CN106194736B - Oily rotary vacuum pump - Google Patents

Abstract

Disclose a kind of rotary type vacuum pump installation, it is characterized in that, it can ensure that stable pump environment based on three-member type oil cooling structure, cooling jacket is formed wherein at each pump module component, and cooling water circulation is passed through into cooling jacket, and the heat generated at pump module can directly be cooled, therefore prevent the temperature of pump module from increasing, and simultaneously because oil can be cooled at the contact surface that vacuum oil is contacted with the cooling jacket of pump module, and the oil transmitted simultaneously by oil pump is guided with along the oily channel flowing for being exposed to cooling jacket, with thus use cooling jacket cooling water by oil cooling but, thereby, it can prevent the temperature of pump module from increasing.In addition, the pump housing and first order cylinder are integrated into the form of single component, so the quantity of each component can reduce while save manufacturing cost.

Description

Oily rotary vacuum pump

Technical field

The present invention relates to a kind of vacuum pumps, and more particularly to using vacuum oil come ensure pump installation vacuum it is rotary true Sky pump.

Background technology

In general, vacuum plant is the device that gas molecule is eliminated in sealing container, is configured to be less than air The low pressure of pressure is aspirated and is compressed, and compressed gas is discharged into air, thus improves the vacuum degree in container.It is this true Sky pump can be divided into oil-sealed rotary pump and diffusion pump, they are respectively designed to dry type and wet type.Diffusion pump is wet type, is made Ensure high vacuum degree with oil, and oil-sealed rotary pump is dry type, without using oil, and can ensure rather low vacuum Degree, but oil-sealed rotary pump has simple structure and high durability, and with stable vacuum degree, then, oil-sealed rotary pump is wide It is used for various industrial circles generally, and the advantage is that, user can easily operate and maintenance cost is relatively low.

At this point, vacuum technique makes rapid progress, the scope of application extends to semiconductor deposition, electronics industry, gold Category field, chemical field, medicine and medical supply, atomic energy industry etc..

In addition, the type for forming the vacuum pump of vacuum has closing water type, rotary-type, Roots type oil-based, oil diffusion Type, physical absorption, chemical absorbing type etc., and vacuum pump can usually be classified as wet type and dry type.However, water seal closed form or oil The rotary-type wet type of base (water or oil are input in vacuum pump), in semiconductor, food, chemistry, medicine and medicine supply etc. Industrial circle in do not used gradually.Therefore, dry vacuum pump (water or oil are not input in vacuum pump) is in recent years It has been used widely.Ensure the true of the lubrication operation of vacuum pump apparatus, seal operation and cooling down operation using vacuum oil Sky pump is still a large amount of to be used.

Can be used vacuum oil and without any item physically or chemically changed in the rotary vacuum pump using vacuum oil Part is very important in terms of the maintenance of pump operation.It is characterized in that using the rotary vacuum pump of this oil, works as pump operation When, and in cylinder body eccentricity rotor rotation, and the blade kept in the blade groove of rotor by centrifugal force to pusher, and rotate with The intimate surface contact of cylinder body, work process gas is sucked by the suction ports of cylinder body, and is stuck between two blades Gas is compressed and is shifted along the direction of exhaust port, and notable gas compressed passes through row of exhausting-gas hole when the exhaust valve is opened Go out to outside.

When process gas is aspirated and compressed by pump module, compression heat, and compression heat are generated during gas compression Increase in order to lubricate with seal operation and be supplied to the temperature of the vacuum oil of cylinder body, while also increasing the temperature of pump module.With Above-mentioned work technique continues, and oil temperature gradually rises, and the raised oil of temperature in order to lubricate with seal operation and supply to pump Module, and the temperature of process gas is increased more by the oil therefore supplied during aspirating with compression process, so oil temperature It may rapidly increase, and the temperature of pump module may be increased rapidly simultaneously, making for pump may be increased to by pumping the temperature on surface thus With the range of more than temperature (40~60 DEG C).

