CN106033054B - A kind of laser humiture measurement mechanism and method - Google Patents
A kind of laser humiture measurement mechanism and method Download PDFInfo
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Abstract
The invention discloses a kind of laser humiture measurement mechanism and methods: including emitting chamber, mirror unit, an absorption gas chamber is connected between transmitting chamber and the mirror unit, wherein: a circuit board, tunable diode laser, photoelectric sensor are set in emission cavity room, and the tunable diode laser and photoelectric sensor are connect with the circuit board respectively；The tunable diode laser is located on an anchor ring perpendicular to concave mirror primary optical axis, and the center of circle of the anchor ring is located on the primary optical axis of concave mirror, and the distance at the center of circle to concave mirror mirror surface center is adjustable in certain section.The absorption gas chamber is surrounded by several connecting columns, and the connecting column both ends are fixedly connected with transmitting chamber, mirror unit respectively.Tunable laser humiture measurement mechanism of the invention and method, can to avoid traditional chemical formula Temperature Humidity Sensor there are the problem of, and be without the use of diversing lens, receiving lens and diaphragm, apparatus structure assembly is simple, and measurement method is easily and effectively.
Description
Technical field
The present invention relates to a kind of humiture measurement mechanism technical fields, specifically, being related to a kind of laser temperature and humidity measurement
Device and method.
Background technique
Humidity is exactly the content of steam in air, is relative humidity in air an important factor for influencing air environment quality
Size can in environment personnel and substance generate considerable influence.Humidity is closely bound up with people's lives, humidity
It is too high or too low human body all to be had an impact, meanwhile, humidity also plays vital effect in production, seems very little
Humidity variation, industrial materials, process flow can also be had an impact, bring many quality problems.
Therefore, Humidity Detection plays increasingly important role in human production life everyway.Currently, humidity is surveyed
Amount and control have been widely used for each relevant industries such as aerospace, microelectronics, atomic energy, petrochemical industry, electric power, meteorology,
People also increasingly pay attention to humidity, its humidity standard of transformation is all being constantly updated in countries in the world, and moisture measurement also has become state
Border standardization body technical committee's focus of attention related with the world.
Existing chemical formula humidity measuring instrument moves back the problems such as wet slow under long, high humidity environment there are the response time, especially
It is to be chronically exposed in the environment of high humility, it is easy to be contaminated and influence its measurement accuracy and long-time stability.Using adjustable
Humorous laser spectrum absorption techniques measurement humidity is a kind of higher measurement method of precision, has high sensitivity, selective good, response
The advantages that speed is fast.
Currently, tunable laser spectroscopy absorptiometry device is mainly by laser beam emitting device, absorption gas chamber, laser pick-off
Device and signal processing circuit composition.Laser beam emitting device generally comprises a laser and a diversing lens, laser pick-off
Device generally comprises a receiving lens, a diaphragm and a photoelectric sensor.Laser light emitting region approximation as point
Light source is placed in the focal position of lens, by after lens with a branch of parallel light emergence, by another after tested gas is partially absorbed
One lens focus is simultaneously received by laser receiver.
In order to transmit optical signal effectively from transmitting terminal to receiving end, need to accomplish the following aspects: 1, diversing lens and
The primary optical axis of receiving lens is coaxial or within the scope of allowable error；2, the laser of transmitting terminal is placed on the focus position of diversing lens
Set or allowable error within the scope of；3, photoelectric sensor is placed within the scope of the focal position or allowable error of receiving lens.Due to
The reasons such as machining tolerances and rigging error will lead to laser and photoelectric sensor not in diversing lens and receiving lens
In focus, since current device is needed using two convergent lenses and a diaphragm, so that light channel structure is complicated, and laser
Emitter and laser receiver are attached separately to the two sides of gas chamber, and line is more, and whole system assembly is complicated.
Summary of the invention
The present invention is wet slow there are moving back under response time length, high humidity environment in order to solve existing chemical formula humidity sensor
The problems such as, a kind of tunable laser humiture measurement mechanism is proposed, can solve the above problem.
