CN106026702B - A kind of high power DC plasma electrical source - Google Patents
A kind of high power DC plasma electrical source Download PDFInfo
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- CN106026702B CN106026702B CN201610340056.0A CN201610340056A CN106026702B CN 106026702 B CN106026702 B CN 106026702B CN 201610340056 A CN201610340056 A CN 201610340056A CN 106026702 B CN106026702 B CN 106026702B
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- 238000005259 measurement Methods 0.000 claims abstract description 28
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- 230000005611 electricity Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/02—Conversion of AC power input into DC power output without possibility of reversal
- H02M7/04—Conversion of AC power input into DC power output without possibility of reversal by static converters
- H02M7/12—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/21—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/217—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M7/2176—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only comprising a passive stage to generate a rectified sinusoidal voltage and a controlled switching element in series between such stage and the output
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
- H02M1/007—Plural converter units in cascade
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- Inverter Devices (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of high power DC plasma electrical sources, including the concatenated PSM module of n group, flat wave inductance, first current measurement module and feedback control protect system, network voltage is connected through vacuum circuit breaker with the input terminal of rectifier transformer, the output end of rectifier transformer is respectively connected to the input terminal of every group of PSM module, the output of the concatenated PSM module of n group is through flat wave inductance connection to output electrode, first current measurement module is mounted on major loop bus, the input terminal of the feedback protection system is connected with the first current measurement module, its output end is connected with the control terminal of PSM module respectively.Electric power output voltage range of the present invention is big, and output power has good dynamic characteristic, very short reaction time up to MW grades, and the acute large disturbances of energy quick response plasma load have good current controling characteristic, ensure that the quality of plasma products.
Description
Technical field
The present invention relates to a kind of power supplys, and in particular to a kind of high power DC plasma electrical source.
Background technique
Currently, plasma technique is in metallurgy, spraying, surface modification, environmental improvement, communication and detection and other industry
Field using more and more extensive, plasma chemical industry cleanliness without any pollution in process of production, and not needing using catalyst,
In today that resource scarcity, environmental problem are increasingly serious, how efficiently, reasonably sharp technical process is simple, adaptability to raw material is wide,
With plasma technique, be relationship environmental protection, comprehensive utilization of resources, energy-saving and emission-reduction, industrial structure optimization key subjects.However,
Realize a variety of applications and all-round popularization of plasma technique, key is that fast response time to be had, control performance are good, reliable
Property high high power plasma power supply and high performance plasma generator.
According to electric arc theory and plasma process situation, energy stability and the direct phase of electric current of plasma load
It closes, plasma electrical source mainly uses constant-current source.In technical process, due to gas discharge characteristic, gas pressure, gas composition
And the combined influence of many factors such as plasma temperature, plasma load will appear compared with large disturbances, such as beat arc phenomenon,
Plasma load resistance can be made to strongly reduce, plasma electrical source export near short circuit, so plasma load generally in
C-V characteristic that is existing horizontal or rising.If plasma electrical source output voltage is unable to the variation of quick response load impedance,
Normal discharge process, Jin Erwu cannot be maintained so that the process conditions of plasma can be lost by being just difficult to stable output electric current
Method guarantees technological effect, influences product quality.Therefore, plasma electrical source must have steep drop characteristic, it is necessary to have well
Dynamic characteristic, very short reaction time are to adapt to the change dramatically loaded.
For a long time, domestic and international traditional high power plasma DC power supply generallys use silicon controlled rectification power source, is
Steep drop characteristic and stable operating current needed for obtaining need to usually increase vacuum adjustment pipe in the loop, or seal in energy consumption and reach
Tens kilowatts or more of resistance；Due to the frequency of alternating current circuit and characteristic of SCR rectification circuit etc., also determine silicon-controlled
The response time of rectifier power source can only achieve a millisecond magnitude and (reach if the average out-of-control time of three-phase bridge rectifier circuit under power frequency
Arrive 1.27ms), moreover, silicon controlled rectification power source power factor is not high.So not only low efficiency, energy consumption are high for this power supply, and
And it is bulky, heavy, dynamic responding speed is slow, and control performance is poor, it is difficult to adapt to the change dramatically of load impedance characteristic.