In the case of rotary vacuum pump using oil, with Quick air-discharge speed (more than 2 000 liters/min), High-temperature vacuum oil is very crucial in the aspect of performance of pump.If blade is deposited in the blade groove of the rotor of rotation, high temperature oil is borrowed In the blade groove for the rotor for helping centrifugal force and being fed into the linearly moving blade in blade groove, and had built up due to temperature Overheat, oil is likely to become solid, and may be coated in the running surface of blade groove, and lubrication becomes grain thus, so as to energy loss Bad blade, this may lead to blocking for pump.In addition, the oil of overheat may cure in a part for bearing, when the rotor is turning The bearing supported shaft, this may lead to bad lubrication, so as to damage bearing.In addition, being supplied to the axis of sealing The oil of the overheat of hermetic unit may cause any deformation of the hermetic unit of axis, this may cause the leakage of oil.Due to overheat The temperature of vacuum increases, and oily evaporating pressure also increases, so the vacuum degree and exhaust velocity of pump may be decreased.

In order to solve the raised above problem of oil temperature, the pump of cooling vacuum oil is capable of in manufacture and use.It has used so far Typical method it is as follows.

1. using the oily cooling means of cooling coil

Fig. 1 is the view for showing vacuum oil cooling structure, which uses the cooler pan of Conventional rotary vacuum pump apparatus Pipe, wherein the assembling parts of cooling coil 110 are made of copper pipe and are assembled into oily storage housing 100.Cooling is flowed through in cooling water While coil pipe 110, the temperature of cooling oil 120.The problem of this method be when manufacture cooling coil 110 assembling parts when, There must be separated component costs, and have assembling and disassemble the complicated process of these components.Oil may be from the assembled part of shell 100 Leakage.Since the coupling part of cooling coil 110 may be damaged, and copper pipe material may corrode or may crack, so cooling Water may be leaked in oil.In addition, compared with increased cost of installation and maintenance, the above method does not provide how many effect (can It is expected that 15~20 DEG C of a small amount of cooling effect).

2. the method for forming coolant jacket on the outer wall of oily storage housing

Fig. 2 is to describe a kind of view of method, and wherein cooling jacket 130 is formed in the oil of Conventional rotary vacuum pump apparatus On the outer wall of storage housing 100, and cold cooling water 140 is fed at this, thus the cooling boundary contacted with vacuum oil 120 The temperature of vacuum oil 120 on surface 150.The problem of this method, is 120 inefficiency of vacuum oil of cooling overheat, because cooling The cooling water 140 of water jacket 130 and the contact area for the border surface 150 that oil is in contact with each other are smaller.Only it is filled up completely in cooling water When in the space of cooling jacket 130, cooling effect can become more efficient.But due to 160 shape of air cavities with air At at cooling jacket 130, oil cooling but may not be efficient.It is but imitated in its oil cooling using the above method of cooling jacket 130 It may be unlike using the method for cooling coil 110 good in terms of fruit.

3. the method for being installed separately vacuum oil cooling system

For describing a kind of view of method when Fig. 3, it is true to be separately mounted to Conventional rotary for wherein oil cooling system 170 Outside the oily storage housing 100 of empty pump installation, and the vacuum oil 120 of oily storage housing 100 is connected to oil and is recycled by channel 180 Into the structure of oil cooling system 170, so the vacuum oil of oily storage housing 100 can pass through oil cooling system 170 in vacuum oil While it is cooled.Therefore, so that oil is continuously recycled by using above structure can be by oil cooling but.

But when manufacturing oil cooling system, the above method needs oil circulating pump, oil cooler, oil strainer, pipeline Deng high cost being needed thus, and to be mounted on pump external for these components, so pump installation space increases.

When attempt by cooling vacuum oil come cooling pump temperature when above-mentioned three kinds of methods cannot all be effectively reduced pump mould The temperature of block, so there is the problem of keeping pumping fluid use condition under best condition.

