CN106145021B - Optical micro/nano cavity resonator structure and preparation method thereof - Google Patents
Optical micro/nano cavity resonator structure and preparation method thereof Download PDFInfo
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- CN106145021B CN106145021B CN201510137590.7A CN201510137590A CN106145021B CN 106145021 B CN106145021 B CN 106145021B CN 201510137590 A CN201510137590 A CN 201510137590A CN 106145021 B CN106145021 B CN 106145021B
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Abstract
The present invention provides a kind of optical micro/nano cavity resonator structure and preparation method thereof, the optical micro/nano cavity resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, the single particle chain is made up of multiple spaced particles, and the spacing distance between described two single particle chains make it that the resonant wavelength of the optical micro/nano cavity resonator structure is the wavelength of working electromagnet ripple.The single particle chain of total reflection characteristic present invention utilizes to(for) specific polarization light, by optimizing the structure and the distance between two single particle chains of single particle chain, obtain a kind of new high-quality-factor optical micro/nano resonator.Resonator of the present invention designed by using the total reflection of two single particle chains, has the characteristics of low-loss, high-quality-factor and small size, has good application prospect in integrated optics field.
Description
Technical field
The present invention relates to a kind of structure of optical micro/nano resonator and preparation method thereof, and two are based on more particularly, to one kind
Optical resonator of high-quality-factor of micro-nano structure of single particle chain and preparation method thereof.
Background technology
Optical resonator has huge application in optical field, and wherein Fabry-Paro resonator is optical resonator
In most widely used one kind.Quality factor reflection is one of most critical index of Fabry-Paro resonator performance level,
And the quality factor of resonator depends primarily on the performance of speculum.It is anti-employed in most of Fabry-Paro resonator
It is traditional speculum based on metallic film to penetrate mirror, this to be realized under certain bandwidth based on the speculum of metallic film pair
The reflection of electromagnetic wave；But for blue light or the light of higher frequency, because the skin depth of metal material significantly becomes big, thus
Metal greatly increases to the absorption loss of light in itself, and this causes the conventional mirror performance based on metallic film to be greatly reduced, pole
The big quality factor for limiting resonator.
In order to avoid the electromagnetic consumable problem of metal material, the resonator of the higher quality factor is manufactured in specific band, closely
Nian Lai researcher is done a lot of work in terms of nonmetal medium material to realize the total reflection of light.For example, distribution bragg
Reflector (DBR), based on the photonic crystal of band gap mechanism, resonant grating etc..
In recent years, the micronano optical structure of single-particle and its close-packed arrays particle has been widely used in physics and work
Cheng Xuezhong.Specific single particle chain micro-nano structure can realize the broadband to incident light, wide angle total reflection, therefore can conduct
High performance speculum.
In view of the above, there is provided a kind of optical micro/nano resonator knot with high-quality-factor, low-loss and small size
Structure is necessary.
The content of the invention
In view of the above the shortcomings that prior art, it is an object of the invention to provide a kind of optical micro/nano cavity resonator structure
And preparation method thereof, to realize a kind of optical micro/nano cavity resonator structure with high-quality-factor, low-loss and small size.
In order to achieve the above objects and other related objects, the present invention provides a kind of optical micro/nano cavity resonator structure, the light
Learning micro-nano cavity resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, the single particle chain
It is made up of multiple spaced particles, the spacing distance between described two single particle chains causes the optical micro/nano resonance
The resonant wavelength of cavity configuration is the wavelength of working electromagnet ripple.
As a kind of preferred scheme of the optical micro/nano cavity resonator structure of the present invention, the lattice constant of the single particle chain
And the electromagnetic wavelength of specific polarization that the radius of medium, its each particle works according to optical micro/nano cavity resonator structure determines, with
Make single particle chain that there is total reflection function to the electromagnetic wavelength of the specific polarization.
As a kind of preferred scheme of the optical micro/nano cavity resonator structure of the present invention, between described two single particle chains
Distance is grown for the chamber of optical micro/nano cavity resonator structure.
As a kind of preferred scheme of the optical micro/nano cavity resonator structure of the present invention, each particle is in the single particle chain
Linear periodic arrangement.