In order to solve the above-mentioned technical problem, the present invention is achieved by the following scheme:
A kind of laser humiture measurement mechanism, including transmitting chamber, mirror unit, the transmitting chamber and mirror unit it
Between connection one absorb gas chamber, in which:
One circuit board, tunable diode laser, photoelectric sensor, the tunable diode are set in emission cavity room
Laser and photoelectric sensor are connect with the circuit board respectively；
The tunable diode laser launch party sets up an angle of wedge diaphragm, the angle of wedge diaphragm relative to
Tunable diode laser transmitting light direction is obliquely installed, and makes the incidence angle acute angle for emitting light and the angle of wedge diaphragm,
And deviate from the photoelectric sensor through the direction of the angle of wedge diaphragm reflection light；The transmitting chamber is by its shell and the angle of wedge
Diaphragm sealing.
Spherical concave mirror is set in mirror unit, for by tunable diode laser issue through gas Indoor Air
Body absorb after laser reflection to photoelectric sensor；
The absorption gas chamber is surrounded by several connecting columns, and the connecting column both ends are solid with transmitting chamber, mirror unit respectively
Fixed connection.
Further, the tunable diode laser is located at an anchor ring perpendicular to concave mirror primary optical axis
On, the center of circle of the anchor ring is located on the primary optical axis of concave mirror, and the distance in the center of circle to concave mirror mirror surface center is one
Determine adjustable in section.The light that the tunable diode laser issues is directed toward the mirror surface center of concave mirror.The photoelectricity
Sensor is located at tunable diode laser transmitting light on the reflected light path after concave mirror reflection, reflection
It is assembled at a certain distance from light is before reaching the angle of wedge diaphragm, reflected light diverging later is across angle of wedge diaphragm and is irradiated to
On the photosurface of photoelectric sensor.
Further, bandwidth-limited circuit, preposition amplification electricity that circuit board includes laser driving circuit, is electrically connected
Road, locking phase amplifying circuit and low-pass filter circuit and A/D converting unit and signal processing unit, the low-pass filter circuit
Signal output end is connect with A/D converting unit, and an other input terminal for the lock-in amplifier is received by phase shift frequency multiplier circuit
High-frequency modulation signal；The circuit board connects data processing system.
Preferably, angle of wedge diaphragm surface is coated with the band logical film for allowing designated frequency band light to pass through.
As further preferred scheme, setting transmitting received block in the emission cavity room, the transmitting received block will be adjustable
Humorous diode laser and photoelectric sensor are fixed.
As further preferred scheme, emit and temperature sensor be set on the shell of chamber, for measure environment temperature into
The calculating of row Temperature Humidity Sensor temperature adjustmemt and relative humidity.
A kind of temperature and humidity measurement method using laser humiture measurement mechanism, sequentially includes the following steps:
Step 1: according to the absorption spectrum of hydrone, thermal tuning and current-tuning characteristic using laser driver are driven
Dynamic laser emits laser signal, scans laser frequency near a certain specific absorption peak of selected hydrone；
Step 2: incident laser incidence angle of wedge diaphragm, fraction incident light are reflected off original incident laser direction,
Most of incident laser enters gas chamber through angle of wedge diaphragm, obtains transmission laser after the indoor hydrone of gas absorbs；
Step 3: transmission laser is irradiated to spherical concave mirror, spherical concave mirror exists laser reflection, reflected light
It absorbs and generates spectral absorption in gas chamber, laser converges to photoelectric sensor, and transmission laser carries out optical electrical conversion through photoelectric sensor
Afterwards, transmission laser voltage signal is obtained；
Step 4: extracting transmission laser voltage letter by bandpass filtering, preposition amplification, locking phase amplification, low-pass filter circuit
Number first harmonic amplitude signal and secondary harmonic amplitude signal；
Step 5: finding the crest value and its data storage location of second harmonic using data processing system, and in correspondence
Position of spectral line at find first harmonic signal center value, using the ratio between second harmonic peak-to-peak value and first harmonic central value as system
System output, is finally inversed by gas humidity through data processing；
Step 6: temperature sensor measurement environment temperature, and it is transmitted to data processing system, data processing system is according to temperature
Angle value carries out temperature adjustmemt to Temperature Humidity Sensor and calculates relative humidity.