Due to may be summarized as follows the problem of vacuum pump apparatus caused by overheat oil temperature.

Due to the oil viscosity of reduction, sealing performance may substantially reduce.

Since the abrasion of each component of greasy property of oil reduction may increase, and it is being in contact with each other and is carrying out relative motion Each component between may block problem.

During the intake-gas compression of cylinder body, since etching problem may occur for the gas of 200 DEG C or more high temp/high pressures.

If the steam pressure of oil changes according to oil temperature and changed, the vacuum degree pumped when oil temperature increases may be due to Steam pressure is increased and is reduced.

In the case that steam in high temp/high pressure state intake-gas is transformed into liquid, water may be assembled due to phase transformation In the oil of vacuum pump.

The steam pressure of oil increases higher, and oil temperature increases higher, and vacuum oil is converted into the amount of gas and can increase. In the case where the oil of liquid is converted into gas and may flow back to vacuum equipment, the product in work technique may be polluted.

When oil overheats, the size of each component of pump module can become larger due to the thermal expansion based on temperature change, and Predetermined interference occurs for the gap location of each operation part, for this purpose, pumping and may stop suddenly, therefore damages motor.In order to solve The above problem, if the gap of each operation part is made larger, sealing performance possible deviation at these parts, and the vacuum pumped Degree and exhaust velocity reduce, and the working time increases, and are difficult to meet required vacuum degree.

Invention content

Therefore, proposition of the invention is to solve the above problem of typical dry vacuum pump.

The object of the present invention is to provide a kind of rotary type vacuum pump installations, which is characterized in that is but tied based on three-member type oil cooling Structure can ensure that stable pump environment, wherein forming cooling jacket at each pump module component, and cooling water circulation be passed through Cooling jacket, and the heat generated at pump module can directly be cooled, therefore prevent the temperature of pump module from increasing, and simultaneously Oil can be cooled at the contact surface of vacuum oil contacted with the cooling jacket of pump module, and in the oil stream mistake supplied by oil pump While being exposed to the oily channel of cooling jacket, oil can be cooled, and cooling oil is for being given to pump module thus to prevent from pumping The temperature of module increases.

It is a further object of the present invention to provide the rotary type vacuum pump installations for using vacuum oil, which is characterized in that the past by The pump housing and 1 grade of (first) cylinder that two components are formed form the form of single component, thus to reduce the quantity of each component, this Lead to the manufacturing cost reduced.

To achieve the goals above, a kind of rotary vacuum pump using vacuum oil is provided, including：Pump housing cylinder, construction At with 1 grade of (first) cylinder body in monomeric form；Oilcan body is fixed to the side of pump housing cylinder；Intermediate plate is fixed to oil The side of 1 grade of (first) cylinder body in shell；2 grades of (second) cylinder bodies are fixed to the side of intermediate plate；Rear cover fixes covering 2 The side of grade (second) cylinder body；Protecgulum is fixed to the outside of pump housing cylinder；Oil pump case is fixed to the side of protecgulum；Oil is close Capping is fixed to the side of oil pump case；Motor field frame, be fixed to pump housing cylinder simultaneously surround and wrap up oil pump case and Oil seal lid；The first rotor passes through oil pump case, oil seal lid and 1 grade of (first) cylinder body and using oil pump case in bearing Auxiliary under be rotatably supported；Motor is fixed at motor field frame to drive the first rotor；Second rotor, It is integrally formed with the first rotor and is rotatably supported under the auxiliary of bearing at intermediate plate simultaneously towards 2 grades of (second) cylinder bodies Extend；First blade, it is by the first rotor rotation in 1 grade of (first) cylinder body and close with the inner wall of 1 grade of (first) cylinder body Contact, and aspirate, compress and be discharged gas；The gas that will be aspirated from vacuum equipment is arranged at pump housing cylinder in suction port Body is supplied to 1 grade of (first) cylinder body；Second blade is rotated and close with the inner wall of 2 grades of (second) cylinder bodies by the second rotor Contact and aspirate, compress and be discharged the gas transmitted from 1 grade of (first) cylinder body；Exhaust port, be formed at oilcan body to The gas being discharged from 2 grades of (second) cylinder bodies is discharged to the outside；1 grade of (first) cylinder cooling jacket, is formed in 1 grade (first) At cylinder；Intermediate plate cooling jacket, at plate formed between；1 grade of (first) cylinder cooling jacket is formed in 2 grades ( Two) at cylinder body；Rear cover cooling jacket, is formed at rear cover；And multiple cooling-water ducts 8, it is configured to guide cooling water Cooling jacket is cycled through, wherein oilcan body and pump housing cylinder includes respectively oily memory space, for making first and 2 grades (second) Cylinder, intermediate plate and rear cover are immersed in below vacuum oil.

