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CN106017345A - Graded material coupling strain field in-situ measuring system and method based on speckle technique - Google Patents

Graded material coupling strain field in-situ measuring system and method based on speckle technique Download PDF

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CN106017345A
CN106017345A CN201610653678.9A CN201610653678A CN106017345A CN 106017345 A CN106017345 A CN 106017345A CN 201610653678 A CN201610653678 A CN 201610653678A CN 106017345 A CN106017345 A CN 106017345A
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王艳飞
黄崇湘
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Sichuan University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
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    • G01N3/068Special adaptations of indicating or recording means with optical indicating or recording means

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Abstract

本发明公开了一种基于散斑技术的梯度材料耦合应变场原位测量系统及方法。将基于电子显微系统取像的数字散斑相关方法应用到梯度材料微尺度耦合应变场的原位观测中,克服了梯度材料因微尺度的迁移性耦合界面造成耦合效果在时间、空间上分布不均匀而无法使用传统宏、细观力学实验方法有效表征耦合过程的问题。利用电刻蚀方法制备出高质量的微纳米尺度散斑,克服了传统方法所制备异质颗粒散斑尺寸不够细小、均匀性差、灰度强度梯度低、操作复杂、经济成本高、可能不适合电子场成像、粘接弱则易脱落、粘接强则会约束试样表面变形并扭曲甚至覆盖微小的梯度耦合应变分量的缺点。

The invention discloses a gradient material coupled strain field in-situ measurement system and method based on speckle technology. Applying the digital speckle correlation method based on electron microscopy system imaging to the in-situ observation of the micro-scale coupling strain field of gradient materials, it overcomes the temporal and spatial distribution of coupling effects caused by the micro-scale mobility coupling interface of gradient materials Inhomogeneity makes it impossible to effectively characterize the coupling process using traditional macro and mesomechanics experimental methods. High-quality micro-nano-scale speckles are prepared by electro-etching, which overcomes the small size of heterogeneous particle speckles prepared by traditional methods, poor uniformity, low gray intensity gradient, complicated operation, high economic cost, and may not be suitable. Electron field imaging, weak bonding is easy to fall off, and strong bonding will restrain the deformation of the sample surface and distort or even cover the shortcomings of small gradient coupling strain components.

Description

基于散斑技术的梯度材料耦合应变场原位测量系统及方法In-situ measurement system and method of gradient material coupling strain field based on speckle technology

技术领域technical field

本发明涉及耦合应变场原位测量领域,具体涉及一种基于散斑技术的梯度材料耦合应变场原位测量系统及方法。The invention relates to the field of in-situ measurement of coupling strain fields, in particular to a system and method for in-situ measurement of gradient material coupling strain fields based on speckle technology.

背景技术Background technique

从大规模土建工程到微电子器件,都要求结构材料具有高强度、高韧性。但是,对于传统的均匀材料,强度和塑性是互斥的。比如,粗晶金属材料塑性好而强度低,纳米金属材料强度虽高,但低塑性变形能力极其容易突发摧毁性的破坏。科研人员通过对贝壳、骨头等自然梯度材料的研究,发现由多种力学不协调单元组成的多尺度梯度结构材料能够同时具备高强度和高塑性。为优化、指导梯度材料结构设计,要求我们对其承载、变形机制有清楚的理解。变形过程中,由于力学不协调单元层之间的弹性与塑性变形、塑性稳定与不稳定流变状态的不统一,梯度材料表现出层间交互约束、多尺度多场耦合、应力应变梯度分布、长程内应力场优先发展等界面耦合效应。单元层在梯度材料中所表现的力学本构完全不同于其单独测试的结果,导致有限元等经典数值模拟方法很难模拟上述耦合过程,所以耦合机理的探索强烈依赖于实验观测。但是,无论是界面随荷载状态连续迁移并转换的连续梯度结构,还是具有清晰、稳定界面的层状梯度结构,单一界面的影响范围都只局限于界面两侧几个微米的范围内,这要求实验观测方法和系统应达到微纳米空间分辨率;跨界面的梯度应力、应变耦合量相对于宏观均匀分量仍然是一个非常小的分量,极其容易被宏观均匀分量的噪音所覆盖,这需要高精度低噪音的观测系统和方法;此外,单元层间的耦合强度随荷载状态、加载路径、耦合积累程度非线性变化,这要求实验方法和系统能实现多荷载路径的原位观测。传统的拉伸或压缩等试样整体性能测试、微纳米压痕局部性能测试、宏细观光测或电测应变表征等方法都已无法有效表征梯度材料的耦合变形过程。From large-scale civil engineering to microelectronic devices, structural materials are required to have high strength and high toughness. However, for conventional homogeneous materials, strength and plasticity are mutually exclusive. For example, coarse-grained metal materials have good plasticity but low strength, while nano-metal materials have high strength, but low plastic deformation ability is extremely easy to sudden and destructive damage. Through the study of natural gradient materials such as shells and bones, researchers have found that multi-scale gradient structural materials composed of a variety of mechanically incompatible units can have high strength and high plasticity at the same time. In order to optimize and guide the structural design of gradient materials, we are required to have a clear understanding of their load-bearing and deformation mechanisms. During the deformation process, due to the inconsistency of elastic and plastic deformation, plastic stability and unstable rheological state between mechanically uncoordinated unit layers, gradient materials exhibit interlayer interaction constraints, multi-scale and multi-field coupling, stress-strain gradient distribution, Interfacial coupling effects such as the preferential development of the long-range internal stress field. The mechanical constitutive performance of the unit layer in the gradient material is completely different from the results of its separate test, which makes it difficult for classical numerical simulation methods such as finite elements to simulate the above coupling process, so the exploration of the coupling mechanism strongly depends on experimental observations. However, whether it is a continuous gradient structure in which the interface continuously migrates and transforms with the load state, or a layered gradient structure with a clear and stable interface, the influence range of a single interface is limited to within a few microns on both sides of the interface, which requires The experimental observation method and system should achieve micro-nano spatial resolution; the gradient stress and strain coupling across the interface is still a very small component compared to the macro-uniform component, and it is extremely easy to be covered by the noise of the macro-uniform component, which requires high Observation systems and methods with high precision and low noise; in addition, the coupling strength between unit layers varies nonlinearly with the load state, loading path, and coupling accumulation degree, which requires experimental methods and systems to realize in-situ observation of multiple load paths. Traditional methods such as overall performance testing of samples such as tension or compression, local performance testing of micro-nano indentation, macro-micro-optical observation or electrical strain characterization have been unable to effectively characterize the coupled deformation process of gradient materials.