A kind of laser humiture measurement mechanism provided by the present invention and method, have the advantage that
First: ambient humidity is measured using tunable laser spectroscopy absorption techniques, it can be warm and humid to avoid traditional chemical formula
Spend sensor there are the problem of, and by the way that tunable diode laser and photoelectric sensor are fixedly arranged in a chamber,
Wiring quantity can be effectively reduced, and is without the use of diversing lens, receiving lens and diaphragm, apparatus structure is simple, easy to assembly；
Second: in transmitting terminal, angle of wedge diaphragm being set, light and the wedge are emitted by setting tunable diode laser
The incidence angle of angle diaphragm is acute angle or obtuse angle, so that the reflected light of angle of wedge diaphragm deviates original tunable diode laser
The direction for emitting light, can eliminate influence of the reflected light to laser, laser will not generate between light source and angle of wedge diaphragm
Multiple reflections can eliminate the influence of transmitting terminal etalon noise；In receiving end, by be arranged the angle of wedge diaphragm with it is described
At an angle, so that laser is after the reflection of spherical concave mirror, across angle of wedge diaphragm, laser is described for photoelectric sensor
Multiple reflections will not be generated between photoelectric sensor and the angle of wedge diaphragm, the shadow of receiving end etalon noise can be eliminated
It rings；
Third: angle of wedge diaphragm surface is coated with the band logical film for allowing designated frequency band light to pass through, it is possible to reduce environment
Influence of the light to device；
4th: being arranged in emission cavity room for receiving the fixed transmitting of tunable diode laser and photoelectric sensor
Seat is arranged for the microscope base that spherical concave mirror is fixed in mirror unit, makes that whole device is compact-sized, is readily transported,
And stability is good.
Detailed description of the invention
Fig. 1 is a kind of example structure schematic diagram of tunable laser humiture measurement mechanism proposed by the invention；
Fig. 2 is the index path of Fig. 1；
Fig. 3 is a kind of embodiment external structure signal of tunable laser humiture measurement mechanism proposed by the invention
Figure；
Fig. 4 is the detection circuit functional-block diagram in embodiment two.
Specific embodiment
Below in conjunction with the embodiment of the present invention and attached drawing, technical solution in the embodiment of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Embodiment one, the present embodiment propose a kind of tunable laser humiture measurement mechanism, as shown in Figure 1, including can
Tuning diode laser 10, spherical concave mirror 7, absorbs gas chamber 6, the tunable diode laser at photoelectric sensor 5
Device 10 and photoelectric sensor 5 are fixedly arranged on described the same side for absorbing gas chamber 6, and the spherical shape concave mirror 7 is fixedly arranged on the suction
The other side of getter room 6, as shown in Fig. 2, the tunable diode laser 10 is located at one perpendicular to concave mirror 7
On the anchor ring of primary optical axis, the center of circle of the anchor ring is located on the primary optical axis of concave mirror 7, the center of circle to 7 mirror of concave mirror
The distance at face center is adjustable in certain section.The light that the tunable diode laser 10 issues is directed toward concave mirror 7
Mirror surface center.The photoelectric sensor 5 is located at the tunable diode laser 10 transmitting light through the concave mirror 7
It on reflected light path after reflection, is assembled at a certain distance from reflected light is before reaching the angle of wedge diaphragm 9, reflected light is sent out later
It dissipates across angle of wedge diaphragm 9 and is irradiated on the photosurface of photoelectric sensor 5.When beam of laser is by tested gas, if
Laser emission spectrum overlaps with gas absorption spectrum, and output intensity can weaken because being actually taken up by gas, output intensity and input light
Meet Beer-Lambert law between strong.The tunable laser humiture measurement mechanism of the present embodiment is to use above-mentioned principle, can
Tuning diode laser 10 emits laser and is irradiated to spherical concave mirror 7, spherical concave mirror 7 by absorbing gas chamber 6
By laser reflection to photoelectric sensor 5, the variation of gas chamber reflective light intensity is absorbed by detection to detect humidity.Utilize laser
Thermal tuning and current-tuning characteristic scan laser frequency near a certain absorption peak of under test gas, while to laser frequency
High frequency modulated is carried out, is detected according to the relationship of warbled harmonic signal amplitude and gas concentration.The present embodiment can
Tuning laser humiture measurement mechanism measures ambient humidity using tunable laser spectroscopy absorption techniques, can be to avoid traditional
Chemical formula Temperature Humidity Sensor there are the problem of, and by the way that tunable diode laser 10 and photoelectric sensor 5 is fixed
In described the same side for absorbing gas chamber, wiring quantity can be effectively reduced, and is without the use of diversing lens, receiving lens and diaphragm,
Apparatus structure assembly is simple.