As a kind of preferred scheme of the optical micro/nano cavity resonator structure of the present invention, the medium of the single particle chain includes
One kind in Si, Ge and GaN.
As a kind of preferred scheme of the optical micro/nano cavity resonator structure of the present invention, each particle in the single particle chain
It is shaped as spheroidal.
The present invention also provides a kind of preparation method of optical micro/nano cavity resonator structure, including step：
1) electromagnetic wavelength of the specific polarization to be worked according to optical micro/nano cavity resonator structure, design each in single particle chain
The lattice constant of the radius of particle and single particle chain, and the medium of corresponding single particle chain is determined, so that described single
Particle chain has the reflectivity of maximum to the electromagnetic wavelength of the specific polarization；
2) according to the parameter of the single particle chain designed in step 1), the distance between two row's particle chains, i.e. optics are determined
The chamber length of micro-nano cavity resonator structure, so that the resonant wavelength of optical micro/nano cavity resonator structure is the wavelength of working electromagnet ripple.
As a kind of preferred scheme of the preparation method of the optical micro/nano cavity resonator structure of the present invention, the single particle chain
Medium include Si, Ge and GaN in one kind.
As a kind of preferred scheme of the preparation method of the optical micro/nano cavity resonator structure of the present invention, the single particle chain
In each linearly periodic arrangement of particle.
As a kind of preferred scheme of the preparation method of the optical micro/nano cavity resonator structure of the present invention, the single particle chain
In each particle be shaped as spheroidal.
As described above, the present invention provides a kind of optical micro/nano cavity resonator structure and preparation method thereof, the optical micro/nano is humorous
Resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, and the single particle chain is by multiple
Formed every the particle of arrangement, the spacing distance between described two single particle chains causes the optical micro/nano cavity resonator structure
Resonant wavelength is the wavelength of working electromagnet ripple.The single particle chain of total reflection characteristic present invention utilizes to(for) specific polarization light,
By optimizing the structure and the distance between two single particle chains of single particle chain, obtain a kind of new high-quality because
Sub- optical micro/nano resonator.Resonator of the present invention designed by using the total reflection of two single particle chains, has low-loss, height
The characteristics of quality factor and small size, there is good application prospect in integrated optics field.
Brief description of the drawings
Fig. 1 is shown as the structural representation of the optical micro/nano cavity resonator structure of the present invention.
Fig. 2 is shown as the surface of intensity distribution of the optical micro/nano cavity resonator structure of the present invention in resonance.
Fig. 3 is shown as normalized spatial spectrum of the optical micro/nano cavity resonator structure in different cavity length L of the present invention, L in figure
Unit is micron.
Component label instructions
10 single particle chains
101 particles
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Refer to Fig. 1~Fig. 3.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, the component relevant with the present invention is only shown in schema then rather than according to package count during actual implement
Mesh, shape and size are drawn, and kenel, quantity and the ratio of each component can be a kind of random change during its actual implementation, and its
Assembly layout kenel may also be increasingly complex.
As shown in figure 1, the present embodiment provides a kind of optical micro/nano cavity resonator structure, the optical micro/nano cavity resonator structure bag
Two single particle chains 10 to working electromagnet ripple with total reflection function are included, the single particle chain 10 is spaced by multiple
Particle 101 form, the spacing distance between described two single particle chains 10 causes the optical micro/nano cavity resonator structure
Resonant wavelength is the wavelength of working electromagnet ripple.
As an example, the lattice constant and medium of the single particle chain, the radius of its each particle are humorous according to optical micro/nano
The electromagnetic wavelength of the specific polarization of resonator structure work determines, so that electromagnetic wave ripple of the single particle chain to the specific polarization
It is long that there is total reflection function.
As an example, the distance between described two single particle chains are grown for the chamber of optical micro/nano cavity resonator structure.
As an example, each linearly periodic arrangement of particle in the single particle chain.
As an example, the medium of the single particle chain includes one kind in Si, Ge and GaN.
As an example, each particle is shaped as spheroidal in the single particle chain.
