CN106001941B - A kind of laser drawing mould puncher and its linear method for controlling frequency conversion - Google Patents
A kind of laser drawing mould puncher and its linear method for controlling frequency conversion Download PDFInfo
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- CN106001941B CN106001941B CN201610289706.3A CN201610289706A CN106001941B CN 106001941 B CN106001941 B CN 106001941B CN 201610289706 A CN201610289706 A CN 201610289706A CN 106001941 B CN106001941 B CN 106001941B
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- 230000008859 change Effects 0.000 claims description 5
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- 239000000463 material Substances 0.000 abstract description 15
- 238000005553 drilling Methods 0.000 abstract description 6
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- 229910003460 diamond Inorganic materials 0.000 description 7
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- 238000005265 energy consumption Methods 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Punching Or Piercing (AREA)
Abstract
The present invention relates to a kind of laser drawing mould puncher and its linear method for controlling frequency conversion, laser drawing mould puncher includes computer control system, coding and driving unit, kinematic system, laser, rotary system, focusing image-forming system, beam delivery system, mold, further includes support platform.A kind of laser drawing mould puncher and its linear method for controlling frequency conversion of the present invention using linear method for controlling frequency conversion, realizes the uniform removal of material, improves machining accuracy in laser drilling process, without overprocessing, ensure hole form quality amount.
Description
Technical field
It is especially a kind of for high-precision the present invention relates to a kind of laser drawing mould puncher and its linear method for controlling frequency conversion
Spend the laser drawing mould puncher of laser boring and its linear method for controlling frequency conversion.
Background technology
The fast development of IC industry has also driven related industry, and particularly upstream base industry is booming,
As integrated circuit, the critical material of large scale integrated circuit, with integrated circuit and semiconductor devices to encapsulation multilead,
High integration and miniaturization, the technical indicator of bonding gold wire is also higher and higher, high-purity, high temperature, ultra-fine, overlength silk material
Demand increases rapidly, and therefore, the demand of leads of IC mold is greatly increased.Diamond and artificial single crystal's diamond
It is the preferable material of leads of IC mold, usually diamond integrated circuit precise lead mold includes continuous several areas
Domain, initial hole are generally completed by laser processing technology, in order to obtain submicron order precision and mirror finish, generally will be through
Cross grinding and glossing.But the grinding of diamond and polishing are very tired, the pass and quality after Laser Processing determine
The removal amount of grinding and polishing, influences the quality and processing efficiency of mold.
The Laser Processing of diamond lead mold is generally using high-frequency, the laser beam of narrow spaces.Each pulse have compared with
High energy density, but total energy is little.This allows the material of tiny area reliable vaporization within moment, in mould
A micro- hole is left on tool.In laser processing procedure, through the method frequently with digital control scanning, substantial amounts of micro- hole is joined together,
It is final just to have obtained three-dimensional pass.For integrated circuit precise lead mold, pass generally comprise entrance, lubrication,
Compression, sizing, back taper and outlet area.
Traditional laser boring mode is contoured method, it be it is current through frequently with laser boring method, it is basic
Principle is as shown in Figure 1：Laser beam is focused in die surface, and workpiece is rotated with certain rotating speed along Z axis, and laser beam is radially from mould
Tool center is scanned to edge, and R is sweep radius, and biosynthesis locus is spiral of Archimedes, after layer of material removes,
Laser focal declines Δ Z, and sweep radius is kept to R- Δ R, another layer material of laser ablation, until the material of whole thickness H is eclipsed
It removes.
The rotating speed of traditional laser boring model workpiece is constant, and the frequency of laser output is constant, and the linear velocity of point is with sweeping
It retouches the reduction of radius and becomes smaller, the overlapping in ablation hole becomes closeer, as shown in Fig. 2, therefore laser beam is gone closer to the center in hole
The material removed is more, this will cause workpiece centre excessively to remove, and center ablation is more serious than edge in laser processing procedure, in numerical control
Before EP (end of program), the center in hole can penetrate too early, and ablation scar is serious, seriously affect processing quality, therefore, accurate pass
It hardly results in.