According to the present invention, the axis of motor is connected with the first rotor using shaft coupling.

In addition, according to the present invention, oil pump is mounted in oil pump case.

According to the present invention, cooling water inlet port is formed at 1 grade of (first) cylinder cooling jacket, and cooling water outlet end Mouth is formed at rear cover.

Therefore, first row air valve is also provided, which is configured to the first exhaust passage of 1 grade of (first) cylinder To external opening；And second row air valve, the second row air valve are configured to the second exhaust channel of 2 grades of (second) cylinders is outside Portion is open.

In addition, according to the present invention, at least one projecting rib is from 1 grade of (first) cylinder, intermediate plate and 2 grades of (second) cylinders Either one or two of protruded along the direction of each cooling jacket, and cycle through the oily channel of each projecting rib equipped with wherein oil.

Advantageous effect

Benefit of the invention is that one monomer portion of the pump housing and 1 grade of (first) cylinder support that the past is formed by two components The form of part, thus to reduce the quantity of component, this causes the manufacturing cost reduced.In addition, being based on three-member type oil cooling structure It can ensure that stable pump environment, wherein forming cooling jacket at each pump module component, and cooling water circulation passed through cold But water jacket, and the heat generated at pump module can directly be cooled, therefore prevent the temperature of pump module from increasing, and oily simultaneously It can be cooled at the contact surface that vacuum oil is contacted with the cooling jacket of pump module, and excessively exposed in the oil stream supplied by oil pump While the oily channel of cooling jacket, oil can be cooled, and cooling oil can be fed into pump module, thus to prevent pump mould The temperature of block increases.

Specifically, projecting rib may be formed in cooling jacket, and oily channel can be formed with the projecting rib or thus of auxiliary Allow oil cycle.Since the oil flowed in cooling water and together is cooled and recycles and is supplied in pump module, so It is very well protected from the overheat of pump installation.

Description of the drawings

The present invention will become better understood with reference to the accompanying drawings, attached drawing is only provided by means of illustrating, therefore, to the present invention There is no limit in attached drawing：

Fig. 1 to 3 is each view for showing conventional configurations.

Fig. 4 is the positive view of the rotary vacuum pump according to the present invention using vacuum oil；

Fig. 5 is the section plan of the line A-A interceptions along the rotary vacuum pump according to the present invention using vacuum oil；

Fig. 6 is the sectional view of the line B-B interceptions in Fig. 4；

Fig. 7 is the sectional view of the line C-C interceptions in Fig. 4；

Fig. 8 is the sectional view of the line D-D interceptions in Fig. 4；And

Fig. 9 is the sectional view of the line E-E interceptions in Fig. 4.

Specific implementation mode

The present invention can more specifically be implemented together with the embodiment of following demonstration.There is provided the following embodiment demonstrated is only The purpose of explanation, it is not intended to limit the scope of the present invention as claimed in claim.It will therefore be apparent that the present invention not by The limitation of disclosed example embodiment, it should annotation be include being repaiied according to being described below obtainable part and all Change.