In the present embodiment, media of the optical micro/nano cavity resonator structure selection GaN as particle chain, the folding of the medium
Rate is penetrated as 2.5.The lattice constant a of single particle chain is 445nm, and the radius r of particle post is 132nm.Now, the spy of the work
Determine the blue light that electromagnetic wave is TE polarizations, when the light normal incidence that wavelength is 482nm is to single particle chain, it can be obtained by calculating
Reflectivity is 0.9999185, that is, has total reflection function.For the single particle chain of above-mentioned parameter, Fig. 2, which gives, works as resonator
In the long L of several different chambers, normalized spatial spectrum corresponding to difference.Shown in foundation Fig. 2, the optical micro/nano resonator of the present embodiment
The long L of resonator of structure can be identified as 1um, and now resonant wavelength is 482nm, just equal with lambda1-wavelength；It is now humorous
Shake chamber quality factor be 166555.The distribution of the light intensity of optical micro/nano cavity resonator structure with above-mentioned parameter is as shown in Figure 3.
As shown in figure 1, the present embodiment also provides a kind of preparation method of optical micro/nano cavity resonator structure, including step：
Step 1) is carried out first, the electromagnetic wavelength of the specific polarization to be worked according to optical micro/nano cavity resonator structure, design
The lattice constant of the radius of each particle 101 and single particle chain in single particle chain 10, and determine corresponding single particle chain
Medium so that the single particle chain have to the electromagnetic wavelength of the specific polarization maximum reflectivity；
As an example, the medium of the single particle chain includes one kind in Si, Ge and GaN.
As an example, each linearly periodic arrangement of particle in the single particle chain.
As an example, each particle is shaped as spheroidal in the single particle chain.
In the present embodiment, media of the GaN as particle chain is selected, its refractive index is 2.5.The lattice of single particle chain is normal
Number a is 445nm, and the radius r of particle post is 132nm.Now, the specific electromagnetic wave of the optical micro/nano cavity resonator structure work is
The blue light of TE polarizations, when the light normal incidence that wavelength is 482nm is to single particle chain, can obtain its reflectivity by calculating is
0.9999185。
Then step 2) is carried out, according to the parameter of the single particle chain 10 designed in step 1), determines two row's particle chains 10
The distance between, i.e., the chamber of optical micro/nano cavity resonator structure is grown, so that the resonant wavelength of optical micro/nano cavity resonator structure is work
The wavelength of electromagnetic wave.Fig. 2 is given when resonator is in the long L of several different chambers, normalized spatial spectrum corresponding to difference.For upper
State the single particle chain of parameter, it may be determined that when the long L of resonator is 1um, its resonant wavelength is 482nm, just with incident light wave
Length is equal；Now the quality factor of resonator is 166555.The light intensity of optical micro/nano cavity resonator structure with above-mentioned parameter
Distribution is as shown in Figure 3.
It is seen that the effect institute that the present invention is totally reflected using single particle chain substitution conventional planar mirror to electromagnetic wave
The structure of the laser resonant cavity of design, its quality factor are at a relatively high.In addition, the low-loss due to the structure and height are compact again
Characteristic, the present invention have good development prospect in integrated optics field, can be widely used in photoelectric chip.
As described above, the present invention provides a kind of optical micro/nano cavity resonator structure and preparation method thereof, the optical micro/nano is humorous
Resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, and the single particle chain is by multiple
Formed every the particle of arrangement, the spacing distance between described two single particle chains causes the optical micro/nano cavity resonator structure
Resonant wavelength is the wavelength of working electromagnet ripple.The single particle chain of total reflection characteristic present invention utilizes to(for) specific polarization light,
By optimizing the structure and the distance between two single particle chains of single particle chain, obtain a kind of new high-quality because
Sub- optical micro/nano resonator.Resonator of the present invention designed by using the total reflection of two single particle chains, has low-loss, height
The characteristics of quality factor and small size, there is good application prospect in integrated optics field.So the present invention effectively overcomes
Various shortcoming of the prior art and have high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (10)
- A kind of 1. optical micro/nano cavity resonator structure, it is characterised in that：The optical micro/nano cavity resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, described Single particle chain is made up of multiple spaced particles, and the spacing distance between described two single particle chains causes the light The resonant wavelength for learning micro-nano cavity resonator structure is the wavelength of working electromagnet ripple.