The content of the invention
To solve the above problems, the present invention provides a kind of laser drawing mould puncher and its linear method for controlling frequency conversion.This
Designing scheme is as follows used by invention：
A kind of laser drawing mould puncher is provided, it is characterised in that：It is single including computer control system, coding and driving
Member, kinematic system, laser, rotary system, focusing image-forming system, beam delivery system, mold；Kinematic system is put down including X-axis
Moving stage, Y-axis translation stage, Z axis translation stage, rotary system include turntable, centring tongs, driving motor, focusing image-forming system bag
Amasthenic lens, CCD, display are included, coding and driving unit include rotation driving control unit, kinematic system control unit, sit
Mark measuring unit, laser drive unit；Computer control system is connected respectively with coding and driving unit, focusing image-forming system,
Coding and driving unit are connected respectively with kinematic system, laser, rotary system, rotation driving control unit connection rotation system
System, kinematic system control unit are connected kinematic system, laser drive unit connecting laser, laser warp with measurement of coordinates unit
Beam delivery system connection focusing image-forming system is crossed, turntable is mounted on the X-axis translation stage of kinematic system, and mold passes through centering
Fixture is installed on a spinstand, and corresponding installation Z axis translation stage, amasthenic lens are mounted on Z axis translation stage above mold, kinetic system
System further includes coordinates feedback system, and coordinates feedback system is connected with measurement of coordinates unit.
A kind of laser drawing mould puncher as described above, it is characterised in that：Further include support platform, kinematic system peace
In support platform, support platform uses marble support frame structure.
A kind of laser drawing mould puncher as described above, it is characterised in that：Centring tongs 5 use self-centering clamp,
Turntable uses high-precision high-speed turntable, and micro- focusing image-forming system may be employed in focusing image-forming system.
A kind of laser drawing mould puncher as described above, it is characterised in that：The optical maser wavelength that laser uses for
1.064 μm, 10.6 μm, 0.532 micron, 0.355 micron, 0.266 micron.
A kind of laser drawing mould puncher as described above, it is characterised in that：Laser is using solid state laser, gas
Laser or optical fiber laser.
A kind of laser drawing mould puncher as described above, it is characterised in that：Coordinates feedback system is using grating scale, electricity
Machine encoder.
A kind of a kind of linear method for controlling frequency conversion of laser drawing mould puncher as described above is provided, feature exists
In：Comprise the following steps：
User joins required processing hole shape parameter input computer control system, computer control system according to setting
Number calculates control parameter and inputs to coding and driving unit, and parameter includes processing hole shape parameter, laser power parameters, kinematic system
Parameter, rotary system parameter；Rotation driving control unit controls driving motor, and turntable is driven to rotate, and after invariablenes turning speed, swashs
Optical drive unit controls laser works, including control laser output power and laser initial operating frequency, further includes mold
Circle centre position laser work frequency, while kinematic system control unit is pressed according to computer control system order-driven X-axis translation stage
Setting speed and acceleration movement；Coordinates feedback systematic survey displacement in moving process, and displacement coding real-time Transmission is given
Position coordinates progress data processing is transferred to computer control system, computer control by measurement of coordinates unit, measurement of coordinates unit
System processed calculates frequency conversion data volume, controls Laser Driven list in real time according to the processing hole shape parameter and laser power parameters of input
Member change laser frequency, control laser in real time according to the frequency conversion of kinematic system coordinate position relation export, conversion process always with
With X-axis translation stage kinematic parameter, until a layer plane machines, the movement of X-axis translation stage returns origin；Computer control system
After system judges that X-axis translation stage returns origin, instruction kinematic system control unit driving Z axis translation stage declines one layer of processing thickness,
X-axis translation stage movement frequency conversion processing drill process is repeated, the linear frequency conversion of control laser beam, successively accumulation processing make laser light
Beam processes hole shape by archimedes curve track, eventually forms set processing hole shape.
A kind of laser drawing mould puncher provided by the invention and its linear method for controlling frequency conversion, its advantage are：
Using linear method for controlling frequency conversion, the uniform removal of material is realized in laser drilling process, improves machining accuracy,
There is no overprocessing, ensure hole form quality amount.Laser drawing mould puncher device structure is stable, easy to operate, precision is high, efficiency
It is high, safe and reliable, use cost that is low in energy consumption, reducing user.