发明内容Contents of the invention

本发明为解决上述技术问题提供一种基于散斑技术的梯度材料耦合应变场原位测量系统及方法。To solve the above technical problems, the present invention provides an in-situ measurement system and method for gradient material coupled strain field based on speckle technology.

本发明通过下述技术方案实现:The present invention realizes through following technical scheme:

基于散斑技术的梯度材料耦合应变场原位测量方法,包括以下步骤:The in-situ measurement method of gradient material coupling strain field based on speckle technology includes the following steps:

步骤1、在梯度材料试样表面制备微纳米尺度散斑;Step 1. Prepare micro-nano scale speckles on the surface of the gradient material sample;

步骤2、在电子显微镜下,获取梯度材料试样在无荷载状态下力学梯度面耦合区域的散斑场I0Step 2. Under the electron microscope, obtain the speckle field I 0 of the gradient material sample in the coupling region of the mechanical gradient surface in the unloaded state;

步骤3、将梯度材料试样加载到预定荷载状态P1,并获取该荷载状态下力学梯度面耦合变形区域的散斑场I1Step 3. Load the gradient material sample to a predetermined load state P 1 , and obtain the speckle field I 1 of the coupled deformation area of the mechanical gradient surface under this load state;

步骤4、重复步骤3将梯度材料试样加载到预定荷载状态Pi,其中i为大于1的自然数;并获取对应荷载状态下相同区域的散斑场Ii,直到完成预定加载路径;Step 4. Repeat step 3 to load the gradient material sample into the predetermined loading state P i , where i is a natural number greater than 1; and obtain the speckle field I i of the same area under the corresponding loading state until the predetermined loading path is completed;

步骤5、对散斑场I做预处理,再将数字散斑场Ij和I0做相关计算得到Pj荷载状态相对于无荷载状态下的耦合应变场εj,其中j为大于0的自然数;将数字散斑场Ij和In做相关计算得到从Pn荷载状态到Pj荷载状态的耦合应变场εj-n,其中,n为大于0的自然数且小于j;Step 5. Perform preprocessing on the speckle field I, and then perform correlation calculations on the digital speckle field I j and I 0 to obtain the coupling strain field ε j in the loaded state of P j relative to the unloaded state, where j is greater than 0 A natural number; the digital speckle field I j and I n are correlated to obtain the coupling strain field ε jn from the P n load state to the P j load state, where n is a natural number greater than 0 and less than j;

步骤6、根据εj和εj-n得到梯度材料耦合应变场跨界面的分布规律及其随荷载状态的演化过程。Step 6. According to ε j and ε jn , the distribution law of the coupling strain field of the gradient material across the interface and its evolution process with the load state are obtained.

散斑技术的全称是数字散斑相关技术,该技术是一种高精度、非接触的变形测量方法,其理论不受测量尺寸的限制。本发明将该技术与基于高空间分辨率电子显微成像系统的原位观测实验平台相结合,以满足梯度材料微尺度耦合应变场原位观测的需求,进而从应变随荷载状态演化、交互耦合的角度揭示梯度结构材料耦合变形机理。梯度材料耦合变形过程的实验表征需要非常高空间、精度分辨率的原位实验系统和方法,这是学术界的一大难题。本发明首次将“数字散斑相关技术”应用到其研究中并有效的表征了梯度材料变形过程中的应变耦合、演化过程,实现了高精度、低噪音、多荷载路径的原位观测。The full name of speckle technology is digital speckle correlation technology, which is a high-precision, non-contact deformation measurement method, and its theory is not limited by the measurement size. The present invention combines the technology with the in-situ observation experiment platform based on the high-spatial-resolution electron microscopic imaging system to meet the requirements for in-situ observation of the micro-scale coupling strain field of the gradient material, and then from the evolution of the strain with the load state and the interactive coupling The perspective reveals the coupling deformation mechanism of gradient structure materials. The experimental characterization of the coupled deformation process of gradient materials requires in-situ experimental systems and methods with very high spatial and precision resolution, which is a major problem in the academic community. The invention applies "digital speckle correlation technology" to its research for the first time and effectively characterizes the strain coupling and evolution process in the deformation process of gradient materials, and realizes in-situ observation with high precision, low noise and multiple load paths.

在步骤1中,微纳米尺度散斑用电刻蚀方法制得。In step 1, micro-nanoscale speckles are fabricated by electroetching.

所述电刻蚀方法制备微纳米尺度散斑的方法包括以下步骤:The method for preparing micro-nano scale speckles by the electro-etching method comprises the following steps:

步骤1-1、对梯度材料试样进行抛光;Step 1-1, polishing the gradient material sample;

步骤1-2、将梯度材料试样接在直流恒压电源阳极,接通直流恒压电源,根据所需散斑尺寸调节电刻蚀电压和时间,进行电刻蚀;Step 1-2, connect the gradient material sample to the anode of the DC constant voltage power supply, switch on the DC constant voltage power supply, adjust the electroetching voltage and time according to the required speckle size, and perform electroetching;

步骤1-3、取出梯度材料试样并用去离子水迅速清洗表面残留电刻蚀液,清洁梯度材料试样并干燥。Step 1-3, take out the gradient material sample and quickly wash the residual electroetching solution on the surface with deionized water, clean the gradient material sample and dry it.