As shown in Fig. 2, it is preferred that photoelectric sensor 5 is placed in described in the transmitting light warp of the tunable diode laser 10
On reflected light path after the reflection of concave mirror 7, after reflected light passes through convergent point, it is irradiated on the photosurface of photoelectric sensor 5,
Be conducive to photoelectric sensor 5 and receive reflected light.
For the ease of installing and using, the tunable laser humiture measurement mechanism further includes described adjustable for fixing
The transmitting received block 3 of humorous diode laser 10 and photoelectric sensor 5.
As a preferred embodiment, as shown in Figure 1, the tunable diode laser 10 and photoelectric sensor 5
Front be provided with angle of wedge diaphragm 9, as shown in Fig. 2, the tunable diode laser 10 emits light and the angle of wedge window
The incidence angle of mouth piece 9 is acute angle, and deviates from the photoelectric sensor 5 through the direction of 9 reflection light of angle of wedge diaphragm.It is sending out
End is penetrated, is not equal to 90 ° by the incidence angle that setting tunable diode laser 10 emits light and the angle of wedge diaphragm 9, makes
The reflected light for obtaining angle of wedge diaphragm 9 deviates the direction that original tunable diode laser 10 emits light, can eliminate reflected light
Influence to laser, laser will not generate multiple reflections between light source and angle of wedge diaphragm, can eliminate transmitting terminal standard
Has the influence of noise.In receiving end, by the way that the angle of wedge diaphragm 9 and the photoelectric sensor 5 is arranged at an angle, so that
Laser passes through angle of wedge diaphragm 9, laser is in the photoelectric sensor 5 and the angle of wedge window after the reflection of spherical concave mirror 7
Multiple reflections will not be generated between mouth piece 9, the influence of receiving end etalon noise can be eliminated.In addition, angle of wedge diaphragm 9 will be sent out
The cavity sealing between received block 3 and angle of wedge diaphragm 9 is penetrated, plays the role of waterproof and dustproof, protects laser 10 and photoelectric sensing
Device 5 emits the cavity between received block 3 and angle of wedge diaphragm 9 and is filled with inert gas, eliminates the interference of background absorption gas.
In the present embodiment, 9 surface of angle of wedge diaphragm, which is coated with, allows the band logical film that passes through of band segment light, can be with
Reduce influence of the environment light to device.
The tunable laser humiture measurement mechanism of the present embodiment further includes shell 2, and the transmitting received block 3 is fixed on institute
It states in shell 2, circuit board 1 is fixedly provided in the shell 2, the angle of wedge diaphragm 9 is installed in a side of the shell 2,
For the sealing of the cavity between received block 3 and angle of wedge diaphragm 9 will to be emitted, correspondingly, it is intracorporal adjustable will to be set to chamber
Humorous diode laser 10, photoelectric sensor 5 are isolated with outside air, prevent from being corroded by high humidity gas.
A temperature sensor 4 is also set up in the device, temp probe is arranged on crust of the device, for measuring environment temperature
Degree carries out the calculating of Temperature Humidity Sensor temperature model amendment and relative humidity.
Further, in order to facilitate the installation and debugging of this tunable laser humiture measurement mechanism, as shown in figure 4, institute
It states spherical concave mirror 7 to be installed on spherical concave surface mirror unit 8, spherical shape concave surface mirror unit 8 is logical with the shell 2
Cross the connection of several connecting columns 11, surround absorption gas chamber between several described connecting columns, therefore, absorb gas chamber 6 be it is open,
In measurement, tunable laser humiture measurement mechanism need to be only integrally placed under test gas.