In recent years, also there is the plasma electrical source made using high frequency full-bridge inverting technology, it is silicon-controlled compared to tradition
Rectifier power source, although high frequency inverter has many advantages, such as energy conservation, material saving, impacts small and preferable control performance to power grid,
But under high power plasma loaded work piece environment, there is parallel current-sharings, temperature for high power contravariant formula plasma electrical source
The problems such as strong energy efficient transmitting caused by the factors such as liter, electromagnetic interference, structure is complicated, parasitic parameter and reliability.
The development and exploitation of the high power DC plasma electrical source of high-performance, high reliability are high-power etc. both at home and abroad
The bottleneck of gas ions System Development plays vital work to the development in an all-round way of high power plasma system and popularization and application
With.
Summary of the invention
The purpose of the present invention is to provide a kind of high power DC plasma electrical sources, and not only dynamic property is good, can be in number
The change dramatically of quick response plasma load output impedance in microsecond stablizes output electric current, guarantees product quality, and should
Power supply power factor also with higher, very high efficiency and reliability.
To achieve the above object, the invention adopts the following technical scheme: including the concatenated PSM module of n group, Ping Bo electricity
Sense, the first current measurement module and feedback control protect system, input of the network voltage through vacuum circuit breaker and rectifier transformer
End is connected, and the output end of rectifier transformer is respectively connected to the input terminal of every group of PSM module, the output of the concatenated PSM module of n group
Through flat wave inductance connection to output electrode, first current measurement module is mounted on major loop bus, for measuring power supply
Export electric current, and be converted into being connected to feedback control protection system after voltage output in proportion, the feedback protection system it is defeated
Enter end to be connected with the first current measurement module, output end is connected with the control terminal of PSM module respectively.
As a further improvement of the above technical scheme:
The feedback control protects system, including digitial controller and parameter setting running state monitoring unit, the ginseng
Number sets running state monitoring unit and digitial controller interconnects, and the output end of digitial controller is by optical fiber and each
The control terminal of PSM module is connected；
The feedback control protects system, is used for by carrying out real-time communication with parameter setting running state monitoring unit,
The output of current measurement module on major loop is detected simultaneously, the number of the PSM module of switching needed for calculating.
The PSM module includes isolating transformer, vacuum contactor, soft charge resistance, rectification circuit, two pole of afterflow
Pipe, varistor, insulated gate bipolar transistor, IGBT driving and control module, comparator and the second current measurement module；Institute
Rectification circuit is stated to be made of six Power Diode Pumpeds, the ac input end of the rectification circuit respectively successively through AC fuse,
Vacuum contactor is connected with the primary side of isolating transformer, and the soft charge resistor coupled in parallel is described whole at the both ends of vacuum contactor
The cathode output end of current circuit is connected with the collector of insulated gate bipolar transistor, the emitter of insulated gate bipolar transistor
It is connected with the cathode of freewheeling diode, grid, collector and emitter and the IGBT driving and control of insulated gate bipolar transistor
The output end of molding block is connected, and the anode of freewheeling diode is connected with the cathode output end of rectification circuit, the freewheeling diode
Anode be connected through Absorption Capacitance with the collector of insulated gate bipolar transistor, the varistor, output resistance and filtering
Capacitor is connected in parallel on the output end of rectification circuit respectively, and second current measurement module is mounted on insulated gate bipolar transistor
Emitter, the low-pass filtered device of the positive input of the comparator are connected with the second current measurement module, reverse input end
It is connected through peripheral circuit with power supply VCC, the output end of comparator drives with IGBT and the input terminal of control module is connected, described
IGBT driving and the feeder ear of control module and the secondary side of isolating transformer are connected.
The PSM module further includes indicating circuit, and the indicating circuit is by current-limiting resistance and light emitting diode group
At the cathode of the light emitting diode is connected with the cathode output end of rectification circuit, and anode is double through current-limiting resistance and insulated gate
The emitter of bipolar transistor is connected.