数字散斑相关技术在宏观尺度应变测量方面的应用虽已很广泛,但对于微纳米尺度并具有较大梯度的耦合应变场的原位测量,该技术的应用尚存在以下一系列问题:(a)微纳米尺寸均匀散斑的制备,要求散斑尺寸达到几十甚至几个纳米,而传统的纳米喷涂、化学气相沉积等微纳米散斑制备方法存在尺寸偏大、均匀性差、操作复杂、经济成本高、灰度强度梯度低等缺点;(b)对于传统的异质颗粒覆盖方法制备的散斑对试样表面存在约束作用,容易扭曲甚至覆盖微小的层间耦合应变分量,所以所制备散斑场应无表面约束效应并能切实反映材料本征变形;(c)散斑场应具备低噪音、高灰度强度梯度的特点,以避免微小的耦合梯度应变分量被均匀应变分量的噪音所干涉或覆盖;(d)获取具有微纳米空间分辨率的散斑像一般需要复杂的电子成像设备,比如扫描电子显微镜,这也就要求试样散斑应具有导电性并适应电子场成像;(e)原位连续测量需要电子成像设备配备有足够高位移荷载分辨率的原位加载装置,相应地,在有限空间的高真空、电子场环境实现加载台的封装和与外界控制柜的连接亦是一难题。本发明首次利用电刻蚀方法制备金属材料表面的微纳米尺度散斑,并有效地解决了低成本、高质量、高精度、适合高分辨率电子场成像的微纳米尺度散斑制备难题。电刻蚀方法将精细抛光的试样作为阳极,与直流电源、阴极、电刻蚀溶液共同组成闭合回路,在低压直流的作用下,试样表面同时发生凸点溶解和晶格缺陷点腐蚀反应,快速形成细致均匀、低粗糙度的凹凸形貌。在高空间分辨率、高对比度的电子场环境下,上述凹凸形貌成像为具有较高灰度强度梯度的散斑形貌。Although digital speckle correlation technology has been widely used in macro-scale strain measurement, there are still a series of problems in the application of this technology for the in-situ measurement of micro-nano-scale coupled strain fields with large gradients: (a ) The preparation of micro-nano-sized uniform speckles requires the speckle size to reach tens or even several nanometers, while the traditional micro-nano speckle preparation methods such as nano-spraying and chemical vapor deposition have problems of large size, poor uniformity, complicated operation, and economical (b) The speckle prepared by the traditional heterogeneous particle coverage method has a constraining effect on the sample surface, which is easy to distort or even cover the tiny interlayer coupling strain component, so the prepared speckle The speckle field should have no surface confinement effect and can truly reflect the intrinsic deformation of the material; (c) the speckle field should have the characteristics of low noise and high gray intensity gradient, so as to avoid the small coupling gradient strain component being overwhelmed by the noise of the uniform strain component. Interference or coverage; (d) Obtaining speckle images with micro-nano spatial resolution generally requires complex electronic imaging equipment, such as scanning electron microscopes, which also requires that the speckle of the sample should be conductive and suitable for electronic field imaging; ( e) In-situ continuous measurement requires electronic imaging equipment to be equipped with an in-situ loading device with a high enough displacement load resolution. Correspondingly, the packaging of the loading table and the connection with the external control cabinet in a high vacuum and electronic field environment in a limited space are also necessary. is a difficult problem. The present invention uses the electroetching method for the first time to prepare micro-nano-scale speckles on the surface of metal materials, and effectively solves the problem of low-cost, high-quality, high-precision, and suitable for high-resolution electron field imaging micro-nano-scale speckle preparation. The electroetching method uses a finely polished sample as an anode, and forms a closed circuit with a DC power supply, a cathode, and an electroetching solution. Under the action of low-voltage DC, the surface of the sample simultaneously undergoes bump dissolution and lattice defect pitting corrosion reactions. , and quickly form a fine, uniform, and low-roughness concave-convex topography. In an electronic field environment with high spatial resolution and high contrast, the above concave-convex topography is imaged as a speckle topography with a relatively high gray intensity gradient.

在对梯度材料试样进行抛光时,依次包括粗砂纸磨光、细砂纸磨光和电解抛光步骤。When polishing the gradient material sample, the steps of coarse sandpaper polishing, fine sandpaper polishing and electrolytic polishing are sequentially included.

在步骤1-2中,电刻蚀的时间调节范围为3s至15s。In step 1-2, the time adjustment range of electroetching is from 3s to 15s.

所述步骤2具体包括以下步骤:Described step 2 specifically comprises the following steps:

步骤2-1、将梯度材料试样力学梯度面调入视场内并放大成像倍数聚焦耦合变形区域;Step 2-1, adjusting the mechanical gradient surface of the gradient material sample into the field of view and zooming in on the imaging factor to focus on the coupling deformation area;

步骤2-2、调节电子场以提高电子散斑场的灰度强度梯度,重新聚焦并拍摄散斑图。Step 2-2. Adjust the electronic field to increase the gray intensity gradient of the electronic speckle field, refocus and take a speckle image.

在步骤2-1中放大成像倍数时单个散斑直径的尺寸不小于3像素且不大于8像素。When the imaging multiple is enlarged in step 2-1, the size of a single speckle diameter is not less than 3 pixels and not greater than 8 pixels.

在步骤2-2中,调节电子场的具体方法包括提高电子束加速电压,提高电子场的亮度和对比度。In step 2-2, the specific method of adjusting the electron field includes increasing the electron beam acceleration voltage, increasing the brightness and contrast of the electron field.

所述耦合变形区域为梯度材料力学梯度渐变面上的弹性与塑性变形耦合界面、塑性稳定流变与不稳定流变耦合界面的迁移区域或层状材料力学梯度面上的界面附近区域。The coupling deformation region is the elastic and plastic deformation coupling interface on the mechanical gradient gradient surface of the gradient material, the migration region of the plastic stable rheological and unstable rheological coupling interface, or the area near the interface on the mechanical gradient surface of the layered material.

对散斑场I做预处理包括滤波减噪处理、灰度强度梯度计算、统计散斑平均直径。The preprocessing of the speckle field I includes filter noise reduction processing, gray intensity gradient calculation, and statistical speckle average diameter.

基于上述方法,发明人研发一套以下系统。Based on the above method, the inventors developed the following system.

基于散斑技术的梯度材料耦合应变场原位测量系统,包括:Gradient material coupling strain field in-situ measurement system based on speckle technology, including:

对梯度材料试样进行处理以在其表面形成微纳米尺度散斑的试样预处理模块;A sample preprocessing module that processes the gradient material sample to form micro-nano scale speckles on its surface;

置于电子显微镜样品仓的原位加载台以实现对梯度材料试样不同加载速率的单向拉伸、压缩以及控制循环加卸载过程的试样加载模块;The sample loading module placed on the in-situ loading platform of the electron microscope sample chamber to realize the unidirectional tension and compression of the gradient material sample at different loading rates and control the cyclic loading and unloading process;

对梯度材料试样表面耦合变形区域散斑场进行拍摄的散斑场拍摄模块;The speckle field shooting module for shooting the speckle field of the coupled deformation area on the surface of the gradient material sample;

根据拍摄结果对散斑场进行相关性计算和分析的计算分析模块。Calculation and analysis module that performs correlation calculation and analysis on the speckle field according to the shooting results.

作为优选,所述试样预处理模块包括砂纸、电解抛光液、电刻蚀装置。Preferably, the sample pretreatment module includes sandpaper, electrolytic polishing liquid, and electroetching device.