Embodiment two, using this laser humiture measurement mechanism carry out temperature and humidity measurement the step of:
Step 1: according to the absorption spectrum of hydrone, thermal tuning and current-tuning characteristic using laser driver are driven
Dynamic laser emits laser signal, scans laser frequency near selected hydrone absorption peak；Step 2: incident laser is incident
Angle of wedge diaphragm, fraction incident light are reflected off original incident laser direction, and most of incident laser penetrates angle of wedge window
Piece enters gas chamber, obtains transmission laser after the indoor hydrone of gas absorbs；Step 3: to be irradiated to spherical concave surface anti-for transmission laser
Mirror is penetrated, laser reflection is converged to photoelectric sensor by spherical concave mirror, and transmission laser carries out optical electrical through photoelectric sensor and turns
After changing, transmission laser voltage signal is obtained；Step 4: passing through bandpass filtering, preposition amplification, locking phase amplification, low-pass filter circuit
Extract the first harmonic of transmission laser and the amplitude signal of second harmonic；Wherein, first harmonic signal is believed using high frequency modulated
Number reference signal as lock-in amplifier after phase shift is carried out, amplified through locking phase, low-pass filtering obtains first harmonic signal；It is secondary
Harmonic signal is the reference signal after carrying out phase shift using two frequency-doubled signals of high-frequency modulation signal as lock-in amplifier, through locking
Mutually amplification, low-pass filtering obtain second harmonic signal；Specific flow chart is shown in Fig. 4.Step 5: being found using data processing system
The crest value and its data storage location of second harmonic, and first harmonic signal center value is found at corresponding position of spectral line,
It is exported using the ratio between second harmonic peak-to-peak value and first harmonic central value as system, is finally inversed by ambient humidity through data processing；Two
Subharmonic peak-to-peak value is directly proportional to gas concentration, and first harmonic central value is unrelated with gas concentration, but with laser optical power etc.
It is related, gas concentration is measured with the two ratio, the factors such as laser optical power variation, dust, form pollution can be eliminated and caused
Light transmittance variation to vapour concentration measurement generate influence；Step 6: temperature sensor measurement environment temperature, and it is transmitted to number
According to processing system, data processing system is modified humidity according to temperature value and calculates relative humidity.
Certainly, the above description is not a limitation of the present invention, and the present invention is also not limited to the example above, this technology neck
The variations, modifications, additions or substitutions that the those of ordinary skill in domain is made within the essential scope of the present invention, also should belong to this hair
Bright protection scope.
Claims (7)
1. a kind of laser humiture measurement mechanism, it is characterised in that: including emit chamber, mirror unit, the transmitting chamber and
Connection one absorbs gas chamber between mirror unit, in which:
One circuit board, tunable diode laser, photoelectric sensor, the tunable diode laser are set in emission cavity room
Device and photoelectric sensor are connect with the circuit board respectively；
The tunable diode laser launch party sets up an angle of wedge diaphragm, and the angle of wedge diaphragm is relative to adjustable
Humorous diode laser emission light direction is obliquely installed, and makes the incidence angle acute angle for emitting light and the angle of wedge diaphragm, and pass through
The direction of the angle of wedge diaphragm reflection light deviates from the photoelectric sensor；The transmitting chamber is by its shell and angle of wedge window
Piece sealing；
Spherical concave mirror is set in mirror unit, is inhaled for issue tunable diode laser through gas indoor gas
Laser reflection after receipts is to photoelectric sensor；
The absorption gas chamber is surrounded by several connecting columns, and the connecting column both ends are fixed with transmitting chamber, mirror unit respectively to be connected
It connects；
The tunable diode laser is located on an anchor ring perpendicular to concave mirror primary optical axis, the anchor ring
The center of circle is located on the primary optical axis of concave mirror, and the distance at the center of circle to concave mirror mirror surface center is adjustable in certain section；
The light that the tunable diode laser issues is directed toward the mirror surface center of concave mirror；The photoelectric sensor is located at described
Tunable diode laser emits light on the reflected light path after concave mirror reflection, and reflected light reaches the wedge
It is assembled at a certain distance from before the diaphragm of angle, reflected light dissipates across angle of wedge diaphragm and is irradiated to the sense of photoelectric sensor later
In smooth surface.
2. a kind of laser humiture measurement mechanism according to claim 1, it is characterised in that: circuit board includes that laser drives
Dynamic circuit, the bandwidth-limited circuit being sequentially connected electrically, pre-amplification circuit, locking phase amplifying circuit and low-pass filter circuit and A/
The signal output end of D conversion unit and signal processing unit, the low-pass filter circuit is connect with A/D converting unit, the lock
An other input terminal for phase amplifier receives high-frequency modulation signal by phase shift frequency multiplier circuit；The circuit board connects data processing
System.