As shown from the above technical solution, high power DC plasma electrical source of the present invention, electric power output voltage
Range is big, and output power has good dynamic characteristic, very short reaction time up to MW grades, can quick response (microsecond amount
Grade) plasma load acute large disturbances, have good current controling characteristic, ensure that the quality of plasma products.It should
High power DC plasma electrical source structure is simple, has the function of fault redundance, it is normal that part of module failure will not influence power supply
Operation, high reliablity；Meanwhile the present invention has very high power factor, improves power quality, reduces production cost.
Detailed description of the invention
Fig. 1 is overall circuit figure of the invention；
Fig. 2 is the circuit diagram of PSM module in the present invention.
Specific embodiment
The present invention will be further described with reference to the accompanying drawing:
As shown in Figure 1, the high power DC plasma electrical source of the present embodiment, including the concatenated PSM module 2 of n group, flat wave
Inductance 7, the first current measurement module 8 and feedback control protect system, and network voltage is through vacuum circuit breaker 1 and rectifier transformer 3
Input terminal be connected, the output end of rectifier transformer 3 is respectively connected to the input terminal of every group of PSM module 2, the concatenated PSM mould of n group
The output of block 2 is connected to output electrode through flat wave inductance 7, and the first current measurement module 8 is mounted on major loop bus, for surveying
Electric power outputting current is measured, and is connected to feedback control protection system after being converted into voltage output in proportion, feedback protection system
Input terminal is connected with the first current measurement module 8, and output end is connected with the control terminal of PSM module 2 respectively.
Feedback control protects system, including digitial controller 9 and parameter setting running state monitoring unit 10, parameter setting
Running state monitoring unit 10 and digitial controller 9 interconnect, and the output end of digitial controller 9 is by optical fiber 11 and each
The control terminal of PSM module 2 is connected；The feedback control protect system, for by with parameter setting running state monitoring unit 10
Real-time communication is carried out, while detecting the output of current measurement module on major loop, the number of the PSM module 2 of switching needed for calculating.
As shown in Fig. 2, PSM module 2 includes isolating transformer 34, indicating circuit, vacuum contactor 21, soft charge resistance
22, rectification circuit 24, freewheeling diode 31, varistor 25, insulated gate bipolar transistor 28, IGBT driving and control module
35, comparator 37 and the second current measurement module 30；Rectification circuit 24 is made of six Power Diode Pumpeds, the friendship of rectification circuit 24
Stream input terminal is successively connected through AC fuse 23, vacuum contactor 21 with the primary side of isolating transformer 34 respectively, soft charge electricity
Resistance 22 is connected in parallel on the both ends of vacuum contactor 21, the cathode output end of rectification circuit 24 and the collection of insulated gate bipolar transistor 28
Electrode is connected, and the emitter of insulated gate bipolar transistor 28 is connected with the cathode of freewheeling diode 31, and insulated gate bipolar is brilliant
Grid, the collector and emitter of body pipe 28 drive with IGBT and the output end of control module 35 is connected, freewheeling diode 31
Anode is connected with the cathode output end of rectification circuit 24, and the anode of freewheeling diode 31 is through Absorption Capacitance 29 and insulated gate bipolar
The collector of transistor 28 is connected, and varistor 25, output resistance 26 and filter capacitor 27 are connected in parallel on rectification circuit 24 respectively
Output end, the second current measurement module 30 are mounted on the emitter of insulated gate bipolar transistor 28, and the forward direction of comparator 37 is defeated
Enter to hold low-pass filtered device 36 to be connected with the second current measurement module 30, reverse input end is through peripheral circuit and power supply VCC phase
Even, the output end of comparator 37 drives with IGBT and the input terminal of control module 35 is connected, and IGBT drives and control module 35
Feeder ear is connected with the secondary side of isolating transformer 34.The indicating circuit is made of current-limiting resistance 33 and light emitting diode 32, is shone
The cathode of diode 32 is connected with the cathode output end of rectification circuit 24, and anode is brilliant through current-limiting resistance 33 and insulated gate bipolar
The emitter of body pipe 28 is connected.