作为优选,所述试样加载模块包括基座、固定于基座的前夹块和滑动连接在基座上的后夹块,所述前夹块和后夹块上均设置有试样悬挂槽对,还包括用于调节前夹块和后夹块相对位移的加载螺杆以及用于对前夹块和后夹块相对位移进行标示的位移荷载读数装置,所述基座底部设置加载台固定装置。在前夹块和后夹块上分别设置试样悬挂槽以构成试样悬挂槽对,试样悬挂槽对分别从两端固定拉伸试样,加载螺杆通过调节前夹块与后夹块之间相对距离以实现对拉伸试样的加载和卸载;压缩试样的夹持则不需要试样悬挂槽对,直接将压缩试样需观测面调节朝上后夹持在前夹块和后夹块之间,调节加载螺杆调近前夹块和后夹块之间相对距离以实现对压缩试样的压缩。加载装置通过基座底部的加载装置固定结构固定在成像系统载物台上。采用上述结构的装置,紧凑精巧、质量轻、体积小,可适应成像系统有限的样品仓空间;前夹块和后夹块通过加载螺杆调节相对距离,即通过螺纹传动的方式对相对距离进行调节;且实际应用时,将整个装置用丙酮溶液超声波清洗后可直接适用于电子成像设备的高真空电子场环境,该结构也就不存在装置自身水、油渍、磁场封装的问题。Preferably, the sample loading module includes a base, a front clamp fixed to the base, and a rear clamp slidably connected to the base, the front clamp and the rear clamp are provided with sample suspension grooves Yes, it also includes a loading screw for adjusting the relative displacement of the front clamp and the rear clamp and a displacement load reading device for marking the relative displacement of the front clamp and the rear clamp, and the bottom of the base is provided with a loading table fixing device . The sample hanging grooves are respectively set on the front clamping block and the rear clamping block to form a pair of sample hanging grooves. The pair of sample hanging grooves respectively fix the tensile samples from both ends. The relative distance between them is used to realize the loading and unloading of the tensile sample; the clamping of the compression sample does not need the pair of sample suspension grooves, and the compression sample is directly adjusted to the observation surface and clamped on the front clamp block and the rear clamp. Between the clamping blocks, adjust the loading screw to adjust the relative distance between the front clamping block and the rear clamping block to realize the compression of the compression sample. The loading device is fixed on the imaging system stage through the loading device fixing structure at the bottom of the base. The device adopting the above structure is compact, exquisite, light in weight and small in size, and can adapt to the limited sample chamber space of the imaging system; the relative distance between the front clamping block and the rear clamping block is adjusted by the loading screw, that is, the relative distance is adjusted by thread transmission. and in actual application, the whole device can be directly applied to the high-vacuum electron field environment of electronic imaging equipment after ultrasonic cleaning with acetone solution, and the structure does not have the problems of water, oil stains and magnetic field packaging of the device itself.

作为优选,所述计算分析模块包括图像输入输出模块、散斑场预处理模块、散斑场相关性计算模块、应变数据矩阵奇异点排除模块、应变数据矩阵云图可视化模块、应变场局部区域数据提取模块、数据文本输出模块。Preferably, the calculation and analysis module includes an image input and output module, a speckle field preprocessing module, a speckle field correlation calculation module, a strain data matrix singular point elimination module, a strain data matrix cloud map visualization module, and a strain field local area data extraction module. module, data text output module.

本发明与现有技术相比,至少具有如下的优点和有益效果:Compared with the prior art, the present invention has at least the following advantages and beneficial effects:

1、本发明将基于电子显微系统取像的数字散斑相关方法应用到梯度材料微尺度耦合应变场的原位测量中,克服了梯度材料因耦合界面连续迁移、单一界面影响区跨度小、全场不均匀、耦合应变分量易失真或被噪音覆盖、耦合强度随荷载状态和耦合积累程度连续变化而无法使用传统拉伸、压痕、宏细观数字散斑相关等方法有效表征耦合过程的问题,达到了微纳米尺度高空间分辨率、高精度低噪音、全场兼顾局部、原位连续同时具备的观测条件。1. The present invention applies the digital speckle correlation method based on the electron microscope system image acquisition to the in-situ measurement of the micro-scale coupling strain field of the gradient material, which overcomes the continuous migration of the coupling interface of the gradient material, the small span of the affected area of a single interface, and the The whole field is not uniform, the coupling strain component is easily distorted or covered by noise, and the coupling strength changes continuously with the load state and coupling accumulation degree, so it is impossible to effectively characterize the coupling process using traditional methods such as stretching, indentation, and macroscopic digital speckle correlation. The problem has achieved the observation conditions of high spatial resolution at the micro-nano scale, high precision and low noise, full-field consideration of local, and in-situ continuous observation.

2、本发明利用电刻蚀方法制备微纳米尺度散斑,克服了传统纳米喷涂和气相沉积等方法所制备散斑尺寸不够细小、均匀性差、操作复杂、经济成本高、灰度强度梯度低、可能不适合电子场成像、粘接弱则易脱落、粘接强则会约束试样表面变形并扭曲甚至覆盖微小的梯度耦合应变分量等缺点。2. The present invention uses the electro-etching method to prepare micro-nano-scale speckles, which overcomes the small size of speckles prepared by traditional nano-spraying and vapor deposition methods, poor uniformity, complicated operation, high economic cost, low gray intensity gradient, It may not be suitable for electron field imaging, the weak bond will easily fall off, and the strong bond will restrain the deformation of the sample surface and distort or even cover the small gradient coupling strain components.

附图说明Description of drawings

此处所说明的附图用来提供对本发明实施例的进一步理解,构成本申请的一部分,并不构成对本发明实施例的限定。在附图中:The drawings described here are used to provide a further understanding of the embodiments of the present invention, constitute a part of the application, and do not limit the embodiments of the present invention. In the attached picture:

图1为本发明实施例4的梯度材料表面用电刻蚀方法制备并用扫描电子显微镜拍摄的微纳米散斑图。FIG. 1 is a micro-nano speckle pattern prepared by electroetching on the surface of the gradient material in Example 4 of the present invention and photographed by a scanning electron microscope.

图2是图1中A处的单个相关搜索窗口的像素分布图。FIG. 2 is a pixel distribution diagram of a single correlation search window at A in FIG. 1 .

图3是本发明实施例4所观测到的梯度材料某一荷载状态相对于初始状态的拉伸方向的微尺度耦合应变场图,其中,X表示界面;Y表示拉伸方向。Fig. 3 is a micro-scale coupled strain field diagram of a gradient material observed in Example 4 of the present invention under a certain load state relative to the stretching direction of the initial state, where X represents the interface; Y represents the stretching direction.

图4是本发明实施例4所观测到的梯度材料某一荷载状态相对于初始状态的垂直于拉伸方向的微尺度耦合应变场图。Fig. 4 is a micro-scale coupled strain field diagram perpendicular to the stretching direction of a gradient material observed in Example 4 of the present invention under a certain load state relative to the initial state.

图5是本发明实施例5所观测到的梯度材料两荷载状态垂直于拉伸方向的微尺度相对耦合应变场图。Fig. 5 is a microscale relative coupling strain field diagram perpendicular to the stretching direction of two loading states of the gradient material observed in Example 5 of the present invention.

