CN105929529A - Mini scanner with floating scanning plate and laser projecting device employing same - Google Patents
Mini scanner with floating scanning plate and laser projecting device employing same Download PDFInfo
- Publication number
- CN105929529A CN105929529A CN201610519125.4A CN201610519125A CN105929529A CN 105929529 A CN105929529 A CN 105929529A CN 201610519125 A CN201610519125 A CN 201610519125A CN 105929529 A CN105929529 A CN 105929529A
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- magnet
- cavity
- miniscanning instrument
- scanning board
- magnetic field
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/142—Adjusting of projection optics
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
A mini scanner with a floating scanning plate and a laser projecting device employing same are disclosed. The mini scanner (10) comprises a scanning plate (22) and a field magnet (42) for generating a nonuniform magnetic field (41). The nonuniform magnetic field (41) interacts with a magnet (36) installed on the scanning plate (22), so that a stable balancing position (45) of the scanning plate (22) is formed in a cavity (15) of a substrate (12). A laser emission module (104) emits a laser beam (121) entering into the scanning plate (22), a scanning driving module (106) generates a variable magnetic field (127), and the variable magnetic field (127) causes a variable induction current in an enclosed circuit coil (34) installed on the scanning plate (22). The variable induction current interacts with the nonuniform magnetic field (41) to generate a variable torque acting on the scanning plate (22), so as to drive the scanning plate (22) to sequentially reflect the incident laser beams (121) through a light grid format.
Description
Technical field
The present invention relates to a kind of miniscanning instrument, particularly relate to a kind of by MEMS (MEMS) drive micro-
Type scanner and comprise the laser projection device of this type of miniscanning instrument.
Background technology
Miniscanning instrument or miniscanning reflecting mirror be for dynamic optical modulation Micro-Opto-Electro-Mechanical Systems (MOEMS,
Micro-Opto-Electro-Mechanical System).Type based on miniscanning instrument, the regulation fortune of single mirror
Dynamic can be the translational motion for realizing travel(l)ing phase, can be maybe realize light beam steering and around an axle or two axles
Vibration.
Miniscanning instrument reflecting mirror can be driven by modes such as thermoelectricity, electrostatic, piezoelectricity and electromagnetism.But, thermoelectricity
Formula drives and is appropriate only for the quasi-static scanning of low frequency, and electrostatic, piezoelectricity and electromagnetic type drive and be suitable for low frequency and altofrequency
Scanning.Magnetic drives and may be used for driving one-dimensional or two-dimentional MEMS scanning reflection mirror, and no matter in static state
With under dynamic operation, there is between angle of inclination and the signal amplitude applied good linear relationship.By magnetic drive
MEMS scanner another feature is that voltage is low and power consumption is little.
Using the dual-axis miniature scanner indirectly driven to generally include one scan reflector plate, this scanning reflection runner plate leads to
Cross the rotary shaft formed by two internal torque arm to be connected with a balance ring.This balance ring is by being perpendicular to internal torque arm
Another rotary shaft that outside two, torque arm is formed is connected with a substrate.Balance ring and scanning reflection runner plate have different being total to
Vibration frequency.When driving miniscanning instrument, balance around the shaft vibration limited by outside torque arm or inclination, and reflect
Runner plate with different frequency vibrations or inclination, thus realizes high frequency row interscan and low around the axle limited by internal torque arm
Frequency column scan line by line.
In order to obtain high-resolution video-projection, it is favourable that miniscanning instrument has high rate of scanning.Miniature sweep
Retouch instrument there is high scan angles to be also advantageous.Drive it is desirable that miniscanning instrument can bear in altofrequency and big amplitude
Work under dynamic state.Similarly, it is generally desirable to, miniscanning instrument can accurately projecting beam.
Summary of the invention
It is an object of the invention to provide a kind of miniscanning instrument.This miniscanning instrument can be at high rate of scanning with big
Work under amplitude driving state.It addition, miniscanning instrument of the present invention can projecting beam exactly, thus obtain
High-resolution drop shadow effect.Additionally, the applied range of miniscanning instrument of the present invention, such as, it can be made
For the scanning reflection mirror in high-resolution widescreen projection device, the most such as, it can be as in high-resolution optical sensor
Scanner.
In order to realize foregoing invention purpose, the invention provides a kind of miniscanning instrument, comprising: a substrate, its tool
There is the cavity that a first type surface and is formed in first type surface；One scan plate, it is positioned at the cavity of described substrate and has base
Originally a first surface of the first type surface of described substrate and a second surface relative with first surface it are parallel to；One magnet, its
It is loaded on described scanning board；And a field magnet, it is adjacent to described substrate, and this field magnet is arranged in described substrate
Cavity in produce a non-uniform magnetic field, this non-uniform magnetic field and described magnet interact, and think that described scanning board is in institute
An equilbrium position is formed in stating the cavity of substrate.
Further, described miniscanning instrument of the present invention also includes the first surface being arranged at described scanning board
On a reflecting mirror.
Further, in miniscanning instrument of the present invention, described reflecting mirror includes being deposited on described scanning
A platinum layer on the first surface of plate.
Further, miniscanning instrument of the present invention also includes the Guan Bi electricity being arranged on described scanning board
Map.
Further, in miniscanning instrument of the present invention, described Guan Bi circuit coil surrounds described magnet.
Further, in miniscanning instrument of the present invention, it is arranged on the first surface of described scanning board
Described Guan Bi circuit coil surround described reflecting mirror.
Further, in miniscanning instrument of the present invention, described Guan Bi circuit coil be arranged at described in sweep
Retouch on the second surface of plate.
Further, in miniscanning instrument of the present invention, described magnet is arranged at the institute of described scanning board
State on first surface and surround described reflecting mirror.
Further, in miniscanning instrument of the present invention, described magnet is arranged at the of described scanning board
On two surfaces.
Further, in miniscanning instrument of the present invention, the cavity in the first type surface of described substrate includes
Being positioned at a described intrabasement through hole, this through hole has the sidewall surrounding described scanning board.
Further, in miniscanning instrument of the present invention, the cavity in the first type surface of described substrate includes
Be positioned at a described intrabasement depression, this depression have surround a sidewall of described scanning board and be connected with sidewall one bottom.
Further, miniscanning instrument of the present invention also includes being formed at the bottom of the cavity of described substrate
One pedestal, and this pedestal has the one end contacted with described scanning board.
Further, in miniscanning instrument of the present invention, described magnet includes a toroidal magnet.
Further, in miniscanning instrument of the present invention, described magnet includes some along described scanning board
The magnet of the one discrete setting of girth.
Further, in miniscanning instrument of the present invention, described magnet is arranged to produce a magnetic field, should
Magnetic field has a direction of the first type surface being basically perpendicular to described substrate in described magnet；And produced by described field magnet
The non-uniform magnetic field of the cavity being positioned at described substrate have the first type surface being perpendicular to described substrate one first component and
It is parallel to a second component of the first type surface of described substrate.