Description of the drawings
The existing laser boring schematic diagrams of Fig. 1
The existing laser boring design sketch of Fig. 2
Fig. 3 laser drawing mould puncher overall diagrams
Fig. 4 laser drawings mould punches side view
Fig. 5 laser drawing mould drilling system figures
The linear conversion procedure figure of Fig. 6 laser
The linear frequency conversion punching schematic diagram of Fig. 7 laser
The linear frequency conversion punching design sketch of Fig. 8 laser
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be described in further detail.In figure：
1 computer control system, 2 codings and driving unit, 3 kinematic systems, 31X axis translation stage, 32Y axis translation stage, 33Z
Axis translation stage, 4 lasers, 5 rotary systems, 51 turntables, 52 centring tongs, 53 driving motors, 6 focusing image-forming systems, 61 are gathered
Zoom lens, 62CCD, 63 displays, 7 beam delivery systems, 8 molds, 9 support platforms, 21 rotation driving control units, 22 movements
System control unit, 23 measurement of coordinates units, 24 laser drive units；621 laser beams, 622 processing hole shapes, 623 A Ji meter
Moral curvilinear path, 311 coordinates feedback systems.
Embodiment 1
As shown in figure 3, a kind of laser drawing mould puncher is provided, including：Computer control system 1, coding and driving are single
Member 2, kinematic system 3, laser 4, rotary system 5, focusing image-forming system 6, beam delivery system 7, mold 8；Kinematic system 3 is wrapped
X-axis translation stage 31, Y-axis translation stage 32, Z axis translation stage 33 are included, rotary system 5 includes turntable 51, centring tongs 52, driving electricity
Machine 53, focusing image-forming system 6 include amasthenic lens 61, CCD62, display 63, and coding and driving unit 2 include rotation driving control
Unit 21 processed, kinematic system control unit 22, measurement of coordinates unit 23, laser drive unit 24；Computer control system 1 is distinguished
With coding and driving unit 2, focusing image-forming system 6 be connected, coding and driving unit 2 respectively with kinematic system 3, laser 4,
Rotary system 5 connects, and rotation driving control unit 21 connects rotary system 5, kinematic system control unit 22 and measurement of coordinates list
Member 23 connects kinematic system 3,24 connecting laser 4 of laser drive unit, and laser 4 is focused on by the connection of beam delivery system 7
Imaging system 6, turntable 51 are mounted on the X-axis translation stage 31 of kinematic system 3, and mold 8 is mounted on rotation by centring tongs 52
On turntable 51, the corresponding installation Z axis translation stage 33 in 8 top of mold, amasthenic lens 61 is mounted on Z axis translation stage 33, kinematic system 3
Including coordinates feedback system 311, coordinates feedback system 311 is connected with measurement of coordinates unit 23.
Embodiment 2
A kind of laser drawing mould puncher is provided, it is characterised in that：It is single including computer control system 1, coding and driving
Member 2, kinematic system 3, laser 4, rotary system 5, focusing image-forming system 6, beam delivery system 7, mold 8, support platform 9；
Kinematic system 3 includes X-axis translation stage 31, Y-axis translation stage 32, Z axis translation stage 33, and rotary system 5 includes turntable 51, centering card
Tool 52, driving motor 53, focusing image-forming system 6 include amasthenic lens 61, CCD62, display 63, and coding and driving unit 2 wrap
Include rotation driving control unit 21, kinematic system control unit 22, measurement of coordinates unit 23, laser drive unit 24；Computer
Control system 1 respectively with coding and driving unit 2, focusing image-forming system 6 be connected, coding and driving unit 2 respectively with kinetic system
System 3, laser 4, rotary system 5 connect, and rotation driving control unit 21 connects rotary system 5, kinematic system control unit 22
Kinematic system 3 is connected with measurement of coordinates unit 23,24 connecting laser 4 of laser drive unit, laser 4 is by beam Propagation system
7 connection focusing image-forming system 6 of system, turntable 51 are mounted on the X-axis translation stage 31 of kinematic system 3, and mold 8 passes through centring tongs
52 are mounted on turntable 51, and the corresponding installation Z axis translation stage 33 in 8 top of mold, amasthenic lens 61 is mounted on Z axis translation stage 33
On, kinematic system 3 includes coordinates feedback system 311, and coordinates feedback system 311 is connected with measurement of coordinates unit 23；Kinematic system 3
In support platform 9.
