mirror deformation can be separated separately by using the air disturbance wavefront detector 72 and the mirror deformation wavefront detector 73, and then the air disturbance can be selectively analyzed. Individual compensation for disturbance, independent compensation for mirror deformation, or overall compensation for air disturbance and mirror deformation, and finally achieve high-precision measurement without air disturbance, or without mirror deformation, or without air disturbance and mirror deformation .

Another advantage of this embodiment is that after the air turbulence and mirror deformation are separated separately, the influence of each part on the result can be independently evaluated, not only can it be found out who is affecting the measurement in the air turbulence and mirror deformation The main contradiction of precision, and can independently evaluate the deformation of the mirror, and effectively evaluate the processing quality of the mirror at the same time.

Claims (6)

1. array zeroing laser big working distance autocollimation, it is characterised in that include light source (1), transmission-type collimating mirror (21), Reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4)；Light source (1) light beam of outgoing, after transmission-type collimating mirror (21) is collimated into collimated light beam, then by reflecting mirror (3) reflect, incide by Survey the surface of thing (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feedback imaging system (6) imaging is gathered；

Described feedback imaging system (6) is in following two form:

The first, it is arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) and setting 4 quadrant detector (66) and multiple single pixel light electric transducer (67), described single pixel at transmission-type collimating mirror (21) focal plane Optical-electrical converter (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, but also has been positioned at feedback imaging system (6) On optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively through transmission-type collimating mirror (21) transmission, the first feedback spectroscope (61) are reflected, are gathered by 4 quadrant detector (66) or single pixel light electric transducer (67) Imaging；

The second, it is arranged between transmission-type collimating mirror (21) and reflecting mirror (3), including the first feedback spectroscope (61), first anti- Present object lens (63) and be arranged on the 4 quadrant detector (66) of transmission-type collimating mirror (21) focal plane and multiple single pixel opto-electronic conversion Device (67), described single pixel light electric transducer (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, but also position On feedback imaging system (6) optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively Through the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by 4 quadrant detector (66) or single pixel light Electric transducer (67) gathers imaging；

Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；First driver (411) second driver (412) vertical with the line of universal drive shaft (43) and the line of universal drive shaft (43)；Angular deflection measurement apparatus For common light path autocollimator (429).

Array the most according to claim 1 zeroing laser big working distance autocollimation, it is characterised in that also include wavefront Detection system (7) and wavefront compensation system (8)；

Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；

Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).

3. the portable array realized on portable array zeroing laser big working distance autocollimation described in claim 1 is adjusted Zero laser big working distance auto-collimation method, it is characterised in that comprise the following steps:

Step a, some bright light source (1), feed back imaging system (6) imaging, if:

The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step b；

The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step b；

Step b, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step c, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.

4. the portable array realized on portable array zeroing laser big working distance autocollimation described in claim 2 is adjusted Zero laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air are disturbed Dynamic wave front detector (72)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；

Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation；

Step e, some bright light source (1), feed back imaging system (6) imaging, if:

The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；

The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.

5. the portable array realized on portable array zeroing laser big working distance autocollimation described in claim 2 is adjusted Zero laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror Deformation wave front detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；

Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation；

Step e, feedback imaging system (6) imaging, if:

The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；

The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.

6. the portable array realized on portable array zeroing laser big working distance autocollimation described in claim 2 is adjusted Zero laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes that Wavefront detecting spectroscope (71), air are disturbed simultaneously Dynamic wave front detector (72) and reflecting mirror deformation wave front detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；

Step d,

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic；

Or

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation；

Or

Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become；

Step e, feedback imaging system (6) imaging, if:

The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；

The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.