图6是本发明实施例5中沿图5白色虚线的应变分布图。Fig. 6 is a strain distribution diagram along the white dotted line in Fig. 5 in Example 5 of the present invention.

具体实施方式detailed description

为使本发明的目的、技术方案和优点更加清楚明白,下面结合实施例和附图,对本发明作进一步的详细说明,本发明的示意性实施方式及其说明仅用于解释本发明,并不作为对本发明的限定。In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the examples and accompanying drawings. As a limitation of the present invention.

实施例1Example 1

一种基于散斑技术的梯度材料耦合应变场原位测量方法,包括以下步骤,An in-situ measurement method for gradient material coupling strain field based on speckle technology, comprising the following steps,

步骤1、在梯度材料试样表面制备微纳米尺度散斑;Step 1. Prepare micro-nano scale speckles on the surface of the gradient material sample;

步骤2、在电子显微镜下,获取梯度材料试样在无荷载状态下力学梯度面耦合区域的散斑场I0Step 2. Under the electron microscope, obtain the speckle field I 0 of the gradient material sample in the coupling region of the mechanical gradient surface in the unloaded state;

步骤3、将梯度材料试样加载到预定荷载状态P1,并获取该荷载状态下耦合变形区域的散斑场I1Step 3. Load the gradient material sample to a predetermined load state P 1 , and obtain the speckle field I 1 of the coupling deformation region under this load state;

步骤4、重复步骤3将梯度材料试样加载到预定荷载状态Pi,其中i为大于1的自然数;并获取对应荷载状态下相同区域的散斑场Ii,直到完成预定加载路径;Step 4. Repeat step 3 to load the gradient material sample into the predetermined loading state P i , where i is a natural number greater than 1; and obtain the speckle field I i of the same area under the corresponding loading state until the predetermined loading path is completed;

步骤5、对散斑场I做预处理,再将数字散斑场Ij和I0做相关计算得到Pj荷载状态相对于无荷载状态下的耦合应变场εj,其中j为大于0的自然数;将数字散斑场Ij和In做相关计算得到从Pn荷载状态到Pj荷载状态的耦合应变场εj-n,其中,n为大于0的自然数且小于j;Step 5. Perform preprocessing on the speckle field I, and then perform correlation calculations on the digital speckle field I j and I 0 to obtain the coupling strain field ε j in the loaded state of P j relative to the unloaded state, where j is greater than 0 A natural number; the digital speckle field I j and I n are correlated to obtain the coupling strain field ε jn from the P n load state to the P j load state, where n is a natural number greater than 0 and less than j;

步骤6、根据εj和εj-n得到梯度材料耦合应变场跨界面的分布规律及其随荷载状态的演化过程。Step 6. According to ε j and ε jn , the distribution law of the coupling strain field of the gradient material across the interface and its evolution process with the load state are obtained.

在下一实施例中举一个详细的电刻蚀方法制备微纳米尺度散斑的实施案例。In the next embodiment, a detailed implementation example of preparing micro-nano-scale speckles by electro-etching method will be given.

实施例2Example 2

本实施例在上述实施例的基础上,对微纳米尺度散斑的制作方法进行了细化。整个过程包括步骤1-6。In this embodiment, on the basis of the above-mentioned embodiments, the fabrication method of micro-nano-scale speckle is refined. The whole process includes steps 1-6.

事先配制该种属梯度材料的电解抛光液和电刻蚀溶液;Prepare the electropolishing solution and electroetching solution of the species gradient material in advance;

步骤1-1、将梯度材料试样的力学梯度面用粗砂纸、细砂纸依次磨光,再电解抛光;Step 1-1, polishing the mechanical gradient surface of the gradient material sample with coarse sandpaper and fine sandpaper in sequence, and then electropolishing;

步骤1-2、将梯度材料试样连接到直流恒压电源阳极,接通电源,选择合适的电刻蚀电压和时间参数进行电刻蚀,电压和时间参数的调节按照“电刻蚀电压越大,时间越短,则散斑尺寸越细;电刻蚀电压越小,时间越长,则散斑尺寸越大”的原则,电刻蚀时间参数优选的选择范围是3s-15s;Step 1-2, connect the gradient material sample to the anode of the DC constant voltage power supply, switch on the power supply, select the appropriate electroetching voltage and time parameters for electroetching, and adjust the voltage and time parameters according to "The higher the electroetching voltage Larger, the shorter the time, the finer the speckle size; the smaller the electro-etching voltage, the longer the time, the larger the speckle size" principle, the optimal selection range of electro-etching time parameters is 3s-15s;

步骤1-3、取出梯度材料试样,用去离子水迅速冲洗表面残留电刻蚀液,再用酒精超声清洗试样并用吹风机吹干。Step 1-3, take out the gradient material sample, quickly rinse the residual electroetching solution on the surface with deionized water, then ultrasonically clean the sample with alcohol and dry it with a hair dryer.

本方法基于电子显微镜取像的数字散斑方法,故将梯度材料试样夹持在基于电子显微镜的原位加载台上,实行步骤2:This method is based on the digital speckle method of electron microscope imaging, so the gradient material sample is clamped on the in-situ loading stage based on the electron microscope, and step 2 is carried out:

步骤2-1、通过扫描电子显微镜控制柜将力学梯度面耦合变形区域调入视场内,选择合适的放大倍数并聚焦该区域;Step 2-1, adjust the coupling deformation area of the mechanical gradient surface into the field of view through the scanning electron microscope control cabinet, select an appropriate magnification and focus on this area;

步骤2-2、采用调节电子场加速电压、提高电子场的对比度和亮度的方法提高散斑场的灰度强度梯度,拍摄无荷载状态下该区域的散斑场I0Step 2-2, increasing the gray intensity gradient of the speckle field by adjusting the acceleration voltage of the electron field and increasing the contrast and brightness of the electron field, and photographing the speckle field I 0 of the region under no load.

所述耦合变形区域为梯度材料力学梯度渐变面上的弹性与塑性变形耦合界面、塑性稳定流变与不稳定流变耦合界面的迁移区域或层状材料力学梯度面上的界面附近区域。The coupling deformation region is the elastic and plastic deformation coupling interface on the mechanical gradient gradient surface of the gradient material, the migration region of the plastic stable rheological and unstable rheological coupling interface, or the area near the interface on the mechanical gradient surface of the layered material.

放大倍数选择的依据是所需散斑场的空间分辨率和散斑尺寸,在保证分辨率的同时单个散斑的直径d的跨度应控制在不小于3像素且不大于8像素的范围内。The selection of magnification is based on the spatial resolution and speckle size of the required speckle field. While ensuring the resolution, the span of the diameter d of a single speckle should be controlled within the range of not less than 3 pixels and not more than 8 pixels.