The rotary vacuum pump according to an exemplary embodiment of the present using vacuum oil is illustrated with reference to the accompanying drawings.

As shown in figure 4, the rotary vacuum pump of vacuum oil used according to the invention includes：Pump housing cylinder 1, is configured with In 1 grade of (first) cylinder body " A " of monomeric form；Oilcan body 2 is fixed to the side of pump housing cylinder 1；Intermediate plate 7 is fixed to oil The side of 1 grade of (first) cylinder body 1A in shell 2；2 grades of (second) cylinder bodies 8 are fixed to the side of intermediate plate 7；Rear cover 9, Gu Surely the side of 2 grades of (second) cylinder bodies 8 is covered；Protecgulum 5 is fixed to the outside of pump housing cylinder 1；Oil pump case 14, before being fixed to The side of lid 5；Oil seal lid 15 is fixed to the side of oil pump case 14；Motor field frame 4 is fixed to pump housing cylinder 1 simultaneously It surrounds and wraps up oil pump case 14 and oil seal lid 15；The first rotor 6, across oil pump case 14, oil seal lid 15 and 1 grade (the first) cylinder body 1A is simultaneously rotatably supported using oil pump case 14 under the auxiliary of bearing 33；Motor 50, is fixed on To drive the first rotor 6 at motor field frame 4；Second rotor 11 is integrally formed with the first rotor 6 and in the auxiliary of bearing 34 It helps down and is rotatably supported at intermediate plate 7 and extends towards 2 grades of (second) cylinder bodies 8；First blade 10 passes through 1 grade ( One) the first rotor 6 in cylinder body 1A is rotated and is in close contact with the inner wall of 1 grade of (first) cylinder body 1A, and is aspirated, compresses and be discharged Gas；Suction port 35 is arranged at pump housing cylinder 1 gas aspirated from vacuum equipment being supplied to 1 grade of (first) cylinder Body 1A；Second blade 12 is rotated by the second rotor 11 and is in close contact and aspirates with the inner wall of 2 grades of (second) cylinder bodies 8, presses The gas that contracting and discharge are transmitted from 1 grade of (first) cylinder body 1A；Exhaust port 44 is formed at oilcan body 2 thus will be from 2 grades (the second) gas that cylinder body 8 is discharged is discharged to the outside；1 grade of (first) cylinder cooling jacket 18 is formed in 1 grade of (first) cylinder At 1A；Intermediate plate cooling jacket 19, at plate 7 formed between；2 grades of (second) cylinder cooling jackets 20, are formed in 2 grades (the second) at cylinder body 8；Rear cover cooling jacket 12 is formed at rear cover 9；And multiple cooling-water ducts 23,24,25,26,27 With 28, it is configured to guide cooling water and cycles through cooling jacket 18,19,20 and 21.Oilcan body 2 and pump housing cylinder 1 include respectively oil Memory space 51 is for making first and 2 grades of (second) cylinder 1A and 8, intermediate plate 7 and rear cover 9 be immersed under vacuum oil 17.

As shown in figure 5, in cooling-water duct, 1 grade of (first) cylinder cooling water channel (going out) 23 and intermediate plate cooling water 1 grade of (first) cylinder cooling jacket 18 is connected to by channel (entering) 24 with intermediate plate coolant jacket 19, and intermediate plate cooling jacket 19 and 2 Each section between grade (second) cylinder block cooling water set 20 is cold by 25 and 2 grades of (second) cylinder bodies of intermediate plate cooling-water duct (going out) But aquaporin (entering) 26 is connected to.In addition, each section between 2 grades of (second) cylinder block cooling water sets 20 and rear cover cooling jacket 21 is logical 2 grades of (second) cylinder body channels (going out) 27 are crossed to be connected to rear cover cooling-water duct (entering) 28.Rear cover cooling jacket 21 is configured to will be cold But water cycles through the cooling water outlet port 29 of the cooling water outlet port flange 30 fixed to oilcan body 2.Such as the institutes of Fig. 5 to 9 Show, the both ends for outputting and inputting channel and being formed in each cooling jacket 18,19,20 and 21 of each cooling water, cooling jacket 18, 19,20 and 21 respectively have the shape space fan (hand fan), i.e., the formation facing with each other on the channel of farthest cooling-water duct.