A kind of laser drawing mould puncher is provided, support platform 9 uses marble support frame structure, makes structure more steady
Gu vibration is reduced, beneficial to raising machining accuracy.
Embodiment 3
A kind of laser drawing mould puncher is provided, self-centering clamp, rotary mold fixture 52 may be employed in centring tongs 52
It, can be according to mold outer circle automatically by the mold center of circle with rotating the heart to just, being less than 10 microns to heart precision with heart function is made by oneself.
Turntable uses high-precision high-speed turntable, and turntable bearing can be mechanical ball bearing, air-bearing, oil pressure bearing, the rotation of turntable
1-3000 revs/min of rotary speed, circular runout are less than 1 micron.
Embodiment 4
A kind of laser drawing mould puncher is provided, micro- focusing image-forming system may be employed in focusing image-forming system.It is micro- into
As system is made of optical amplifier and CCD amplifications, wherein optical amplifier object lens are laser focusing lens simultaneously, the focal length of lens
10mm-200mm, 5 microns of laser focused spot -- 20 microns.Micro- 10--1000 times of focusing image-forming system enlargement ratio.
Embodiment 5
A kind of laser drawing mould puncher is provided, coordinates feedback system 311 is surveyed using grating scale, motor encoder, coordinate
Unit 23 is measured using microcontroller, CPLD, FPGA processor etc..
Embodiment 6
A kind of laser drawing mould puncher is provided, laser 4 is using solid state laser, gas laser, optical fiber laser
Deng.Included using optical maser wavelength：10.6 microns, 1.064 μm, 0.532 micron, 0.355 micron, 0.266 micron etc..Laser is adopted
With Q-regulating technique, Q modes are adjusted as acousto-optic Q modulation or electric-optically Q-switched, output laser pulse width 5-200ns, output frequency 10Hz-
Mode-locked laser can also be used in 100KHz, laser, picosecond or femtosecond pulsewidth output.
The laser drawing mould puncher of the present invention employs advanced laser frequency removal technology, in laser drilling process
In, the uniform removal of material is realized, operation principle is as follows：
It is known that the linear velocity of certain point is represented by workpiece from figure：
The linear velocity of workpiece is related with the shape in material ablation area, and relation can be represented with following formula：
V=f × Δ (2)
Wherein Δ is the distance of 2 adjacent ablation points, and f is laser repetition rate, if f is definite value, Δ will be with the increase of v
And increase, reduce with the reduction of v.
General Laser Processing laser frequency f is for definite value or as Z-direction is layered frequency conversion, and all unavoidable removal is not
The problem of uniform.And we are using advanced laser frequency technology, that is, laser frequency is with the movement of workpiece X-direction,
Linear change, the distance, delta so as to fulfill 2 adjacent ablation points is constant, can achieve the purpose that uniformly to remove, especially be more suitable for
In high-precision hole shape processing.
The laser drawing mould puncher of the present invention, linear method for controlling frequency conversion comprise the following steps：
Required processing hole shape parameter is inputted computer control system 1 by user, and computer control system is according to setting
Parameter calculates control parameter and inputs to coding and driving unit 2, and parameter includes processing hole shape parameter, laser power parameters, movement
Systematic parameter, rotary system parameter；Rotation driving control unit 21 control driving motor 53, drive turntable 51 rotate, when turn
After speed is constant, laser drive unit 24 controls laser 4 to work, including control laser output power and laser initialization frequency
Rate further includes 8 circle centre position laser work frequency of mold, while kinematic system control unit 22 is instructed according to computer control system
X-axis translation stage 31 is driven to be moved by setting speed and acceleration；Coordinates feedback system 311 measures displacement in moving process, and
By displacement coding real-time Transmission to measurement of coordinates unit 23, position coordinates progress data processing is transferred to by measurement of coordinates unit 23
Computer control system 1, computer control system 1 calculate frequency conversion according to the processing hole shape parameter and laser power parameters of input
Data volume controls laser drive unit 24 to change laser frequency immediately, and control laser 4 is in real time according to 3 coordinate bit of kinematic system
Relation frequency conversion output is put, conversion process follows X-axis translation stage kinematic parameter always, until a layer plane machines, X-axis is put down
Moving stage movement returns origin；After computer control system 1 judges that X-axis translation stage returns origin, kinematic system control unit is instructed
22 driving Z axis translation stages 33 decline one layer of processing thickness, repeat X-axis translation stage movement frequency conversion processing drill process, control laser
621 linear frequency conversion of light beam, successively accumulation processing so that laser beam processes hole shape, last shape by archimedes curve track 623
Into set processing hole shape.