Further, in miniscanning instrument of the present invention, what described field magnet produced it is positioned at described base
The direction of the first component of the non-uniform magnetic field in the cavity at the end and the magnetic field side produced in described magnet by described magnet
To identical；And the first component being positioned at the non-uniform magnetic field of the cavity of described substrate reaches in a position of cavity
One maximum intensity.
Further, in miniscanning instrument of the present invention, what described field magnet produced it is positioned at described base
The direction of the first component of the non-uniform magnetic field in the cavity at the end and the magnetic field side produced in described magnet by described magnet
To on the contrary；And the first component being positioned at the non-uniform magnetic field of the cavity of described substrate reaches in a position of cavity
One minimum strength.
Further, in miniscanning instrument of the present invention, what described field magnet produced it is positioned at described substrate
Cavity in non-uniform magnetic field there is one first component of the first type surface being perpendicular to described substrate and be parallel to described substrate
A second component of first type surface.
Further, in miniscanning instrument of the present invention, a magnetic north pole of described field magnet is than described
One south magnetic pole of magnet is closer to a magnetic north pole of described magnet；One south magnetic pole of described field magnet is than the magnetic of described magnet
The arctic is closer to the south magnetic pole of described magnet；And be positioned at the cavity of the first type surface of described substrate non-uniform magnetic field
One component position in cavity reaches a minimum strength.
Further, in miniscanning instrument of the present invention, a magnetic north pole of described field magnet is than described
One magnetic north pole of magnet is closer to a south magnetic pole of described magnet；One south magnetic pole of described field magnet is than the magnetic of described magnet
The South Pole is closer to the magnetic north pole of described magnet；And be positioned at the cavity of the first type surface of described substrate non-uniform magnetic field
One component position in cavity reaches a maximum intensity.
Another object of the present invention is to provide a kind of laser projection device.This laser projection device can scan at height
Work under frequency and big amplitude driving condition.Additionally, the projection obtained by laser projection device of the present invention as
Resolution is high and imaging effect is good.
In order to reach foregoing invention purpose, it is desirable to provide a kind of laser projection device, comprising: one is miniature
Scanner；One video signal preprocessor, it has one first output for exporting a digital pixel color and strength signal
Mouth and one second delivery outlet for output one digital pixel scanning signal；One laser emitting module, it is believed with described video
First delivery outlet coupling of number processor, and this laser emitting module is arranged to launch and incides described miniscanning instrument
A continuous-wave laser beam on described scanning board；And one scan drives module, its with described video signal preprocessor the
Two delivery outlets couple, and this turntable driving module is arranged to around the described scanning board of described miniscanning instrument produce one
The magnetic field of change, the non-uniform magnetic field generating a magnetic dipole changed and described field magnet with sensing interacts, thus
Produce the moment of the change acted on the described scanning board of described miniscanning instrument.Specifically, this miniscanning instrument bag
Including a substrate, it has a cavity being formed within；One scan plate, it has a major surfaces, and this scanning board position
In the cavity of described substrate；One magnet, it is loaded on described scanning board；And a field magnet, it is adjacent to described substrate,
And this field magnet is arranged to produce a non-uniform magnetic field, this non-uniform magnetic field interacts with described magnet, thinks described
Scanning board forms an equilbrium position in the cavity of described substrate, and wherein, the described scanning board of described miniscanning instrument is set
It is set to respond the moment of the change acted on described scanning board, thus sequentially reflects described Laser emission with a raster format
The laser beam of module.
Further, in laser projection device of the present invention, described miniscanning instrument also includes being arranged at institute
Stating the Guan Bi circuit coil on scanning board, wherein, described turntable driving module the magnetic field of the change produced is closed described
Close sensing in circuit coil and generate the faradic current of a change, thus produce the magnetic dipole of change.
Further, in laser projection device of the present invention, it is loaded on the described scanning of described miniscanning instrument
The described magnet of plate includes a toroidal magnet.
Further, in laser projection device of the present invention, it is loaded on the described scanning of described miniscanning instrument
The described magnet of plate includes the magnet of some discrete settings of girth along described scanning board.
Further, in laser projection device of the present invention, it is loaded on the described scanning of described miniscanning instrument
The described magnet of plate produces the magnetic field being basically perpendicular to described scanning board in described magnet；And by described miniscanning
Described in the non-uniform magnetic field that the described field magnet of instrument produces has one first component being perpendicular to described scanning board and is parallel to
One second component of scanning board.
Further, in laser projection device of the present invention, by the described field magnetic of described miniscanning instrument
The direction of the first component of the non-uniform magnetic field that body produces and the magnetic direction phase produced in described magnet by described magnet
With；And the first component being positioned at the non-uniform magnetic field of the cavity of described substrate reaches one in a position of cavity
Big intensity.
Further, in laser projection device of the present invention, by the described field magnetic of described miniscanning instrument
The direction of the first component of the non-uniform magnetic field that body produces and the magnetic direction phase produced in described magnet by described magnet
Instead；And the first component being positioned at the non-uniform magnetic field of the cavity of described substrate reaches one in a position of cavity
Small intensity.
Further, in laser projection device of the present invention, by the described field magnet of described miniscanning instrument
The non-uniform magnetic field of the cavity being positioned at described substrate produced has the one first component peace being perpendicular to described scanning board
Row is in a second component of described scanning board.
Further, in laser projection device of the present invention, the described field magnet of described miniscanning instrument
A magnetic north pole than a south magnetic pole of described magnet closer to a magnetic north pole of described magnet；The institute of described miniscanning instrument
State a south magnetic pole of field magnet than the magnetic north pole of described magnet closer to the south magnetic pole of described magnet；And it is positioned at described
First component of the non-uniform magnetic field in the cavity of the described substrate of miniscanning instrument is reaching close to the position in cavity
To a minimum strength.
Further, in laser projection device of the present invention, the described field magnet of described miniscanning instrument
A magnetic north pole than a magnetic north pole of described magnet closer to a south magnetic pole of described magnet；The institute of described miniscanning instrument
State a south magnetic pole of field magnet than the south magnetic pole of described magnet closer to the magnetic north pole of described magnet；And it is positioned at described micro-
First component of the non-uniform magnetic field in the cavity of the described substrate of a type scanner position in cavity reaches one
Big intensity.
Further, in laser projection device of the present invention, described laser emitting module includes: a laser
Driver, it couples with the first delivery outlet of described video signal preprocessor, and this laser driver is arranged to produce one
Analog drive signal；And a laser module, it couples with described laser driver, and this laser module is arranged to loud
Answer analog drive signal to launch continuous-wave laser beam.
Further, in laser projection device of the present invention, described laser module includes: some laser
Pipe, it couples with described laser driver, and this laser tube is arranged to response simulation and drives signal to produce some laser
Bundle；And an optical element, it is arranged to combine described some laser beams and incides described miniscanning instrument to produce
Continuous-wave laser beam on described scanning board.