步骤3:通过原位加载台将梯度材料试样加载到预定荷载状态P1,并拍摄获取该荷载状态下的散斑场I1Step 3: Load the gradient material sample to a predetermined load state P 1 through the in-situ loading platform, and take pictures to obtain the speckle field I 1 under this load state.

步骤4:重复步骤3将梯度材料试样加载到预定荷载状态Pi,其中i为大于1的自然数;并拍摄获取对应荷载状态下的散斑场Ii,直到完成预定加载路径,其中,预定加载路径指通过原位加载台实现预先设定好的不同应变速率的单向拉伸、压缩或控制循环加卸载过程。Step 4: Repeat step 3 to load the gradient material sample into the predetermined loading state P i , where i is a natural number greater than 1; and capture the speckle field I i under the corresponding loading state until the predetermined loading path is completed, where the predetermined The loading path refers to the unidirectional tension, compression or controlled cyclic loading and unloading process through the in-situ loading table to achieve preset different strain rates.

步骤2-2至步骤4中所拍摄的所有散斑场对应于同一耦合变形区域。All the speckle fields captured in steps 2-2 to step 4 correspond to the same coupling deformation region.

步骤5、对散斑场I进行滤波减噪、灰度强度梯度计算、统计散斑平均直径d0的预处理,再将数字散斑场Ij和I0做相关计算得到Pj荷载状态相对于无荷载状态即初始状态下的耦合应变场εj,其中j为大于0的自然数;将数字散斑场Ij和In做相关计算得到从Pn荷载状态到Pj荷载状态的耦合应变场εj-n,其中,n为大于0的自然数且小于j,其中,对数字散斑场Ij和In做相关计算所用的搜索窗口边长L的尺寸跨度为6d0至10d0,搜索步长l约为0.2d0Step 5. Preprocess the speckle field I by filter noise reduction, gray intensity gradient calculation, and statistical speckle average diameter d 0 , and then perform correlation calculations on the digital speckle field I j and I 0 to obtain the relative load state of P j The coupling strain field ε j in the no-load state, that is, the initial state, where j is a natural number greater than 0; the digital speckle field I j and I n are correlated to obtain the coupling strain from the P n load state to the P j load state Field ε jn , where n is a natural number greater than 0 and less than j, where the search window side length L used for correlation calculation of the digital speckle field I j and I n has a size span of 6d 0 to 10d 0 , and the search step The length l is about 0.2d 0 .

步骤6、对εj和εj-n依次进行奇异点排除、云图可视化处理、提取局部区域耦合应变、导出应变云图和应变场数据文本,对εj和εj-n的归纳分析可以提取跨界面耦合应变场的分布规律以及某些具体位置的耦合应变量随整体荷载的变化规律。Step 6. Carry out singular point exclusion, cloud map visualization processing, extract local area coupling strain, and export strain cloud map and strain field data text for ε j and ε jn in sequence. The inductive analysis of ε j and ε jn can extract cross-interface coupling strain The distribution law of the field and the change law of the coupling strain at some specific locations with the overall load.

实施例3Example 3

基于散斑技术的梯度材料耦合应变场原位测量系统,包括:Gradient material coupling strain field in-situ measurement system based on speckle technology, including:

对梯度材料试样进行处理以在其表面形成微纳米尺度散斑的试样预处理模块;A sample preprocessing module that processes the gradient material sample to form micro-nano scale speckles on its surface;

置于电子显微镜样品仓的原位加载台以实现对梯度材料试样不同加载速率的单向拉伸、压缩以及控制循环加卸载过程的试样加载模块;The sample loading module placed on the in-situ loading platform of the electron microscope sample chamber to realize the unidirectional tension and compression of the gradient material sample at different loading rates and control the cyclic loading and unloading process;

对梯度材料试样表面耦合变形区域散斑场进行拍摄的散斑场拍摄模块;The speckle field shooting module for shooting the speckle field of the coupled deformation area on the surface of the gradient material sample;

根据拍摄结果对散斑场进行相关性计算和分析的计算分析模块。Calculation and analysis module that performs correlation calculation and analysis on the speckle field according to the shooting results.

试样预处理模块包括砂纸、电解抛光液、电刻蚀装置,采用上述装置利用实施例2的方法制备梯度材料试样表面的散斑。The sample pretreatment module includes sandpaper, electrolytic polishing liquid, and an electroetching device, and the speckle on the surface of the gradient material sample is prepared by using the above device and the method in Example 2.

具体的,所述试样加载模块包括基座、固定于基座的前夹块和滑动连接在基座上的后夹块,所述前夹块和后夹块上均设置有试样悬挂槽对,还包括用于调节前夹块和后夹块相对位移的加载螺杆以及用于对前夹块和后夹块相对位移进行标示的位移荷载读数装置,所述基座底部设置加载台固定装置。加载装置固定装置具体的可采用燕尾槽的结构。Specifically, the sample loading module includes a base, a front clamping block fixed on the base, and a rear clamping block slidably connected to the base, and the front clamping block and the rear clamping block are provided with sample suspension grooves Yes, it also includes a loading screw for adjusting the relative displacement of the front clamp and the rear clamp and a displacement load reading device for marking the relative displacement of the front clamp and the rear clamp, and the bottom of the base is provided with a loading table fixing device . Specifically, the fixing device of the loading device can adopt the structure of dovetail groove.

具体的,计算分析模块包括图像输入输出模块、散斑场预处理模块、散斑场相关性计算模块、应变数据矩阵奇异点排除模块、应变数据矩阵云图可视化模块、应变场局部区域数据提取模块、数据文本输出模块。Specifically, the calculation and analysis module includes an image input and output module, a speckle field preprocessing module, a speckle field correlation calculation module, a strain data matrix singular point elimination module, a strain data matrix cloud image visualization module, a strain field local area data extraction module, Data text output module.

图像输入输出模块主要负责散斑图像的输入和应变场云图输出;散斑场预处理模块主要负责散斑图像滤波减噪、灰度强度梯度计算、散斑平均尺寸计算;散斑场相关性计算模块主要负责散斑场相关性计算得到应变场数据矩阵;应变数据矩阵奇异点排除模块主要负责应变场数据矩阵奇异点排除;应变数据矩阵云图可视化模块主要负责应变场数据矩阵云图可视化并对比分析;应变场局部区域数据提取模块主要负责应变场局部区域数据点提取分析;数据文本输出模块主要负责应变场数据文本输出。The image input and output module is mainly responsible for the input of speckle images and the output of strain field cloud images; the speckle field preprocessing module is mainly responsible for speckle image filtering noise reduction, gray intensity gradient calculation, and speckle average size calculation; speckle field correlation calculation The module is mainly responsible for calculating the correlation of the speckle field to obtain the strain field data matrix; the singular point elimination module of the strain data matrix is mainly responsible for the singular point elimination of the strain field data matrix; the cloud image visualization module of the strain data matrix is mainly responsible for the cloud image visualization and comparative analysis of the strain field data matrix; The data extraction module in the local area of the strain field is mainly responsible for the extraction and analysis of data points in the local area of the strain field; the data text output module is mainly responsible for the text output of the strain field data.