The primary side of the rectifier transformer 3 uses delta connection, can avoid 3 subharmonic currents and flows into power grid, rectifier transformer
The secondary side of device 3 is that star connection 4 and delta connection 5 replace, in this way can be in 12 pulse wave rectifier voltage of DC side final output, can
Reduce the ripple of DC side, and effectively inhibits the wave distortion of exchange side.It is laggard that rectified transformer 3 is transformed into suitable voltage
Enter the input terminal of PSM module 2, alternating voltage can be transformed into stable DC by rectification unit and filter unit in PSM module 2
Pressure, conducting and the shutdown of IGBT switch unit determine whether every group of PSM module puts into, and the output voltage of every group of PSM module 2 is
After the completely the same PSM module 2 of Um, n group is connected, maximum output voltage value can reach n*Um, and power supply is defeated at any time
Voltage value depends on the number of investment PSM module out, and value is Uout=m*Um (wherein, m is investment number of modules, m≤n), electricity
Source output voltage is adjustable between 0~n*Um, and when the shutdown of some PSM module 2, the freewheeling diode 31 turned off in module is back
Electric current in road provides afterflow channel.After output after the series connection of n group PSM module 2 passes through outputting inductance 7 again, it is connected to plasma
The electrode both ends of body load, the outputting inductance 7 can smoothly export electric current, reduce pulsation of current.
Feedback control protection system of the invention is core with digitial controller 9, by with parameter setting and operating status
10 real-time communication of monitoring unit receives the operating parameter of the every task of power supply, and uploads power supply actual motion state in real time；It leads back
The output current value of the 8 real-time measurement power supply of the first LEM current measurement module of road, and it is converted into voltage output in proportion, lead to
The analog quantity input that voltage value is transferred to digitial controller 9 by shielded cable is crossed, digitial controller 9 converts thereof into accordingly
Digital quantity is simultaneously compared, PID arithmetic etc. with the current setting value in operating parameter, of the PSM module 9 of switching needed for calculating
Number, by the corresponding GPIO interface of digitial controller 9 export, and by optical fiber transmit 11 be connected to each PSM module 2 control and
Driving unit 35 so as to fast conducting or turns off the insulated gate bipolar transistor 28 corresponded in PSM module 2, realizes electricity
The quick variation of source output voltage, so that output electric current quickly tracks and stablizes in current setting value；Optical fiber transmission unit can also
The working condition of each PSM module 2 is transferred to digitial controller 9 in real time, and is uploaded to running state monitoring system.
As shown in Fig. 2, the indicating circuit that light emitting diode 32 and current-limiting resistor 33 are composed in series, each for showing
The working condition of PSM module 2, the second current measurement module 30, for monitoring the output electric current of each PSM module 2.Vacuum contact
Device 21 and soft charge resistance 22 constitute soft charge circuit, in the preparation stage, when vacuum circuit breaker 1 is closed, and 3 band of rectifier transformer
When electric, PSM module 2 is the charging of filter condenser 27 by soft charge resistance 22, rectification circuit 24, when voltage on filter capacitor 27
After reach its peak value 70%, then vacuum contactor 21 is closed, can effectively avoid capacitance voltage in this way and overcharge, meanwhile, if in work work
Cheng Zhong, when discovery 27 both end voltage of filter capacitor is higher than protection threshold value, can also direct disjunction vacuum contactor 21, protection equipment and
The safety of device.Rectification circuit 24 is made of six Power Diode Pumpeds, wherein three diodes are common-anode, in addition three
For commoncathode, outlet side is parallel with filter condenser 27, constitutes the uncontrollable current rectifying and wave filtering circuit of three-phase together, by three intersections
Galvanic electricity buckling changes steady dc voltage into；It is serially connected with the AC fuse 23 of three-phase alternating current input circuit, it is alternate for protecting
Short circuit overcurrent；It is connected in parallel on the piezoresistor 25 of rectifier bridge DC output end two sides, for protecting DC side output overvoltage；PSM
The output stage of module 2 is by IGBT module 28 and the fast switch unit group for restoring the class Buck structural topology that freewheeling diode 31 forms
On or off insulated gate bipolar transistor 28(, that is, IGBT need to only be passed through whether at, the investment of each PSM module 2)
It realizes；The Absorption Capacitance 29 for being connected in parallel on 31 anode both ends of IGBT collector and freewheeling diode uses noninductive capacitor, can inhibit
IGBT, freewheeling diode 31 turn off overvoltage and du/dt, reduce switching loss and noise when shutdown；When IGBT module 28 is led
When logical, the PSM module 2 investment, the light emitting diode 32 for being attempted by the module output end is lighted, and indicates that the module is in work shape
State passes through the electric current of light emitting diode branch with the concatenated limitation of current-limiting resistance 33 of light emitting diode, when IGBT module 28 turns off
When, which does not put into, and the electric current in major loop is by 31 afterflow of freewheeling diode, while light emitting diode 32 extinguishes, table
Show that the PSM module 2 is not devoted oneself to work.