In addition, the axis and the first rotor 6 of motor 50 by pump side shaft coupling 48 and motor side shaft coupling 49 by being formed A pair of of shaft coupling 48 and 49 connect, and oil pump 13 is mounted in shell 14, and the Initial Entry port of cooling water is formed in 1 grade (the first) at cylinder cooling jacket 18, and the last outlet port 29 of cooling water is formed at the cooling jacket 21 of rear cover 9.Such as figure Shown in 6 and 8, it is equipped with the first row air valve 39 for outwardly opening the first exhaust passage 38 of 1 grade of (first) cylinder 1A, and Second row air valve 43 for outwardly opening the second exhaust channel 42 of 2 grades of (second) cylinders 8.1 grade of (first) cylinder 1A's Pass through 2 grades of (second) cylinder-suction ports 41 from 1 grade in Fig. 8 in its residual gas after being discharged by first row air valve 39 (the first) cylinder 1A is input to 2 grades of (second) cylinders 8, and is compressed by the rotation of the second rotor 11, and in second exhaust Valve 43 is discharged to the outside when opening by the second exhaust channel 42 of opposite side and exhaust port.

As shown in Fig. 6 to 9, first and 2 grades of (second) gas of high temperature heat are aspirated and compress and generate around due to gas The outside of cylinder 1A and 8, intermediate plate 7 and rear cover 9 form oily memory space 51, and vacuum oil 17 is stored in oily memory space 51. Equipped with being contacted with cooling jacket 18,19 and 20 and be projected into one or one of each cooling jacket from each component 1A, 7 or 8 Protruded above rib 31A, 32A and 32A, and oil cycles through projecting rib 31A, 32A and 32A, so vacuum oil 17 can be greatly promoted Cooling.

Meanwhile as shown in figs. 4 and 6, the opening 52 of 1 grade of (first) cylinder cooling jacket 18 is covered by cooling water cover 16, and Cooling water drainage exit port 45 is formed at cooling water cover 16.

Reference numeral 47 is indicated for fixing vacuum-packed lip seal.

The present invention relates to solved the problems, such as since overheat causes in conventional pumps, more specifically based on three-member type oil cooling structure Stablize pump environment so that providing, wherein the structure of vacuum pump is modified to form cooling water at each compartment of pump module Cover and circulate cool water through the structure of cooling jacket, thus can by will at pump module generate heat directly cooling come Prevent the temperature of pump module from increasing, and oil can be further further cold at the contact surface of the vacuum oil of expansion structure significantly But, which contacts with the cooling jacket of pump module, and when the oil 17 transmitted by oil pump is input to pump module, is worn in oil While crossing oily channel 31 and 32, oil can by cooling water cooling each in cooling jacket 18,19 and 20, and cooling oil Pump module is inputted again, and thus preventing the temperature of pump module from increasing.

The present invention is expected to provide following operating effect, so industrial applicability is good.

The quantity of each component can be reduced so that be configured to the pump housing and first (master) cylinder configuration of two parts form in the past The form of integrated pump gas cylinder, so being manufactured into including material cost, processing cost, assembly cost and maintenance cost Originally it can greatly save.The present invention, which is modified into, can prevent oil temperature from increasing to by 1 grade of (first) cylinder in pump housing cylinder Cooling jacket is formed at outer wall and absorbs the heat generated at first (master) cylinder, and cooling water circulation is directly passed through into cooling Water jacket.

The present invention is modified into such structure, wherein the cooling water for flowing through the cooling jacket of pump module can be by the oil of pump Temperature is maintained at 60 DEG C hereinafter, thus to solve the problems, such as that the overheat due to pump causes.