实施例4Example 4

本实施例以一种基于扫描电子显微镜的层状梯度材料的微尺度耦合应变场测量过程及结果为例,一方面,用以说明梯度材料界面处耦合应变场的特点及其观测方法和系统所需具备的条件,另一方面,用以体现本发明方法、系统的实用性和优越性能。所选材料为一种层状梯度材料,具体是一层高强度低塑性的纳米晶黄铜层被两层低强度高塑性的粗晶纯铜层所夹持的结构。该层状梯度材料具有犀利、稳定的弹/塑性、塑性流变稳定/不稳定耦合界面,变形过程中具有明显的界面效应和耦合特征。具体材料的制备及属性可参考文献X.L.Ma,C.X.Huang,et al.Strain hardening and ductility in acoarse-grain/nanostructure laminate material[J],Scripta Materialia,2015,103:57-60。This embodiment takes a scanning electron microscope-based measurement process and results of the microscale coupling strain field of layered gradient materials as an example. On the one hand, it is used to illustrate the characteristics of the coupling strain field at the interface of the gradient material and its observation method and system. The required conditions, on the other hand, are used to reflect the practicability and superior performance of the method and system of the present invention. The selected material is a layered gradient material, specifically a structure in which a layer of high-strength and low-plasticity nanocrystalline brass is sandwiched by two layers of low-strength and high-plasticity coarse-grained pure copper. The layered gradient material has sharp, stable elastic/plastic, plastic rheological stable/unstable coupling interfaces, and has obvious interface effects and coupling characteristics during deformation. For the preparation and properties of specific materials, please refer to X.L.Ma, C.X.Huang, et al. Strain hardening and ductility in acoarse-grain/nanostructure laminate material[J], Scripta Materialia, 2015, 103:57-60.

先配制电解抛光液和电刻蚀液,该种属材料的电解抛光液是常规铜基合金所用电解抛光液,电刻蚀液配方是120ml蒸馏水、2ml稀盐酸、5g三氯化铁以及微量添加剂。依次用600#、1000#,1500#砂纸打磨层状梯度材料试样力学梯度面并使用事先制备好的电解抛光液电解抛光,再将试样连接到直流电源阳极,1.2V电压电刻蚀8s,取出试样后依次用去离子水、酒精超声清洗试样并吹干。将试样夹持到基于扫描电子显微镜的原位加载台,调节扫描电子显微镜对焦试样力学梯度面,选择放大倍数为1200倍,电子束加速电压20KV,调高电子场亮度和对比度。所拍摄无荷载状态界面过渡区域的散斑场如图1所示,散斑场的尺寸为2210×1820pixel2,像素分辨率为41.7nm/pixel,全场灰度强度梯度为48.5,全场散斑平均尺寸d0为4.6pixel。将试样做单轴拉伸并分别在0.5%、2%、6%、10%、15%整体应变状态处拍摄散斑图。将不同荷载状态散斑图和初始态散斑场做相关计算和分析,相关计算窗口大小选为30×30pixel2,相关搜索步长采用3pixel。图2是散斑场局部单个搜索窗口的像素分布图。图3和图4分别给出了在10%整体应变状态下所拍摄界面过渡区域的拉伸方向和垂直于拉伸方向的耦合应变场灰度图,全场平均应变分别为10.1%和-5.48%。从两图中都可以明显区别出界面位置,界面处拉伸方向应变没有异常耦合。但是,如图4所示,垂直于拉伸方向应变场显现出大量耦合负应变积累的界面影响区,该区域应变梯度平均跨度仅182.4pixels,约7.6μm。Prepare the electrolytic polishing solution and electroetching solution first. The electrolytic polishing solution for this type of material is the electrolytic polishing solution used in conventional copper-based alloys. The electrolytic solution formula is 120ml of distilled water, 2ml of dilute hydrochloric acid, 5g of ferric chloride and trace additives . Use 600#, 1000#, 1500# sandpaper to polish the mechanical gradient surface of the layered gradient material sample in turn, and use the electrolytic polishing solution prepared in advance to electropolish, then connect the sample to the anode of the DC power supply, and electro-etch at 1.2V for 8s After taking out the sample, the sample was ultrasonically cleaned with deionized water and alcohol in turn and dried. Clamp the sample to the in-situ loading stage based on the scanning electron microscope, adjust the scanning electron microscope to focus on the mechanical gradient surface of the sample, select the magnification as 1200 times, the electron beam acceleration voltage of 20KV, and increase the brightness and contrast of the electron field. The speckle field of the interface transition area in the unloaded state is shown in Figure 1. The size of the speckle field is 2210×1820pixel 2 , the pixel resolution is 41.7nm/pixel, the gray intensity gradient of the whole field is 48.5, and the full-field scattered The average spot size d 0 is 4.6 pixels. The sample was uniaxially stretched and the speckle patterns were taken at the overall strain states of 0.5%, 2%, 6%, 10%, and 15%, respectively. Correlation calculations and analysis are performed on the speckle patterns of different load states and the initial state speckle field. The correlation calculation window size is selected as 30×30pixel 2 , and the correlation search step size is 3pixel. Fig. 2 is a pixel distribution diagram of a local single search window in the speckle field. Figure 3 and Figure 4 show the grayscale images of the coupled strain field in the stretching direction and perpendicular to the stretching direction of the interfacial transition region taken under the 10% global strain state, respectively, and the average strains in the whole field are 10.1% and -5.48 %. The position of the interface can be clearly distinguished from the two figures, and there is no abnormal coupling of strain in the tensile direction at the interface. However, as shown in Figure 4, the strain field perpendicular to the tensile direction shows a large number of interface-influenced areas where coupled negative strain accumulates, and the average span of the strain gradient in this area is only 182.4 pixels, about 7.6 μm.