Laser drawing mould puncher using the present invention, the control method of processing hole shape 622 comprise the following steps：
After system boot, initialization is zeroed by 1 controlled motion system of computer control system, 3 coordinate, exports control command
It is returned to coding and driving unit 2, controlled motion system 3 for machining state；Manual installation mold 8 is on self-centering chuck 52；
Mold thickness and height parameter input computer control system, computer software calculate adjustment startup Z axis translation stage 33 and transport automatically
Dynamic, adjustment focusing image-forming system 6 is moved on mold 8, imaging clearly machined surface, while the coke of blur-free imaging Laser Processing is put down
Face；Start the work rotation of turntable 51, according to the axis of rotation that display 63 is shown, control adjustment X mobile stations 31 and Y mobile stations
32 so that laser spot and axis of rotation overlap；Input Laser Processing hole shape parameter, computer control system start processing journey
Sequence, laser 4 start, and laser beam 621 is focused on by amasthenic lens 61 in processing hole shape 622,8 turns of turntable driven mold
It is dynamic, while X-axis translation stage 31 moves so that laser is processed by archimedes curve track 623, completes the removal of plane；When one
After layer processes, Z axis screen moving stage 33 moves down, and laser starts to process next layer, successively accumulation processing, eventually forms set
Processing hole shape.
The laser drawing mould puncher and its drilling method of the present invention, machinable workpiece material include：It is diamond, artificial
Diamond, polycrystalline material, ceramics, glass, sapphire, ruby, metal etc..
A kind of laser drawing mould puncher provided by the invention and its linear method for controlling frequency conversion, its advantage are：It adopts
With linear method for controlling frequency conversion, the uniform removal of material is realized in laser drilling process, improves machining accuracy, without excessively plus
Work ensures hole form quality amount.Laser drawing mould puncher device structure is stable, easy to operate, precision is high, efficient, safe and reliable,
Use cost that is low in energy consumption, reducing user.
It is improved with the continuous development of manufacturing, the requirement to laser boring is also higher and higher, the control of shape, hole in hole
Circularity, the finish of inner wall all arrived micron even nano-precision requirement.Therefore traditional processing technology increasingly can not
It meets the requirements.We are improved the use of precision and distinctive linear laser processing method, are reached by the improvement to device structure
The level that traditional handicraft can not be realized is arrived.In micropore field, we realize micron-sized micropore, and inner wall finish, which reaches, to be received
Meter Shui Ping.In middle macropore field in the case of not ground, our Direct Lasers in industry realize processing inner wall frosted
The sense even processing effect of minute surface sense cause the extensive concern of industry.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, the change or replacement that can be readily occurred in,
It should be covered by the protection scope of the present invention.
Claims (7)
1. a kind of laser drawing mould puncher, it is characterised in that：Including computer control system (1), coding and driving unit
(2), kinematic system (3), laser (4), rotary system (5), focusing image-forming system (6), beam delivery system (7), mold
(8)；Kinematic system (3) includes X-axis translation stage (31), Y-axis translation stage (32), Z axis translation stage (33), and rotary system (5) includes
Turntable (51), centring tongs (52), driving motor (53), focusing image-forming system (6) include amasthenic lens (61), CCD (62),
Display (63), coding and driving unit (2) include rotation driving control unit (21), kinematic system control unit (22), sit
Mark measuring unit (23), laser drive unit (24)；Computer control system (1) respectively with coding and driving unit (2), focus on
Imaging system (6) connects, and coding and driving unit (2) are connected respectively with kinematic system (3), laser (4), rotary system (5),
Rotation driving control unit (21) connection rotary system (5), kinematic system control unit (22) connect with measurement of coordinates unit (23)
Kinematic system (3), laser drive unit (24) connecting laser (4) are connect, laser (4) is connected by beam delivery system (7)
Focusing image-forming system (6), turntable (51) are mounted on the X-axis translation stage (31) of kinematic system (3), and mold (8) passes through centering
Fixture (52) is mounted on turntable (51), corresponding installation Z axis translation stage (33) above mold (8), amasthenic lens (61) installation
On Z axis translation stage (33), kinematic system (3) further includes coordinates feedback system (311), coordinates feedback system (311) and coordinate
Measuring unit (23) connect, laser drive unit (24) control laser (4) output power, laser initial operating frequency and
Position coordinates progress data processing is transferred to computer by mold (8) circle centre position laser work frequency, measurement of coordinates unit (23)
Control system (1), computer control system (1) calculate according to the processing hole shape parameter and laser power parameters of input and become frequency
According to amount.