3. laser humiture measurement mechanism according to claim 1, it is characterised in that: angle of wedge diaphragm surface is coated with
The band logical film for allowing designated frequency band light to pass through.
4. laser humiture measurement mechanism according to claim 1, it is characterised in that: transmitting is arranged in the emission cavity room
Received block, the transmitting received block fix tunable diode laser and photoelectric sensor.
5. laser humiture measurement mechanism according to claim 1, it is characterised in that: emit and temperature is arranged on the shell of chamber
Sensor is spent, carries out the calculating of temperature adjustmemt and relative humidity to Temperature Humidity Sensor for measuring environment temperature.
6. a kind of temperature and humidity measurement method using laser humiture measurement mechanism described in claim 1, it is characterised in that: press
Following steps carry out:
Step 1: thermal tuning and current-tuning characteristic using laser driver, driving swash according to the absorption spectrum of hydrone
Light device emits laser signal, scans laser frequency near selected hydrone absorption peak；
Step 2: incident laser incidence angle of wedge diaphragm, fraction incident light are reflected off original incident laser direction, big portion
It is divided into and penetrates laser light angle of wedge diaphragm and enter gas chamber, obtain transmission laser after the indoor hydrone spectral absorption of gas；
Step 3: transmission laser is irradiated to spherical concave mirror, spherical concave mirror is absorbing laser reflection, reflected light
Spectral absorption is generated in gas chamber, laser converges to photoelectric sensor, transmission laser after photoelectric sensor carries out optical electrical conversion,
Obtain transmission laser voltage signal；
Step 4: extracting transmission laser voltage signal by bandpass filtering, preposition amplification, locking phase amplification, low-pass filter circuit
First harmonic amplitude signal and secondary harmonic amplitude signal；
Step 5: finding the crest value and its data storage location of second harmonic using data processing system, and in corresponding spectrum
First harmonic signal center value is found at line position, it is defeated using the ratio between second harmonic peak-to-peak value and first harmonic central value as system
Out, environment absolute humidity is finally inversed by through data processing；
Step 6: temperature sensor measurement environment temperature, and it is transmitted to data processing system, data processing system is according to temperature value
Temperature adjustmemt is carried out to Temperature Humidity Sensor and calculates relative humidity.
7. the temperature and humidity measurement method of laser humiture measurement mechanism according to claim 6, it is characterised in that: step 4
In, using the reference signal after high-frequency modulation signal progress phase shift as lock-in amplifier, obtained through locking phase amplification, low-pass filtering
First harmonic amplitude signal；Believed using the reference after the two frequency-doubled signals progress phase shift of high-frequency modulation signal as lock-in amplifier
Number, secondary harmonic amplitude signal is obtained through locking phase amplification, low-pass filtering.
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| CN106959171B (en) * | 2016-12-16 | 2023-05-12 | 山东省科学院海洋仪器仪表研究所 | Temperature and humidity measurement method based on ultrasonic wave and laser absorption spectrum technology |
| CN107741505B (en) * | 2017-11-16 | 2024-05-03 | 中国测试技术研究院 | Rotational speed measuring sensor and system |
| CN110389107B (en) * | 2019-08-21 | 2022-09-06 | 国网重庆市电力公司电力科学研究院 | Online carbon tetrafluoride detection device in high-voltage switch equipment |
| CN110596047B (en) * | 2019-09-30 | 2024-06-25 | 山东省科学院海洋仪器仪表研究所 | Visibility sensor, self-cleaning method thereof and calibration method thereof |
| CN110954915B (en) * | 2019-12-17 | 2023-05-16 | 北京缔科新技术研究院(有限合伙) | Light quantum distance meter with humidity measuring function and distance measuring and humidity measuring method |
| CN113031679A (en) * | 2021-03-01 | 2021-06-25 | 刘滨 | System and method for controlling constant temperature and humidity environment in laboratory |
| CN113176621B (en) * | 2021-04-14 | 2022-10-18 | 山东省科学院海洋仪器仪表研究所 | Ocean upper water vapor concentration detection device |
| CN115046962B (en) * | 2022-06-30 | 2022-12-23 | 北京光感慧智科技有限公司 | Laser gas sensor design method and system for inhibiting water vapor condensation influence |
| CN115356290B (en) * | 2022-09-07 | 2024-08-27 | 北京众驰自动化设备有限公司 | Humidity detection method and device |
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