As shown in Fig. 2, IGBT driving and the power supply of control module 35 are taken from the three-phase alternating current input side of the PSM module 2,
Three-phase alternating current input side appoint take wherein two-phase supply after isolating transformer 34 is transformed into suitable low pressure IGBT driving and control
Molding block provides DC supply in the DC voltage that inside modules are re-transformed into multiple voltage grade for different components, this
Sample can guarantee that entire PSM module 2 has good insulation and resistance to voltage levels；PSM module 2 and the signal of main control loop are got in touch with
It is all carried out by optical fiber transmission 11, the control signal of main control loop is driven by optical fiber transmission 11 to IGBT and control module
35 signal receiving end quickly exports the grid and emitter that positive and negative driving voltage is applied to IGBT through the driving circuit in module
Both ends can control IGBT to carry out fast conducting or shutdown, at the same the working condition of PSM module 2 can also be transmitted by optical fiber 11 to
Master controller.LEM current measurement module 30 on the IGBT switch-side output bus for being mounted on each PSM module 2, is used
In the output electric current for measuring each PSM module, after being converted into voltage output in proportion, it is dry that high frequency is filtered out by low-pass filter 36
Signal is disturbed, the output end of comparator 37, the output connection of comparator 37 are connected to together with preset overcurrent protection threshold voltage
To IGBT driving and the input port of control module 35, if PSM module output current is more than protection threshold value, the output of comparator 37 is
High level, IGBT driving and control module 35 will export negative voltage at once immediately turns off IGBT switch, cutting PSM module 2
Output, prevents overcurrent damage equipment and device.
Power supply of the present invention is suitable for plasma load, during the work time, due to putting for plasma load
The influence of many factors such as electrical characteristics, gas pressure, temperature, plasma load will appear violent disturbance, this requires it is equal from
Daughter power supply has good dynamic characteristic, the change dramatically of energy quick response load impedance characteristic.Take this PSM module 2
Concatenated topological structure uses the mode of IGBT switch fast conducting and shutdown PSM module output, so that it may ring in several microseconds
The change dramatically of load voltage is answered, stabling current exports, while when there are the failures such as overcurrent, over-voltage, can also be in several microseconds
It cuts off the power output, ensures equipment safety；Moreover, when some or certain k PSM module cannot work because of failure, only
When desired output voltage values being wanted to be less than (n-k) * Um, power supply still can work on, thus the novel high power DC
Plasma electrical source also has the function of good fault redundance.
Embodiment described above only describe the preferred embodiments of the invention, not to model of the invention
It encloses and is defined, without departing from the spirit of the design of the present invention, those of ordinary skill in the art are to technical side of the invention
The various changes and improvements that case is made should all be fallen into the protection scope that claims of the present invention determines.