2. a kind of laser drawing mould puncher according to claim 1, it is characterised in that：Support platform (9) is further included, is transported
Dynamic system (3) is mounted in support platform (9), and support platform (9) uses marble support frame structure.
3. a kind of laser drawing mould puncher according to claim 1, it is characterised in that：Centring tongs (52) are used and made by oneself
Heart fixture, turntable use high-precision high-speed turntable, and micro- focusing image-forming system may be employed in focusing image-forming system.
4. a kind of laser drawing mould puncher according to claim 1, it is characterised in that：The laser that laser (4) uses
Wavelength is 1.064 μm, 10.6 μm, 0.532 micron, 0.355 micron, 0.266 micron.
5. a kind of laser drawing mould puncher according to claim 1, it is characterised in that：Laser (4) is swashed using solid
Light device, gas laser or optical fiber laser.
6. a kind of laser drawing mould puncher according to claim 1, it is characterised in that：Coordinates feedback system (311) is adopted
With grating scale, motor encoder.
7. a kind of linear method for controlling frequency conversion of laser drawing mould puncher, it is characterised in that：Specifically include following steps：User
By required processing hole shape parameter input computer control system (1), computer control system is calculated according to setup parameter and controlled
Parameter processed inputs to coding and driving unit (2), parameter include processing hole shape parameter, laser power parameters, kinematic system parameter,
Rotary system parameter；Rotation driving control unit (21) control driving motor (53) drives turntable (51) to rotate, when rotating speed is permanent
After fixed, laser drive unit (24) control laser (4) works, including control laser output power and laser initialization frequency
Rate further includes mold (8) circle centre position laser work frequency, while kinematic system control unit (22) is according to computer control system
Order-driven X-axis translation stage (31) is moved by setting speed and acceleration；Coordinates feedback system (311) measures position in moving process
Shifting amount, and give displacement coding real-time Transmission to measurement of coordinates unit (23), measurement of coordinates unit (23) is by position coordinates into line number
Computer control system (1) is transferred to according to processing, computer control system (1) is according to the processing hole shape parameter of input and laser work(
Rate parameter calculates frequency conversion data volume, and laser drive unit (24) is controlled to change laser frequency in real time, and control laser (4) is real-time
It is exported according to kinematic system (3) coordinate position relation frequency conversion, conversion process follows X-axis translation stage kinematic parameter always, until one
Layer plane machines, and the movement of X-axis translation stage returns origin；Computer control system (1) judges that X-axis translation stage returns origin
Afterwards, instruct kinematic system control unit (22) that Z axis translation stage (33) is driven to decline one layer of processing thickness, repeat X-axis translation stage and move
Dynamic frequency conversion processing drill process, the linear frequency conversion of control laser beam (621), successively accumulation processing, makes laser beam by A Ji meter
Moral curvilinear path (623) processes hole shape, eventually forms set processing hole shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610289706.3A CN106001941B (en) | 2016-05-05 | 2016-05-05 | A kind of laser drawing mould puncher and its linear method for controlling frequency conversion |
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| CN110526379B (en) * | 2019-08-26 | 2022-09-16 | 江苏大学 | A high-efficient laser cavitation device for handling dyestuff waste water |
| CN111250878B (en) * | 2020-03-30 | 2022-04-12 | 杨建峰 | Four-axis laser cutting and punching machine for machining wire-drawing die and punching method |
| CN115476058B (en) * | 2022-09-23 | 2024-06-14 | 南通海林汽车橡塑制品有限公司 | Drilling equipment for automobile rubber and plastic products |
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