Further, in laser projection device of the present invention, described turntable driving module includes: one scan
Driver, it couples with the second delivery outlet of described video signal preprocessor, and this scanner driver is arranged to produce one
Analog current signal；And one scan induction coil, it couples with described scanner driver, and this scanning induction coil is arranged
Around described miniscanning instrument, and this scanning induction coil is arranged to respond the analog current of described scanner driver
Signal is to produce the magnetic field of change around the described scanning board of described miniscanning instrument.
Further, in laser projection device of the present invention, the described scanning board of described miniscanning instrument
Have around one first resonant frequency of one first shaft vibration and one first amplification coefficient and around being perpendicular to the one of the first axle
One second resonant frequency of two shaft vibrations and one second amplification coefficient, the second resonant frequency is different from the first resonant frequency；And
And the analog current signal produced by described scanner driver has and the first resonant frequency occurs a first frequency of resonance
Component and the second frequency component with the second resonant frequency generation resonance.
Further, in laser projection device of the present invention, the described scanning board of described miniscanning instrument
It is arranged to reflect the described laser beam of described laser emitting module, responds described scanning board under the first resonant frequency around
The vibration of one axle, sequentially to produce some pixels in a pixel column, and respond described scanning board at the second resonant frequency
Under around the vibration of the second axle, sequentially to produce some pixel columns.
Accompanying drawing explanation
Fig. 1 and Fig. 2 respectively schematically show the axonometric chart of a miniscanning instrument according to an embodiment of the invention
And top view.
Fig. 3 and Fig. 4 show schematically show miniscanning instrument according to two preferred embodiments of the present invention along Fig. 1 and
The sectional view of A-A cross section in Fig. 2.
Fig. 5 A, 5B, 5C and 5D show schematically show in different embodiments of the invention in a miniscanning instrument
A field magnet and the magnet being loaded on one scan plate between relation.
Fig. 6 show schematically show the sectional view of a miniscanning instrument according to an embodiment of the invention.
Fig. 7 A, 7B, 7C, 7D and 7E show schematically show and be arranged at one scan in different embodiments of the invention
A magnet on plate and a coil.
Fig. 8 show schematically show a laser projection device according to an embodiment of the invention.
Detailed description of the invention
Illustrate different embodiments of the invention below with reference to accompanying drawings.Analog structure or there is similar functions in each figure
Element can represent with identical reference.It should be noted that accompanying drawing is intended to be easy to illustrate the preferred embodiments of the present invention.
They are not intended as describing the present invention comprehensively and carry out detailed description, or limit the scope of the present invention.It addition, accompanying drawing differing
Fixed drawn to scale according to actual size.Moreover, it will be understood that such as top, bottom, upper and lower, left and right,
The words such as forward and backward, vertical, level are the different elements in order to be easy to describe the present invention referring to the drawings.They are not intended as
Spatial relationship between direction or each element of elements different in the present invention has been limited.In addition, if in the present invention
Description and claims in occur the word such as " basic " or " basically ", then it represents that the numerical value clear and definite with one or unitary
Small change or deviation is there is between the state of element, but, this change or deviation do not interfere with function or the product of element
The raw feature changing element.
The invention provides a kind of miniscanning instrument, it is capable of the scanning of altofrequency, high-resolution, wide-angle.
A miniscanning instrument according to the present invention has a wide range of applications field.Such as, the miniscanning instrument according to the present invention can
Using as the one scan reflecting mirror in a high-resolution projection arrangement, it is used for deflecting a laser beam with a raster format.Again
Such as, the miniscanning instrument according to the present invention can be as the scanner in a high-resolution optical sensor.
Fig. 1, Fig. 2, Fig. 3 and Fig. 4 are that a description miniscanning instrument 10 according to an embodiment of the invention is in difference
Schematic diagram under visual angle.Being illustrated by embodiment, miniscanning instrument 10 passes through semiconductor fabrication process at semiconductor
Make on wafer.Such as, this wafer can be silicon body (Bulk Silicon) wafer or the crystalline substance of the silicon (SOI) at the insulation end
Sheet.Fig. 1 to Fig. 4 shows a part for the semiconductor wafer as semiconductor substrate 12.One cavity 15 is formed at
In one top main surfaces 11 of substrate 12.According to an embodiment, cavity 15 is in a through hole of substrate 12, and this leads to
Hole has a sidewall 14 as shown in Figure 3.According to another embodiment, cavity 15 is in a depression or of substrate 12
Groove, this depression or groove have a sidewall 14 as shown in Figure 4 and be connected with sidewall 14 one bottom 16.
One scan plate 22 is positioned at cavity 15, and is surrounded by sidewall 14.According to one preferred embodiment of the present invention, sweep
Retouching plate 22 uses the semi-conducting material identical with substrate 12 to make.One reflecting mirror 32 is arranged at an end face of scanning board 22
21.According to one preferred embodiment of the present invention, reflecting mirror 32 includes that the platinum being deposited on the end face 21 of scanning board 22 is anti-
Penetrate face.One Guan Bi circuit coil 34 is arranged at the end face 21 of scanning board 22 and surrounds reflecting mirror 32.According to the present invention's
One preferred embodiment, coil 34 include having a Guan Bi circuit of a conductive material (such as, gold, copper or aluminum etc.) around
Group.
Miniscanning instrument 10 also includes the magnet 36 being arranged at a bottom surface 29 of scanning board 22.According to the present invention
Different embodiments, magnet 36 can include a toroidal magnet the most conformal with the girth of scanning board 22, or some edges
The magnet of the discrete setting of girth of scanning board 22.Magnet 36 can also include one or more basic covering scanning board 22
The magnet in whole region of bottom surface 29.Preferably, magnet 36 produces the end face 21 with scanning board 22 in magnet 36
A substantially vertical magnetic field 37.According to a preferred embodiment, magnet 36 is oriented to its magnetic north pole and is positioned at upper end close to scanning
The bottom surface 29 of plate 22, and its south magnetic pole is positioned at lower end away from scanning board 22.Therefore, as fig. 5 a and fig. 5b,
The direction, magnetic field 37 that magnet 36 produces in magnet 36 is upwards.According to another preferred embodiment, magnet 36 is oriented to it
South magnetic pole is positioned at the bottom surface 29 close to scanning board 22, the upper end, and its magnetic north pole is positioned at lower end away from scanning board 22.Therefore,
As shown in Fig. 5 C and Fig. 5 D, the direction in the magnetic field 37 that magnet 36 produces in magnet 36 is downward.
Miniscanning instrument 10 also includes one or more field magnet 42 being adjacent to substrate 12.Field magnet 42 is permissible
Be arranged on substrate 12, under and/or around.Field magnet 42 produces a magnetic field 41 in cavity 15.Magnetic field 41
Round scanning board 22.Magnetic field 41 has a vertical component of the first type surface 11 being perpendicular to substrate 12 and is parallel to substrate
One horizontal component of the first type surface 11 of 12.
According to the preferred embodiment shown in Fig. 5 A, magnet 36 internal magnetic field 37 direction upwards, and magnetic field 41
Vertical component direction in cavity 15 downward.One magnetic north pole of field magnet 42 compared to magnet 36 south magnetic pole more
Close to its magnetic north pole.Similarly, a south magnetic pole of field magnet 42 compared to the magnetic north pole of magnet 36 closer to its south magnetic pole.
The magnetic field 41 being positioned at cavity 15 is heterogeneous.Especially, when moving up and down the position 45 left as shown in Figure 5A
Time, the vertical component intensity in magnetic field 41 increases.It is to say, compare to immediate vicinity in the cavity 15 of substrate 12
One position of 45, the intensity of a position of a segment distance is more on or below position 45 for the vertical component in magnetic field 41
Greatly.The vertical component of cavity 15 internal magnetic field 41 reaches a minimum strength at position 45.
The component downward vertically in magnetic field 41 to the magnetic north pole of magnet 36 and south magnetic pole apply respectively a down force and
One upwards active force.It is flat that the spatial heterogeneity of the vertical component in magnetic field 41 is that scanning board 22 forms one at position 45
Weighing apparatus position, in this position, the vertical component in magnetic field 41 applies one zero magnetic on magnet 36 and makes a concerted effort.When scanning board 22 to
During upper deviation position 45, compare to its south magnetic pole, the vertical component in magnetic field 41 magnetic force at the magnetic north pole of magnet 36
Bigger.Therefore, the component downward vertically in magnetic field 41 applies one to magnet 36 and makes a concerted effort downwards, pushes down on towards position 45
Scanning board 22.When scanning board 22 is deflected downwardly position 45, comparing to its south magnetic pole, the vertical component in magnetic field 41 exists
Magnetic force at the magnetic north pole of magnet 36 is less.Therefore, the component downward vertically in magnetic field 41 applies one upwards to magnet 36
Make a concerted effort, towards upwardly scanning board 22, position 45.Thus, in fig. 5, position 45 is in magnetic field 41
One stable equilibrium position of scanning board 22.
According to another preferred embodiment shown in Fig. 5 B, the direction of magnet 36 internal magnetic field 37 upwards, and magnetic field 41
Vertical component direction in cavity 15 upwards.One south magnetic pole of field magnet 42 compared to magnet 36 south magnetic pole more
Close to its magnetic north pole.Similarly, a magnetic north pole of field magnet 42 compared to the magnetic north pole of magnet 36 closer to its south magnetic pole.
The magnetic field 41 being positioned at cavity 15 is heterogeneous.Especially, when moving up and down the position 45 left as shown in Figure 5 B
Time, the vertical component intensity in magnetic field 41 reduces.It is to say, compare to immediate vicinity in the cavity 15 of substrate 12
One position of 45, the intensity of a position of a segment distance is more on or below position 45 for the vertical component in magnetic field 41
Little.The vertical component of cavity 15 internal magnetic field 41 reaches a maximum intensity at position 45.
The upwards vertical component in magnetic field 41 to the magnetic north pole of magnet 36 and south magnetic pole apply respectively one upwards active force and
One down force.It is flat that the spatial heterogeneity of the vertical component in magnetic field 41 is that scanning board 22 forms one at position 45
Weighing apparatus position, in this position, the vertical component in magnetic field 41 applies one zero magnetic on magnet 36 and makes a concerted effort.When scanning board 22 to
During upper deviation position 45, compare to its south magnetic pole, the vertical component in magnetic field 41 magnetic force at the magnetic north pole of magnet 36
Less.Therefore, the upwards vertical component in magnetic field 41 applies one to magnet 36 and makes a concerted effort downwards, pushes down on towards position 45
Scanning board 22.When scanning board 22 is deflected downwardly position 45, comparing to its south magnetic pole, the vertical component in magnetic field 41 exists
Magnetic force at the magnetic north pole of magnet 36 is bigger.Therefore, the upwards vertical component in magnetic field 41 applies one upwards to magnet 36
Make a concerted effort, towards upwardly scanning board 22, position 45.Thus, in figure 5b, position 45 is in magnetic field 41
One stable equilibrium position of scanning board 22.
According to the another preferred embodiment shown in Fig. 5 C, the direction of magnet 36 internal magnetic field 37 is downward, and magnetic field 41
Vertical component direction in cavity 15 downward.The magnetic north pole of field magnet 42 more connects compared to the magnetic north pole of magnet 36
Its south magnetic pole nearly.Similarly, the south magnetic pole of field magnet 42 compared to the south magnetic pole of magnet 36 closer to its magnetic north pole.Position
Magnetic field 41 in cavity 15 is heterogeneous.Especially, when moving up and down the position 45 left as shown in Figure 5 C
Time, the vertical component intensity in magnetic field 41 reduces.It is to say, compare to immediate vicinity in the cavity 15 of substrate 12
One position of 45, the intensity of a position of a segment distance is more on or below position 45 for the vertical component in magnetic field 41
Little.The vertical component of cavity 15 internal magnetic field 41 reaches a maximum intensity at position 45.
The component downward vertically in magnetic field 41 to the south magnetic pole of magnet 36 and magnetic north pole apply respectively one upwards active force and
One down force.It is flat that the spatial heterogeneity of the vertical component in magnetic field 41 is that scanning board 22 forms one at position 45
Weighing apparatus position, in this position, the vertical component in magnetic field 41 applies one zero magnetic on magnet 36 and makes a concerted effort.When scanning board 22 to
During upper deviation position 45, compare to its magnetic north pole, the vertical component in magnetic field 41 magnetic force at the south magnetic pole of magnet 36
Less.Therefore, the component downward vertically in magnetic field 41 applies one to magnet 36 and makes a concerted effort downwards, pushes down on towards position 45
Scanning board 22.When scanning board 22 is deflected downwardly position 45, comparing to its magnetic north pole, the vertical component in magnetic field 41 exists
Magnetic force at the south magnetic pole of magnet 36 is bigger.Therefore, the component downward vertically in magnetic field 41 applies one upwards to magnet 36
Make a concerted effort, towards upwardly scanning board 22, position 45.Thus, in figure 5 c, position 45 is in magnetic field 41
One stable equilbrium position of scanning board 22.
According to the other preferred embodiment shown in Fig. 5 D, the direction of magnet 36 internal magnetic field 37 is downward, and magnetic field
The vertical component of 41 direction in cavity 15 is upwards.One south magnetic pole of field magnet 42 is compared to the magnetic north pole of magnet 36
Closer to its south magnetic pole.Similarly, a magnetic north pole of field magnet 42 compared to the south magnetic pole of magnet 36 closer to its magnetic north
Pole.The magnetic field 41 being positioned at cavity 15 is heterogeneous.Especially, when moving up and down the position left as shown in Figure 5 D
When putting 45, the vertical component intensity in magnetic field 41 increases.It is to say, compare to be close in the cavity 15 of substrate 12
One position of position 45, the vertical component in magnetic field 41 position of a segment distance strong on or below position 45
Spend bigger.The vertical component of cavity 15 internal magnetic field 41 reaches a minimum strength at position 45.
The upwards vertical component in magnetic field 41 to the south magnetic pole of magnet 36 and magnetic north pole apply respectively a down force and
One upwards active force.It is flat that the spatial heterogeneity of the vertical component in magnetic field 41 is that scanning board 22 forms one at position 45
Weighing apparatus position, in this position, the vertical component in magnetic field 41 applies one zero magnetic on magnet 36 and makes a concerted effort.When scanning board 22 to
During upper deviation position 45, compare to its magnetic north pole, the vertical component in magnetic field 41 magnetic force at the south magnetic pole of magnet 36
Bigger.Therefore, the upwards vertical component in magnetic field 41 applies one to magnet 36 and makes a concerted effort downwards, pushes down on towards position 45
Scanning board 22.When scanning board 22 is deflected downwardly position 45, comparing to its magnetic north pole, the vertical component in magnetic field 41 exists
Magnetic force at the south magnetic pole of magnet 36 is less.Therefore, the upwards vertical component in magnetic field 41 applies one upwards to magnet 36
Make a concerted effort, towards upwardly scanning board 22, position 45.Thus, in figure 5d, position 45 is in magnetic field 41
One stable equilibrium position of scanning board 22.
According to the present invention above with reference to described in Fig. 5 A, 5B, 5C and 5D, magnet 36 and be arranged at substrate 12
The interaction between field magnet 42 around cavity 15 is that scanning board 22 defines stable equilibrium position 45.In this position
Putting place, the magnetic force that magnetic field 41 acts on the magnetic north pole of magnet 36 and south magnetic pole is equal in magnitude and in opposite direction, so that
Acting on the total magnetic force on magnet 36 is zero.When scanning board 22 is along upwardly or downwardly deviation position 45, by
The magnetic field 41 that field magnet 42 produces applies to make a concerted effort along one of the direction towards position 45 to magnet 36, thus promotes and sweep
Retouch plate 22 and return to position 45.Therefore, scanning board 22 can be at the stable equilibrium position 45 in the cavity 15 of substrate 12
Place is suspended in magnetic field 41, and without with substrate 12 physical contact or mechanical connection.
Fig. 6 is the schematic diagram of a miniscanning instrument 10 in display according to another preferred embodiment of the invention.Miniature sweep
Retouch instrument 10 to be structurally similar with miniscanning instrument 10 mentioned above.The base portion of cavity 15 or bottom in substrate 12
On 16, formed and there is one end or a pedestal 64 of most advanced and sophisticated 66.End or most advanced and sophisticated 66 is being located on or near scanning board 22
Center position contact with the bottom surface 29 of scanning board 22.In a scanning operation, scanning board 22 can be around pedestal 64
Tip 66 tilt.According to a preferred embodiment of the invention, the magnetic that magnetic field 41 acts on magnet 36 is the most close
In zero but be not zero, and its direction is downward, thus promotes scanning board 22 to prop up pedestal 64 slightly.It is to say, such as
The upper equilbrium position 45 with reference to the scanning board 22 described in Fig. 5 A, 5B, 5C and 5D slightly below being supported on shown in Fig. 6
The position of the scanning board 22 on pedestal 64.This small down thrust guarantees scanning board 22 and is formed at the chamber of substrate 12
Physical contact between the tip 66 of the pedestal 64 of the bottom 16 of body 15, and it is steady to create one for miniscanning instrument 10
Fixed mode of operation.
Fig. 7 A, 7B, 7C, 7D and 7E show and close circuit coil 34 according to the present invention and magnet 36 is positioned at and sweeps
Retouch the different optional set-up mode on plate 22.As shown in figures 7 a and 7b, coil 34 and magnet 36 are respectively provided with
On the end face 21 of scanning board 22, and surround reflecting mirror 32.Wherein the coil 34 in an embodiment surround or round
Magnet 36, and the coil 34 in another embodiment is positioned at the inside of scanning board 22 relative to magnet 36.Such as Fig. 7 C and
Shown in Fig. 7 D, coil 34 and magnet 36 may be contained within the bottom surface 29 of scanning board 22.The wherein magnetic in an embodiment
Body 36 is positioned at the inside of scanning board 22 relative to coil 34, and the magnet 36 in another embodiment surrounds or round line
Circle 34.As seen in figure 7e, coil 34 is arranged on the bottom surface 29 of scanning board 22, and magnet 36 is arranged at scanning board
On the end face 21 of 22 and surround reflecting mirror 32.
A Guan Bi circuit coil with multiturn is included above with reference to the Guan Bi circuit coil 34 described in accompanying drawing.According to
The present invention, coil 34 can include a Guan Bi circuit coil or some Guan Bi circuit coils, each coil have a circle or
The multiturn number of turns.In coil 34 includes the embodiment of more than one Guan Bi circuit coil, different coils can be arranged
Various location at scanning board 22.
The shape of scanning board 22, quality and Mass Distribution determine its dynamic performance.According to the present invention one is preferred
Embodiment, scanning board 22 has around one first axle, and such as one is parallel to the axle of the line A-A shown in Fig. 2, vibrates or inclines
One first oblique resonant frequency and one first amplification coefficient (amplification coefficient can also be referred to as the amplification factor or amplification because of
Number), and around one second shaft vibration being perpendicular to the first axle or one second resonant frequency of inclination and one second amplification system
Number.By selecting suitable shape, quality and Mass Distribution and the distribution in magnetic field 41 of scanning board 22, can be on a large scale
Resonant frequency around two shaft vibrations and amplification coefficient are set.According to the present invention, scanning board 22 can include flank, dash forward
Go out portion, groove and notch (not shown in accompanying drawing) to regulate the Mass Distribution of scanning board 22.According to the present invention one
Preferred embodiment, the first resonant frequency around the first shaft vibration is significantly higher than around the second shaft vibration being perpendicular to the first axle
Second resonant frequency.
According to the present invention, miniscanning instrument 10 as above can be applied and be manufactured in semiconductor micro electromechanical system
(MEMS) manufacturing process manufacture.Manufacture process can include photoetching (photolithography), etching (etching),
Doping (doping), inject (inplantation), diffusion (diffusion), deposition (deposition), sputtering (sputtering),
Plating (plating), chemistry and mechanical polishing (chemical and mechanical polishing), bonding (bonding)
With techniques such as weldings (fusion).According to the present invention, Guan Bi circuit coil 34 uses gold, copper, aluminum, nickel or aforementioned material
The combination in any of material is made.Preferably, magnet 36 and field magnet 42 are made up of ferromagnet and/or ferrimagnetic material.
According to a preferred embodiment, in the manufacture process of miniscanning instrument 10, scanning board 22 is by one or many
Individual thin thin rod member (not shown in accompanying drawing) and substrate 12 physical connection.In the fabrication process, scanning board 22 and substrate
Scanning board 22 is maintained in cavity 15 by the physical connection between 12.After field magnet 42 is mounted to substrate 12,
It produces magnetic field 41 in cavity 15, and magnet 36 is suspended in magnetic field 41.Scanning board 22 can be located on or near
It is suspended at equilbrium position 45 in cavity 15.Very brief and fierce air-flow can be used to disconnect scanning board 22 and substrate 12
Between physical connection, and in cavity 15, eliminate the residual substance that disconnects.
When miniscanning instrument 10 does not works or is not in scan operation, the end face 21 of scanning board 22 is the most parallel
First type surface 11 in substrate 12.Similarly, the bottom surface 29 of scanning board 22 is preferably substantially parallel to the master meter of substrate 12
Face 11.In one scan operation as described below, scanning board 22 vibrates.Scanning board 22 is relative to the master meter of substrate 12
The direction in face 11 changes over time.
Fig. 8 is the schematic diagram describing a laser projection device 100 according to an embodiment of the invention.Laser projection fills
Put 100 and include a miniscanning instrument 110.Miniscanning instrument 110 is arranged to reflect a laser of a laser module 122
Bundle 121, thus produce a reflection laser beam 123 with a raster format.Projection arrangement 100 also includes being positioned at reflection laser
Restraint the image-forming module 126 on 123 optical paths.For example, miniscanning instrument 10 as above can be thrown as laser
Miniscanning instrument 110 in image device 100.Therefore, in the following description to laser projection device 100, it is possible to
Need to be with reference to the above-mentioned relevant drawings that miniscanning instrument 10 is described.
Laser projection device 100 includes a video signal preprocessor 102, and its reception comes from a video signal source (not
Be illustrated in Fig. 8) a digital video signal 101.For example, digital video signal 101 comprises a such as video
The information such as the color of each pixel, brightness and position in image.Video signal preprocessor 102 processes video signal 101,
To produce a digital laser driving signal 103 and digital scan driving signal 107.Digital laser drives signal 103 to wrap
Containing the color of a pixel in video image and monochrome information, this signal can also be referred to as a pixel color and luminance signal.
Digital scan drives signal 107 to comprise the information relating to location of pixels, and this signal can also be by for a picture element scan signal.
Laser projection device 100 also includes a laser emitting module 104.Laser emitting module 104 includes a laser
Driver 112 and a laser module 122.Laser driver 112 have couple with video signal preprocessor 102 with receive
Digital laser drives an input port of signal 103 and the delivery outlet coupled with laser module 122.Response Laser Driven letter
Numbers 103, laser driver 112 produces an analog drive signal to drive the laser tube in laser module 122.According to
One preferred embodiment, laser module 122 includes a red laser pipe, a green laser pipe and a blue laser pipe.
According to another preferred embodiment, laser module 122 includes a red laser pipe, two green laser pipes and a blueness
Laser tube.According to another preferred embodiment, laser module 122 include two red laser pipes, two green laser pipes and
A piece blue laser pipe.According to the present invention, the laser tube in laser module 122 receives the simulation of laser driver 112
Drive signal, and launch the laser beam of respective strengths according to analog-driven information.It addition, laser module 122 includes optics
Element, such as, some laser beam combination are become a single combination to swash with reflecting mirror (not shown in Fig. 8) by lens
Light beam 121, the pixel in the color of this laser beam video image corresponding with monochrome information.
Laser projection device 100 also includes that one scan drives module 106.Turntable driving module 106 includes and video
Signal processor 102 couples to receive digital scan and drives the scan driver 114 of signal 107.Turntable driving module
106 also include that the one scan induction coil 124 coupled with scanner driver 114 (can also be referred to as scanning signal sense
Answer coil 124).Scanning induction coil 124 is arranged on the substrate 12 of miniscanning instrument 110 around.Response is by video
The scanning drive signal 107 that signal processor 102 produces, scanner driver 114 produces and sends to scanning induction coil 104
An analog current signal.According to a preferred embodiment of the invention, the analog current signal of scanner driver 114 includes
At least two frequency component.Wherein a frequency component is preferably total to around the first of the first shaft vibration or inclination with scanning board 22
Vibration frequency produce resonance, another frequency component preferably with scanning board 22 around being perpendicular to the second shaft vibration of the first axle or inclining
The second oblique resonant frequency produces resonance.
Scanning induction of signal coil 124 is adjacent to miniscanning instrument 110.When an analog current signal is sent to scanning
During induction of signal coil 124, around the scanning induction of signal coil 124 scanning board 22 in cavity 15, generation one becomes
The magnetic field 125 changed.The magnetic field 125 of change produces a change in the Guan Bi circuit coil 34 being arranged on scanning board 22
Faradic current.The faradic current of the change in coil 34 produces the magnetic dipole of a change, the magnetic dipole of this change
Son interacts with the magnetic field 41 of field magnet 42, to produce an oscillatory torque on scanning board 22.According to the present invention's
One preferred embodiment, oscillatory torque is mainly by the horizontal component in the magnetic field 41 of the first type surface 11 being parallel to substrate 12 and closing
Close the interaction between the faradic current of the change in circuit coil 34 and produce.As at scanning induction of signal coil
Analog current signal in 124, act on the oscillatory torque on scanning board 22 also include at least one with scanning board 22 around the
First resonant frequency of one shaft vibration produces the frequency component of resonance, another with scanning board 22 around being perpendicular to the of the first axle
Second resonant frequency of two shaft vibrations produces the frequency component of resonance.
Oscillatory torque drives scanning board 22 around orthogonal two shaft vibrations.It is arranged at the top of scanning board 22
Reflecting mirror 32 on face 21 vibrates equally and reflects incoming laser beam 121, produces reflection laser beam with a raster format
123.Especially, scanning board 22 around the first shaft vibration, thus produces the multiple pixels in a line with an altofrequency, and
And scanning board 22 with a low frequency around being perpendicular to the second shaft vibration of the first axle, thus produce some pixel columns.Guan Bi electricity
In map 34, the spatial distribution of the horizontal component in faradic time form and magnetic field 41 determines scanning board 22
Vibration mode.
Image-forming module 126 formats reflection laser beam 123 and generates the scanning light beam 127 of a formatting, thus shape
Become the video image that an imaging is good.According to the present invention, image-forming module 126 can include that lens or a reflecting mirror are to adjust
Joint reflection laser beam 123, thus form the scanning light beam 127 with formatting, the scanning good to obtain an imaging effect
Image.
To end, it should be appreciated that the invention provides a kind of miniscanning instrument with floating scanning board.According to the present invention,
One field magnet formation one is round the non-uniform magnetic field of scanning board, and applies a magnetic force to the magnet being installed on scanning board,
Thus set up a stable equilibrium position for the scanning board in non-uniform magnetic field.Therefore, scanning board floats or is suspended in inequality
In even magnetic field, and without the base portion or substrate physical connection with miniscanning instrument.Miniscanning instrument also includes that one scan is driven
Dynamic induction line, it produces the faradic current of a change in the Guan Bi circuit coil being arranged on scanning board.This change
The magnetic field interaction of faradic current and field magnet, to drive scanning board around a shaft vibration, thus produce in a line
Multiple pixels, and drive scanning board to be perpendicular to the shaft vibration of an above-mentioned axle around another, thus produce multiple pixel column.
According to the present invention, the gimbals structure that couple with scanning board in miniscanning instrument, and scanning board with
Physical connection is not had between the substrate or framework of scanning board.Gimbals structure and with substrate or the physical connection of framework
The frequency of vibration of scanning board and Oscillation Amplitude can be constituted significantly constraint and limit.Therefore, in this type of miniscanning instrument
The scanning of high-resolution to be realized and/or wide-angle is difficult.Directly suspend in a magnetic field a simple scanning board, nothing
Gimbals structure need to be set, without the physical connection between perimeter frame, thus substantially increase scanner and sweep at height
Retouch the scan performance of the aspects such as frequency, high scanning resolution and high scan angles.Miniscanning instrument according to the present invention can
Work under altofrequency and big amplitude driving condition.Miniscanning instrument according to the present invention is with a wide range of applications.Example
As, can use as the one scan reflecting mirror in a high-resolution widescreen projection device according to the miniscanning instrument of the present invention
A laser beam is deflected with a raster format.The most such as, the miniscanning instrument according to the present invention can be as a high-resolution
Scanner in the optical pickocff of the big visual field.
Although combining different embodiment for the present invention and be described with reference to relevant drawings, but this area being general
Logical technical staff can make different amendments by foregoing description based on the present invention.Such as, scanning board can have and such as justifies
The difformities such as shape, ellipse and rectangle.Scanning board can have the technical characteristic for regulating Mass Distribution.This
Outward, can include for verifying concordance between projection picture and incoming video signal according to the laser projection device of the present invention
Sensing and feedback circuit.
Claims (35)
1. a miniscanning instrument, it is characterised in that: described miniscanning instrument includes:
One substrate, it has the cavity that a first type surface and is formed in first type surface；
One scan plate, it is positioned at the cavity of described substrate and has the one first of the first type surface being basically parallel to described substrate
Surface and a second surface relative with first surface；
One magnet, it is loaded on described scanning board；And
One field magnet, it is adjacent to described substrate and is arranged to produce a non-uniform magnetic field in the cavity of described substrate,
This non-uniform magnetic field interacts with described magnet, thinks that described scanning board is formed in the cavity of described substrate
One equilbrium position.
2. miniscanning instrument as claimed in claim 1, it is characterised in that: described miniscanning instrument also includes being arranged at described
A reflecting mirror on the first surface of scanning board.
3. miniscanning instrument as claimed in claim 2, it is characterised in that: described reflecting mirror includes being deposited on described scanning board
First surface on a platinum layer.
4. miniscanning instrument as claimed in claim 2, it is characterised in that: described miniscanning instrument also includes being arranged at described
A Guan Bi circuit coil on scanning board.
5. miniscanning instrument as claimed in claim 4, it is characterised in that: described Guan Bi circuit coil surrounds described magnet.
6. miniscanning instrument as claimed in claim 4, it is characterised in that: it is arranged on the first surface of described scanning board
Described Guan Bi circuit coil surrounds described reflecting mirror.
7. miniscanning instrument as claimed in claim 4, it is characterised in that: described Guan Bi circuit coil is arranged at described scanning
On the second surface of plate.
8. miniscanning instrument as claimed in claim 4, it is characterised in that: described magnet is arranged at the first of described scanning board
On surface and surround described reflecting mirror.
9. miniscanning instrument as claimed in claim 4, it is characterised in that: described magnet is arranged at the second of described scanning board
On surface.
10. miniscanning instrument as claimed in claim 1, it is characterised in that: the cavity in the first type surface of described substrate includes
Being positioned at a described intrabasement through hole, this through hole has the sidewall surrounding described scanning board.
11. miniscanning instrument as claimed in claim 1, it is characterised in that: the cavity in the first type surface of described substrate includes
Be positioned at a described intrabasement depression, this depression have surround a sidewall of described scanning board and be connected with sidewall one
Bottom.
12. miniscanning instrument as claimed in claim 11, it is characterised in that: described miniscanning instrument also includes being formed at institute
State a pedestal of the bottom of the cavity of substrate, and this pedestal has the one end contacted with described scanning board.
13. miniscanning instrument as claimed in claim 1, it is characterised in that: described magnet includes a toroidal magnet.
14. miniscanning instrument as claimed in claim 1, it is characterised in that: described magnet includes some along described scanning board
The magnet of the one discrete setting of girth.
15. miniscanning instrument as claimed in claim 1, it is characterised in that:
Described magnet is arranged to produce a magnetic field, and this magnetic field has the master being basically perpendicular to described substrate in described magnet
One direction on surface；And
The non-uniform magnetic field of the cavity being positioned at described substrate produced by described field magnet has and is perpendicular to described substrate
One first component of first type surface and be parallel to the second component of first type surface of described substrate.
16. miniscanning instrument as claimed in claim 15, it is characterised in that:
The direction of the first component of the non-uniform magnetic field of the cavity being positioned at described substrate produced by described field magnet with by
The magnetic direction that described magnet produces in described magnet is identical；And
It is maximum that first component of the non-uniform magnetic field being positioned at the cavity of described substrate reaches one in a position of cavity
Intensity.
17. miniscanning instrument as claimed in claim 15, it is characterised in that:
The direction of the first component of the non-uniform magnetic field of the cavity being positioned at described substrate produced by described field magnet with by
The magnetic direction that described magnet produces in described magnet is contrary；And
It is minimum that first component of the non-uniform magnetic field being positioned at the cavity of described substrate reaches one in a position of cavity
Intensity.
18. miniscanning instrument as claimed in claim 1, it is characterised in that: it is positioned at described substrate by what described field magnet produced
Cavity in non-uniform magnetic field there is one first component of the first type surface being perpendicular to described substrate and be parallel to described
One second component of the first type surface of substrate.
19. miniscanning instrument as claimed in claim 18, it is characterised in that:
One magnetic north pole of described field magnet than a south magnetic pole of described magnet closer to a magnetic north pole of described magnet；
One south magnetic pole of described field magnet than the magnetic north pole of described magnet closer to the south magnetic pole of described magnet；And
First component of the non-uniform magnetic field being positioned at the cavity of the first type surface of described substrate reaches in a position of cavity
To a minimum strength.
20. miniscanning instrument as claimed in claim 18, it is characterised in that:
One magnetic north pole of described field magnet than a magnetic north pole of described magnet closer to a south magnetic pole of described magnet；
One south magnetic pole of described field magnet than the south magnetic pole of described magnet closer to the magnetic north pole of described magnet；And
First component of the non-uniform magnetic field being positioned at the cavity of the first type surface of described substrate reaches in a position of cavity
To a maximum intensity.
21. 1 kinds of laser projection devices, it is characterised in that: described laser projection device includes:
One miniscanning instrument, comprising:
One substrate, it has a cavity being formed within；
One scan plate, it has a major surfaces and is positioned at the cavity of described substrate；
One magnet, it is loaded on described scanning board；And
One field magnet, it is adjacent to described substrate and is arranged to produce a non-uniform magnetic field, this non-uniform magnetic field with
Described magnet interacts, and thinks that described scanning board forms an equilbrium position in the cavity of described substrate；
One video signal preprocessor, its have one first delivery outlet for exporting a digital pixel color and strength signal and
For exporting one second delivery outlet of a digital pixel scanning signal；
One laser emitting module, it couples with the first delivery outlet of described video signal preprocessor and is arranged to launch incidence
A continuous-wave laser beam on the described scanning board of described miniscanning instrument；And
One scan drives module, and it couples with the second delivery outlet of described video signal preprocessor and is arranged to described micro-
Produce the magnetic field of a change around the described scanning board of type scanner, generate the magnetic dipole of a change with sensing
Interact with the non-uniform magnetic field of described field magnet, thus produce and act on the described of described miniscanning instrument
The moment of one change of scanning board,
Wherein, the described scanning board of described miniscanning instrument is arranged to respond the power of the change acted on described scanning board
Square, thus the continuous-wave laser beam of described laser emitting module is sequentially reflected with a raster format.
22. laser projection devices as claimed in claim 21, it is characterised in that: described miniscanning instrument also includes being arranged at
A Guan Bi circuit coil on described scanning board, wherein, described turntable driving module the magnetic field of the change produced exists
In described Guan Bi circuit coil, sensing generates the faradic current of a change, thus produces the magnetic dipole of change.
23. laser projection devices as claimed in claim 21, it is characterised in that: it is loaded on described in described miniscanning instrument and sweeps
The described magnet retouching plate includes a toroidal magnet.
24. laser projection devices as claimed in claim 21, it is characterised in that: it is loaded on described in described miniscanning instrument and sweeps
The described magnet retouching plate includes the magnet of some discrete settings of girth along described scanning board.
25. laser projection devices as claimed in claim 21, it is characterised in that:
The described magnet of the described scanning board being loaded on described miniscanning instrument produce in described magnet be basically perpendicular to described
One magnetic field of scanning board；And
The non-uniform magnetic field produced by the described field magnet of described miniscanning instrument has and is perpendicular to the one the of described scanning board
One component and the second component being parallel to described scanning board.
26. laser projection devices as claimed in claim 25, it is characterised in that:
By the direction of the first component of the non-uniform magnetic field of the described field magnet generation of described miniscanning instrument and by described magnetic
The magnetic direction that body produces in described magnet is identical；And
It is maximum that first component of the non-uniform magnetic field being positioned at the cavity of described substrate reaches one in a position of cavity
Intensity.
27. laser projection devices as claimed in claim 25, it is characterised in that:
By the direction of the first component of the non-uniform magnetic field of the described field magnet generation of described miniscanning instrument and by described magnetic
The magnetic direction that body produces in described magnet is contrary；And
It is minimum that first component of the non-uniform magnetic field being positioned at the cavity of described substrate reaches one in a position of cavity
Intensity.
28. laser projection devices as claimed in claim 21, it is characterised in that: by the described field magnetic of described miniscanning instrument
The non-uniform magnetic field of the cavity being positioned at described substrate that body produces has and is perpendicular to one first point of described scanning board
Measure and be parallel to a second component of described scanning board.
29. laser projection devices as claimed in claim 28, it is characterised in that:
One magnetic north pole of the described field magnet of described miniscanning instrument than a south magnetic pole of described magnet closer to described magnetic
One magnetic north pole of body；
One south magnetic pole of the described field magnet of described miniscanning instrument than the magnetic north pole of described magnet closer to described magnet
South magnetic pole；And
It is positioned at first component of non-uniform magnetic field of the cavity of the described substrate of described miniscanning instrument close to cavity
A position reach a minimum strength.
30. laser projection devices as claimed in claim 28, it is characterised in that:
One magnetic north pole of the described field magnet of described miniscanning instrument than a magnetic north pole of described magnet closer to described magnetic
One south magnetic pole of body；
One south magnetic pole of the described field magnet of described miniscanning instrument than the south magnetic pole of described magnet closer to described magnet
Magnetic north pole；And
It is positioned at first component of non-uniform magnetic field of the cavity of the described substrate of described miniscanning instrument at the one of cavity
Position reaches a maximum intensity.
31. laser projection devices as claimed in claim 21, it is characterised in that: described laser emitting module includes:
One laser driver, it couples with the first delivery outlet of described video signal preprocessor and is arranged to produce a simulation
Drive signal；And
One laser module, it couples with described laser driver and is arranged to response simulation and drives signal to launch continuous wave
Laser beam.
32. laser projection devices as claimed in claim 31, it is characterised in that: described laser module includes:
Some laser tubes, it couples with described laser driver and is arranged to response simulation and drives signal some sharp to produce
Light beam；And
One optical element, it is arranged to combine described some laser beams and incides described in described miniscanning instrument to produce
Continuous-wave laser beam on scanning board.
33. laser projection devices as claimed in claim 21, it is characterised in that: described turntable driving module includes:
Scan driver, it couples with the second delivery outlet of described video signal preprocessor and is arranged to produce a simulation
Current signal；And one scan induction coil, it couples with described scanner driver, and is arranged on described micro-
Around type scanner, and it is arranged to the analog current signal responding described scanner driver with described micro-
The surrounding of the described scanning board of type scanner produces the magnetic field of change.
34. laser projection devices as claimed in claim 33, it is characterised in that:
One first resonant frequency and one first that the described scanning board of described miniscanning instrument has around one first shaft vibration increases
Width coefficient and around one second resonant frequency of one second shaft vibration and the one second amplification system being perpendicular to the first axle
Number, the second resonant frequency is different from the first resonant frequency；And
The analog current signal produced by described scanner driver has and one first frequency of the first resonant frequency generation resonance
Rate component and the second frequency component with the second resonant frequency generation resonance.
35. laser projection devices as claimed in claim 34, it is characterised in that: the described scanning board of described miniscanning instrument
It is arranged to reflect the continuous-wave laser beam of described laser emitting module, responds described scanning board at the first resonant frequency
Under around the vibration of the first axle, sequentially to produce some pixels in a pixel column, and respond described scanning board second
Around the vibration of the second axle under resonant frequency, sequentially to produce some pixel columns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610519125.4A CN105929529A (en) | 2016-07-05 | 2016-07-05 | Mini scanner with floating scanning plate and laser projecting device employing same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610519125.4A CN105929529A (en) | 2016-07-05 | 2016-07-05 | Mini scanner with floating scanning plate and laser projecting device employing same |
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| Publication Number | Publication Date |
|---|---|
| CN105929529A true CN105929529A (en) | 2016-09-07 |
Family
ID=56829930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610519125.4A Pending CN105929529A (en) | 2016-07-05 | 2016-07-05 | Mini scanner with floating scanning plate and laser projecting device employing same |
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