- 2. optical micro/nano cavity resonator structure according to claim 1, it is characterised in that：The lattice of the single particle chain is normal The electromagnetic wavelength determination for the specific polarization that number and medium, the radius of its each particle work according to optical micro/nano cavity resonator structure, So that single particle chain has total reflection function to the electromagnetic wavelength of the specific polarization.
- 3. optical micro/nano cavity resonator structure according to claim 1, it is characterised in that：Between described two single particle chains Distance for optical micro/nano cavity resonator structure chamber grow.
- 4. optical micro/nano cavity resonator structure according to claim 1, it is characterised in that：The medium bag of the single particle chain Include one kind in Si, Ge and GaN.
- 5. optical micro/nano cavity resonator structure according to claim 1, it is characterised in that：Each particle in the single particle chain Linearly periodic arrangement.
- 6. optical micro/nano cavity resonator structure according to claim 1, it is characterised in that：Each particle in the single particle chain Be shaped as spheroidal.
- 7. a kind of preparation method of optical micro/nano cavity resonator structure, it is characterised in that the preparation method includes step：1) electromagnetic wavelength of the specific polarization to be worked according to optical micro/nano cavity resonator structure, designs each particle in single particle chain Radius and single particle chain lattice constant, and the medium of corresponding single particle chain is determined, so that the single particle Chain has the reflectivity of maximum to the electromagnetic wavelength of the specific polarization；2) according to the parameter of the single particle chain designed in step 1), the distance between two row's particle chains, i.e. optical micro/nano are determined The chamber length of cavity resonator structure, so that the resonant wavelength of optical micro/nano cavity resonator structure is the wavelength of working electromagnet ripple.
- 8. the preparation method of optical micro/nano cavity resonator structure according to claim 7, it is characterised in that：The single particle The medium of chain includes one kind in Si, Ge and GaN.
- 9. the preparation method of optical micro/nano cavity resonator structure according to claim 7, it is characterised in that：The single particle Each linearly periodic arrangement of particle in chain.
- 10. the preparation method of optical micro/nano cavity resonator structure according to claim 7, it is characterised in that：The single grain Each particle is shaped as spheroidal in subchain.
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| CN102306897A (en) * | 2011-08-22 | 2012-01-04 | 华南理工大学 | Ultra narrow linewidth low noise high power single frequency fiber laser |
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| US6956886B1 (en) * | 2001-11-02 | 2005-10-18 | Patel C Kumar N | Discreetly tunable semiconductor laser arrangement for wavelength division multiplex communication systems |
| CN102124405B (en) * | 2008-05-30 | 2015-08-26 | 欧帕鲁克斯有限公司 | Tunable Bragg stack |
| KR20140140637A (en) * | 2012-04-06 | 2014-12-09 | 리얼디 인크. | Laser architectures |
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| CN101036271A (en) * | 2004-09-28 | 2007-09-12 | 费姆托激光产品股份有限公司 | Multiple-reflection delay line for a laser beam and resonator or short pulse laser device comprising a delay line of this type |
| US8320425B1 (en) * | 2009-11-23 | 2012-11-27 | University Of Central Florida Research Foundation, Inc. | Pump cavities for diode laser array pumped laser rods |
| CN102306897A (en) * | 2011-08-22 | 2012-01-04 | 华南理工大学 | Ultra narrow linewidth low noise high power single frequency fiber laser |
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Effective date of registration: 20170614 Address after: 226017 Jiangsu city of Nantong province science and Technology Industrial Park of Su Tong Jiang Cheng Road No. 1088 Jiang Bei Lou Park Development Research Applicant after: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Applicant after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226009 Nantong science and Technology Industrial Park, Su Tong Road, Jiangsu, No. 14, No. 30 Applicant before: JIANGSU SUNFY OPTOELECTRONICS TECHNOLOGY CO.,LTD. Applicant before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Applicant before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Nantong Xinwei Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |