CN106128920B - Branch's silver gates the active display for many faceted pebble composite cathode structures that interlock - Google Patents
Branch's silver gates the active display for many faceted pebble composite cathode structures that interlock Download PDFInfo
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- CN106128920B CN106128920B CN201610532801.1A CN201610532801A CN106128920B CN 106128920 B CN106128920 B CN 106128920B CN 201610532801 A CN201610532801 A CN 201610532801A CN 106128920 B CN106128920 B CN 106128920B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/04—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/467—Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
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- Cold Cathode And The Manufacture (AREA)
Abstract
The invention discloses the active display that a kind of branch silver gates many faceted pebble composite cathode structures that interlock, including the vacuum chamber being made up of front glass panel, rear glass panel and clear glass frame；The anode outer lead layer that have anode membrane electrode layer on front glass panel, is connected with anode membrane electrode layer and prepare phosphor powder layer in anode film electrode layer；There is the reversely relatively oblique straight two-door control side's of being misplaced ring bar cathode construction on rear glass panel；Getter and supporting walls subsidiary component in vacuum chamber.Have the advantages that cost of manufacture is cheap, manufacture craft is simple, display lighting brightness is high.
Description
Technical field
The invention belongs to vacuum science and technical field, integrated circuit science and technology field, microelectronics science and technology
Field, display technology field, the field that intersects in nanometer science and technology field and photoelectron science and technology field, are related to
And to the making of plane Flied emission active display, and in particular to the plane Flied emission active display of carbon nanotube cathod
Make, be related specifically to active display and its manufacture craft that a kind of branch's silver gates many faceted pebble composite cathode structures that interlock.
Background technology
CNT is a kind of electron source material of excellent performance, in the presence of outside highfield intensity, without extra
Energy can just launch substantial amounts of electronics.After being successfully applied with CNT in Flied emission active display, for
The research of field emission light-emitting display, had caused the highest attention of numerous scientific research personnel already.The Flied emission of carbon nanotube cathod
Active display has many excellent specific properties, for example, higher image quality, broader display view angle, lower power
Loss etc..In terms of device making is particularly shown, silk-screen printing technique is successfully introduced into so that the system of large area carbon nanotube cathod
It has been fully able to realize, while can also greatly reduce the cost of manufacture of Integral luminous display, this causes field emission light-emitting
Display has stepped more solid paces towards practical direction.
But, in the field emission light-emitting display of three-stage structure, also there are many technical barriers and await solution.Gate pole
It is the key element in three-stage structure field emission light-emitting display, its operating voltage will directly control whether CNT enters
Row electron emission, so the making of gate pole is the thing for having to careful consideration.At present, the coverage between gate pole and negative electrode
Bigger than normal, it is existing that this has resulted in that gate work voltage is high, gate pole significantly weakens to the control action of CNT etc.
The appearance of elephant；Meanwhile, the making structure of gate pole is excessively complicated, and this virtually just increases being fabricated to for Integral luminous display
This.The making area of carbon nanotube cathod is too small, and this will result directly in being greatly decreased for anode working current, is unfavorable for further
Improve the luminous intensity of field emission light-emitting display；In carbon nanotube cathod, effective carbon nanometer of electron emission can be carried out
Pipe is also on the low side, and this is also unfavorable for the electronic transmitting efficiency for improving CNT.
The content of the invention
Goal of the invention：It is an object of the invention to overcome defect present in above-mentioned active display and deficiency, there is provided one
Kind of manufacture craft is simple, make branch's silver gate that Stability Analysis of Structures is reliable, display lighting brightness is high, and many faceted pebbles that interlock are answered
Close the active display and its manufacture craft of cathode construction.
Technical scheme：Branch's silver of the present invention gates the active display for many faceted pebble composite cathode structures that interlock, including true
Empty room and getter and knee wall subsidiary component in vacuum chamber, the vacuum chamber are encapsulated by negative electrode packaged glass, anode
Glass and clear glass frame are constituted；There are anode film conducting shell, extended line layer and fluorescent material outside anode on anode packaged glass
Layer, the outer extended line layer of the anode is connected with anode film conducting shell, and the phosphor powder layer is prepared on anode film conducting shell；
Negative electrode packaged glass Shang You branches silver gates many faceted pebble composite cathode structures that interlock.
The substrate that branch's silver gates many faceted pebble composite cathode structures that interlock is negative electrode packaged glass；Negative electrode packaged glass
On the insulation paste layer of printing form black coating；The outer extended line layer of silver slurry layer formation negative electrode of black supratectal printing；
The insulation paste layer of printing on the outer extended line layer of negative electrode forms one layer of cathode substrate；One layer of cathode substrate is in hexagonal pyramid bench-type,
Thereon, lower surface is plane, and lateral wall is six sides of hexagonal pyramid body；There is delthyrium, triangle in one layer of cathode substrate
The silver slurry layer formation negative electrode connecting line layer of printing in hole；Negative electrode connecting line layer and the outer extended line layer of negative electrode are interconnected；Negative electrode
The insulation paste layer of printing in one layer of substrate forms two layers of cathode substrate；Two layers of presentation rectangular pyramid of cathode substrate, its following table
Face is plane, and lateral wall is four sides of rectangular pyramid, and top is cone, and the lower surface is located at one layer of upper table of cathode substrate
On face；The longitudinal center axis and the longitudinal center axis of one layer of cathode substrate that two layers of cathode substrate coincide, and are each perpendicular to the moon
Pole packaged glass；The metal level formation cathode electrode lower floor of etching on one layer of lateral wall of cathode substrate；Cathode electrode lower floor is covered
It is placed on the top half of one layer of lateral wall of cathode substrate；The metal level formation cathode electrode of the etching of one layer of upper surface of cathode substrate
Middle level；Cathode electrode middle level is covered in the upper surface of one layer of cathode substrate, is looped around around two layers of cathode substrate；Cathode electrode
Middle level, cathode electrode lower floor and negative electrode connecting line layer are interconnected；The metal level of the etching of cathode substrate two-layer surface forms the moon
Pole electrode upper strata；Cathode electrode upper strata is covered in the lateral wall of two layers of cathode substrate, and is interconnected with cathode electrode middle level；It is black
The insulation paste layer of supratectal printing forms gate pole and increases layer；The upper and lower surface that gate pole increases layer is plane；Gate pole increases
Exist in high level and cathode electrode upper strata, cathode electrode middle level, cathode electrode lower floor, negative electrode base are exposed in circular port, circular port
Two layers of one layer of bottom and cathode substrate；The madial wall that gate pole increases circular port in layer is barrel surface；Gate pole increases the upper surface of layer
The silver slurry layer formation gate pole plane electrode layer of printing；Gate pole plane electrode layer increases layer upper surface close to circular port side positioned at gate pole
Edge position, and be looped around around circular port, its front end ends in gate pole and increases a layer upper surface rounded opening edge, not into circular port
It is prominent；The insulation paste layer of printing on gate pole plane electrode layer forms gate pole wall；The lower surface of gate pole wall is flat
Face, on gate pole plane electrode layer；The upper surface of gate pole wall is rounded opening edge Partial Height cave inward, close
The low arcwall face of high and remote rounded opening edge Partial Height；The silver slurry layer formation gate pole arc of the printing of gate pole wall upper surface
Face electrode layer；Gate pole cambered surface electrode layer is covered in the upper surface of gate pole wall, and is interconnected with gate pole plane electrode layer；Door
Increase the outer extended line layer of silver slurry layer formation gate pole of the printing on layer in pole；The outer extended line layer of gate pole and gate pole plane electrode layer are mutual
Connection；The insulation paste layer of printing on the outer extended line layer of gate pole cambered surface electrode layer, gate pole forms gate pole covering layer；CNT
Layer is prepared on cathode electrode lower floor, cathode electrode middle level and cathode electrode upper strata.
Specifically, the material of the negative electrode packaged glass is Pyrex or soda-lime glass.
Specifically, state branch's silver and gate the fixed position of staggeredly many faceted pebble composite cathode structures for negative electrode packaged glass；It is cloudy
Pole electrode lower floor is argent, molybdenum, nickel, chromium, tin or cobalt；Cathode electrode middle level is argent, molybdenum, nickel, chromium, tin or cobalt；Negative electrode
Electrode upper strata is argent, molybdenum, nickel, chromium, tin or cobalt.
The making of the active display for many faceted pebble composite cathode structures that interlock is gated present invention simultaneously provides above-mentioned branch silver
Technique, comprises the following steps：
1) making of negative electrode packaged glass：Scribing is carried out to flat soda-lime glass, negative electrode packaged glass is formed；
2) making of black coating：Form black after insulation paste, toasted, sintering process are printed on negative electrode packaged glass
Coating；
3) making of the outer extended line layer of negative electrode：Negative electrode is formed after silver paste, toasted, sintering process are printed on black coating
Outer extended line layer；
4) making of one layer of cathode substrate：Printed on black coating and form cloudy after insulation paste, toasted, sintering process
One layer of pole substrate；
5) making of negative electrode connecting line layer：Silver paste, toasted, sintering process are printed in the delthyrium of one layer of cathode substrate
Negative electrode connecting line layer is formed afterwards；
6) making of two layers of cathode substrate：Shape after insulation paste, toasted, sintering process is printed in one layer of cathode substrate
Into two layers of cathode substrate；
7) making of cathode electrode lower floor：A metal nickel dam is prepared on the lateral wall of one layer of cathode substrate, is etched
Cathode electrode lower floor is formed afterwards；
8) making in cathode electrode middle level：After a metal nickel dam, etching being prepared in one layer of upper surface of cathode substrate
Form cathode electrode middle level；
9) making on cathode electrode upper strata：Shape after a metal nickel dam, etching is prepared on two layers of surface of cathode substrate
Into cathode electrode upper strata；
10) gate pole increases the making of layer：Door is formed after insulation paste, toasted, sintering process are printed on black coating
Increase layer in pole；
11) making of gate pole plane electrode layer：Print silver paste, toasted, sintering process in the upper surface for increasing layer in gate pole
Gate pole plane electrode layer is formed afterwards；
12) making of gate pole wall：Printed on gate pole plane electrode layer after insulation paste, toasted, sintering process
Form gate pole wall；
13) making of gate pole cambered surface electrode layer：Silver paste, toasted, sintering process are printed on the surface of gate pole wall
Gate pole cambered surface electrode layer is formed afterwards；
14) making of the outer extended line layer of gate pole：Increase in gate pole and silver paste is printed on layer, formed after toasted, sintering process
The outer extended line layer of gate pole；
15) making of gate pole covering layer：Insulation paste is printed on extended line layer outside gate pole cambered surface electrode layer, gate pole, is passed through
Gate pole covering layer is formed after baking, sintering process；
16) branch's silver gates the cleaning for many faceted pebble composite cathode structures that interlock：Many faceted pebbles that interlock to branch's silver gate are combined
The surface of cathode construction carries out cleaning treatment, removes impurity and dust；
17) making of carbon nanotube layer：CNT is printed on cathode electrode lower floor, cathode electrode middle level and negative electrode electricity
On the upper strata of pole, carbon nanotube layer is formed；
18) processing of carbon nanotube layer：Carbon nanotube layer is post-processed, improves its field emission characteristic；
19) making of anode packaged glass：Scribing is carried out to flat soda-lime glass, anode packaged glass is formed；
20) making of anode film conducting shell：The tin indium oxide film layer for being covered in anode packaged glass surface is carved
Erosion, forms anode film conducting shell；
21) making of the outer extended line layer of anode：Shape after silver paste, toasted, sintering process is printed on anode packaged glass
Extended line layer outside into anode；
22) making of phosphor powder layer：Fluorescent material is formed after fluorescent material, toasted technique are printed on anode film conducting shell
Layer；
23) display devices are assembled：Getter is installed on to the non-display area of anode packaged glass；Then, by anode
Packaged glass, negative electrode packaged glass, clear glass frame and knee wall are assembled together, and are fixed with clip；
24) display devices are encapsulated：The display devices assembled are packaged with technique formation finished parts.
The step 21 is specially：Non-display area printing silver paste on anode packaged glass, after overbaking, most
High baking temperature：180 DEG C, highest baking temperature retention time：8 minutes；It is placed in sintering furnace and is sintered, highest sintering temperature
Degree：525 DEG C, maximum sintering temperature retention time：8 minutes.
The step 22 is specially：Fluorescent material is printed on anode film conducting shell on anode packaged glass, is then placed
Toasted in an oven, highest baking temperature is 120 DEG C, highest baking temperature retention time：10 minutes.
The step 24 is specially：Display devices are put into baking oven and toasted；It is put into sintering furnace and is sintered；
Device exhaust, sealed-off are carried out on exhaust station；Getter bake on roasting machine and disappeared, pin formation finished product is finally installed additional
Part.
Beneficial effect：The present invention has following significant progressive：
First, in described branch's silver gate interlocks many faceted pebble composite cathode structures, hexagonal pyramid bench-type negative electrode has been made
The composite construction of two layers of one layer of substrate and rectangular pyramid cathode substrate, and in cathode electrode lower floor, cathode electrode middle level, negative electrode electricity
Pole upper surface is prepared for carbon nanotube layer.On the one hand, in this three-dimensional composite construction, the making area quilt of carbon nanotube layer
Effectively expand.As carbon nanotube layer makes the increase of area, just have more CNTs and be involved in field emission electron,
This to further increase active display anode working current, strengthen active display luminosity be undoubtedly it is favourable.
On the other hand, in this three-dimensional composite construction, a lot " corner angle " are there are, i.e., round and smooth carbon nanotube layer is by " effectively curved
It is bent ".It is well known that in the electron emission process of CNT, there is " fringe field concentration " phenomenon, i.e., in CNT
" corner angle " place of layer, due to the influence of Curvature varying, electric-field intensity can be sharply increased, then can be sent out positioned at CNT herein
Project more electronics.Staggeredly many faceted pebble composite cathode structures take full advantage of " fringe field concentration " now to this branch's silver gate
As so contributing to further the gate work voltage of reduction active display, the power attenuation of reduction Integral luminous display.
Secondly, in this branch silver gate interlocks many faceted pebble composite cathode structures, the silver slurry layer system of sintering curing is utilized
Zuo Liao branches gate structure.Wherein gate pole plane electrode layer and gate pole cambered surface electrode layer is interconnected, belongs to gate pole
A part, the operating voltage of gate pole can also pass to gate pole plane electrode layer and gate pole cambered surface electrode layer simultaneously.So, it is same
Gate work voltage, it becomes possible to while controlling cathode electrode lower floor, cathode electrode middle level, more carbon are received on cathode electrode upper strata
Mitron.After appropriate gate work voltage is applied, CNT can carry out electron emission, and carbon nanotube emission electron amount
Change can change with the change of gate work voltage, this just embodies strong control work(of the gate pole to CNT
Can, required for this is naturally also high quality light-emitting display.
3rd, in this branch silver gate interlocks many faceted pebble composite cathode structures, gate pole has been produced carbon nanotube layer
Around.So, the electronics that CNT is launched, can be most of at a high speed to anode movement in the presence of anode high voltage
And form anode working current；The probability very little that gate pole is dammed to the electronics of carbon nanotube emission, the gate pole formed by
Operating current is also with regard to very little, and this is helpful to the power attenuation for reducing Integral luminous display.
In addition, in described branch's silver gate interlocks many faceted pebble composite cathode structures, not using special making material
Material, does not more use special manufacture craft, and this contributes to the cost of manufacture of further reduction Integral luminous display.Meanwhile,
In view of staggeredly many faceted pebble composite cathode structures making structures are very simple for this branch's silver gate, this is conducive to raising Integral luminous to show
Show the making yield rate of device.
Brief description of the drawings
Fig. 1 gives the vertical structure schematic diagram that branch's silver gate interlocks many faceted pebble composite cathode structures；
Fig. 2 gives the transversary schematic diagram that branch's silver gate interlocks many faceted pebble composite cathode structures；
Fig. 3 gives the structural representation for the active display that branch's silver gate interlocks many faceted pebble composite cathode structures；
In figure：The outer extended line layer 3 of negative electrode packaged glass 1, black coating 2, negative electrode, one layer 4 of cathode substrate, negative electrode connecting line
Layer 5, two layer 6 of cathode substrate, cathode electrode lower floor 7, cathode electrode middle level 8, cathode electrode upper strata 9, gate pole increase layer 10, gate pole
The outer extended line layer 14 of plane electrode layer 11, gate pole wall 12, gate pole cambered surface electrode layer 13, gate pole, gate pole covering layer 15, carbon are received
The outer extended line layer 19 of mitron layer 16, anode packaged glass 17, anode film conducting shell 18, anode, phosphor powder layer 20, getter 21,
Clear glass frame 22, knee wall 23.
Embodiment
The present invention is further described with reference to the accompanying drawings and examples, but the invention is not limited in this implementation
Example.
Branch's silver gate of the present embodiment interlock many faceted pebble composite cathode structures active display as shown in Figure 1, Figure 2 and Fig. 3
It is shown, including the vacuum chamber being made up of negative electrode packaged glass 1, anode packaged glass 17 and clear glass frame 22；In anode envelope
There is the outer extended line layer 19 of anode film conducting shell 18, the anode being connected with anode film conducting shell 18 on glaze 17 and prepare in sun
Phosphor powder layer 20 above pole film conducting shell 18；In the Shang You branches of negative electrode packaged glass 1, silver gates many faceted pebble composite cathodes that interlock
Structure；Getter 21 and the subsidiary component of knee wall 23 in vacuum chamber.
Wherein, staggeredly many faceted pebble composite cathode structures include negative electrode packaged glass 1, black coating 2, negative electrode to branch's silver gate
Outer extended line layer 3, one layer 4 of cathode substrate, negative electrode connecting line layer 5, two layer 6 of cathode substrate, cathode electrode lower floor 7, cathode electrode
Middle level 8, cathode electrode upper strata 9, gate pole increase layer 10, gate pole plane electrode layer 11, gate pole wall 12, gate pole cambered surface electrode layer
13rd, the outer extended line layer 14 of gate pole, gate pole covering layer 15 and carbon nanotube layer 16.
The backing material that branch's silver gates many faceted pebble composite cathode structures that interlock is glass, can be soda-lime glass, borosilicate
Glass, that is, negative electrode packaged glass 1；The insulation paste layer of printing on negative electrode packaged glass 1 forms black coating 2；It is black to cover
The outer extended line layer 3 of silver slurry layer formation negative electrode of printing on cap rock 2；The insulation paste layer of printing on the outer extended line layer 3 of negative electrode
Form cathode substrate one layer 4；The upper and lower surface of one layer 4 of cathode substrate presentation hexagonal pyramid bench-type, i.e. one layer 4 of cathode substrate is
Plane, the lateral wall that one layer 4 of cathode substrate is six sides of hexagonal pyramid body；There is delthyrium in one layer 4 of cathode substrate, as
The passage of negative electrode connecting line layer 5；The silver slurry layer formation negative electrode connecting line layer 5 of printing in one layer of 4 intermediate cam hole of cathode substrate；It is cloudy
Extended line layer 3 is interconnected outside pole connecting line layer 5 and negative electrode；The insulation paste layer shape of printing in one layer 4 of cathode substrate
Into two layer 6 of cathode substrate；The lower surface of two layer 6 of cathode substrate presentation rectangular pyramid, i.e. two layer 6 of cathode substrate is plane, is located at
On one layer of 4 upper surface of cathode substrate, the lateral wall that two layer 6 of cathode substrate is four sides of rectangular pyramid, two layer 6 of cathode substrate
Top be rectangular pyramid cone rather than plane；One layer 4 of the longitudinal center axis that two layer 6 of cathode substrate and cathode substrate
Longitudinal center axis is each perpendicular to negative electrode packaged glass 1, and is to overlap；The gold of etching on one layer of 4 lateral wall of cathode substrate
Belong to layer formation cathode electrode lower floor 7；Cathode electrode lower floor 7 is covered in the top half of one layer of 4 lateral wall of cathode substrate, i.e. negative electrode
Cathode electrode lower floor 7 is not present in the latter half for the hexagonal pyramid platform side that one layer 4 of substrate；The quarter of one layer of 4 upper surface of cathode substrate
The metal level formation cathode electrode middle level 8 of erosion；Cathode electrode middle level 8 is covered in the upper surface of one layer 4 of cathode substrate, is looped around the moon
Around two layer 6 of pole substrate；Cathode electrode middle level 8, cathode electrode lower floor 7 and negative electrode connecting line layer 5 are interconnected；Negative electrode
The metal level formation cathode electrode upper strata 9 of the etching on two layer of 6 surface of substrate；Cathode electrode upper strata 9 is covered in cathode substrate two layer 6
Lateral wall, and with cathode electrode middle level 8 be interconnected；The insulation paste layer of printing on black coating 2 forms gate pole and increased
Layer 10；The upper and lower surface that gate pole increases layer 10 is plane；Gate pole increases to exist in layer 10 to be exposed in circular port, circular port
Two layer 6 of cathode electrode upper strata 9, cathode electrode middle level 8, cathode electrode lower floor 7, one layer 4 of cathode substrate and cathode substrate；Gate pole increases
The madial wall of circular port is barrel surface in high level 10；Gate pole increases the silver slurry layer formation gate pole plane of the printing of the upper surface of layer 10
Electrode layer 11；Gate pole plane electrode layer 11 increases the upper surface of layer 10 close to rounded opening edge position positioned at gate pole, and is looped around circle
Around shape hole, its front end ends in gate pole and increases the upper surface rounded opening edge of layer 10, prominent not into circular port；Gate pole plane electricity
The insulation paste layer of printing on pole layer 11 forms gate pole wall 12；The lower surface of gate pole wall 12 is plane, positioned at door
On polar plane electrode layer 11；The upper surface of gate pole wall 12 be cave inward, close to rounded opening edge Partial Height it is high and
Away from the low arcwall face of rounded opening edge Partial Height；The silver slurry layer formation gate pole cambered surface of the printing of the upper surface of gate pole wall 12
Electrode layer 13；Gate pole cambered surface electrode layer 13 is covered in the upper surface of gate pole wall 12, and mutual with gate pole plane electrode layer 11
Connection；Gate pole increases the outer extended line layer 14 of silver slurry layer formation gate pole of the printing on layer 10；The outer extended line layer 14 of gate pole and gate pole
Plane electrode layer 11 is interconnected；The insulation paste of printing on the outer extended line layer 14 of gate pole cambered surface electrode layer 13, gate pole
Layer forms gate pole covering layer 15；CNT is prepared on cathode electrode lower floor 7, cathode electrode middle level 8, cathode electrode upper strata 9.
The fixed position that branch's silver gates many faceted pebble composite cathode structures that interlock is negative electrode packaged glass 1；Under cathode electrode
Layer 7 can be argent, molybdenum, nickel, chromium, tin, cobalt；Cathode electrode middle level 8 can be argent, molybdenum, nickel, chromium, tin, cobalt；Negative electrode
Electrode upper strata 9 can be argent, molybdenum, nickel, chromium, tin, cobalt.
The manufacture craft for the active display that above-mentioned branch's silver gates many faceted pebble composite cathode structures that interlock is as follows：
1) making of negative electrode packaged glass 1：Scribing is carried out to flat soda-lime glass, negative electrode packaged glass 1 is formed；
2) making of black coating 2：Print and formed after insulation paste, toasted, sintering process on negative electrode packaged glass 1
Black coating 2；
3) making of the outer extended line layer 3 of negative electrode：Printed on black coating 2 and form cloudy after silver paste, toasted, sintering process
Extremely outer extended line layer 3；
4) making of one layer 4 of cathode substrate：Print and formed after insulation paste, toasted, sintering process on black coating 2
One layer 4 of cathode substrate；
5) making of negative electrode connecting line layer 5：Silver paste, toasted, agglomerant are printed in the delthyrium of one layer 4 of cathode substrate
Negative electrode connecting line layer 5 is formed after skill；
6) making of two layer 6 of cathode substrate：After insulation paste, toasted, sintering process being printed in one layer 4 of cathode substrate
Form cathode substrate two layer 6；
7) making of cathode electrode lower floor 7：A metal nickel dam is prepared on the lateral wall of one layer 4 of cathode substrate, is carved
Cathode electrode lower floor 7 is formed after erosion；
8) making in cathode electrode middle level 8：A metal nickel dam is prepared in one layer 4 of upper surface of cathode substrate, is etched
Cathode electrode middle level 8 is formed afterwards；
9) making on cathode electrode upper strata 9：After a metal nickel dam, etching being prepared on two layer 6 of surface of cathode substrate
Form cathode electrode upper strata 9；
10) gate pole increases the making of layer 10：Print and formed after insulation paste, toasted, sintering process on black coating 2
Gate pole increases layer 10；
11) making of gate pole plane electrode layer 11：Print silver paste, toasted, sintering in the upper surface for increasing layer 10 in gate pole
Gate pole plane electrode layer 11 is formed after technique；
12) making of gate pole wall 12：Insulation paste, toasted, agglomerant are printed on gate pole plane electrode layer 11
Gate pole wall 12 is formed after skill；
13) making of gate pole cambered surface electrode layer 13：Silver paste, toasted, sintering are printed on the surface of gate pole wall 12
Gate pole cambered surface electrode layer 13 is formed after technique；
14) making of the outer extended line layer 14 of gate pole：Increase in gate pole and silver paste is printed on layer 10, after toasted, sintering process
Form the outer extended line layer 14 of gate pole；
15) making of gate pole covering layer 15：The printing insulation slurry on extended line layer 14 outside gate pole cambered surface electrode layer 13, gate pole
Gate pole covering layer 15 is formed after material, toasted, sintering process；
16) branch's silver gates the cleaning for many faceted pebble composite cathode structures that interlock：Many faceted pebbles that interlock to branch's silver gate are combined
The surface of cathode construction carries out cleaning treatment, removes impurity and dust；
17) making of carbon nanotube layer 16：CNT is printed on cathode electrode lower floor 7, cathode electrode middle level 8 and the moon
On pole electrode upper strata 9, carbon nanotube layer 16 is formed；
18) processing of carbon nanotube layer 16：Carbon nanotube layer 16 is post-processed, improves its field emission characteristic；
19) making of anode packaged glass 17：Scribing is carried out to flat soda-lime glass, anode packaged glass 17 is formed；
20) making of anode film conducting shell 18：The tin indium oxide film layer for being covered in the surface of anode packaged glass 17 is entered
Row etching, forms anode film conducting shell 18；
21) making of the outer extended line layer 19 of anode：Silver paste, toasted, sintering process are printed on anode packaged glass 17
The outer extended line layer 19 of anode is formed afterwards；Non-display area printing silver paste specifically on anode packaged glass 17, through overbaking
(highest baking temperature：180 DEG C, highest baking temperature retention time：8 minutes) after, it is placed in sintering furnace and is sintered (most
High sintering temperature：525 DEG C, maximum sintering temperature retention time：8 minutes)；
22) making of phosphor powder layer 20：Fluorescence is formed after fluorescent material, toasted technique are printed on anode film conducting shell 18
Bisque 20；Fluorescent material is printed on anode film conducting shell 18 specifically on anode packaged glass 17, is then placed within baking oven
Toasted (highest baking temperature be 120 DEG C, the highest baking temperature retention time：10 minutes)；
23) display devices are assembled：Getter 21 is installed on to the non-display area of anode packaged glass 17；Then, will
Anode packaged glass 17, negative electrode packaged glass 1, clear glass frame 22 and knee wall 23 are assembled together, and are fixed with clip；
24) display devices are encapsulated：The display devices assembled are packaged with technique formation finished parts, specifically will
Display devices are put into baking oven and toasted；It is put into sintering furnace and is sintered；Device exhaust, envelope are carried out on exhaust station
From；Getter 21 bake on roasting machine and disappeared, pin formation finished parts are finally installed additional.
Claims (7)
- The active display of many faceted pebble composite cathode structures 1. a kind of branch silver gate interlocks, including vacuum chamber and positioned at vacuum chamber Interior getter and knee wall subsidiary component, the vacuum chamber is by negative electrode packaged glass, anode packaged glass and clear glass frame Constituted；It is characterized in that：There are anode film conducting shell, extended line layer and phosphor powder layer, institute outside anode on anode packaged glass State the outer extended line layer of anode with anode film conducting shell to be connected, the phosphor powder layer is prepared on anode film conducting shell；In negative electrode Packaged glass Shang You branches silver gates many faceted pebble composite cathode structures that interlock；The substrate that branch's silver gates many faceted pebble composite cathode structures that interlock is negative electrode packaged glass；On negative electrode packaged glass The insulation paste layer of printing forms black coating；The outer extended line layer of silver slurry layer formation negative electrode of black supratectal printing；Negative electrode The insulation paste layer of printing on outer extended line layer forms one layer of cathode substrate；One layer of cathode substrate is in hexagonal pyramid bench-type, thereon, Lower surface is plane, and lateral wall is six sides of hexagonal pyramid body；Exist in one layer of cathode substrate in delthyrium, delthyrium The silver slurry layer formation negative electrode connecting line layer of printing；Negative electrode connecting line layer and the outer extended line layer of negative electrode are interconnected；Cathode substrate one The insulation paste layer of printing on layer forms two layers of cathode substrate；Two layers of presentation rectangular pyramid of cathode substrate, its lower surface is flat Face, lateral wall is four sides of rectangular pyramid, and top is cone, and the lower surface is located on one layer of upper surface of cathode substrate； The longitudinal center axis and the longitudinal center axis of one layer of cathode substrate that two layers of cathode substrate coincide, and are each perpendicular to negative electrode encapsulation Glass；The metal level formation cathode electrode lower floor of etching on one layer of lateral wall of cathode substrate；Cathode electrode lower floor is covered in the moon The top half of one layer of lateral wall of pole substrate；The metal level formation cathode electrode middle level of the etching of one layer of upper surface of cathode substrate； Cathode electrode middle level is covered in the upper surface of one layer of cathode substrate, is looped around around two layers of cathode substrate；Cathode electrode middle level, Cathode electrode lower floor and negative electrode connecting line layer are interconnected；The metal level formation cathode electrode of the etching of cathode substrate two-layer surface Upper strata；Cathode electrode upper strata is covered in the lateral wall of two layers of cathode substrate, and is interconnected with cathode electrode middle level；Black coating On printing insulation paste layer formed gate pole increase layer；The upper and lower surface that gate pole increases layer is plane；Gate pole increases in layer Exist and cathode electrode upper strata, cathode electrode middle level, cathode electrode lower floor, one layer of cathode substrate are exposed in circular port, circular port With two layers of cathode substrate；The madial wall that gate pole increases circular port in layer is barrel surface；Gate pole increases the printing of the upper surface of layer Silver slurry layer formation gate pole plane electrode layer；Gate pole plane electrode layer increases layer upper surface close to rounded opening edge portion positioned at gate pole Position, and be looped around around circular port, its front end ends in gate pole and increases a layer upper surface rounded opening edge, is dashed forward not into circular port Go out；The insulation paste layer of printing on gate pole plane electrode layer forms gate pole wall；The lower surface of gate pole wall is plane, On gate pole plane electrode layer；The upper surface of gate pole wall is caving inward, high close to rounded opening edge Partial Height And away from the low arcwall face of rounded opening edge Partial Height；The silver slurry layer formation gate pole cambered surface of the printing of gate pole wall upper surface Electrode layer；Gate pole cambered surface electrode layer is covered in the upper surface of gate pole wall, and is interconnected with gate pole plane electrode layer；Gate pole Increase the outer extended line layer of silver slurry layer formation gate pole of the printing on layer；The outer extended line layer of gate pole is mutually interconnected with gate pole plane electrode layer It is logical；The insulation paste layer of printing on the outer extended line layer of gate pole cambered surface electrode layer, gate pole forms gate pole covering layer；Carbon nanotube layer Prepare on cathode electrode lower floor, cathode electrode middle level and cathode electrode upper strata.
- The active display of many faceted pebble composite cathode structures, its feature 2. branch's silver gate according to claim 1 interlocks It is：The material of the negative electrode packaged glass is Pyrex or soda-lime glass.
- The active display of many faceted pebble composite cathode structures, its feature 3. branch's silver gate according to claim 1 interlocks It is：The fixed position that branch's silver gates many faceted pebble composite cathode structures that interlock is negative electrode packaged glass；Under cathode electrode Layer is argent, molybdenum, nickel, chromium, tin or cobalt；Cathode electrode middle level is argent, molybdenum, nickel, chromium, tin or cobalt；Cathode electrode upper strata For argent, molybdenum, nickel, chromium, tin or cobalt.
- The making work of the active display of many faceted pebble composite cathode structures 4. branch's silver gate according to claim 1 interlocks Skill, it is characterised in that comprise the following steps：1) making of negative electrode packaged glass：Scribing is carried out to flat soda-lime glass, negative electrode packaged glass is formed；2) making of black coating：Black covering is formed after insulation paste, toasted, sintering process are printed on negative electrode packaged glass Layer；3) making of the outer extended line layer of negative electrode：Formation negative electrode extension after silver paste, toasted, sintering process is printed on black coating Long line layer；4) making of one layer of cathode substrate：Formation negative electrode base after insulation paste, toasted, sintering process is printed on black coating One layer of bottom；5) making of negative electrode connecting line layer：Shape after silver paste, toasted, sintering process is printed in the delthyrium of one layer of cathode substrate Into negative electrode connecting line layer；6) making of two layers of cathode substrate：Printed in one layer of cathode substrate and form cloudy after insulation paste, toasted, sintering process Two layers of pole substrate；7) making of cathode electrode lower floor：Shape after a metal nickel dam, etching is prepared on the lateral wall of one layer of cathode substrate Into cathode electrode lower floor；8) making in cathode electrode middle level：Prepare and formed after a metal nickel dam, etching in one layer of upper surface of cathode substrate Cathode electrode middle level；9) making on cathode electrode upper strata：Prepared on two layers of surface of cathode substrate and form cloudy after a metal nickel dam, etching Pole electrode upper strata；10) gate pole increases the making of layer：Printed on black coating and gate pole increasing is formed after insulation paste, toasted, sintering process It is high-rise；11) making of gate pole plane electrode layer：Shape after silver paste, toasted, sintering process is printed in the upper surface that gate pole increases layer Into gate pole plane electrode layer；12) making of gate pole wall：Print and formed after insulation paste, toasted, sintering process on gate pole plane electrode layer Gate pole wall；13) making of gate pole cambered surface electrode layer：Shape after silver paste, toasted, sintering process is printed on the surface of gate pole wall Into gate pole cambered surface electrode layer；14) making of the outer extended line layer of gate pole：Increase in gate pole and silver paste is printed on layer, gate pole is formed after toasted, sintering process Outer extended line layer；15) making of gate pole covering layer：Outside gate pole cambered surface electrode layer, gate pole insulation paste is printed on extended line layer, toasted, Gate pole covering layer is formed after sintering process；16) branch's silver gates the cleaning for many faceted pebble composite cathode structures that interlock：Interlock many faceted pebble composite cathodes to branch's silver gate The surface of structure carries out cleaning treatment, removes impurity and dust；17) making of carbon nanotube layer：CNT is printed on cathode electrode lower floor, cathode electrode middle level and cathode electrode On layer, carbon nanotube layer is formed；18) processing of carbon nanotube layer：Carbon nanotube layer is post-processed, improves its field emission characteristic；19) making of anode packaged glass：Scribing is carried out to flat soda-lime glass, anode packaged glass is formed；20) making of anode film conducting shell：The tin indium oxide film layer for being covered in anode packaged glass surface is performed etching, shape Into anode film conducting shell；21) making of the outer extended line layer of anode：Printed on anode packaged glass and sun is formed after silver paste, toasted, sintering process Extremely outer extended line layer；22) making of phosphor powder layer：Phosphor powder layer is formed after fluorescent material, toasted technique are printed on anode film conducting shell；23) display devices are assembled：Getter is installed on to the non-display area of anode packaged glass；Then, anode is encapsulated Glass, negative electrode packaged glass, clear glass frame and knee wall are assembled together, and are fixed with clip；24) display devices are encapsulated：The display devices assembled are packaged with technique formation finished parts.
- The making work of the active display of many faceted pebble composite cathode structures 5. branch's silver gate according to claim 4 interlocks Skill, it is characterised in that：In the step 21, the non-display area printing silver paste on anode packaged glass, after overbaking, Highest baking temperature：180oC, highest baking temperature retention time：8 minutes；It is placed in sintering furnace and is sintered, highest sintering Temperature：525oC, maximum sintering temperature retention time：8 minutes.
- The making work of the active display of many faceted pebble composite cathode structures 6. branch's silver gate according to claim 4 interlocks Skill, it is characterised in that：In the step 22, fluorescent material, Ran Houfang are printed on the anode film conducting shell on anode packaged glass Put and toasted in an oven, highest baking temperature is 120oC, highest baking temperature retention time：10 minutes.
- The making work of the active display of many faceted pebble composite cathode structures 7. branch's silver gate according to claim 4 interlocks Skill, it is characterised in that：In the step 24, display devices are put into baking oven and toasted；It is put into sintering furnace and is burnt Knot；Device exhaust, sealed-off are carried out on exhaust station；Getter bake on roasting machine and disappeared, pin is finally installed additional and is formed into Product part.
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| US5656525A (en) * | 1994-12-12 | 1997-08-12 | Industrial Technology Research Institute | Method of manufacturing high aspect-ratio field emitters for flat panel displays |
| JP3727894B2 (en) * | 2002-03-08 | 2005-12-21 | 日本放送協会 | Field emission electron source |
| CN100580861C (en) * | 2007-06-19 | 2010-01-13 | 中原工学院 | Flat panel display with bevelled grid controlled cathode structure in truncated cone form, and fabricating technique thereof |
| CN100527342C (en) * | 2007-06-19 | 2009-08-12 | 中原工学院 | Flat-panel display device with gate-modulated multi-tilt cathode structure and its preparing process |
| CN100527336C (en) * | 2007-06-19 | 2009-08-12 | 中原工学院 | Flat-panel display device with igh gate-modulated multi-arris cathode structure and its preparing process |
| CN101728192B (en) * | 2009-12-08 | 2011-12-07 | 中原工学院 | Flat-panel display with inverted Y-shaped inclined high-grating single-point cathodic control structure and manufacture process thereof |
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