实施例5Example 5

本实施例与所述实施例4的区别在于加载路径的不同,本实施例先将试样直接加载到10%整体应变荷载状态并拍摄散斑场图像I1,再将试样卸载到0应力状态并拍摄散斑场I2。将I2相对于I1做相关运算和分析,垂直于拉伸方向的应变场如图5所示。可以看出,该结果没有出现实施例4所述的界面影响区,但界面两侧存在明显应变差异。图6所示为沿图5中白色虚线的应变分布,图6中黑色虚线标示的界面两侧存在约0.038%的应变差异,这说明即使在卸载过程中,力学梯度层间仍存在明显的耦合约束作用。The difference between this embodiment and the above-mentioned embodiment 4 lies in the difference in the loading path. In this embodiment, the sample is directly loaded to the 10% overall strain load state and the speckle field image I 1 is taken, and then the sample is unloaded to 0 stress state and capture the speckle field I 2 . Computing and analyzing I 2 relative to I 1 , the strain field perpendicular to the stretching direction is shown in Figure 5. It can be seen that the result does not appear the interface affected zone described in Example 4, but there are obvious strain differences on both sides of the interface. Figure 6 shows the strain distribution along the white dotted line in Figure 5. There is a strain difference of about 0.038% on both sides of the interface marked by the black dotted line in Figure 6, which shows that even during the unloading process, there is still obvious coupling between the mechanical gradient layers. Constraint.

从上述两个具体实施例可以看出:Can find out from above-mentioned two concrete examples:

(1)、电刻蚀方法能制备出高灰度强度梯度、低噪音的优质微纳米尺寸散斑;(1) The electro-etching method can produce high-quality micro-nano-sized speckles with high gray intensity gradient and low noise;

(2)、本发明方法和系统能有效的满足梯度材料耦合应变表征所需的微纳米尺度高分辨率、高精度低噪音、多荷载路径、原位连续条件。(2) The method and system of the present invention can effectively meet the micro-nanoscale high-resolution, high-precision, low-noise, multiple load paths, and in-situ continuous conditions required for the coupled strain characterization of gradient materials.

以上所述的具体实施方式,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施方式而已,并不用于限定本发明的保护范围,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the scope of the present invention. Protection scope, within the spirit and principles of the present invention, any modification, equivalent replacement, improvement, etc., shall be included in the protection scope of the present invention.

Claims (11)

1. functionally gradient material (FGM) based on Speckles Technique coupling strain field in-situ measuring method, its feature It is, comprises the following steps:
Step 1, prepare micro-nano-scale speckle at functionally gradient material (FGM) specimen surface;
Step 2, under an electron microscope, obtains functionally gradient material (FGM) sample and exerts oneself in no-load state Learn the speckle field I of gradient face coupling regime0
Step 3, functionally gradient material (FGM) sample is loaded into predetermined loading status P1, and obtain this load The speckle field I in Coupling Deformation region, mechanical gradient face under state1
Functionally gradient material (FGM) sample is loaded into predetermined loading status P by step 4, repetition step 3i, its Middle i is the natural number more than 1;And obtain the speckle of same area under corresponding loading status Field Ii, until completing predetermined load path;
Step 5, speckle field I is done pretreatment, then by digital speckle field IjAnd I0Make correlometer Calculation obtains PjLoading status is relative to coupling strain field ε under no-load statej, wherein j For the natural number more than 0;By digital speckle field IjAnd InDo correlation computations to obtain from Pn Loading status is to PjCoupling strain field ε of loading statusj-n, wherein, n is oneself more than 0 So count and less than j;
Step 6, according to εjAnd εj-nObtain the regularity of distribution in functionally gradient material (FGM) coupling strain field face transboundary And the evolutionary process with loading status.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 1 coupling strain field In-situ measuring method, it is characterised in that: in step 1, micro-nano-scale speckle Electricity consumption lithographic method prepares.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 2 coupling strain field In-situ measuring method, it is characterised in that described electroetching method prepares micro-nano meter ruler The method of degree speckle comprises the following steps:
Step 1-1, functionally gradient material (FGM) sample is polished;
Step 1-2, functionally gradient material (FGM) sample is connected on DC constant voltage power anode, connects direct current permanent Voltage source, according to required speckle size regulation electroetching voltage and time, carries out electroetching;
Step 1-3, taking-up functionally gradient material (FGM) sample also clean remained on surface electroetching liquid, cleaning ladder Degree material sample is also dried.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 3 coupling strain field In-situ measuring method, it is characterised in that: in step 1-2, the time of electroetching Range of accommodation is 3s to 15s.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 1 coupling strain field In-situ measuring method, it is characterised in that described step 2 specifically includes following steps:
Step 2-1, visual field is called in functionally gradient material (FGM) sample mechanical gradient face in and zoom into as times Number focuses on Coupling Deformation region;
Step 2-2, regulation field are to improve the gray-scale intensity gradient of electronic speckle field.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 5 coupling strain field In-situ measuring method, it is characterised in that: when amplifying imaging magnification in step 2-1 The size of single speckle diameter is not less than 3 pixels and no more than 8 pixels.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 5 coupling strain field In-situ measuring method, it is characterised in that: in step 2-2, regulation field Concrete grammar includes improving beam voltage, improves the brightness of field and right Degree of ratio.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 1 coupling strain field In-situ measuring method, it is characterised in that: described Coupling Deformation region is functionally gradient material (FGM) Elasticity on mechanical gradient transitional surface and plastic deformation coupled interface, plasticity stationary flow Become the migration region with unstable rheology coupled interface or stratified material mechanical gradient face On near interface region.
9. functionally gradient material (FGM) based on Speckles Technique coupling strain field in-situ measurement system, its feature It is, including:
Process functionally gradient material (FGM) sample to form the examination of micro-nano-scale speckle on its surface Sample pretreatment module;
It is placed in the add in-place microscope carrier in electron microscope sample storehouse to realize to functionally gradient material (FGM) sample not With loading speed simple tension, compress and control the sample of cyclic loading and unloading process and add Carry module;
The speckle field shooting functionally gradient material (FGM) specimen surface Coupling Deformation region speckle field is clapped Take the photograph module;
The computation analysis module according to shooting results speckle field calculated and analyze.
Functionally gradient material (FGM) based on Speckles Technique the most according to claim 9 coupling strain field In-situ measurement system, it is characterised in that: described sample load-on module include pedestal, The front fixture block being fixed on pedestal and the rear fixture block being slidably connected on pedestal, described before It is provided with sample suspension groove pair on fixture block and rear fixture block, also includes before regulation Fixture block and the loading screw rod of rear fixture block relative displacement and for front fixture block and rear folder Block relative displacement carries out the displacement load reading plotter indicated, and described base bottom sets Put loading bench fixing device.
11. functionally gradient material (FGM) based on Speckles Technique according to claim 9 coupling strain fields In-situ measurement system, it is characterised in that: described computation analysis module includes that image is defeated Enter output module, speckle field pretreatment module, speckle field correlation calculations module, Strain data Singular Value point gets rid of module, strain data matrix cloud atlas visualization mould Block, strain field part area data extraction module, data text output module.
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