In the improvement pump of the present invention, each critical piece of cylinder, rotor, blade, bearing, air bleeding valve etc. is steady It is operated under stand oil temperature environment, therefore improves the problem of causing due to thermal expansion, sealing, friction etc., so the vacuum of pump can be improved Degree and exhaust velocity, and because of the durability of each component and the replacement cycle of oil-extended styrene buadiene rubber, environmental pollution phase can be saved When replacing each component with using detergent and the waste oil disposal generated when replacing contaminated oil environment dirt can occur for the cost of pass Contaminate relevant cost.

In the improved structure of the present invention, by forming cooling water at intermediate plate, the second (pair) cylinder and rear cover Set, cooling water can absorb the heat generated at each component of pump module, thus to prevent the temperature of pump module from increasing and be cold But at the oily contact surface that water contacts but by oil cooling.Specifically, the oil channel outstanding out of cooling jacket is cycled through in oil While oil can be by cooling water cooling, and cooling oil is input in pump thus to improve the problem of being caused due to the overheat of oil.

Oil temperature raising is higher, and oily steam pressure increase is higher, it means that can not possibly obtain the vacuum of its intermediate pump Pressure of the degree less than the steam pressure of oil.Given oil temperature raising is higher, and the vacuum degree of pump is proportional therewith to reduce lower problem, It can prevent oil temperature from increasing under the auxiliary relative to the direct cooling means of pump module, thereby, it is ensured that the oil temperature environment stablized, institute Can steadily obtain the necessary vacuum degree of pump.

If oil overheat, chemically reacts.If by deep fat front pump module and for lubricating and sealing behaviour Make, then in the gap for each operation part that oil is input to each component and may be hardened and may be coated on each component, moisten thus Sliding operation stops, and each modular unit can be with problem be blocked, this leads to the unexpected stopping of pump, but the present invention can provide stable Oil temperature environment, with thus extend the service life of pump simultaneously pump the when of repairing save component costs, maintenance cost etc. at This.

Each example embodiment for the present invention having been described so far, they are that those skilled in the art implement this hair Known optimal mode when bright.Due to the present invention can several kinds of forms implement, without departing from the spirit of the present invention or basic Feature, so, it should also be understood that examples detailed above is not limited by any details described above, unless otherwise prescribed, but phase Instead, it should think widely to be incorporated within the spirit and scope of the invention such as claims limited, therefore, fall into right and want The all changes within the requirement and boundary of book and modification are asked, or so requires the equivalent with boundary, therefore will be by attached power Included by sharp claim.

[reference numeral]

1:Pump housing cylinder

2:Oilcan body

3:Top cover

4:Motor field frame

5:Protecgulum

6:The first rotor

7:Intermediate plate

8:2 grades of (second) cylinders

9:Rear cover

10:First blade

11:Second rotor

12:Second blade

13:Oil pump

14:Oil pump case

15:Oil seal lid

16:Cooling water cover

17:Vacuum oil

18:1 grade of (first) cylinder cooling jacket

19:Intermediate plate cooling jacket

20:2 grades of (second) cylinder cooling jackets

21:Rear cover cooling jacket

22:Cooling water inlet port

23:1 grade of (first) cylinder cooling jacket (going out)

24:Intermediate plate cooling-water duct (enters)

25:Intermediate plate cooling-water duct (goes out)

26. 2 grades of (second) cylinder cooling jackets (entering)

27:2 grades of (second) cylinder channels (going out)

28:Rear cover cooling-water duct (enters)

29:Cooling water outlet port

30:Cooling water outlet port flange

31:Oily channel

32:Oily channel

31A:Projecting rib

32A:Projecting rib

33:Bearing

34:Bearing

35:Suction ports

36:Suction channel

37:The anti-flow prevention valve of oil

38:First exhaust passage

39:First row air valve

40:Intermediate plate air intake passage

41：2 grades of (second) cylinder-suction ports

42:Second exhaust channel

43:Second row air valve

44:Exhaust port

45:Cooling water drainage exit port

46:Cooling water passing away

47:Lip seal

48:Pump side shaft coupling

49:Motor side shaft coupling

50:Motor

51:Oily memory space

52:Opening

Claims (6)