Claims (2)
1. a kind of high power DC plasma electrical source, it is characterised in that: including the concatenated PSM module (2) of n group, flat wave inductance
(7), the first current measurement module (8) and feedback control protect system, and network voltage is through vacuum circuit breaker (1) and rectifier transformer
(3) input terminal is connected, and the output end of rectifier transformer (3) is respectively connected to the input terminal of every group of PSM module (2), the series connection of n group
The output of PSM module (2) the electrode both ends of plasma load, first current measurement are connected to through flat wave inductance (7)
Module (8) is mounted on major loop bus, is connected to for measuring electric power outputting current, and after being converted into voltage output in proportion
Feedback control protects system, and the input terminal of the feedback control protection system is connected with the first current measurement module (8), exports
End is connected with the control terminal of every group of PSM module (2) respectively；
The feedback control protects system, including digitial controller (9) and parameter setting running state monitoring unit (10), described
Parameter setting running state monitoring unit (10) and digitial controller (9) interconnect, and the output end of digitial controller (9) passes through
Optical fiber (11) is connected with the control terminal of every group of PSM module (2)；
The PSM module (2) includes isolating transformer (34), vacuum contactor (21), soft charge resistance (22), rectification circuit
(24), freewheeling diode (31), varistor (25), insulated gate bipolar transistor (28), IGBT driving and control module
(35), comparator (37) and the second current measurement module (30)；The rectification circuit (24) is made of six Power Diode Pumpeds, institute
The ac input end of rectification circuit (24) is stated respectively successively through AC fuse (23), vacuum contactor (21) and isolating transformer
(34) primary side is connected, and the soft charge resistance (22) is connected in parallel on the both ends of vacuum contactor (21), the rectification circuit (24)
Cathode output end be connected with the collector of insulated gate bipolar transistor (28), the transmitting of insulated gate bipolar transistor (28)
Pole is connected with the cathode of freewheeling diode (31), the grid of insulated gate bipolar transistor (28), collector and emitter with
The output end of IGBT driving and control module (35) is connected, and the cathode of the anode and rectification circuit (24) of freewheeling diode (31) is defeated
Outlet is connected, current collection of the anode of the freewheeling diode (31) through Absorption Capacitance (29) Yu insulated gate bipolar transistor (28)
Extremely it is connected, the varistor (25), output resistance (26) and filter capacitor (27) are connected in parallel on the defeated of rectification circuit (24) respectively
Outlet, second current measurement module (30) are mounted on the emitter of insulated gate bipolar transistor (28), the comparator
(37) the low-pass filtered device of positive input (36) is connected with the second current measurement module (30), and reverse input end is through periphery
Circuit is connected with power supply VCC, and the output end of comparator (37) drives with IGBT and the input terminal of control module (35) is connected, described
The feeder ear of IGBT driving and control module (35) is connected with the secondary side of isolating transformer (34)；
The digitial controller (9), for receiving by carrying out real-time communication with parameter setting running state monitoring unit (10)
The operating parameter of the every task of power supply, and power supply actual motion state is uploaded in real time, while being detected the first electric current on major loop and being surveyed
The output for measuring module (8), is converted to digital quantity for the output of the first current measurement module (8) and sets with the electric current in operating parameter
Definite value is compared, PID arithmetic, the number of the PSM module (2) of switching needed for calculating, and is connected to every group of PSM by optical fiber transmission
The IGBT of module (2) drives and control module (35), the insulated gate bipolar in fast conducting or shutdown corresponding PSM module (2)
Transistor (28) realizes the quick variation of electric power output voltage, so that output electric current quickly tracks and stablizes in current setting value.
2. high power DC plasma electrical source according to claim 1, it is characterised in that: the PSM module (2) is also
Including indicating circuit, the indicating circuit is made of current-limiting resistance (33) and light emitting diode (32), the light emitting diode
(32) cathode is connected with the cathode output end of rectification circuit (24), and anode is brilliant through current-limiting resistance (33) and insulated gate bipolar
The emitter of body pipe (28) is connected.
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| CN106026702B true CN106026702B (en) | 2019-10-25 |
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