1. a kind of rotary vacuum pump using vacuum oil, including：

Pump housing cylinder, the pump housing cylinder are configured with 1 grade of cylinder body of monomeric form；

Oilcan body, the oilcan body are fixed to the side of the pump housing cylinder；

Intermediate plate, the intermediate plate are fixed to the side of 1 grade of cylinder in the oilcan body；

2 grades of cylinders, 2 grades of cylinders are fixed to the side of the intermediate plate；

Fixed rear cover, the fixed rear cover cover the side of 2 grades of cylinders；

Protecgulum, the protecgulum are fixed to the outside of the pump housing cylinder；

Oil pump case, the oil pump case are fixed to the side of the protecgulum；

Oil seal lid, the oil seal lid are fixed to the side of the oil pump case；

Motor field frame, the motor field frame are fixed to the pump housing cylinder, while surrounding and the fenced oil pump case and institute State oil seal lid；

The first rotor, the first rotor is across described in the oil pump case, the oil seal lid and 1 grade of cylinder and use Oil pump case is mounted pivotably under the auxiliary of bearing；

Motor, the motor are fixed at the motor field frame (4) to drive the first rotor；

Second rotor, second rotor is integrally formed with the first rotor and can by means of bearing quilt at the intermediate plate It rotationally supports and extends towards 2 grades of cylinders；

First blade, first blade by 1 grade of cylinder the first rotor rotation and in 1 grade of cylinder Wall is in close contact, and aspirates, compresses and be discharged gas；

Suction port, the suction port is arranged at the pump housing cylinder, for the gas that will be aspirated from the vacuum equipment Body is supplied to 1 grade of cylinder；

Second blade, second blade are rotated by second rotor and are in close contact with the inner wall of 2 grades of cylinders, And aspirate, compress and be discharged the gas transmitted from 1 grade of cylinder；

Discharge port, the discharge port are formed at the oilcan body, to which the gas being discharged from 2 grades of cylinders to be discharged To outside；

1 grade of cylinder cooling jacket, 1 grade of cylinder cooling jacket are formed at 1 grade of cylinder；

Intermediate plate cooling jacket, the intermediate plate cooling jacket are formed at the intermediate plate；

2 grades of cylinder cooling jackets, 2 grades of cylinder cooling jackets are formed at 2 grades of cylinders；

Rear cover cooling jacket, the rear cover cooling jacket are formed at the rear cover；And

Multiple cooling-water ducts, the multiple cooling-water duct are configured to that the cooling water circulation is guided to pass through each cooling water Set；

The wherein described oilcan body and the pump housing cylinder include respectively oily memory space, for described 1 grade and 2 grades of cylinders, it is described in Between plate and the rear cover to be immersed under the vacuum oil.

2. pump as described in claim 1, which is characterized in that the axis of the motor and the first rotor are connected using shaft coupling It connects.

3. pump as described in claim 1, which is characterized in that oil pump is mounted on inside the oil pump case.

4. pump as described in claim 1, which is characterized in that cooling water inlet port is formed in 1 grade of cylinder cooling jacket Place, and cooling water outlet port is formed at the rear cover.

5. pump as described in claim 1, which is characterized in that further include：

First row air valve, the first row air valve are configured to the first exhaust passage of 1 grade of cylinder to external opening； And second row air valve, the second row air valve are configured to the second exhaust channel of 2 grades of cylinders to external opening.

6. the pump as described in any one of claim 1 to 5, which is characterized in that at least one projecting rib from 1 grade of cylinder, Any of the intermediate plate and 2 grades of cylinders are protruded along the direction of each cooling jacket, and logical equipped with wherein oil cycle Cross the oily channel of each projecting rib.